JP2001307988A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2001307988A5 JP2001307988A5 JP2000123143A JP2000123143A JP2001307988A5 JP 2001307988 A5 JP2001307988 A5 JP 2001307988A5 JP 2000123143 A JP2000123143 A JP 2000123143A JP 2000123143 A JP2000123143 A JP 2000123143A JP 2001307988 A5 JP2001307988 A5 JP 2001307988A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000123143A JP2001307988A (en) | 2000-04-24 | 2000-04-24 | Illumination device and illumination method, and aligner with the illumination device and device manufacturing method by means of them |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000123143A JP2001307988A (en) | 2000-04-24 | 2000-04-24 | Illumination device and illumination method, and aligner with the illumination device and device manufacturing method by means of them |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001307988A JP2001307988A (en) | 2001-11-02 |
| JP2001307988A5 true JP2001307988A5 (en) | 2007-06-14 |
Family
ID=18633504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000123143A Withdrawn JP2001307988A (en) | 2000-04-24 | 2000-04-24 | Illumination device and illumination method, and aligner with the illumination device and device manufacturing method by means of them |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001307988A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007333965A (en) * | 2006-06-14 | 2007-12-27 | Adtec Engineeng Co Ltd | Illumination device for exposure |
| JP5184767B2 (en) * | 2006-09-04 | 2013-04-17 | 株式会社日立ハイテクノロジーズ | Exposure equipment |
| JP4955436B2 (en) * | 2007-03-26 | 2012-06-20 | フェニックス電機株式会社 | Light source device and exposure apparatus using the same |
| CN108897198A (en) * | 2018-08-31 | 2018-11-27 | 武汉华星光电技术有限公司 | The replacing light source system and exposure machine of exposure machine |
-
2000
- 2000-04-24 JP JP2000123143A patent/JP2001307988A/en not_active Withdrawn