JP2001250845A - Method and device for mounting semiconductor chip - Google Patents

Method and device for mounting semiconductor chip

Info

Publication number
JP2001250845A
JP2001250845A JP2000062258A JP2000062258A JP2001250845A JP 2001250845 A JP2001250845 A JP 2001250845A JP 2000062258 A JP2000062258 A JP 2000062258A JP 2000062258 A JP2000062258 A JP 2000062258A JP 2001250845 A JP2001250845 A JP 2001250845A
Authority
JP
Japan
Prior art keywords
semiconductor chip
resin
chip mounting
flip
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000062258A
Other languages
Japanese (ja)
Inventor
Tsutomu Sakurai
勉 櫻井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2000062258A priority Critical patent/JP2001250845A/en
Publication of JP2001250845A publication Critical patent/JP2001250845A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/27Manufacturing methods
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/741Apparatus for manufacturing means for bonding, e.g. connectors
    • H01L24/743Apparatus for manufacturing layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • H01L2224/83192Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)

Abstract

PROBLEM TO BE SOLVED: To appropriately apply an adhesive resin in a resin application process in the flip-flop mounting of a semiconductor chip. SOLUTION: In the resin application process of the flip-flop mounting of the semiconductor chip, an adhesive resin 15 is applied to a semiconductor chip mounting part on a wiring board 4 in a cross-line shape or a plurality-of- points shape.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、半導体チップをプ
リント配線基板にフリップチップ実装するための半導体
チップ実装方法及びこれに用いる半導体チップ実装装置
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor chip mounting method for flip-chip mounting a semiconductor chip on a printed wiring board and a semiconductor chip mounting apparatus used for the method.

【0002】[0002]

【従来の技術】従来より、高密度、高集積の半導体集積
回路(IC)の実装には、プリップチップ実装方式が用
いられている。図5は、高密度、高集積の半導体集積回
路(IC)としての半導体チップのフリップチップ実装
工程を示す。半導体チップ1は、裏面周辺に微小ピッチ
で多数の微小突起電極2が設けられて成る。先ず、図5
Aに示すように、配線パターン3が形成されたプリント
配線基板4の半導体チップ搭載部の中心に、ペースト状
の樹脂(いわゆる接着樹脂)5を塗布する。樹脂5の塗
布は、図6に示した樹脂5を入れたシリンジ7に先端の
尖ったニードル8を取り付けてなる塗布手段6を用いて
行われる。この場合、樹脂5は、半導体チップ搭載部の
中心に一点塗布される。
2. Description of the Related Art Conventionally, a flip-chip mounting method has been used for mounting a high-density and highly integrated semiconductor integrated circuit (IC). FIG. 5 shows a flip-chip mounting process of a semiconductor chip as a high-density, highly integrated semiconductor integrated circuit (IC). The semiconductor chip 1 has a large number of minute projection electrodes 2 provided at a minute pitch around the back surface. First, FIG.
As shown in A, a paste-like resin (so-called adhesive resin) 5 is applied to the center of the semiconductor chip mounting portion of the printed wiring board 4 on which the wiring pattern 3 is formed. The application of the resin 5 is performed by using an application unit 6 in which a needle 8 having a sharp tip is attached to a syringe 7 containing the resin 5 shown in FIG. In this case, the resin 5 is applied at one point to the center of the semiconductor chip mounting portion.

【0003】次に、図5Bに示すように、半導体チップ
1を、その突起電極2がプリント配線基板4の対応する
配線パターン3に対接するように樹脂5上に搭載する。
次いで、図5Cに示すように、ボンディングツール9に
より半導体チップ1を加圧、加熱して、突起電極2と配
線パターン3とを電気的に接続すると共に、半導体チッ
プ1を樹脂5を介して接着し、半導体チップ1のフリッ
プチップ実装を行なうようにしている。なお、突起電極
2と配線パターン3とを例えば超音波圧接にて接続する
こともできる。
[0005] Next, as shown in FIG. 5B, the semiconductor chip 1 is mounted on the resin 5 such that the protruding electrodes 2 thereof are in contact with the corresponding wiring patterns 3 of the printed wiring board 4.
Next, as shown in FIG. 5C, the semiconductor chip 1 is pressurized and heated by the bonding tool 9 to electrically connect the protruding electrodes 2 and the wiring patterns 3 and to bond the semiconductor chip 1 via the resin 5. Then, the semiconductor chip 1 is flip-chip mounted. The protruding electrode 2 and the wiring pattern 3 can be connected by, for example, ultrasonic pressure welding.

【0004】[0004]

【発明が解決しようとする課題】ところで、従来のフリ
ップチップ実装では、樹脂5が半導体チップ搭載部に一
点塗布されるので、半導体チップ1を搭載したとき、図
7A,B及びCの順に樹脂5が同心円状に広がる。この
ため、半導体チップ1の四隅部分に樹脂5がまわらなく
なり、接続信頼性が低下する恐れが生じやすい。
By the way, in the conventional flip-chip mounting, the resin 5 is applied to the semiconductor chip mounting portion at one point. Therefore, when the semiconductor chip 1 is mounted, the resin 5 is applied in the order of FIGS. Spread concentrically. For this reason, the resin 5 does not cover the four corners of the semiconductor chip 1 and the connection reliability is likely to be reduced.

【0005】また、半導体チップ1の四隅部分に樹脂5
がまわらないことを考慮して、多めに樹脂5を塗布する
ことが考えられる。しかし、この場合には、ボンディン
グツール9に大量の樹脂5が付着し、作業性の悪さが指
摘されていた。その上、本硬化後の樹脂はみ出し量が多
く、図7Cに示すように、周辺の実装部品搭載部分10
まで樹脂5で覆われてしまい、部品実装しにくい、とい
う影響も生じるものであった。図7では配線パターン3
を省略して示す。
[0005] Resin 5 is provided at four corners of semiconductor chip 1.
It is conceivable to apply a relatively large amount of the resin 5 in consideration of the fact that the resin 5 does not turn. However, in this case, a large amount of the resin 5 adhered to the bonding tool 9, and poor workability was pointed out. In addition, the amount of the resin that has completely hardened has protruded, and as shown in FIG.
This is covered with the resin 5, and it is difficult to mount components. In FIG. 7, wiring pattern 3
Is omitted.

【0006】本発明は、上述の点に鑑み、良好なフリッ
プチップ実装を可能にした半導体チップ実装方法及びこ
れに用いる半導体チップ実装装置を提供するものであ
る。
The present invention has been made in view of the above circumstances, and provides a semiconductor chip mounting method and a semiconductor chip mounting apparatus used for the same, which enable good flip chip mounting.

【0007】[0007]

【課題を解決するための手段】本発明は、フリップチッ
プ実装における樹脂塗布工程で、半導体チップ搭載部に
接着樹脂を非円形状、または複数点状に塗布する。
According to the present invention, in a resin application step in flip chip mounting, an adhesive resin is applied to a semiconductor chip mounting portion in a non-circular shape or a plurality of points.

【0008】本発明では、接着樹脂を非円形状、または
複数点状に塗布することにより、半導体チップを配線基
板に搭載したときに、半導体チップの四隅まで均一に接
着樹脂が広がる。
According to the present invention, by applying the adhesive resin in a non-circular shape or in a plurality of points, the adhesive resin spreads uniformly to the four corners of the semiconductor chip when the semiconductor chip is mounted on a wiring board.

【0009】[0009]

【発明の実施の形態】本発明に係る半導体チップ実装方
法は、フリップチップ実装における樹脂塗布工程におい
て、配線基板の半導体チップ搭載部に接着樹脂を非円形
状、または複数点状に塗布する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In a semiconductor chip mounting method according to the present invention, in a resin application step in flip chip mounting, an adhesive resin is applied to a semiconductor chip mounting portion of a wiring board in a non-circular shape or a plurality of points.

【0010】本発明に係る半導体チップ実装装置は、接
着樹脂を注出するニードル先端が交差線状、または複数
分割されたに形成された樹脂塗布手段を備えた構成とす
る。ニードル先端としては、十字形状、または中心部と
複数のL字状部を有する分割形状に形成することが好ま
しい。
[0010] The semiconductor chip mounting apparatus according to the present invention is provided with a resin coating means formed so that the tip of a needle for pouring the adhesive resin is cross-shaped or divided into a plurality of sections. The needle tip is preferably formed in a cross shape or a divided shape having a central portion and a plurality of L-shaped portions.

【0011】以下、図面を参照して、本発明の実態の形
態を説明する。
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

【0012】本実施の形態に係る半導体チップ実装装置
は、例えば、図1に示すように、接着樹脂、いわゆるペ
ースト状の樹脂15を収容するシリンジ17に先端形状
(いわゆる樹脂注出口の形状)18aが複数の線状を交
差させた形状(いわゆる交差線状)、本例では十字形状
のニードル18を取り付けた樹脂塗布手段161、或い
は、図2に示すように、ペースト状の樹脂15を収容す
るシリンジ17に先端形状(いわゆる樹脂注出口の形
状)19aが複数分割された形状、本例では中心部に樹
脂を塗布できるように真っ直ぐに延びた部分と、四隅近
くにも樹脂を塗布できるように4本のL字状に湾曲した
部分とを有するニードル19を取り付けた樹脂塗布手段
162を備えて成る。
In the semiconductor chip mounting apparatus according to the present embodiment, for example, as shown in FIG. 1, a tip 17 (a so-called resin spout shape) 18a Contains a resin coating means 161 to which a plurality of linear shapes intersect (so-called crossed linear shape), a cross-shaped needle 18 in this example, or a paste-like resin 15 as shown in FIG. A shape in which a tip shape (a so-called resin spouting shape) 19a is divided into a plurality of portions on the syringe 17, in this example, a portion extending straight so that the resin can be applied to the central portion, and a portion near the four corners so that the resin can be applied. It comprises resin application means 162 to which a needle 19 having four L-shaped curved portions is attached.

【0013】本実施の形態においても、高密度、高集積
の半導体集積回路(IC)、いわゆる裏面周辺に微小ピ
ッチで多数の微小突起電極2が設けられた半導体チップ
1のフリップチップ実装工程は、前述したと同様に、配
線パターン3が形成されたプリント配線基板4の半導体
チップ搭載部に、樹脂塗布手段16〔161又は16
2〕でペースト状の樹脂15を塗布する。 次で、半導
体チップ5を、その突起電極2がプリント配線基板4の
対応する配線パターン3に対接するように樹脂5上に搭
載した後、ボンディングツール9により半導体チップ1
を加圧、加熱して突起電極2と配線パターン3とを電気
的に接続すると共に、半導体チップ1を樹脂15を介し
て接着して、半導体チップ1のフリップチップ実装を行
う。なお、突起電極2と配線パターン3とを例えば超音
波圧接にて接続することもできる。
Also in this embodiment, the flip-chip mounting process of a high-density, highly-integrated semiconductor integrated circuit (IC), that is, a semiconductor chip 1 provided with a large number of minute projection electrodes 2 at a minute pitch around the back surface, As described above, the resin coating means 16 [161 or 16] is provided on the semiconductor chip mounting portion of the printed wiring board 4 on which the wiring pattern 3 is formed.
In step 2), a paste-like resin 15 is applied. Next, the semiconductor chip 5 is mounted on the resin 5 such that the protruding electrodes 2 thereof are in contact with the corresponding wiring patterns 3 of the printed wiring board 4, and then the semiconductor chip 1 is
Is pressed and heated to electrically connect the protruding electrodes 2 and the wiring patterns 3, and the semiconductor chip 1 is bonded via the resin 15 to perform flip chip mounting of the semiconductor chip 1. The protruding electrode 2 and the wiring pattern 3 can be connected by, for example, ultrasonic pressure welding.

【0014】図3は、図1のニードル先端形状18aを
十字形状とした樹脂塗布手段161を備えた実装装置を
用いてフリップチップ実装した場合を示す。図3Aに示
すように、プリント配線基板4の半導体チップ搭載部
に、樹脂塗布手段161のニードル18先端から樹脂1
5を塗布する。このとき、樹脂15は、四隅の対角方向
に十字形状となるように塗布される。次に、半導体チッ
プ1をプリント配線基板4の搭載部分上に搭載し、ボン
ディングツール9によって半導体チップ1を加圧、加熱
してプリント配線基板4に電気的、機械的に接続する。
このとき、樹脂15は、図3B、Cの順に示すように広
がり、半導体チップ1の四隅まで均一に充填される。図
3では、配線パターン3を省略して示す。
FIG. 3 shows a case in which the needle tip 18a of FIG. 1 is flip-chip mounted using a mounting apparatus provided with a resin coating means 161 having a cross shape. As shown in FIG. 3A, the tip of the needle 18 of the resin coating means 161 is placed on the semiconductor chip mounting portion of the printed wiring board 4.
5 is applied. At this time, the resin 15 is applied so as to form a cross in the diagonal directions of the four corners. Next, the semiconductor chip 1 is mounted on the mounting portion of the printed wiring board 4, and the semiconductor chip 1 is pressed and heated by the bonding tool 9 to be electrically and mechanically connected to the printed wiring board 4.
At this time, the resin 15 spreads as shown in FIGS. 3B and 3C and is uniformly filled up to the four corners of the semiconductor chip 1. In FIG. 3, the wiring pattern 3 is omitted.

【0015】図4は、図1のニードル先端形状19aを
5つの分割形状とした樹脂塗布手段162を備えた実装
装置を用いてフリップチップ実装した場合を示す。図4
Aに示すように、プリント配線基板4の半導体チップ搭
載部に、樹脂塗布手段162のニードル19先端から樹
脂15を塗布する。このとき、樹脂15は、中央の1点
と四隅近くの4点の計5ケ所に点形状に塗布される。次
に、半導体チップ1をプリント配線基板4の搭載部分上
に搭載し、ボンディングツール9によって半導体チップ
1を加圧、加熱してプリント配線基板4に電気的、機械
的に接続する。このとき、樹脂15は、図4B、Cの順
に示すように広がり、半導体チップ1の四隅まで均一に
充填される。図4では、配線パターン3を省略して示
す。
FIG. 4 shows a case in which the needle tip shape 19a of FIG. 1 is flip-chip mounted using a mounting apparatus provided with a resin coating means 162 having five divided shapes. FIG.
As shown in A, the resin 15 is applied to the semiconductor chip mounting portion of the printed wiring board 4 from the tip of the needle 19 of the resin applying means 162. At this time, the resin 15 is applied in a point shape at a total of five places, one at the center and four near the four corners. Next, the semiconductor chip 1 is mounted on the mounting portion of the printed wiring board 4, and the semiconductor chip 1 is pressed and heated by the bonding tool 9 to be electrically and mechanically connected to the printed wiring board 4. At this time, the resin 15 spreads as shown in FIGS. 4B and 4C and is uniformly filled up to the four corners of the semiconductor chip 1. In FIG. 4, the wiring pattern 3 is omitted.

【0016】本実施の形態によれば、半導体チップ1の
フリップチップ実装工程において、樹脂15を半導体チ
ップ1下に四隅まで均一に充填することができ、接続信
頼性を向上することができる。また、樹脂塗布の適量化
がし易く、ボンディングツールへの樹脂付着を少なくで
き、作業性を向上することができる。樹脂塗布量を調節
することにより、本硬化後の半導体チップ1周辺への樹
脂はみ出し量も少なくなり、半導体チップ周辺の実装部
品搭載部10が樹脂15で覆われることもなく、周辺の
部品実装が容易になる。
According to the present embodiment, in the flip chip mounting step of the semiconductor chip 1, the resin 15 can be uniformly filled under the semiconductor chip 1 to four corners, and the connection reliability can be improved. In addition, the amount of resin applied can be easily adjusted, resin adhesion to the bonding tool can be reduced, and workability can be improved. By adjusting the amount of resin applied, the amount of resin that has protruded to the periphery of the semiconductor chip 1 after the main curing is reduced, and the mounting component mounting portion 10 around the semiconductor chip is not covered with the resin 15, so that the mounting of peripheral components can be performed. It will be easier.

【0017】[0017]

【発明の効果】本発明の半導体チップ実装方法によれ
ば、フリップチップ実装工程において、接着樹脂を半導
体チップ下に四隅まで均一に充填することができ、半導
体チップの接続信頼性を向上することができる。また、
ボンディングツールへの樹脂付着を少なくできる。その
上、本硬化後の半導体チップ周辺へのはみ出し量も少な
くなり、半導体チップ周辺の部品実装が容易になる。
According to the semiconductor chip mounting method of the present invention, in the flip chip mounting process, the adhesive resin can be uniformly filled up to the four corners under the semiconductor chip, and the connection reliability of the semiconductor chip can be improved. it can. Also,
Resin adhesion to the bonding tool can be reduced. In addition, the amount of protrusion to the periphery of the semiconductor chip after the main curing is reduced, and the component mounting around the semiconductor chip is facilitated.

【0018】本発明の半導体チップ実装装置によれば、
フリップチップ実装工程において、配線基板の半導体チ
ップ搭載部の中央及び四隅近くに接着樹脂を塗布するこ
とができる。従って、接着樹脂をはみ出すことなく、半
導体チップ下に均一に充填することができ、また、半導
体チップ周辺の部品実装が容易になる。ニードル先端を
十字形状、または中心部と複数のL字状部を有する分割
形状にするときは、接着樹脂を半導体チップ搭載部の中
央及び四隅近くに良好に塗布することができる。
According to the semiconductor chip mounting apparatus of the present invention,
In the flip chip mounting step, the adhesive resin can be applied to the center and near the four corners of the semiconductor chip mounting portion of the wiring board. Therefore, the adhesive resin can be uniformly filled under the semiconductor chip without protruding, and components can be easily mounted around the semiconductor chip. When the tip of the needle has a cross shape or a divided shape having a central portion and a plurality of L-shaped portions, the adhesive resin can be applied favorably to the center and near the four corners of the semiconductor chip mounting portion.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の半導体チップ実装装置に用いる樹脂塗
布手段の一実施の形態を示す構成図である。
FIG. 1 is a configuration diagram showing one embodiment of a resin coating unit used in a semiconductor chip mounting device of the present invention.

【図2】本発明の半導体チップ実装装置に用いる樹脂塗
布手段の他の実施の形態を示す構成図である。
FIG. 2 is a configuration diagram showing another embodiment of a resin coating unit used in the semiconductor chip mounting device of the present invention.

【図3】A〜C 図1の樹脂塗布手段を用いたときの、
本発明の半導体チップ実装方法の一実施の形態を示す工
程図である。
FIGS. 3A to 3C show the results of using the resin coating means of FIG.
FIG. 3 is a process chart showing one embodiment of a semiconductor chip mounting method of the present invention.

【図4】A〜C 図2の樹脂塗布手段を用いたときの、
本発明の半導体チップ実装方法の他の実施の形態を示す
工程図である。
FIGS. 4A to 4C show the results of using the resin coating means of FIG.
It is a flowchart showing another embodiment of the semiconductor chip mounting method of the present invention.

【図5】A〜C 半導体チップ(ICチップ)のフリッ
プチップ実装工程図である。
5A to 5C are flip-chip mounting process diagrams of semiconductor chips (IC chips).

【図6】従来の樹脂塗布手段の構成図である。FIG. 6 is a configuration diagram of a conventional resin application unit.

【図7】A〜C 図6の従来の樹脂塗布手段を用いたと
きの、半導体チップのフリップチップ実装工程図であ
る。
7A to 7C are flip-chip mounting process diagrams of a semiconductor chip when the conventional resin coating unit of FIG. 6 is used.

【符号の説明】[Explanation of symbols]

1・・・半導体チップ、2・・・突起電極、3・・・配
線パターン、4・・・プリント配線基板、10・・・周
辺部品搭載部分、15・・・樹脂、16〔161,16
2〕・・・樹脂塗布手段、17・・・シリンジ、18、
19・・・ニードル、18a、19a・・・ニードル先
端形状
DESCRIPTION OF SYMBOLS 1 ... Semiconductor chip, 2 ... Projection electrode, 3 ... Wiring pattern, 4 ... Printed wiring board, 10 ... Peripheral component mounting part, 15 ... Resin, 16 [161, 16]
2] ... resin application means, 17 ... syringe, 18,
19: Needle, 18a, 19a: Needle tip shape

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 フリップチップ実装における樹脂塗布工
程において、 配線基板の半導体チップ搭載部に接着樹脂を非円形状、
または複数点状に塗布することを特徴とする半導体チッ
プ実装方法。
In a resin application step in flip-chip mounting, an adhesive resin is applied to a semiconductor chip mounting portion of a wiring board in a non-circular shape,
Alternatively, a method for mounting a semiconductor chip, wherein the method is applied in a plurality of points.
【請求項2】 接着樹脂を注出するニードル先端が交差
線状、または複数分割された形状に形成された樹脂塗布
手段を備えて成ることを特徴とする半導体チップ実装装
置。
2. A semiconductor chip mounting apparatus comprising a resin coating means having a tip of a needle for pouring an adhesive resin having a crossed line shape or a divided shape.
【請求項3】 前記ニードル先端が十字形状、または中
心部と複数のL字状部を有する分割形状に形成されて成
ることを特徴とする請求項1に記載の半導体チップ実装
装置。
3. The semiconductor chip mounting device according to claim 1, wherein the tip of the needle is formed in a cross shape or a divided shape having a central portion and a plurality of L-shaped portions.
JP2000062258A 2000-03-07 2000-03-07 Method and device for mounting semiconductor chip Pending JP2001250845A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000062258A JP2001250845A (en) 2000-03-07 2000-03-07 Method and device for mounting semiconductor chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000062258A JP2001250845A (en) 2000-03-07 2000-03-07 Method and device for mounting semiconductor chip

Publications (1)

Publication Number Publication Date
JP2001250845A true JP2001250845A (en) 2001-09-14

Family

ID=18582290

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000062258A Pending JP2001250845A (en) 2000-03-07 2000-03-07 Method and device for mounting semiconductor chip

Country Status (1)

Country Link
JP (1) JP2001250845A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006120993A (en) * 2004-10-25 2006-05-11 Toppan Forms Co Ltd Ic chip, and sheet with ic chip mounted thereon
WO2007046416A1 (en) * 2005-10-20 2007-04-26 Matsushita Electric Industrial Co., Ltd. Electronic component mounting method
JP2017511609A (en) * 2014-04-18 2017-04-20 レイセオン カンパニー Method for aligning surface mount packages for thermal improvement

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006120993A (en) * 2004-10-25 2006-05-11 Toppan Forms Co Ltd Ic chip, and sheet with ic chip mounted thereon
WO2007046416A1 (en) * 2005-10-20 2007-04-26 Matsushita Electric Industrial Co., Ltd. Electronic component mounting method
US8025205B2 (en) 2005-10-20 2011-09-27 Panasonic Corporation Electronic component mounting method
JP2017511609A (en) * 2014-04-18 2017-04-20 レイセオン カンパニー Method for aligning surface mount packages for thermal improvement

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