JP2001311657A - Method for evaluating surface acoustic wave sonic speed - Google Patents
Method for evaluating surface acoustic wave sonic speedInfo
- Publication number
- JP2001311657A JP2001311657A JP2000128311A JP2000128311A JP2001311657A JP 2001311657 A JP2001311657 A JP 2001311657A JP 2000128311 A JP2000128311 A JP 2000128311A JP 2000128311 A JP2000128311 A JP 2000128311A JP 2001311657 A JP2001311657 A JP 2001311657A
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- JP
- Japan
- Prior art keywords
- comb
- piezoelectric
- measured
- substrate
- piezoelectric substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、圧電体基板表面を
伝搬する表面弾性波の特性評価に関する。[0001] 1. Field of the Invention [0002] The present invention relates to the evaluation of characteristics of surface acoustic waves propagating on the surface of a piezoelectric substrate.
【０００２】[0002]
【従来の技術】従来の圧電性基板の表面弾性波音速評価
法には、大別して破壊的と非破壊的の２種類がある。前
者は被測定圧電性基板上に櫛形電極を設けフィルタや共
振器を作製し、デバイスの周波数特性から音速を評価し
ている。後者は超音波顕微鏡法を代表に、被測定圧電性
基板に対し測定治具を接触または非接触の状態で音速を
評価している。後者に属する１種の簡易型の表面弾性波
音速評価法として、非圧電性基板の上に複数個の櫛形電
極を形成し、非測定圧電性基板の表面を、櫛形電極が形
成されている非圧電性基板の面に密着させるか、また
は、近接に対向させて、被測定圧電性基板と非圧電性基
板上の櫛形電極によりフィルタなどを構成し、入力櫛形
電極に電気信号を与え、出力櫛形電極から出力した電気
信号を検知し、検知した電気信号を解析することにより
被測定圧電性基板の表面弾性波音速を評価する方法が提
案、使用されてきた。2. Description of the Related Art Conventional methods for evaluating the surface acoustic wave velocity of a piezoelectric substrate are roughly classified into two types: destructive and nondestructive. In the former case, a comb-shaped electrode is provided on a piezoelectric substrate to be measured, a filter or a resonator is manufactured, and the sound speed is evaluated from the frequency characteristics of the device. The latter evaluates the speed of sound with a measuring jig in contact with or non-contact with a piezoelectric substrate to be measured, typically by ultrasonic microscopy. As one type of simple surface acoustic wave velocity evaluation method belonging to the latter, a plurality of comb-shaped electrodes are formed on a non-piezoelectric substrate, and the surface of the non-measured piezoelectric substrate is formed on a non-piezoelectric substrate with a comb-shaped electrode formed thereon. A filter or the like is composed of a piezoelectric substrate to be measured and a comb-shaped electrode on a non-piezoelectric substrate, which are in close contact with or close to the surface of the piezoelectric substrate. A method of detecting the electric signal output from the electrode and analyzing the detected electric signal to evaluate the surface acoustic wave velocity of the piezoelectric substrate to be measured has been proposed and used.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、このよ
うな測定方法では、被測定圧電基板の表面を非圧電性基
板上に密着させた場合、非圧電性基板上に形成されてい
る櫛形電極によって被測定圧電性基板の表面が傷付けら
れる恐れがあり、また、このようにして、見かけ上では
被測定圧電性基板の表面と非圧電性基板上の櫛形電極と
は接触していても、ミクロレベルでは被測定圧電性基板
の表面と非圧電性基板上の櫛形電極とは必ずしも均一に
接触していないため、出力櫛形電極から安定した電気信
号、すなわち滑らかな測定結果が得られないのが問題と
なっている。また、被測定圧電性基板の表面を非圧電性
基板に近接に対向させた場合、すなわち被測定圧電性基
板の表面と非圧電性基板上の櫛形電極の間にエアギャッ
プを形成させた場合、エアギャップの存在により出力櫛
形電極からの電気信号が弱くなり、測定結果の解像度が
落ちてしまうため、結果として音速の評価精度が悪くな
る。さらに、このエアギャップを制御するために、精密
なセンサーおよび複雑な制御システムを測定装置に備え
付ける必要がある。また、非圧電性基板上に複数個の櫛
形電極を形成して、これらの櫛形電極と被測定圧電性基
板によりフィルタを構成して、フィルタの特性を測定す
る場合、入力櫛形電極に入力する電気信号の周波数が高
いと、これらの櫛形電極の間で電磁結合が発生し、その
ため、フィルタの通過特性が劣化してしまい、音速の評
価精度が悪くなる。However, in such a measuring method, when the surface of the piezoelectric substrate to be measured is brought into close contact with the non-piezoelectric substrate, it is covered by the comb-shaped electrodes formed on the non-piezoelectric substrate. The surface of the measured piezoelectric substrate may be damaged, and in this way, even if the surface of the measured piezoelectric substrate and the comb-shaped electrode on the non-piezoelectric substrate are apparently in contact, Since the surface of the piezoelectric substrate to be measured and the comb-shaped electrode on the non-piezoelectric substrate are not always in uniform contact, there is a problem that a stable electric signal, that is, a smooth measurement result cannot be obtained from the output comb-shaped electrode. ing. Also, when the surface of the piezoelectric substrate to be measured is closely opposed to the non-piezoelectric substrate, that is, when an air gap is formed between the surface of the piezoelectric substrate to be measured and the comb-shaped electrode on the non-piezoelectric substrate, The presence of the air gap weakens the electric signal from the output comb-shaped electrode, and lowers the resolution of the measurement result. As a result, the accuracy of the evaluation of the speed of sound deteriorates. Furthermore, in order to control this air gap, it is necessary to equip the measuring device with precise sensors and complicated control systems. Also, when a plurality of comb-shaped electrodes are formed on a non-piezoelectric substrate and a filter is formed by these comb-shaped electrodes and the piezoelectric substrate to be measured, when measuring the characteristics of the filter, the electric power input to the input comb-shaped electrode is measured. If the frequency of the signal is high, electromagnetic coupling occurs between these comb-shaped electrodes, so that the pass characteristic of the filter is deteriorated and the accuracy of evaluation of the speed of sound is deteriorated.
【０００４】本発明は上記事情を鑑み、被測定圧電性基
板の表面に損傷を与えず、簡単な装置構成で、迅速に被
測定圧電性基板の表面弾性波音速を評価する方法を提供
することを目的とする。The present invention has been made in view of the above circumstances, and provides a method for quickly evaluating the surface acoustic wave velocity of a piezoelectric substrate to be measured with a simple device configuration without damaging the surface of the piezoelectric substrate to be measured. With the goal.
【０００５】[0005]
【課題を解決するための手段】上記目的を達成する本発
明の表面弾性波音速評価法は、非圧電性かつ非導電性基
板の上に複数個の櫛形電極を形成し、前記櫛形電極を有
する前記非圧電性非導電性基板の面を被測定の圧電性基
板の表面に向き合わせ、前記非圧電性非導電性基板と前
記被測定圧電性基板の間に非導電性の液体を介在させ、
前記非圧電性非導電性基板およびその上に形成される櫛
形電極と、前記被測定圧電性基板の表面を非接触状態で
位置させ、前記櫛形電極の電気的な特性から前記被測定
圧電性基板の表面弾性波の音速を評価することを特徴と
する。また、前記非圧電性非導電性基板上に形成される
櫛形電極が１個であり、前記櫛形電極の電気的反射特性
から前記被測定圧電性基板の表面弾性波の音速を評価す
ることを特徴とする表面弾性波音速評価法が好ましい。
さらに、前記非圧電性非導電性基板上に形成される櫛形
電極がスプリット（Ｓｐｌｉｔ）電極構造（ダブル電極
構造ともいう）、即ち、１電極周期構造上で、電極の幅
と電極間の間隔が同じであり、ともに電極周期長の８分
の１であることを特徴とする請求項２に記載される表面
弾性波音速評価法が最適である。被測定圧電性基板と非
圧電性非導電性基板との間に介在させる非導電性液体と
しては、超純水が最適であるが、エタノール、またはシ
リコンオイルなども使用できる。According to the present invention, there is provided a method for evaluating a surface acoustic wave speed of sound, comprising the steps of: forming a plurality of comb-shaped electrodes on a non-piezoelectric and non-conductive substrate; The surface of the non-piezoelectric non-conductive substrate faces the surface of the piezoelectric substrate to be measured, and a non-conductive liquid is interposed between the non-piezoelectric non-conductive substrate and the piezoelectric substrate to be measured.
The non-piezoelectric non-conductive substrate and the comb-shaped electrode formed thereon, and the surface of the piezoelectric substrate to be measured are positioned in a non-contact state, and the electrical characteristics of the comb-shaped electrode determine the piezoelectric substrate to be measured. Is characterized by evaluating the sound velocity of surface acoustic waves. Further, one comb-shaped electrode is formed on the non-piezoelectric non-conductive substrate, and the sound velocity of the surface acoustic wave of the piezoelectric substrate to be measured is evaluated from the electric reflection characteristic of the comb-shaped electrode. Is preferred.
Further, the comb-shaped electrode formed on the non-piezoelectric non-conductive substrate has a split electrode structure (also referred to as a double electrode structure). The surface acoustic wave acoustic velocity evaluation method according to claim 2 is the same, and both are 1/8 of the electrode period length. As the non-conductive liquid interposed between the piezoelectric substrate to be measured and the non-piezoelectric non-conductive substrate, ultrapure water is optimal, but ethanol or silicon oil can also be used.
【０００６】[0006]
【発明の実施の形態】以下、 図１を用いて本発明の評
価法の構成を詳しく説明する。図１が本発明の評価法の
概略構成図である。図１に示すように本発明の評価法は
主に非圧電性非導電性基板１、被測定圧電性基板２、櫛
形電極３と非導電性液体４および計測装置５により構成
される。具体的に説明すると、非圧電性非導電性基板１
の上に櫛形電極３が形成され、被測定圧電性基板２の表
面を非圧電性非導電性基板１の電極側の面に向き合わ
せ、被測定圧電性基板の表面と非圧電性非導電性基板１
の間に非導電性液体４を介在させ、櫛形電極３を計測装
置５に接続させるという構成である。本発明の評価法の
構成上では図１に示すように、非圧電性非導電性基板１
上の櫛形電極３と被測定圧電性基板２とは非接触状態で
あるが、櫛形電極３からの電界により被測定圧電性基板
２の表面に表面弾性波を励振することができる。従っ
て、本発明の評価法は、被測定圧電性基板２の表面を傷
つけず、従来条件同様に音速を評価することができる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The construction of the evaluation method of the present invention will be described below in detail with reference to FIG. FIG. 1 is a schematic configuration diagram of the evaluation method of the present invention. As shown in FIG. 1, the evaluation method of the present invention mainly includes a non-piezoelectric non-conductive substrate 1, a piezoelectric substrate to be measured 2, a comb-shaped electrode 3, a non-conductive liquid 4, and a measuring device 5. More specifically, the non-piezoelectric non-conductive substrate 1
A comb-shaped electrode 3 is formed on the substrate, and the surface of the piezoelectric substrate 2 to be measured is opposed to the surface of the non-piezoelectric non-conductive substrate 1 on the electrode side. Substrate 1
A non-conductive liquid 4 is interposed therebetween, and the comb-shaped electrode 3 is connected to the measuring device 5. In the configuration of the evaluation method of the present invention, as shown in FIG.
Although the upper comb-shaped electrode 3 is not in contact with the piezoelectric substrate 2 to be measured, a surface acoustic wave can be excited on the surface of the piezoelectric substrate 2 to be measured by the electric field from the comb-shaped electrode 3. Therefore, according to the evaluation method of the present invention, the sound velocity can be evaluated under the same condition as the conventional condition without damaging the surface of the piezoelectric substrate 2 to be measured.
【０００７】さらに、非圧電性非導電性基板１の上に１
個のみの櫛形電極３を形成し、同櫛形電極３の電気的反
射特性を計測装置５により測定することにより被測定圧
電性基板２の表面弾性波音速を評価することができる。
一般に、１個のみの櫛形電極３の電気的反射特性が図２
に示すようなものである。図２に示す反射係数が最小値
となるところの周波数ｆ0 が櫛形電極３の周波長λと被
測定圧電性基板の表面弾性波音速ｖと、近似的にｖ=ｆ0
・λの関係を有する。この関係を利用すれば、表面弾性
波の音速を評価することができる。また、非圧電性非導
電性基板１上に１個のみの櫛形電極３を形成して、櫛形
電極３の電気的反射特性より音速を評価する場合は、非
圧電性非導電性基板１上に複数の櫛形電極３を形成し
て、それらの櫛形電極３により構成されるフィルタの特
性より音速を評価する場合に比べ、櫛形電極３同士の直
接的な電磁結合問題が存在しないため、よりきれいな測
定結果が得られるわけである。よって、非圧電性非導電
性基板１上に１個のみの櫛形電極３を形成して櫛形電極
３の電気的反射特性より音速を評価する本発明の評価法
は好適である。[0007] In addition, one non-piezoelectric non-conductive substrate 1
The surface acoustic wave velocity of the piezoelectric substrate 2 to be measured can be evaluated by forming only the comb electrodes 3 and measuring the electric reflection characteristics of the comb electrodes 3 with the measuring device 5.
Generally, the electric reflection characteristic of only one comb-shaped electrode 3 is shown in FIG.
It is as shown in. The frequency f 0 at which the reflection coefficient becomes the minimum value shown in FIG. 2 is the peripheral wavelength λ of the comb-shaped electrode 3 and the surface acoustic wave velocity v of the piezoelectric substrate to be measured, approximately v = f 0
Has a relationship of λ. By utilizing this relationship, the sound velocity of the surface acoustic wave can be evaluated. When only one comb-shaped electrode 3 is formed on the non-piezoelectric non-conductive substrate 1 and the sound velocity is evaluated based on the electric reflection characteristics of the comb-shaped electrode 3, the non-piezoelectric non-conductive substrate 1 Compared to the case where a plurality of comb-shaped electrodes 3 are formed and the speed of sound is evaluated based on the characteristics of the filter constituted by the comb-shaped electrodes 3, there is no direct electromagnetic coupling problem between the comb-shaped electrodes 3, so that a cleaner measurement is possible. The result is obtained. Therefore, the evaluation method of the present invention in which only one comb-shaped electrode 3 is formed on the non-piezoelectric non-conductive substrate 1 and the sound velocity is evaluated based on the electric reflection characteristics of the comb-shaped electrode 3 is preferable.
【０００８】また、非圧電性非導電性基板１上に形成す
る櫛形電極３の構造はスプリット（ｓｐｌｉｔ）電極構
造（ダブル電極構造ともいう）、即ち、図１に示すよう
に、櫛形電極３の信号電極指３ａとグランド電極指３ｂ
がそれぞれ２本ずつ交互に繰り返し、１電極周期長の電
極構造上で、電極指の幅と電極間の間隔が同じであり、
しかも、ともに電極周期長の８分の１であるという構造
であれば、櫛形電極３の内部において各電極指での音響
的な反射が互いに相殺してしまい、全体的に、櫛形電極
３の内部で音響的な反射が発生しないという特徴がある
ので、理論的に図２に示す櫛形電極３の電気的反射係数
が最小値となるところの周波数ｆ0 が電極周期長λと表
面弾性波音速ｖと、精密にｖ=ｆ0・λの関係を有するた
め、より高精度に音速評価することができるわけであ
る。従って、非圧電性非導電性基板１上に形成する櫛形
電極３が１個のみであり、櫛形電極３の構造がスプリッ
ト（Ｓｐｌｉｔ）電極構造（ダブル電極構造）である本
発明の評価法は最適である。Further, the structure of the comb-shaped electrode 3 formed on the non-piezoelectric non-conductive substrate 1 is a split electrode structure (also called a double electrode structure), that is, as shown in FIG. Signal electrode finger 3a and ground electrode finger 3b
Are alternately repeated two by two, and the width of the electrode finger and the interval between the electrodes are the same on the electrode structure of one electrode cycle length,
In addition, if both of them have a structure that is one eighth of the electrode period length, the acoustic reflections of the respective electrode fingers in the comb-shaped electrode 3 cancel each other out, and as a whole, the inside of the comb-shaped electrode 3 Therefore, the frequency f 0 at which the electrical reflection coefficient of the comb-shaped electrode 3 shown in FIG. 2 is theoretically the minimum value is the electrode period length λ and the surface acoustic wave velocity v Therefore, the sound velocity can be evaluated with higher accuracy because of the precise relation of v = f 0 · λ. Therefore, the evaluation method of the present invention in which only one comb electrode 3 is formed on the non-piezoelectric non-conductive substrate 1 and the structure of the comb electrode 3 is a split electrode structure (double electrode structure) is optimal. It is.
【０００９】[0009]
【実施例】以下、実施例を示して本発明を具体的に説明
する。図３は、本実施例の表面弾性波音速評価法の概略
構成図であり、（ａ）上面図と、（ｂ）櫛形電極部分の
断面図である。本実施例では、非圧電性非導電性基板と
して４インチガラスウエハ１１を、被測定の圧電性基板
として（０°、１４０°、２４°）方位のランガサイト
３インチウエハ１２を、非導電性液体として超純水１４
を使用した。櫛形電極の材料がＡｌであった。電極膜が
スパッタリング法によりガラスウエハ上に成膜され、膜
厚が２０００Åであった。櫛形電極の構造がスプリット
（Ｓｐｌｉｔ）電極構造、すなわちダブル電極１３であ
り、フォトリソグラフィ工程により形成された。電極の
周期長が４０μｍとした。また、電極の対数と交差幅が
それぞれ５０対と２ｍｍとした。計測装置としてネット
ワークアナライザー１５を使用し、ダブル電極１３とネ
ットワークアナライザー１５との接続にはプローバ１６
としてカスケード社のマイクロプローバを使用した。以
上の構成でネットワークアナライザー１５により測定し
たスプリット電極の反射係数の結果を図４に示す。本発
明の効果を確認するために、本実施例では、比較例とし
て被測定圧電性基板表面を非圧電性非導電性基板上の電
極に密着させるという従来の方法で同様な測定を行っ
た。具体的に説明すると、４インチガラスウエハと３イ
ンチランガサイトウエハとの間に液体を入れず、直接に
ランガサイトウエハの表面をガラスウエハ上の電極に密
着させる状態でスプリット電極の電気的反射特性を測定
した。その測定結果を図５に示す。図４と図５に示すよ
うに、従来方法（比較例）のジグザグのような測定結果
と対照的に、本発明の評価法の測定結果が非常に滑らか
である。また、測定終了後、本発明の評価法と従来方法
（比較例）ともに顕微鏡を用いてランガサイトウエハの
表面状態を調べた。その結果、本発明の評価法の場合は
ランガサイトウエハ表面に傷跡が一切見られないのに対
して、従来方法（比較例）の場合はランガサイトウエハ
表面に微小なすり傷が見られた。従って、本発明の評価
法は従来方法より優れている。The present invention will be specifically described below with reference to examples. 3A and 3B are schematic configuration diagrams of the surface acoustic wave acoustic velocity evaluation method of the present embodiment, in which FIG. 3A is a top view and FIG. 3B is a cross-sectional view of a comb-shaped electrode portion. In this embodiment, a 4-inch glass wafer 11 is used as a non-piezoelectric non-conductive substrate, and a Langasite 3-inch wafer 12 of (0 °, 140 °, 24 °) orientation is used as a non-piezoelectric non-conductive substrate. Ultrapure water 14 as liquid
It was used. The material of the comb electrode was Al. An electrode film was formed on a glass wafer by a sputtering method, and the film thickness was 2000 °. The structure of the comb-shaped electrode is a split electrode structure, that is, a double electrode 13, and was formed by a photolithography process. The cycle length of the electrode was 40 μm. The number of electrodes and the width of intersection were set to 50 pairs and 2 mm, respectively. A network analyzer 15 is used as a measuring device, and a prober 16 is used to connect the double electrode 13 and the network analyzer 15.
Was used as a micro prober of Cascade. FIG. 4 shows the result of the reflection coefficient of the split electrode measured by the network analyzer 15 with the above configuration. In order to confirm the effects of the present invention, in the present embodiment, as a comparative example, a similar measurement was performed by a conventional method in which the surface of a piezoelectric substrate to be measured was brought into close contact with an electrode on a non-piezoelectric non-conductive substrate. More specifically, the electric reflection characteristics of the split electrode are set in a state where the liquid is not put between the 4-inch glass wafer and the 3-inch langasite wafer and the surface of the langasite wafer is brought into close contact with the electrode on the glass wafer. Was measured. FIG. 5 shows the measurement results. As shown in FIGS. 4 and 5, in contrast to the zigzag measurement result of the conventional method (comparative example), the measurement result of the evaluation method of the present invention is very smooth. After the measurement was completed, the surface state of the langasite wafer was examined using a microscope in both the evaluation method of the present invention and the conventional method (Comparative Example). As a result, in the case of the evaluation method of the present invention, no scar was observed on the surface of the langasite wafer, whereas in the case of the conventional method (comparative example), minute scratches were observed on the surface of the langasite wafer. Therefore, the evaluation method of the present invention is superior to the conventional method.
【００１０】[0010]
【発明の効果】以上説明したように、本発明の表面弾性
波音速評価法は非測定圧電性基板に損傷を与えず、簡単
な装置構成でかつ迅速に被測定圧電性基板の表面弾性波
音速を評価することができるので、圧電ウエハメーカー
のウエハ品質改善および管理に大きな効果をもたらすこ
とが期待できる。As described above, the surface acoustic wave sound velocity evaluation method of the present invention does not damage the non-measured piezoelectric substrate, has a simple apparatus configuration, and quickly performs the surface acoustic wave sound velocity measurement of the measured piezoelectric substrate. Therefore, it can be expected that a great effect will be brought about for the improvement and management of the wafer quality by the piezoelectric wafer manufacturer.
【図１】 本発明の表面弾性波音速評価法の概略構成図
であり、（ａ）上面図と、（ｂ）櫛形電極部分の断面図
である。FIG. 1 is a schematic configuration diagram of a surface acoustic wave acoustic velocity evaluation method of the present invention, in which (a) is a top view and (b) is a cross-sectional view of a comb-shaped electrode portion.
【図２】 櫛形電極の電気的反射特性を示すグラフであ
る。FIG. 2 is a graph showing electric reflection characteristics of a comb-shaped electrode.
【図３】 本実施例の表面弾性波音速評価法の概略構成
図であり、（ａ）上面図と、（ｂ）櫛形電極部分の断面
図である。FIG. 3 is a schematic configuration diagram of a surface acoustic wave acoustic velocity evaluation method according to the present embodiment, in which (a) is a top view and (b) is a cross-sectional view of a comb-shaped electrode portion.
【図４】 本発明の表面弾性波音速評価法の測定結果を
示すグラフである。FIG. 4 is a graph showing measurement results of the surface acoustic wave sound velocity evaluation method of the present invention.
【図５】 従来の表面弾性波音速評価法の測定結果を示
すグラフである。FIG. 5 is a graph showing a measurement result of a conventional surface acoustic wave sound velocity evaluation method.
１…非圧電性非導電性基板、２…被測定圧電性基板、３
…櫛形電極、３ａ…櫛形電極の信号電極指、３ｂ…櫛形
電極のグランド電極指、４…非導電性液体、５…計測装
置、１１…４インチガラスウエハ、１２…３インチラン
ガサイトウエハ、１３…ダブル電極、１４…超純水、１
５…ネットワークアナライザー、１６…プローバ1: Non-piezoelectric non-conductive substrate, 2: Piezoelectric substrate to be measured, 3
.. Comb electrodes, 3a Comb electrode signal electrode fingers, 3b Comb electrode ground electrode fingers, 4 non-conductive liquid, 5 measuring instrument, 11 4 inch glass wafer, 12 3 inch Langasite wafer, 13 ... double electrode, 14 ... ultrapure water, 1
5 Network analyzer, 16 Prober
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 2G064 AA12 AB05 BA25 BD02 BD58 5J097 AA32 AA37 HB08 KK08 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G064 AA12 AB05 BA25 BD02 BD58 5J097 AA32 AA37 HB08 KK08
Claims (3)
の櫛形電極を形成し、前記櫛形電極を有する前記非圧電
性非導電性基板の面を被測定の圧電性基板の表面に向き
合わせ、前記非圧電性非導電性基板と前記被測定圧電性
基板の間に非導電性の液体を介在させ、前記非圧電性非
導電性基板およびその上に形成される櫛形電極と、前記
被測定圧電性基板の表面を非接触状態で位置させ、前記
櫛形電極の電気的な特性から前記被測定圧電性基板の表
面弾性波の音速を評価することを特徴とする表面弾性波
音速評価法。A non-piezoelectric and non-conductive substrate is provided with a plurality of comb-shaped electrodes formed on a non-piezoelectric and non-conductive substrate. Facing, interposing a non-conductive liquid between the non-piezoelectric non-conductive substrate and the piezoelectric substrate to be measured, the non-piezoelectric non-conductive substrate and a comb-shaped electrode formed thereon, A method for evaluating the acoustic velocity of a surface acoustic wave, comprising: positioning a surface of a piezoelectric substrate to be measured in a non-contact state, and evaluating a sound velocity of a surface acoustic wave of the piezoelectric substrate to be measured from electrical characteristics of the comb-shaped electrode. .
る櫛形電極が１個であり、前記櫛形電極の電気的反射特
性から前記被測定圧電性基板の表面弾性波の音速を評価
することを特徴とする請求項１に記載される表面弾性波
音速評価法。2. The method according to claim 1, wherein a single comb-shaped electrode is formed on the non-piezoelectric non-conductive substrate, and a sound velocity of a surface acoustic wave of the piezoelectric substrate to be measured is evaluated based on an electrical reflection characteristic of the comb-shaped electrode. The method for evaluating the acoustic velocity of surface acoustic waves according to claim 1, wherein:
る櫛形電極がスプリット電極構造であることを特徴とす
る請求項２に記載される表面弾性波音速評価法。3. The surface acoustic wave acoustic velocity evaluation method according to claim 2, wherein the comb-shaped electrode formed on the non-piezoelectric non-conductive substrate has a split electrode structure.
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