JP2001174982A5 - - Google Patents

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Publication number
JP2001174982A5
JP2001174982A5 JP2000161501A JP2000161501A JP2001174982A5 JP 2001174982 A5 JP2001174982 A5 JP 2001174982A5 JP 2000161501 A JP2000161501 A JP 2000161501A JP 2000161501 A JP2000161501 A JP 2000161501A JP 2001174982 A5 JP2001174982 A5 JP 2001174982A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000161501A
Other versions
JP2001174982A (ja
JP4529236B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000161501A priority Critical patent/JP4529236B2/ja
Priority claimed from JP2000161501A external-priority patent/JP4529236B2/ja
Publication of JP2001174982A publication Critical patent/JP2001174982A/ja
Publication of JP2001174982A5 publication Critical patent/JP2001174982A5/ja
Application granted granted Critical
Publication of JP4529236B2 publication Critical patent/JP4529236B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000161501A 1999-06-10 2000-05-31 基板依存性改善剤 Expired - Fee Related JP4529236B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000161501A JP4529236B2 (ja) 1999-06-10 2000-05-31 基板依存性改善剤

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP11-163191 1999-06-10
JP11-285662 1999-06-10
JP16319199 1999-06-10
JP28566299 1999-10-06
JP2000161501A JP4529236B2 (ja) 1999-06-10 2000-05-31 基板依存性改善剤

Publications (3)

Publication Number Publication Date
JP2001174982A JP2001174982A (ja) 2001-06-29
JP2001174982A5 true JP2001174982A5 (ja) 2007-06-28
JP4529236B2 JP4529236B2 (ja) 2010-08-25

Family

ID=27322126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000161501A Expired - Fee Related JP4529236B2 (ja) 1999-06-10 2000-05-31 基板依存性改善剤

Country Status (1)

Country Link
JP (1) JP4529236B2 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4789599B2 (ja) * 2004-12-06 2011-10-12 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． フォトレジスト組成物
JP5047030B2 (ja) 2008-03-26 2012-10-10 富士フイルム株式会社 レジスト組成物及びそれを用いたパターン形成方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3271393B2 (ja) * 1993-09-16 2002-04-02 ジェイエスアール株式会社 感放射線性樹脂組成物
JP3360267B2 (ja) * 1996-04-24 2002-12-24 信越化学工業株式会社 化学増幅ポジ型レジスト材料及びパターン形成方法
JP3944979B2 (ja) * 1997-11-14 2007-07-18 Ｊｓｒ株式会社 感放射線性樹脂組成物

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