JP2001223166A5 - - Google Patents

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Publication number
JP2001223166A5
JP2001223166A5 JP2000362446A JP2000362446A JP2001223166A5 JP 2001223166 A5 JP2001223166 A5 JP 2001223166A5 JP 2000362446 A JP2000362446 A JP 2000362446A JP 2000362446 A JP2000362446 A JP 2000362446A JP 2001223166 A5 JP2001223166 A5 JP 2001223166A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2000362446A
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Japanese (ja)
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JP2001223166A (ja
JP4758000B2 (ja
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Priority to JP2000362446A priority Critical patent/JP4758000B2/ja
Priority claimed from JP2000362446A external-priority patent/JP4758000B2/ja
Publication of JP2001223166A publication Critical patent/JP2001223166A/ja
Publication of JP2001223166A5 publication Critical patent/JP2001223166A5/ja
Application granted granted Critical
Publication of JP4758000B2 publication Critical patent/JP4758000B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000362446A 1999-11-30 2000-11-29 半導体装置の作製方法 Expired - Fee Related JP4758000B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000362446A JP4758000B2 (ja) 1999-11-30 2000-11-29 半導体装置の作製方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP1999338929 1999-11-30
JP11-338929 1999-11-30
JP33892999 1999-11-30
JP2000362446A JP4758000B2 (ja) 1999-11-30 2000-11-29 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JP2001223166A JP2001223166A (ja) 2001-08-17
JP2001223166A5 true JP2001223166A5 (enrdf_load_stackoverflow) 2008-01-24
JP4758000B2 JP4758000B2 (ja) 2011-08-24

Family

ID=26576262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000362446A Expired - Fee Related JP4758000B2 (ja) 1999-11-30 2000-11-29 半導体装置の作製方法

Country Status (1)

Country Link
JP (1) JP4758000B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8154015B2 (en) 2001-11-09 2012-04-10 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device including thin film transistor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101050467B1 (ko) * 2010-04-14 2011-07-20 삼성모바일디스플레이주식회사 다결정 실리콘층, 그 제조방법, 상기 다결정 실리층을 이용한 박막 트랜지스터 및 상기 박막 트랜지스터를 구비한 유기발광표시장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02140915A (ja) * 1988-11-22 1990-05-30 Seiko Epson Corp 半導体装置の製造方法
JPH03110825A (ja) * 1989-09-26 1991-05-10 Fujitsu Ltd 半導体製造方法
JPH05190570A (ja) * 1992-01-17 1993-07-30 Sanyo Electric Co Ltd 薄膜トランジスタ及びその製造方法
JP3919838B2 (ja) * 1994-09-16 2007-05-30 株式会社半導体エネルギー研究所 半導体装置の作製方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8154015B2 (en) 2001-11-09 2012-04-10 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device including thin film transistor

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