JP2001277102A5 - - Google Patents

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Publication number
JP2001277102A5
JP2001277102A5 JP2000092167A JP2000092167A JP2001277102A5 JP 2001277102 A5 JP2001277102 A5 JP 2001277102A5 JP 2000092167 A JP2000092167 A JP 2000092167A JP 2000092167 A JP2000092167 A JP 2000092167A JP 2001277102 A5 JP2001277102 A5 JP 2001277102A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000092167A
Other languages
Japanese (ja)
Other versions
JP2001277102A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000092167A priority Critical patent/JP2001277102A/ja
Priority claimed from JP2000092167A external-priority patent/JP2001277102A/ja
Publication of JP2001277102A publication Critical patent/JP2001277102A/ja
Publication of JP2001277102A5 publication Critical patent/JP2001277102A5/ja
Pending legal-status Critical Current

Links

JP2000092167A 2000-03-29 2000-03-29 補助パッド及び研磨装置 Pending JP2001277102A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000092167A JP2001277102A (ja) 2000-03-29 2000-03-29 補助パッド及び研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000092167A JP2001277102A (ja) 2000-03-29 2000-03-29 補助パッド及び研磨装置

Publications (2)

Publication Number Publication Date
JP2001277102A JP2001277102A (ja) 2001-10-09
JP2001277102A5 true JP2001277102A5 (enExample) 2005-10-27

Family

ID=18607536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000092167A Pending JP2001277102A (ja) 2000-03-29 2000-03-29 補助パッド及び研磨装置

Country Status (1)

Country Link
JP (1) JP2001277102A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004023009A (ja) 2002-06-20 2004-01-22 Nikon Corp 研磨体、研磨装置、半導体デバイス及び半導体デバイス製造方法
JP5587636B2 (ja) * 2010-03-01 2014-09-10 富士紡ホールディングス株式会社 研磨パッド
JP5528520B2 (ja) * 2012-10-18 2014-06-25 株式会社東京精密 圧力分布調整機能を有する研磨装置
JP2014176950A (ja) * 2013-02-12 2014-09-25 Ebara Corp 研磨装置、及び研磨パッド貼り付け方法
WO2014119598A1 (ja) * 2013-01-31 2014-08-07 株式会社 荏原製作所 研磨装置、研磨パッド貼り付け方法、及び研磨パッド張り替え方法

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