JP2001259621A - Water treating device - Google Patents

Water treating device

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Publication number
JP2001259621A
JP2001259621A JP2000081643A JP2000081643A JP2001259621A JP 2001259621 A JP2001259621 A JP 2001259621A JP 2000081643 A JP2000081643 A JP 2000081643A JP 2000081643 A JP2000081643 A JP 2000081643A JP 2001259621 A JP2001259621 A JP 2001259621A
Authority
JP
Japan
Prior art keywords
water
treated
excimer lamp
oxygen
water treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000081643A
Other languages
Japanese (ja)
Inventor
Kenji Sakamoto
健二 坂元
Masahiro Tokida
昌広 常田
Koji Oshima
功治 大島
Chikayoshi Endo
慎良 遠藤
Shigeru Ando
茂 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toto Ltd
Original Assignee
Toto Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toto Ltd filed Critical Toto Ltd
Priority to JP2000081643A priority Critical patent/JP2001259621A/en
Publication of JP2001259621A publication Critical patent/JP2001259621A/en
Pending legal-status Critical Current

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  • Treatment Of Water By Oxidation Or Reduction (AREA)
  • Physical Water Treatments (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a water treating device efficiently decomposing and removing organic compounds in water to be treated by using an excimer lamp without requiring the addition of a special component. SOLUTION: In the water treating device provided with a first treating mechanism having an oxygen dissolving means for dissolving oxygen into influent water to be treated, and a second treating mechanism for treating the water to be treated by UV rays irradiated from the excimer lamp, the water to be treated with dissolved oxygen concentration adjusted to more than a specified value by the first treating mechanism is fed to the second treating mechanism.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、被処理水に含まれ
る有害成分を紫外線により除去する水処理装置に関す
る。
[0001] The present invention relates to a water treatment apparatus for removing harmful components contained in water to be treated by ultraviolet rays.

【0002】[0002]

【従来の技術】従来、水質汚染または大気汚染を起こす
水中の有機化合物の処理方法として、活性炭吸着処理、
オゾンの酸化力を利用したオゾン処理、膜処理などが実
施されている。これらの処理法のうち、活性炭処理は活
性炭は吸着材であるため、吸着量が飽和すると性能が低
下し、浄化性能を維持するために新品と交換する必要が
あるため、経済的ではなく、さらに使用済みの活性炭を
処分する手間がかかる。また、活性炭を再生する方式で
は、装置が複雑になり大型になる。さらに、活性炭で吸
着できる有害有機化合物は、一般的に疎水性の有機物や
非極性の官能基を有する有機物であるため、親水性や極
性の高い有機物は活性炭では吸着除去できない。もしく
は吸着除去しにくいといった問題があった。またオゾン
処理は脱色、脱臭、殺菌効果は優れているが、汚濁物質
の分解機能が低い。膜処理は水処理という観点からは優
れているが、廃棄物を複製するという問題があった。
2. Description of the Related Art Conventionally, activated carbon adsorption treatment has been used as a method for treating organic compounds in water that cause water or air pollution.
Ozone treatment and film treatment utilizing the oxidizing power of ozone are being carried out. Among these treatment methods, activated carbon treatment is not economical because activated carbon is an adsorbent, and its performance decreases when the adsorption amount is saturated, and it is necessary to replace it with a new one in order to maintain purification performance. It takes time to dispose of used activated carbon. In addition, in the method of regenerating activated carbon, the apparatus becomes complicated and large. Furthermore, harmful organic compounds that can be adsorbed by activated carbon are generally hydrophobic organic substances or organic substances having a non-polar functional group. Therefore, organic substances having high hydrophilicity or polarity cannot be adsorbed and removed by activated carbon. Another problem is that it is difficult to remove by adsorption. In addition, the ozone treatment has excellent decolorization, deodorization and sterilization effects, but has a low function of decomposing pollutants. Membrane treatment is excellent from the viewpoint of water treatment, but has the problem of replicating waste.

【0003】そこで前記処理法の問題点を総合的に解決
するために低圧水銀ランプやエキシマランプと酸化剤、
たとえばオゾンガスや過酸化水素との複合処理が知られ
ている(特開平11−33569)。 記載の処理法は
酸化剤により非常に酸化力の強い活性種を生成させ、生
成した活性種をもって被処理水を処理するものである。
活性種はオゾンや過酸化水素よりも強力な酸化剤であ
り、オゾン単独では分解できない被処理中の有害成分を
分解除去することが可能である。また脱臭、脱色、殺菌
効果が優れている上に二次的廃棄物も発生しない効果的
な処理方法である。
Therefore, in order to comprehensively solve the problems of the above-mentioned processing methods, a low-pressure mercury lamp or an excimer lamp and an oxidizing agent are used.
For example, a composite treatment with ozone gas and hydrogen peroxide is known (Japanese Patent Application Laid-Open No. 11-33569). In the treatment method described, active species having extremely strong oxidizing power are generated by an oxidizing agent, and the water to be treated is treated with the generated active species.
The active species is a stronger oxidizing agent than ozone or hydrogen peroxide, and can decompose and remove harmful components during processing that cannot be decomposed by ozone alone. In addition, it is an effective treatment method that has excellent deodorizing, decoloring and sterilizing effects and does not generate secondary waste.

【0004】また水中の溶存酸素から活性種を発生させ
る波長の紫外線を高出力で発するエキシマランプを利用
して被処理水に酸化剤を添加することなく、被処理水を
処理する方法も知られている。(特開平10―2167
16)
There is also known a method of treating water to be treated without adding an oxidizing agent to the water to be treated by using an excimer lamp which emits, at a high output, ultraviolet rays having a wavelength for generating active species from dissolved oxygen in the water. ing. (JP-A-10-2167
16)

【0005】[0005]

【発明が解決しようとする課題】しかしながら、前記の
オゾンや過酸化水素と紫外線を併用する処理方法は強力
な酸化酸化作用を有し、他の方法では処理の難しい有機
化合物をクリーンに処理できるため極めて優れた特徴を
有する反面、未反応の過酸化水素、オゾンガスを後工程
で除去しなければならなず、装置装置が複雑になり大が
かりになるといった問題があった。
However, the above-mentioned treatment method using ozone or hydrogen peroxide in combination with ultraviolet rays has a strong oxidizing and oxidizing effect, and can clean organic compounds which are difficult to treat by other methods. Although it has extremely excellent characteristics, unreacted hydrogen peroxide and ozone gas have to be removed in a subsequent step, and there has been a problem that the apparatus becomes complicated and large.

【0006】また、エキシマランプ単独処理の場合は、
未反応な酸化剤を除去する必要はないが、被処理中の溶
存酸素濃度によって活性種の生成量が変化するため、同
じ濃度の有機化合物を含んだ被処理水に同様にエキシマ
ランプを照射した場合でも、被処理水中に含まれる溶存
酸素濃度によって分解効率が異なるといった問題があっ
た。また、溶存酸素濃度の低い被処理水に対しては処理
にかかる時間が長くなりランニングコストが高くなると
いう問題があった。
In the case of excimer lamp single treatment,
It is not necessary to remove the unreacted oxidizing agent, but since the amount of active species generated varies depending on the dissolved oxygen concentration during the treatment, the treated water containing the same concentration of the organic compound was similarly irradiated with an excimer lamp. Even in this case, there is a problem that the decomposition efficiency varies depending on the concentration of dissolved oxygen contained in the water to be treated. In addition, there is a problem that the time required for the treatment of the water to be treated having a low dissolved oxygen concentration is increased, and the running cost is increased.

【0007】本発明は上記課題を解決するためになされ
たものであり、紫外線を利用した水処理装置において、
酸素溶解手段を備え、被処理水に酸素を溶解させる第一
処理機構と、第一処理機構で処理された被処理水をエキ
シマランプから照射される紫外線により処理するする第
二処理機構からなる水の浄化方法であって、第一処理機
構出口側の被処理水中の溶存酸素濃度が所定の値以上に
維持されるように酸素溶解手段を制御することを水の浄
化装置を提供することを目的とする。本発明により、酸
化剤を添加することがなく、また常に安定した高い分解
効率で被処理水を処理できるため、処理コスト、処理時
間の低減を計ることができる。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and a water treatment apparatus using ultraviolet light includes:
Water comprising an oxygen dissolving means, a first treatment mechanism for dissolving oxygen in the water to be treated, and a second treatment mechanism for treating the water to be treated treated by the first treatment mechanism with ultraviolet rays emitted from an excimer lamp. The object of the present invention is to provide an apparatus for purifying water by controlling the oxygen dissolving means so that the concentration of dissolved oxygen in the water to be treated on the outlet side of the first treatment mechanism is maintained at a predetermined value or more. And According to the present invention, the water to be treated can be treated without adding an oxidizing agent and always at a stable and high decomposition efficiency, so that the treatment cost and the treatment time can be reduced.

【0008】[0008]

【課題を解決するための手段および作用・効果】本発明
の研究の結果、被処理水中の有機化合物の濃度や種類に
影響される値ではあるが、被処理水中の溶存酸素濃度
が、分解効率に大きく影響することがわかった。すなわ
ち溶存酸素濃度を一定水準に維持すればエキシマランプ
を利用した有機化合物の分解効率が上昇し、安定した処
理が可能で有ることを見いだした。
Means for Solving the Problems and Action / Effect As a result of the research of the present invention, although the value is affected by the concentration and type of the organic compound in the water to be treated, the dissolved oxygen concentration in the water to be treated depends on the decomposition efficiency. Was found to have a significant effect on That is, it has been found that if the dissolved oxygen concentration is maintained at a constant level, the efficiency of decomposing organic compounds using an excimer lamp increases, and stable processing is possible.

【0009】そこで本発明は、流入した被処理水に酸素
を溶解させる酸素溶解手段を有する第一処理機構と、被
処理水をエキシマランプから照射される紫外線により処
理する第二処理機構とを備えた水処理装置において、前
記第一処理機構によって溶存酸素濃度が所定の値以上に
調整された被処理水を前記第二処理機構へ供給すること
を特徴とする。
Accordingly, the present invention comprises a first treatment mechanism having oxygen dissolving means for dissolving oxygen in the inflowing water to be treated, and a second treatment mechanism for treating the water to be treated with ultraviolet rays emitted from an excimer lamp. In the water treatment apparatus, the water to be treated whose dissolved oxygen concentration has been adjusted to a predetermined value or more by the first treatment mechanism is supplied to the second treatment mechanism.

【0010】まず、図1に通常水処理に用いられる低圧
水銀ランプとエキシマランプを被処理水に照射したとき
の、被処理水中の溶存酸素濃度の変化を示す。図1を見
てわかるように、エキシマランプを用いた場合は、水中
の溶存酸素から有機化合物分解に寄与する活性種を生成
する波長の紫外線を高出力で照射するために、被処理水
中の溶存酸素濃度が著しく低下していくことがわかる。
First, FIG. 1 shows a change in the concentration of dissolved oxygen in the water to be treated when the water to be treated is irradiated with a low-pressure mercury lamp and an excimer lamp which are usually used for water treatment. As can be seen from FIG. 1, when an excimer lamp is used, the dissolved oxygen in the water to be treated is radiated with high output from the dissolved oxygen in the water at a wavelength that generates active species that contribute to the decomposition of organic compounds. It can be seen that the oxygen concentration decreases significantly.

【0011】また図2にエキシマランプを用いた水処理
における、水中の初期溶存酸素濃度と有機物濃度(TO
C)の変化を示す。ここでDOとは溶存酸素をしめす。
前述したように、エキシマランプから出力される紫外線
により水中の溶存酸素から有機物分解に寄与する活性種
が生成され、その活性種が有機物分解に寄与するため、
溶存酸素濃度が高いほど有機物分解能力が高いことがわ
かる。また溶存酸素量として6ppm以上が好ましいこと
がわかる
FIG. 2 shows the initial dissolved oxygen concentration and organic matter concentration (TO) in the water treatment using an excimer lamp.
C) shows the change. Here, DO means dissolved oxygen.
As described above, active species that contribute to organic matter decomposition are generated from dissolved oxygen in water by ultraviolet light output from an excimer lamp, and the active species contributes to organic matter decomposition.
It can be seen that the higher the dissolved oxygen concentration, the higher the organic matter decomposition ability. Also, it is understood that the dissolved oxygen content is preferably 6 ppm or more.

【0012】このことより上記構成にすることによっ
て、分解効率に寄与する溶存酸素濃度が常に一定濃度以
上に保たれた被処理水にエキシマランプから出力される
紫外線を照射することができるため、分解効率が高く、
かつ安定した分解能力を発揮する水処理装置を提供する
ことができる。
[0012] With the above structure, the water to be treated, in which the concentration of dissolved oxygen contributing to the decomposition efficiency is always kept at a certain concentration or more, can be irradiated with ultraviolet light output from an excimer lamp. High efficiency,
Further, a water treatment apparatus exhibiting a stable decomposition ability can be provided.

【0013】また、被処理水に酸素を溶解させる際、酸
素ガスを被処理水中にバブリングしてとけ込ませること
が考えられるが、この処理を紫外線を照射する工程で同
時に行うと、被処理水中で気泡として存在する酸素ガス
と紫外線が反応して人体に有害なオゾンガスが生成し、
このオゾンガスを処理する工程を別途設ける必要があ
り、装置が大がかりになる。
When dissolving oxygen in the water to be treated, it is conceivable that oxygen gas is dissolved by bubbling into the water to be treated. Oxygen gas present as air bubbles reacts with ultraviolet light to produce ozone gas harmful to the human body,
It is necessary to separately provide a step of treating the ozone gas, and the apparatus becomes large.

【0014】本発明の構成のように酸素を溶解させる工
程と紫外線を照射する工程を分けることでこのようなオ
ゾンガスが発生することがなく、オゾンガス除去工程を
省くことができる。
By separating the step of dissolving oxygen and the step of irradiating ultraviolet rays as in the structure of the present invention, such ozone gas is not generated, and the ozone gas removing step can be omitted.

【0015】また好ましくは 前記請求項1記載の水処
理装置において、第二処理機構から流出した処理水を再
び第一処理機構に流入させる循環路を設け、被処理水を
第一処理機構と第二処理機構を循環させながら処理する
ことを特徴とする。
Preferably, in the water treatment apparatus according to claim 1, a circulation path is provided for allowing the treated water flowing out of the second treatment mechanism to flow again into the first treatment mechanism, so that the water to be treated is connected to the first treatment mechanism. Processing is performed while circulating through the two processing mechanisms.

【0016】図1に示すように、被処理水中に含まれる
有機化合物濃度にもよるが、エキシマランプを用いて水
処理を行う場合、エキシマランプは水中の溶存酸素から
有機化合物分解に寄与する活性種を生成する波長の紫外
線を高出力で照射するために、被処理水中の溶存酸素濃
度が低下してくる。よって第二処理機構において紫外線
による有機化合物処理において、溶存酸素濃度が不足し
てくると、その分解速度が低下することが考えられる。
このことより上記構成にすることにより、第二処理機構
においてエキシマランプによる紫外線処理において減少
した溶存酸素を第一処理機構において再び被処理水中に
酸素を供給し補うことができるため、迅速かつ高い分解
効率で安定に有機化合物の処理を行うことができる。
As shown in FIG. 1, depending on the concentration of organic compounds contained in the water to be treated, when water treatment is carried out using an excimer lamp, the excimer lamp has an activity that contributes to decomposition of organic compounds from dissolved oxygen in the water. Since high-output ultraviolet rays having a wavelength for generating seeds are irradiated, the concentration of dissolved oxygen in the water to be treated decreases. Therefore, when the dissolved oxygen concentration becomes insufficient in the treatment of the organic compound with ultraviolet rays in the second treatment mechanism, the decomposition rate may be reduced.
From this, by adopting the above configuration, the dissolved oxygen reduced in the ultraviolet treatment by the excimer lamp in the second treatment unit can be supplied again to the water to be treated in the first treatment unit by supplying oxygen thereto, so that rapid and high decomposition is achieved. The organic compound can be efficiently and stably processed.

【0017】また、好ましくは被処理水の溶存酸素濃度
を検出する溶存酸素検出部を備えたことを特徴とする。
Preferably, the apparatus further comprises a dissolved oxygen detector for detecting the concentration of dissolved oxygen in the water to be treated.

【0018】溶存酸素検出部がない場合でも、酸素溶解
手段により、過剰に酸素を添加することで、被処理水を
所定の値以上の溶存酸素濃度に保つことができるが、溶
存酸素検出部を設けることで、溶存酸素濃度が検知でき
るため、適量の酸素を供給することができるため、処理
コストの低減がはかれ、また酸素の溶解がスムーズに短
時間で行える。
Even when there is no dissolved oxygen detector, the water to be treated can be kept at a dissolved oxygen concentration of a predetermined value or more by adding oxygen excessively by the oxygen dissolving means. By providing this, the dissolved oxygen concentration can be detected, and an appropriate amount of oxygen can be supplied. Therefore, the processing cost can be reduced, and the oxygen can be dissolved smoothly and in a short time.

【0019】さらに本発明の好ましい様態として、前記
第二処理機構を通過する処理水の流量を検知する手段を
設け、流量に応じてエキシマランプからの紫外線出力を
制御することを特徴とする。
Further, as a preferred embodiment of the present invention, means for detecting the flow rate of the treated water passing through the second treatment mechanism is provided, and the ultraviolet output from the excimer lamp is controlled according to the flow rate.

【0020】従来の水処理装置においては、処理水の流
量変化に応じて、有機化合物の分解除去能力は変化しな
い。そのため、処理水の流量が適量の場合は、十分な性
能が発揮されるが、流量が多くなると有機化合物除去性
能が不足し、有機化合物が満足に除去されていない水と
なる。
In the conventional water treatment apparatus, the ability to decompose and remove organic compounds does not change according to the flow rate of the treated water. Therefore, when the flow rate of the treated water is an appropriate amount, sufficient performance is exhibited. However, when the flow rate is increased, the organic compound removal performance is insufficient, and the water does not sufficiently remove the organic compound.

【0021】本発明の水処理装置により、第二処理機構
を通過する処理水の流量を検知する手段を設け、流量に
応じてエキシマランプからの紫外線出力を制御すること
ができる水処理装置であるため、流量が変化しても有機
化合物分解除去性能が低下しない。結果、水の流量が変
化しても有機化合物を除去した安全で清澄な水を供給で
きる。
The water treatment apparatus of the present invention is provided with a means for detecting the flow rate of the treated water passing through the second treatment mechanism, and is capable of controlling the ultraviolet output from the excimer lamp according to the flow rate. Therefore, even if the flow rate changes, the performance of decomposing and removing organic compounds does not decrease. As a result, even if the flow rate of water changes, safe and clear water from which organic compounds have been removed can be supplied.

【0022】また好ましくは、前記酸素溶解手段がエジ
ェクタであることを特徴とする。
Preferably, the oxygen dissolving means is an ejector.

【0023】エジェクタは被処理水に酸素を効率良く溶
解させることができ、さらにコンパクトなため装置規模
の縮小に寄与する。
The ejector can efficiently dissolve oxygen in the water to be treated, and is compact, which contributes to a reduction in the scale of the apparatus.

【0024】また好ましくは、前記酸素溶解手段がポン
プであることを特徴とする。
Preferably, the oxygen dissolving means is a pump.

【0025】ポンプを用いることで強制的に酸素の供給
量を増やすことができるため、より迅速に被処理水に酸
素を溶解させることができる。
Since the supply amount of oxygen can be forcibly increased by using the pump, the oxygen can be more quickly dissolved in the water to be treated.

【0026】またさらに好ましくは、前記酸素溶解手段
がポンプと多孔体を用いたものであることを特徴とす
る。
Still more preferably, the oxygen dissolving means uses a pump and a porous body.

【0027】酸素を気泡として混入させ被処理水に溶解
させる際、その溶解性は、気泡と被処理水の接触面積に
依存する。よってポンプと多孔体を用いて、微細な気泡
を被処理水に混入させることによって、より迅速に被処
理水に酸素を溶解させることができる。
When oxygen is mixed as bubbles and dissolved in the water to be treated, its solubility depends on the contact area between the bubbles and the water to be treated. Therefore, oxygen can be more rapidly dissolved in the water to be treated by mixing minute bubbles into the water to be treated using the pump and the porous body.

【0028】また、好ましくは前記エキシマランプが1
50nm以上200nm以下の紫外線を主波長に発光す
るランプであることを特徴とする。
Preferably, the excimer lamp is 1
It is a lamp that emits ultraviolet light having a main wavelength of 50 nm or more and 200 nm or less.

【0029】紫外線は波長が短くなるほど光子のエネル
ギーが高く、波長200nm以下の光子のエネルギーは
有機化合物中の分解しにくい炭素二重結合(C=C)等
の結合を用意に切断する、また水中の溶存酸素と反応し
て酸化力の強い活性種を生成することが知られている。
また、波長が150nm以下の紫外線は水やエキシマラ
ンプの保護管、または保護板に吸収されるため、有機化
合物分解に寄与する紫外線量が極めて少ない。したがっ
て、波長150nm以上200nm以下の紫外線を主波
長とするエキシマランプにより被処理水中の有機化合物
を効率よく分解除去できる。
The shorter the wavelength of ultraviolet light, the higher the energy of photons. The energy of photons having a wavelength of 200 nm or less readily breaks bonds such as carbon double bonds (C = C) in organic compounds that are difficult to decompose. It is known that it reacts with dissolved oxygen to generate active species having strong oxidizing power.
In addition, since ultraviolet rays having a wavelength of 150 nm or less are absorbed by water or a protective tube or a protective plate of an excimer lamp, the amount of ultraviolet rays that contribute to the decomposition of organic compounds is extremely small. Therefore, an organic compound in the water to be treated can be efficiently decomposed and removed by an excimer lamp having a main wavelength of ultraviolet light having a wavelength of 150 nm to 200 nm.

【0030】さらに好ましい様態として、エキシマラン
プが172nmの紫外線を主波長に発光するランプであ
ることを特徴とする。
In a further preferred embodiment, the excimer lamp is a lamp which emits ultraviolet light having a main wavelength of 172 nm.

【0031】172nmの紫外線を主波長とするキセノ
ンエキシマランプは、他のエキシマランプより高出力の
紫外線を安定に、電気的に高い変換効率で出力すること
ができるため、水道水、洗浄水から効率よく過酸化水素
を生成できるとともに被処理水中の有機化合物を効率良
く分解除去できる。
A xenon excimer lamp having an ultraviolet ray of 172 nm as a main wavelength can stably output ultraviolet light having a higher output than other excimer lamps at a high electrical conversion efficiency. Hydrogen peroxide can be generated well, and organic compounds in the water to be treated can be efficiently decomposed and removed.

【0032】さらに好ましい様態として、エキシマラン
プは紫外線が透過可能な保護管内、またはランプ収納部
の一部が紫外線を透過可能な保護板で構成された収納部
内に収納され、かつ収納部内の雰囲気が300Torr
以下とするか、エキシマランプからの紫外線を吸収しな
いガスを主成分とした雰囲気としたことを特徴とする。
As a further preferred embodiment, the excimer lamp is housed in a protective tube through which ultraviolet light can pass, or in a housing portion in which a part of the lamp housing portion is formed of a protective plate through which ultraviolet light can pass, and the atmosphere in the housing portion is reduced. 300 Torr
Or an atmosphere mainly containing a gas that does not absorb ultraviolet rays from an excimer lamp.

【0033】エキシマランプから出力される紫外線は、
一般的なソーダライムガラス等で形成された保護管、ま
たは保護板ではほとんど透過しない。また、天然石英ガ
ラスのようなケイ素と酸素以外の成分を多く含むガラス
においても透過率は低いが、ケイ素と酸素以外の成分を
微量しか含まない合成石英ガラスやフッ化マグネシウム
ガラスにおいては透過率が高い。また、収納部の雰囲気
が酸素を含む雰囲気である場合、酸素分子に吸収され紫
外線強度が低下するため、300Torr以下とする
か、エキシマランプからの紫外線を吸収しないガスであ
る窒素ガス等が良い。
The ultraviolet light output from the excimer lamp is:
It hardly passes through a protective tube or a protective plate made of general soda lime glass or the like. Also, the transmittance is low in glass containing a large amount of components other than silicon and oxygen, such as natural quartz glass, but the transmittance is low in synthetic quartz glass and magnesium fluoride glass containing only trace amounts of components other than silicon and oxygen. high. Further, when the atmosphere in the storage section is an atmosphere containing oxygen, the intensity of ultraviolet rays is reduced by being absorbed by oxygen molecules. Therefore, the pressure is preferably 300 Torr or less, or nitrogen gas which is a gas which does not absorb ultraviolet rays from an excimer lamp.

【0034】したがって、エキシマランプからの紫外線
が透過可能な保護管内、またはランプ収納部の一部が紫
外線を透過可能な保護板で構成された収納部内に収納さ
れ、かつ収納部内の雰囲気が300Torr以下とする
か、エキシマランプからの紫外線を吸収しないガスを主
成分とした雰囲気とすることにより、被処理水中の有機
化合物を効率良く分解除去できる。
Accordingly, the protective tube through which the ultraviolet rays from the excimer lamp can pass, or a part of the lamp accommodating portion is accommodated in the accommodating portion constituted by the protective plate capable of transmitting the ultraviolet light, and the atmosphere in the accommodating portion is 300 Torr or less. Alternatively, the organic compound in the water to be treated can be efficiently decomposed and removed by setting the atmosphere mainly containing a gas that does not absorb ultraviolet rays from the excimer lamp.

【0035】さらに好ましい様態として、前記エキシマ
ランプ設置部の部材が、エキシマランプからの紫外線を
反射する材質で構成されたことを特徴とする。
In a further preferred aspect, the member of the excimer lamp installation portion is made of a material that reflects ultraviolet light from the excimer lamp.

【0036】エキシマランプから照射された紫外線は、
エキシマランプ設置部内壁により吸収される。被処理水
中にに含まれる溶存酸素や有機化合物と反応させ、効率
よく分解除去するためには、エキシマランプ設置部に吸
収される紫外線量を減らし、反射させることで再度被処
理水中の有機化合物や溶存酸素と反応させることが好ま
しい。そのため、エキシマランプ設置部の内壁の材質を
紫外線反射率の高いアルミニウム、ステンレス等で構成
することが望ましい。
The ultraviolet light emitted from the excimer lamp is
It is absorbed by the inner wall of the excimer lamp installation part. In order to react with dissolved oxygen and organic compounds contained in the water to be treated and efficiently decompose and remove it, reduce the amount of ultraviolet light absorbed by the excimer lamp installation section and reflect it again by It is preferable to react with dissolved oxygen. For this reason, it is desirable that the material of the inner wall of the excimer lamp installation portion be made of aluminum, stainless steel, or the like having high ultraviolet reflectance.

【0037】このことより、エキシマランプからの紫外
線が照射されるエキシマランプ設置部の部材が、エキシ
マランプからの紫外線を反射する材質で構成することに
より、有機化合物を効率良く分解除去できる。
Thus, the organic compound can be efficiently decomposed and removed by forming the member of the excimer lamp installation section to which the ultraviolet light from the excimer lamp is irradiated with a material that reflects the ultraviolet light from the excimer lamp.

【発明の実施の形態】BEST MODE FOR CARRYING OUT THE INVENTION

【0038】以下に本発明の実施例を図3に基づいて説
明する。図3において1は被処理水配管、2は送水ポン
プ、3は反応槽(a:第一処理機構、b:第二処理機
構)、4は酸素供給手段(a:送気ポンプ、b:多孔
体)、5は酸素流量調節計、6は溶存酸素検出部、7は
エキシマランプ、8は被処理水流量計、10は酸素排出
管、12は脱気膜である。
An embodiment of the present invention will be described below with reference to FIG. In FIG. 3, 1 is a pipe to be treated, 2 is a water pump, 3 is a reaction tank (a: first processing mechanism, b: second processing mechanism), 4 is oxygen supply means (a: air supply pump, b: porous) Body), 5 is an oxygen flow controller, 6 is a dissolved oxygen detector, 7 is an excimer lamp, 8 is a flow meter for treated water, 10 is an oxygen discharge pipe, and 12 is a degassing membrane.

【0039】次にかかる実施例の動作について説明す
る。まず被処理水は被処理水配管1を通って送水ポンプ
2により反応槽3aに導入される。ここでは送気ポンプ
4aにより酸素もしくは同伴気体を含む酸素が酸素流量
調節計5、多孔体4bを通って微細な気泡として反応槽
3aに添加される。このことより、被処理水中には十分
に酸素が溶解される。また、通常、被処理水中の有機化
合物の濃度や種類によって被処理水中に含まれる初期溶
存酸素濃度は異なる。そのため、被処理水に酸素溶解手
段を用いて酸素を溶解させる際、溶存酸素検出部6によ
り被処理水中の溶存酸素濃度を検知し、酸素流量調節計
5により酸素供給量を制御することで、過剰に酸素を供
給することを制御する。次に十分に酸素がとけ込んだ被
処理水は流量計8、脱気膜12を通って、エキシマラン
プ7が内装された反応槽3bに導入される。この際、第
一処理機構内の気泡が第一処理機構から第二処理機構へ
の流路に混入した場合でも、この脱気膜により気泡は除
去される。そして、第二処理機構内に導入された処理水
はエキシマランプ7から照射される紫外線、または、エ
キシマランプ7から照射される紫外線が被処理水中の溶
存酸素と反応して生成する活性種によって処理され、被
処理水中の有機化合物が分解される。また、被処理水流
量計8で検出される流量に応じてエキシマランプの紫外
線出力が制御される。
Next, the operation of this embodiment will be described. First, the water to be treated is introduced into the reaction tank 3a by the water feed pump 2 through the water pipe 1 to be treated. Here, oxygen or oxygen containing accompanying gas is added to the reaction tank 3a as fine bubbles through the oxygen flow controller 5 and the porous body 4b by the air supply pump 4a. Thus, oxygen is sufficiently dissolved in the water to be treated. Usually, the initial dissolved oxygen concentration contained in the water to be treated differs depending on the concentration and type of the organic compound in the water to be treated. Therefore, when oxygen is dissolved in the water to be treated using the oxygen dissolving means, the dissolved oxygen detector 6 detects the concentration of dissolved oxygen in the water to be treated, and the oxygen flow controller 5 controls the oxygen supply amount, Control oversupply of oxygen. Next, the water to be treated, in which oxygen has sufficiently dissolved, passes through the flow meter 8 and the deaeration membrane 12, and is introduced into the reaction tank 3b in which the excimer lamp 7 is provided. At this time, even when air bubbles in the first processing mechanism enter the flow path from the first processing mechanism to the second processing mechanism, the air bubbles are removed by the deaeration film. Then, the treated water introduced into the second treatment mechanism is treated with the ultraviolet rays emitted from the excimer lamp 7 or the active species generated by the ultraviolet rays emitted from the excimer lamp 7 reacting with the dissolved oxygen in the water to be treated. The organic compounds in the water to be treated are decomposed. The ultraviolet output of the excimer lamp is controlled according to the flow rate detected by the water flow meter 8 to be treated.

【0040】図4は本発明における第二の実施例であ
る。11は排出弁である。第一の実施例と異なる点は、
構成として、第二処理機構から流出した処理水を再び第
一処理機構に流入させる循環路9を設け、被処理水を第
一処理機構と第二処理機構を循環させながら処理するこ
とである。このことより第二処理機構で消費された溶存
酸素を随時第一処理機構で補うことができるため、被処
理水の処理がよりスムーズに短時間で行われる。処理さ
れた水は排出弁11を開弁することにより吐水される。
FIG. 4 shows a second embodiment of the present invention. 11 is a discharge valve. The difference from the first embodiment is
As a configuration, a circulating path 9 is provided for causing the treated water flowing out of the second treatment mechanism to flow again into the first treatment mechanism, and the treated water is treated while circulating through the first treatment mechanism and the second treatment mechanism. As a result, the dissolved oxygen consumed in the second treatment mechanism can be supplemented by the first treatment mechanism at any time, so that the treatment of the water to be treated is performed more smoothly and in a shorter time. The treated water is discharged by opening the discharge valve 11.

【0041】本実施例において、第一処理機構から第二
処理機構への流路内に混入された気泡を除去する手段と
して脱気膜を例に挙げたが、流路内の気泡を除去できる
ものであれば何でもよく、遠心分離による方法でもよい
In this embodiment, a degassing membrane has been described as an example of a means for removing air bubbles mixed in the flow path from the first processing mechanism to the second processing mechanism. However, air bubbles in the flow path can be removed. Anything may be used, and a method by centrifugation may be used.

【0042】本発明を利用すれば、酸化剤を添加、人体
に有害なオゾン等の除去工程が不要であり、また分解効
率に寄与している溶存酸素濃度を常に所定の値以上に維
持して処理することができるため、安定した高い分解効
率で被処理水を処理でき、処理コスト、処理時間の低減
を計ることができる。
If the present invention is used, a step of adding an oxidizing agent and removing ozone and the like harmful to the human body is unnecessary, and the concentration of dissolved oxygen contributing to the decomposition efficiency is always maintained at a predetermined value or more. Since the water can be treated, the water to be treated can be treated with a stable and high decomposition efficiency, and the treatment cost and the treatment time can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 低圧水銀ランプとエキシマランプを照射にお
ける照射時間と溶存酸素濃度の関係を示した図。
FIG. 1 is a diagram showing a relationship between irradiation time and dissolved oxygen concentration in irradiation with a low-pressure mercury lamp and an excimer lamp.

【図2】 エキシマランプ照射における初期被処理水溶
存酸素濃度別のTOC濃度変化を示した図。
FIG. 2 is a diagram showing a change in TOC concentration depending on the concentration of dissolved oxygen in the initially treated water during excimer lamp irradiation.

【図3】 本発明に係わる水処理装置の実施例1の構成
図である。
FIG. 3 is a configuration diagram of a water treatment apparatus according to a first embodiment of the present invention.

【図4】 本発明に係わる水処理装置の実施例2の構成
図である。
FIG. 4 is a configuration diagram of a water treatment apparatus according to a second embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1:被処理水配管 2:送水ポンプ 3:反応槽(a:第一処理機構、b:第二処理機構) 4:酸素供給手段(a:エアーポンプ、b多孔体) 5:酸素流量調節計 6:溶存酸素検出部 7:エキシマランプ 8:被処理水流量計 9:循環路 10:酸素排出管 11:排出弁 12:脱気膜 1: water pipe to be treated 2: water pump 3: reaction tank (a: first processing mechanism, b: second processing mechanism) 4: oxygen supply means (a: air pump, b porous body) 5: oxygen flow controller 6: dissolved oxygen detector 7: excimer lamp 8: treated water flow meter 9: circulation path 10: oxygen discharge pipe 11: discharge valve 12: degassing membrane

───────────────────────────────────────────────────── フロントページの続き (72)発明者 遠藤 慎良 福岡県北九州市小倉北区中島2丁目1番1 号 東陶機器株式会社内 (72)発明者 安藤 茂 福岡県北九州市小倉北区中島2丁目1番1 号 東陶機器株式会社内 Fターム(参考) 4D037 AA01 AA05 AA11 AB01 BA18 BB01 BB02 BB07 CA12 4D050 AA01 AA12 AB07 BB01 BC09 BD02 BD03 BD06 BD08  ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Shinra Endo 2-1-1 Nakajima, Kokurakita-ku, Kitakyushu-shi, Fukuoka Touchi Kiki Co., Ltd. (72) Inventor Shigeru Ando Nakajima, Kitakyushu-shi, Fukuoka 2-1-1, F-term (reference) in TOTO Kiki Co., Ltd. 4D037 AA01 AA05 AA11 AB01 BA18 BB01 BB02 BB07 CA12 4D050 AA01 AA12 AB07 BB01 BC09 BD02 BD03 BD06 BD08

Claims (11)

【特許請求の範囲】[Claims] 【請求項1】 流入した被処理水に酸素を溶解させる酸
素溶解手段を有する第一処理機構と、被処理水をエキシ
マランプから照射される紫外線により処理する第二処理
機構とを備えた水処理装置において、前記第一処理機構
によって溶存酸素濃度が所定の値以上に調整された被処
理水を前記第二処理機構へ供給することを特徴とする水
処理装置。
1. A water treatment system comprising: a first treatment mechanism having an oxygen dissolving means for dissolving oxygen in the inflowing water to be treated; and a second treatment mechanism for treating the water to be treated by ultraviolet rays emitted from an excimer lamp. In the apparatus, the water to be treated whose dissolved oxygen concentration has been adjusted to a predetermined value or more by the first treatment mechanism is supplied to the second treatment mechanism.
【請求項2】 前記請求項1記載の水処理装置におい
て、第二処理機構から流出した処理水を再び第一処理機
構に流入させる循環路を設け、被処理水を第一処理機構
と第二処理機構を循環させながら処理することを特徴と
する請求項1記載の水処理装置。
2. The water treatment apparatus according to claim 1, wherein a circulation path is provided for allowing the treated water flowing out of the second treatment mechanism to flow into the first treatment mechanism again, and the water to be treated is connected to the first treatment mechanism and the second treatment mechanism. The water treatment apparatus according to claim 1, wherein the treatment is performed while circulating the treatment mechanism.
【請求項3】 被処理水の溶存酸素濃度を検出する溶存
酸素検出部を備えたことを特徴とする請求項1〜2記載
の水処理装置。
3. The water treatment apparatus according to claim 1, further comprising a dissolved oxygen detector for detecting a dissolved oxygen concentration of the water to be treated.
【請求項4】 前記第二処理機構を通過する被処理水の
流量を検知する手段を設け、流量に応じてエキシマラン
プからの紫外線出力を制御することを特徴とする請求項
1、3記載の水処理装置。
4. The apparatus according to claim 1, further comprising means for detecting a flow rate of the water to be treated passing through said second processing mechanism, and controlling an ultraviolet output from an excimer lamp according to the flow rate. Water treatment equipment.
【請求項5】 前記酸素溶解手段がエジェクタであるこ
とを特徴とする請求項1〜4記載の水処理装置。
5. The water treatment apparatus according to claim 1, wherein said oxygen dissolving means is an ejector.
【請求項6】 前記酸素溶解手段がポンプであることを
特徴とする請求項1〜4記載の水処理装置。
6. The water treatment apparatus according to claim 1, wherein said oxygen dissolving means is a pump.
【請求項7】 前記酸素溶解手段がポンプと多孔体を用
いたものであることを特徴とする請求項6記載の水処理
装置。
7. The water treatment apparatus according to claim 6, wherein said oxygen dissolving means uses a pump and a porous body.
【請求項8】 前記エキシマランプが150nm以上2
00nm以下の紫外線を主波長に発光するランプである
ことを特徴とする請求項1〜7に記載の水処理装置。
8. An excimer lamp having a wavelength of 150 nm or more
The water treatment apparatus according to claim 1, wherein the water treatment apparatus is a lamp that emits ultraviolet light having a main wavelength of not more than 00 nm.
【請求項9】 前記エキシマランプが172nmの紫外
線を主波長に発光するランプであることを特徴とする請
求項1〜8に記載の水処理装置。
9. The water treatment apparatus according to claim 1, wherein the excimer lamp is a lamp that emits ultraviolet light having a main wavelength of 172 nm.
【請求項10】 前記エキシマランプは紫外線が透過可
能な保護管内、またはランプ収納部の一部が紫外線を透
過可能な保護板で構成された収納部内に収納され、かつ
収納部内の雰囲気が300Torr以下とするか、エキ
シマランプからの紫外線を吸収しないガスを主成分とし
た雰囲気であることを特徴とする請求項1〜9に記載の
水処理装置。
10. The excimer lamp is housed in a protective tube through which ultraviolet light can pass, or in a housing portion in which a part of the lamp housing portion is formed of a protective plate through which ultraviolet light can pass, and the atmosphere in the housing portion is 300 Torr or less. The water treatment apparatus according to any one of claims 1 to 9, wherein the atmosphere is mainly composed of a gas that does not absorb ultraviolet light from an excimer lamp.
【請求項11】 前記エキシマランプ設置部の部材が、
エキシマランプからの紫外線を反射する材質で構成され
たことを特徴とする請求項1〜10に記載の水処理装
置。
11. The member of the excimer lamp installation part,
The water treatment apparatus according to claim 1, wherein the water treatment apparatus is made of a material that reflects ultraviolet light from an excimer lamp.
JP2000081643A 2000-03-23 2000-03-23 Water treating device Pending JP2001259621A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000081643A JP2001259621A (en) 2000-03-23 2000-03-23 Water treating device

Publications (1)

Publication Number Publication Date
JP2001259621A true JP2001259621A (en) 2001-09-25

Family

ID=18598554

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102557185A (en) * 2010-10-18 2012-07-11 杭州九华清波污水处理工程有限公司 Advanced oxidation method
JP2012179538A (en) * 2011-03-01 2012-09-20 Air Water Inc Apparatus and method for waste water disposal
JP2012525247A (en) * 2009-04-30 2012-10-22 ロワラ Purification method and apparatus for removing xenobiotics in water
JP2014500137A (en) * 2010-10-26 2014-01-09 エンパイア テクノロジー ディベロップメント エルエルシー Water treatment equipment and system
CN108698868A (en) * 2016-02-16 2018-10-23 木质部知识产权管理有限责任公司 UV system with degassing district

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012525247A (en) * 2009-04-30 2012-10-22 ロワラ Purification method and apparatus for removing xenobiotics in water
CN102557185A (en) * 2010-10-18 2012-07-11 杭州九华清波污水处理工程有限公司 Advanced oxidation method
JP2014500137A (en) * 2010-10-26 2014-01-09 エンパイア テクノロジー ディベロップメント エルエルシー Water treatment equipment and system
JP2012179538A (en) * 2011-03-01 2012-09-20 Air Water Inc Apparatus and method for waste water disposal
CN108698868A (en) * 2016-02-16 2018-10-23 木质部知识产权管理有限责任公司 UV system with degassing district

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