JP2001248587A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2001248587A5 JP2001248587A5 JP2000382790A JP2000382790A JP2001248587A5 JP 2001248587 A5 JP2001248587 A5 JP 2001248587A5 JP 2000382790 A JP2000382790 A JP 2000382790A JP 2000382790 A JP2000382790 A JP 2000382790A JP 2001248587 A5 JP2001248587 A5 JP 2001248587A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000382790A JP2001248587A (ja) | 1999-12-28 | 2000-12-15 | 複合型真空ポンプ |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP37541799 | 1999-12-28 | ||
| JP11-375417 | 1999-12-28 | ||
| JP2000382790A JP2001248587A (ja) | 1999-12-28 | 2000-12-15 | 複合型真空ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001248587A JP2001248587A (ja) | 2001-09-14 |
| JP2001248587A5 true JP2001248587A5 (enExample) | 2008-01-31 |
Family
ID=26582691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000382790A Pending JP2001248587A (ja) | 1999-12-28 | 2000-12-15 | 複合型真空ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001248587A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003172291A (ja) * | 2001-12-04 | 2003-06-20 | Boc Edwards Technologies Ltd | 真空ポンプ |
| JP7342574B2 (ja) * | 2019-09-27 | 2023-09-12 | 株式会社島津製作所 | 真空ポンプ |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6351195U (enExample) * | 1986-09-20 | 1988-04-06 | ||
| JPH02502743A (ja) * | 1987-12-25 | 1990-08-30 | ショロホフ ヴァレリイ ボリソヴィチ | 分子真空ポンプ |
| JPH01195992A (ja) * | 1988-01-30 | 1989-08-07 | Naoto Ibarada | ターボ分子ポンプの動翼 |
| JPH0692799B2 (ja) * | 1989-11-24 | 1994-11-16 | ダイキン工業株式会社 | 真空ポンプ |
| DE19632874A1 (de) * | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe |
-
2000
- 2000-12-15 JP JP2000382790A patent/JP2001248587A/ja active Pending