JP2001194311A5 - - Google Patents
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- Publication number
- JP2001194311A5 JP2001194311A5 JP2000325855A JP2000325855A JP2001194311A5 JP 2001194311 A5 JP2001194311 A5 JP 2001194311A5 JP 2000325855 A JP2000325855 A JP 2000325855A JP 2000325855 A JP2000325855 A JP 2000325855A JP 2001194311 A5 JP2001194311 A5 JP 2001194311A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000325855A JP2001194311A (ja) | 1999-10-25 | 2000-10-25 | 基板検査装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30280299 | 1999-10-25 | ||
| JP11-302802 | 1999-10-25 | ||
| JP2000325855A JP2001194311A (ja) | 1999-10-25 | 2000-10-25 | 基板検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001194311A JP2001194311A (ja) | 2001-07-19 |
| JP2001194311A5 true JP2001194311A5 (ru) | 2007-12-06 |
Family
ID=26563274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000325855A Pending JP2001194311A (ja) | 1999-10-25 | 2000-10-25 | 基板検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001194311A (ru) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100556140B1 (ko) * | 2002-05-30 | 2006-03-03 | 삼성코닝정밀유리 주식회사 | 유리기판의 검사 시스템 |
| KR20050089731A (ko) * | 2004-10-13 | 2005-09-08 | 동일파텍주식회사 | 액정표시장치용 매크로 검사장치 |
| JP4578383B2 (ja) * | 2005-10-25 | 2010-11-10 | 株式会社堀場製作所 | パネル部材検査装置及びそれに適用されるパネル部材検査用プログラム |
| KR100783618B1 (ko) * | 2006-10-31 | 2007-12-07 | (주)오엘케이 | 매크로 검사장치 |
| JP5001681B2 (ja) * | 2007-03-12 | 2012-08-15 | 株式会社日本マイクロニクス | インライン自動検査装置及びインライン自動検査システム |
| JP5249645B2 (ja) * | 2008-06-20 | 2013-07-31 | 大日本スクリーン製造株式会社 | 基板処理装置 |
| CN107064171A (zh) * | 2017-01-26 | 2017-08-18 | 江苏东旭亿泰智能装备有限公司 | 检查组装件、宏观检查系统以及相关的检查方法 |
| CN113960072A (zh) * | 2021-10-15 | 2022-01-21 | 德康威尔(苏州)智能科技有限公司 | 一种用于检测载玻片的直线模组 |
| CN118566240A (zh) * | 2024-07-29 | 2024-08-30 | 柯尔微电子装备(厦门)有限公司 | 半自动晶圆表面检查机以及晶圆检查方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3782525B2 (ja) * | 1996-10-09 | 2006-06-07 | オリンパス株式会社 | 基板検査装置 |
| JPH10116869A (ja) * | 1996-10-11 | 1998-05-06 | Nikon Corp | ウエハ検査装置 |
| JP3907797B2 (ja) * | 1997-09-19 | 2007-04-18 | オリンパス株式会社 | 基板検査装置 |
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2000
- 2000-10-25 JP JP2000325855A patent/JP2001194311A/ja active Pending