JP2001237238A5 - - Google Patents

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Publication number
JP2001237238A5
JP2001237238A5 JP2000047353A JP2000047353A JP2001237238A5 JP 2001237238 A5 JP2001237238 A5 JP 2001237238A5 JP 2000047353 A JP2000047353 A JP 2000047353A JP 2000047353 A JP2000047353 A JP 2000047353A JP 2001237238 A5 JP2001237238 A5 JP 2001237238A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000047353A
Other languages
Japanese (ja)
Other versions
JP2001237238A (ja
JP4212753B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000047353A priority Critical patent/JP4212753B2/ja
Priority claimed from JP2000047353A external-priority patent/JP4212753B2/ja
Publication of JP2001237238A publication Critical patent/JP2001237238A/ja
Publication of JP2001237238A5 publication Critical patent/JP2001237238A5/ja
Application granted granted Critical
Publication of JP4212753B2 publication Critical patent/JP4212753B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000047353A 2000-02-24 2000-02-24 縦型熱処理装置 Expired - Fee Related JP4212753B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000047353A JP4212753B2 (ja) 2000-02-24 2000-02-24 縦型熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000047353A JP4212753B2 (ja) 2000-02-24 2000-02-24 縦型熱処理装置

Publications (3)

Publication Number Publication Date
JP2001237238A JP2001237238A (ja) 2001-08-31
JP2001237238A5 true JP2001237238A5 (enExample) 2006-10-12
JP4212753B2 JP4212753B2 (ja) 2009-01-21

Family

ID=18569612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000047353A Expired - Fee Related JP4212753B2 (ja) 2000-02-24 2000-02-24 縦型熱処理装置

Country Status (1)

Country Link
JP (1) JP4212753B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7351057B2 (en) * 2005-04-27 2008-04-01 Asm International N.V. Door plate for furnace
KR101333363B1 (ko) 2006-10-13 2013-11-28 도쿄엘렉트론가부시키가이샤 열처리 장치
JP5560556B2 (ja) * 2008-11-17 2014-07-30 東京エレクトロン株式会社 処理装置

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