JP2001248587A - 複合型真空ポンプ - Google Patents

複合型真空ポンプ

Info

Publication number
JP2001248587A
JP2001248587A JP2000382790A JP2000382790A JP2001248587A JP 2001248587 A JP2001248587 A JP 2001248587A JP 2000382790 A JP2000382790 A JP 2000382790A JP 2000382790 A JP2000382790 A JP 2000382790A JP 2001248587 A JP2001248587 A JP 2001248587A
Authority
JP
Japan
Prior art keywords
gas transfer
upstream end
groove
turbo
upstream
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000382790A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001248587A5 (enExample
Inventor
Matsumi Iwane
松美 岩根
Eigen Shu
榮源 周
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kashiyama Industries Ltd
Original Assignee
Kashiyama Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kashiyama Industries Ltd filed Critical Kashiyama Industries Ltd
Priority to JP2000382790A priority Critical patent/JP2001248587A/ja
Publication of JP2001248587A publication Critical patent/JP2001248587A/ja
Publication of JP2001248587A5 publication Critical patent/JP2001248587A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP2000382790A 1999-12-28 2000-12-15 複合型真空ポンプ Pending JP2001248587A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000382790A JP2001248587A (ja) 1999-12-28 2000-12-15 複合型真空ポンプ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP37541799 1999-12-28
JP11-375417 1999-12-28
JP2000382790A JP2001248587A (ja) 1999-12-28 2000-12-15 複合型真空ポンプ

Publications (2)

Publication Number Publication Date
JP2001248587A true JP2001248587A (ja) 2001-09-14
JP2001248587A5 JP2001248587A5 (enExample) 2008-01-31

Family

ID=26582691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000382790A Pending JP2001248587A (ja) 1999-12-28 2000-12-15 複合型真空ポンプ

Country Status (1)

Country Link
JP (1) JP2001248587A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1318308A3 (en) * 2001-12-04 2003-12-03 BOC Edwards Technologies, Limited Vacuum pump
JP2021055588A (ja) * 2019-09-27 2021-04-08 株式会社島津製作所 真空ポンプ

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6351195U (enExample) * 1986-09-20 1988-04-06
JPH01195992A (ja) * 1988-01-30 1989-08-07 Naoto Ibarada ターボ分子ポンプの動翼
JPH02502743A (ja) * 1987-12-25 1990-08-30 ショロホフ　ヴァレリイ　ボリソヴィチ 分子真空ポンプ
JPH0692799B2 (ja) * 1989-11-24 1994-11-16 ダイキン工業株式会社 真空ポンプ
WO1998007989A1 (de) * 1996-08-16 1998-02-26 Leybold Vakuum Gmbh Reibungsvakuumpumpe

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6351195U (enExample) * 1986-09-20 1988-04-06
JPH02502743A (ja) * 1987-12-25 1990-08-30 ショロホフ　ヴァレリイ　ボリソヴィチ 分子真空ポンプ
JPH01195992A (ja) * 1988-01-30 1989-08-07 Naoto Ibarada ターボ分子ポンプの動翼
JPH0692799B2 (ja) * 1989-11-24 1994-11-16 ダイキン工業株式会社 真空ポンプ
WO1998007989A1 (de) * 1996-08-16 1998-02-26 Leybold Vakuum Gmbh Reibungsvakuumpumpe

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1318308A3 (en) * 2001-12-04 2003-12-03 BOC Edwards Technologies, Limited Vacuum pump
JP2021055588A (ja) * 2019-09-27 2021-04-08 株式会社島津製作所 真空ポンプ
JP7342574B2 (ja) 2019-09-27 2023-09-12 株式会社島津製作所 真空ポンプ

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