JP2001219304A - Surface-coated cemented carbide cutting tool with excellent wear resistance - Google Patents

Surface-coated cemented carbide cutting tool with excellent wear resistance

Info

Publication number
JP2001219304A
JP2001219304A JP2000030084A JP2000030084A JP2001219304A JP 2001219304 A JP2001219304 A JP 2001219304A JP 2000030084 A JP2000030084 A JP 2000030084A JP 2000030084 A JP2000030084 A JP 2000030084A JP 2001219304 A JP2001219304 A JP 2001219304A
Authority
JP
Japan
Prior art keywords
layer
cemented carbide
average
cutting
cutting tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000030084A
Other languages
Japanese (ja)
Other versions
JP3985411B2 (en
Inventor
Kazunori Sato
和則 佐藤
Yasuhiko Tashiro
安彦 田代
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
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Filing date
Publication date
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Priority to JP2000030084A priority Critical patent/JP3985411B2/en
Publication of JP2001219304A publication Critical patent/JP2001219304A/en
Application granted granted Critical
Publication of JP3985411B2 publication Critical patent/JP3985411B2/en
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Expired - Lifetime legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a surface-coated cemented carbide cutting tool with excellent wear resistance. SOLUTION: This surface-coated cemented carbide cutting tool is formed by physically depositing a touch coating layer, comprising one type of single layer or two types of multiple layers of a compound nitride layer and compound carbonitride layer of Ti and Al having an average layer thickness of 0.5 to 15 μm, on the surface of a tool base body formed of a tungsten carbide based cemented carbide or a titanium carbonitride based cermet through an adhesive substrate coated layer formed of one type of single layer or two types of multiple layer of a carbide layer, nitride layer, and carbonitride layer of Ti having an average layer thickness of 0.1 to 10 μm. On that surface, as a wear resistance coating layer, an aluminum oxide based layer of 0.5 to 15 μm in average layer thickness, formed by substitutive solution of a part of Al with one or two or more types of Ti, Zr, and Hf with a ratio of 0.01 to 10 atomic % in content relative to Al, with the crystal structure of an aluminum oxide held undisturbed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、すぐれた耐摩耗
性を有し、したがって例えば鋼の連続切削や断続切削で
長期に亘ってすぐれた切削性能を発揮する表面被覆超硬
合金製切削工具(以下、被覆超硬切削工具と云う)に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting tool made of a surface-coated cemented carbide which has excellent wear resistance and therefore exhibits excellent cutting performance over a long period of time, for example, in continuous cutting and interrupted cutting of steel. Hereinafter, referred to as a coated carbide cutting tool).

【0002】[0002]

【従来の技術】従来、一般に、例えば図1に概略説明図
で示される物理蒸着装置の1種であるアークイオンプレ
ーティング装置を用い、ヒータで装置内を例えば700
℃の温度に加熱した状態で、アノード電極とTiまたは
所定組成を有するTi−Al合金がセットされたカソー
ド電極(蒸発源)との間にアーク放電を発生させ、同時
に装置内に反応ガスとしてメタンガスおよび/または窒
素ガスを導入し、一方炭化タングステン(以下、WCで
示す)基超硬合金または炭窒化チタン(以下、TiCN
で示す)基サーメットからなり、かつ前記アノード電極
およびカソード電極と所定間隔をもって対向配置された
工具基体(以下、これらを総称して超硬工具基体と云
う)には、例えば−120Vのバイアス電圧を印加した
条件で、前記超硬工具基体の表面に、例えば特開昭62
−56565号公報に記載されるように、0.1〜10
μmの平均層厚を有するTiの炭化物層、窒化物層、お
よび炭窒化物層(以下、それぞれTiC層、TiN層、
およびTiCN層で示す)のうちの1種の単層または2
種の複層からなる密着性下地被覆層を介して、0.5〜
15μmの平均層厚を有するTiとAlの複合窒化物
[以下、(Ti,Al)Nで示す]層および複合炭窒化
物[以下、(Ti,Al)CNで示す]層のうちの1種
の単層または2種の複層からなる強靭性被覆層を物理蒸
着することにより製造された被覆超硬切削工具が知られ
ている。
2. Description of the Related Art Conventionally, for example, an arc ion plating apparatus, which is a kind of physical vapor deposition apparatus schematically shown in FIG.
In a state heated to a temperature of ℃, an arc discharge is generated between the anode electrode and a cathode electrode (evaporation source) on which Ti or a Ti-Al alloy having a predetermined composition is set, and at the same time, methane gas is used as a reaction gas in the apparatus. And / or nitrogen gas is introduced, while a tungsten carbide (hereinafter abbreviated as WC) based cemented carbide or titanium carbonitride (hereinafter abbreviated as TiCN)
A tool base (hereinafter, collectively referred to as a carbide tool base) made of a base cermet and opposed to the anode electrode and the cathode electrode at a predetermined interval (for example, referred to as a carbide tool base) is supplied with a bias voltage of -120 V, for example. Under the conditions applied, the surface of the cemented carbide tool substrate is
-56565, 0.1 to 10
a carbide layer, a nitride layer, and a carbonitride layer of Ti having an average layer thickness of μm (hereinafter, TiC layer, TiN layer,
And a TiCN layer).
Through an adhesive undercoating layer consisting of multiple layers of
One of a composite nitride layer of Ti and Al [hereinafter, referred to as (Ti, Al) N] and a composite carbonitride [hereinafter, referred to as (Ti, Al) CN] layer having an average layer thickness of 15 μm Coated carbide cutting tools manufactured by physical vapor deposition of a tough coating layer consisting of a single layer or two or more layers are known.

【0003】[0003]

【発明が解決しようとする課題】一方、近年の切削加工
のFA化および高速化はめざましく、かつ切削加工の省
力化および省エネ化に対する要求もつよく、これに伴
い、切削工具には使用寿命の延命化が強く望まれている
が、上記の従来被覆超硬切削工具の場合、これを構成す
る(Ti,Al)N層および(Ti,Al)CN層から
なる強靭性被覆層はすぐれた強度および靭性を有し、良
好な耐チッピング性(工具切刃に微小欠けが発生しにく
い性質)を示すものの、耐摩耗性が十分でないために、
比較的短時間で使用寿命に至るのが現状である。
On the other hand, in recent years, FA and speed of cutting have been remarkable, and there is also a demand for labor saving and energy saving of cutting. As a result, the life of cutting tools has been extended. However, in the case of the above-mentioned conventional coated carbide cutting tool, the tough coating layer composed of the (Ti, Al) N layer and the (Ti, Al) CN layer has excellent strength and strength. Although it has toughness and shows good chipping resistance (the property that micro chipping does not easily occur on the tool cutting edge), it has insufficient wear resistance,
At present, the service life is reached in a relatively short time.

【0004】[0004]

【課題を解決するための手段】そこで、本発明者等は、
上述のような観点から、上記の従来被覆超硬切削工具の
耐摩耗性向上を図るべく研究を行なった結果、(a)物
理蒸着法により形成された通常のAl2 3被覆層は、
耐熱性にすぐれ、かつ高硬度を有することから、耐摩耗
性向上を図る上で望ましいものであるが、前記Al2
3被覆層は上記の従来被覆超硬切削工具を構成する強靭
性被覆層である(Ti,Al)N層および(Ti,A
l)CN層との密着性に劣るものであることから、前記
従来被覆超硬切削工具の表面に前記Al2 3 層を被覆
してなる被覆超硬切削工具においては、特に工具切刃に
高い負荷のかかる断続切削を高切込みや高送りなどの重
切削条件で行った場合に前記Al2 3被覆層に剥離が
発生し易く、実用に供することができないこと。
Means for Solving the Problems Accordingly, the present inventors have
From the above-mentioned viewpoints, as a result of researching to improve the wear resistance of the conventional coated carbide cutting tool, (a) a normal Al 2 O 3 coating layer formed by physical vapor deposition is:
Excellent heat resistance, and because it has a high hardness, but is desirable in achieving the wear resistance improvement, the Al 2 O
(3) The coating layer is a tough coating layer (Ti, Al) N layer and (Ti, A) constituting the above-mentioned conventional coated carbide cutting tool.
l) Since the coated carbide cutting tool obtained by coating the surface of the conventional coated carbide cutting tool with the Al 2 O 3 layer is inferior in adhesion to the CN layer, the cutting edge is particularly When high-load intermittent cutting is performed under heavy cutting conditions such as high cutting and high feed, the Al 2 O 3 coating layer is liable to peel off and cannot be put to practical use.

【0005】(b)上記の従来被覆超硬切削工具の強靭
性被覆層を構成する(Ti,Al)N層および(Ti,
Al)CN層の表面に、上記Al2 3 層を物理蒸着法
により形成するに際して、Alよりイオン半径の著しく
大きいTi、Zr、およびHf、すなわちイオン半径が
0.57オングストロームのAlに対して、それぞれイ
オン半径が0.76オングストロームのTi、同0.8
7オングストロームのZr、および同0.84オングス
トロームのHfのうちの1種または2種以上を、Al2
3 の結晶構造におけるAl原子の一部をAlとの合量
に占める割合で0.01〜10原子%、望ましくは0.
02〜5原子%の割合で置換した形で固溶含有させる
と、この結果のAl2 3のもつ結晶構造を保持したま
まのAl2 3 主体層は、大きなイオン半径差による格
子内歪みの著しい増大によって、通常の物理蒸着形成さ
れたAl2 3被覆層が層厚にも影響されるが0.2〜
0.8GPaの圧縮残留応力をもつのに対して、1.2
〜3GPaの圧縮残留応力をもつようになり、このよう
に圧縮残留応力のきわめて高いAl2 3 主体層は上記
(Ti,Al)N層および(Ti,Al)CN層に著し
く強固に密着し、かつAl2 3の具備する特性をその
まま保持することから、前記(Ti,Al)N層および
(Ti,Al)CN層の表面にさらに前記Al2 3
体層を物理蒸着してなる被覆超硬切削工具は、例えば鋼
の断続切削を、特に工具切刃に高い負荷のかかる高切込
みや高送りなどの重切削条件で行っても前記Al2 3
主体層に剥離の発生なく、長期に亘ってすぐれた耐摩耗
性を発揮するようになること。以上(a)および(b)
に示される研究結果を得たのである。
(B) Toughness of the conventional coated carbide cutting tool
(Ti, Al) N layer and (Ti,
Al) On the surface of the CN layer, the above AlTwoOThreePhysical vapor deposition of layers
When formed by, the ionic radius is significantly higher than that of Al
Large Ti, Zr, and Hf, ie, ionic radii
For 0.57 Å of Al,
Ti with ON radius of 0.76 Å, 0.8
7 angstroms Zr and 0.84 angstroms
One or more of the Hf ofTwo
OThreeOf some of the Al atoms in the crystal structure of Al with Al
0.01 to 10 atomic%, preferably 0.1 to 10 atomic%.
Solid solution contained in a substituted form at a rate of 02 to 5 atomic%
And the resulting AlTwoOThreeRetains the crystal structure of
AlTwoOThree The main layer has a large ion radius difference.
The normal increase in physical vapor deposition
AlTwoOThreeAlthough the coating layer is affected by the layer thickness, 0.2 to
While having a compressive residual stress of 0.8 GPa, 1.2
圧 縮 3 GPa.
Al with extremely high compressive residual stressTwoOThreeMain layer is above
(Ti, Al) N layer and (Ti, Al) CN layer
Tightly adhered and AlTwoOThreeThe characteristics of
The (Ti, Al) N layer and the
The above-mentioned Al is further added to the surface of the (Ti, Al) CN layer.TwoOThreemain
Coated carbide cutting tools made by physical vapor deposition of body layers are, for example, steel
Intermittent cutting, especially at high depth of cut with high load on tool cutting edge
Even under heavy cutting conditions such as high feed rateTwoOThree
Excellent wear resistance over a long period without peeling of the main layer
To be able to demonstrate their sexuality. (A) and (b)
The research results shown in the above were obtained.

【0006】この発明は、上記の研究結果にもとづいて
なされたものであって、超硬工具基体の表面に、0.1
〜10μmの平均層厚を有するTiC層、TiN層、お
よびTiCN層のうちの1種の単層または2種以上の複
層からなる密着性下地被覆層を介して、0.5〜15μ
mの平均層厚を有する(Ti,Al)N層および(T
i,Al)CN層のうちの1種の単層または2種の複層
からなる強靭性被覆層を物理蒸着してなる被覆超硬切削
工具において、上記強靭性被覆層の表面に、さらに耐摩
耗性被覆層として、Al2 3もつ結晶構造を保持した
ままで、Alの一部をAlとの合量に占める割合で0.
01〜10原子%のTi、Zr、およびHfのうちの1
種または2種以上で置換固溶してなるAl2 3主体層
を0.5〜15μmの平均層厚で物理蒸着してなる耐摩
耗性のすぐれた被覆超硬切削工具に特徴を有するもので
ある。
The present invention has been made on the basis of the above research results, and has a surface of a cemented carbide tool substrate having a thickness of 0.1%.
0.5 to 15 μm via an adhesive undercoating layer comprising a single layer or a multilayer of two or more of a TiC layer, a TiN layer, and a TiCN layer having an average layer thickness of 10 to 10 μm.
(Ti, Al) N layer having an average layer thickness of m
In a coated carbide cutting tool obtained by physical vapor deposition of a tough coating layer consisting of one kind of single layer or two or more kinds of i, Al) CN layers, the surface of the toughness coating layer is further resistant to While maintaining the crystal structure of Al 2 O 3 as the wearable coating layer, the ratio of a part of Al to the total amount with Al is 0.1%.
01 to 10 atomic% of Ti, Zr, and Hf
Those characterized by a species or formed by substitution solid solution of two or more Al 2 O 3 the main layer with an average layer thickness of 0.5~15μm abrasion resistance formed by physical vapor deposition excellent coated cemented carbide cutting tools It is.

【0007】なお、この発明の被覆超硬切削工具におい
て、密着性下地被覆層、強靭性被覆層、および耐摩耗性
被覆層の平均層厚を上記の通りに限定した理由を説明す
る。 (a)密着性下地被覆層 その平均層厚が0.1μm未満では超硬工具基体と強靭
性被覆層との間に強固な密着性を確保することができ
ず、一方その平均層厚が10μmを越えると切削時に発
生する高熱によって熱塑性変形を起し、切刃に偏摩耗が
発生し、これが原因で摩耗進行が急激に促進されるよう
になることから、その平均層厚を0.1〜10μmと定
めた。
The reason why the average thickness of the adhesive undercoat layer, the tough coating layer and the wear-resistant coating layer in the coated carbide cutting tool of the present invention is limited as described above will be described. (A) Adhesive undercoat layer If the average layer thickness is less than 0.1 μm, it is not possible to secure strong adhesion between the carbide tool base and the tough coating layer, while the average layer thickness is 10 μm. If it exceeds the maximum temperature, it causes thermoplastic deformation due to the high heat generated at the time of cutting, causing uneven wear on the cutting edge, and the wear progresses rapidly due to this. It was determined to be 10 μm.

【0008】(b)強靭性被覆層 その平均層厚が0.5μm未満では所望のすぐれた強靭
性を発揮することができず、この結果切刃に欠けやチッ
ピング(微小欠け)が発生し易くなり、一方その平均層
厚が15μmを越えると、上記密着性下地被覆層と同様
に切削時に発生する高熱によって熱塑性変形を起し、切
刃に偏摩耗が発生し、これが原因で摩耗進行が急激に促
進されるようになることから、その平均層厚を0.5〜
15μmと定めた。
(B) Tough coating layer If the average layer thickness is less than 0.5 μm, the desired excellent toughness cannot be exhibited, and as a result, chipping or chipping (minute chipping) tends to occur in the cutting edge. On the other hand, if the average layer thickness exceeds 15 μm, similar to the above-mentioned adhesive undercoat layer, high heat generated during cutting causes thermoplastic deformation, causing uneven wear on the cutting edge, which causes rapid wear progress. Since the average layer thickness is 0.5 to
It was determined to be 15 μm.

【0009】(c)耐摩耗性被覆層(Al2 3 主体
層) その平均層厚が0.5μm未満では所望のすぐれた耐摩
耗性を確保することができず、一方その平均層厚が15
μmを越えると切刃に欠けやチッピングが発生し易くな
ることから、その平均層厚を0.5〜15μmと定め
た。
(C) Abrasion-resistant coating layer (Al 2 O 3 main layer) If the average layer thickness is less than 0.5 μm, it is not possible to secure desired excellent wear resistance, while the average layer thickness is Fifteen
If the thickness exceeds μm, chipping and chipping of the cutting edge easily occur, so the average layer thickness is set to 0.5 to 15 μm.

【0010】また、上記耐摩耗性被覆層におけるAlの
Ti、Zr、およびHfによる置換含有割合を0.01
〜10原子%としたのは、その含有割合が0.01原子
%未満では前記耐摩耗性被覆層に上記強靭性被覆層との
間に十分な密着性を確保することのできる圧縮残留応力
を形成することができず、一方その含有割合が15原子
%を越えると圧縮残留応力が大きくなりすぎて自己破壊
を起こし易くなるという理由にもとづくものである。さ
らに、上記耐摩耗性被覆層の上に、必要に応じてTiN
層を0.1〜2μmの平均層厚で形成してもよく、これ
はTiN層が黄金色の色調を有し、この色調によって切
削工具の使用前と使用後の識別が容易になるという理由
からで、この場合その層厚が0.1μm未満では前記色
調の付与が不十分であり、一方前記色調の付与は2μm
までの平均層厚で十分である。
[0010] Further, the replacement ratio of Al by Ti, Zr and Hf in the wear-resistant coating layer is set to 0.01.
When the content ratio is less than 0.01 atomic%, the compressive residual stress that can secure sufficient adhesion between the wear-resistant coating layer and the tough coating layer when the content is less than 0.01 atomic%. On the other hand, if the content ratio exceeds 15 atomic%, the compressive residual stress becomes too large and self-destruction is likely to occur. Further, if necessary, TiN may be formed on the wear-resistant coating layer.
The layer may be formed with an average layer thickness of 0.1 to 2 μm, because the TiN layer has a golden shade, which makes it easier to distinguish before and after use of the cutting tool. In this case, if the layer thickness is less than 0.1 μm, the application of the color tone is insufficient, while the application of the color tone is 2 μm.
Average layer thicknesses up to are sufficient.

【0011】[0011]

【発明の実施の形態】ついで、この発明の被覆超硬切削
工具を実施例により具体的に説明する。原料粉末とし
て、いずれも1〜3μmの平均粒径を有するWC粉末、
TiC粉末、ZrC粉末、VC粉末、TaC粉末、Nb
C粉末、Cr3 2 粉末、TiN粉末、TaN粉末、
およびCo粉末を用意し、これら原料粉末を、表1に示
される配合組成に配合し、ボールミルで72時間湿式混
合し、乾燥した後、1.5×108Paの圧力で圧粉体
にプレス成形し、この圧粉体を真空中、温度:1400
℃に1時間保持の条件で焼結し、焼結後、切刃部分に
R:0.05のホーニング加工を施してISO規格・S
PGA120408のチップ形状をもったWC基超硬合
金製の超硬工具基体A1〜A8を形成した。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the coated carbide cutting tool of the present invention will be specifically described with reference to examples. WC powder having an average particle diameter of 1 to 3 μm,
TiC powder, ZrC powder, VC powder, TaC powder, Nb
C powder, Cr 3 C 2 powder, TiN powder, TaN powder,
And Co powder were prepared, and these raw material powders were blended in the composition shown in Table 1, wet-mixed in a ball mill for 72 hours, dried, and pressed into a green compact at a pressure of 1.5 × 10 8 Pa. The green compact is molded in a vacuum at a temperature of 1400.
Sintering under the condition of holding at 1 ° C. for 1 hour.
Carbide tool bases A1 to A8 made of a WC-based cemented carbide having a chip shape of PGA120408 were formed.

【0012】また、原料粉末として、いずれも0.5〜
2μmの平均粒径を有するTiCN(質量比でTiC/
TiN=50/50)粉末、Mo2 C粉末、ZrC粉
末、NbC粉末、TaC粉末、WC粉末、Co粉末、お
よびNi粉末を用意し、これら原料粉末を、表2に示さ
れる配合組成に配合し、ボールミルで24時間湿式混合
し、乾燥した後、9.8×107Paの圧力で圧粉体に
プレス成形し、この圧粉体を1.3×103Paの窒素
雰囲気中、温度:1540℃に1時間保持の条件で焼結
し、焼結後、切刃部分にR:0.03のホーニング加工
を施してISO規格・CNMG120406のチップ形
状をもったTiCN基サーメット製の超硬工具基体B1
〜B6を形成した。
In addition, as raw material powders,
TiCN having an average particle size of 2 μm (TiC /
(TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, Co powder, and Ni powder were prepared, and these raw material powders were blended into the composition shown in Table 2. After wet-mixing with a ball mill for 24 hours and drying, the mixture is pressed into a green compact at a pressure of 9.8 × 10 7 Pa, and the green compact is pressed in a nitrogen atmosphere of 1.3 × 10 3 Pa at a temperature of: Sintered at 1540 ° C for 1 hour, and after sintering, the cutting edge is subjected to honing of R: 0.03, and a carbide tool made of TiCN-based cermet having a tip shape of ISO standard CNMG120406. Base B1
To B6.

【0013】ついで、これら超硬工具基体A1〜A8お
よびB1〜B6を、アセトン中で超音波洗浄し、乾燥し
た状態で、それぞれ図1に示されるアークイオンプレー
ティング装置に装入し、一方カソード電極(蒸発源)と
して、密着性下地被覆層形成にはTiを、また強靭性被
覆層形成には種々の成分組成をもったTi−Al合金を
それぞれ装着し、装置内を排気して1.3×10-3Pa
の真空に保持しながら、ヒーターで装置内を500℃に
加熱した後、Arガスを装置内に導入して2.5Paの
Ar雰囲気とし、この状態で超硬工具基体に−800v
のパルスバイアス電圧を印加して超硬工具基体表面をA
rガスボンバート洗浄し、ついで装置内に反応ガスとし
てメタンガスおよび/または窒素ガスを導入しての2.
5Paの反応雰囲気とすると共に、前記超硬工具基体に
印加するパルスバイアス電圧を−200vに下げて、前
記カソード電極とアノード電極との間にアーク放電を発
生させ、もって前記超硬工具基体A1〜A8およびB1
〜B6のそれぞれの表面に、表3、4に示される目標組
成および目標層厚の密着性下地被覆層および強靭性被覆
層を形成することにより従来被覆超硬工具基体1〜22
をそれぞれ製造した。
[0013] Then, the carbide tool bases A1 to A8 and B1 to B6 are ultrasonically cleaned in acetone and dried, and each is charged into the arc ion plating apparatus shown in FIG. As an electrode (evaporation source), Ti is used for forming an adhesive undercoat layer, and Ti-Al alloys having various component compositions are used for forming a tough coating layer. 3 × 10 -3 Pa
While maintaining the vacuum, the inside of the apparatus was heated to 500 ° C. by a heater, and then an Ar gas was introduced into the apparatus to obtain an Ar atmosphere of 2.5 Pa.
A pulse bias voltage of
r gas bombarding cleaning, and then introducing methane gas and / or nitrogen gas as a reaction gas into the apparatus.
With a reaction atmosphere of 5 Pa, the pulse bias voltage applied to the cemented carbide tool base was reduced to -200 V to generate an arc discharge between the cathode electrode and the anode electrode. A8 and B1
To B6, the conventional coated cemented carbide tool bases 1 to 22 were formed by forming an adhesive base coating layer and a tough coating layer having the target compositions and target layer thicknesses shown in Tables 3 and 4 on each surface.
Was manufactured respectively.

【0014】ついで、これら従来被覆超硬切削工具1〜
22のそれぞれの表面に、同じく図1のアークイオンプ
レーティング装置にて、カソード電極(蒸発源)とし
て、Ti、Zr、およびHfのうちの1種または2種以
上を所定量含有したAl−(Ti,Zr,Hf)合金を
装着し、装置内を排気して1.3×10-3Paの真空に
保持しながら、ヒーターで装置内を620〜720℃の
範囲内の所定の温度に加熱した状態で、超硬基体に印加
するパルスバイアス電圧を−700Vとし、ついで装置
内に反応ガスとして酸素ガスを導入しながら、前記カソ
ード電極とアノード電極との間にアーク放電を発生さ
せ、もって表5、6に示される目標組成および目標層厚
のAl2 3 主体層からなる耐摩耗性被覆層を形成する
ことにより本発明被覆超硬切削工具1〜22をそれぞれ
製造した。上記本発明被覆超硬切削工具1〜22の耐摩
耗性被覆層を構成するAl2 3主体層におけるTi、
Zr、およびHfの含有量を、エネルギー分散型X線測
定装置を用いて定量分析したところ、表5、6の目標含
有量と実質的に同じ含有量を示し、また前記Al2 3
主体層の圧縮残留応力をX線応力測定法を用いて測定し
たところ、同じく表5、6に示される結果を示した。さ
らに各種被覆層の組成および層厚についてもオージェ分
光分析法および光学顕微鏡にて測定したところ、表3〜
6の目標組成および目標層厚と実質的に同じ組成および
平均層厚(任意5ヶ所の平均値)を示した。
Next, the conventional coated carbide cutting tools 1 to 1
On the surface of each of the electrodes 22, Al— () containing a predetermined amount of one or more of Ti, Zr, and Hf as a cathode electrode (evaporation source) by the arc ion plating apparatus of FIG. While mounting the Ti, Zr, Hf) alloy and evacuating the inside of the apparatus to maintain a vacuum of 1.3 × 10 −3 Pa, the inside of the apparatus is heated to a predetermined temperature within a range of 620 to 720 ° C. by a heater. In this state, the pulse bias voltage applied to the carbide substrate was set to -700 V, and then an arc discharge was generated between the cathode electrode and the anode electrode while introducing oxygen gas as a reaction gas into the apparatus. the present invention coated cemented carbide cutting tools 1 to 22 were prepared respectively by forming a wear-resistant coating layer consisting of a target composition and Al 2 O 3 main layers of the target layer thicknesses shown in 5,6. Ti in the Al 2 O 3 main layer constituting the wear-resistant coating layer of the coated carbide cutting tools 1-2 of the present invention,
When the contents of Zr and Hf were quantitatively analyzed using an energy dispersive X-ray measuring apparatus, the contents were substantially the same as the target contents in Tables 5 and 6, and the Al 2 O 3
When the compressive residual stress of the main layer was measured using the X-ray stress measurement method, the results shown in Tables 5 and 6 were also shown. Furthermore, the composition and layer thickness of the various coating layers were measured by Auger spectroscopy and an optical microscope.
The target composition and the target layer thickness of No. 6 were substantially the same as the target composition and the target layer thickness (average values at five arbitrary locations).

【0015】ついで、この結果得られた各種の被覆超硬
切削工具のうち、本発明被覆超硬切削工具1〜16およ
び従来被覆超硬切削工具1〜16について、 被削材:JIS・S45Cの長さ方向等間隔4本縦溝入
り丸棒、 切削速度:320m/min.、 送り:0.3mm/rev.、 切込み:3.2mm、 切削時間:10分、 の条件での炭素鋼の乾式断続高切込み切削試験、およ
び、被削材:JIS・SNCM440の長さ方向等間隔
4本縦溝入り丸棒、 切削速度:280m/min.、 送り:0.45mm/rev.、 切込み:1.5mm、 切削時間:10分、 の条件での合金鋼の乾式断続高送り切削試験を行ない、
また本発明被覆超硬切削工具17〜22および従来被覆
超硬切削工具17〜22については、 被削材:JIS・SUS304の長さ方向等間隔4本縦
溝入り丸棒、 切削速度:280m/min.、 送り:0.3mm/rev.、 切込み:3.2mm、 切削時間:10分、 の条件でのステンレス鋼の乾式断続高切込み送り切削試
験、および、被削材:JIS・SNCM439の長さ方
向等間隔4本縦溝入り丸棒、 切削速度:320m/min.、 送り:0.45mm/rev.、 切込み:1.5mm、 切削時間:10分、 の条件での合金鋼の乾式断続高送り切削試験を行ない、
いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。
この測定結果を表7に示した。
Next, among the coated carbide cutting tools obtained as a result, the coated carbide cutting tools 1 to 16 of the present invention and the conventional coated carbide cutting tools 1 to 16 are described below. Work material: JIS S45C Round bar with four longitudinal grooves at equal intervals in the length direction, Cutting speed: 320 m / min., Feed: 0.3 mm / rev., Depth of cut: 3.2 mm, Cutting time: 10 minutes, dry type of carbon steel Intermittent high-incision cutting test and work material: JIS SNCM440 lengthwise equally spaced round bar with four longitudinal grooves, cutting speed: 280 m / min., Feed: 0.45 mm / rev., Depth of cut: 1. 5mm, cutting time: 10 minutes, dry intermittent high feed cutting test of alloy steel under the following conditions:
For the coated carbide cutting tools 17 to 22 of the present invention and the conventionally coated carbide cutting tools 17 to 22, a work material: JIS SUS304, a longitudinally spaced round bar having four longitudinal grooves, a cutting speed of 280 m / min., feed: 0.3 mm / rev., depth of cut: 3.2 mm, cutting time: 10 minutes, dry intermittent high depth of cut feed cutting test of stainless steel, and work material: length of JIS SNCM439 Round bar with 4 vertical grooves at equal intervals in the length direction, Cutting speed: 320 m / min., Feed: 0.45 mm / rev., Depth of cut: 1.5 mm, Cutting time: 10 min. Perform high-feed cutting test,
In each cutting test, the flank wear width of the cutting edge was measured.
Table 7 shows the measurement results.

【0016】[0016]

【表1】 [Table 1]

【0017】[0017]

【表2】 [Table 2]

【0018】[0018]

【表3】 [Table 3]

【0019】[0019]

【表4】 [Table 4]

【0020】[0020]

【表5】 [Table 5]

【0021】[0021]

【表6】 [Table 6]

【0022】[0022]

【表7】 [Table 7]

【0023】[0023]

【発明の効果】表3〜7に示される結果から、本発明被
覆超硬切削工具1〜22は、いずれも耐摩耗性被覆層を
構成するAl2 3 主体層がAlに比してイオン半径の
著しく大きいTi、Zr、およびHfのうちの1種以上
を置換含有し、これによって著しく高い圧縮残留応力を
保持するようになって、強靭性被覆層を構成する(T
i,Al)N層および(Ti,Al)CN層に対して強
固に密着するようになるので、鋼の断続切削を高切込み
および高送りの重切削条件で行っても前記Al2 3
体層に剥離の発生なく、すぐれた耐摩耗性を発揮するの
に対して、従来被覆超硬切削工具1〜22は、いずれも
これの強靭性被覆層の耐摩耗性不足が原因で、上記のよ
うな苛酷な条件下では摩耗進行が速いことが明らかであ
る。上述のように、この発明の被覆超硬切削工具は、耐
摩耗性被覆層を構成するAl2 3 主体層のもつすぐれ
た耐摩耗性および密着性によって、通常の条件での各種
鋼の連続切削および断続切削は勿論のこと、きわめて苛
酷な切削条件である断続切削を高切り込みおよび高送り
の重切削条件で行っても前記Al2 3 主体層に剥離の
発生なく、かつ切刃に欠けやチッピングの発生もなく、
すぐれた耐摩耗性を示し、長期に亘ってすぐれた切削性
能を発揮するものであり、切削加工の省エネ化および省
力化に十分満足に対応できるものである。
According to the results shown in Tables 3 to 7, it can be seen that the present invention
The coated carbide cutting tools 1-22 each have a wear-resistant coating layer.
Constituting AlTwoOThreeThe main layer has an ion radius smaller than that of Al.
One or more of significantly larger Ti, Zr, and Hf
Which results in significantly higher compressive residual stress
To form a tough coating layer (T
Strong against (i, Al) N layer and (Ti, Al) CN layer
High-depth intermittent cutting of steel as it comes into firm contact
And Al even under heavy cutting conditions of high feedTwoO Threemain
Demonstrates excellent wear resistance without delamination of the body layer
On the other hand, the conventional coated carbide cutting tools 1 to 22
Due to the lack of wear resistance of the tough coating layer,
It is clear that the wear progresses rapidly under severe conditions such as
You. As described above, the coated carbide cutting tool of the present invention has a
Al constituting the wearable coating layerTwoOThreeTangle of main subject
Various conditions under normal conditions due to
Not only continuous and interrupted cutting of steel, but also extremely
High depth of cut and high feed for interrupted cutting which is severe cutting conditions
Even under heavy cutting conditionsTwoOThreeOf the main layer
No occurrence, no chipping or chipping of the cutting edge,
Excellent wear resistance and excellent long-term machinability
It is effective for energy saving and saving of cutting process.
It can respond satisfactorily to empowerment.

【図面の簡単な説明】[Brief description of the drawings]

【図1】アークイオンプレーティング装置の概略説明図
である。
FIG. 1 is a schematic explanatory view of an arc ion plating apparatus.

─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成12年4月10日(2000.4.1
0)
[Submission date] April 10, 2000 (2004.1.
0)

【手続補正1】[Procedure amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0010[Correction target item name] 0010

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0010】また、上記耐摩耗性被覆層におけるAlの
Ti、Zr、およびHfによる置換含有割合を0.01
〜10原子%としたのは、その含有割合が0.01原子
%未満では前記耐摩耗性被覆層に上記強靭性被覆層との
間に十分な密着性を確保することのできる圧縮残留応力
を形成することができず、一方その含有割合が10原子
%を越えると圧縮残留応力が大きくなりすぎて自己破壊
を起こし易くなるという理由にもとづくものである。さ
らに、上記耐摩耗性被覆層の上に、必要に応じてTiN
層を0.1〜2μmの平均層厚で形成してもよく、これ
はTiN層が黄金色の色調を有し、この色調によって切
削工具の使用前と使用後の識別が容易になるという理由
からで、この場合その層厚が0.1μm未満では前記色
調の付与が不十分であり、一方前記色調の付与は2μm
までの平均層厚で十分である。
[0010] Further, the replacement ratio of Al by Ti, Zr and Hf in the wear-resistant coating layer is set to 0.01.
When the content ratio is less than 0.01 atomic%, the compressive residual stress that can secure sufficient adhesion between the wear-resistant coating layer and the tough coating layer when the content is less than 0.01 atomic%. On the other hand, if the content exceeds 10 atomic%, the compressive residual stress becomes too large and self-destruction is likely to occur. Further, if necessary, TiN may be formed on the wear-resistant coating layer.
The layer may be formed with an average layer thickness of 0.1 to 2 μm, because the TiN layer has a golden shade, which makes it easier to distinguish before and after use of the cutting tool. In this case, if the layer thickness is less than 0.1 μm, the application of the color tone is insufficient, while the application of the color tone is 2 μm.
Average layer thicknesses up to are sufficient.

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 3C046 FF03 FF05 FF10 FF13 FF16 FF17 FF19 FF25 4K029 AA04 BA44 BA54 BA55 BA58 BA60 BB02 BC02 BD05 EA01 4K044 AA09 AB10 BA13 BA18 BB04 BC01 CA13  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3C046 FF03 FF05 FF10 FF13 FF16 FF17 FF19 FF25 4K029 AA04 BA44 BA54 BA55 BA58 BA60 BB02 BC02 BD05 EA01 4K044 AA09 AB10 BA13 BA18 BB04 BC01 CA13

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 炭化タングステン基超硬合金または炭窒
化チタン基サーメットで構成された工具基体の表面に、
0.1〜10μmの平均層厚を有するTiの炭化物層、
窒化物層、および炭窒化物層のうちの1種の単層または
2種の複層からなる密着性下地被覆層を介して、0.5
〜15μmの平均層厚を有するTiとAlの複合窒化物
層および複合炭窒化物層のうちの1種の単層または2種
の複層からなる強靭性被覆層を物理蒸着してなる表面被
覆超硬合金製切削工具において、 上記強靭性被覆層の表面に、さらに耐摩耗性被覆層とし
て、 酸化アルミニウムのもつ結晶構造を保持したままで、A
lの一部をAlとの合量に占める割合で0.01〜10
原子%のTi、Zr、およびHfのうちの1種または2
種以上で置換固溶してなる酸化アルミニウム主体層を
0.5〜15μmの平均層厚で物理蒸着したことを特徴
とする耐摩耗性のすぐれた表面被覆超硬合金製切削工
具。
1. A tool base comprising a tungsten carbide based cemented carbide or a titanium carbonitride based cermet,
A carbide layer of Ti having an average layer thickness of 0.1-10 μm,
0.5 through an adhesive undercoating layer consisting of a single layer or two or more layers of a nitride layer and a carbonitride layer.
Surface coating formed by physical vapor deposition of a tough coating layer comprising a single layer or a double layer of one of a composite nitride layer and a composite carbonitride layer of Ti and Al having an average layer thickness of 1515 μm. In a cemented carbide cutting tool, the surface of the tough coating layer is further treated as a wear-resistant coating layer while maintaining the crystal structure of aluminum oxide.
1 to 0.01 to 10 in a proportion of the total amount with Al
One or more of atomic% of Ti, Zr and Hf
A hard-wearing surface-coated cemented carbide cutting tool having excellent wear resistance, characterized in that an aluminum oxide-based layer formed by substitutional solid solution of at least one kind is physically deposited with an average layer thickness of 0.5 to 15 μm.
JP2000030084A 2000-02-08 2000-02-08 Cutting tool made of surface-coated cemented carbide with excellent wear resistance Expired - Lifetime JP3985411B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000030084A JP3985411B2 (en) 2000-02-08 2000-02-08 Cutting tool made of surface-coated cemented carbide with excellent wear resistance

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Application Number Priority Date Filing Date Title
JP2000030084A JP3985411B2 (en) 2000-02-08 2000-02-08 Cutting tool made of surface-coated cemented carbide with excellent wear resistance

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Publication Number Publication Date
JP2001219304A true JP2001219304A (en) 2001-08-14
JP3985411B2 JP3985411B2 (en) 2007-10-03

Family

ID=18555145

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Country Status (1)

Country Link
JP (1) JP3985411B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014231116A (en) * 2013-05-29 2014-12-11 京セラ株式会社 Surface coating member

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014231116A (en) * 2013-05-29 2014-12-11 京セラ株式会社 Surface coating member

Also Published As

Publication number Publication date
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