JP2001194793A5 - - Google Patents
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- Publication number
- JP2001194793A5 JP2001194793A5 JP2000310728A JP2000310728A JP2001194793A5 JP 2001194793 A5 JP2001194793 A5 JP 2001194793A5 JP 2000310728 A JP2000310728 A JP 2000310728A JP 2000310728 A JP2000310728 A JP 2000310728A JP 2001194793 A5 JP2001194793 A5 JP 2001194793A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- substituent
- carbon atoms
- formula
- substituted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 125000004432 carbon atom Chemical group C* 0.000 description 5
- 125000001424 substituent group Chemical group 0.000 description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 125000003710 aryl alkyl group Chemical group 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 0 CC(C)*C(C)(*)c1ccc(COC(*)O*)cc1 Chemical compound CC(C)*C(C)(*)c1ccc(COC(*)O*)cc1 0.000 description 1
- 125000003668 acetyloxy group Chemical group [H]C([H])([H])C(=O)O[*] 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 125000006165 cyclic alkyl group Chemical group 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- -1 polycyclic hydrocarbon Chemical class 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 125000005156 substituted alkylene group Chemical group 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000310728A JP4253430B2 (ja) | 1999-10-28 | 2000-10-11 | ポジ型フォトレジスト組成物及びパターン形成方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30731899 | 1999-10-28 | ||
| JP11-307318 | 1999-10-28 | ||
| JP2000310728A JP4253430B2 (ja) | 1999-10-28 | 2000-10-11 | ポジ型フォトレジスト組成物及びパターン形成方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001194793A JP2001194793A (ja) | 2001-07-19 |
| JP2001194793A5 true JP2001194793A5 (enExample) | 2006-01-12 |
| JP4253430B2 JP4253430B2 (ja) | 2009-04-15 |
Family
ID=26565059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000310728A Expired - Fee Related JP4253430B2 (ja) | 1999-10-28 | 2000-10-11 | ポジ型フォトレジスト組成物及びパターン形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4253430B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100830868B1 (ko) | 2006-08-10 | 2008-05-21 | 주식회사 동진쎄미켐 | 극자외선 및 심자외선용 감광성 고분자 및 이를 포함하는포토레지스트 조성물 |
| JP5844613B2 (ja) * | 2010-11-17 | 2016-01-20 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ | 感光性コポリマーおよびフォトレジスト組成物 |
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2000
- 2000-10-11 JP JP2000310728A patent/JP4253430B2/ja not_active Expired - Fee Related