JP2001244699A - Method for observing electrode - Google Patents

Method for observing electrode

Info

Publication number
JP2001244699A
JP2001244699A JP2000052988A JP2000052988A JP2001244699A JP 2001244699 A JP2001244699 A JP 2001244699A JP 2000052988 A JP2000052988 A JP 2000052988A JP 2000052988 A JP2000052988 A JP 2000052988A JP 2001244699 A JP2001244699 A JP 2001244699A
Authority
JP
Japan
Prior art keywords
wiring
chip
electrode
fpc
acf
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000052988A
Other languages
Japanese (ja)
Inventor
Hitoshi Suda
仁 須田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP2000052988A priority Critical patent/JP2001244699A/en
Publication of JP2001244699A publication Critical patent/JP2001244699A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

PROBLEM TO BE SOLVED: To solve the problem where confirming real-time connecting/fixing condition with an optical microscope is impossible or very difficult while it is impossible to selectively leave out a Cu foil to form a wiring and then observe the surface of an IC ship through the wiring. SOLUTION: An FPC is placed on a work table. A wiring is formed of the Cu foil on its surface. A wiring electrode is provided at the tip of the wiring with the IC chip connected and fixed. A bump arranged at the IC chip is connected to the wiring electrode. At connection, an ACF is placed between them. The IC chip, while holding and heating, is aligned with the wiring electrode of the FPC by a heater block for heating and press-fitting. A camera is installed under the workable. The infrared ray generated from the heater block is used.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、不透明な可撓性薄
板に印刷された回路基板(以下FPCと称す)の表面に
形成された配線電極と、異方性導電テープ(以下ACF
と称す)を介して接続されたICの電極の観察方法に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wiring electrode formed on the surface of a circuit board (hereinafter referred to as "FPC") printed on an opaque flexible thin plate, and an anisotropic conductive tape (hereinafter referred to as "ACF").
) Connected to each other through an IC.

【0002】[0002]

【従来の技術】ガラス板などから成る透明基板に、IC
チップなどを実装する手段としてACFを用いる方法が
知られている。このとき用いられるICチップは、バン
プと呼ばれる突起電極を有するものが多い。しかし、透
明基板の方を突起配線電極として、ICチップ側は平坦
な電極の場合もある。
2. Description of the Related Art On a transparent substrate such as a glass plate, an IC
A method using an ACF is known as a means for mounting a chip or the like. Many IC chips used at this time have bump electrodes called bumps. However, there is a case where the transparent substrate is used as the protruding wiring electrode and the IC chip side is a flat electrode.

【0003】このACFによる実装については、ICチ
ップ側の電極とガラス板側の電極の両方が、一方又は両
方の電極が突起電極を形成しておれば、ACFによる接
続固定、即ち実装可能である。この技術にあっては、旧
来のワイアーボンディング法のように作業する方向から
は、或る程度の工夫をしなければ観察できない。特に、
不透明な電極であった場合はそれは、顕著である。
[0003] With respect to the mounting using the ACF, if both the electrode on the IC chip side and the electrode on the glass plate side form one or both of the protruding electrodes, the connection and fixing by the ACF, that is, the mounting can be performed. . In this technique, it is not possible to observe from a working direction like the conventional wire bonding method without taking a certain measure. In particular,
That is noticeable if it was an opaque electrode.

【0004】突起電極を有するICチップを透明基板で
あって、更に条件として透明な電極に接続固定した後
に、ICチップが透明基板に位置ずれなく正しく接続固
定されたか否かの検査が行われる場合の観察方法を説明
する。
In the case where an IC chip having a protruding electrode is a transparent substrate, and after a condition is connected and fixed to the transparent electrode, a test is performed to determine whether the IC chip is correctly connected and fixed to the transparent substrate without displacement. The observation method will be described.

【0005】この場合は、常識的な配置としては、透明
基板を上にして、ICチップを下にし、透明基板と透明
電極を介して、ICチップの電極を観察する方法であ
る。ICチップの電極表面はAl又は、Au、半田など
で観察しやすいのでACFが透明な樹脂で構成されてお
れば簡単便利である。
In this case, a common sense arrangement is to observe the electrodes of the IC chip through the transparent substrate and the transparent electrodes with the transparent substrate facing upward and the IC chip facing downward. Since the electrode surface of the IC chip can be easily observed with Al, Au, solder or the like, it is simple and convenient if the ACF is made of a transparent resin.

【0006】しかし、ACFは原因は詳らかではないが
加熱圧着時に発泡する。その泡が顕微鏡の光路を阻害し
(実際は、泡が光って見えその周辺に比べて明るすぎる
ので)観察を難しくしている。
[0006] However, ACF foams during thermocompression bonding, although the cause is not clear. The bubbles obstruct the optical path of the microscope (actually, the bubbles appear shiny and too bright compared to their surroundings), making observation difficult.

【0007】このことを解決するために、特開平9−1
96617は図3に示す方法を提案している。チップ2
2がボンディングされたガラス基板21に第1の斜方向
光源Bと第2の斜方向光源Cから光を照射し、カメラ2
7で二つの明暗画像を入手する。この二つの明暗画像に
は、夫々ACF中の気泡が部分的に明るく輝いている
が、夫々の明るく輝く部分の場所は異なっている。従っ
て、二つの明暗画像の論理和画像を合成すると、気泡は
消去され、位置合わせ用バンプのみが明るく観察され
る。
[0007] To solve this problem, Japanese Patent Laid-Open No. 9-1 is disclosed.
96617 proposes the method shown in FIG. Chip 2
The first oblique direction light source B and the second oblique direction light source C irradiate light to the glass substrate 21 to which the camera 2 is bonded.
At 7, two light and dark images are obtained. In these two bright and dark images, the bubbles in the ACF partially shine brightly, but the locations of the brightly shining portions are different. Therefore, when the logical sum image of the two bright and dark images is combined, the bubbles are eliminated and only the positioning bumps are observed bright.

【0008】この公知例は、同公報にも明記されている
ようにA)透明なガラス基板を用いることとB)透明な
電極を基板側に持つことが前提条件である。それ故、ガ
ラス基板側から観察でき、同軸光を2方向から照射して
明暗画像を入手し、これを論理和画像にして泡の不都合
を除去した物である。
[0008] This known example is premised on A) using a transparent glass substrate and B) having a transparent electrode on the substrate side, as specified in the publication. Therefore, the image can be observed from the glass substrate side, and a bright and dark image is obtained by irradiating coaxial light from two directions, and this is ORed to remove the inconvenience of bubbles.

【0009】本発明は、A)有色であっても不透明であ
っても勿論透明な基板であっても観察可能な、B)不透
明な金属電極を基板側に持つACFを用いてICチップ
を接続固定したFPCの観察方法を提案する。
According to the present invention, A) the IC chip can be connected using an ACF having an opaque metal electrode on the substrate side, which can be observed even if the substrate is colored, opaque, or of course transparent. A method for observing a fixed FPC is proposed.

【0010】[0010]

【発明が解決しようとする課題】近来FPCと呼ばれる
可撓性絶縁基板を使用して電気部品を搭載し電気装置に
組み込む方法が開発されている。このFPCは、透明、
半透明、不透明の絶縁材料で出来ており、一般的にはC
uを配置しこれを任意の回路構成となるように選択的に
残し回路基板とし、この基板に電気部品を接続固定して
用いる。
Recently, a method has been developed in which an electric component is mounted using a flexible insulating substrate called an FPC and incorporated into an electric device. This FPC is transparent,
It is made of translucent and opaque insulating material.
u is arranged and selectively left so as to have an arbitrary circuit configuration to form a circuit board, and electric components are connected and fixed to this board for use.

【0011】従来の技術でも述べたが、不透明又は半透
明な基板であると材料が何であっても、単なる光学顕微
鏡では接続固定している状況をリアルタイムで確認する
ことは不可能か著しく困難である。更に、Cu箔を選択
的に残して配線を形成した後に、その配線を透過して例
えばICチップの表面を観察することは不可能である。
As described in the prior art, irrespective of the material of an opaque or translucent substrate, it is impossible or extremely difficult to confirm the state of connection and fixation in real time with a simple optical microscope. is there. Furthermore, it is impossible to observe the surface of, for example, an IC chip through the wiring after forming the wiring while leaving the Cu foil selectively.

【0012】この様に、光学的顕微鏡で透過では不可能
な材料で構成されているときの問題、同様に反射で観察
しようとしても重なった物を観察するときの問題を解決
する方法を提案するものである。
As described above, a method is proposed for solving the problem when the optical microscope is made of a material that cannot be transmitted by the optical microscope, and similarly, the problem when observing the overlapped object when the observation is performed by the reflection. Things.

【0013】[0013]

【課題を解決するための手段】本発明は、不透明な可撓
性プリント基板の表面に形成された配線に異方性導電テ
ープを介して接続されたICの電極の位置を認識するに
当たり、作業台下より照射した赤外線と、その像を感知
する赤外線カメラにより配線とICの電極との位置ズレ
を観察することを特徴とする電極の観察方法にある。
SUMMARY OF THE INVENTION The present invention provides a method for recognizing a position of an electrode of an IC connected to a wiring formed on a surface of an opaque flexible printed circuit board via an anisotropic conductive tape. An electrode observation method is characterized by observing a positional shift between a wiring and an electrode of an IC using an infrared camera that senses an image of infrared rays irradiated from below the table.

【0014】また、前記作業台は石英によって構成され
ることを特徴とする電極の観察方法にある。
Further, there is provided a method for observing an electrode, wherein the work table is made of quartz.

【0015】[0015]

【発明の実施の形態】本発明の実施の形態を図1に従っ
て説明する。本発明は、作業台1上にFPC2が載置さ
れる。FPCは、ポリイミドであり、その表面にCu箔
が設置され、これを所定の機能を与えるように残されて
配線3が形成されている。配線の先端部に配線電極4が
設けられ、ICチップ5が接続固定される。ICチップ
には、突起電極(以下バンプと称する)6が配置されて
おり、バンプ6と配線電極4が最終的には接続される。
接続に当たっては、ACF7が両者の中間に介在する。
即ち、バンプ6と配線電極4はACF7を介して接続固
定される。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIG. In the present invention, the FPC 2 is placed on the work table 1. The FPC is polyimide, and a Cu foil is provided on the surface thereof, and the wiring 3 is formed by leaving the Cu foil to provide a predetermined function. The wiring electrode 4 is provided at the tip of the wiring, and the IC chip 5 is connected and fixed. Protrusion electrodes (hereinafter, referred to as bumps) 6 are arranged on the IC chip, and the bumps 6 and the wiring electrodes 4 are finally connected.
For connection, the ACF 7 is interposed between the two.
That is, the bump 6 and the wiring electrode 4 are connected and fixed via the ACF 7.

【0016】作業台1に配置されたFPC2上には、A
CF7が仮に接着されて固定され、ICチップ5を保持
し加熱しながらヒーターブロック8によってFPC2の
配線電極4に位置決めされ、加熱、圧着が行われる。作
業台1は、石英で形成され大きさについてはFPC2の
大きさに依存する。本実施の形態では、縦、横、厚さが
25mm、100mm、20mmの石英が使用された。
On the FPC 2 arranged on the work table 1, A
The CF 7 is temporarily adhered and fixed, and is positioned on the wiring electrode 4 of the FPC 2 by the heater block 8 while holding and heating the IC chip 5, and heating and pressure bonding are performed. The work table 1 is formed of quartz and its size depends on the size of the FPC 2. In the present embodiment, quartz having a length, width, and thickness of 25 mm, 100 mm, and 20 mm was used.

【0017】作業台の下にはカメラ9が設置される。カ
メラは赤外線感応CCDカメラを使用した。勿論本発明
においては、作業台の下にカメラを設置しなければなら
ない物ではなく、ヒーターブロック8からカメラ9まで
が光学的に直線で結ばれておれば目的を達する。従っ
て、光ファイバーグラスで光路を回転させてヒーターブ
ロックと同じく作業台の上へ配置しても本発明の目的を
失するものではない。本発明によれば、外部から光源は
必要ない。本発明は、ヒーターブロック8から発生する
赤外線を用る。即ち、本発明ではヒーターブロック8を
発した赤外線は、バンプ6を設けたICチップ5と、A
CF7と、配線3を設けたFCP2と、作業台1とを透
過してカメラ9に捕獲される。
A camera 9 is provided below the work table. The camera used was an infrared-sensitive CCD camera. Of course, in the present invention, the object is achieved if the camera block 9 and the camera 9 are optically connected in a straight line, instead of having to install a camera under the work table. Therefore, the object of the present invention is not lost even if the optical path is rotated by the optical fiber glass and the optical block is arranged on the worktable like the heater block. According to the invention, no external light source is required. The present invention uses infrared rays generated from the heater block 8. That is, in the present invention, the infrared ray emitted from the heater block 8 is transmitted to the IC chip 5 provided with the bump 6
The light passes through the CF 7, the FCP 2 provided with the wiring 3, and the work table 1 and is captured by the camera 9.

【0018】ACFを使った接続固定では250℃前後
を使用する。又、作業台1の材質形状は重要である。本
発明では250℃での作業に耐えるように石英を選択し
た。この石英を通過するときの減衰が大きいので検出温
度を100℃以上とした。斯様な条件でも、本発明の実
施の形態では精度0.1℃を確認できた。
In connection fixing using ACF, about 250 ° C. is used. The material shape of the work table 1 is important. In the present invention, quartz was selected so as to withstand the operation at 250 ° C. Since the attenuation when passing through the quartz was large, the detection temperature was set to 100 ° C. or higher. Even under such conditions, an accuracy of 0.1 ° C. was confirmed in the embodiment of the present invention.

【0019】本発明による観察方法を図2に従って説明
する。図2A)は、正常な接続が行われたFPCを示
し、図2B)は位置ズレを起こした場合を示した。カメ
ラには、作業台を下から覗き込んだように映像が映る。
図ではほぼ完全に赤外線を透過したFPCは省略してい
る。又、線源であるヒーターブロックは明暗の差なく写
っており、パターンと認識しないので省略している。更
に、作業台による吸収は、イメージ全体に色が付くので
これも省略して示す。
The observation method according to the present invention will be described with reference to FIG. FIG. 2A) shows an FPC to which a normal connection has been made, and FIG. 2B) shows a case where a positional shift has occurred. Images appear on the camera as if you were looking into the workbench from below.
In the figure, the FPC that transmits infrared rays almost completely is omitted. The heater block as a radiation source is shown without any difference in brightness and is omitted because it is not recognized as a pattern. Further, the absorption by the work table is omitted because the entire image is colored.

【0020】その結果、図示する通り、パターンとして
認識できるのは、FPCに配置された配線3及び配線電
極4と、バンプ6を有するICチップ5である。赤外線
の差即ち温度差は少なくともICチップ5と配線3との
間には十分あり、判別できるし視角でも確認できる。し
かし、接続作業中であると論理的には配線電極4とバン
プ6との温度差は非常に少ないので、両者を区別するこ
とは困難である。
As a result, as shown in the figure, what can be recognized as a pattern is the wiring 3 and the wiring electrodes 4 arranged on the FPC, and the IC chip 5 having the bumps 6. The difference between the infrared rays, that is, the temperature difference, is sufficient at least between the IC chip 5 and the wiring 3 and can be discriminated and can be confirmed by the visual angle. However, since the temperature difference between the wiring electrode 4 and the bump 6 is logically very small during the connection operation, it is difficult to distinguish between the two.

【0021】両者が重畳して見えるが、位置合わせに失
敗すれば図2Bに示す通り、正常なときのパターンと異
なった形状になり判別が可能である。
Although the two appear to be superimposed, if the alignment fails, the pattern becomes different from the normal pattern, as shown in FIG.

【0022】本発明による観察方法は、ICチップをA
CFで実際にFPCに圧着接続している状況を観察する
ことが出来る。順次説明する。最初にヒーターブロック
に保持され仮接着されたACFに、ICチップのバンプ
が接触する。するとACFを構成しているバインダーと
呼ばれる樹脂が溶融し始める。と同時に発泡し、余分な
ACFと共にICチップの下から吐出される。一定時間
後ヒーターブロックをICチップから離間すれば、具体
的には、ヒーターへの電流を切るという工程に入れば、
気泡の流動が止まり樹脂硬化が始まる。その間約10秒
である。この時間は本発明による観察方法には十分な長
さである。
According to the observation method of the present invention, the IC chip
It is possible to observe the situation where the CF is actually connected by crimping to the FPC. It will be described sequentially. First, the bumps of the IC chip come into contact with the temporarily bonded ACF held by the heater block. Then, a resin called a binder constituting the ACF starts to melt. At the same time, it foams and is discharged from under the IC chip together with excess ACF. After a certain period of time, if the heater block is separated from the IC chip, specifically, if it enters the process of turning off the current to the heater,
The flow of air bubbles stops and resin curing starts. It takes about 10 seconds. This time is long enough for the observation method according to the invention.

【0023】本発明によれば、観察中に気泡の発生から
ICチップ下からの消滅までの経過を記録することが出
来る。又、その変化を温度の変化として観察することが
出来る。即ち、ICチップの表面を見ているので流れが
良く見える。従って、ACFの硬化後に泡の存在するも
のに限度を設けて不良として認定できるし、その過程が
許された温度範囲内で実行されたか否かの判別も可能と
なった。
According to the present invention, it is possible to record the progress from the generation of bubbles to the disappearance from below the IC chip during observation. The change can be observed as a change in temperature. That is, the flow can be seen well because the surface of the IC chip is viewed. Accordingly, it is possible to determine the presence of bubbles after curing of the ACF by setting a limit on the presence of bubbles, and to determine whether the process is performed within the permitted temperature range.

【0024】[0024]

【発明の効果】本発明による観察によって、FPCを用
いて電気装置に組み込む回路基板の生産時の監視作業
と、接続固定後の品質の確認に効果的である。しかも、
CCDカメラと、適切な材料による作業台とを用意さえ
すれば観察に供する設備は準備でき、大きな費用を要し
ない。
The observation according to the present invention is effective for the monitoring work at the time of production of a circuit board to be incorporated into an electric device using the FPC, and for confirming the quality after connection and fixing. Moreover,
As long as a CCD camera and a worktable made of an appropriate material are prepared, equipment for observation can be prepared and no large cost is required.

【0025】本発明により、ACFのバインダーが溶融
して硬化するまでの逐一を観察できるようになったの
で、従来は見逃されていた泡に関する品質のトラブルを
軽減できた。泡がICチップとFPCとの間に存在する
と、これを電気装置に組み込んだ後に、温度サイクルを
受けることによってバンプと配線電極とにストレスが掛
かり断線或いは接触不良を起こす。即ち、この種の品
質、信頼性の問題を軽減できた。
According to the present invention, since it becomes possible to observe every time the ACF binder is melted and hardened, it is possible to reduce the quality trouble relating to the foam which was conventionally overlooked. If bubbles are present between the IC chip and the FPC, the bumps and the wiring electrodes are stressed by being subjected to a temperature cycle after being incorporated into an electric device, resulting in disconnection or poor contact. That is, this kind of quality and reliability problems could be reduced.

【0026】赤外線による温度感知は、本発明によれば
0.1℃程度は十分に判別できる。従って、泡の温度と
銅箔などの温度に差を識別できるから色を変えて観察す
ることも可能となり検査の精度が向上した。
According to the present invention, temperature sensing using infrared rays can be sufficiently determined at about 0.1 ° C. Therefore, since the difference between the temperature of the foam and the temperature of the copper foil or the like can be identified, it is possible to change the color and observe, thereby improving the accuracy of the inspection.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明を説明するための全体構成図。FIG. 1 is an overall configuration diagram for explaining the present invention.

【図2】本発明を説明するための映像例。A)は正常な
FPCを示しB)は位置ズレを起こしたFPCを示す。
FIG. 2 is a video example for explaining the present invention. A) shows a normal FPC, and B) shows an FPC in which a position shift has occurred.

【図3】従来例を示す全体概念図。FIG. 3 is an overall conceptual diagram showing a conventional example.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 不透明な可撓性プリント基板の表面に形
成された配線に異方性導電テープを介して接続されたI
Cの電極の位置を認識するに当たり、作業台下より照射
した赤外線とその像を感知する赤外線カメラにより配線
とICの電極との位置ズレを観察することを特徴とする
電極の観察方法。
1. An I-wire connected to a wiring formed on the surface of an opaque flexible printed circuit board via an anisotropic conductive tape.
A method for observing the position of an electrode of C, comprising: observing a positional shift between a wiring and an electrode of an IC by an infrared camera which senses an image of the infrared light emitted from below the worktable and an image thereof when recognizing the position of the electrode of C.
【請求項2】 前記作業台は石英によって構成されるこ
とを特徴とする請求項1記載の電極の観察方法。
2. The method for observing an electrode according to claim 1, wherein the worktable is made of quartz.
JP2000052988A 2000-02-29 2000-02-29 Method for observing electrode Pending JP2001244699A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003041478A1 (en) * 2001-11-05 2003-05-15 Toray Engineering Co., Ltd. Mounter and mounting method
JP2008098384A (en) * 2006-10-11 2008-04-24 Denso Corp Method and device for manufacturing semiconductor package
KR100828312B1 (en) * 2006-08-29 2008-05-08 주식회사 에스에프에이 Apparatus and Method for Bonding Printed Circuit on FPD Panel
KR100828309B1 (en) * 2006-08-29 2008-05-08 주식회사 에스에프에이 Apparatus and Method for Bonding Printed Circuit on FPD Panel
JP2009267178A (en) * 2008-04-28 2009-11-12 Panasonic Corp Electronic component mounting device, and bonding defect detection method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003041478A1 (en) * 2001-11-05 2003-05-15 Toray Engineering Co., Ltd. Mounter and mounting method
KR100828312B1 (en) * 2006-08-29 2008-05-08 주식회사 에스에프에이 Apparatus and Method for Bonding Printed Circuit on FPD Panel
KR100828309B1 (en) * 2006-08-29 2008-05-08 주식회사 에스에프에이 Apparatus and Method for Bonding Printed Circuit on FPD Panel
JP2008098384A (en) * 2006-10-11 2008-04-24 Denso Corp Method and device for manufacturing semiconductor package
JP2009267178A (en) * 2008-04-28 2009-11-12 Panasonic Corp Electronic component mounting device, and bonding defect detection method

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