JP2001274068A5 - - Google Patents

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Publication number
JP2001274068A5
JP2001274068A5 JP2000086867A JP2000086867A JP2001274068A5 JP 2001274068 A5 JP2001274068 A5 JP 2001274068A5 JP 2000086867 A JP2000086867 A JP 2000086867A JP 2000086867 A JP2000086867 A JP 2000086867A JP 2001274068 A5 JP2001274068 A5 JP 2001274068A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000086867A
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Japanese (ja)
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JP2001274068A (ja
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Publication date
Application filed filed Critical
Priority to JP2000086867A priority Critical patent/JP2001274068A/ja
Priority claimed from JP2000086867A external-priority patent/JP2001274068A/ja
Publication of JP2001274068A publication Critical patent/JP2001274068A/ja
Publication of JP2001274068A5 publication Critical patent/JP2001274068A5/ja
Withdrawn legal-status Critical Current

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JP2000086867A 2000-03-27 2000-03-27 位置合せ方法、デバイス製造方法、位置合せ装置、および露光装置 Withdrawn JP2001274068A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000086867A JP2001274068A (ja) 2000-03-27 2000-03-27 位置合せ方法、デバイス製造方法、位置合せ装置、および露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000086867A JP2001274068A (ja) 2000-03-27 2000-03-27 位置合せ方法、デバイス製造方法、位置合せ装置、および露光装置

Publications (2)

Publication Number Publication Date
JP2001274068A JP2001274068A (ja) 2001-10-05
JP2001274068A5 true JP2001274068A5 (cg-RX-API-DMAC7.html) 2007-05-17

Family

ID=18602967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000086867A Withdrawn JP2001274068A (ja) 2000-03-27 2000-03-27 位置合せ方法、デバイス製造方法、位置合せ装置、および露光装置

Country Status (1)

Country Link
JP (1) JP2001274068A (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100809955B1 (ko) * 2001-11-27 2008-03-06 삼성전자주식회사 포토리소그래피 공정의 얼라인 계측방법
JP2003324055A (ja) 2002-04-30 2003-11-14 Canon Inc 管理システム及び装置及び方法並びに露光装置及びその制御方法
JP4018438B2 (ja) 2002-04-30 2007-12-05 キヤノン株式会社 半導体露光装置を管理する管理システム
JP2007306024A (ja) * 2007-07-17 2007-11-22 Canon Inc 位置決め方法
CN114089606A (zh) * 2021-11-24 2022-02-25 深圳市尊绅投资有限公司 通过监控掩膜版补偿制程偏移量的方法和装置

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