JP2001223166A5 - - Google Patents

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Publication number
JP2001223166A5
JP2001223166A5 JP2000362446A JP2000362446A JP2001223166A5 JP 2001223166 A5 JP2001223166 A5 JP 2001223166A5 JP 2000362446 A JP2000362446 A JP 2000362446A JP 2000362446 A JP2000362446 A JP 2000362446A JP 2001223166 A5 JP2001223166 A5 JP 2001223166A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000362446A
Other languages
Japanese (ja)
Other versions
JP2001223166A (ja
JP4758000B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000362446A priority Critical patent/JP4758000B2/ja
Priority claimed from JP2000362446A external-priority patent/JP4758000B2/ja
Publication of JP2001223166A publication Critical patent/JP2001223166A/ja
Publication of JP2001223166A5 publication Critical patent/JP2001223166A5/ja
Application granted granted Critical
Publication of JP4758000B2 publication Critical patent/JP4758000B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000362446A 1999-11-30 2000-11-29 半導体装置の作製方法 Expired - Fee Related JP4758000B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000362446A JP4758000B2 (ja) 1999-11-30 2000-11-29 半導体装置の作製方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP33892999 1999-11-30
JP11-338929 1999-11-30
JP1999338929 1999-11-30
JP2000362446A JP4758000B2 (ja) 1999-11-30 2000-11-29 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JP2001223166A JP2001223166A (ja) 2001-08-17
JP2001223166A5 true JP2001223166A5 (da) 2008-01-24
JP4758000B2 JP4758000B2 (ja) 2011-08-24

Family

ID=26576262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000362446A Expired - Fee Related JP4758000B2 (ja) 1999-11-30 2000-11-29 半導体装置の作製方法

Country Status (1)

Country Link
JP (1) JP4758000B2 (da)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4149168B2 (ja) 2001-11-09 2008-09-10 株式会社半導体エネルギー研究所 発光装置
KR101050467B1 (ko) * 2010-04-14 2011-07-20 삼성모바일디스플레이주식회사 다결정 실리콘층, 그 제조방법, 상기 다결정 실리층을 이용한 박막 트랜지스터 및 상기 박막 트랜지스터를 구비한 유기발광표시장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02140915A (ja) * 1988-11-22 1990-05-30 Seiko Epson Corp 半導体装置の製造方法
JPH03110825A (ja) * 1989-09-26 1991-05-10 Fujitsu Ltd 半導体製造方法
JPH05190570A (ja) * 1992-01-17 1993-07-30 Sanyo Electric Co Ltd 薄膜トランジスタ及びその製造方法
JP3919838B2 (ja) * 1994-09-16 2007-05-30 株式会社半導体エネルギー研究所 半導体装置の作製方法

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