JP2001194407A - Method and apparatus of electrical inspection for pattern wiring board - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and an apparatus of electrical inspection for a pattern wiring board, whereby whether a probe and a terminal of the pattern wiring board are connected with a low contact resistance value is confirmed and contact properties can be improved. SOLUTION: There are provided probes A3 and B4 to be brought in contact with wiring terminals to be inspected of the pattern wiring board 9 set to a movable stage 1, a stage-drive part 2 for changing a contact pressure between the terminals of the pattern wiring board 9 and the probes A3, B4, a resistance- measuring device 5 for measuring the value of the resistance between the terminals, corresponding to a change amount of the contact pressure between the terminals of the pattern wiring board 9 and the probes A3, B4, a differentiation processing part 10 and a differential value-determining part 11 for measuring the amount of change in the resistance value between the terminals, and a determining part 6 and a determining condition storage part 7 for comparing the resistance value between terminals with a preset value, when the amount of change in the resistance value becomes within a specified value, thereby determining whether the contact is satisfactory.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electric inspection method and apparatus for a patterned wiring board for determining the quality of a patterned wiring board.

[0002]

2. Description of the Related Art It is necessary to determine the quality of a patterned wiring board. A conventional method for determining the quality of a patterned wiring board will be described with reference to FIG.

The conventional method of determining the quality of a patterned wiring board is basically to make a determination by bringing a probe into contact with the inspection wiring of the patterned wiring board and measuring the electrical resistance value.

That is, as shown in FIG. 2, when measuring the inspection wiring of the pattern wiring board 9, first, the movable stage 1 is moved by using the stage driving unit 2 and provided on the inspection wiring of the pattern wiring board 9. The two probes A3 and B4 are brought into contact with the terminals (not shown), and the resistance of the test wiring sandwiched between the two probes A3 and B4 is measured by the resistance measuring device 5.

[0005] Next, the pass / fail judgment is made by comparing the measured value measured by the resistance measuring device 5 with the expected value of the wiring under inspection stored in the pass / fail judgment condition storage section 7 and the pass / fail judgment is made. It is displayed on the pass / fail display section 8.

In such a configuration, in order to correctly measure the electric resistance value of the wiring to be inspected in the pattern wiring board 9 and to judge the quality of the wiring, the probe A3 and the probe B4 need to have the pattern to be inspected. It is important that the terminal of the wiring board 9 is in contact with the terminal due to a low contact resistance value.

[0007]

However, in the prior art shown in FIG. 2, it is difficult to check whether or not the probe and the terminal are in contact with a low contact resistance value. There is a problem that it is difficult to improve the contact properties of the terminals.

SUMMARY OF THE INVENTION An object of the present invention is to check whether or not a probe and a terminal of a pattern wiring board are in contact with a low contact resistance value, and to improve electrical contact of the pattern wiring board. It is to provide a method and an apparatus.

[0009]

To achieve the above object, an electric inspection method for a patterned wiring board according to the present invention comprises:
An electrical inspection method for a pattern wiring board that determines pass / fail of a pattern wiring board, wherein when measuring a resistance between terminals of a wiring to be inspected on the pattern wiring board using a probe,
A contact pressure between the terminal and the probe is changed, and a resistance value change amount of the inter-terminal resistance corresponding to the change amount is measured.

When the amount of change in the resistance value falls within a specified value, the resistance value of the inter-terminal resistance is measured as pass / fail judgment data.

When the resistance change amount is equal to or more than a specified value, it is determined that the contact between the terminal and the probe is defective, and the contact pressure between the terminal and the probe is further changed.
A resistance value change amount of the inter-terminal resistance corresponding to the change amount is measured.

When the amount of change in the resistance value falls within a specified value, the resistance value of the inter-terminal resistance is measured as pass / fail judgment data.

An electric inspection apparatus for a patterned wiring board according to the present invention is an electric inspection apparatus for a patterned wiring board for judging pass / fail of a patterned wiring board. The contact pressure is changed, and the resistance change amount of the inter-terminal resistance corresponding to the change amount is measured, and when the resistance change amount is within a specified value, the inter-terminal resistance value is compared with a predetermined value. Thus, a pass / fail judgment is made.

If the resistance change amount is equal to or more than a specified value, it is determined that the terminal and the probe are in poor contact, and the contact pressure between the terminal and the probe is further changed.
A resistance change amount of the inter-terminal resistance corresponding to the change amount is measured, and when the resistance value change amount falls within a specified value, the resistance value of the inter-terminal resistance is measured as pass / fail determination data. It was made.

An electric inspection apparatus for a pattern wiring board according to the present invention is an electric inspection apparatus for a pattern wiring board for judging pass / fail of a pattern wiring board, the probe being brought into contact with a terminal of a wiring to be inspected on the pattern wiring board. Means for changing the contact pressure between the terminal and the probe,
Means for measuring the resistance value of the inter-terminal resistance corresponding to the change amount of the contact pressure between the terminal and the probe, means for measuring the change amount of the resistance value between the terminals, and the change amount of the resistance value is defined. Means for comparing the inter-terminal resistance value with a predetermined value when the value falls within the range, and performing a pass / fail judgment.

When the resistance change amount is equal to or more than a specified value, it is determined that the terminal and the probe are in poor contact, and the contact pressure between the terminal and the probe is further changed.
A resistance change amount of the inter-terminal resistance corresponding to the change amount is measured, and when the resistance value change amount falls within a specified value, the resistance value of the inter-terminal resistance is measured as pass / fail determination data. It was made.

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to the drawings.

As shown in the drawing, the electrical inspection method for a patterned wiring board according to the present invention is an electrical inspection method for a patterned wiring board which determines the quality of a patterned wiring board. When measuring the inter-terminal resistance using the probes A3 and B4, the contact pressure between the terminals of the pattern wiring board 9 and the probes A3 and B4 is changed, and the resistance of the inter-terminal resistance corresponding to the change amount is changed. The amount of change in value is measured, and when the amount of change in resistance falls within a specified value, the resistance of the inter-terminal resistance is measured as pass / fail judgment data.

On the other hand, when the resistance change amount is equal to or more than a specified value, it is determined that the terminals of the pattern wiring board 9 and the probes A3 and B4 are in poor contact, and the terminals of the pattern wiring board 9 and the probes A3 and The contact pressure with B4 is further changed, and the resistance change amount of the inter-terminal resistance corresponding to the change amount is measured. When the resistance change amount falls within a specified value, the resistance of the inter-terminal resistance is measured. The value is measured as pass / fail judgment data.

The electric inspection apparatus for a pattern wiring board for carrying out the electric inspection method for a pattern wiring board according to the present invention is an electric inspection apparatus for a pattern wiring board for judging the quality of the pattern wiring board. The contact pressure between the terminals of the wiring to be inspected and the probes A3 and B4 is changed, and the resistance change amount of the inter-terminal resistance corresponding to the change amount is measured, and the resistance change amount falls within a specified value. In this case, the resistance between the terminals is compared with a predetermined value, and a pass / fail judgment is performed.If the resistance change amount is equal to or more than a specified value, the terminal and the probe may have poor contact. Judge, further change the contact pressure between the terminal and the probe, measure the resistance change amount of the inter-terminal resistance corresponding to the change amount, when the resistance value change amount is within a specified value , The resistance between the terminal resistor is obtained so as to measure the quality determination data.

As shown in FIG. 1, the embodied electrical inspection apparatus for a patterned wiring board according to the present invention includes probes A3 and B4 which are brought into contact with terminals of a wiring to be inspected on a patterned wiring board 9; Means 2 for changing the contact pressure between the terminals of the substrate 9 and the probes A3, B4;
The terminals of the pattern wiring board 9 and the probes A3, B
Means 5 for measuring the resistance value of the inter-terminal resistance corresponding to the change in the contact pressure with 4, means 10 and 11 for measuring the change in the resistance of the inter-terminal resistance, and Means 6 and 7 for comparing the resistance value between terminals with a predetermined value when the value falls within the range, and performing a pass / fail judgment.

If the resistance change amount is equal to or greater than a specified value, it is determined that the terminals of the pattern wiring board 9 and the probes A3 and B4 are in poor contact, and the terminals of the pattern wiring board 9 and the probes A3 and B4 Further change the contact pressure with, and measure the resistance change amount of the inter-terminal resistance corresponding to the change amount, when the resistance change amount is within a specified value, the resistance value of the inter-terminal resistance Is measured as pass / fail judgment data.

Therefore, according to the present invention, it is determined whether or not the resistance value between the terminals corresponding to the change in the contact pressure between the terminals of the pattern wiring board 9 and the probes A3 and B4 is within a specified value. Thereby, it can be confirmed whether or not the probes A3, B4 and the terminals of the pattern wiring board 9 are in contact with a low contact resistance value, and the contact property can be improved.

Next, a detailed description will be given using a specific example of the present invention.

FIG. 1 is a block diagram showing an electric inspection apparatus for a patterned wiring board according to one embodiment of the present invention.

An electric inspection apparatus for a patterned wiring board according to an embodiment of the present invention shown in FIG. 1 includes probes A3 and B4 for contacting terminals of a wiring to be inspected on a patterned wiring board 9 set on a movable stage 1. And a stage driving unit 2 as means for changing the contact pressure between the terminals of the pattern wiring board 9 and the probes A3 and B4, and the amount of change in the contact pressure between the terminals of the pattern wiring board 9 and the probes A3 and B4. A resistance measuring device 5 as a means for measuring the resistance value of the inter-terminal resistance, a differential processing unit 10 and a differential value determination unit 1 as a means for measuring the amount of change in the resistance value of the inter-terminal resistance
1 and a pass / fail judgment unit 6 and a pass / fail judgment condition storage unit 7 as means for comparing the inter-terminal resistance value with a predetermined value when the amount of change in the resistance value falls within a specified value and performing pass / fail judgment. Have Further, a pass / fail display section 8 for displaying pass / fail judgment results is provided.

Next, the operation in the case where the electrical inspection method for a patterned wiring board which determines the quality of the patterned wiring board using the electrical inspection apparatus for a patterned wiring board according to one embodiment of the present invention shown in FIG. 1 will be described. explain.

First, the probes A3 and B4 are positioned above the pattern wiring board 9 set on the movable stage 1 and provided at fixed positions.

In this state, the movable stage 1 is moved by using the stage driving unit 2 to connect the probe A 3 and the probe B
4, the electric resistance of the wiring to be inspected sandwiched between the two probes A3 and B4 is measured using the resistance measuring device 5, and the measured value is differentiated by the differential processing unit 1.
0 to the measured value No. It is held as 1.

Thereafter, the movable stage 1 is raised by a fixed amount using the stage driving section 2 to change the contact pressure between the terminals of the pattern wiring board 9 and the probes A3 and B4.
When the contact pressure is changed, two probes A3 and
The electrical resistance value of the wiring to be inspected sandwiched between the probes B4 is measured using the resistance measuring device 5, and the measured value is stored in the differential processing unit 10 as the measured value No. Keep as 2.

Further, the movable stage 1 is raised by a certain amount using the stage driving section 2, and the contact pressure between the terminals of the pattern wiring board 9 and the probes A3 and B4 is further changed. When the contact pressure is changed, the electric resistance value of the wiring to be inspected sandwiched between the two probes A3 and B4 is measured by using the resistance measuring device 5, and the measured value is measured by the differential processing unit 10. Value No. Keep as 3.

Next, the differential processing unit 10 performs an electrical test on the wiring to be inspected sandwiched between the two probes A3 and B4 corresponding to the amount of change in the contact pressure between the terminals of the pattern wiring board 9 and the probes A3 and B4. The measured value of the resistance value No. 1, N
o. 2, No. 3 is calculated.

On the other hand, the differential value judging section 11
0 is the measured value No. 1, No. 2, No. 3 and the movement change amount of the stage drive unit 2 as inputs.
The measurement value No. calculated by the differential processing unit 10 1, No. 2,
No. Then, it is determined whether or not the change amount of No. 3 is within the range of the specified value. The above specified value is such that the contact pressure between the terminals of the pattern wiring board 9 and the probes A3 and B4 is optimally adjusted, and the contact resistance value between the terminals of the pattern wiring board 9 and the probes A3 and B4 becomes almost zero. This is set in advance as a numerical value corresponding to an approximate value.

The differential value judging section 11 calculates the measured value No. calculated by the differential processing section 10. 1, No. 2, No. Probe A3 and Probe B when the variation of
It is determined that the contact between the circuit board 4 and the terminal of the pattern wiring board 9 is good, and a signal for making a quality determination is output to the quality determination unit 6.

The pass / fail judgment unit 6 receives a signal for judging pass / fail output from the differential value judgment unit 11 and receives two signals at the time when the differential value judgment unit 11 outputs the signal. The measured value of the electric resistance value of the wiring to be inspected sandwiched between is obtained from the resistance measuring device 5, and the measured value is compared with the expected value stored in the pass / fail judgment condition storage unit 7 to judge pass / fail. The pass / fail judgment result is displayed on the pass / fail display unit 8.

On the other hand, if the above-mentioned variation is equal to or greater than the specified value, it is determined that the contact between the probes A3 and B4 and the terminals on the pattern wiring board 9 is poor, and the differential value determination unit 11 further proceeds to the stage. The movable stage 1 is raised by a fixed amount using the drive unit 2, and the resistance value at that time is measured. 4 is retained.

The measured value No. 2, measured value No. 3,
Measurement value No. 4 is used to calculate the amount of change. If the amount of change does not fall within the specified value, the movable stage 1
And perform the same process.

This process is repeated until the resistance change amount finally falls within the specified value. If the resistance change amount falls within the specified value, it is determined that the contact between the probes A3 and B4 and the terminals on the pattern wiring board 9 is good. Then, the pass / fail determination unit 6 obtains the measured value at that time from the resistance measuring device 5, compares the measured value with the set value stored in the pass / fail determination condition storage unit 7, and displays the pass / fail determination result on the pass / fail display unit 8. The measurement of the electric wiring to be inspected is completed.

Thereafter, the terminal of the next electric wiring to be inspected is moved so as to be in contact with the probe A3 and the probe B4, and the measurement of the next wiring is repeated.

As described above, according to the embodiment of the present invention,
The method for reducing the contact resistance of the measurement probe in the electrical inspection device for a pattern wiring board is to measure the wiring to be inspected on the wiring board by raising the movable stage, thereby increasing the contact pressure between the probe and the wiring terminal. Measure the amount of change in electrical resistance between the wiring terminals at that time, and if the amount of change in resistance falls within the specified value, determine that the probe and the wiring terminal are in sufficient contact. In order to perform the control of raising the probe, it is possible to easily confirm whether or not the above-described probe and the terminal are in contact with a low contact resistance value, and to easily improve the contact between the probe and the terminal. Can be.

[0041]

As described above, according to the present invention, it is possible to confirm whether or not the probe and the terminal of the pattern wiring board are in contact with a low contact resistance value, and to easily improve the contact property. Can be.

[Brief description of the drawings]

FIG. 1 is a block diagram showing an electric inspection apparatus for a patterned wiring board according to an embodiment of the present invention.

FIG. 2 is a block diagram showing an electric inspection apparatus for a patterned wiring board according to a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Movable stage 2 Stage drive part A3, B4 Probe 5 Resistance measuring instrument 6 Pass / fail judgment part 7 Pass / fail judgment condition storage part 8 Pass / fail indication part 9 Pattern wiring board

Claims (8)

[Claims] 1. An electric inspection method for a pattern wiring board for judging pass / fail of a pattern wiring board, the method comprising: measuring a resistance between terminals of a wiring to be inspected on the pattern wiring board by using a probe; An electrical inspection method for a pattern wiring board, comprising: changing a contact pressure with the probe, and measuring a resistance value change amount of the inter-terminal resistance corresponding to the change amount. 2. The pattern wiring board according to claim 1, wherein the resistance value of the inter-terminal resistance is measured as pass / fail judgment data when the amount of change in the resistance value falls within a specified value. Electrical inspection method. 3. When the resistance change amount is equal to or more than a specified value, it is determined that the terminal and the probe are in poor contact, and the contact pressure between the terminal and the probe is further changed to correspond to the change amount. An electrical inspection method for a patterned wiring board, comprising measuring a change in resistance value of the inter-terminal resistance. 4. The pattern wiring board according to claim 3, wherein the resistance value of the inter-terminal resistance is measured as pass / fail judgment data when the amount of change in the resistance value falls within a specified value. Electrical inspection method. 5. An electric inspection apparatus for a pattern wiring board for judging pass / fail of a pattern wiring board, the apparatus comprising: changing a contact pressure between a probe of a wiring to be inspected on a pattern wiring board and a probe; The amount of change in resistance of the inter-terminal resistance is measured, and when the amount of change in resistance is within a specified value, the inter-terminal resistance is compared with a predetermined value to determine pass / fail. An electrical inspection device for a patterned wiring board, comprising: 6. When the resistance change amount is equal to or more than a specified value, it is determined that the terminal and the probe are in poor contact, and the contact pressure between the terminal and the probe is further changed to correspond to the change amount. The resistance change amount of the inter-terminal resistance is measured, and when the resistance change amount is within a specified value,
6. The electrical inspection device for a pattern wiring board according to claim 5, wherein the resistance value of the inter-terminal resistance is measured as quality determination data. 7. An electric inspection device for a pattern wiring board, which judges pass / fail of the pattern wiring board, comprising: a probe for contacting a terminal of a wiring to be inspected on the pattern wiring board; and a contact pressure between the terminal and the probe. Means for changing; means for measuring the resistance value of the inter-terminal resistance corresponding to the change amount of the contact pressure between the terminal and the probe; means for measuring the change in the resistance value of the inter-terminal resistance; and Means for comparing the inter-terminal resistance value with a predetermined value when the value change amount falls within a specified value, and performing a pass / fail judgment. 8. When the resistance change amount is equal to or more than a specified value, it is determined that the terminal and the probe are in poor contact, and the contact pressure between the terminal and the probe is further changed to correspond to the change amount. The resistance change amount of the inter-terminal resistance is measured, and when the resistance change amount is within a specified value,
The electrical inspection device for a patterned wiring board according to claim 7, wherein the resistance value of the inter-terminal resistance is measured as data for quality determination.