JP2001304827A - Sectional shape measuring apparatus and sectional shape measuring method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure the sectional shape regardless of the shape of an object at high speed and with high accuracy. SOLUTION: This sectional shape measuring apparatus and measuring method is characterized by including a laser slit beam projecting means 4 for applying laser slit beam 1 to the object 2, a wide area measuring image pickup means 7 having an image pickup range capable of grasping the shape of the object 2, an image pickup means 9 for high-accuracy measurement disposed in the same direction as the wide range measuring image pickup means 7 seen from the laser slit beam projecting means 4 to locally image the object 2, a moving means 13 for relatively moving the object 2 to the laser slit beam projecting means 4, the wide range measuring image pickup means 7, and the image pickup means 9 for high-accuracy measurement, and an operating means 17 for operating the sectional shape data from the image pickup data 42 imaged by the image pickup means 9 for high-accuracy measurement.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sectional shape measuring device and a sectional shape measuring method.

[0002]

2. Description of the Related Art It is necessary for various products to measure the cross-sectional shape of an object with high accuracy. For example, for roll molded products such as automobile moldings, door frames, seat rails, etc., inspection of the cross-sectional shape is important for quality control.
In these cross-sectional shape inspections, the measurement cross section was cut, and the shape was enlarged with a projector to perform the inspection. In this method, the shape is distorted when the cross section is cut, and an accurate cross-sectional shape cannot be inspected. In addition, when performing a plurality of cross-sectional inspections, there is a problem that it takes time to cut.

[0003] In order to solve these problems, a non-contact type shape measuring apparatus can perform a shape inspection without cutting a section to be inspected, so that an arbitrary section can be easily inspected without shape distortion.

As a cross-sectional shape measuring device for measuring the cross-sectional shape of an object in a non-contact manner, a light cutting method represented by a combination of a laser slit projector for irradiating the object with a slit-shaped laser beam and an image pickup device is often used. ing. However, in this method, for example, when an image sensor is used, the measurement resolution is determined by the resolution of the image sensor = (field range) / (number of pixels). In the case of, there is a problem that the visual field range becomes narrow.

In general, there is a method of using a plurality of high-resolution image sensors in a narrow visual field range. However, four image sensors are required to increase the measurement resolution by a factor of two, and nine image sensors are required to increase the measurement resolution by a factor of three. However, there is a problem that the cost is high and the size is large.

There is also a method of providing a moving mechanism for a high-resolution image pickup device and a laser projector in a narrow visual field and scanning a wide area. However, teaching (operation teaching of the moving mechanism suitable for the size and shape of an object) is available. ) Is required, and the operability is difficult.

As a prior art, Japanese Patent Application Laid-Open No. 5-322535
In Japanese Patent Application Publication, teaching data is received based on CAD data, measurement positions in the X and Y directions are determined, measurement time is shortened, and in the Z direction, a camera and a laser light source are raised and lowered to obtain an appropriate height. Thus, a method of repeatedly capturing camera image data is disclosed.

[0008]

However, in the prior art, it is necessary to create teaching data of a measurement object and transfer the teaching data. There is a problem that it is necessary. In addition, continuous measurement of camera image data to an appropriate height, multiple lifting operations are required,
There is a problem that measurement time is required. Further, as shown in FIG. 6, when there is a stepped portion 54a like the object 54, the laser slit light 5
A part of 3 becomes a blind spot area due to the step 54a when viewed from the camera 52, so that an appropriate height cannot be obtained, and there is a problem that it cannot be measured depending on the shape of the object.

The present invention has solved the above-mentioned problems, and provides a low-cost cross-sectional shape measuring apparatus capable of measuring a cross-sectional shape with high speed and high accuracy.

[0010]

Means for Solving the Problems In order to solve the above-mentioned technical problems, the technical means (hereinafter referred to as first technical means) taken in claim 1 of the present invention is a method in which a laser beam is applied to an object. Laser slit light projecting means for irradiating slit light, laser control means for controlling the laser slit light projecting means, and a wide-area measurement imaging means having an imaging range capable of grasping the shape of the object; A wide-area image storage means for storing image data captured by the wide-area measurement imaging means; and a wide-area measurement imaging means which is provided in the same direction as the wide-area measurement imaging means when viewed from the laser slit light projecting means. High-precision measurement imaging means for capturing images, high-precision image storage means for storing image data taken by the high-precision measurement imaging means, the laser slit light projecting means, the wide area measurement imaging means, A moving means for relatively moving the object with respect to the high-precision measurement imaging means; an operation for calculating cross-sectional shape data from imaging data taken by the wide-area measurement imaging means and the high-precision measurement imaging means; A cross-sectional shape measuring apparatus characterized in that means is provided.

The effects of the first technical means are as follows.

That is, after measuring the cross-sectional shape of a wide area with the wide-area measurement imaging means, the divided area is measured with the high-precision measurement imaging means with high accuracy based on the cross-sectional shape data. Since the cross-sectional shape is calculated and synthesized from the imaging data, highly accurate cross-sectional shape data can be measured at a high speed. In addition, since the cross-sectional shape can be measured with high accuracy using only two imaging units, a low-cost high-precision cross-sectional shape device can be obtained.

[0013] In order to solve the above technical problem, the technical means (hereinafter referred to as second technical means) taken in claim 2 of the present invention includes the laser slit light projecting means and the wide area. 2. A cross-sectional shape measuring apparatus according to claim 1, further comprising a measuring head provided with the measuring image pickup means and the high-precision measurement image pickup means.

The effects of the second technical means are as follows.

That is, since the relative positions of the laser slit light projecting means, the wide-area measurement imaging means, and the high-precision measurement imaging means are fixed, it is possible to eliminate an error due to a change in the positional relation. A cross-sectional shape device with high accuracy can be obtained. Further, when manufacturing the cross-sectional shape measuring device, the adjustment of the measuring section is facilitated. Further, since the measuring section can be downsized, the small cross-sectional shape measuring apparatus can be downsized.

In order to solve the above-mentioned technical problems, the technical means (hereinafter referred to as third technical means) taken in claim 3 of the present invention includes the laser slit light projecting means and the wide area. The cross-sectional shape measurement according to any one of claims 1 and 2, further comprising a measurement imaging unit, and a rotation unit that allows the high-accuracy measurement imaging unit to relatively rotate around the object. Device.

The effects of the third technical means are as follows.

That is, the rotating means can relatively rotate the laser slit light projecting means, the wide-range measurement imaging means, and the high-precision measurement imaging means around the object, so that the section around the object from different angles can be obtained. Shape data is obtained. If the shape data over the entire circumference of the object is obtained, the complete cross-sectional shape of the object can be measured.

In order to solve the above technical problem, a technical means (hereinafter referred to as a fourth technical means) taken in claim 4 of the present invention is a method in which a laser slit light projecting means is used for projecting an object. A laser slit light projecting step of irradiating laser slit light, a wide-area imaging step of imaging reflected light from the object in a range where the shape of the object can be grasped, and an image captured in the wide-area imaging step Dividing the wide-area imaging data into a predetermined number of divisions, a high-precision imaging step of imaging an area divided in the division step, and a plurality of high-precision imaging data captured in the high-precision imaging step. A cross-sectional shape measuring method comprising a cross-sectional shape synthesizing step of synthesizing a cross-sectional shape of an object.

The effects of the fourth technical means are as follows.

That is, after measuring the cross-sectional shape of a wide area in the wide-area imaging step, the area divided in the division step is measured with high precision in the high-precision imaging step based on the cross-sectional shape data.
Since the cross-sectional shape is calculated and synthesized from a large number of high-precision imaging data in the cross-sectional shape synthesizing step, highly accurate cross-sectional shape data can be measured at a high speed.

In order to solve the above technical problems, the technical means (hereinafter referred to as fifth technical means) taken in claim 5 of the present invention is a laser slit surface formed by the laser slit light. A rotating step of rotating the laser slit light projecting means around the object by a predetermined angle within the laser slit light projecting means from the position of the laser slit light projecting means rotated in the rotating step; From the plurality of cross-sectional shapes obtained by repeating the laser slit light projecting step and the wide-area imaging step, the dividing step, the high-accuracy imaging step, and the cross-sectional shape synthesizing step. 6. The method for measuring a cross-sectional shape according to claim 5, wherein

The effects of the fifth technical means are as follows.

That is, in the rotation step, the laser slit light projecting means, the wide-area measurement imaging means, and the high-precision measurement imaging means are relatively rotated around the object, so that the section around the object from different angles is obtained. Shape data is obtained. If shape data over the entire circumference of the object is obtained, a complete cross-sectional shape of the object can be obtained.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, an object is irradiated with laser slit light, and the reflected light from the object is imaged by a wide-area measurement imaging means. Based on the image data captured by the wide-area measurement imaging unit, the high-precision measurement imaging unit determines how to scan and how many times to measure. Move the moving means by that judgment. The measurement is repeated by the high-precision measurement imaging means, and the image data obtained by the high-precision measurement is synthesized to obtain the cross-sectional shape data of the object. Also, when the cross-sectional shape data of the entire circumference of the object is required, the rotating means is rotated at a predetermined angle, the laser slit light projecting means, the wide-area measuring imaging means,
The high-precision measurement imaging means is rotated around the object at an arbitrary angle, and the shape is measured over the entire circumference of the object.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is an external view of a cross-sectional shape measuring apparatus of the present embodiment, FIG. 2 is a configuration diagram illustrating a cross-sectional shape measuring method, FIG. 3 is an enlarged explanatory view of a measuring head portion, and FIG. FIG. 4 is an explanatory diagram for explaining a relationship between the object and the object.

This cross-sectional shape measuring apparatus includes a laser slit light projector 3 as a laser slit light projecting unit, a laser output control unit 4 as a laser control unit, a wide area measuring CCD camera 7 as a wide area measuring imaging unit, and A CCD camera 9 for high-precision measurement, which is an imaging unit for high-precision measurement; an image memory 11 having both functions of a wide-area image storage unit and a high-precision image storage unit; an XY stage 13 as a moving unit; A motor 15 and a data operation unit 1 as an operation means
7.

The laser slit light projector 3 converts the laser light into a slit shape and irradiates the object 2 as laser slit light 1. The cross-sectional shape to be measured is the laser slit light 1
2 is a cross section of the target object 2 that intersects a plane (laser slit plane 40) formed by. The laser output controller 4 is connected to the laser slit light projector 3 via a signal line, and controls the projection intensity / ON / OFF of the laser slit light 1.

The CCD camera 7 for wide area measurement includes an image pickup device 7
a and a wide-angle optical lens 7b provided on the incident light side thereof, and has an imaging range in which the shape of the object 2 can be grasped. The image sensor 7a is a planar CCD
The sensor is not particularly limited, and a planar CMOS sensor or the like can be used as appropriate. The wide-angle optical lens 7b condenses reflected light in an imaging area (imaging area 5 for wide-area measurement) wider than the target object 2 within the laser slit plane 40 at an arbitrary angle from the light projection axis, and reflects the condensed reflection. Light is emitted to the image sensor 7a
Images.

The high-precision measuring CCD camera 9 includes an image pickup device 9a and a high-magnification optical lens 9b provided on the incident light side thereof.
And images the target object 2 locally. The imaging element 9a is also a planar CCD sensor, but is not particularly limited, and a planar CMOS sensor or the like can be used as appropriate. The high-magnification optical lens 9b collects reflected light from some of the divided blocks (high-accuracy measurement imaging area 8) in the wide-area measurement imaging area 5 in the laser slit plane 40 from an arbitrary angle from the projection axis. Illuminated, and the condensed reflected light is transmitted to the image sensor 9a.
Images.

Laser slit light projector 3, wide area measurement C
The CD camera 7 and the high-precision measurement CCD camera 9 are provided in a single measurement head 12 with their mutual positional relationship fixed. The positional relationship is as follows: laser slit light projector 3, CCD camera 7 for wide area measurement, and CC camera for high precision measurement.
The optical axes of the D cameras 9 are fixed such that their optical axes form the same plane. Since the relative positions of the laser slit light projector 3, the wide-area measurement CCD camera 7, and the high-precision measurement CCD camera 9 are fixed as described above, it is possible to eliminate an error due to a change in the positional relationship, and to achieve high accuracy. Cross-sectional shape device. Further, when manufacturing the cross-sectional shape measuring device, the adjustment of the measuring section is facilitated. Further, since the measuring section can be downsized, the cross-sectional shape measuring apparatus can be downsized.

The image memory 11 is connected to the CCD camera 7 for wide-area measurement and the CCD camera 9 for high-precision measurement via respective signal lines, and the wide-area CCD camera 9 for wide-area measurement and the CCD camera 9 for high-precision measurement are used for image processing. Imaging data 4
1 and the high-precision imaging data 42 are stored.

The XY stage 13 includes an X stage 13a for moving the object 2 in the horizontal direction (X direction) and a Y stage 13b for moving the object 2 in the vertical direction (Y direction). A Y stage 13b is provided on the X stage 13a. The target 2 is erected on the Y stage 13b. The surface of the Y stage 13 b on which the object 2 is erected is parallel to the laser slit plane 40. The object 2 is moved by the XY stage 13 to the laser slit plane 40.
Can be moved in the parallel direction while the measurement section of the object 2 is in the inside.

The motor 15 is provided in a direction in which the object 2 of the XY stage 13 is erected. The motor 15 is
The rotation shaft 15a is provided so as to be perpendicular to the Y stage 13b surface. An L-shaped member 6 is connected to a rotation shaft 15a of the motor 15, and the L-shaped member 6 is provided with a measuring head 12, a laser slit light projector 3, and a CC for wide area measurement.
The optical axes of the D camera 7 and the high-precision measurement CCD camera 9 are connected to the object 2 side.

The XY stage 13 and the motor 15 are connected to holding members 22 and 23 erected on a table 21, respectively. The measurement head 1 is rotated by the rotation of the motor 15.
Reference numeral 2 denotes a laser slit light projector 3, a wide-area measurement CCD camera 7, and a high-precision measurement CCD camera 9 around the object 2.
Can be rotated with its optical axis directed toward the object 2.

The rotation of the motor 15 is controlled by a rotary table controller 14 connected by signal lines. The movement of the XY stage 13 in the X and Y directions is controlled by an XY stage control unit 16 connected by signal lines.

The data operation unit 17 is connected to the laser output control unit 4, the image memory 11, the turntable control unit 14, and the XY stage control unit 16 by signal lines.
And calculates the cross-sectional shape data from the wide-area imaging data 41 and the high-precision imaging data 42 stored in the laser output control unit 4, the laser output control unit 4, the rotary table control unit 14, and the XY stage control unit 16. In this embodiment, the laser output control unit 4, the image memory 11, the turntable control unit 14, the XY
The stage control unit 16 and the data calculation unit 17 are built in the personal computer 20.

FIG. 5 is a flowchart for explaining the sectional shape measuring method of the present embodiment. The XY coordinates are coordinates indicating the direction in the plane of the XY stage, and the origin can be set arbitrarily. Here, the point intersecting the direction of the rotation axis 15a of the motor 15 is set as the origin. The X axis direction is the direction in which the X stage 13a moves, and the Y axis direction is the direction in which the Y stage 13b moves.

The xy coordinate is a coordinate system that fluctuates together with the measuring head 12 in one plane of the laser slit light, and a predetermined point in one plane of the laser slit light is set as an origin. The y-axis direction is the projection axis direction of the laser slit light 1 (the projection center direction of the laser slit light 1), and the x-axis direction is a direction orthogonal to the y-axis direction. The xy coordinates rotate with the rotation of the motor 15 with respect to the XY coordinates.

Position (x _stage , y _stage )
Is the position of the XY stage 13 represented by XY coordinates, and represents the position of the target 2. The position P ₁ (x ₁ ,
y ₁ ) to P _m (x _m , y _m ) are block center positions of m divided blocks divided for high-precision division measurement by the high-precision measurement CCD camera 9 based on the wide-area imaging data 41. Is a position represented by xy coordinates. Angle θ
Is the rotation angle of the motor 15, which is detected and controlled by an encoder built in the motor 15.

First, in step S01, the position of the XY stage 13 and the rotation angle of the motor 15 are moved to a predetermined origin. Since it is desirable that the object 2 is located at the center of the wide-area measurement imaging area 5 of the wide-area measurement CCD camera 7, the position of the XY stage 13 at which the object 2 is located is the origin. The origin of the rotation angle of the motor 15 is a position when the laser slit light projector 3 is located vertically above the object 2.

In step S02, the object 2 is irradiated with the laser slit light 1 having been subjected to appropriate light quantity control from the laser slit light projector 3 (laser slit light projecting step). In step S03, the wide-area image data 41 captured by the image sensor 7a via the wide-angle optical lens 7b is stored in the image memory 11
(Wide-area imaging step). In step S04, based on the wide-area imaging data 41 stored in the image memory 11, the data calculation unit 17 selects a divided block for high-precision division measurement by the high-precision measurement CCD camera 9 (division step). The number of the selected divided blocks is n (n ≦ m).

Next, in step S05, the selected
K-th divided block center position P _k(X_k, Y_k)
Is converted from xy coordinates to XY coordinates by equation (1).
In step S06, the block center position of the divided block
The XY coordinates are converted from the data operation unit 17 to the XY stage control unit 1
6 and the XY stage 13 is moved to that position. What
Contact, x in equation (1)_ofst(Θ) and y_ofst(Θ)
Is the xy coordinate when the rotation angle of the motor in the xy coordinates is θ
This is the amount of deviation between the reference origin and the XY coordinate origin.

[0044]

(Equation 1) In step S07, the high-precision image data 42 captured by the image sensor 9a via the high-magnification optical lens 9b is stored in the image memory 11. In step S08, the high-precision imaging data 42 stored in the image memory 11 is sent to the data calculation unit 17, and the coordinate position (x _rf , y _rf ) of the high-precision imaging data 42 is converted from the xy coordinates to the XY stage position (x _stage , y _stage ) and the rotation angle θ of the motor
The position is converted into the XY coordinate position (X ′, Y ′) according to the equation (2), and is stored in the image memory 11 (high-precision imaging step).

[0045]

(Equation 2) Subsequently, in step S08, it is determined whether or not the divided block is the n-th. If not, the process returns to step S05, repeats steps S05 to S08, and repeats the high-precision division measurement of the next divided block. Step S08
If the divided block is n-th, the process proceeds to step S10. At this stage, high-precision cross-sectional shape data at the rotation angle origin (θ = 0) of the motor 15 is completed (cross-sectional shape synthesizing step).

After the wide-area cross-sectional shape is measured by the wide-area measuring CCD camera 7 as described above, only the area divided based on the cross-sectional shape data is subjected to the high-precision measuring CCD camera 9.
, And high-accuracy cross-sectional shape data can be measured at high speed because the cross-sectional shape is calculated and synthesized from a large number of high-precision imaging data. Also, since the cross-sectional shape can be measured with high accuracy using only the two CCD cameras 7 and 9, a low-cost high-precision cross-sectional shape device can be obtained.

In step S10, the XY stage 13 is returned to the origin position, and the flow advances to step S11. Step S11
Then, the motor 15 is rotated by a predetermined angle, and the motor 15 is brought to the position of the next rotation angle θ (rotation step). In step S12, it is determined whether the motor 15 has made one rotation. That is, it is determined whether or not the rotation angle θ has become 360 degrees or more. If the motor 15 has not made one rotation, the process returns to step S03, and repeats steps S03 to S11 to measure a wide-area shape at the next rotation angle θ.
High-precision division measurement is performed to complete high-precision cross-sectional shape data at the rotation angle θ (cross-sectional shape synthesizing step).

In step S12, if the motor 15 has made one rotation, the process proceeds to step 13, where the laser slit light projector 3 is turned off, and irradiation of the laser slit light 1 is stopped.
Then, in step S14, the high-precision shape data of all the rotation angles θ are combined to calculate the entire cross-sectional shape of the object 2. Thus, a highly accurate cross-sectional shape can be measured.

As described above, the measuring head 12 can be rotated around the object 2 by the motor 15, so that the cross-sectional shape data from different angles around the object 2 can be obtained. If the cross-sectional shape data over the entire circumference of the object 2 is obtained, the complete cross-sectional shape of the object can be measured.

As described above, the cross-sectional shape measuring apparatus of the present invention enables high-speed operation with high accuracy even when the size of the object is large and without wasting the scanning operation. There is no need for
In addition, since the shape blind area at that angle can be easily removed by wide-area measurement, this is a highly versatile cross-sectional shape measuring apparatus.

Although the moving means of this embodiment moves the object 2, the measuring head 12 may be moved. In addition, the rotating means of the present embodiment causes the measuring head 12 to rotate around the object 2, but the object 2 may be rotated.

As described above, the present invention provides a laser slit light projecting means for irradiating an object with laser slit light,
Laser control means for controlling the laser slit light projecting means, wide-area measurement imaging means having an imaging range capable of grasping the shape of the object, and imaging data taken by the wide-area measurement imaging means A high-precision measurement imaging unit provided in the same direction as the wide-range measurement imaging unit when viewed from the laser slit projection unit, and configured to locally image the object; High-precision image storage means for storing image data taken by the accuracy measurement imaging means; and the laser slit light projecting means, the wide-area measurement imaging means, and the high-precision measurement imaging means. A moving means for relatively moving, an imaging means for wide-area measurement, and an arithmetic means for calculating cross-sectional shape data from imaging data imaged by the high-precision measurement imaging means are provided. A laser slit light projecting step of irradiating the object with laser slit light from the cross-sectional shape measuring device and the laser slit light projecting means, and from the object within a range in which the shape of the object can be grasped. A wide-area imaging step of imaging the reflected light, a division step of dividing the wide-area imaging data imaged in the wide-area imaging step into a predetermined number of divisions, and a high-precision imaging step of imaging the area divided in the division step The cross-sectional shape measuring method is characterized by comprising a cross-sectional shape synthesizing step of synthesizing a cross-sectional shape of the object from a large number of high-precision imaging data imaged in the high-precision imaging step. Can be measured regardless of
A low-cost cross-sectional shape measuring apparatus capable of measuring a cross-sectional shape with high speed and high accuracy can be provided.

[Brief description of the drawings]

FIG. 1 is an external view of a cross-sectional shape measuring apparatus according to the present embodiment.

FIG. 2 is a configuration diagram illustrating a cross-sectional shape measurement method.

FIG. 3 is an enlarged explanatory view of a measuring head portion.

FIG. 4 is an explanatory diagram illustrating a relationship between a measurement head and an object.

FIG. 5 is a flowchart illustrating a cross-sectional shape measurement method according to the present embodiment.

FIG. 6 is an explanatory diagram for explaining a problem of the related art.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Laser slit light 2 ... Object 3 ... Laser slit light projector () 4 ... Laser output control part (laser control means) 7 ... CCD camera for wide area measurement (imaging means for wide area measurement) 9 ... CCD camera for high precision measurement (High-precision measurement imaging unit) 11 ... Image memory (wide-area image storage unit, high-precision image storage unit) 12 ... Measurement head 13 ... XY stage (moving unit) 15 ... Motor (rotating unit) 17 ... Data calculation unit (calculation) Means) 40: Laser slit surface

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F065 AA52 CC07 CC11 CC35 DD02 DD03 FF01 FF02 FF09 GG04 HH05 JJ03 JJ26 LL10 MM03 MM09 NN02 QQ24 QQ31 SS13

Claims (5)

[Claims] 1. A laser slit light projecting means for irradiating an object with laser slit light, a laser control means for controlling the laser slit light projecting means, and an imaging device capable of grasping the shape of the object Wide-area measurement imaging means having a range, wide-area image storage means for storing image data captured by the wide-area measurement imaging means, and in the same direction as the wide-area measurement imaging means as viewed from the laser slit projection means. A high-precision measurement imaging unit provided to locally image the object; a high-precision image storage unit for storing imaging data captured by the high-precision measurement imaging unit; and the laser slit light projecting unit Moving means for relatively moving the object with respect to the wide-area measurement imaging means, the high-precision measurement imaging means, the wide-area measurement imaging means, and the high-precision measurement imaging means. A cross-sectional shape measuring apparatus, further comprising a calculating means for calculating cross-sectional shape data from the obtained imaging data. 2. A cross-sectional shape measuring device according to claim 1, further comprising a measuring head provided with said laser slit light projecting means, said wide-range measuring imaging means and said high-precision measuring imaging means. apparatus. 3. The apparatus according to claim 1, wherein said laser slit light projecting means, said wide-range measurement image pickup means, and said high-precision measurement image pickup means are provided with rotation means capable of relatively rotating around said object. The cross-sectional shape measuring device according to claim 1. 4. A laser slit light projecting step of irradiating an object with laser slit light from a laser slit light projecting means, and reflected light from the object in a range where the shape of the object can be grasped. A wide-area imaging step of imaging the image, a division step of dividing the wide-area imaging data imaged in the wide-area imaging step into a predetermined number of divisions, a high-precision imaging step of imaging an area divided in the division step, A cross-sectional shape measuring method, comprising a cross-sectional shape synthesizing step of synthesizing a cross-sectional shape of the object from a large number of high-precision imaging data imaged in the high-accuracy imaging step. 5. A rotating step of rotating the laser slit light projecting means around the object by a predetermined angle in a laser slit plane formed by the laser slit light, and the laser slit rotated in the rotating step By repeating a laser slit light projecting step of irradiating the object with the laser slit light from the position of the light projecting means, and the wide area imaging step, the division step, the high precision imaging step, and the cross-sectional shape synthesizing step. 6. An overall cross-sectional shape of the object is synthesized from a plurality of obtained cross-sectional shapes.
The cross-sectional shape measurement method described in the above.