JP2001249018A - Surface mechanical characteristic measuring apparatus and method thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a surface mechanical characteristic measuring apparatus which enables measurement of surface mechanical characteristic about the shape of a curved surface or the like as well regardless of the shape of a specimen in a wider load range ensuring versatility in measurement by allowing the altering and adjusting of a sensing pin or the like. SOLUTION: Different sensing pins 6 are freely loaded on or unloaded from a sensing pin mounting part 5 to replace while a spring 7 for adjusting loads supporting the sensing pin mounting part 5 is freely loaded or unloaded to replace and the sensing pin mounting part 5 is so arranged to be movable within a fine range in the direction of the axis Z with changes thereof constrained in the direction of the axis X. As a result, the movement of the sensing pin mounting part 5 is constrained to such an extent as not to disturb measurement and under such a condition, to match the purpose and application of the measurement, for example, a tracer 6 suitable for the measurement of gravitation or the sensing pin suitable for the measurement of friction or the like or the spring 7 for adjusting loads is replaced and set thereby ensuring versatility for the measurement with the same measuring unit.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the use of a stylus to measure the surface mechanical properties (e.g., attractive force and friction) of an object having a curved surface, such as a plastic lens, particularly an f-theta lens or its mold. The present invention relates to a surface mechanical property measuring device and a measuring method suitable for measuring force).

[0002]

2. Description of the Related Art As a conventional measuring apparatus of this type, there are several examples as follows.

For example, first, there is a surface mechanical property measuring device disclosed in Japanese Patent Publication No. 7-9363. This is μ
This is a proposal example for obtaining a frictional force and a surface shape having a resolution on the order of m, and includes a mechanism for converting a force acting on a stylus into a spring displacement and detecting the displacement with a spherical capacitance probe. Further, the vertical displacement of the stylus is kept constant by controlling it with an adjusting mechanism, and the surface shape is measured from the control signal. Further, the spring deformed by the frictional force is controlled by a mechanism for applying a force to the spring so as to maintain the spring at a zero point, and the frictional force is measured from the control signal.

Second, there is a surface shape measuring device disclosed in Japanese Patent No. 2594452. This uses a feedback system that changes the load so that the frictional force becomes constant, and uses the feedback signal for shape information.

Third, there is a frictional force measuring device disclosed in Japanese Patent Application Laid-Open No. 5-99838. This is a device in which a leaf spring is attached at a right angle to the end of a parallel leaf spring, and a stylus is attached to the tip of the leaf spring. A mechanism for moving the spring in the sliding direction to maintain the position at zero force is used.

[0006]

By the way, when considering an optical component having a large curved surface shape such as an fθ lens used in a scanning optical system such as a laser printer, in addition to a glass component, a plastic component is used. Are also increasing. Such a plastic lens or the like has a considerable amount of moisture attached to its surface in a normal atmosphere without using a chamber. If water adheres, surface tension is generated, and such surface tension is related to surface attraction. By measuring the attraction using a plastic lens as a test object, the degree (water adhesion amount) can be determined. You can know. By the analysis, the surface shape (curved surface shape) can be accurately grasped.

[0007] However, the above-mentioned first Japanese Patent Publication No. 7-93.
In the case of the surface mechanical property measuring device described in JP-A-63, the means for detecting the displacement of the spring is a spherical capacitance probe,
The contact load is an ultra-light load of 0.0980665N (= 1 mgf) or less, and the adjustment function in the vertical direction is limited only to the measurement of the surface shape, and the piezo element or the like is deformed in the XYZ three directions. In other words, the apparatus of the publication is intended to measure a fine area on a fairly flat surface such as a silicon surface with high resolution,
Since the displacement range of the piezo element is narrow, the movable range of the probe is also quite small, so that it is impossible to measure a wide range of frictional force over a large load or to measure when the shape of the test object is not close to a plane. In addition, since the shape and frictional force are obtained from the control signal of the adjustment mechanism, it is impossible to increase the performance of the follow-up control because increasing the response frequency of the control system increases the effect of noise included in the control signal. Therefore, the scanning speed cannot be increased.

The surface shape measuring device described in Japanese Patent No. 2594452 is a surface shape measuring device that controls the load so that the frictional force is constant and uses the feedback signal as shape information. It does not measure.

Further, a friction force measuring device described in the third Japanese Patent Application Laid-Open No. 5-99838 is a device for measuring a minute area with high resolution, and measures a wide range of frictional force, In the case of a curved surface shape whose shape is not close to a plane, measurement is impossible.

After all, these prior arts are mainly aimed at measuring a minute area with an ultra-light load at a high resolution close to the atomic level, and have a relatively large curved surface shape such as an fθ plastic lens. It does not have the versatility to measure the surface mechanical properties of objects.

Therefore, the present invention basically allows several tens of mgf (= 0.
0980665N) to several gf (= 0.980665)
N) A surface mechanical property measuring apparatus capable of measuring a wide range of surface mechanical properties for curved surfaces and the like irrespective of the shape of the test object in a wide load range of N) and having versatility in the measurement, and a device therefor. It is intended to provide a measuring method.

More specifically, it is an object of the present invention to provide a surface mechanical property measuring apparatus and a measuring method thereof capable of measuring a wide range of surface mechanical properties without damaging the surface of a test object.

A surface mechanical property measuring apparatus capable of detecting a displacement of a stylus in the Z-axis direction equivalent to a load of the stylus in a non-contact, high-precision manner without increasing a sliding resistance of the stylus in the Z-axis direction, and the same. It is intended to provide a measuring method.

Provided are a surface mechanical property measuring apparatus and a measuring method capable of detecting a displacement of a stylus in the X-axis direction which is equivalent to a frictional force without contact and with high accuracy without increasing the resistance in the X-axis direction of the stylus. The purpose is to do.

An object of the present invention is to provide an apparatus and a method for measuring surface mechanical properties suitable for measuring the attractive force of a test object.

An object of the present invention is to provide an apparatus and a method for measuring surface mechanical properties which are suitable for measuring the frictional force of a test object.

An object of the present invention is to provide an apparatus and a method for measuring surface mechanical properties suitable for measuring the coefficient of friction of a test object.

It is an object of the present invention to provide a surface mechanical characteristic measuring device which can simplify adjustment of means for detecting a frictional force applied to a stylus when measuring a frictional force.

It is an object of the present invention to provide a surface mechanical property measuring device capable of reducing the weight and cost of a stylus.

It is an object of the present invention to provide a surface mechanical characteristic measuring device which can easily perform initial setting of a sensor such as a capacitance displacement meter or an optical displacement meter for detecting a displacement of a stylus in a Z-axis direction.

It is an object of the present invention to provide a surface mechanical property measuring apparatus which can easily perform initial setting of a sensor such as a capacitance displacement meter or an optical displacement meter for detecting a displacement of a stylus in the X-axis direction.

It is an object of the present invention to provide a surface mechanical characteristic measuring device capable of measuring a frictional force with a predetermined contact load which is optimal for a stylus for measuring a frictional force irrespective of the shape of a test object.

It is an object of the present invention to provide a surface mechanical characteristic measuring device capable of suppressing a steady deviation of a contact load such as friction, external force, and unbalance of gravity in the Z-axis direction.

It is an object of the present invention to provide a surface mechanical characteristic measuring apparatus capable of suppressing a deviation of a contact load caused by a dynamic disturbance or the like caused by a shape, an inclination, a scanning speed or the like of a test object.

It is an object of the present invention to provide a surface mechanical characteristic measuring device capable of suppressing a steady deviation of frictional force such as friction, external force, and gravity imbalance in the Z-axis direction.

It is an object of the present invention to provide a surface mechanical characteristic measuring device capable of suppressing a deviation of a frictional force generated by a dynamic disturbance or the like generated by a shape, an inclination, a scanning speed or the like of a test object.

[0027]

According to the first aspect of the present invention,
In a surface mechanical property measuring device for measuring a surface property of the test object by bringing a stylus into contact with a surface of the test object and sliding the same, a different stylus is detachable and replaceable, and a longitudinal direction of the stylus is changed. A stylus mounting portion that is restricted in variation in an X-axis direction perpendicular to the direction of the stylus and is movable in a minute range in a Z-axis direction along the longitudinal direction of the stylus; A load adjusting spring supported in the axial direction, a Z-axis direction displacement detecting section for detecting a displacement of the stylus mounting section in the Z-axis direction, a stylus mounting section, a load adjusting spring, and a Z-axis direction. A Z-axis drive mechanism that adjusts the contact and separation of the stylus with respect to the test object and the measurement load by mounting a displacement detection unit and moving in the Z-axis direction; and moving the test object in the X-axis direction. An X-axis driving mechanism for driving.

Therefore, a different stylus can be freely attached to and detached from the stylus mounting portion, and a load adjusting spring that supports the stylus mounting portion can be freely detached and replaced.
The purpose and application of the measurement are to be performed with the movement of the stylus mounting part constrained so as not to interfere with the measurement, because it is provided so that the movement in the axial direction is restricted and it is movable in a minute range in the Z-axis direction. By exchanging the stylus and the spring for adjusting the load, which are suitable for, for example, the measurement of gravitational force or the measurement of friction, it is possible to widen the movable range and make the measurement versatile. . As described above, by allowing replacement of the stylus and the load adjustment spring, several tens mgf (= 0.0
980665N) to several gf (= 0.980665N)
In a wide load range, the surface mechanical properties of a wide area can be measured even for a curved surface shape and the like regardless of the shape of the test object, and the surface mechanical properties of a wide area can be measured without damaging the surface of the test object.

According to a second aspect of the present invention, in the surface mechanical characteristic measuring device according to the first aspect, the Z-axis driving mechanism includes a micro air slider for restricting a movement of the stylus mounting portion.

Therefore, the Z-axis drive mechanism includes a micro air slider using an air bearing that regulates the movement of the stylus mounting portion, so that the movable range in the Z-axis direction can be widened and general versatility can be improved. , Can be driven with little disturbance in the Z-axis direction.

According to a third aspect of the present invention, in the surface mechanical characteristic measuring apparatus according to the first aspect, the Z-axis direction displacement detecting section is configured to perform a minute displacement of the end surface of the stylus mounting section in the Z-axis direction in the Z-axis direction. Is detected.

Therefore, the Z-axis direction displacement detecting section suitable for measurement with a relatively narrow measurement range and high resolution for converting a minute load into a displacement.

According to a fourth aspect of the present invention, in the surface mechanical characteristic measuring device according to the third aspect, the Z-axis direction displacement detecting section is a capacitance meter.

Accordingly, by providing a capacitance meter as the Z-axis direction displacement detecting unit, the contact resistance is equivalent to the load of the stylus with high accuracy without increasing the sliding resistance of the stylus in the Z-axis direction. The displacement of the stylus in the Z-axis direction can be detected, and the Z-axis displacement detection unit itself can be reduced in size and weight.

According to a fifth aspect of the present invention, in the surface mechanical characteristic measuring device according to the third aspect, the Z-axis direction displacement detecting section is an optical displacement meter.

Accordingly, the provision of the optical displacement meter as the Z-axis direction displacement detecting section makes it possible to achieve non-contact, high precision and equivalent to the load of the stylus without increasing the sliding resistance of the stylus in the Z-axis direction. The displacement of the stylus in the Z-axis direction can be detected.

According to a sixth aspect of the present invention, in the surface mechanical property measuring apparatus according to the first aspect, the Z-axis direction displacement detecting section is a longitudinal strain detector comprising a strain gauge attached to the load adjusting spring. .

Therefore, in a device that converts a minute load into a displacement, if the stylus or the spring for adjusting the load is changed, there is a possibility that the balance position between the weight and the gravity may change greatly, and the measurement is performed with high resolution. Adjustment of the initial position is necessary for a displacement meter with a narrow range, but by providing a vertical strain detector consisting of a strain gauge attached to a load adjusting spring as a Z-axis direction displacement detector, the Z-axis of the stylus The adjustment of the Z-axis direction displacement detection unit that detects the load in the direction can be simplified.

According to a seventh aspect of the present invention, in the surface mechanical property measuring apparatus according to the first aspect, the stylus is supported by a parallel leaf spring and can be displaced in the X-axis direction by the force in the X-axis direction. And an X-axis direction displacement detector for detecting a minute displacement of the stylus in the X-axis direction.

Therefore, the stylus mounting portion mounted on the Z-axis driving mechanism is supported by a parallel leaf spring, and the X-axis force is applied to the X-axis direction.
By attaching a stylus that can be displaced in the axial direction and detecting the displacement by an X-axis direction displacement detection unit, the frictional force can be measured even for a curved object.

According to an eighth aspect of the present invention, in the surface mechanical characteristic measuring device according to the seventh aspect, the X-axis direction displacement detecting section is a capacitance meter.

Accordingly, by providing a capacitance meter as the X-axis direction displacement detecting unit, a stylus that is non-contact, highly accurate and equivalent to a frictional force without increasing the sliding resistance of the stylus in the X-axis direction. Can be detected in the X-axis direction, and the X-axis direction displacement detection unit itself can be reduced in size and weight.

According to a ninth aspect of the present invention, in the surface mechanical characteristic measuring apparatus according to the eighth aspect, the parallel leaf spring is made of a conductive material.

Therefore, in order to use the capacitance displacement meter as in the eighth aspect of the present invention, the target must be made of a conductive material. However, the parallel leaf spring itself is made of a conductive material. In addition, it is possible to reduce the weight and cost of the stylus without separately requiring a target made of a conductive material.

According to a tenth aspect of the present invention, in the surface mechanical characteristic measuring device according to the seventh aspect, the X-axis direction displacement detecting section is an optical displacement meter.

Accordingly, by providing a capacitance meter as the X-axis direction displacement detecting unit, a stylus that is non-contact, highly accurate and equivalent to a frictional force without increasing the sliding resistance of the stylus in the X-axis direction. Can be detected in the X-axis direction.

According to an eleventh aspect of the present invention, in the surface mechanical characteristic measuring device according to the seventh aspect, the X-axis direction displacement detecting section is a transverse strain detector comprising a strain gauge attached to the parallel leaf spring.

Therefore, when the parallel leaf spring of the stylus is changed in an apparatus of the type that converts a minute load into a displacement, the amount of deformation of the parallel leaf spring due to frictional force and the initial position due to the warp of the stylus greatly change. There is a possibility that adjustment of the initial position is necessary for a displacement meter with a high resolution and a narrow measurement range, but a lateral strain detector consisting of a strain gauge attached to a spring for load adjustment is used as the X-axis direction displacement detector. With the provision, the adjustment of the X-axis direction displacement detection unit for detecting the frictional force applied to the stylus can be simplified.

According to a twelfth aspect of the present invention, in the surface mechanical property measuring apparatus according to any one of the first to eleventh aspects, the Z-axis direction displacement detecting section is a displacement adjusting section capable of adjusting a position in the Z-axis direction. Is provided.

Therefore, in a device that converts a minute load into a displacement, when the stylus and the spring for adjusting the load are changed, there is a possibility that the balance position between the weight and the gravity may greatly change, and the measurement is performed with high resolution. Adjustment of the initial position is necessary for a displacement meter with a narrow range.
The provision of the displacement adjustment unit capable of adjusting the position in the axial direction makes it easy to set the initial position of the Z-axis direction displacement detection unit that detects the displacement of the stylus in the Z-axis direction, thereby enabling appropriate measurement. As a result, since the adjusting means is provided when the stylus or the like is replaced, versatility can be provided.

According to a thirteenth aspect of the present invention, in the surface mechanical characteristic measuring device according to any one of the seventh to eleventh aspects, the X-axis direction displacement detecting section adjusts the position in the X-axis direction and the Z-axis direction. Equipped with a free displacement adjusting unit.

Therefore, in a device that converts a minute load into a displacement, when the parallel leaf spring of the stylus is changed, the amount of deformation of the parallel leaf spring due to frictional force and the initial position due to the warp of the stylus greatly change. There is a possibility that the adjustment of the initial position is required for a displacement meter with a high resolution and a narrow measurement range, but the X-axis direction displacement detection unit has a displacement adjustment unit that can adjust the position in the X-axis direction and the Z-axis direction. This makes it easy to set the initial position of the X-axis direction displacement detection unit that detects the displacement of the stylus in the X-axis direction, and enables proper measurement. As a result, since the adjusting means is provided when the parallel leaf spring or the like of the stylus is replaced, versatility can be provided.

According to a fourteenth aspect of the present invention, in the surface mechanical characteristic measuring device according to any one of the seventh to eleventh aspects, the displacement of the Z-axis direction displacement detecting section is determined with respect to the surface of the test object of the stylus. A feedback control system for controlling the Z-axis drive mechanism so that the contact load has a target displacement corresponding to a target value.

Therefore, when the shape of the test object is not flat such as a curved surface, the position of the stylus in the Z-axis direction changes, and the contact load set by the load adjusting spring supporting the stylus also changes. However, the feedback control system controls the Z-axis drive mechanism such that the contact load of the stylus on the surface of the test object becomes the target displacement corresponding to the target value. The friction force can be measured with a predetermined contact load that is optimal for a stylus for friction measurement, regardless of the shape of the object.

According to a fifteenth aspect of the present invention, in the surface mechanical characteristic measuring device according to the fourteenth aspect, the feedback control system includes a target displacement corresponding to a target value of the contact load and a displacement of the Z-axis direction displacement detecting unit. And a compensator for controlling the position of the Z-axis drive mechanism, and the compensator has an integral characteristic.

The actuator for controlling the contact load is a Z-axis driving mechanism, and a stationary position deviation occurs due to a stationary disturbance such as friction, an external force, and unbalance of gravity in the Z-axis driving mechanism. This position deviation causes a steady deviation in the contact load, which may make it impossible to accurately measure the frictional force or damage the stylus, but the feedback control system has a compensator having an integral characteristic. , It is possible to suppress such a steady deviation of the contact load.

According to a sixteenth aspect of the present invention, in the surface mechanical characteristic measuring device according to the fourteenth aspect, the feedback control system includes a target displacement corresponding to a target value of the contact load and a displacement of the Z-axis direction displacement detecting unit. And a compensator that performs position control of the Z-axis drive mechanism by comparing the control band of the feedback control system with the dynamic disturbance frequency in the Z-axis direction obtained from the shape and the scanning speed of the test object. The compensator is frequency compensated to be higher.

The actuator for controlling the contact load is a Z-axis drive mechanism, and a positional deviation occurs due to dynamic disturbance generated by the shape and inclination of the test object and the scanning speed in the X-axis direction. However, this positional deviation may cause a deviation in the contact load, which may make it impossible to accurately measure the frictional force or may damage the stylus. Since the compensator is frequency-compensated to be higher than the frequency, the deviation of the contact load generated by such a dynamic disturbance can be suppressed.

According to a seventeenth aspect of the present invention, in the surface mechanical characteristic measuring device according to any one of the seventh to eleventh aspects, the displacement of the X-axis direction displacement detecting section is determined with respect to the surface of the test object of the stylus. A feedback control system is provided for controlling the Z-axis drive mechanism so that the frictional force becomes a target displacement corresponding to the frictional force target value.

When the frictional force is measured by the displacement of the parallel leaf spring supporting the stylus, the frictional force is measured by the change in the coefficient of friction and the roughness of the surface of the test object, the physical properties between the stylus and the test object, and the like. The frictional force changes greatly, and a stick-slip phenomenon or a jumping phenomenon of the stylus may occur, which can generally be avoided by increasing the rigidity of the stylus in the X-axis direction, but is measured by that. There is also a possibility that the resolution of the frictional force is reduced. In this regard, in the present invention, it is considered that Ammonton-Coulomb's law is satisfied between the frictional force and the contact load, and a feedback control system is provided to change the contact load so that the frictional force applied to the stylus becomes constant. By controlling the frictional force, the frictional coefficient can be determined with high accuracy from the frictional force and the contact load.

According to an eighteenth aspect of the present invention, in the surface mechanical characteristic measuring device according to the seventeenth aspect, the feedback control system includes a target displacement corresponding to a frictional force target value of the frictional force and the X-axis direction displacement detecting unit. A compensator for performing position control of the Z-axis driving mechanism by comparing the displacement with the displacement; and the compensator has an integral characteristic.

The actuator for controlling the frictional force is a Z-axis driving mechanism, and a stationary position deviation occurs due to a stationary disturbance such as friction, external force, and unbalance of gravity in the Z-axis driving mechanism. This positional deviation may cause a steady deviation in the contact load, and may cause a steady deviation in the frictional force to be controlled or damage the stylus, but the feedback control system has an integral characteristic. The provision of the compensator can suppress such a steady deviation of the frictional force.

According to a nineteenth aspect of the present invention, in the surface mechanical characteristic measuring device according to the seventeenth aspect, the feedback control system includes the target displacement corresponding to a frictional force target value of the frictional force and the X-axis direction displacement detecting unit. A dynamic compensator for controlling the position of the Z-axis drive mechanism by comparing the displacement with a displacement, wherein the control band of the feedback control system is determined from the shape and the scanning speed of the test object and the dynamic disturbance frequency in the Z-axis direction. The compensator is frequency-compensated to be higher.

The actuator for controlling the frictional force is a Z-axis driving mechanism, and a positional deviation occurs due to dynamic disturbance generated by the shape and inclination of the test object and the scanning speed in the X-axis direction. However, this positional deviation may cause a deviation in the contact load, and may also cause a deviation in the frictional force to be controlled or damage the stylus. Since the compensator is frequency-compensated to be higher than the frequency, it is possible to suppress the deviation of the frictional force generated by such a dynamic disturbance.

According to a twentieth aspect of the present invention, in the surface mechanical characteristic measuring method for measuring the surface characteristics of the test object by bringing the stylus into contact with the surface of the test object and sliding the same, the stylus is attached. And a stylus mounting portion that is restricted in fluctuation in an X-axis direction orthogonal to the longitudinal direction of the stylus and is movable in a minute range in a Z-axis direction along the longitudinal direction of the stylus, and is detachably provided. A load adjusting spring that supports the stylus mounting section in the Z-axis direction, a Z-axis direction displacement detecting section that detects a displacement of the stylus mounting section in the Z-axis direction, and a stylus mounting section. A Z-axis drive mechanism that mounts a load adjusting spring and a Z-axis direction displacement detecting unit and moves in the Z-axis direction to adjust the contact / separation of the stylus with respect to the test object and the measurement load; An X-axis drive mechanism for driving an inspection object in the X-axis direction, The Z-axis drive mechanism is moved away from the object in the Z-axis direction while the needle is in contact with the test object, and the weight of the stylus mounting portion detected by the Z-axis direction displacement detection unit and the load adjustment The attraction of the test object is measured based on the displacement of the spring from the balance point and the spring constant of the load adjusting spring.

Accordingly, a method for measuring the attractive force of the test object when using the measuring device according to claim 3 becomes clear.

According to a twenty-first aspect of the present invention, in the surface mechanical characteristic measuring method for measuring the surface characteristics of the test object by bringing the stylus into contact with the surface of the test object and sliding the same, the stylus is attached. X perpendicular to the longitudinal direction of the stylus
The axial variation is constrained and Z along the longitudinal direction of the stylus
A stylus mounting portion movable in a minute range in the axial direction, a stylus mounting portion provided detachably and detachably, and the stylus mounting portion attached to the support load adjusting spring in the Z-axis direction and the load adjusting spring; A Z-axis direction displacement detecting section including a strain gauge for detecting displacement of the needle mounting section in the Z-axis direction, a stylus mounting section, a load adjusting spring, and a Z-axis direction displacement detecting section; And a Z-axis drive mechanism for adjusting the contact / separation of the stylus with respect to the test object and the measurement load by moving in the Z-axis direction, and an X-axis for driving the test object in the X-axis direction. And using the drive mechanism to move the Z-axis drive mechanism away from the object in the Z-axis direction from a state in which the stylus is in contact with the object, and based on the amount of distortion of the longitudinal strain detector, Was measured.

Therefore, a method for measuring the attraction of a test object when the measuring device according to claim 6 is used becomes clear.

According to a twenty-second aspect of the present invention, in the surface mechanical characteristic measuring method for measuring the surface characteristic of the test object by bringing the stylus into contact with the surface of the test object and sliding the same, the support is supported by a parallel leaf spring. A stylus that is displaced in the X-axis direction by a force in the X-axis direction perpendicular to the longitudinal direction is attached, restrains the fluctuation in the X-axis direction, and is attached in the Z-axis direction along the longitudinal direction of the stylus. A stylus mounting portion movable in a minute range; a load adjusting spring provided detachably and supporting the stylus mounting portion in the Z-axis direction; and a displacement of the stylus mounting portion in the Z-axis direction. , A Z-axis direction displacement detecting section for detecting a minute displacement of the stylus in the X-axis direction, a stylus mounting section, a load adjusting spring, and a Z-axis direction displacement. A detection unit and an X-axis direction displacement detection unit are mounted to move in the Z-axis direction. A Z-axis drive mechanism that adjusts the contact and separation of the stylus with respect to the test object and a measurement load, and an X-axis drive mechanism that drives the test object in the X-axis direction. While contacting the stylus with the X
The frictional force of the test object is measured based on the displacement of the X-axis direction displacement detection unit when the test object is scanned by the shaft drive mechanism and the spring constant of the parallel leaf spring.

Therefore, a method for measuring the frictional force of the test object when using the measuring device according to claim 7 becomes clear.

According to a twenty-third aspect of the present invention, in the surface mechanical characteristic measuring method for measuring the surface characteristic of the test object by sliding the stylus in contact with the surface of the test object, the probe is supported by a parallel leaf spring. A stylus that is displaced in the X-axis direction by a force in the X-axis direction perpendicular to the longitudinal direction is attached, restrains the fluctuation in the X-axis direction, and is attached in the Z-axis direction along the longitudinal direction of the stylus. A stylus mounting portion movable in a minute range; a load adjusting spring provided detachably and supporting the stylus mounting portion in the Z-axis direction; and a displacement of the stylus mounting portion in the Z-axis direction. And a strain gauge attached to the parallel leaf spring and configured to detect a minute displacement of the stylus in the X-axis direction.
An axial displacement detection unit, a stylus mounting unit, a load adjusting spring, a Z-axis direction displacement detection unit, and an X-axis direction displacement detection unit are mounted and moved in the Z-axis direction. Using a Z-axis drive mechanism for adjusting the contact and separation and the measurement load with respect to the test object, and an X-axis drive mechanism for driving the test object in the X-axis direction, using the stylus on the surface of the test object. The frictional force of the test object is measured based on the amount of distortion of the lateral strain detector when the test object is scanned by the X-axis drive mechanism while making contact.

Accordingly, a method for measuring the frictional force of the test object when using the measuring device according to claim 11 becomes clear.

According to a twenty-fourth aspect of the present invention, in the method for measuring surface mechanical properties according to the twenty-second aspect, the displacement of the X-axis direction displacement detecting portion is such that the frictional force of the stylus on the surface of the test object is a frictional force target value. Using a feedback control system that controls the Z-axis drive mechanism so that the target displacement is considerable, the friction coefficient of the test object is measured based on the detected friction force and the contact load on the test object. did.

Accordingly, a method for measuring the coefficient of friction of a test object based on the measuring method according to claim 22 becomes apparent.

[0075]

FIG. 1 shows a first embodiment of the present invention.
A description will be given based on FIG. The surface mechanical characteristic measuring apparatus according to the present embodiment shows an example of application to a measuring apparatus for measuring a surface attractive force or a surface friction force of an object 1 using, for example, a plastic fθ lens. The test object 1 is mounted on an X-axis stage 2 which is an X-axis driving mechanism for driving the test object 1 in the X-axis direction (on the paper surface, left and right direction). The X-axis stage 2 is driven in the X-axis direction by an actuator (not shown) such as a stepping motor or a servomotor.

Above the X-axis stage 2, there is provided a carriage 3 as a Z-axis drive mechanism that is movable in the Z-axis direction (paper plane, vertical direction = direction orthogonal to the X-axis direction). The carriage 3 is driven in the Z-axis direction by an actuator (not shown) such as a voice coil motor. A micro air slider 4 is provided at a lower portion of the carriage 3 facing the X-axis stage 2. The micro air slider 4 has a slider movable part 4a movable in the Z-axis direction by an air bearing, and a lower end of the slider movable part 4a is a stylus mounting part 5, for example, a stylus type probe as a stylus. 6 is detachably mounted. The mechanism for attaching and detaching the stylus probe 6 to and from the stylus mounting portion 5 may use a known structure such as a screw structure. The stylus probe 6 is attached to the slider movable part 4a of the micro air slider 4 so as to suppress the sliding resistance in the Z-axis direction and obtain the rigidity in the X-axis direction in order to improve the measurement accuracy. Have been. Thereby, the stylus probe 6 (accordingly,
The slider movable portion 4a) is restrained from changing in the X-axis direction,
It is configured to be movable in a minute range only in the Z-axis direction.

At the upper end of the slider movable portion 4a, a load adjusting spring 7 for movably supporting the slider movable portion 4a in the Z-axis direction is provided. The load adjusting spring 7 is, for example, a leaf spring that is elongated in the X-axis direction. The load adjusting spring 7 has, for example, both ends attached to a predetermined fixed portion 8 in the carriage 3 by screws 9 (see FIG. 9), and arbitrarily replaces a type having a different spring constant or the like. The structure is such that it can be freely attached. Therefore, the center of the load adjusting spring 7 is also located at the slider movable portion 4a.
(See, for example, the structure of the screw 7a and the screw hole 4b shown in FIG. 9).

Further, the stylus mounting portion 5 is provided in the carriage 3.
Vertical displacement detection unit 1 which is a Z-axis direction displacement detection unit for detecting a minute displacement dz in the Z-axis direction through a load adjusting spring 7.
0 is provided. As the vertical displacement detecting unit 10,
In the present embodiment, a triangulation method is used in which light is applied to a mirror-like target 7b (see FIG. 9) at the center of the load adjusting spring 7 and detected as a change in the light receiving position of the reflected light. An optical micrometer which is a non-contact optical displacement meter is used. In principle, as shown in FIG.
The light of the LED 12 driven by the LED drive circuit 11 is projected onto the surface to be measured (here, the target 7 b) via the light projecting lens 13, and the reflected light from the surface to be measured is transmitted via the light receiving lens 14 to the PSD ( Position Sensitive Director
s) Using the light receiving position x from the origin in the PSD 15, the distance B between the lens optical axes, and the focal length f of the light receiving lens 14 in the PSD 15, L = (1) The distance L between the light projecting lens 13 and the surface to be measured (here, the target 7b) is obtained by performing the arithmetic processing of / x) · f · B.
By calculating the distance L, the variation thereof, that is, the minute displacement dz of the stylus mounting portion 5 in the Z-axis direction can be determined.

Further, such a vertical displacement detecting unit 10
The carriage 3 is mounted on a vertical displacement adjustment stage 21 as a displacement adjustment unit, and can be finely adjusted in the Z-axis direction by adjustment by the adjustment unit 21a.

On the other hand, a horizontal displacement detecting section 22 and a two-direction displacement adjusting stage 23 as a displacement adjusting section are provided below the carriage 3, and details thereof will be described in the third embodiment.

In such a configuration, the combined weight of the stylus probe 6 and the slider movable portion 4a of the micro air slider 4 is balanced at the neutral point by the load adjusting spring 7. Therefore, based on the small displacement dz from the neutral point detected by the vertical displacement detection unit 10 and the _kznom of the spring constant of the load adjusting spring 4, the contact load of the stylus probe 6 The attractive force of the specimen 1 can be obtained.
That is, _assuming that the contact load is W, W = k _znom × dz (1)

Therefore, a method of measuring the attractive force of the test object 1 in the case of the present embodiment will be described. First, the carriage 3
Is adjusted in the Z-axis direction so that the stylus probe 6 comes into contact with the surface of the test object 1. The carriage 3 is gradually raised from a state where the stylus probe 6 is in contact with the surface of the test object 1, and the minute displacement dz of the stylus probe 6 at that time is detected by the vertical displacement detection unit 10. Based on the detected minute displacement dz and the spring constant k _znom of the load adjusting spring 7, the attractive force of the test object 1 is calculated based on the equation (1).

FIG. 3 shows measurement data obtained by measuring the specimen 1 having a lubricating film on the surface, and taking the minute displacement dz [μm] of the stylus probe 6 on the vertical axis and the time [sec] on the horizontal axis. . It can be seen that the maximum attraction occurs due to the surface tension of the lubricating film, and then decreases as the micro air slider 4 rises.

When the stylus to be attached to the stylus attachment section 5 is replaced with a different structure or the load adjusting spring 7 is changed as in the embodiment described later, the weight of the stylus or the load adjusting spring is changed. Since the spring constant of the spring 7 changes, the neutral point of the minute displacement dz in the Z-axis direction to be detected by the vertical displacement detector 10 fluctuates. In such a case, the adjustment unit 2
By finely adjusting the vertical displacement adjusting stage 21 in the Z-axis direction by adjusting 1a, the initial position may be adjusted to a position where the vertical displacement detecting unit 10 can detect the neutral point.

A second embodiment of the present invention will be described with reference to FIGS. The same portions as those described in the first embodiment are denoted by the same reference numerals, and description thereof is omitted (the same applies to each of the following embodiments). In this embodiment, a non-contact optical displacement meter having an optical probe structure by an astigmatism method known as a focus error signal detection method in an optical pickup instead of an optical micrometer is used as a vertical displacement as a Z-axis direction displacement detector. This is used as the detection unit 31.

The Z-axis direction displacement detecting section 31 of this optical probe structure will be described. The light emitted from the semiconductor laser 32 is reflected by the polarization beam splitter 33 and then condensed on the surface to be measured (here, the target 7b of the load adjusting spring 7) by the objective lens 34, and the reflected light is The light again passes through the objective lens 34 and further passes through the cylindrical lens 35.
The light enters the divided photodiode 36 and is received.

FIG. 5 shows divided light receiving areas a, b, c,
4 shows a four-division photodiode 36 having d and a beam spot shape formed on a light receiving surface thereof. When the test surface (target 7b) is at the focal position of the objective lens 34,
When a circular beam spot is adjusted on the four-division photodiode 36 as shown in FIG. 5B, when the surface to be inspected (the target 7b) is far away, a horizontally long ellipse as shown in FIG. When the target surface (target 7b) is close, the beam spot becomes a vertically long elliptical beam spot as shown in FIG. Therefore, assuming that the outputs of the divided light receiving areas a, b, c, and d of the four-division photodiode 36 are a, b, c, and d, the focus error signal S can be calculated from Expression (2).

S = {(a + c) − (b + d)} / (a + b + c + d) (2)

The focus error signal S calculated from the equation (2) is, as shown in FIG.
When b) is close, it is positive, at the in-focus position is zero, and when it is far, it is negative. Therefore, by substituting the magnitude of the focus error signal S based on the in-focus position with the minute displacement dz, the minute displacement dz of the stylus mounting portion 5 in the Z-axis direction can be obtained. The reason for dividing by the total amount of received light in the equation (2) is that the dimension is reduced so as not to be affected by the reflectance of the surface to be measured.

In any case, the measurement range can be widened by providing non-contact optical displacement meters as the vertical displacement detection units 10 and 31 as in the present embodiment and the first embodiment. it can.

However, as the vertical displacement detecting section 10,
Although not particularly shown, a non-contact and high-resolution capacitive displacement meter may be used (the target portion needs to be made of a conductive material). According to the capacitance displacement meter, the size can be reduced, whereby the weight of the carriage 3 can be reduced, and the response in driving in the Z-axis direction can be improved, and the size of the actuator can be reduced.

FIGS. 7 and 8 show a third embodiment of the present invention.
It will be described based on. In the present embodiment, the measuring device shown in FIG. 1 is provided for measuring the frictional force of the test object 1. Therefore, instead of the stylus probe 6, a probe 41 for measuring a frictional force is detachably attached to the stylus mounting portion 5 as a stylus. The friction force measuring probe 41 is supported so as to be deformable in the X-axis direction by two parallel leaf springs 42 opposed to each other in the X-axis direction in order to detect frictional force in the X-axis direction as displacement. . The above-described horizontal displacement detecting section 22 is for detecting a minute displacement dx in the X-axis direction, facing the frictional force measuring probe 41, and is supported by a two-directional displacement adjusting stage 23. As shown in FIGS. 8 (a) and 8 (b), the parallel leaf spring 42 moves almost in parallel in a minute deformation area.
It is used to support the friction force measurement probe 41 so that the target of the horizontal displacement detection unit 22 is always parallel.

The configuration of the horizontal displacement detecting section 22 itself may be a non-contact optical displacement meter such as an optical micrometer or an optical probe utilizing an astigmatism method, as in the case of the vertical displacement detecting section. Alternatively, a non-contact and high-resolution capacitive displacement meter may be used (the target portion needs to be made of a conductive material). By providing a non-contact optical displacement meter, the measurement range can be widened. According to the capacitance displacement meter, downsizing is possible, whereby the weight of the carriage 3 can be reduced, and the responsiveness of driving in the Z-axis direction can be improved and the actuator can be downsized. When the capacitance displacement meter is provided, if the parallel leaf spring 42 itself is formed of a conductive material, it is not necessary to separately attach a conductive member as a target to the probe 41 for measuring a frictional force. It is also possible to reduce the cost and improve the response performance of the friction force measuring probe 41.

The horizontal displacement detecting section 22 is mounted on a biaxial displacement adjusting stage 23 as a displacement adjusting section in the carriage 3, and can be finely adjusted in the Z-axis direction by adjustment by the adjusting section 23a. Adjustment section 23b
Fine adjustment is possible in the X-axis direction by the adjustment.

A method for measuring the frictional force of the test object 1 in such a configuration will be described. First, the friction force measuring probe 41 is moved closer to the test object 1 by the carriage 3 and finally brought into contact. The contact load at this time is
It is calculated from the above-described equation (1) based on the minute displacement dz from the neutral point detected by the vertical displacement detecting unit 10 and the spring constant k _xnom of the load adjusting spring 7, and is determined by adjusting the moving amount of the carriage 3. The displacement is adjusted to be the displacement dz. In this state, the X-axis stage 2 on which the test object 1 is mounted is driven in the X-axis direction to slide the friction force measuring probe 41. The small displacement dx of the probe 41 for measuring the frictional force during sliding in the X-axis direction is detected by the horizontal displacement detection unit 2
2, the frictional force F is calculated from the spring constant k _xnom of the parallel leaf spring 42 based on the equation (3).

F = k _xnom × dx (3)

When the type of the friction force measuring probe 41 attached to the stylus attaching portion 5 is changed or the sensor structure of the horizontal displacement detecting portion 22 is changed, the vertical displacement of the friction force measuring probe 41 is changed. The neutral point of the minute displacement dz in the Z-axis direction to be detected by the detection unit 10 may fluctuate, the length of the friction force measurement probe 41 may change, or the initial position of the horizontal displacement detection unit 22 may change. . In such a case, by adjusting the adjusting units 23a and 23b, 2
The axial displacement adjustment stage 23 may be finely adjusted in the Z-axis direction and the X-axis direction as appropriate, and the initial position of the horizontal displacement detection unit 22 may be adjusted to a position where the small displacement dx in the X-axis direction can be measured.

Therefore, as can be seen from the first and third embodiments, different styluses 6 and 41 can be freely attached to and detached from the stylus mounting portion 5 in the same measuring device, and this stylus can be replaced. The load adjusting spring 7 that supports the needle mounting portion 5 is also detachable and replaceable, and the stylus mounting portion 5 is provided so as to be restricted in fluctuation in the X-axis direction and movable in a minute range in the Z-axis direction. In a state where the movement of the needle mounting portion 5 is restrained so as not to hinder the measurement, the styluses 6 and 4 suitable for, for example, the measurement of gravitational force or the measurement of friction are made according to the purpose and application of the measurement.
By replacing the load adjusting spring 1 and the load adjusting spring 7, the movable range can be widened, and the measurement can be made versatile. In this way, by allowing the replacement of the styluses 6, 41 and the load adjusting spring 7, several tens mg
f (= 0.0980665N) to several gf (= 0.98)
0665 N), a wide range of surface mechanical properties can be measured for curved surfaces and the like, regardless of the shape of the test object 1, without damaging the surface of the test object 1.
A wide range of surface mechanical properties can be measured.

If the stylus probe 6 and the load adjusting spring 7 are allowed to change in this manner, the position where the weight and gravity are balanced may change greatly, and the displacement with a high resolution and a narrow measurement range may be obtained. Although the adjustment work of the initial position is required in the meter, the vertical displacement detecting unit 10 detects the displacement of the stylus probe 6 in the Z-axis direction by providing the vertical displacement adjusting stage 21 capable of adjusting the position in the Z-axis direction. The initial position of the vertical displacement detection unit 10 can be easily set, and proper measurement can be performed. As a result, when the stylus or the like is replaced, the position is adjusted by the vertical displacement adjustment stage 21, so that versatility can be provided.

Also, as in the case of the third embodiment,
In the method of converting a minute load into a displacement, when the parallel leaf spring 42 of the friction force measurement probe 41 is changed, the deformation amount of the parallel leaf spring 42 due to frictional force and the initial position due to the warpage of the frictional force measurement probe 41 are changed. The displacement may greatly change, and a displacement meter with a high resolution and a narrow measurement range requires adjustment of the initial position. However, the horizontal displacement detection unit 22 can adjust the position in the X-axis direction and the Z-axis direction. Since the displacement adjusting stage 23 is provided, the friction force measuring probe 41 is provided.
The initial position of the horizontal displacement detection unit 22 that detects the displacement in the X-axis direction can be easily set, and appropriate measurement can be performed. As a result, when the stylus or the like is replaced, the position is adjusted by the biaxial displacement adjustment stage 23, so that versatility can be provided.

A fourth embodiment of the present invention will be described with reference to FIG. In the first embodiment described above, when a non-contact type displacement meter such as a capacitance meter or an optical displacement meter is used as the vertical displacement detection unit 10, the weight and load adjustment of the stylus probe 6 are performed. Since the neutral point of the minute displacement dz in the Z-axis direction fluctuates due to the change of the spring 7, the vertical displacement detection unit 10 needs to be adjusted.

In this respect, in this embodiment, the strain gauge 43 is provided on the load adjusting spring 7 instead of the vertical displacement detecting section 10.
Is attached, and a vertical strain detector using the strain gauge 43 is used as a Z-axis direction displacement detecting unit. Therefore, the contact load W of the stylus probe 6 is obtained from the previously calibrated relationship between the strain and the force. Therefore, it is possible to obtain the attractive force of the test object 1 based on the strain amount detected by the strain gauge 43 as a result.

In the case of the present embodiment, it is necessary to prepare a strain gauge 43 for each load adjusting spring 7 individually. Also,
In order to compensate the temperature of the strain gauge 43, the strain gauge 4
It is preferable to use a plurality of 3s.

A fifth embodiment of the present invention will be described with reference to FIG. In the third embodiment described above, when a non-contact displacement meter such as a capacitance meter or an optical displacement meter is used as the horizontal displacement detection unit 22, the friction force measurement probe 41 and the load adjustment Since the position at which the minute displacement dx in the X-axis direction is detected fluctuates due to the change of the spring 7, the horizontal displacement detection unit 22 needs to be adjusted.

In this respect, in this embodiment, instead of the horizontal displacement detecting section 22, a strain gauge 44 is attached on a parallel leaf spring 42 supporting a friction force measuring probe 41, and the lateral strain by the strain gauge 44 is used. The detector is provided as an X-axis direction displacement detector. Therefore, based on the relationship between the strain and the force that has been calibrated in advance, the frictional force measuring probe 4 is determined based on the amount of strain detected by the strain gauge 44.
The frictional force F applied in the X-axis direction can be obtained.

In the case of this embodiment, it is necessary to prepare a strain gauge 44 for each parallel leaf spring 42 of each friction force measuring probe 41. It is preferable to use a plurality of strain gauges 44 in order to compensate the temperature of the strain gauges 44.

A sixth embodiment of the present invention will be described with reference to FIGS. In the present embodiment, as in the third embodiment, for example, a frictional force measuring probe 41 is brought into contact with the surface of the test object 1 and scanned in the X-axis direction to measure the frictional force. This is an application example.

The contact load W is determined by the small displacement dz of the friction force measuring probe 41 in the Z-axis direction and the spring constant k _znom of the load adjusting spring 7, and can be changed by adjusting the small displacement dz. Then, by feeding back the minute displacement dz _p detected by the vertical displacement detecting unit 10, the vertical displacement dz corresponding to the target contact load W _{ref is obtained.}
A feedback control system 51 for controlling the contact load W is provided so as to be _pref .

FIG. 11 is a block diagram showing the feedback control system 51. First, the target contact load W _ref is converted into a nominal spring constant k _{znom by the} load-displacement converter 52.
_Is converted into a vertical displacement dz _pref corresponding to the target contact load W _ref . The adder / subtractor 53 compares the target vertical displacement dz _pref with the minute displacement dz _p detected and fed back by the vertical displacement detector 10 and outputs the deviation _edzp . The deviation e _DZP is input to a compensator 54 for stabilizing the feedback control system 51, Z-axis direction of the actuator G _z 56 relative to the carriage 3 by the driver 55
Drive. The position information Z _p of this actuator G _z 56
After the addition and subtraction of the object surface shape / disturbance Z _dis by the adder / subtractor 57, the vertical displacement detector 10 generates a small displacement d.
z _p is detected. The actual contact load W is obtained by the displacement-load converter 58 using the actual spring constant kz as follows.

Target contact load W _ref = k _znom × dz _pref (4) Actual contact load W = k _s × dz _p ……………… (5)

In the present embodiment, the compensator 54 having an integral characteristic is used. That is, the controller is a hardware or software controller that performs so-called PID control, and includes an integral term I. By providing such a compensator 54, it is possible to suppress the steady-state position deviation dz _p occurring friction and external force in the Z axis direction, the steady disturbance disproportionate like gravity.

FIG. 12 shows the time response when a step-like target contact load _Wref is given to each feedback control system using the compensator 54 with the integral characteristic and the compensator without the integral characteristic. Here, a case where the target value of the position deviation dz _p is 1 is shown. As can be seen from FIG. 12, when there is no integral characteristic, the stationary position deviation dz _p ,
That is, a steady contact load deviation remains. However, by providing the compensator 54 with the integration characteristic, the position deviation dz _p is suppressed with time, and the steady deviation of the contact load is eliminated.

Further, the compensator 54 of the present embodiment is designed to generate the Z generated by the shape and inclination of the test object 1 and the X-axis scanning speed.
In consideration of the dynamic disturbance in the axial direction, the feedback control system 5
One control band is frequency-compensated and designed to be sufficiently higher than its dynamic disturbance frequency. With the feedback control system 51 and the carriage 3 having a wide operating range, the frictional force of the test object 1 having a non-planar surface can be measured over a wide range with a predetermined contact load.

Time when scanning a curved surface of the test object 1 at a predetermined speed when a feedback control system using the frequency-compensated compensator 54 and the frequency-uncompensated compensator is used. The response is shown in FIG. When the frequency is compensated, it is possible to accurately follow a surface having a curvature. However, when the frequency is not compensated, it is not possible to follow the surface accurately. Accurate follow-up means that the contact load can also be set accurately.

A seventh embodiment of the present invention will be described with reference to FIGS. In the present embodiment, as in the third embodiment, for example, a frictional force measuring probe 41 is brought into contact with the surface of the test object 1 and scanned in the X-axis direction to measure the frictional force. This is an application example.

As described in the sixth embodiment, the contact load W is determined by the small displacement dz of the friction force measuring probe 41 in the Z-axis direction and the spring constant k _znom of the load adjusting spring 7. It can be varied by adjusting dz. Further, when it is considered that Ammonton-Coulomb's law (F = μ · W) holds between the frictional force and the contact load, it can be said that the frictional force F can be changed by changing the vertical displacement dz. Therefore, the target friction force F _ref considerable horizontal displacement d by feeding back the minute displacement dx _p detected by the horizontal displacement detector 22
made to be x _pref, it is provided with a feedback control system 61 for controlling the frictional force F.

FIG. 14 is a block diagram showing the feedback control system 61. First, the target frictional force F _ref is converted into a target horizontal displacement dx _pref by a force-displacement converter 62 using a nominal spring constant k _xnom . Adder / subtractor 63
In comparing the horizontal displacement dx _p fed back it is detected by the target horizontal displacement dx _pref and horizontal displacement detecting unit 22, and outputs the deviation e _DXP therebetween. The deviation _edxp is used as a compensator 6 for stabilizing the feedback control system 61.
4 and driven by the driver 55 to drive the actuator G _z 56 in the Z-axis direction. Z-axis actuator G _z 5
After the 6 position data Z _p of the test object surface shape and the disturbance Z _dis obtained by adding or subtracting the adder-subtracter 57, vertical displacement dz _p by the vertical displacement detector 10 is detected. A product obtained by multiplying the detected vertical displacement dz _p by a nominal spring constant k _znom of a load adjusting spring 7 for gravity compensation by a multiplier 65 is given by
The contact load W _nom that can be detected is obtained. The nominal frictional force F _nom is obtained by multiplying the contact load W _nom by the nominal friction coefficient μ _nom by the multiplier 66. Here, the fluctuation of the actual friction coefficient, the fluctuation of the spring constant, and the like are determined by using the disturbance F
_{It is} assumed that the actual frictional force F is obtained by adding and subtracting the nominal frictional force _Fnom by the adder / subtractor 67. The actual friction force F is based on a spring constant k _x of the parallel leaf springs 42 force - after being converted by the displacement conversion unit 68, is detected as the horizontal displacement dx _p by the horizontal displacement detecting unit 22. Based on the detected horizontal displacement dx _p and vertical displacement dz _p , the friction coefficient μ is calculated by Expression (6).

Μ = W / F = (k _znom × dz _p ) / (k _xnom × dx _p ) (6)

In this way, by setting the frictional force F to a predetermined value and keeping the lateral force applied to the frictional force measuring probe 41 constant, the stick-slip phenomenon shown in FIG. The middle, jagged, right-upward part shows how frictional force F is stored by friction,
The following vertical drop shows that the frictional force is suddenly released. These repetitions result in stick-slip phenomena) and jumping phenomena.
The friction coefficient μ can be accurately measured.

In this embodiment, a compensator 64 having an integral characteristic is used. That is, the controller is a hardware or software controller that performs so-called PID control, and includes an integral term I. By providing such a compensator 64, it is possible to suppress a stationary position deviation generated by a stationary disturbance such as friction or external force on the Z-axis or unbalance of gravity.

Here, it is assumed that the friction coefficient μ is constant, and the time when the target frictional force is applied stepwise to the feedback control system using the compensator 64 with the integral characteristic and the compensator without the integral characteristic, respectively. FIG. 16 shows the response simulation. Here, the target value of the frictional force F is set to 0.5 and 1 in two steps.
Is shown. As can be seen from FIG.
When a compensator having no integral characteristic is used, a steady deviation of the vertical displacement, that is, a steady deviation of the contact load, and a steady deviation of the frictional force also remain. But,
By providing a compensator 64 having an integral characteristic,
The deviation of the vertical displacement is suppressed with time, the stationary deviation of the contact load disappears, and the deviation of the stationary frictional force disappears.

The compensator 64 according to the present embodiment takes into account the shape and inclination of the test object 1 and dynamic disturbance in the Z-axis direction generated by the scanning speed in the X-axis direction, and provides a feedback control system 61. Is designed to be frequency-compensated so that the control band is sufficiently higher than the dynamic disturbance frequency. With such a feedback control system 61 and the carriage 3 having a wide operating range, the friction coefficient of a non-planar test object can be measured over a wide range with a predetermined frictional force.

Here, it is assumed that the friction coefficient μ and the target frictional force F _ref are both constant, and for the feedback control system using the frequency-compensated compensator 64 and the frequency-uncompensated compensator, the test object FIG. 17 shows a time response simulation when a surface having a curvature of 1 is scanned at a predetermined speed in the X-axis direction. When the frequency-compensated compensator 64 is used, the frictional force F can accurately follow the target frictional force F _ref = 1, but when the frequency-compensated compensator is used, the surface shape is reduced. As a result, the frictional force F greatly changes, and the higher the frequency, the more it becomes impossible to completely follow. If the friction force cannot be followed, a jump phenomenon or a stick-slip phenomenon occurs, and an accurate friction coefficient may not be measured.

[0124]

According to the surface mechanical characteristic measuring device of the first aspect of the present invention, a different stylus can be freely attached to and detached from the stylus mounting portion, and the load can be adjusted to support the stylus mounting portion. The spring for the stylus can be freely attached and detached, and the stylus mounting part is provided so that the fluctuation in the X-axis direction is restricted and the stylus mounting part can be moved in a minute range in the Z-axis direction. The movable range can be widened by replacing the stylus or load adjustment spring suitable for measurement of gravitational force or friction, etc., according to the purpose and application of measurement, in a state where it is restrained so that it does not touch. And the measurement can be made versatile. In this way, by allowing replacement of the stylus and the spring for load adjustment, several tens of mgf (= 0.09 mgf) can be obtained.
In a wide load range from 80665N) to several gf (= 0.980665N), a wide range of surface mechanical properties can be measured for curved surfaces and the like regardless of the shape of the test object.
A wide range of surface mechanical properties can be measured without damaging the surface of the test object.

According to the second aspect of the present invention, in the surface mechanical characteristic measuring apparatus according to the first aspect, the Z-axis driving mechanism includes a micro air slider using an air bearing for regulating the movement of the stylus mounting portion. Accordingly, the movable range in the Z-axis direction can be widened, the versatility of the measurement object can be improved, and the driving can be performed in a state where the sliding resistance is small and the disturbance in the Z-axis direction is small.

According to the third aspect of the present invention, the Z-axis direction displacement detecting section in the surface mechanical property measuring apparatus according to the first aspect detects the minute displacement in the Z-axis direction of the Z-axis direction end face of the stylus mounting section. Since the detection is performed, the Z-axis direction displacement detection unit is suitable for measurement with a relatively small measurement range and high resolution for converting a minute load into a displacement.

According to the fourth aspect of the present invention, in the surface mechanical characteristic measuring apparatus according to the third aspect, since the capacitance meter is used as the Z-axis direction displacement detecting unit, the stylus slides in the Z-axis direction. It is possible to detect the displacement of the stylus in the Z-axis direction, which is equivalent to the load of the stylus in a non-contact, high-precision manner without increasing the resistance, and to reduce the size and weight of the Z-axis direction displacement detection unit itself. .

According to the fifth aspect of the present invention, in the surface mechanical characteristic measuring device according to the third aspect, since the optical displacement meter is used as the Z-axis direction displacement detecting unit, the stylus slides in the Z-axis direction. It is possible to detect the displacement of the stylus in the Z-axis direction which is equivalent to the load of the stylus in a non-contact manner and with high accuracy without increasing the resistance.

According to the sixth aspect of the present invention, in a device for converting a minute load into a displacement, when a stylus or a spring for adjusting a load is changed, a balance position between weight and gravity can be largely changed. In the case of a displacement meter with high resolution and a narrow measurement range, adjustment of the initial position is required, but a vertical strain detector consisting of a strain gauge attached to a spring for load adjustment is used as the Z-axis direction displacement detector. Because it was, Z of the stylus
Adjustment of the Z-axis direction displacement detection unit for detecting the load in the axial direction can be simplified.

According to the seventh aspect of the present invention, in the surface mechanical property measuring apparatus according to the first aspect, the stylus mounting portion mounted on the Z-axis driving mechanism is supported by a parallel leaf spring and is arranged in the X-axis direction. A stylus that can be displaced in the X-axis direction by force is attached, and the displacement is detected by the X-axis direction displacement detection unit. Therefore, even if the surface of the test object has a curved surface, the friction force must be measured. Can be.

According to the eighth aspect of the present invention, in the surface mechanical characteristic measuring apparatus according to the seventh aspect, since the capacitance meter is used as the X-axis direction displacement detecting unit, the stylus slides in the X-axis direction. It is possible to detect the displacement of the stylus in the X-axis direction, which is equivalent to a frictional force without contact, with high accuracy, without increasing the resistance.
The axial displacement detector itself can be reduced in size and weight.

According to the ninth aspect of the present invention, in order to use the capacitance displacement meter, the target must be made of a conductive material. This eliminates the need for a separate target made of a conductive material, and can reduce the weight and cost of the stylus.

According to the tenth aspect, the seventh aspect is provided.
In the surface mechanical property measurement device described above, a capacitance meter was used as the X-axis direction displacement detection unit, so it was non-contact, highly accurate and equivalent to frictional force without increasing the sliding resistance of the stylus in the X-axis direction. , The displacement of the stylus in the X-axis direction can be detected.

According to the eleventh aspect of the present invention, in a device for converting a minute load into a displacement, when the parallel leaf spring of the stylus is changed, the amount of deformation of the parallel leaf spring due to frictional force and the displacement of the stylus are changed. The initial position may change significantly due to warping, and a displacement meter with a high resolution and a narrow measurement range requires adjustment of the initial position.However, a lateral strain detector consisting of a strain gauge attached to a spring for load adjustment Is used as the X-axis direction displacement detection unit, so that the X
Adjustment of the axial displacement detection unit can be simplified.

According to the twelfth aspect of the present invention, in a device for converting a minute load into a displacement, when a stylus or a load adjusting spring is changed, a balance position between weight and gravity can greatly change. In a displacement meter with high resolution and a narrow measurement range, adjustment of the initial position is required.
Since the axial displacement detection unit has a displacement adjustment unit that can adjust the position in the Z-axis direction, the initial position of the Z-axis displacement detection unit that detects the displacement of the stylus in the Z-axis direction can be easily set and appropriate measurement can be performed. As a result, since the adjusting means is provided when the stylus or the like is replaced, versatility can be provided.

According to the thirteenth aspect of the present invention, when the parallel leaf spring of the stylus is changed in an apparatus of a system for converting a minute load into a displacement, the amount of deformation of the parallel leaf spring due to frictional force and the displacement of the stylus are changed. The initial position may be greatly changed due to warping, and the initial position adjustment work is required for a displacement meter with a high resolution and a narrow measurement range, but the X-axis direction displacement detection unit is located in the X-axis direction and the Z-axis direction. Since an adjustable displacement adjustment unit is provided, the initial position of the X-axis direction displacement detection unit that detects the displacement of the stylus in the X-axis direction can be easily set, and appropriate measurement can be performed. Since it has the adjusting means when it is replaced, it can have versatility.

According to the fourteenth aspect, when the shape of the test object is not a flat surface such as a curved surface, the position of the stylus in the Z-axis direction changes and is set by the load adjusting spring that supports the stylus. However, the Z-axis drive mechanism changes the displacement of the Z-axis direction displacement detection unit by the feedback control system so that the contact load of the stylus on the surface of the test object becomes a target displacement corresponding to a target value. Is controlled, the frictional force can be measured with a predetermined contact load that is optimal for a stylus for friction measurement, regardless of the shape of the test object.

According to the fifteenth aspect of the present invention, the actuator for controlling the contact load is a Z-axis driving mechanism, and the actuator is controlled by a constant disturbance such as friction, external force, or unbalance of gravity in the Z-axis driving mechanism. Position deviation will occur, this position deviation will cause a steady deviation in the contact load, there is a possibility that accurate frictional force can not be measured or the stylus may be damaged, Since the feedback control system includes the compensator having the integral characteristic, such a steady deviation of the contact load can be suppressed.

According to the sixteenth aspect of the present invention, the actuator for controlling the contact load is a Z-axis drive mechanism, which is a dynamic actuator generated by the shape and inclination of the test object and the scanning speed in the X-axis direction. Due to disturbance, a position deviation occurs, and this position deviation causes a deviation in the contact load, which may make it impossible to measure an accurate frictional force or damage the stylus. System
Since the compensator is frequency-compensated so as to be higher than the dynamic disturbance frequency in the Z-axis direction, it is possible to suppress the deviation of the contact load generated by such a dynamic disturbance.

According to the seventeenth aspect of the invention, when the frictional force is measured by the displacement of the parallel leaf spring supporting the stylus, the change or roughness of the friction coefficient of the surface of the test object, the stylus and the test object are measured. The frictional force measured due to the physical properties of the stylus changes greatly, and a stick-slip phenomenon or a jumping phenomenon of the stylus may occur. Generally, by increasing the rigidity of the stylus in the X-axis direction, Although it can be avoided, the resolution of the measured frictional force may decrease, but by providing a feedback control system, changing the contact load so that the frictional force applied to the stylus is constant. By controlling the friction force, the friction coefficient can be determined with high accuracy from the friction force and the contact load.

According to the eighteenth aspect, the actuator for controlling the frictional force is a Z-axis drive mechanism,
Stationary disturbances such as friction, external force, and imbalance of gravity in the Z-axis drive mechanism cause a steady position deviation. This position deviation causes a steady deviation in the contact load and is a control target. The frictional force may cause a steady-state deviation or damage the stylus, but since the feedback control system has a compensator having an integral characteristic, such a steady-state deviation in the frictional force is suppressed. be able to.

According to the nineteenth aspect, the actuator for controlling the frictional force is a Z-axis drive mechanism,
Due to the dynamic disturbance generated by the shape and inclination of the test object and the scanning speed in the X-axis direction, a position deviation occurs,
This position deviation may cause a deviation in the contact load, and may also cause a deviation in the frictional force to be controlled or may damage the stylus. However, the feedback control system uses the dynamic disturbance frequency in the Z-axis direction. Since the compensator is frequency-compensated to be higher than the above, it is possible to suppress the deviation of the frictional force generated by such a dynamic disturbance.

According to the surface mechanical characteristic measuring method of the present invention, the Z-axis drive mechanism is moved away from the object in the Z-axis direction while the stylus is in contact with the test object. The attractive force of the test object is measured based on the weight of the stylus mounting portion, the displacement from the balance point of the load adjusting spring, and the spring constant of the load adjusting spring detected by the method. The method for measuring the attractive force of the test object when using the measuring device becomes clear.

According to the surface mechanical characteristics measuring method of the present invention, the attraction of the test object is measured based on the amount of distortion of the longitudinal distortion detector. The method for measuring the attractive force of the test object in the case where it is present becomes clear.

According to the surface mechanical characteristic measuring method of the present invention, the X-axis direction displacement detecting unit detects when the object is scanned by the X-axis driving mechanism while the stylus is in contact with the surface of the object. Since the frictional force of the test object is measured based on the displacement of the spring and the spring constant of the parallel leaf spring, a method of measuring the frictional force of the test object using the measuring device according to claim 7 is provided. It becomes clear.

According to the method for measuring surface mechanical properties according to the twenty-third aspect of the present invention, the distortion of the lateral distortion detector when the object is scanned by the X-axis drive mechanism while the stylus is in contact with the surface of the object. Since the frictional force of the test object is measured based on the amount, a method of measuring the frictional force of the test object when using the measuring device according to claim 11 becomes clear.

According to the twenty-fourth aspect of the present invention, the Z-axis drive mechanism is set so that the displacement of the X-axis direction displacement detecting section becomes the target displacement corresponding to the target value of the frictional force with respect to the surface of the test object. The friction coefficient of the test object is measured based on the detected frictional force and the contact load to the test object by using a feedback control system for controlling the test object. The method for measuring the coefficient of friction of the steel becomes apparent.

[Brief description of the drawings]

FIG. 1 is a schematic front view showing a surface mechanical property measuring device according to a first embodiment of the present invention.

FIG. 2 is an explanatory diagram showing a measurement principle of an optical micrometer serving as the vertical displacement detection unit.

FIG. 3 is a graph showing measurement results of a test object having a lubricating film;
It is a probe displacement characteristic diagram.

FIG. 4 is an explanatory diagram illustrating a configuration example of an optical probe serving as a vertical displacement detection unit according to a second embodiment of the present invention.

FIG. 5 is a schematic diagram showing an image forming state of the beam spot.

FIG. 6 is a characteristic diagram of a focus error signal.

FIG. 7 is a schematic front view showing a surface mechanical property measuring device according to a third embodiment of the present invention.

8A and 8B show the vicinity of the probe, FIG.
(B) is a side view.

FIG. 9 is a perspective view of a load adjusting spring according to a fourth embodiment of the present invention.

10A and 10B show the vicinity of a probe according to a fifth embodiment of the present invention, wherein FIG. 10A is a side view and FIG. 10B is a front view.

FIG. 11 is a block diagram of a feedback control system showing a sixth embodiment of the present invention.

FIG. 12 is a characteristic diagram showing a vertical displacement suppressing characteristic when a compensator has an integral characteristic and when it does not.

FIG. 13 is a characteristic diagram showing a vertical displacement suppression characteristic when the compensator has and does not have band compensation.

FIG. 14 is a block diagram of a feedback control system according to a seventh embodiment of the present invention.

FIG. 15 is a characteristic diagram for explaining a stick-slip phenomenon.

FIG. 16 is a characteristic diagram showing a frictional force suppression characteristic when the compensator has the integration characteristic and when it is not.

FIG. 17 is a characteristic diagram showing frictional force suppression characteristics when the compensator has frequency compensation and when it has no frequency compensation.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 test object 2 X-axis drive mechanism 3 Z-axis drive mechanism 4 micro air slider 5 stylus mounting section 6 stylus 7 load adjustment spring 10 Z-axis direction displacement detection section 21 displacement adjustment section 22 X-axis direction displacement detection section 23 Displacement adjuster 41 Contact stylus 42 Parallel leaf spring 43 Strain gauge 44 Strain gauge 51 Feedback control system 54 Compensator 61 Feedback control system 64 Compensator

Claims (24)

[Claims] 1. A surface mechanical property measuring device for measuring a surface property of a test object by bringing a stylus into contact with a surface of the test object and sliding the same, wherein the different styluses are detachable and exchangeable. A stylus mounting portion that is restricted in fluctuation in an X-axis direction perpendicular to a longitudinal direction of the stylus and is movable in a minute range in a Z-axis direction along the longitudinal direction of the stylus; A load adjusting spring for supporting a mounting portion in the Z-axis direction; a Z-axis direction displacement detecting portion for detecting a displacement of the stylus mounting portion in the Z-axis direction; and a stylus mounting portion and a load adjusting portion. A Z-axis drive mechanism that adjusts the contact / separation of the stylus with respect to the test object and the measurement load by mounting a spring and a Z-axis direction displacement detection unit and moving in the Z-axis direction; An X-axis drive mechanism that drives in the X-axis direction;
A surface mechanical property measuring device comprising: 2. The surface mechanical characteristic measuring device according to claim 1, wherein the Z-axis driving mechanism includes a micro air slider for restricting a movement of the stylus mounting portion. 3. The surface mechanical property measurement according to claim 1, wherein the Z-axis direction displacement detecting section detects a minute displacement of the end surface of the stylus mounting section in the Z-axis direction in the Z-axis direction. apparatus. 4. The surface mechanical characteristic measuring device according to claim 3, wherein the Z-axis direction displacement detecting section is a capacitance meter. 5. The surface mechanical characteristic measuring device according to claim 3, wherein the Z-axis direction displacement detecting section is an optical displacement meter. 6. The surface mechanical characteristic measuring apparatus according to claim 1, wherein the Z-axis direction displacement detecting section is a longitudinal strain detector including a strain gauge attached to the load adjusting spring. 7. The stylus is supported by a parallel leaf spring and can be displaced in the X-axis direction by the force in the X-axis direction.
The surface mechanical characteristic measuring device according to claim 1, further comprising an X-axis direction displacement detection unit that detects a minute displacement of the stylus in the X-axis direction. 8. The surface mechanical characteristic measuring device according to claim 7, wherein the X-axis direction displacement detecting section is a capacitance meter. 9. An apparatus according to claim 8, wherein said parallel leaf spring is made of a conductive material. 10. The surface mechanical characteristic measuring device according to claim 7, wherein the X-axis direction displacement detecting section is an optical displacement meter. 11. The surface mechanical characteristic measuring device according to claim 7, wherein the X-axis direction displacement detecting unit is a lateral strain detector including a strain gauge attached to the parallel leaf spring. 12. The surface mechanical characteristic measuring device according to claim 1, wherein the Z-axis direction displacement detecting unit includes a displacement adjusting unit capable of adjusting a position in the Z-axis direction. . 13. The apparatus according to claim 7, wherein the X-axis direction displacement detecting section includes a displacement adjusting section capable of adjusting a position in the X-axis direction and the Z-axis direction. Surface mechanical property measurement device. 14. A feedback control system for controlling the Z-axis drive mechanism so that the displacement of the Z-axis direction displacement detection unit is controlled so that the contact load of the stylus on the surface of the test object becomes a target displacement corresponding to a target value. The surface mechanical property measuring device according to any one of claims 7 to 11, further comprising: 15. The compensator for performing a position control of the Z-axis drive mechanism by comparing the target displacement corresponding to a target value of the contact load with the displacement of the Z-axis direction displacement detection unit. 15. The surface mechanical characteristic measuring device according to claim 14, wherein the compensator has an integral characteristic. 16. The compensator for performing position control of the Z-axis drive mechanism by comparing the target displacement corresponding to a target value of the contact load with the displacement of the Z-axis direction displacement detector. Wherein the control band of the feedback control system is obtained from the shape and the scanning speed of the test object.
15. The frequency compensator is frequency-compensated so as to be higher than an axial dynamic disturbance frequency.
The surface mechanical property measurement device according to the above. 17. A feedback control for controlling the Z-axis drive mechanism such that the displacement of the X-axis direction displacement detecting unit is a target displacement corresponding to a frictional force target value of a frictional force of the stylus on the surface of the test object. The surface mechanical property measuring apparatus according to any one of claims 7 to 11, further comprising a system. 18. The compensation for performing position control of the Z-axis drive mechanism by comparing the target displacement corresponding to a frictional force target value of the frictional force with the displacement of the X-axis direction displacement detection unit. 18. The apparatus according to claim 17, further comprising a compensator, wherein the compensator has an integral characteristic. 19. The compensation for performing position control of the Z-axis drive mechanism by comparing the target displacement corresponding to a frictional force target value of the frictional force with the displacement of the X-axis direction displacement detection unit. The compensator is frequency-compensated such that the control band of the feedback control system is higher than the dynamic disturbance frequency in the Z-axis direction obtained from the shape and scanning speed of the test object. The surface mechanical property measuring device according to claim 17, characterized in that: 20. A surface mechanical property measuring method for measuring a surface property of a test object by bringing a stylus into contact with a surface of the test object and sliding the same, wherein the stylus is attached, and A stylus mounting portion that is restricted in fluctuation in an X-axis direction perpendicular to the longitudinal direction and is movable in a minute range in a Z-axis direction along the longitudinal direction of the stylus; A load adjustment spring supported in the Z-axis direction; a Z-axis direction displacement detection unit that detects a displacement of the stylus mounting unit in the Z-axis direction; a stylus mounting unit, a load adjustment spring, and Z A Z-axis drive mechanism for mounting and displacing an axial displacement detector in the Z-axis direction to adjust contact / separation of the stylus with respect to the test object and a measurement load; An X-axis drive mechanism that drives the stylus in the direction The Z-axis drive mechanism is moved away from the contact state in the Z-axis direction, and the weight of the stylus mounting portion detected by the Z-axis direction displacement detection unit and the displacement of the load adjustment spring from the balance point. A method for measuring surface mechanical characteristics, wherein the attraction of the test object is measured based on a spring constant of the load adjusting spring. 21. A surface mechanical property measuring method for measuring a surface property of the test object by bringing a stylus into contact with a surface of the test object and sliding the same, wherein the stylus is attached to the stylus. A stylus mounting portion that is restricted in fluctuation in an X-axis direction perpendicular to the longitudinal direction of the stylus and is movable in a minute range in a Z-axis direction along the longitudinal direction of the stylus; A Z-axis by a longitudinal strain detector comprising a load adjustment spring supporting the Z-axis direction, and a strain gauge attached to the load adjustment spring and detecting displacement of the stylus mounting portion in the Z-axis direction. A direction displacement detection unit, and a stylus mounting unit, a load adjustment spring, and a Z-axis direction displacement detection unit mounted thereon and moved in the Z-axis direction to move the stylus toward and away from the object. A Z-axis drive mechanism for adjusting a measurement load; And X-axis driving mechanism for driving the X-axis direction,
And moving the Z-axis drive mechanism away from the state in which the stylus is in contact with the test object in the Z-axis direction, and measuring the attractive force of the test object based on the amount of distortion of the vertical strain detector. A method for measuring surface mechanical properties, characterized in that: 22. A surface mechanical property measuring method for measuring surface properties of a test object by bringing a stylus into contact with the surface of the test object and sliding the same, wherein the stylus is supported by a parallel leaf spring and is orthogonal to the longitudinal direction. A stylus that is displaceable in the X-axis direction by a force in the X-axis direction is attached, restricts movement in the X-axis direction, and moves in a minute range in the Z-axis direction along the longitudinal direction of the stylus. A needle mounting portion, a load adjusting spring that is detachably provided and supports the stylus mounting portion in the Z-axis direction, and a Z-axis direction that detects displacement of the stylus mounting portion in the Z-axis direction. A displacement detection unit, an X-axis direction displacement detection unit that detects a minute displacement of the stylus in the X-axis direction, a stylus attachment unit, a load adjustment spring, a Z-axis direction displacement detection unit, and an X-axis direction. A displacement detection unit is mounted and moved in the Z-axis direction, Serial and Z-axis driving mechanism for adjusting the contact and separation and measurement load on the test object, the X-axis driving mechanism for driving the specimen in the X-axis direction,
The displacement of the X-axis direction displacement detection unit and the spring constant of the parallel leaf spring when scanning the object by the X-axis drive mechanism while contacting the stylus with the surface of the object Measuring the frictional force of the test object based on the following. 23. A surface mechanical property measuring method for measuring a surface property of a test object by bringing a stylus into contact with the surface of the test object and sliding the stylus in contact with the surface of the test object. A stylus that is displaceable in the X-axis direction by a force in the X-axis direction is attached, restricts movement in the X-axis direction, and moves in a minute range in the Z-axis direction along the longitudinal direction of the stylus. A needle mounting portion, a load adjusting spring that is detachably provided and supports the stylus mounting portion in the Z-axis direction, and a Z-axis direction that detects displacement of the stylus mounting portion in the Z-axis direction. A displacement detection unit, an X-axis direction displacement detection unit that is attached to the parallel leaf spring, and that is a lateral strain detector that includes a strain gauge that detects a small displacement of the stylus in the X-axis direction. Section, load adjustment spring, Z axis direction displacement detection section, and X axis direction A Z-axis drive mechanism for mounting a position detection unit and adjusting the contact / separation of the stylus with respect to the test object and the measurement load by moving in the Z-axis direction; and moving the test object in the X-axis direction. An X-axis drive mechanism for driving;
Using the X-axis drive mechanism to scan the test object while contacting the stylus on the test object surface, the frictional force of the test object based on the amount of distortion of the lateral strain detector. A method for measuring surface mechanical properties, characterized in that the measurement is performed. 24. Feedback control for controlling the Z-axis drive mechanism such that the displacement of the X-axis direction displacement detection unit becomes a target displacement corresponding to a frictional force target value of a frictional force of the stylus on the surface of the test object. 23. The method according to claim 22, wherein a friction coefficient of the test object is measured based on a detected frictional force and a contact load on the test object using a system.