JP2001262231A - METHOD FOR PRODUCING STOCK FOR Fe-Ni SERIES ALLOY SHADOW MASK EXCELLENT IN ETCHING PIERCEABILITY - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for producing a stock for an Fe-Ni series alloy shadow mask excellent in etching pierceability at low cost which stock can be subjected to etching piercing without damaging the out-of-roundness of the shape of the inside hole of an electron beam transmission hole even in the case an intermediate working degree is increased and which stock has, as a result, an electron beam transmission hole having good out-of-roundness. SOLUTION: In the method in which an ingot of an Fe-Ni series alloy containing 34 to 38% Ni and <=0.5% Mn, and in which the content of C is controlled to <=0.010%, S to <=0.005%, and P to <=0.005% as impurities is melted by using Al and Si as deoxidizers, in this case, T, i.e., the total weighted concentration of Al and Si in the ingot is controlled to the range of [%Al]+0.2[%Si]<=0.02% (wherein, [%Al]<=0.02%, and [%Si]<=0.025%), a hot rolling stock is produced from the ingot, and the hot rolling stock is subjected to intermediate cold rolling to produce a thin sheet, the intermediate cold rolling stage is performed under the condition of draft R=60-95%, preferably, R<=-1750T+95, recrystallization final annealing is performed, and, final finish cold rolling at a draft of 10 to 40% is performed. By the subsequent etching, the stock for an Fe-Ni series alloy shadow mask having an electron beam transmission hole having good out-of-roundness can be obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to Fe--Ni used for a shadow mask processed by fine etching.
-Based alloy material, in particular, Fe having excellent etching piercing properties, which can form an electron beam transmitting hole having good roundness when the electron beam transmitting hole is pierced by etching.
The present invention relates to a method for manufacturing a material for a Ni-based alloy shadow mask at low cost. The present invention also relates to a method for producing a material for an Fe-Ni-based alloy shadow mask having electron beam transmitting holes having good roundness.

[0002]

2. Description of the Related Art In the past, mild steel was generally used for shadow masks for color cathode-ray tubes. However, when a cathode ray tube is used continuously, the temperature of the shadow mask rises due to the irradiation of the electron beam, and the irradiation positions of the phosphor and the electron beam become inconsistent due to thermal expansion, causing a color shift. That is, when the color picture tube is operated, the electron beam passing through the opening of the shadow mask is less than 1/3 of the whole, and the remaining electron beam collides with the shadow mask. The temperature rise of the mask occurs. Therefore, in recent years, in the field of shadow masks for color cathode-ray tubes, an Fe-Ni alloy called "36 alloy" having a low coefficient of thermal expansion has been used from the viewpoint of preventing color shift.

[0003] As a method of manufacturing an Fe-Ni alloy shadow mask material, a predetermined Fe-Ni alloy is used as a deoxidizing agent for Al.
For example, after vacuum melting in a VIM furnace or smelting by out-of-furnace refining in LF using Si and then casting into an ingot, forging, hot rolling, and removing the oxide scale on the surface of the slab, An intermediate cold rolling step of repeating cold rolling and annealing is performed, and after final annealing, final finish cold rolling is performed to finish the sheet to a predetermined sheet thickness of 0.3 mm or less.
Then, slitting is performed to obtain a predetermined plate width to obtain a shadow mask material. After degreasing, the shadow mask material is coated with a photoresist on both sides, and after baking and developing a pattern, it is perforated with an etchant, and cut into individual flat masks. The flat mask is annealed in a non-oxidizing atmosphere to give press workability (in the pre-anneal method, this annealing is performed on the final rolled material before etching), and then, is pressed into a spherical shape in a mask form by pressing. Is done. And finally, the spherical shaped mask is
After degreasing, a blackening treatment is performed in a steam or combustion gas atmosphere to form a blackened oxide film on the surface. Thus, a shadow mask is manufactured. In the present invention, a material to be subjected to etching after the final finish rolling is generically called a shadow mask material. In addition, the material including the flat mask and having the electron beam transmitting holes formed therein before press molding is also included.

[0004] Such a shadow mask material generally forms a transmission hole for an electron beam by well-known etching using an aqueous ferric chloride solution. Etching is performed by applying a photolithography technique, and has a large number of circular openings with a diameter of, for example, 80 μm on one surface of the material, and a circular opening with a diameter of, for example, 180 μm at the opposite position on the other surface. After the formation of the resist mask, this is performed by spraying an aqueous solution of ferric chloride in a spray shape. However, there has been a problem that the Fe—Ni alloy is inferior in etching piercing property as compared with conventional mild steel.

On the other hand, it is conventionally known that the smaller the crystal grain size, the smoother the hole shape and hole wall surface after etching, and the higher the quality of the shadow mask.
As described in JP-A-59-149638, the uniformity of etching has been achieved by making crystal grains finer and increasing the degree of {100} integration on the rolled surface.

[0006] However, recently, as the definition of the shadow mask is increased and the improvement of the etching rate is required in order to increase the productivity, the shape of the transmission hole is increased in the material of high {100} integration. New problems, such as not being perfectly round, have arisen.

The reason why the shape of the transmission hole does not become a perfect circle when the degree of {100} integration is increased can be considered as follows. 34% to 38% Ni, which is face-centered cubic
Fe-Ni-based alloy contains the slowest etching rate
The etching proceeds so that the (closest surface) (111) plane remains. Therefore, when the (100) plane is aligned with the rolling plane,
It is etched into the shape of an inverted square pyramid having four sides formed by four sides having an angle of 45 degrees with the rolling surface. On the other hand, as disclosed in Japanese Patent Laid-Open No.
A method has been proposed in which the degree of integration is reduced and the etching proceeds randomly, and a certain effect can be obtained in order to improve the uniformity of the shape mainly based on the roundness of the transmission hole. Was.

[0008]

On the other hand, from the viewpoint of cost reduction in production, it is desirable to reduce the number of times of annealing and rolling to the final product. However, in this case, the rolling degree in each step is large, and particularly when the rolling degree before final annealing is large, {100} texture is remarkably developed in the product, and the roundness of the etching hole is reduced. A problem arose. From the viewpoint of cost saving, it is absolutely necessary to be able to increase the rolling degree in the intermediate cold rolling step. An object of the present invention is to provide a low-cost method of manufacturing a material for an Fe-Ni-based alloy shadow mask, which can increase the rolling workability in an intermediate rolling step without causing a decrease in roundness of an etching hole during etching. As a result, Fe-Ni having electron beam transmitting holes having good roundness
It is an object of the present invention to establish a method for producing a material for a base alloy shadow mask.

[0009]

Means for Solving the Problems The present inventors have conducted various studies to achieve the above object, and have obtained the following new findings. That is, it has been found that the Al and Si concentrations in the Fe—Ni-based alloy for the shadow mask greatly affect the development of the (200) plane texture during rolling. Specifically, the weighted total concentration (T) of the Al concentration and the Si concentration is defined as T = [% Al] 100.2
If it is adjusted to the range of [% Si] ≦ 0.02%, from the viewpoint of cost saving, even if the intermediate rolling degree (R) is set as high as 60 to 90%, the (200) texture does not develop much. It has been found that an etching hole having an acceptable level of roundness as a product can be obtained. Further, R ≦ 1750
It has also been found that if the relationship of T + 95 is satisfied, the degree of development of the (200) texture can be suppressed to a very low level, and an etching hole with extremely good roundness can be obtained. The (200) texture suppression effect due to the reduction of Al and Si is recognized regardless of the presence or absence of impurities when Ni is in the range of 34 to 38%.

[0010] The rolling degree (R) is defined as a sheet thickness before rolling t ₀ ,
The plate thickness after rolling as _{t, R = (t 0 -t} ) / t 0 × 100
(%). Here, the {100} plane is equivalent to the (200) plane, and the component ratio of the diffraction intensity of the (200) plane is
The value calculated by the following equation, and the value used in the present invention is C
o Calculated based on measured values of X-ray diffraction using a tube. The roundness of the perforation hole was evaluated by a shape factor obtained by multiplying a value obtained by dividing the square of the maximum diameter of the perforation by the area by 100 times. In the case of a perfect circle, the shape factor is 400. Therefore, the roundness becomes worse as the numerical value increases from 400. The roundness was evaluated as good when the shape factor was 400 to 440 (good), 441 to 46.
場合 (somewhat bad) if 0, and 461 or more
(Poor) x was evaluated.

(Equation 1)

[0011] The present invention has been made based on the above findings and the like, and is an Fe-Ni-based alloy excellent in etching piercing properties, capable of forming an etching hole having good roundness during etching. It is intended to provide a method for producing a material for a shadow mask, wherein (1) (a) 34 to 38% of Ni and 0.5% of Mn based on mass percentage (%) (hereinafter, referred to as%). Al and Si are used as deoxidizers in an ingot of a Fe-Ni alloy containing 0.010% or less of C, 0.005% or less of S, and 0.005% or less of P as impurities. In that case, Al and Si in the ingot
Weighted total concentration T = [% Al] +0.2 [% Si]
T = [% Al] +0.2 [% Si] ≦ 0.02%
(However, [% Al] ≦ 0.02% and [% Si] ≦
(B) a hot-rolled material is manufactured from the ingot, and (c) an intermediate cold-rolling is performed on the hot-rolled material. The intermediate cold rolling step of manufacturing a thin plate by repeating annealing and intermediate cold rolling is performed with a working ratio of R = 60 to 95%,
(D) Next, continuous recrystallization final annealing is performed in an atmosphere containing hydrogen, and (e) finally, a workability of 10% to a target thickness.
It is characterized by performing final finish cold rolling of ４０40%.

The present invention also relates to (2) (A) Ni based on the mass percentage (%) (hereinafter referred to as%).
Fe-Ni-based alloy ingots containing -38% and Mn of 0.5% or less and containing 0.010% or less of C, 0.005% or less of S, and 0.005% or less of P as impurities. Melting is performed using Al and Si as deoxidizing agents, in which case the weighted total concentration of Al and Si in the ingot T = [% Al] +0.2 [% Si]
T = [% Al] +0.2 [% Si] ≦ 0.02% (provided that [% Al] ≦ 0.02% and [% Si] ≦ 0.0
(B) a hot-rolled material is manufactured from the ingot, and (c) thereafter, the hot-rolled material is subjected to intermediate cold rolling, and if necessary, annealed. And the intermediate cold rolling are repeated, and the intermediate cold rolling step for producing a thin plate is performed at a working ratio R = 60 to 95%, and R ≦ −17.
(D) Then, continuous recrystallization final annealing is performed in an atmosphere containing hydrogen, and (E) Finally, final finishing cold working with a workability of 10 to 40% to the target thickness is performed. Fe-N excellent in etching piercing property, capable of forming an etching hole having good roundness during etching, characterized by performing rolling.
A method for producing a material for an i-based alloy shadow mask is also provided. The present invention further includes (3) (a) 34-38% of Ni and 0.5% or less of Mn based on mass percentage (%) (hereinafter referred to as%), and 0.01% or less as an impurity.
0% or less of C, 0.005% or less of S and 0.005%
% Of P-containing ingot of Fe-Ni alloy is melted using Al and Si as a deoxidizing agent, in which case the weighted total concentration of Al and Si in the ingot T = [% Al] +0 .2 [% Si], T = [% A
l] +0.2 [% Si] ≦ 0.02% (However, [% A
l] ≦ 0.02% and [% Si] ≦ 0.025%), and (b) a hot-rolled material is manufactured from the ingot. Cold rolling is performed on the steel sheet, and annealing and intermediate cold rolling are repeated as necessary, and the intermediate cold rolling step for manufacturing a thin plate is performed at a working ratio of R = 60 to 95% and R ≦ −1750T + 9.
5). (D) Then, continuous recrystallization final annealing is performed in an atmosphere containing hydrogen, and (e) final finishing cold rolling is performed at a workability of 10 to 40% to a target thickness. (F) The final finish cold-rolled material is etched to form an electron beam transmission hole, and the roundness of the medium hole of the transmission hole is determined by the square of the maximum diameter in area. Fe having an electron beam transmitting hole having good roundness and having a shape factor obtained by multiplying the divided value by 100 is 400 to 440.
A method for producing a material for a Ni-based alloy shadow mask is provided.

[0013]

DETAILED DESCRIPTION OF THE INVENTION In the present invention, the manufacturing process itself follows a conventional method. As described above, in the production of the Fe—Ni alloy shadow mask, a predetermined Fe—Ni
Using Al and Si as deoxidizers for alloys
After vacuum melting in an IM furnace or smelting by out-of-pile smelting in an LF, it is cast into an ingot, forged, hot rolled, the oxide scale on the surface of the slab is removed, and cold rolling and annealing are repeated. An intermediate cold rolling step is performed, and after final annealing, final finishing cold rolling is performed to finish to a predetermined sheet thickness of 0.3 mm or less. Then, slitting is performed to obtain a predetermined plate width to obtain a shadow mask material. After degreasing, the shadow mask material is coated with a photoresist on both sides, and after baking and developing a pattern, it is perforated with an etchant, and cut into individual flat masks. The flat mask is annealed in a non-oxidizing atmosphere to give press workability (in the pre-anneal method, this annealing is performed on the final rolled material before etching), and then spherically formed into a mask form by pressing. Is done. And finally,
After degreasing, the spherical shaped mask is subjected to a blackening treatment in a steam or combustion gas atmosphere to form a blackened oxide film on the surface. Thus, a shadow mask is manufactured. According to the present invention, there is provided a material for an Fe-Ni-based alloy shadow mask having excellent etching piercing properties and a method for producing a material for an Fe-Ni-based alloy shadow mask having electron beam transmitting holes having good roundness.

In the present invention, the Fe—Ni-based alloy
The i content is in the range of 34-38%. If it is less than 34% and if it exceeds 38%, the coefficient of thermal expansion of the alloy material is large and is unsuitable for shadow masks.
Limited to the range of ~ 38%. Furthermore, the upper limits of the amounts of impurities and accompanying elements of the alloy material are limited for the reasons described below.

A) Al and Si contents Al and Si are added at the time of ingot melting for the purpose of deoxidation. Al and S in the produced ingot
If the total amount of the i content is large, the (200) texture is remarkably developed, and the roundness of the etching hole is reduced.
And weighted total amount of Si content T = [% Al] +
0.2 [% Si] ≦ 0.02% (However, [% Al] ≦
0.02% and [% Si] ≦ 0.025%). An Fe-Ni alloy containing 34% to 38% of Ni is face-centered cubic. Both Al and Si present there promote the development of the (200) texture. Thus (2
00) The total amount (T) of the Al and Si contents has a great influence on the development of the texture, but the contribution of Al and Si is different.
Weighted sum of l and Si contents T = [% Al] +
0.2 [% Si] was adopted. In order to suppress the (200) texture development to a degree sufficient to prevent the roundness of the etched hole from being reduced, the total weight (T) needs to be 0.02% or less. This is the result of many experiments. In this case, regulation of the absolute amounts of Al and Si is also necessary in consideration of the etching property of the shadow mask material and other considerations.
≤ 0.02% and [% Si] ≤ 0.025%.

B) Mn Content Mn is included in iron-based alloys to detoxify S, which inhibits hot workability. If the content is small, a sufficient effect cannot be obtained. However, when the content exceeds 0.5%, the material becomes hard, and the workability of the material becomes poor.
Therefore, the upper limit of the Mn content is set to 0.5%.

C) C content If C exceeds 0.10%, the formation of carbides impairs the etching piercing property, making the material unsuitable for use as a shadow mask. Therefore, the upper limit of the C content is 0.010
%.

D) S content If S exceeds 0.005%, the hot workability of the material is significantly impaired. Therefore, the upper limit of the S content is set to 0.005%.

E) P content If the P content exceeds 0.005%, the etching piercing property of the material is hindered, and the material is not suitable for use as a shadow mask. Therefore, the upper limit of the P content is set to 0.005%.

F) Workability of Intermediate Rolling When the workability exceeds 95%, the (200) texture is remarkably developed and the roundness of the etched hole is reduced even if the Al and Si transfer rates are adjusted to the above ranges. descend. On the other hand, processing degree is 60%
When the value is less than the above, the composition ratio of the diffraction intensity of the (200) plane in the product becomes too low, the etching rate is reduced, and the effect of cost reduction is also reduced. Therefore, the degree of processing is 60 to 9
It was specified in the range of 5%. Here, "intermediate cold rolling" means that a thin plate is produced by performing intermediate cold rolling and annealing at least once on a hot-rolled material produced from an ingot through forging and hot rolling. The intermediate cold rolling step before the final finish cold rolling is performed, and the number of times is not limited. However, in the present invention, since the degree of intermediate rolling can be increased, the number of times of intermediate cold rolling can be reduced as compared with the conventional case. The intended purpose can be achieved even by one intermediate cold rolling. Further, R ≦ 1750T
If the relationship of +95 is satisfied, the degree of development of the (200) texture can be suppressed to a very low level, and an etching hole with extremely good roundness can be obtained. This relation is
Since T = [% Al] +0.2 [% Si] ≦ 0.02%, R = 60 to 95% is realized in the range of T = 0 to 0.02%. It is quantified. With this relational expression, the range of the intermediate rolling workability that can be employed can be quantitatively determined according to the total transferability of Al and Si in the ingot.

G) Final annealing Final annealing is a step of performing recrystallization final annealing prior to final cold rolling. It is performed continuously in an atmosphere containing hydrogen.

H) Final Rolling Degree The final rolling is a final finishing cold rolling step which is performed to finish to a target shadow mask material thickness after final annealing. Thereafter, the shadow mask material is subjected to etching, cut into a flat mask, and then subjected to annealing for imparting press formability (in the case of a pre-annealing method, this annealing is performed before etching). Done.) Final annealing is a step of performing continuous recrystallization final annealing in an atmosphere containing hydrogen. If the final rolling degree exceeds 40%, the rolling texture develops extremely, and the etching rate decreases. On the other hand, the final rolling degree is 10%
If the value is lower than the above range, an unrecrystallized structure remains in the annealing before the press working, and the pressability decreases. Therefore, the final rolling degree was set to 10 to 40%.

[0023]

EXAMPLE First, an Fe-Ni-based alloy ingot was melt-cast by changing the concentrations of Al and Si used as deoxidizing agents by a vacuum melting method. The concentrations of the elements other than Al and Si were adjusted to the following ranges: Ni: 34.0% to 38.
0%, Mn: 0.5% or less, C: 0.010% or less, S:
0.005% or less, P: 0.005% or less. Next, the ingot was hot forged and hot rolled. Then, after removing the oxide scale on the surface, one intermediate cold rolling (intermediate working degree R) was performed. Thereafter, final annealing and final finishing cold rolling were performed to produce a shadow mask material alloy strip having a thickness of 0.13 mm. The final cold rolling was performed by dull rolling. Therefore, the manufacturing process can be summarized as follows: ingot → hot forging → hot rolling → intermediate cold rolling → final annealing → final finish cold rolling (dull rolling). Table 1 shows the component composition of each sample, T (= Al% + 0.2Si).
%), The degree of intermediate working R, and the (200) plane diffraction intensity composition ratio (according to the above formula).

Of the alloy strips obtained here, sample no.
Nos. 1 to 12 are examples satisfying the requirements of the present invention. 13 to 19 and 20 to 25 are comparative examples.

Next, a well-known photolithography technique is applied to these alloy strips, and a diameter of 80 μm is applied to one surface of the alloy strip.
After forming a resist mask having a large number of m-shaped circular openings and a 180 μm-diameter perfectly circular opening at a position opposite to the other surface, an aqueous solution of an aqueous ferric chloride solution is sprayed. , A transmission hole was formed. Then, the roundness of the middle hole of the transmission hole was evaluated by a shape factor obtained by multiplying the square of the maximum diameter by the area by 100 times. In the case of a perfect circle,
The shape factor is 400. Therefore, the roundness becomes worse as the numerical value increases from 400. The roundness was evaluated as good (good) when the shape factor was 400 to 440, poor (somewhat bad) when 441 to 460, and (bad) when it was 461 or more.
Was evaluated. The evaluation results are also shown in Table 1.

[0026]

[Table 1]

From the results shown in Table 1, the sample No. As shown in 1 to 12, the weighted total concentration T of the Al and Si concentrations is T = [% Al] +0.2 [% Si] ≦
The sample satisfying 0.02% showed good etching piercing properties without impairing the roundness of the intermediate holes of all the transmission holes.
In particular, the sample No. No. 7 showed good roundness even though the intermediate processing degree R was as high as 95%. However, sample N
o. 3 and No. 3 5, the total concentration T of Al and Si is T = [% Al] +0.2 [% Si] ≦ 0.02
%, The intermediate working ratio R is R ≦ -1750T.
Those exceeding the relationship of +95 slightly exceeded the region where the shape factor was good.

On the other hand, the sample No. 13-17 are
Al and Si concentrations are T = [% Al] +0.2 [% Si]
Exceeded 0.02%, the ratio of diffraction intensity of the (200) plane was 92 to 100%, and the shape factor was poor. The sample No. No. 18 has the Al and Si concentrations satisfying the specified ranges, but has an intermediate rolling degree of 9
Since it exceeds 5%, the composition ratio of the diffraction intensity of the (200) plane is high, and the shape factor is poor. Sample N
o. In No. 19, although the Al and Si concentrations satisfy the specified ranges, the intermediate rolling degree is as low as 50%.
Since the composition ratio of the diffraction intensity of the 0) plane was too low and the etching rate was lowered, a predetermined shape could not be obtained under the same etching conditions, so that the sample was regarded as defective. Further, the sample N
o. In Nos. 20 and 21, the Al and Si concentrations and the shape coefficient satisfy the specified ranges, but the Ni concentration is out of the specified ranges, the thermal expansion coefficient is large, and it is unsuitable as a shadow mask. And Sample No. 22
Although the Al and Si concentrations satisfy the specified ranges, the C concentration exceeds the specified ranges, and carbides are generated in the alloy, so that the etching rate is reduced, and a predetermined shape is formed under the same etching conditions. It was defective because it could not be obtained. Sample No. In No. 23, since the Mn concentration exceeded the specified range, the material became extremely hard, cracks occurred during cold working, and the working could not be performed to a predetermined thickness. Sample No.
In No. 24, since the S concentration exceeded the specified range, cracks occurred during hot rolling, and processing could not be performed to a predetermined thickness. Sample No. In No. 25, the Al and Si concentrations satisfied the specified ranges, but the P concentration exceeded the specified ranges, so that the etching rate was reduced, and a predetermined shape could not be obtained under the same etching conditions, and the sample was defective. .

That is, from the above results, by satisfying the requirements of the present invention, even if the intermediate working degree is increased, the excellent etching piercing property can be obtained without impairing the roundness at the time of etching, and the Fe—Ni-based alloy can be improved. It became possible for the first time to apply it to materials for shadow masks.

[0030]

As described above, according to the present invention, in a shadow mask material of an Fe-Ni alloy,
The electron beam transmission holes formed by the etching process can be perforated without impairing the roundness. In particular, from the viewpoint of cost saving, even if the rolling degree before final annealing is increased, {100}
An Fe-Ni-based alloy material for a shadow mask in which a texture is difficult to develop can be manufactured. The industrial significance of the present invention, which succeeded in establishing a low-cost production method of a material for an Fe-Ni-based alloy shadow mask, is significant.

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[Procedure amendment]

[Submission date] May 1, 2000 (2000.5.1)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0009

[Correction method] Change

[Correction contents]

[0009]

Means for Solving the Problems The present inventors have conducted various studies to achieve the above object, and have obtained the following new findings. That is, it has been found that the Al and Si concentrations in the Fe—Ni-based alloy for the shadow mask greatly affect the development of the (200) plane texture during rolling. Specifically weighted total concentration of Al concentration and Si concentration in the (T), T = [% Al] + 0.2
If it is adjusted to the range of [% Si] ≦ 0.02%, the (200) texture does not develop so much even if the intermediate rolling degree (R) is set as high as 60 to 95 % from the viewpoint of cost saving. It has been found that an etching hole having an acceptable level of roundness as a product can be obtained. Furthermore, R ≦ - 1750
It has also been found that if the relationship of T + 95 is satisfied, the degree of development of the (200) texture can be suppressed to a very low level, and an etching hole with extremely good roundness can be obtained. The (200) texture suppression effect due to the reduction of Al and Si is recognized regardless of the presence or absence of impurities when Ni is in the range of 34 to 38%.

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification code FI Theme coat ゛ (Reference) C22C 38/08 C22C 38/08 F term (Reference) 4K037 EA01 EA05 EA15 EA21 EA23 EA25 EA27 FG03 FH01 FM01 HA04 JA02 JA06 5C027 HH02 5C031 EE05

Claims (3)

[Claims] 1. (a) Based on mass percentage (%) (hereinafter referred to as%), contains 34 to 38% of Ni and 0.5% or less of Mn, and contains 0.010% or less of impurities as impurities. C, S up to 0.005% and P up to 0.005%
Is melted using Al and Si as deoxidizing agents, in which case the weighted total concentration T of Al and Si in the ingot is T =
[% Al] +0.2 [% Si], T = [% Al] +
0.2 [% Si] ≦ 0.02% (However, [% Al] ≦
0.02% and [% Si] ≦ 0.025%) (b) producing a hot-rolled material from the ingot; Perform intermediate cold rolling, repeat annealing and intermediate cold rolling as necessary,
The intermediate cold rolling process for producing a thin plate is performed at a working degree R = 60-9.
(D) Next, continuous recrystallization final annealing is performed in an atmosphere containing hydrogen. (E) Finally, final finish cold rolling with a workability of 10 to 40% to a target thickness is performed. A method for producing a material for an Fe-Ni-based alloy shadow mask excellent in etching piercing property, which enables formation of an etching hole having good roundness during etching. 2. (a) Based on the mass percentage (%) (hereinafter referred to as%), it contains 34 to 38% of Ni and 0.5% or less of Mn, and contains 0.010% or less as an impurity. C, S up to 0.005% and P up to 0.005%
Is melted using Al and Si as deoxidizing agents, in which case the weighted total concentration T of Al and Si in the ingot is T =
[% Al] +0.2 [% Si], T = [% Al] +
0.2 [% Si] ≦ 0.02% (However, [% Al] ≦
0.02% and [% Si] ≦ 0.025%) (b) producing a hot-rolled material from the ingot; Perform intermediate cold rolling, repeat annealing and intermediate cold rolling as necessary,
The intermediate cold rolling process for producing a thin plate is performed at a working degree R = 60-9.
5% and R ≦ -1750T + 95. (D) Next, continuous recrystallization final annealing is performed in an atmosphere containing hydrogen, and (e) finally, a workability of 10% to a target thickness. Fe-Ni-based alloy shadow mask excellent in etching piercing property, capable of forming an etching hole having good roundness during etching, characterized by performing final finish cold rolling of up to 40%. Material manufacturing method. 3. (a) Based on the mass percentage (%) (hereinafter referred to as%), contains 34 to 38% of Ni and 0.5% or less of Mn, and contains 0.010% or less as an impurity. C, S up to 0.005% and P up to 0.005%
Is melted using Al and Si as deoxidizing agents, in which case the weighted total concentration T of Al and Si in the ingot is T =
[% Al] +0.2 [% Si], T = [% Al] +
0.2 [% Si] ≦ 0.02% (However, [% Al] ≦
0.02% and [% Si] ≦ 0.025%) (b) producing a hot-rolled material from the ingot; Perform intermediate cold rolling, repeat annealing and intermediate cold rolling as necessary,
The intermediate cold rolling process for producing a thin plate is performed at a working degree R = 60-9.
5%, if necessary, under the condition of R ≦ -1750T + 95. (D) Next, continuous recrystallization final annealing is performed in an atmosphere containing hydrogen, and (e) working ratio of 10 to 40 to the target thickness. % Final finish cold rolling, and (f) etching the final finish cold rolled material to form electron beam transmitting holes, A method for producing a material for an Fe-Ni-based alloy shadow mask having electron beam transmitting holes having good roundness, wherein the shape factor obtained by multiplying the value obtained by dividing the square of the maximum diameter by the area by 100 is 400-460. .