JP2001272306A - Inspection method for color filter - Google Patents
Inspection method for color filterInfo
- Publication number
- JP2001272306A JP2001272306A JP2000083191A JP2000083191A JP2001272306A JP 2001272306 A JP2001272306 A JP 2001272306A JP 2000083191 A JP2000083191 A JP 2000083191A JP 2000083191 A JP2000083191 A JP 2000083191A JP 2001272306 A JP2001272306 A JP 2001272306A
- Authority
- JP
- Japan
- Prior art keywords
- color filter
- light
- inspection method
- inspection
- fluorescence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Optical Filters (AREA)
- Liquid Crystal (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、カラーテレビやパ
ーソナルコンピュータ等に用いられるカラー液晶ディス
プレイに主として用いられるカラーフィルタの検査方法
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for inspecting a color filter mainly used for a color liquid crystal display used for a color television, a personal computer, and the like.
【0002】[0002]
【従来の技術】従来、主に液晶ディスプレイ等のフラッ
トパネルディスプレイに用いられるカラーフィルタの検
査は、検査員による目視或いは自動検査機による検査の
いずれにおいても、可視光領域の光源が用いられてい
た。2. Description of the Related Art Heretofore, a color filter mainly used for a flat panel display such as a liquid crystal display has been inspected using a light source in a visible light region, either visually by an inspector or by an automatic inspection machine. .
【0003】[0003]
【発明が解決しようとする課題】しかしながら、可視光
による検査では、ゴミなどの異物を検査する場合には、
規格値の異物のサイズを十分に検知する光学系と受光素
子、或いは熟練した検査員と検査環境が要求される。ま
た、汚染については、その有無を特に自動検査機で検出
するのは困難である。特に最近では、ゴミや異物、汚染
に対する要求が厳しくなっており、検査コストも増大の
一途を辿り、カラーフィルタの製造コストを圧迫する要
因となっている。However, in the inspection using visible light, when inspecting foreign matter such as dust,
An optical system and a light receiving element for sufficiently detecting the size of a foreign substance having a standard value, or a skilled inspector and an inspection environment are required. In addition, it is difficult to detect the presence or absence of contamination with an automatic inspection machine. Particularly in recent years, requirements for dust, foreign matter, and contamination have become strict, and inspection costs have been steadily increasing, which has been a factor that puts down the manufacturing cost of color filters.
【0004】また、可視光を用いた検査では、異物や突
起等を検出するためには、極端に低角度からの照明と検
出器の配置が必要であり、作業が繁雑であった。また、
特に顔料分散法によるカラーフィルタのように、表面に
大きな凹凸を有するカラーフィルタにおいては、その凹
部に入り込んだ異物の検出が困難であった。[0004] In addition, in the inspection using visible light, in order to detect a foreign substance, a projection, or the like, illumination from an extremely low angle and arrangement of a detector are required, and the work is complicated. Also,
In particular, in a color filter having a large unevenness on the surface, such as a color filter by a pigment dispersion method, it is difficult to detect a foreign substance that has entered the recess.
【0005】本発明の課題は、上記問題を解決し、凹部
に入り込んだ微小な異物、汚染を良好に検知し、自動化
が容易で安価なカラーフィルタの検査方法を提供するこ
とにある。An object of the present invention is to solve the above-mentioned problems and to provide a color filter inspection method which can easily detect a minute foreign matter and contamination entering a concave portion, and which can be easily automated and is inexpensive.
【0006】[0006]
【課題を解決するための手段】本発明は、透明基板上に
複数の着色部を少なくとも備えたカラーフィルタに紫外
光を発する光源より光を照射し、カラーフィルタ上の異
物或いは汚染の発する蛍光或いは燐光を検知することを
特徴とするカラーフィルタの検査方法である。SUMMARY OF THE INVENTION According to the present invention, a color filter having at least a plurality of colored portions on a transparent substrate is irradiated with light from a light source which emits ultraviolet light, and the color filter is provided with a fluorescent material or a fluorescent material which emits foreign matter or contamination. This is a color filter inspection method characterized by detecting phosphorescence.
【0007】上記本発明は、光源がパーティクル検査に
用いられるブラックライトであること、蛍光或いは燐光
を受光素子としてラインセンサ或いはエリアセンサを用
いて自動的に検知すること、特に、ラインセンサ或いは
エリアセンサにより自動的に検知した蛍光或いは燐光の
光量を既定値と比較して合否判定を行うこと、を好まし
い態様として含むものである。According to the present invention, the light source is a black light used for particle inspection, the fluorescence or phosphorescence is automatically detected using a line sensor or an area sensor as a light receiving element, and in particular, the line sensor or the area sensor is used. And comparing the amount of fluorescence or phosphorescence automatically detected by the above method with a predetermined value to make a pass / fail judgment.
【0008】[0008]
【発明の実施の形態】図1に本発明の検査方法の一実施
形態の様子を模式的に示す。図中、1は紫外光を発する
光源、2はラインセンサカメラ、3は検査対象であるカ
ラーフィルタであり、透明基板4上に複数の着色部5を
備えている。FIG. 1 schematically shows an embodiment of an inspection method according to the present invention. In the figure, 1 is a light source that emits ultraviolet light, 2 is a line sensor camera, 3 is a color filter to be inspected, and has a plurality of colored portions 5 on a transparent substrate 4.
【0009】本実施形態では、光源1より紫外光を照射
し、ラインセンサカメラ2で撮像を行いながら、検査対
象であるカラーフィルタ1を移動させ、異物や汚染の検
出を自動的に行う。In the present embodiment, the color filter 1 to be inspected is moved while irradiating ultraviolet light from the light source 1 and imaging is performed by the line sensor camera 2, and foreign matter and contamination are automatically detected.
【0010】本発明の検査対象であるカラーフィルタと
しては、図1に示すように、透明基板4上に複数の着色
部5を備えたものであれば、製造方法、他の構成部材に
ついては特に限定されない。例えば、顔料分散法、染色
法、印刷法、電着法、インクジェット法など、いずれの
製造方法で製造されたカラーフィルタでも好ましく適用
される。また、カラーフィルタは、通常は着色部5上に
保護層を備え、場合によっては液晶ディスプレイを構成
した際の電極となるITO膜を備えた構成や、ブラック
マトリクスを備えた構成もあり、いずれの場合において
も本発明は好ましく適用される。As shown in FIG. 1, as a color filter to be inspected according to the present invention, as long as it has a plurality of colored portions 5 on a transparent substrate 4, a manufacturing method and other components are particularly required. Not limited. For example, a color filter manufactured by any manufacturing method such as a pigment dispersion method, a dyeing method, a printing method, an electrodeposition method, and an ink jet method is preferably applied. Further, the color filter usually includes a protective layer on the colored portion 5, and in some cases, there is a configuration including an ITO film serving as an electrode when a liquid crystal display is configured, and a configuration including a black matrix. Even in such a case, the present invention is preferably applied.
【0011】本発明において用いられる光源としては、
主として紫外光を発する光源であれば好ましく用いるこ
とができ、例えば、パーティクル検査用に用いられてい
るブラックライトを好ましく用いることができる。The light source used in the present invention includes:
A light source mainly emitting ultraviolet light can be preferably used. For example, a black light used for particle inspection can be preferably used.
【0012】また、本発明において、検出は検査員によ
る目視の他に、受光素子としてラインセンサやエリアセ
ンサを用いて自動化することも可能である。In the present invention, the detection can be automated using a line sensor or an area sensor as a light receiving element in addition to the visual inspection by an inspector.
【0013】本発明においては、紫外光を発する光源を
用いることから、例え凹部に微小な異物や汚染が存在し
た場合であっても、これらが蛍光或いは燐光を発するた
め、検出しやすく、またラインセンサやエリアセンサを
用いることによって、検出作業を自動化する事も可能と
なる。本発明において、エリアセンサを用いた場合に
は、異物や汚染といった必要な欠陥の最小サイズを検知
できるように高解像度に設定する必要がなく、ラフな解
像度のエリアセンサ及び結像系を用いても十分な検出感
度を実現することができる。In the present invention, since a light source that emits ultraviolet light is used, even if there is a minute foreign substance or contamination in the concave portion, it emits fluorescent light or phosphorescent light, so that it is easy to detect. By using a sensor or an area sensor, the detection operation can be automated. In the present invention, when an area sensor is used, it is not necessary to set a high resolution so that the minimum size of a necessary defect such as a foreign substance or contamination can be detected, and a rough resolution area sensor and an imaging system are used. However, sufficient detection sensitivity can be realized.
【0014】ラインセンサやエリアセンサを用いて検査
を自動化する場合には、予め既知の異物や汚染の発する
蛍光或いは燐光を測定して既定値を求めておき、検査対
象のカラーフィルタにおいて検出された蛍光或いは燐光
の光量を該規定値と比較することにより、合否判定を行
えばよい。When the inspection is automated by using a line sensor or an area sensor, a predetermined value is obtained by measuring in advance the fluorescence or phosphorescence generated by a known foreign substance or contamination, and the detected value is detected by a color filter to be inspected. A pass / fail judgment may be made by comparing the amount of fluorescence or phosphorescence with the specified value.
【0015】本発明においては、異物や汚染から発せら
れる蛍光や燐光を検出するため、従来の可視光による検
査方法に比べて、カラーフィルタの着色部がノイズとし
て影響しないため、検出力が増大する。特に、汚染に関
してはその効果は顕著である。In the present invention, since the fluorescence or phosphorescence emitted from foreign substances or contamination is detected, the colored portion of the color filter does not affect as noise as compared with the conventional inspection method using visible light, so that the detection power is increased. . In particular, the effect is remarkable regarding contamination.
【0016】尚、本発明の検査方法においては、紫外光
を用いることから、検査工程は暗所で行うことが好まし
い。また、検査員が目視で行う場合には、検査員の目を
保護する上で紫外線カットの保護眼鏡を着用するなどの
保護手段を講じることが望ましい。この場合でも、カラ
ーフィルタの欠陥から発せられる蛍光や燐光は可視光を
含んでいるため、検出は十分に可能である。In the inspection method of the present invention, since ultraviolet light is used, the inspection step is preferably performed in a dark place. When the inspector visually performs the inspection, it is desirable to take protective measures such as wearing protective glasses that cut off ultraviolet rays in order to protect the inspector's eyes. Even in this case, the fluorescence and the phosphorescence emitted from the defect of the color filter include visible light, so that detection is sufficiently possible.
【0017】[0017]
【発明の効果】以上説明したように、本発明によれば、
従来の検査方法のように、低角度から反射角度を調整し
ながら検査する必要がなく、余分なカラーフィルタのハ
ンドリングが不要であり、検査作業を大幅に簡略化する
ことができる。また、凹部に入り込んだ微小な異物や汚
染も、蛍光や燐光によって検出するため容易に検知する
ことができ、検査の信頼性が高い。よって、本発明によ
れば、高再現性、高効率、高精度でカラーフィル検査を
行い、信頼性の高いカラーフィルタをより安価に提供す
ることが可能となる。As described above, according to the present invention,
Unlike the conventional inspection method, it is not necessary to perform the inspection while adjusting the reflection angle from a low angle, and it is not necessary to handle an extra color filter, so that the inspection operation can be greatly simplified. In addition, minute foreign matter or contamination that has entered the recess can be easily detected because it is detected by fluorescence or phosphorescence, and the reliability of the inspection is high. Therefore, according to the present invention, it is possible to perform color fill inspection with high reproducibility, high efficiency, and high accuracy, and to provide a highly reliable color filter at a lower cost.
【図1】本発明の検査方法の一実施形態の様子を示す模
式図である。FIG. 1 is a schematic diagram showing a state of an embodiment of an inspection method of the present invention.
1 光源 2 ラインセンサカメラ 3 カラーフィルタ 4 透明基板 5 着色部 Reference Signs List 1 light source 2 line sensor camera 3 color filter 4 transparent substrate 5 colored part
Claims (4)
備えたカラーフィルタに紫外光を発する光源より光を照
射し、カラーフィルタ上の異物或いは汚染の発する蛍光
或いは燐光を検知することを特徴とするカラーフィルタ
の検査方法。1. A color filter having at least a plurality of colored portions on a transparent substrate is irradiated with light from a light source that emits ultraviolet light to detect foreign matter or fluorescent or phosphorescent light generated by contamination on the color filter. Color filter inspection method.
るブラックライトである請求項1に記載のカラーフィル
タの検査方法。2. The color filter inspection method according to claim 1, wherein the light source is a black light used for particle inspection.
インセンサ或いはエリアセンサを用いて自動的に検知す
る請求項1又は2に記載のカラーフィルタの検査方法。3. The color filter inspection method according to claim 1, wherein the fluorescence or phosphorescence is automatically detected using a line sensor or an area sensor as a light receiving element.
自動的に検知した蛍光或いは燐光の光量を既定値と比較
して合否判定を行う請求項3に記載のカラーフィルタの
検査方法。4. The color filter inspection method according to claim 3, wherein a pass / fail judgment is made by comparing the amount of fluorescence or phosphorescence automatically detected by the line sensor or the area sensor with a predetermined value.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000083191A JP2001272306A (en) | 2000-03-24 | 2000-03-24 | Inspection method for color filter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000083191A JP2001272306A (en) | 2000-03-24 | 2000-03-24 | Inspection method for color filter |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2001272306A true JP2001272306A (en) | 2001-10-05 |
Family
ID=18599873
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000083191A Withdrawn JP2001272306A (en) | 2000-03-24 | 2000-03-24 | Inspection method for color filter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2001272306A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20040039790A (en) * | 2002-11-04 | 2004-05-12 | 삼성에스디아이 주식회사 | Organic Electro Luminescence Display(OELD) and Methode of fabricating the same |
KR100975645B1 (en) | 2009-12-18 | 2010-08-17 | 주식회사 이테크넷 | Appartus for inspecting substrate and method using the same |
WO2011074806A2 (en) * | 2009-12-18 | 2011-06-23 | 주식회사 이테크넷 | Substrate inspection apparatus and substrate inspection method using same |
-
2000
- 2000-03-24 JP JP2000083191A patent/JP2001272306A/en not_active Withdrawn
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20040039790A (en) * | 2002-11-04 | 2004-05-12 | 삼성에스디아이 주식회사 | Organic Electro Luminescence Display(OELD) and Methode of fabricating the same |
KR100975645B1 (en) | 2009-12-18 | 2010-08-17 | 주식회사 이테크넷 | Appartus for inspecting substrate and method using the same |
WO2011074806A2 (en) * | 2009-12-18 | 2011-06-23 | 주식회사 이테크넷 | Substrate inspection apparatus and substrate inspection method using same |
WO2011074806A3 (en) * | 2009-12-18 | 2011-11-03 | 주식회사 이테크넷 | Substrate inspection apparatus and substrate inspection method using same |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20070605 |