JP2001194306A - 化学物質検出方法及び装置 - Google Patents
化学物質検出方法及び装置Info
- Publication number
- JP2001194306A JP2001194306A JP2000000963A JP2000000963A JP2001194306A JP 2001194306 A JP2001194306 A JP 2001194306A JP 2000000963 A JP2000000963 A JP 2000000963A JP 2000000963 A JP2000000963 A JP 2000000963A JP 2001194306 A JP2001194306 A JP 2001194306A
- Authority
- JP
- Japan
- Prior art keywords
- chemical substance
- substance
- detecting
- infrared
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 title claims abstract description 305
- 238000001514 detection method Methods 0.000 title claims abstract description 125
- 238000000034 method Methods 0.000 title claims abstract description 45
- 239000012535 impurity Substances 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims description 62
- 230000005540 biological transmission Effects 0.000 claims description 23
- 230000001678 irradiating effect Effects 0.000 claims description 13
- 238000007689 inspection Methods 0.000 claims description 12
- 239000013076 target substance Substances 0.000 claims description 11
- 238000010521 absorption reaction Methods 0.000 claims description 10
- 238000012360 testing method Methods 0.000 claims description 7
- 238000010183 spectrum analysis Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 abstract description 59
- 230000035945 sensitivity Effects 0.000 abstract description 19
- HGUFODBRKLSHSI-UHFFFAOYSA-N 2,3,7,8-tetrachloro-dibenzo-p-dioxin Chemical compound O1C2=CC(Cl)=C(Cl)C=C2OC2=C1C=C(Cl)C(Cl)=C2 HGUFODBRKLSHSI-UHFFFAOYSA-N 0.000 abstract 1
- KVGZZAHHUNAVKZ-UHFFFAOYSA-N 1,4-Dioxin Chemical compound O1C=COC=C1 KVGZZAHHUNAVKZ-UHFFFAOYSA-N 0.000 description 67
- 239000000779 smoke Substances 0.000 description 54
- 238000000354 decomposition reaction Methods 0.000 description 52
- 239000007789 gas Substances 0.000 description 46
- ISPYQTSUDJAMAB-UHFFFAOYSA-N 2-chlorophenol Chemical compound OC1=CC=CC=C1Cl ISPYQTSUDJAMAB-UHFFFAOYSA-N 0.000 description 30
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 29
- 238000005259 measurement Methods 0.000 description 28
- 238000000862 absorption spectrum Methods 0.000 description 21
- 239000000460 chlorine Substances 0.000 description 19
- 229910052801 chlorine Inorganic materials 0.000 description 18
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 17
- 239000000356 contaminant Substances 0.000 description 12
- 150000002013 dioxins Chemical class 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 9
- 238000000691 measurement method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000002290 gas chromatography-mass spectrometry Methods 0.000 description 7
- 230000007613 environmental effect Effects 0.000 description 6
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 4
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- IOLCXVTUBQKXJR-UHFFFAOYSA-M potassium bromide Chemical compound [K+].[Br-] IOLCXVTUBQKXJR-UHFFFAOYSA-M 0.000 description 4
- 238000004611 spectroscopical analysis Methods 0.000 description 4
- LYQFWZFBNBDLEO-UHFFFAOYSA-M caesium bromide Chemical compound [Br-].[Cs+] LYQFWZFBNBDLEO-UHFFFAOYSA-M 0.000 description 3
- 239000003344 environmental pollutant Substances 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 125000001309 chloro group Chemical group Cl* 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000003912 environmental pollution Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 235000011164 potassium chloride Nutrition 0.000 description 2
- 239000001103 potassium chloride Substances 0.000 description 2
- 238000011002 quantification Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- PGAPATLGJSQQBU-UHFFFAOYSA-M thallium(i) bromide Chemical compound [Tl]Br PGAPATLGJSQQBU-UHFFFAOYSA-M 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- 229910052984 zinc sulfide Inorganic materials 0.000 description 2
- 229910016036 BaF 2 Inorganic materials 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- 101100321670 Fagopyrum esculentum FA18 gene Proteins 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 description 1
- 229910001632 barium fluoride Inorganic materials 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- XQPRBTXUXXVTKB-UHFFFAOYSA-M caesium iodide Chemical compound [I-].[Cs+] XQPRBTXUXXVTKB-UHFFFAOYSA-M 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- -1 for example Chemical compound 0.000 description 1
- 238000009615 fourier-transform spectroscopy Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002957 persistent organic pollutant Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 150000003071 polychlorinated biphenyls Chemical class 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Molecular Biology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000000963A JP2001194306A (ja) | 2000-01-06 | 2000-01-06 | 化学物質検出方法及び装置 |
| KR1020017011285A KR20010103041A (ko) | 2000-01-06 | 2000-10-26 | 화학물질 검출 방법 및 장치 |
| DE2000184330 DE10084330T1 (de) | 2000-01-06 | 2000-10-26 | Nachweisverfahren und -vorrichtung für chemischen Stoff |
| PCT/JP2000/007499 WO2001050110A1 (fr) | 2000-01-06 | 2000-10-26 | Procede et appareil de mesure d'une substance chimique |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000000963A JP2001194306A (ja) | 2000-01-06 | 2000-01-06 | 化学物質検出方法及び装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001194306A true JP2001194306A (ja) | 2001-07-19 |
Family
ID=18530229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000000963A Pending JP2001194306A (ja) | 2000-01-06 | 2000-01-06 | 化学物質検出方法及び装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2001194306A (ko) |
| KR (1) | KR20010103041A (ko) |
| DE (1) | DE10084330T1 (ko) |
| WO (1) | WO2001050110A1 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002044696A1 (fr) * | 2000-12-01 | 2002-06-06 | Advantest Corporation | Procede et appareil de surveillance de l'environnement et appareil de production de semi-conducteur |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005035932A1 (de) * | 2005-07-28 | 2007-02-08 | Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG | Optischer Sensor für in-situ Messungen |
| CN106248560B (zh) * | 2016-10-09 | 2018-09-21 | 杨继新 | 二噁英在线检测装置 |
| HU231498B1 (hu) | 2019-04-04 | 2024-05-28 | Richter Gedeon Nyrt | Immunglobulinok affinitás kromatográfiájának fejlesztése kötést megelőző flokkulálás alkalmazásával |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57111435A (en) * | 1980-12-27 | 1982-07-10 | Horiba Ltd | Measuring device for absorption intensity of infrared ray by atr method |
| DE3422062A1 (de) * | 1984-06-14 | 1985-12-19 | Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe | Verfahren zur langzeitbestimmung und dauerueberwachung des schadstoffgehaltes von feststoffbeladenen abgasstroemen |
| CA2012030A1 (en) * | 1990-03-13 | 1991-09-13 | Ludmila L. Danylewych-May | Sample handling system for molecular analyser |
| JPH07218494A (ja) * | 1994-02-01 | 1995-08-18 | Takuma Co Ltd | ダイオキシンの測定分析方法及びその装置 |
| JPH08313430A (ja) * | 1995-05-18 | 1996-11-29 | Nippon Telegr & Teleph Corp <Ntt> | ガスセンサ |
| JPH09243601A (ja) * | 1996-03-07 | 1997-09-19 | Nkk Corp | 排ガス中の微量有機化合物の測定装置 |
| JPH10153591A (ja) * | 1996-11-20 | 1998-06-09 | Nkk Corp | ダイオキシン類の分析方法 |
| JP3361441B2 (ja) * | 1997-02-20 | 2003-01-07 | 本田技研工業株式会社 | 集じん装置の集じん効率測定装置 |
| JP2964998B2 (ja) * | 1997-06-13 | 1999-10-18 | 日本電気株式会社 | 大気中微量不純物の分析方法 |
| JPH11281540A (ja) * | 1998-01-28 | 1999-10-15 | Miura Co Ltd | ダイオキシン類の採取装置 |
-
2000
- 2000-01-06 JP JP2000000963A patent/JP2001194306A/ja active Pending
- 2000-10-26 DE DE2000184330 patent/DE10084330T1/de not_active Ceased
- 2000-10-26 WO PCT/JP2000/007499 patent/WO2001050110A1/ja not_active Application Discontinuation
- 2000-10-26 KR KR1020017011285A patent/KR20010103041A/ko not_active Application Discontinuation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002044696A1 (fr) * | 2000-12-01 | 2002-06-06 | Advantest Corporation | Procede et appareil de surveillance de l'environnement et appareil de production de semi-conducteur |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2001050110A1 (fr) | 2001-07-12 |
| KR20010103041A (ko) | 2001-11-17 |
| DE10084330T1 (de) | 2002-04-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20061109 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20091020 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20100309 |