JP2001308458A5 - - Google Patents

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Publication number
JP2001308458A5
JP2001308458A5 JP2000127401A JP2000127401A JP2001308458A5 JP 2001308458 A5 JP2001308458 A5 JP 2001308458A5 JP 2000127401 A JP2000127401 A JP 2000127401A JP 2000127401 A JP2000127401 A JP 2000127401A JP 2001308458 A5 JP2001308458 A5 JP 2001308458A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2000127401A
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Japanese (ja)
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JP2001308458A (ja
JP4608731B2 (ja
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Priority to JP2000127401A priority Critical patent/JP4608731B2/ja
Priority claimed from JP2000127401A external-priority patent/JP4608731B2/ja
Publication of JP2001308458A publication Critical patent/JP2001308458A/ja
Publication of JP2001308458A5 publication Critical patent/JP2001308458A5/ja
Application granted granted Critical
Publication of JP4608731B2 publication Critical patent/JP4608731B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000127401A 2000-04-27 2000-04-27 半導体レーザの製造方法 Expired - Fee Related JP4608731B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000127401A JP4608731B2 (ja) 2000-04-27 2000-04-27 半導体レーザの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000127401A JP4608731B2 (ja) 2000-04-27 2000-04-27 半導体レーザの製造方法

Publications (3)

Publication Number Publication Date
JP2001308458A JP2001308458A (ja) 2001-11-02
JP2001308458A5 true JP2001308458A5 ( ) 2006-12-28
JP4608731B2 JP4608731B2 (ja) 2011-01-12

Family

ID=18636999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000127401A Expired - Fee Related JP4608731B2 (ja) 2000-04-27 2000-04-27 半導体レーザの製造方法

Country Status (1)

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JP (1) JP4608731B2 ( )

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4936598B2 (ja) * 2001-02-15 2012-05-23 シャープ株式会社 窒化物半導体発光素子とその製法
KR100580623B1 (ko) 2003-08-04 2006-05-16 삼성전자주식회사 초격자 구조의 반도체층을 갖는 반도체 소자 및 그 제조방법
US7217947B2 (en) * 2004-08-06 2007-05-15 Northrop Grumman Corporation Semiconductor light source and method of making
US20060284163A1 (en) * 2005-06-15 2006-12-21 Bour David P Single ELOG growth transverse p-n junction nitride semiconductor laser
JP4802314B2 (ja) * 2006-01-24 2011-10-26 シャープ株式会社 窒化物半導体発光素子とその製造方法
WO2007132425A1 (en) * 2006-05-17 2007-11-22 Nxp B.V. Quantum cascade surface emitting semiconductor laser device and method of manufacturing a semiconductor laser device
JP5918611B2 (ja) * 2012-04-17 2016-05-18 日本電信電話株式会社 光半導体素子
KR101743026B1 (ko) * 2016-04-26 2017-06-15 광주과학기술원 자외선 발광 다이오드 및 이의 제조방법

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62269369A (ja) * 1986-05-16 1987-11-21 Mitsubishi Cable Ind Ltd 半導体発光装置
DE4232860A1 (de) * 1992-09-30 1994-03-31 Siemens Ag Halbleiterlaser mit einer zwischen zwei Resonatorspiegeln angeordneten aktiven Schicht und Verfahren zu seiner Herstellung
US6265289B1 (en) * 1998-06-10 2001-07-24 North Carolina State University Methods of fabricating gallium nitride semiconductor layers by lateral growth from sidewalls into trenches, and gallium nitride semiconductor structures fabricated thereby

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