JP2001219281A - Method ad apparatus for manufacturing vacuum forming body - Google Patents

Method ad apparatus for manufacturing vacuum forming body

Info

Publication number
JP2001219281A
JP2001219281A JP2000029378A JP2000029378A JP2001219281A JP 2001219281 A JP2001219281 A JP 2001219281A JP 2000029378 A JP2000029378 A JP 2000029378A JP 2000029378 A JP2000029378 A JP 2000029378A JP 2001219281 A JP2001219281 A JP 2001219281A
Authority
JP
Japan
Prior art keywords
sealing
vacuum
joining
joined
friction stir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000029378A
Other languages
Japanese (ja)
Inventor
Shigetomo Matsui
繁朋 松井
Kenichi Sonoda
憲一 園田
Keiji Sakamoto
慶二 阪本
Hiroshi Yomo
宏 四方
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Industry Research Organization NIRO
Original Assignee
New Industry Research Organization NIRO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New Industry Research Organization NIRO filed Critical New Industry Research Organization NIRO
Priority to JP2000029378A priority Critical patent/JP2001219281A/en
Publication of JP2001219281A publication Critical patent/JP2001219281A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/12Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding
    • B23K20/122Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding using a non-consumable tool, e.g. friction stir welding
    • B23K20/1265Non-butt welded joints, e.g. overlap-joints, T-joints or spot welds

Abstract

PROBLEM TO BE SOLVED: To solve the problem in which a vacuum forming body used for a heat insulation material, etc., is joined at a periphery of materials to be joined by leaving a discharge port by inert gas arc welding, etc., is produced by sealing the discharge port while evacuating the gas in a formed gas tight part, a heat strain is likely generated, a large scale support apparatus is required to eliminate heat strain effect in the case of manufacturing a vacuum forming body of various shapes by assembling materials to be joined of a plate shape, etc., an equipment cost is increased, a clearance is generated to an overlapped part, gas is likely left therein, thus, high vacuum is hardly obtained. SOLUTION: In a manufacturing method comprising joining process, in which materials 11, 12 to be joined of a prescribed shape are assembled/joined to form an air tightness part 3, and a sealing process by joining/sealing a sealing part 21 while evacuating the air tightness part 3, a friction agitation joining process is used for the joining process and the sealing process.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、所定形状の被接合
材を組み合わせて接合して内部を真空にした真空形成体
の製造方法や装置に関し、特に、冷蔵庫の断熱底板、保
温ボックスの断熱壁など、扁平状、楕円状など様々な大
きさ・形状からなる真空形成体を製造する技術に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a vacuum formed body having a vacuum formed by combining and joining materials having a predetermined shape, and more particularly to a heat insulating bottom plate of a refrigerator and a heat insulating wall of a heat insulating box. The present invention relates to a technique for manufacturing a vacuum formed body having various sizes and shapes such as a flat shape and an elliptical shape.

【0002】[0002]

【従来の技術】従来より、断熱部材等に用いられる真空
形成体を製造するには、まず、接合工程において、所定
形状の被接合材の周縁を、後で閉塞する排気口(以下
「封止部」とする)を残して、全てイナートガスアーク
溶接などによって接合して内部に気密部を設け、次の封
止工程において、該気密部を真空にしつつ封止部を接合
して密閉する。そして、該封止工程には、大気中におい
て該気密部をポンプなどで真空引きしながら、封止部を
圧着などで封止する大気中封止方法と、気密部を設けた
真空形成体を真空室内に置き、真空室内を真空引きする
と共に気密部内も真空にした後、該真空室内において封
止部をろう付け等で封止する真空中封止方法がある。
2. Description of the Related Art Conventionally, in order to manufacture a vacuum formed body used for a heat insulating member or the like, first, in a joining step, an exhaust port (hereinafter referred to as "sealing") for closing a peripheral edge of a material to be joined having a predetermined shape later. ), All are joined by inert gas arc welding or the like to form an airtight portion inside, and in the next sealing step, the sealed portion is joined and hermetically sealed while the airtight portion is evacuated. In the sealing step, an air-sealing method of sealing the sealing portion by pressure bonding or the like while evacuating the air-tight portion with a pump or the like in the air, and a vacuum forming body provided with the air-tight portion are provided. There is a vacuum sealing method in which a vacuum chamber is placed in a vacuum chamber, the vacuum chamber is evacuated, and the airtight section is evacuated, and then the sealing section is sealed in the vacuum chamber by brazing or the like.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、このよ
うな従来の接合工程や封止工程のいずれにおいても、以
下のような問題があった。すなわち、被接合材の周縁を
接合する際にイナートガスアーク溶接を用いるため、入
熱が大きく熱ひずみが発生しやすいことから、従来の真
空形成体は、気密性確保の点から変形しにくい筒状のも
のが多く、板状等の被接合材を組み合わせて様々な形状
の真空形成体を製造するには、この熱ひずみを押さえて
被接合材同士を密着させねばならず、大がかりな支持装
置が必要であり、設備費も高くなる、という問題があっ
た。
However, there are the following problems in any of the conventional joining steps and sealing steps as described above. In other words, since inert gas arc welding is used when joining the edges of the materials to be joined, the heat input is large and thermal strain is likely to occur, so the conventional vacuum formed body has a cylindrical shape that is difficult to deform from the viewpoint of airtightness. In order to manufacture vacuum-formed bodies of various shapes by combining plate-like materials to be joined, it is necessary to suppress this thermal strain and make the materials to be joined closely together. There is a problem that it is necessary and the equipment cost is high.

【0004】そして、たとえ被接合材同士を強く密着で
きても、図11に示すように、板状等の被接合材1a・
1b間を接合するには、重ね部4の端面沿いに外側から
溶接するしかなく、該重ね部4に隙間5が生じてそこに
ガスが残留するため、真空形成体7での高真空が得にく
くなり、また、接合部2の接合幅6も狭いため、接合部
2における接合強度や気密性が十分に確保できない、と
いう問題があった。さらに、イナートガスアーク溶接で
は補助溶接材料を用いるため、接合部の気密性向上に影
響の大きな母材の溶け込み深さが十分にとれず、気密漏
れが生じやすい、という問題があった。
[0004] Even if the materials to be joined can be strongly adhered to each other, as shown in FIG.
1b can be joined only by welding from the outside along the end face of the overlapped portion 4. Since a gap 5 is formed in the overlapped portion 4 and gas remains there, a high vacuum in the vacuum forming body 7 is obtained. However, there is a problem that the bonding strength and airtightness of the bonding portion 2 cannot be sufficiently secured because the bonding width 6 of the bonding portion 2 is small. Furthermore, since inert gas arc welding uses an auxiliary welding material, there is a problem in that the penetration depth of the base material, which greatly affects the airtightness of the joint, cannot be sufficiently obtained, and airtight leakage is likely to occur.

【0005】また、前記大気中封止方法での封止部は、
一般に、一端を気密部に内挿し、他端を外部に突出させ
た純銅からなるパイプ等から構成され、該パイプを、真
空引きしながら加圧圧着させることで真空封止するよう
にしているが、真空形成体からパイプが突設された形態
であるために破損しやすく、そして、気密部が薄い場合
には、このようなパイプの取り付け自体が難しく、さら
に、パイプからの気密漏れが生じた場合には、パイプを
取り替える必要があり再封止に手間がかかる、という問
題があった。
[0005] Further, the sealing portion in the above-mentioned sealing method in the atmosphere is:
Generally, it is constituted by a pipe made of pure copper having one end inserted into an airtight part and the other end protruding outside, and the pipe is vacuum-sealed by applying pressure and pressure while evacuating. However, since the pipe is protruded from the vacuum forming body, it is easily broken, and when the hermetic part is thin, it is difficult to attach such a pipe itself, and further, the hermetic leakage from the pipe occurred. In such a case, there is a problem that it is necessary to replace the pipe and it takes time to reseal.

【0006】また、前記真空中封止方法での封止部につ
いては、一般に、ろう付けが行われている。そのうち、
軟ろうではフラックスを用いるため、加熱時にガスが発
生して高真空が得にくく、また、硬ろうでは高温に加熱
する必要から熱ひずみが発生しやすい、という問題があ
った。
[0006] In addition, brazing is generally performed on the sealing portion by the above-mentioned vacuum sealing method. Of which
In the case of a soft solder, since a flux is used, a gas is generated at the time of heating, so that it is difficult to obtain a high vacuum, and in the case of a hard solder, there is a problem that heat distortion is liable to occur due to the need to heat to a high temperature.

【0007】[0007]

【課題を解決するための手段】本発明の解決しようとす
る課題は以上の如くであり、次にこの課題を解決するた
めの手段を説明する。すなわち、請求項1においては、
所定形状の被接合材を組み合わせて接合し内部に気密部
を設ける接合工程と、該気密部を真空にしつつ封止部を
接合して密閉する封止工程とからなる真空形成体の製造
方法において、前記接合工程と封止工程に摩擦攪拌接合
法を用いるものである。
The problems to be solved by the present invention are as described above. Next, means for solving the problems will be described. That is, in claim 1,
A method for manufacturing a vacuum formed body, comprising: a joining step of combining and joining materials to be joined in a predetermined shape to form an airtight portion therein; and a sealing step of joining and sealing a sealing portion while vacuuming the airtight portion. A friction stir welding method is used in the joining step and the sealing step.

【0008】請求項2においては、請求項1記載の接合
工程に摩擦攪拌接合法を用いるに際し、接合線の始端と
終端とを、前記気密部を形成する接合線上から離間した
位置に設けるものである。
According to a second aspect of the present invention, when the friction stir welding method is used in the joining step according to the first aspect, the starting end and the end of the joining line are provided at positions separated from the joining line forming the hermetic portion. is there.

【0009】請求項3においては、請求項1記載の接合
工程に摩擦攪拌接合法を用いるに際し、封止部を被接合
材内に設けるものである。
According to a third aspect of the present invention, when the friction stir welding method is used in the joining step of the first aspect, the sealing portion is provided in the material to be joined.

【0010】請求項4においては、請求項3記載の封止
部は、摩擦攪拌接合により複数回の封止が可能な構成と
するものである。
According to a fourth aspect of the present invention, the sealing portion according to the third aspect is configured such that sealing can be performed a plurality of times by friction stir welding.

【0011】請求項5においては、請求項1記載の封止
工程において、気密部をポンプにより真空引きした後、
該ポンプと気密部とを連通して連結する連結パイプを、
摩擦攪拌接合法により封止するものである。
According to a fifth aspect of the present invention, in the sealing step of the first aspect, after the airtight portion is evacuated by a pump,
A connecting pipe for connecting and connecting the pump and the airtight portion,
It is sealed by a friction stir welding method.

【0012】請求項6においては、請求項1記載の封止
工程において、気密部を設けた真空形成体を真空室内に
配置した後に、気密部を真空にして封止部を封じる際、
該真空室の外部から内部に向かって気密保持可能にツー
ルを挿入し、該ツールにより前記封止部を摩擦攪拌接合
法で封止するものである。
In a sixth aspect of the present invention, in the sealing step of the first aspect, after the vacuum forming body provided with the hermetic portion is placed in a vacuum chamber, the hermetic portion is evacuated to seal the hermetically sealed portion.
A tool is inserted from the outside of the vacuum chamber to the inside so as to be able to maintain airtightness, and the tool is used to seal the sealing portion by a friction stir welding method.

【0013】請求項7においては、所定形状の被接合材
を組み合わせて接合し内部に気密部を設けた後、該気密
部を真空にしつつ封止部を接合して密閉する真空形成体
の製造装置において、真空形成体を内部に配置可能な真
空室と、該真空室の外部から内部に向かって気密保持可
能に挿入されるツールを有する摩擦攪拌接合装置と、真
空室内の真空形成体を所定速度で移動可能な送り装置と
から構成される真空中封止装置を有するものである。
According to a seventh aspect of the present invention, there is provided a method for manufacturing a vacuum-formed body in which a material to be joined having a predetermined shape is combined and joined to form an airtight portion inside, and then the sealing portion is joined and hermetically sealed while the airtight portion is evacuated. In the apparatus, a vacuum chamber capable of disposing a vacuum forming body therein, a friction stir welding apparatus having a tool inserted in an airtight manner from the outside to the inside of the vacuum chamber, and a vacuum forming body in the vacuum chamber are fixed. And a feeding device that can move at a high speed.

【0014】[0014]

【発明の実施の形態】以下、本発明の実施例を図面に基
づいて説明する。図1は周縁の接合を摩擦攪拌接合法に
より行う本発明に係わる真空形成体の斜視図、図2は同
じく断面図、図3は突出部を設けた被接合材側に裏当て
を当てた場合の真空形成体の断面図、図4は接合線を示
す真空形成体の平面図、図5は気密部の接合線を示す真
空形成体の平面図、図6は封止するための接合線を示す
真空形成体の平面図、図7は大気中封止を摩擦攪拌接合
法により行う封止部の斜視図、図8は真空中封止を摩擦
攪拌接合法により行う真空中封止装置の側面断面図、図
9は重ね部の上下面をダミー部材で挟持する真空形成体
の斜視図、図10は被接合材に突出部を設けない真空形
成体の斜視図、図11は従来のイナートガスアーク溶接
法による真空形成体の断面図である。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view of a vacuum forming body according to the present invention in which the peripheral edges are joined by a friction stir welding method, FIG. 2 is a cross-sectional view of the same, and FIG. FIG. 4 is a plan view of the vacuum forming body showing a joining line, FIG. 5 is a plan view of the vacuum forming body showing a joining line of an airtight portion, and FIG. 6 is a joining line for sealing. FIG. 7 is a plan view of a vacuum forming body shown in FIG. 7, FIG. 7 is a perspective view of a sealing portion performing sealing in the atmosphere by friction stir welding, and FIG. 8 is a side view of a vacuum sealing device performing sealing in vacuum by friction stir welding. FIG. 9 is a perspective view of a vacuum forming body in which the upper and lower surfaces of an overlapped portion are sandwiched by dummy members, FIG. 10 is a perspective view of a vacuum forming body having no projecting portion on a workpiece, and FIG. 11 is a conventional inert gas arc. It is sectional drawing of the vacuum formed body by a welding method.

【0015】まず、本発明に係わる真空形成体の製造方
法の全体構成について、図1、図2、図5により説明す
る。本発明に係わる真空形成体の製造方法は、所定形状
の被接合材を組み合わせて接合し内部に気密部を設ける
接合工程と、該気密部を真空にしつつ封止部を接合して
密閉する封止工程とからなる。
First, the overall structure of the method for manufacturing a vacuum formed body according to the present invention will be described with reference to FIGS. The method for manufacturing a vacuum-formed body according to the present invention includes a joining step of combining and joining materials to be joined in a predetermined shape to form an airtight portion inside, and a sealing step of joining and hermetically sealing a sealing portion while evacuating the airtight portion. And a stopping step.

【0016】このうち、接合工程においては、図1に示
すように、プレス加工などで突出部11aを設けた被接
合材11を、平板状の被接合材12上に、突出部11a
を上向きにして重ね、この重ね部4の裏面に裏当て8を
当接させ、その上に、工具鋼などからできた高速回転す
るツール9を、押圧・進入させながら移動させる。
In the joining step, as shown in FIG. 1, the workpiece 11 provided with the protruding portion 11a by press working or the like is placed on the flat plate-shaped material 12 to be protruded.
Are placed on top of each other, a backing 8 is brought into contact with the back surface of the overlapping portion 4, and a high-speed rotating tool 9 made of tool steel or the like is moved while being pressed / entered thereon.

【0017】次の封止工程においては、図2に示すよう
に、前記接合工程により突出部11aと被接合材12と
の間の空間に空けた気密部3を、大気中でのポンプによ
る排気や、真空形成体を置いた真空室内の排気により真
空にしつつ、図5に示すような、気密部3と外部とを連
通する封止部21を閉塞し、真空形成体7を完成するよ
うにしている。
In the next sealing step, as shown in FIG. 2, the hermetic part 3 formed in the space between the protruding part 11a and the material 12 to be joined in the joining step is evacuated by a pump in the atmosphere. Alternatively, while evacuating the interior of the vacuum chamber in which the vacuum forming body is placed, the sealing section 21 that connects the hermetic part 3 and the outside as shown in FIG. 5 is closed to complete the vacuum forming body 7. ing.

【0018】次に、このような全体構成からなる真空形
成体の製造方法において、接合工程で用いる接合法につ
いて、図2、図3、図9乃至図11により説明する。前
記接合工程で述べた高速回転するツール9を押圧・進入
しながら移動させる接合法は摩擦攪拌接合法といわれ、
本発明者らが真空形成体の製造法に適用可能な接合法に
ついて鋭意検討した結果、この摩擦攪拌接合法を適正に
用いることで、前述した種々の課題を解決できることを
見出した。
Next, the joining method used in the joining step in the method of manufacturing a vacuum formed body having such an overall configuration will be described with reference to FIGS. 2, 3, 9 to 11. The joining method of moving the tool 9 rotating at a high speed while pressing and entering as described in the joining step is called a friction stir welding method,
As a result of intensive studies on a joining method applicable to a method of manufacturing a vacuum formed body, the present inventors have found that the above-described various problems can be solved by appropriately using the friction stir welding method.

【0019】すなわち、図2に示すように、ツール9
は、被接合材よりも高強度の素材、例えば工具鋼などを
材料にすると共に、円柱形状の本体9aと、該本体9a
の下面中央から同軸上に突設する摩擦ピン9bとから構
成される。該摩擦ピン9bの回転に伴い、摩擦ピン9b
近傍の重ね部4は摩擦熱により加熱され、この加熱軟化
された被接合材11・12は、前記ツール9の回転と送
りに合わせて金属が塑性変形しながら動き出す、いわゆ
る「塑性流動」という現象を示す。この塑性流動によっ
て水平および垂直方向に流動化された被接合材は、摩擦
ピン9bにより十分に攪拌・混合され、そして該摩擦ピ
ン9bが通過し冷却されると、被接合材同士が一体とな
り接合部10が形成され、被接合材11・12間が強固
に接合されるのである。
That is, as shown in FIG.
Is made of a material having a higher strength than the material to be joined, such as tool steel, and has a cylindrical main body 9a and a main body 9a.
And a friction pin 9b protruding coaxially from the center of the lower surface of the head. With the rotation of the friction pin 9b, the friction pin 9b
The overlapping portion 4 in the vicinity is heated by frictional heat, and the materials 11 and 12 that have been softened by heating are so-called “plastic flow”, in which the metal starts to move while undergoing plastic deformation in accordance with the rotation and feed of the tool 9. Is shown. The workpieces fluidized in the horizontal and vertical directions by the plastic flow are sufficiently stirred and mixed by the friction pins 9b, and when the friction pins 9b pass through and are cooled, the workpieces are integrally joined. The part 10 is formed, and the parts 11 and 12 to be joined are firmly joined.

【0020】従って、摩擦攪拌接合法では、イナートガ
スアーク溶接法の場合に比べて入熱が小さく、また、イ
ナートガスを使用しないので、たとえ接合中であっても
接合部を強制的に冷風などで空冷できるため、熱ひずみ
を抑制することができ、変形しにくい。加えて、重ね部
を加圧しながら接合するために、被接合材の形状や表面
性状が不良であっても、確実に密着させながら接合する
ことができ、板状等の被接合材を組み合わせて様々な形
状の真空形成体を製造するに際しても、大がかりな支持
装置などが不要であり、設備費も低減することができ
る。
Therefore, in the friction stir welding method, the heat input is smaller than in the case of the inert gas arc welding method, and the inert gas is not used. As a result, thermal distortion can be suppressed and deformation is difficult. In addition, since the overlapped portion is joined while pressing, even if the shape and surface properties of the material to be joined are poor, it is possible to join while firmly contacting, and to combine the material to be joined in a plate shape or the like. When manufacturing vacuum formed bodies of various shapes, a large-scale supporting device is not required, and equipment costs can be reduced.

【0021】また、摩擦攪拌接合法により形成される接
合部10の接合幅13は、図11に示すイナートガスア
ーク溶接法での接合幅6に比べて広いため、気密部3側
にはガスが残留する隙間が形成されにくく、高真空が得
やすい。さらには、この広幅の接合部10によって、接
合強度や気密性も大きく向上させることができるのであ
る。さらに、この接合部10は、前述した如く、塑性流
動化された被接合材11・12同士が攪拌・混合され、
その直後に冷却・凝固されて形成されるため、異相が生
じにくく、イナートガスアーク溶接の如く母材と異なる
補助溶接材料を使用する場合に比べて、気密性を高く保
持することができるのである。
The joining width 13 of the joining portion 10 formed by the friction stir welding method is wider than the joining width 6 of the inert gas arc welding method shown in FIG. Gaps are hardly formed, and a high vacuum is easily obtained. Further, the bonding strength and airtightness can be greatly improved by the wide bonding portion 10. Further, as described above, the joined parts 11 and 12 that have been plastically fluidized are stirred and mixed with each other,
Immediately thereafter, it is formed by cooling and solidifying, so that a different phase is unlikely to occur, and the airtightness can be maintained higher than in the case of using an auxiliary welding material different from the base material such as inert gas arc welding.

【0022】なお、図3に示すように、裏当て14上
に、反転した真空形成体7の重ね部4を係止可能な構造
とし、上板の被接合材12上からツール9を押圧・進入
させながら移動できるようにすることで、ツール9の移
動が突出部11aにより邪魔されることがないため、接
合部10を気密部3にできるだけ近接して形成させるこ
とができ、ガスが残留する気密部3側の被接合材11・
12間の隙間をほとんどなくせるので、所定の真空度ま
で迅速に真空引きすることができる。
As shown in FIG. 3, a structure in which the inverted portion 4 of the vacuum forming body 7 can be locked on the backing 14 and the tool 9 is pressed from above the material 12 to be joined on the upper plate. By allowing the tool 9 to move while entering, the movement of the tool 9 is not hindered by the protruding portion 11a, so that the joining portion 10 can be formed as close as possible to the airtight portion 3 and gas remains. Material 11 to be joined on the airtight part 3 side
Since there is almost no gap between the holes 12, the vacuum can be quickly evacuated to a predetermined degree of vacuum.

【0023】また、図9に示すように、重ね部4の上下
面がダミー部材51で挟持された構造とし、その上から
ツール9を押圧・進入させながら移動できるようにする
ことで、被接合材11・12の板厚が極端に薄い場合で
あっても、重ね部4で顕著な塑性流動に起因した溶け落
ちなどの現象が発生することなく、良好な接合部品質を
得ることができる。さらに、図10に示すように、上板
下板とも突出部のない板状の被接合材53・12とし、
該被接合材53・12の端部にはペーサー52を介設
し、その上からツール9を押圧・進入させながら移動で
きるようにすることで、プレス加工などで突出部を設け
た高価な被接合材を用いる必要がなく、部品コストの低
減を図ることができ、加えて、ツール9の移動が突出部
により邪魔されないため、接合部10を気密部3にでき
るだけ近接して形成させることができ、ガスの残留を抑
制し、所定の真空度まで迅速に真空引きすることができ
るのである。
As shown in FIG. 9, the upper and lower surfaces of the overlapping portion 4 are sandwiched by a dummy member 51 so that the tool 9 can be moved while pressing and entering from above. Even when the thickness of the members 11 and 12 is extremely thin, good joint quality can be obtained without occurrence of phenomena such as burn-through due to remarkable plastic flow in the overlapped portion 4. Further, as shown in FIG. 10, both upper and lower plates are plate-shaped materials 53 and 12 having no protruding portions,
Pacers 52 are provided at the ends of the workpieces 53 and 12 so that the tool 9 can be moved while being pressed / entered from above. Since there is no need to use a bonding material, the cost of parts can be reduced, and in addition, since the movement of the tool 9 is not hindered by the projecting portion, the bonding portion 10 can be formed as close as possible to the airtight portion 3. In addition, it is possible to suppress residual gas and quickly evacuate to a predetermined degree of vacuum.

【0024】次に、接合工程における接合線、及び封止
部の形成方法について、図4乃至図6により説明する。
図4に示すように、重ね部4上で被接合材11の突出部
11a側面沿いに前記ツール9を移動させて、始端15
・終端16の直線状の接合線17、18を形成し、続い
て、始端22から突出部11a側面沿いにツール9を移
動させた後、角部の屈折点24・24で向きを変え、被
接合材11の対角線方向に延出して終端23として接合
線19、20を形成する。これらの接合線17、18、
19、20により囲まれた部分、つまり、図5に示すよ
うな接合線25で囲まれた部分に、前記気密部3が形成
されると共に、該接合線25上には、前記始端15・2
2及び終端16・23が位置しないようにしている。す
なわち、始端と終端では、ツール9の加圧と回転力とが
不足して接合部10の成長が小さく、表面性状も悪く、
この接合部10内には内部欠陥も発生し易いため、接合
線の始端と終端とを、気密部3を形成する接合線25上
から離間した位置に設けることにより、接合の不十分な
部分を排除して、気密性の確保を図るようにしている。
Next, a method of forming a bonding line and a sealing portion in the bonding step will be described with reference to FIGS.
As shown in FIG. 4, the tool 9 is moved along the side surface of the projecting portion 11a of the workpiece 11 on
Forming straight joining lines 17 and 18 at the end 16 and moving the tool 9 along the side surface of the protruding portion 11a from the starting end 22; Extending in the diagonal direction of the joining material 11, joining lines 19 and 20 are formed as the terminal ends 23. These joining lines 17, 18,
The hermetic portion 3 is formed in a portion surrounded by 19 and 20, that is, a portion surrounded by a joining line 25 as shown in FIG.
2 and the terminal ends 16 and 23 are not positioned. That is, at the beginning and the end, the pressurization and rotational force of the tool 9 are insufficient, so that the growth of the joint 10 is small and the surface properties are poor.
Since internal defects are easily generated in the joint portion 10, the start and end of the joint line are provided at positions separated from the joint line 25 forming the airtight portion 3 so that an insufficient joint portion is formed. It is excluded to ensure airtightness.

【0025】また、図5に示すように、前述のようにし
て設けた気密部3の接合線25のうち、前記接合線1
9、20上の屈折点24・24と終端23・23とによ
り囲まれた部分には、外部と連通する隙間が形成されて
おり、この隙間を封止部21として、該封止部21を介
して、気密部3内を外部と連通させるようにしている。
すなわち、このようにして、封止部21を被接合材11
・12内に設けることにより、封止部21が真空形成体
7から外部に突出することがないため、気密部3から突
設させた従来のパイプ等とは異なり、破損しにくく、ま
た破損防止のために複雑な構造を設ける必要がない。ま
た、気密部3が薄い場合であっても封止部21は容易に
形成することができる。
As shown in FIG. 5, of the joining lines 25 of the hermetic part 3 provided as described above,
A gap that communicates with the outside is formed in a portion surrounded by the refraction points 24 and 24 and the ends 23 and 23 on 9 and 20, and this gap is used as the sealing section 21. The inside of the airtight portion 3 is communicated with the outside through the airtight portion.
That is, in this way, the sealing portion 21 is
Since the sealing portion 21 does not protrude outside from the vacuum forming body 7 by being provided in the inside 12, unlike a conventional pipe or the like protruding from the airtight portion 3, it is hard to break and prevents breakage. Therefore, there is no need to provide a complicated structure. Further, even when the airtight portion 3 is thin, the sealing portion 21 can be easily formed.

【0026】さらに、封止部21の長さに相当する前記
屈折点24・24と前記終端23・23との間隔を十分
に確保しており、封止のために複数回の摩擦攪拌接合が
行えるようにしている。すなわち、従来のイナートガス
アーク溶接においては、気密漏れが発見された場合は、
既溶接部を一度除去して溶接しようとしても、溶接中の
スパッターや熱ひずみなどのために既溶接部近傍は性状
が非常に悪く、ほとんど再溶接はできないが、摩擦攪拌
接合を用いることにより、既接合部近傍の性状が良好と
なり、該既接合部の近接位置に再接合を施すことができ
るため、封止のための複数回の接合を容易に行うことが
できるのである。
Further, a sufficient interval between the bending points 24, 24 corresponding to the length of the sealing portion 21 and the terminal ends 23, 23 is ensured. I can do it. That is, in the conventional inert gas arc welding, if an airtight leak is found,
Even if an attempt is made to remove the welded part once and try to weld it, the properties near the welded part are very poor due to spatter and thermal strain during welding, and almost no re-welding is possible, but by using friction stir welding, Since the properties near the already-joined portion are improved and re-joining can be performed at a position near the already-joined portion, a plurality of joinings for sealing can be easily performed.

【0027】例えば、図6に示すように、ツール9を、
封止部21の接合線25に直交して移動させることによ
り接合線26を形成し、該接合線26により仮封止を施
して漏れ試験を行う。そして、気密漏れの有無を調査
し、気密漏れがなく良好な気密性が得られた場合には、
前記接合線26近傍に接合線27を形成して、該接合線
27により本封止を行うのである。気密漏れがあれば、
前記接合線26の接合部を除去して、摩擦攪拌接合法に
より全体の再接合を行い気密性を向上させた後、再び、
真空引きしながら接合線27を形成し、該接合線27に
より本封止を行うのである。
For example, as shown in FIG.
The joining line 26 is formed by moving the sealing portion 21 at right angles to the joining line 25, and temporary sealing is performed using the joining line 26 to perform a leak test. Investigate the presence or absence of leaks, and if good airtightness is obtained without leaks,
The joining line 27 is formed near the joining line 26, and the main sealing is performed by the joining line 27. If there is an air leak,
After removing the joining portion of the joining line 26 and re-joining the whole by friction stir welding to improve the airtightness, again,
The joining line 27 is formed while evacuating, and the main sealing is performed by the joining line 27.

【0028】次に、封止工程で用いる封止方法につい
て、図6乃至図8により説明する。まず、大気中封止方
法について説明する。前記封止部21のように、被接合
材内に設けた封止部において、再封止を行うことがで
き、気密漏れによる不良品の発生を大きく低減すること
ができる。
Next, a sealing method used in the sealing step will be described with reference to FIGS. First, the sealing method in the atmosphere will be described. As in the sealing portion 21, resealing can be performed in a sealing portion provided in the material to be joined, and the occurrence of defective products due to airtight leakage can be greatly reduced.

【0029】一方、被接合材が変形しやすく、大気中で
真空引きする際に、大気圧により前記封止部21の隙間
が保持できない場合などには、従来の如くパイプを使用
する必要がある。この場合、図7に示すように、前記被
接合材11の突出部11aの側面より、内部の前記気密
部3に連通した連結パイプ29が突設され、該連結パイ
プ29は、図示せぬポンプに接続されており、該ポンプ
を駆動することにより、気密部3内のガスを排出できる
ようにしている。そして、該パイプ29の途中部の上下
にはダミー板30・30を仮止めし、該ダミー板30・
30の裏面には裏当て30を当接させると共に、ダミー
板30・30の上面からは、回転するツール9を加圧し
ながら位置32から33まで移動させることによって摩
擦攪拌接合を行い、連結パイプ29を封止するのであ
る。
On the other hand, if the material to be joined is easily deformed and the gap in the sealing portion 21 cannot be maintained due to the atmospheric pressure when vacuuming is performed in the atmosphere, it is necessary to use a pipe as in the related art. . In this case, as shown in FIG. 7, a connecting pipe 29 communicating with the internal hermetic part 3 is protruded from a side surface of the projecting portion 11a of the material to be joined 11, and the connecting pipe 29 is connected to a pump (not shown). The gas in the hermetic part 3 can be discharged by driving the pump. Dummy plates 30 and 30 are temporarily fixed on the upper and lower portions of the pipe 29, and the dummy plates 30 and 30 are temporarily fixed.
The friction stir welding is performed by moving the rotating tool 9 from the upper surface of the dummy plate 30 to the position 32 to 33 while pressing the rotating tool 9 from the upper surface of the dummy plate 30. Is sealed.

【0030】すなわち、このように連結パイプを摩擦攪
拌接合法で封止することにより、従来のように加熱しな
がら加圧圧着させる場合とは異なり、連結パイプを取り
替えなくとも、位置をわずかにずらせるだけで再封止が
可能であり、また、圧着に比べて接合部の接合強度も高
く、高い気密性を確実に保持することができるのであ
る。
That is, by sealing the connecting pipe by the friction stir welding method in this way, unlike the conventional case where the connecting pipe is pressurized and pressed while heating, the position is slightly shifted without replacing the connecting pipe. It is possible to re-seal simply by removing, and the bonding strength of the bonding portion is higher than that of crimping, so that high airtightness can be reliably maintained.

【0031】次に、真空中封止方法における封止部の封
止方法及びその装置について説明する。図8に示すよう
に、真空室37の底板37a上には、上部にボールなど
の転動・摺動が可能な部材を設けた複数の支持体38を
配設し、該支持体38上には真空形成体7を保持するた
めの保持台39を水平方向に移動可能に載置し、該保持
台39上に真空形成体7が固定されている。そして、前
記真空室37上方からは、基部を接合ヘッド33に固設
したツール36が、真空室37上部の蓋板37bを貫通
して前記封止部21上面に押圧されると共に、この貫通
部37cと前記接合ヘッド33との間は、伸縮可能な気
密カバー35で覆われている。一方、前記保持台39の
側面には、複数の移動アーム41の先端が固定され、該
移動アーム41の基部は、真空室37の側板37dを貫
通して、真空室37側方に設けた駆動部42に接続さ
れ、該駆動部42と貫通部37eとの間も、伸縮可能な
気密カバー40で覆われている。
Next, a method and an apparatus for sealing the sealing portion in the vacuum sealing method will be described. As shown in FIG. 8, on the bottom plate 37a of the vacuum chamber 37, a plurality of supports 38 provided with rolling and sliding members such as balls are provided on the upper part, and on the support 38, A holding table 39 for holding the vacuum forming body 7 is movably mounted in the horizontal direction, and the vacuum forming body 7 is fixed on the holding table 39. Then, from above the vacuum chamber 37, a tool 36 having a base fixed to the joining head 33 penetrates a lid plate 37b above the vacuum chamber 37 and is pressed against the upper surface of the sealing portion 21. The space between 37c and the joining head 33 is covered with an expandable and contractible airtight cover 35. On the other hand, the tip of a plurality of moving arms 41 is fixed to the side surface of the holding table 39, and the base of the moving arm 41 penetrates the side plate 37 d of the vacuum chamber 37 and is provided on the side of the vacuum chamber 37. The space between the drive unit 42 and the penetrating portion 37e is also covered with an expandable and contractible airtight cover 40.

【0032】このような、真空形成体7を内部に配置可
能な真空室37と、該真空室37の外部から内部に向か
って気密保持可能に挿入されるツール36を有する摩擦
攪拌接合装置44と、真空室37内の真空形成体7を所
定速度で移動可能な送り装置45とからなる真空中封止
装置43において、ツール36を押圧して保持した状態
で、前記送り装置42の移動アーム41を駆動部42に
より伸縮させ、ツール36先端が前記接合線26や接合
線27に沿って移動するように保持台39を移動させる
ことで、前記封止部21を封止することができるのであ
る。
A friction stir welding apparatus 44 having such a vacuum chamber 37 in which the vacuum forming body 7 can be disposed, and a tool 36 which is inserted from the outside of the vacuum chamber 37 to the inside so as to be able to maintain the hermetic state. In a vacuum sealing device 43 comprising a feed device 45 capable of moving the vacuum forming body 7 in the vacuum chamber 37 at a predetermined speed, the moving arm 41 of the feed device 42 is held while pressing and holding the tool 36. The sealing portion 21 can be sealed by moving the holding table 39 so that the tip of the tool 36 moves along the joining line 26 or the joining line 27 by expanding and contracting the tool with the driving portion 42. .

【0033】すなわち、このような真空中封止装置43
を用いて、封止部21を摩擦攪拌接合により封止するこ
とにより、従来のろう付けとは異なって、接合中のフラ
ックスによるガス発生がなく、高い真空度が得られると
共に、被接合材表面でのみ接合するろう付けとは異な
り、被接合材同士の塑性流動により接合する摩擦攪拌接
合の方が、接合強度が高く、高い気密性が得られる。
That is, such a vacuum sealing device 43
By sealing the sealing portion 21 by friction stir welding using the method described above, unlike the conventional brazing, no gas is generated due to the flux during the welding, a high degree of vacuum is obtained, and the surface of the material to be welded is obtained. Unlike brazing, in which only joining is performed, friction stir welding, in which the materials to be joined are joined by plastic flow, has higher joining strength and higher airtightness.

【0034】[0034]

【発明の効果】本発明は、以上のように構成したので、
次のような効果を奏するものである。即ち、請求項1の
ように、所定形状の被接合材を組み合わせて接合し内部
に気密部を設ける接合工程と、該気密部を真空にしつつ
封止部を接合して密閉する封止工程とからなる真空形成
体の製造方法において、前記接合工程と封止工程に摩擦
攪拌接合法を用いるので、イナートガスアーク溶接法に
比べて熱ひずみを大幅に低減することができ、板状など
の被接合材であっても確実に密着させながら接合できる
ため、様々な形状の真空形成体を簡単な設備で安価に製
造することができる。また、接合部の幅を広くとること
ができ、ガスが残留する隙間の発生を抑えて高真空が得
やすくなり、接合強度や気密性も大きく向上させること
ができる。加えて、塑性流動化された被接合材同士が攪
拌・混合されて接合部が形成されるため、異相が生じに
くく、さらに気密性を高く維持することができる。
The present invention is configured as described above.
The following effects are obtained. That is, as in claim 1, a joining step of combining and joining materials to be joined in a predetermined shape and providing an airtight portion inside, and a sealing step of joining and sealing the sealing portion while evacuating the airtight portion. In the method for manufacturing a vacuum formed body comprising, since the friction stir welding method is used in the joining step and the sealing step, the heat distortion can be significantly reduced as compared with the inert gas arc welding method, and the plate-shaped or the like can be joined. Since even materials can be joined while being securely brought into close contact with each other, vacuum formed bodies of various shapes can be manufactured at low cost with simple equipment. Further, the width of the joint can be widened, the generation of a gap in which gas remains can be suppressed, a high vacuum can be easily obtained, and the joint strength and airtightness can be greatly improved. In addition, since the plastic fluidized materials to be joined are stirred and mixed together to form a joint, a different phase is less likely to occur, and the airtightness can be maintained higher.

【0035】請求項2のように、請求項1記載の接合工
程に摩擦攪拌接合法を用いるに際し、接合線の始端と終
端とを、前記気密部を形成する接合線上から離間した位
置に設けるので、始端と終端からの気密漏れを防止し
て、高い気密性を維持させることができる。
According to a second aspect of the present invention, when the friction stir welding method is used in the joining step of the first aspect, the starting end and the end of the joining line are provided at positions separated from the joining line forming the hermetic portion. In addition, high airtightness can be maintained by preventing airtight leakage from the start end and the end.

【0036】請求項3のように、請求項1記載の接合工
程に摩擦攪拌接合法を用いるに際し、封止部を被接合材
内に設けるので、封止部が真空形成体から外部に突出す
ることがなく、従来の突設したパイプ等とは異なり、破
損しにくく、また破損防止のために複雑な構造を設ける
必要がなく、加えて、気密部が薄い場合であっても封止
部を容易に形成することができる。
According to a third aspect of the present invention, when the friction stir welding method is used in the joining step of the first aspect, since the sealing portion is provided in the material to be joined, the sealing portion protrudes from the vacuum forming body to the outside. Unlike conventional pipes that are protruded, they are less likely to break, and there is no need to provide a complicated structure to prevent breakage. It can be easily formed.

【0037】請求項4のように、請求項3記載の封止部
は、摩擦攪拌接合により複数回の封止が可能な構成とす
るので、気密漏れに対する補修を簡単に行うことがで
き、不良品の発生が大きく低減できるばかりでなく、使
用中に気密漏れが発生した真空形成体のリサイクルも容
易に行うことができる。
According to a fourth aspect of the present invention, the sealing portion according to the third aspect is configured to be capable of being sealed a plurality of times by friction stir welding, so that it is possible to easily perform repair for airtight leakage, and Not only the generation of non-defective products can be greatly reduced, but also the vacuum forming body that has leaked airtight during use can be easily recycled.

【0038】請求項5のように、請求項1記載の封止工
程において、気密部をポンプにより真空引きした後、該
ポンプと気密部とを連通して連結する連結パイプを、摩
擦攪拌接合法により封止するので、連結パイプを取り替
えなくとも再封止が可能であり、また、圧着に比べて接
合部の接合強度も高く、高い気密性を確実に保持するこ
とができる。
According to a fifth aspect of the present invention, in the sealing step of the first aspect, after the airtight portion is evacuated by a pump, the connecting pipe connecting the pump and the airtight portion is connected by a friction stir welding method. Therefore, resealing can be performed without replacing the connecting pipe, and the bonding strength of the bonding portion is higher than that of crimping, so that high airtightness can be reliably maintained.

【0039】請求項6のように、請求項1記載の封止工
程において、気密部を設けた真空形成体を真空室内に配
置した後に、気密部を真空にして封止部を封じる際、該
真空室の外部から内部に向かって気密保持可能にツール
を挿入し、該ツールにより前記封止部を摩擦攪拌接合法
で封止するので、従来のろう付けとは異なり、接合中の
フラックスによるガス発生がなく、高い真空度が得られ
ると共に、ろう付けに比べ接合強度が高く、高い気密性
を得ることができる。
According to a sixth aspect of the present invention, in the sealing step of the first aspect, after the vacuum forming body provided with the hermetic portion is placed in a vacuum chamber, and the hermetic portion is evacuated to seal the hermetically sealed portion, Since the tool is inserted from the outside of the vacuum chamber to the inside so that it can be kept airtight, and the sealing portion is sealed by the friction stir welding method with the tool, unlike the conventional brazing, the gas due to the flux during the welding is different from the conventional brazing. There is no generation, a high degree of vacuum can be obtained, and the joining strength is higher than that of brazing, and high airtightness can be obtained.

【0040】請求項7のように、所定形状の被接合材を
組み合わせて接合し内部に気密部を設けた後、該気密部
を真空にしつつ封止部を接合して密閉する真空形成体の
製造装置において、真空形成体を内部に配置可能な真空
室と、該真空室の外部から内部に向かって気密保持可能
に挿入されるツールを有する摩擦攪拌接合装置と、真空
室内の真空形成体を所定速度で移動可能な送り装置とか
ら構成される真空中封止装置を有するので、封止部の摩
擦攪拌接合による真空中での封止を簡単な装置で確実に
行うことができる。
According to a seventh aspect of the present invention, there is provided a vacuum-formed body for combining and joining members having a predetermined shape to form a hermetically sealed portion therein, and then joining and sealing the sealing portion while evacuating the hermetically sealed portion. In a manufacturing apparatus, a vacuum chamber capable of disposing a vacuum forming body therein, a friction stir welding apparatus having a tool inserted so as to be able to maintain the airtight from the outside to the inside of the vacuum chamber, and a vacuum forming body in the vacuum chamber Since the apparatus has a sealing device in a vacuum composed of a feeding device movable at a predetermined speed, the sealing in the vacuum by the friction stir welding of the sealing portion can be reliably performed by a simple device.

【図面の簡単な説明】[Brief description of the drawings]

【図1】周縁の接合を摩擦攪拌接合法により行う本発明
に係わる真空形成体の斜視図である。
FIG. 1 is a perspective view of a vacuum forming body according to the present invention in which peripheral edges are joined by a friction stir welding method.

【図2】同じく断面図である。FIG. 2 is a sectional view of the same.

【図3】突出部を設けた被接合材側に裏当てを当てた場
合の真空形成体の断面図である。
FIG. 3 is a cross-sectional view of a vacuum formed body when a backing is applied to a material-to-be-joined provided with a protrusion.

【図4】接合線を示す真空形成体の平面図である。FIG. 4 is a plan view of the vacuum forming body showing a joining line.

【図5】気密部の接合線を示す真空形成体の平面図であ
る。
FIG. 5 is a plan view of the vacuum forming body showing a joining line of the hermetic part.

【図6】封止するための接合線を示す真空形成体の平面
図である。
FIG. 6 is a plan view of a vacuum forming body showing a joining line for sealing.

【図7】大気中封止を摩擦攪拌接合法により行う封止部
の斜視図である。
FIG. 7 is a perspective view of a sealing portion for performing sealing in the atmosphere by a friction stir welding method.

【図8】真空中封止を摩擦攪拌接合法により行う真空中
封止装置の側面断面図である。
FIG. 8 is a side cross-sectional view of a vacuum sealing device that performs vacuum sealing by a friction stir welding method.

【図9】重ね部の上下面をダミー部材で挟持する真空形
成体の斜視図である。
FIG. 9 is a perspective view of a vacuum forming body in which the upper and lower surfaces of an overlapping portion are sandwiched between dummy members.

【図10】被接合材に突出部を設けない真空形成体の斜
視図である。
FIG. 10 is a perspective view of a vacuum forming body in which a material to be joined is not provided with a protrusion.

【図11】従来のイナートガスアーク溶接法による真空
形成体の断面図である。
FIG. 11 is a cross-sectional view of a vacuum formed body by a conventional inert gas arc welding method.

【符号の説明】[Explanation of symbols]

3 気密部 7 真空形成体 9・36 ツール 11・12 被接合材 15・22 始端 16・23 終端 17・18・19・20 接合線 21 封止部 29 連結パイプ 37 真空室 43 真空中封止装置 44 摩擦攪拌接合装置 45 送り装置 Reference Signs List 3 Hermetic part 7 Vacuum forming body 9.36 Tool 11.12 Materials to be joined 15.22 Start end 16.23 End 17.18.19.20 Joining line 21 Sealing part 29 Connecting pipe 37 Vacuum chamber 43 Vacuum sealing device 44 Friction stir welding device 45 Feeder

───────────────────────────────────────────────────── フロントページの続き (72)発明者 阪本 慶二 神戸市中央区港島南町1丁目5番2号 財 団法人新産業創造研究機構内 (72)発明者 四方 宏 神戸市中央区港島南町1丁目5番2号 財 団法人新産業創造研究機構内 Fターム(参考) 3H036 AA08 AB28 AC01 AE13 4E067 BG00 CA04 DB01 EA08 EB00 EC02  ──────────────────────────────────────────────────続 き Continuing on the front page (72) Keiji Sakamoto 1-5-2 Minatojima Minamimachi, Chuo-ku, Kobe City Inside the New Industry Creation Research Organization (72) Inventor Hiroshi Shikata 1-chome, Minatojima Minamicho, Chuo-ku, Kobe City No. 5-2 F-term in the New Industry Creation Research Organization (Reference) 3H036 AA08 AB28 AC01 AE13 4E067 BG00 CA04 DB01 EA08 EB00 EC02

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 所定形状の被接合材を組み合わせて接合
し内部に気密部を設ける接合工程と、該気密部を真空に
しつつ封止部を接合して密閉する封止工程とからなる真
空形成体の製造方法において、前記接合工程と封止工程
に摩擦攪拌接合法を用いることを特徴とする真空形成体
の製造方法。
1. A vacuum forming method comprising: a joining step of combining and joining materials having a predetermined shape to form an airtight portion inside; and a sealing step of joining a hermetically sealed portion while hermetically sealing the hermetically sealed portion to form a vacuum. A method for manufacturing a vacuum formed body, wherein a friction stir welding method is used in the joining step and the sealing step.
【請求項2】 前記接合工程に摩擦攪拌接合法を用いる
に際し、接合線の始端と終端とを、前記気密部を形成す
る接合線上から離間した位置に設けることを特徴とする
請求項1記載の真空形成体の製造方法。
2. The method according to claim 1, wherein, when using the friction stir welding method in the joining step, a starting end and a terminating end of the joining line are provided at positions separated from a joining line forming the airtight portion. Manufacturing method of vacuum formed body.
【請求項3】 前記接合工程に摩擦攪拌接合法を用いる
に際し、封止部を被接合材内に設けることを特徴とする
請求項1記載の真空形成体の製造方法。
3. The method of manufacturing a vacuum formed body according to claim 1, wherein a sealing portion is provided in the material to be joined when using the friction stir welding method in the joining step.
【請求項4】 前記封止部は、摩擦攪拌接合により複数
回の封止が可能な構成とすることを特徴とする請求項3
記載の真空形成体の製造方法。
4. The structure according to claim 3, wherein the sealing portion can be sealed a plurality of times by friction stir welding.
A method for producing a vacuum formed body as described above.
【請求項5】 前記封止工程において、気密部をポンプ
により真空引きした後、該ポンプと気密部とを連通して
連結する連結パイプを、摩擦攪拌接合法により封止する
ことを特徴とする請求項1記載の真空形成体の製造方
法。
5. In the sealing step, after the airtight portion is evacuated by a pump, a connecting pipe connecting the pump and the airtight portion is connected by a friction stir welding method. A method for manufacturing a vacuum formed body according to claim 1.
【請求項6】 前記封止工程において、気密部を設けた
真空形成体を真空室内に配置した後に、気密部を真空に
して封止部を封じる際、該真空室の外部から内部に向か
って気密保持可能にツールを挿入し、該ツールにより前
記封止部を摩擦攪拌接合法で封止することを特徴とする
請求項1記載の真空形成体の製造方法。
6. In the sealing step, after disposing a vacuum forming body provided with a hermetic portion in a vacuum chamber, and then sealing the sealing portion by evacuating the hermetic portion, from outside to inside of the vacuum chamber. The method for manufacturing a vacuum formed body according to claim 1, wherein a tool is inserted so as to be able to maintain airtightness, and the sealing part is sealed by a friction stir welding method with the tool.
【請求項7】 所定形状の被接合材を組み合わせて接合
し内部に気密部を設けた後、該気密部を真空にしつつ封
止部を接合して密閉する真空形成体の製造装置におい
て、真空形成体を内部に配置可能な真空室と、該真空室
の外部から内部に向かって気密保持可能に挿入されるツ
ールを有する摩擦攪拌接合装置と、真空室内の真空形成
体を所定速度で移動可能な送り装置とから構成される真
空中封止装置を有することを特徴とする真空形成体の製
造装置。
7. A vacuum forming body manufacturing apparatus for combining and joining members to be joined in a predetermined shape to form a hermetically sealed portion therein, and then joining and sealing the sealing portion while evacuating the hermetically sealed portion. A vacuum chamber capable of disposing the formed body therein, a friction stir welding apparatus having a tool inserted from the outside of the vacuum chamber to the inside so as to be able to maintain the airtight, and a vacuum formed body in the vacuum chamber can be moved at a predetermined speed. An apparatus for manufacturing a vacuum formed body, comprising: a vacuum sealing device comprising a simple feeding device.
JP2000029378A 2000-02-07 2000-02-07 Method ad apparatus for manufacturing vacuum forming body Pending JP2001219281A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000029378A JP2001219281A (en) 2000-02-07 2000-02-07 Method ad apparatus for manufacturing vacuum forming body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000029378A JP2001219281A (en) 2000-02-07 2000-02-07 Method ad apparatus for manufacturing vacuum forming body

Publications (1)

Publication Number Publication Date
JP2001219281A true JP2001219281A (en) 2001-08-14

Family

ID=18554651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000029378A Pending JP2001219281A (en) 2000-02-07 2000-02-07 Method ad apparatus for manufacturing vacuum forming body

Country Status (1)

Country Link
JP (1) JP2001219281A (en)

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