JP2001183357A - Oxidation apparatus assembly for total organic carbon measuring system - Google Patents
Oxidation apparatus assembly for total organic carbon measuring systemInfo
- Publication number
- JP2001183357A JP2001183357A JP36907699A JP36907699A JP2001183357A JP 2001183357 A JP2001183357 A JP 2001183357A JP 36907699 A JP36907699 A JP 36907699A JP 36907699 A JP36907699 A JP 36907699A JP 2001183357 A JP2001183357 A JP 2001183357A
- Authority
- JP
- Japan
- Prior art keywords
- enclosure
- light source
- optical window
- window member
- sample water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003647 oxidation Effects 0.000 title claims abstract description 46
- 238000007254 oxidation reaction Methods 0.000 title claims abstract description 46
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title abstract description 11
- 229910052799 carbon Inorganic materials 0.000 title abstract description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 50
- 230000003287 optical effect Effects 0.000 claims abstract description 30
- 239000007800 oxidant agent Substances 0.000 claims description 26
- 239000007789 gas Substances 0.000 claims description 17
- 238000010926 purge Methods 0.000 claims description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 9
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 9
- 238000011071 total organic carbon measurement Methods 0.000 claims description 8
- 230000001590 oxidative effect Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- 239000005416 organic matter Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 abstract description 10
- 238000005259 measurement Methods 0.000 description 11
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- 238000006864 oxidative decomposition reaction Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000007539 photo-oxidation reaction Methods 0.000 description 3
- LCPVQAHEFVXVKT-UHFFFAOYSA-N 2-(2,4-difluorophenoxy)pyridin-3-amine Chemical compound NC1=CC=CN=C1OC1=CC=C(F)C=C1F LCPVQAHEFVXVKT-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000011941 photocatalyst Substances 0.000 description 2
- CHQMHPLRPQMAMX-UHFFFAOYSA-L sodium persulfate Substances [Na+].[Na+].[O-]S(=O)(=O)OOS([O-])(=O)=O CHQMHPLRPQMAMX-UHFFFAOYSA-L 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003295 industrial effluent Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000009279 wet oxidation reaction Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/18—Water
- G01N33/1826—Organic contamination in water
- G01N33/1846—Total carbon analysis
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
- Physical Water Treatments (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、水質検査に用いら
れる全有機炭素計測システム又はTOC計の改良に関
し、特に、全有機炭素計測システムの構成要素として、
試料水中の有機物を酸化させる酸化装置組立体の改良に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a total organic carbon measurement system or TOC meter used for water quality inspection, and more particularly, to a component of the total organic carbon measurement system,
The present invention relates to an improvement in an oxidizer assembly for oxidizing organic substances in a sample water.
【0002】[0002]
【従来の技術及び発明が解決しようとする課題】例え
ば、下水や工場排水について、特に有機物による水質の
汚染状態を計測するために全有機炭素計測方式の装置、
所謂、TOC計が用いられている。かかる方式では、汚
染度は水中に存在する有機物中の炭素量で表される。全
有機炭素(TOC)量を直接測定することはできないの
で、試料水中の有機物を酸化させ、これを二酸化炭素
(CO2)にした上でTOC量を求める必要がある。T
OC計には、例えば、紫外線酸化・導電率変化モニター
タイプ、高温酸化・二酸化炭素分析タイプ、湿式酸化・
二酸化炭素分析タイプのものがある。2. Description of the Related Art For example, an apparatus of a total organic carbon measuring method for measuring the state of pollution of water quality by sewage and industrial effluent, especially by organic matter,
A so-called TOC meter is used. In such a system, the degree of pollution is represented by the amount of carbon in organic matter present in water. Since it is not possible to directly measure the total organic carbon (TOC) amount, it is necessary to oxidize organic matter in the sample water and convert it into carbon dioxide (CO 2 ) before calculating the TOC amount. T
The OC meter includes, for example, an ultraviolet oxidation / conductivity change monitor type, a high temperature oxidation / carbon dioxide analysis type, a wet oxidation /
There is a carbon dioxide analysis type.
【0003】紫外線酸化・導電率変化モニタータイプの
測定方法を具体的に説明すると、当業者には周知のよう
に、測定ラインを流れる試料水の導電率をセンサで測定
した後、これに酸化処理を施して試料水中の有機物を有
機酸、例えばCO2 に変化させる。しかる後、試料水の
導電率をセンサで測定し、これらセンサで得た酸化処理
前後の導電率の差に基づいて既知のデータからTOC量
を求める。The measuring method of the ultraviolet oxidation / conductivity change monitor type will be described in detail. As is well known to those skilled in the art, the conductivity of sample water flowing through a measurement line is measured by a sensor, and then the sample is oxidized. To convert organic substances in the sample water into organic acids, for example, CO 2 . Thereafter, the conductivity of the sample water is measured by a sensor, and the TOC amount is determined from known data based on the difference between the conductivity before and after the oxidation treatment obtained by the sensor.
【0004】かかる全有機炭素計測システムでは代表的
には、酸化処理のために低圧水銀ランプ(以下、「UV
ランプ」ともいう)が用いられ、これは、測定ライン中
を流れている試料水に紫外線を照射するようになってい
る。しかしながら、このような従来型システムでは、測
定ライン中の試料水に含まれる有機物を紫外線によって
完全に酸化させるには、かなり長い照射時間が必要であ
り、計測に時間がかかっていた。[0004] In such a total organic carbon measuring system, a low-pressure mercury lamp (hereinafter referred to as "UV") is typically used for oxidation treatment.
A lamp is also used to irradiate the sample water flowing in the measurement line with ultraviolet rays. However, in such a conventional system, a considerably long irradiation time is required to completely oxidize the organic substances contained in the sample water in the measurement line by the ultraviolet rays, and the measurement takes time.
【0005】そこで、試料水中の有機物の酸化を促進す
るために光触媒を利用した紫外線酸化装置が開発され
た。より詳細に述べると、かかる紫外線酸化装置は、測
定ライン中に設けられていて、光触媒としての酸化チタ
ン(TiO2)で被覆された多数のガラスービーズを収
容した透明な管状部分と、これに隣接して配置されたU
Vランプとから成り、試料水が透明管状部分を通って流
れているときにUVランプが透明管状部分を通して紫外
線を試料水に照射するようになっている。また、試料水
中に酸化剤、例えば過硫酸ナトリウムを添加混入し、こ
れにUVランプからの紫外線を照射し、試料水中の有機
物の酸化を促進するようにした紫外線酸化装置が従来技
術として存在している。[0005] Therefore, an ultraviolet oxidation apparatus utilizing a photocatalyst has been developed to promote the oxidation of organic substances in the sample water. More specifically, such a UV oxidizer is provided in a measuring line and includes a transparent tubular portion containing a large number of glass beads coated with titanium oxide (TiO 2 ) as a photocatalyst, and an adjacent tubular portion. U placed
A UV lamp that irradiates the sample water with ultraviolet light through the transparent tubular portion as the sample water flows through the transparent tubular portion. In addition, there is a conventional UV oxidizing apparatus in which an oxidizing agent, for example, sodium persulfate is added and mixed into sample water, and the mixture is irradiated with ultraviolet light from a UV lamp to promote oxidation of organic substances in the sample water. I have.
【0006】しかしながら、光酸化触媒方式の紫外線酸
化装置は、特に低濃度TOC測定領域において光酸化触
媒の干渉に起因した測定誤差が生じるという欠点をもっ
ている。また、酸化剤添加方式の紫外線酸化装置では、
酸化剤が消耗すると共に或いはこれを交換する必要があ
り、そのためには測定作業を一時的に中断しなければな
らず、費用効果の点で問題があった。[0006] However, the ultraviolet oxidation apparatus of the photo-oxidation catalyst type has a drawback that a measurement error occurs due to interference of the photo-oxidation catalyst particularly in a low concentration TOC measurement region. In addition, in an oxidizing agent-added ultraviolet oxidation apparatus,
As the oxidant is consumed or needs to be replaced, the measuring operation has to be temporarily interrupted, which is cost-effective.
【0007】また、従来型全有機炭素計測システムに用
いられている低圧水銀ランプは、環境温度(ランプ点灯
雰囲気下)によりランプ照射効率が異なるので、ランプ
点灯雰囲気下の温度を一定に保持する必要があった。Further, the low-pressure mercury lamp used in the conventional total organic carbon measurement system has a different lamp irradiation efficiency depending on the environmental temperature (under the lamp lighting atmosphere). Therefore, it is necessary to keep the temperature in the lamp lighting atmosphere constant. was there.
【0008】かかる従来技術の欠点に鑑みて、試料水中
の全有機炭素を迅速且つ完全に酸化分解する全有機炭素
測定システム用の酸化装置組立体が要望されており、本
発明の目的は、かかる酸化装置組立体を提供することに
ある。[0008] In view of the drawbacks of the prior art, there is a need for an oxidizer assembly for a total organic carbon measurement system that rapidly and completely oxidizes and decomposes all organic carbon in sample water. An oxidizer assembly is provided.
【0009】[0009]
【課題を解決するための手段】本発明者は、種々の試行
錯誤を経て、光源として、TOCを効果的に分解するの
に必要な紫外線エネルギだけを放出するような極遠紫外
(真空紫外)ランプ、例えばエキシマランプを用い、こ
れからの非常に短い(例えば184.9nm未満の)準
単一波長の光を測定ライン中の試料水に照射すれば試料
水中の全有機炭素を非常に迅速且つ完全に酸化分解でき
ることを発見した。また、かかるエキシマランプは、1
84.9nm未満の準単一波長の光を高出力で放出でき
るので、酸化剤(過硫酸ナトリウム)や光酸化触媒(例
えばTiO2)が不要になるということも判明した。ま
た、かかるエキシマランプでは赤外線が発生しないので
試料水中の全有機炭素の酸化分解を低温下で行うことが
できる。SUMMARY OF THE INVENTION The inventor of the present invention has conducted various trials and errors to use an extreme ultraviolet (vacuum ultraviolet) as a light source to emit only ultraviolet energy necessary for effectively decomposing TOC. By irradiating the sample water in the measurement line with a very short (eg, less than 184.9 nm) quasi-single wavelength light using a lamp, for example, an excimer lamp, the total organic carbon in the sample water can be very quickly and completely removed. Can be oxidatively decomposed. In addition, such excimer lamps are 1
It has also been found that light of a quasi-single wavelength of less than 84.9 nm can be emitted at a high output, so that an oxidizing agent (sodium persulfate) and a photo-oxidation catalyst (for example, TiO 2 ) are not required. Further, since such an excimer lamp does not generate infrared rays, the oxidative decomposition of all organic carbon in the sample water can be performed at a low temperature.
【0010】かくして、本発明の要旨は、全有機炭素測
定システムに用いられる酸化装置組立体であって、非常
に短い準単一波長の光を放出する第1の光源、好ましく
はエキシマランプを収納した第1のエンクロージャと、
前記光源から隔離された状態で該光源に隣接して配置さ
れ、試料水入口及び試料水出口を備えた酸化チャンバと
を有し、該酸化チャンバは、一部が光学窓部材で構成さ
れ、前記光源からの前記光が、前記酸化チャンバの前記
光学窓部材を透過して前記酸化チャンバ内を流れている
試料水に当たり、該試料水中の有機物を酸化するように
なっていることを特徴とする酸化装置組立体にある。Thus, the gist of the present invention is an oxidizer assembly for use in a total organic carbon measurement system, which houses a first light source, preferably an excimer lamp, which emits very short quasi-single wavelength light. A first enclosure,
An oxidation chamber disposed adjacent to the light source in a state separated from the light source and having a sample water inlet and a sample water outlet, wherein the oxidation chamber is partially configured by an optical window member; The light from the light source passes through the optical window member of the oxidation chamber and strikes sample water flowing in the oxidation chamber, and oxidizes organic substances in the sample water. In the device assembly.
【0011】好ましくは、酸化チャンバは、ハウジング
内に構成され、該ハウジングは、前記エンクロージャに
着脱自在に取り付けられる。このように構成したことに
より、測定上の要件に合わせて、試料水の流通する酸化
チャンバの内容積を変更することができる。[0011] Preferably, the oxidation chamber is formed in a housing, and the housing is detachably attached to the enclosure. With this configuration, the internal volume of the oxidation chamber through which the sample water flows can be changed in accordance with the requirements for measurement.
【0012】本発明の別の特徴によれば、本発明の酸化
装置組立体は、非常に短い準単一波長の光を放出する第
2の光源を更に有し、該第2の光源は、第1の光源の反
対側で酸化チャンバから隔離された状態で該酸化チャン
バに隣接して配置され、第2の光源と酸化チャンバとの
間には第2の光学窓部材が設けられている。かくして、
酸化チャンバ内を通って流れている試料水は、酸化チャ
ンバの両側から準単一波長の光の照射を受けるので、試
料水中の有機物の完全酸化が一層促進されることにな
る。According to another feature of the invention, the oxidizer assembly of the invention further comprises a second light source that emits very short quasi-single wavelength light, the second light source comprising: A second optical window member is provided between the second light source and the oxidation chamber, the second optical window member being disposed adjacent to the oxidation chamber on a side opposite to the first light source and isolated from the oxidation chamber. Thus,
Since the sample water flowing through the inside of the oxidation chamber is irradiated with light of a quasi-single wavelength from both sides of the oxidation chamber, the complete oxidation of organic substances in the sample water is further promoted.
【0013】好ましくは、第2の光源は、第2のエンク
ロージャ内に収納され、該第2のエンクロージャは、第
1のエンクロージャの反対側で酸化チャンバのハウジン
グに着脱自在に取り付けられる。[0013] Preferably, the second light source is housed in a second enclosure, which is removably mounted on the housing of the oxidation chamber opposite the first enclosure.
【0014】本発明の別の特徴によれば、第1及び/又
は第2の光学窓部材は、第1及び/又は第2のエンクロ
ージャとハウジングとの間に着脱自在に且つ密封的に設
けられ、従って、光学窓部材の表面に不純物が付着した
り、経年劣化が生じた場合には、容易に交換することが
できる。光学窓部材は、184.9nm未満の波長の透
過率が比較的優れたMgFで作られている。According to another feature of the invention, the first and / or second optical window member is removably and hermetically provided between the first and / or second enclosure and the housing. Therefore, when impurities adhere to the surface of the optical window member or aging occurs, the optical window member can be easily replaced. The optical window member is made of MgF having a relatively excellent transmittance at a wavelength of less than 184.9 nm.
【0015】なお、184.9nm未満という短い波長
の光は、酸素分子によって吸収されるので、光源を収納
した第1及び/又は第2のエンクロージャ内には、短い
波長の光を吸収しない窒素ガス(N2)から成るパージ
ガスが循環して流れることが好ましい。Since light having a short wavelength of less than 184.9 nm is absorbed by oxygen molecules, nitrogen gas which does not absorb the light having a short wavelength is placed in the first and / or second enclosure containing the light source. It is preferable that the purge gas composed of (N 2 ) circulates and flows.
【0016】[0016]
【発明の実施の形態】図1は、本発明の教示に従って構
成された全有機炭素測定システム用の酸化装置組立体1
0の全体を示す。酸化装置組立体10は、筒状の不透明
なエンクロージャ12内に納められていて、非常に短い
準単一波長の光を放出する細長い光源14を有する。本
発明の好ましい実施形態では、かかる光源は、波長が約
200nm以下の領域の準単一(即ち、スペクトル幅が
比較的狭い)光を放出する極遠紫外(又は真空紫外)ラ
ンプ、例えばエキシマランプであるのがよく、最も好ま
しくは、184.9nm未満の準単一波長の光を放出す
るキセノン(Xe)エキシマランプ(ピークは、約17
2nm)である。かかるエキシマランプは、低圧水銀ラ
ンプとは対照的に、ランプ照射効率が環境温度の影響を
殆ど受けないのでランプ点灯雰囲気下の温度管理が不要
になるとういう利点を有している。FIG. 1 shows an oxidizer assembly 1 for a total organic carbon measurement system constructed in accordance with the teachings of the present invention.
0 is shown as a whole. The oxidizer assembly 10 has an elongated light source 14 housed in a tubular opaque enclosure 12 that emits very short quasi-single wavelength light. In a preferred embodiment of the present invention, such a light source is an extreme ultraviolet (or vacuum ultraviolet) lamp, such as an excimer lamp, which emits quasi-single (ie, has a relatively narrow spectral width) light in the region of about 200 nm or less. And most preferably a xenon (Xe) excimer lamp that emits light at a quasi-single wavelength less than 184.9 nm (peak of about 17
2 nm). Such an excimer lamp has an advantage that, in contrast to a low-pressure mercury lamp, the lamp irradiation efficiency is hardly affected by the ambient temperature, so that temperature control under a lamp lighting atmosphere is not required.
【0017】エキシマランプ14は、図面で見て右側に
位置したヘッド部から光を放出するよう配置されたヘッ
ドオン型であるのがよく、ヘッド部と反対側のそのベー
ス部からは一対のリード線16がエンクロージャ端面を
貫通して外部に延び、電源(図示せず)に電気的に接続
されている。The excimer lamp 14 is preferably of a head-on type arranged so as to emit light from a head portion located on the right side in the drawing, and a pair of leads is provided from its base portion opposite to the head portion. A line 16 extends outwardly through the enclosure end face and is electrically connected to a power supply (not shown).
【0018】本発明の好ましい実施形態では、試料水入
口18及び試料水出口20を備えたハウジング22がエ
ンクロージャ12の端部にそれぞれのフランジを介して
着脱自在にボルト止めされている。試料水採取部(図示
せず)に通じる測定ラインの入口管24及び出口管26
がそれぞれハウジング22の試料水入口18及び試料水
出口20に取付け具又は管継手28を介して連結されて
いる。In a preferred embodiment of the present invention, a housing 22 having a sample water inlet 18 and a sample water outlet 20 is removably bolted to the end of the enclosure 12 via respective flanges. Inlet pipe 24 and outlet pipe 26 of the measurement line leading to the sample water sampling section (not shown)
Are connected to the sample water inlet 18 and the sample water outlet 20 of the housing 22 via fittings or pipe joints 28, respectively.
【0019】図示の好ましい実施形態では、光学窓部材
30が、エンクロージャ12とハウジング22との間に
着脱自在に配置されている。かかる光学窓部材は、例え
ば光学窓材料として通常用いられている合成石英と比
べ、極遠紫外領域の波長、例えば184.9nm未満の
波長の透過率が大きいMgFで構成されたものであるこ
とが好ましい。図示のように、かかる光学窓部材24と
エンクロージャ12の端面との間には、好ましくはフッ
素樹脂、例えばテフロンで作られたOリングシール又は
ガスケット32が設けられ、更に、光学窓部材24とハ
ウジング22との間にも、好ましくはフッ素樹脂、例え
ばテフロンで作られたOリングシール又はガスケット3
4が設けられ、かくして、ハウジング22内には、エキ
シマランプとは隔離されていて、エキシマランプからの
放射光が光学窓部材24を通して照射される酸化チャン
バ36が構成されている。エンクロージャ12、ハウジ
ング22及び光学窓部材24を一体に形成してもよい
が、図示のように、ハウジング22を、エキシマランプ
14を収容したエンクロージャに光学窓部材30を挟ん
で着脱自在に締結することにより、試料水中の全有機炭
素に関する測定上の要件に応じてハウジング内の酸化チ
ャンバの内容積を変更できることは当業者であれば理解
されよう。また、光学窓部材30の表面への不純物の付
着や経年劣化により交換が必要な場合、これを迅速に新
品の光学窓部材に迅速に交換でき、測定手業の中断時間
が最小限に抑えられることは理解されよう。なお、Oリ
ング34は、試料水の性状によってはメタルシールタイ
プのものであるのがよい場合がある。なお、試料水中の
不純物又は有機化合物がかかるハウジング22の内部壁
に付着しにくくするためにハウジング内部壁に電解研磨
処理を施すのがよい。In the preferred embodiment shown, an optical window member 30 is removably disposed between the enclosure 12 and the housing 22. Such an optical window member may be made of, for example, MgF having a large transmittance in a wavelength in a far-ultraviolet region, for example, a wavelength of less than 184.9 nm, as compared with synthetic quartz which is generally used as an optical window material. preferable. As shown, an O-ring seal or gasket 32, preferably made of fluororesin, e.g., Teflon, is provided between the optical window member 24 and the end face of the enclosure 12, and further, the optical window member 24 and the housing are provided. 22 and an O-ring seal or gasket 3 preferably made of fluororesin, for example Teflon.
Thus, an oxidation chamber 36 is provided in the housing 22, which is isolated from the excimer lamp and is irradiated with light emitted from the excimer lamp through the optical window member 24. Although the enclosure 12, the housing 22, and the optical window member 24 may be integrally formed, as shown, the housing 22 is detachably fastened to the enclosure containing the excimer lamp 14 with the optical window member 30 interposed therebetween. Those skilled in the art will appreciate that the internal volume of the oxidation chamber in the housing can be changed according to the measurement requirements for total organic carbon in the sample water. Further, when replacement is necessary due to the attachment of impurities to the surface of the optical window member 30 or deterioration over time, this can be quickly replaced with a new optical window member, and the interruption time of the measurement operation can be minimized. It will be understood. The O-ring 34 may be of a metal seal type depending on the properties of the sample water. In order to make it difficult for impurities or organic compounds in the sample water to adhere to the inner wall of the housing 22, it is preferable to subject the inner wall of the housing to electropolishing.
【0020】上述した200nm未満の波長は、一般に
酸素分子により吸収されやすく、換言すると酸素がオゾ
ンになり、これに起因しエキシマランプの照射効率を低
減させるので、エキシマランプ14を収納したエンクロ
ージャ12の中空部内にはパージガスを常時循環させる
のがよく、このためにエンクロージャには図示のように
互いに適当な間隔を置いてパージガス入口38及び出口
40が設けられている。パージガスとして、上記のよう
な短波長の光に対する吸収性及び反応性の低い窒素ガス
を用いるのがよい。かくして窒素ガス源に通じるパージ
ガス入口ライン42をエンクロージャ12のパージガス
入口38に連結すると共にパージガス出口ライン44を
エンクロージャ12のパージガス出口40に連結してエ
ンクロージャ12内のエキシマランプの周りに窒素ガス
を常時流通させると、エキシマランプから放出された光
がそれほど減衰することなく光学窓部材30を透過して
酸化チャンバ内を流れている試料水に照射されるので、
試料水中の有機物の酸化分解効率が良好である。変形例
として、図示していないが、窒素ガスを上述のように循
環構成にしないで、エキシマランプ14を収納したエン
クロージャ12の中空部内に封入しても合格レベルの有
機物酸化分解効果が得られる。この場合、当然のことな
がら、図1及び図2に示したエンクロージャ12への窒
素ガスの封入後、パージガス入口38及び出口40は施
栓されることになる。The above-mentioned wavelength of less than 200 nm is generally easily absorbed by oxygen molecules, in other words, oxygen becomes ozone, which reduces the irradiation efficiency of the excimer lamp. The purge gas may be constantly circulated in the hollow portion, and for this purpose, the enclosure is provided with a purge gas inlet 38 and an outlet 40 at appropriate intervals as shown in the figure. As the purge gas, it is preferable to use a nitrogen gas having low absorptivity and reactivity with respect to light having a short wavelength as described above. Thus, the purge gas inlet line 42 leading to the nitrogen gas source is connected to the purge gas inlet 38 of the enclosure 12 and the purge gas outlet line 44 is connected to the purge gas outlet 40 of the enclosure 12 to constantly flow nitrogen gas around the excimer lamp in the enclosure 12. When this is done, the light emitted from the excimer lamp passes through the optical window member 30 without much attenuation and is irradiated on the sample water flowing in the oxidation chamber.
Good oxidative decomposition efficiency of organic matter in sample water. As a modification, although not shown, even if the nitrogen gas is not circulated as described above and is enclosed in the hollow portion of the enclosure 12 accommodating the excimer lamp 14, an acceptable level of organic substance oxidative decomposition effect can be obtained. In this case, it goes without saying that the purge gas inlet 38 and the outlet 40 are plugged after the nitrogen gas is sealed in the enclosure 12 shown in FIGS. 1 and 2.
【0021】図2は、試料水中の有機物の酸化分解を一
層促進するよう構成された本発明の変形実施形態として
の酸化装置組立体100を示している。図2で分かるよ
うに、この酸化装置組立体100は、図1の酸化装置組
立体10と個々の部品に関しては構成が同一であり(従
って、図1の構成部品と同一又は対応の構成部品には、
図で見て左側のものには符号にプライム記号(′)、右
側のものには符号に(″)をそれぞれ付けている)、酸
化チャンバ36の互いに反対側にヘッドオン型のエキシ
マランプ14′,14″をそれぞれ収納したエンクロー
ジャ12′,12″を対向して配置し、酸化チャンバ3
6内を通って流れている試料水に両方から光を照射する
ようにしたものである。この場合も又、エンクロージャ
12′,12″は酸化チャンバハウジング22′にフラ
ンジを介して締結され、これらの間にはそれぞれ光学窓
部材30′,30″が実質的に同じ仕方で密封的に且つ
交換自在に設けられている。図示のように、エンクロー
ジャ12′のパージガス出口40′と、反対側のエンク
ロージャ12″のパージガス入口38″は、連結管46
で連結されており、従って、パージガス入口ライン4
2′内の窒素ガスから成るパージガスは、入口38′を
経てエンクロージャ12′内へ流入し、エキシマランプ
14′の周りを流れた後、エンクロージャのパージガス
出口40′から連結管46に流れ、そしてパージガス入
口38″を経て反対側のエンクロージャ12″に流入
し、エキシマランプ14″の周りを流れ、そしてパージ
ガス出口40″及びパージガス出口ライン44″を経て
エンクロージャ12″から流出するようになっている。FIG. 2 shows an oxidizer assembly 100 as a modified embodiment of the present invention, which is configured to further promote the oxidative decomposition of organic substances in the sample water. As can be seen in FIG. 2, the oxidizer assembly 100 is identical in configuration to the individual components of the oxidizer assembly 10 of FIG. 1 (therefore, the oxidizer assembly 100 has the same or corresponding components as those of FIG. 1). Is
In the drawing, the left side is denoted by a prime symbol ('), and the right side is denoted by a symbol (")), and a head-on type excimer lamp 14' is provided on the opposite side of the oxidation chamber 36. , 14 ", respectively, are arranged facing each other, and the oxidation chamber 3
The sample water flowing through the inside 6 is irradiated with light from both sides. Again, the enclosures 12 ', 12 "are fastened to the oxidation chamber housing 22' via flanges, between which optical window members 30 ', 30", respectively, are hermetically and in substantially the same manner. It is provided interchangeably. As shown, the purge gas outlet 40 'of the enclosure 12' and the purge gas inlet 38 'of the opposite enclosure 12 "
And therefore the purge gas inlet line 4
A purge gas comprising nitrogen gas in 2 'flows into the enclosure 12' via an inlet 38 ', flows around the excimer lamp 14', flows from the purge gas outlet 40 'of the enclosure to the connecting pipe 46, and It enters the opposite enclosure 12 "via inlet 38", flows around excimer lamp 14 "and exits enclosure 12" via purge gas outlet 40 "and purge gas outlet line 44".
【0022】本発明を好ましい実施形態を用いて詳細に
説明したが、当業者であれば、開示した形態について種
々の設計変更を想到できるので、本発明の範囲は、上述
の説明ではなく、特許請求の範囲の記載及びその均等範
囲に基づいて定められる。Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art will be able to conceive various modifications of the disclosed form. It is determined based on the description in the claims and the equivalents thereof.
【図1】水質検査に利用されている全有機炭素測定シス
テムに用いられる本発明の酸化装置組立体の一実施形態
を示す図であり、酸化チャンバの一方の側でエンクロー
ジャ内に設けられたヘッドオン型エキシマランプを示す
部分断面側面図である。FIG. 1 shows an embodiment of the oxidizer assembly of the present invention used in a total organic carbon measurement system used for water quality inspection, with a head provided in an enclosure on one side of an oxidation chamber. It is a partial section side view showing an ON type excimer lamp.
【図2】本発明の変形実施形態としてのデュアルエキシ
マランプ利用型酸化装置組立体を示す図1と同様な図で
あり、酸化チャンバの互いに反対側に設けられていて、
エンクロージャ内に収納されたヘッドオン型エキシマラ
ンプを示す図である。FIG. 2 is a view similar to FIG. 1 showing a dual excimer lamp based oxidizer assembly as an alternative embodiment of the present invention, provided on opposite sides of the oxidation chamber;
FIG. 2 is a diagram showing a head-on type excimer lamp housed in an enclosure.
10,100 酸化装置組立体 12,12′,12″ エンクロージャ 14,14′,14″ ヘッドオン型エキシマランプ 22,22′ ハウジング 24 試料水入口管 26 試料水出口管 30,30′,30″ 光学窓部材 36 酸化チャンバ 10, 100 Oxidizer assembly 12, 12 ', 12 "Enclosure 14, 14', 14" Head-on type excimer lamp 22, 22 'Housing 24 Sample water inlet tube 26 Sample water outlet tube 30, 30', 30 "Optical Window member 36 Oxidation chamber
─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成12年1月6日(2000.1.6)[Submission date] January 6, 2000 (200.1.6)
【手続補正1】[Procedure amendment 1]
【補正対象書類名】図面[Document name to be amended] Drawing
【補正対象項目名】全図[Correction target item name] All figures
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【図1】 FIG.
【図2】 FIG. 2
Claims (9)
化装置組立体であって、非常に短い準単一波長の光を放
出する光源を収納したエンクロージャと、前記光源から
隔離された状態で該光源に隣接して配置され、試料水入
口及び試料水出口を備えた酸化チャンバとを有し、該酸
化チャンバは、一部が光学窓部材で構成され、前記光源
からの前記光が、前記酸化チャンバの前記光学窓部材を
透過して前記酸化チャンバ内を流れている試料水に当た
り、該試料水中の有機物を酸化するようになっているこ
とを特徴とする酸化装置組立体。An oxidizer assembly for use in a total organic carbon measurement system, comprising: an enclosure containing a light source that emits very short quasi-single wavelength light; and the light source isolated from the light source. And an oxidation chamber provided with a sample water inlet and a sample water outlet, the oxidation chamber being partially constituted by an optical window member, and the light from the light source being transmitted to the oxidation chamber. An oxidizing apparatus assembly for oxidizing organic matter in the sample water by hitting the sample water flowing through the optical window member and flowing in the oxidation chamber.
成され、該ハウジングは、前記エンクロージャに着脱自
在に取り付けられていることを特徴とする請求項1記載
の酸化装置組立体。2. The oxidizer assembly according to claim 1, wherein the oxidizing chamber is formed in a housing, and the housing is detachably attached to the enclosure.
2の光源を更に有し、該第2の光源は、前記光源の反対
側で前記酸化チャンバから隔離された状態で該酸化チャ
ンバに隣接して配置され、前記第2の光源と前記酸化チ
ャンバとの間には第2の光学窓部材が設けられているこ
とを特徴とする請求項1又は2記載の酸化装置組立体。3. A light source that emits very short quasi-single wavelength light, the second light source being isolated from the oxidation chamber on the opposite side of the light source. 3. The oxidizer assembly according to claim 1, wherein a second optical window member is provided between the second light source and the oxidation chamber, the second optical window member being provided adjacent to the chamber.
ャ内に収納され、該第2のエンクロージャは、前記エン
クロージャの反対側で前記酸化チャンバの前記ハウジン
グに着脱自在に取り付けられていることを特徴とする請
求項3記載の酸化装置組立体。4. The method according to claim 1, wherein said second light source is housed in a second enclosure, said second enclosure being removably mounted to said housing of said oxidation chamber on an opposite side of said enclosure. The oxidizer assembly of claim 3, wherein:
と前記ハウジングとの間に着脱自在に且つ密封的に設け
られていることを特徴とする請求項1〜4のうち何れか
一に記載の酸化装置組立体。5. The oxidation according to claim 1, wherein the optical window member is detachably and hermetically provided between the enclosure and the housing. Equipment assembly.
ることを特徴とする請求項1〜5のうち何れか一に記載
の酸化装置組立体。6. The oxidizer assembly according to claim 1, wherein said optical window member is made of MgF.
満の光を放出するエキシマランプであることを特徴とす
る請求項1又は3記載の酸化装置組立体。7. The oxidizer assembly according to claim 1, wherein the light source is an excimer lamp that emits light having a wavelength of less than about 184.9 nm.
内には窒素ガスから成るパージガスが循環して流れてい
ることを特徴とする請求項1〜4のうち何れか一に記載
の酸化装置組立体。8. The oxidizer assembly according to claim 1, wherein a purge gas made of nitrogen gas circulates and flows in the enclosure accommodating the light source.
内には窒素ガスが封入されていることを特徴とする請求
項1〜4のうち何れか一に記載の酸化装置組立体。9. The oxidizer assembly according to claim 1, wherein a nitrogen gas is sealed in the enclosure accommodating the light source.
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JP36907699A JP3507744B2 (en) | 1999-12-27 | 1999-12-27 | Oxidizer assembly for total organic carbon measurement system |
Applications Claiming Priority (1)
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---|---|---|---|
JP36907699A JP3507744B2 (en) | 1999-12-27 | 1999-12-27 | Oxidizer assembly for total organic carbon measurement system |
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Publication Number | Publication Date |
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JP2001183357A true JP2001183357A (en) | 2001-07-06 |
JP3507744B2 JP3507744B2 (en) | 2004-03-15 |
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