JP2001174305A - Flow and flow velocity measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a flow measuring device preventing the accumulation of a contaminant on a detecting element and capable of measuring a backflow as well as a forward flow. SOLUTION: A guiding-in port 25 and a guiding-out port 26 opened on planes perpendicular to the flowing direction of a main flow M to be detected are formed face to face at both ends of the outer peripheral section of the outer wall 23 of a branch tube 20. A plurality of branch passages 28a, 28b branched and met in the branch tube 20 are formed by a curved partition 27 in the branch tube 20. Corrugation sections 32, 33 are formed inside both end sections of the outer wall 23 respectively to block the inlet and the outlet of the outer peripheral side branch passage 28a. Contractions are formed on a passage between the guiding-in port 25 and the inlet of the branch passage 28a and a passage between the guiding-out port 26 and the outlet of the branch passage 28a respectively, thus a nearly Q-shaped passage is formed in the branch tube 20. The detecting element 31 is fitted to the bottom section of the outer wall 23 of the branch tube 20 to be exposed to the flow in the outer peripheral side branch passage 28a, and a downflow DW further separated from a devided flow D obliquely collides with its detecting face.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for measuring various quantities related to flow, and more particularly to a flow rate and flow velocity measurement using a temperature-dependent detection element and / or a detection element integrally formed on a semiconductor chip. Regarding the device, for example, suitable as a mass flow sensor for combustion control of a vehicle or an industrial engine, or a mass flow sensor for an industrial air conditioning system or a compressor compressed air supply system, and also a flow sensor for controlling the air-fuel ratio of a household gas stove. It relates to an applied measuring device.

[0002]

2. Description of the Related Art In a mass flow sensor for controlling combustion of an engine for a vehicle, an output change due to accumulation of contaminants on a detection element is a serious problem. In order to solve this problem, Japanese Patent Application Laid-Open No. HEI 8-193,863 discloses that an auxiliary passage and an appropriate opening for diverting some air from the main air flow are provided in the housing structure to prevent contaminants from entering the sensing element. To prevent the effects of accumulation and backflow ".

[0003]

However, the housing structure of the sensor disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 8-193864 is effective for preventing the accumulation of contaminants whose density is much higher than that of the measurement fluid. Contaminants with a low target density may penetrate into the shunt and accumulate on the sensing element. Further, in this sensor, it is difficult to measure the backflow because the influence of the backflow is excluded.

However, in recent years, in order to comply with emission regulations and the like, there has been a demand for a more sophisticated mass flow sensor for combustion control, for example, a sensor capable of detecting both forward flow and reverse flow. Conventionally, a flow path structure of a sensor capable of detecting a reverse flow has also been proposed.However, when measuring a reverse flow, a detection output at the same level as that of a forward flow has not been obtained, and the detection output correction by a control circuit is not performed. It is considered necessary.

[0005] It is an object of the present invention to provide a flow measuring device which prevents the accumulation of contaminants on the sensing element. It is a further object of the present invention to provide a flow-related measuring device capable of measuring backflow as well as forward flow.

[0006]

According to a first aspect of the present invention, there is provided a measuring apparatus including a U-shaped curved branch pipe into which a flow in a main flow pipe to be detected is introduced. A diversion pipe, an inlet of the diversion pipe formed on the outer peripheral side of the diversion pipe, and opening on a surface substantially orthogonal to a flow direction in the main flow pipe; a partition formed in the diversion pipe; A plurality of branch flow paths divided by the partition so as to branch and merge with each other in the pipe; and a flow in a branch flow path formed on an outer peripheral side of the branch pipe among the plurality of branch flow paths. And a detecting element for detecting an amount related to the flow.

[0007] In this measuring apparatus, the measuring fluid introduced into the diversion tube is largely changed in the diversion tube until it reaches the branch flow channel inlet where the detection element is located. For this reason, contaminants with large inertia are prevented from entering the branch flow path where the detection element is located. In addition, by further dividing by a partition in the dividing pipe,
The number of Reynolds nozzles in the flow toward the detection element can be reduced (the cross-sectional area of the flow path is reduced), and the flow in the vicinity of the detection element is rectified, so that highly accurate detection can be performed. That is, according to this measuring device, by effectively branching and turning the measuring fluid, both the contaminants having a higher density and the contaminants having a lower density than the measuring fluid mixed in the measuring fluid can be obtained. In addition, it is possible to provide a measuring device that prevents any of these contaminants from accumulating on the detection surface of the detection element, has excellent contamination resistance, and has a small change in detection output over a long period of time.

[0008] In the measuring device according to the second aspect of the present invention, the diversion pipe has a flow path structure which is basically symmetric about the detection element. In this way, according to the flow path structure of the symmetric structure, since the flow in the branch flow path for the forward flow and the flow in the branch flow path for the reverse flow are symmetric, the detection output in the case of the reverse flow is particularly corrected. It is no longer necessary. In particular, by configuring the measuring device based on the first and second viewpoints, it is possible to obtain not only excellent contamination resistance but also a similar detection output level for both the forward flow and the reverse flow.

A measuring apparatus according to a third aspect of the present invention is arranged so as to be exposed to a flow in a branch flow path formed on an inner peripheral side or an intermediate portion of a branch pipe among a plurality of branch flow paths, It has a detection element for detecting an amount related to the flow, and a throttle formed in a flow path between an inlet of the flow dividing pipe and an entrance of the branch flow path where the detection surface of the detection element is exposed to the flow. in this way,
When exposing the detection element to the inner peripheral side or the intermediate branch flow path where the direction change of the flow introduced into the branch pipe inlet is relatively small as compared with the outer peripheral side branch flow path, the above-described restrictor is provided. Thereby, accumulation of contaminants on the detection element is suitably prevented.

A measuring device according to a fourth aspect of the present invention is basically a U-shaped device in which a flow in a main flow pipe to be detected is introduced.
A diversion pipe provided with a diversion pipe curved in a U-shape, and an introduction port of the diversion pipe formed on one end outer peripheral side of the diversion pipe and opening on a surface substantially orthogonal to a flow direction in the main flow pipe, An outlet of the diversion tube formed at the top of the other end of the diversion tube and opening on a plane substantially parallel to the flow direction in the main flow tube, and formed in the diversion tube, one end of which is near the inlet, A partition whose other end extends away from the outlet, a plurality of branch flow paths divided and formed by the partition so as to branch and merge with each other in the flow dividing pipe, and the branch flow of the plurality of branch flow paths A detection element arranged to be exposed to the flow in the branch flow path formed on the outer peripheral side of the pipe, and detecting an amount related to the flow. Since this measuring device has an asymmetrical channel structure, it is particularly suitable for measuring a forward flow.

[0011] The measuring device according to a fifth aspect of the present invention is formed so that the flow introduced into the diversion tube is changed in direction and the detection element flows into the branch channel exposed to the flow. , The inlet of the branch pipe and the inlet of the branch channel,
Having.

[0012] A measuring device according to a sixth aspect of the present invention is arranged so that the flow introduced into the diversion tube is changed in direction and the detection element flows into the branch channel exposed to the flow. A throttle formed in a flow passage between the mouth and the entrance of the branch flow passage.

According to a seventh aspect of the present invention, there is provided a measuring apparatus, comprising: a flow path of a branch flow path on which a detection element is disposed, on a wall facing a detection element of a partition, from upstream to downstream of the detection element. Has a venturi provided so as to be narrowed in the vicinity of the center of the detection element.

[0014] Other aspects and features of the present invention are as described in each claim, and the duplicate description is omitted by quoting the same. Thus, the features of each claim are deemed to be as set forth herein. In addition, each dependent claim does not contravene the principle of the invention described in each independent claim.
Applicable to each independent claim, and dependent claims may apply to other dependent claims.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described.

In a preferred embodiment of the present invention,
The end of the partition does not extend to just below the inlet of the diversion tube, and the entrance of the outer peripheral branch flow path where the detection element is exposed to the flow does not open immediately below the introduction port of the diversion tube. This prevents contaminants from traveling straight from the branch pipe inlet to the branch flow path inlet.

In a preferred embodiment of the present invention,
A bypass flow path is formed that short-circuits the inlet and outlet of the branch pipe without passing through a plurality of branch flow paths. by this,
The flow introduced into the diversion tube is stabilized, and the measurement fluid (flow in the main flow tube) is easily taken into the diversion tube.
In particular, when the flow path structure of the branch pipe is formed symmetrically with respect to the detection element, by providing the bypass flow path or an orifice having a reduced flow cross-sectional diameter of the bypass flow path, both the forward flow and the reverse flow are provided. In addition, the flow reaching the detection element can be stabilized.

In a preferred embodiment of the present invention,
An orifice is provided in the bypass flow path, and the flow rate of the measurement fluid toward the detection element is set by the amount of protrusion of the flow path wall forming the orifice or the opening area of the orifice.
Thereby, the flow rate toward the detection element can be quantitatively controlled.

In a preferred embodiment of the present invention,
Means for forming a flow that obliquely strikes the detection surface of the detection element is provided in the flow dividing tube. It is considered that the flow to be detected is constantly supplied to the detection surface of the detection element by the flow control means, and the flow to be detected reliably flows on the detection surface. In addition, since the occurrence of eddy currents and separation near the detection surface is suppressed, it is considered that detection accuracy and reproducibility are improved.

In a preferred embodiment of the present invention,
Flow obliquely hitting the detection surface of the detection element (down flow)
In addition, as a flow control means for forming a flow obliquely to the detection surface, a flow path surface protruding from the detection surface is provided at least upstream, or upstream and / or downstream of the detection element. The form of the above-mentioned protuberance may be any as long as it can form a flow obliquely hitting the detection surface. Is done.

In a preferred embodiment of the present invention,
At the inflection portion of the shunt tube (detection tube), the detection surface of the detection element is exposed inside the shunt tube. More preferably, an inflection pipe (shunt pipe) is attached in a direction orthogonal to the main flow pipe (measurement pipe), and a detecting element is provided at an inflection portion (bending portion, portion where the flow path is bent) of the inflection tube. Provided. Alternatively, the detection element is arranged at a portion where the flow of the flow dividing tube is reversed or a portion where the direction of the flow is largely changed or in the vicinity thereof. Preferably, the detection surface of the detection element is exposed to a portion where the flow in the flow dividing pipe is fast. Preferably, the flow is restricted in the flow dividing pipe, and then the detection surface of the detection element is exposed at or near a portion where the flow is deflected.

In a preferred embodiment of the present invention,
The following detection element is used. That is, this detection element is basically a semiconductor chip provided with four thin film resistors. More specifically, a diaphragm portion and a rim portion are provided on the semiconductor layer. The diaphragm section has (1) an upstream temperature sensor and (2) a downstream temperature sensor,
(3) A heater is provided between the upstream temperature sensor. On the other hand, the rim is provided with (4) an ambient temperature sensor. The diaphragm is made extremely thin to achieve thermal insulation.

Next, the principle of detecting various quantities relating to the flow such as the flow velocity and the flow rate using the detection element will be described below. (1) The power supplied to the heater is controlled so that the heater always has a constant temperature difference with respect to the ambient temperature. (2) Therefore, when there is no flow, the temperatures of the upstream temperature sensor and the downstream temperature sensor are substantially equal. (3) However, if there is a flow, the temperature of the upstream temperature sensor decreases because heat escapes from its surface. The temperature change of the downstream temperature sensor is smaller than that of the upstream temperature sensor because the heat input from the heater increases. Note that the temperature of the downstream temperature sensor may increase. (4) The flow rate, the flow velocity, and the like are detected based on the temperature difference between the upstream temperature sensor and the downstream temperature sensor, and the flow direction is detected from the sign of the temperature difference. The temperature difference can be detected based on a change in electric resistance due to temperature.

In a preferred embodiment of the present invention,
The sensing element measures a flow-related quantity including at least a flow rate and / or a flow rate based on the temperature.

In a preferred embodiment of the present invention, the measuring device according to the present invention is installed in an intake system of an engine of various vehicles, and is used for measuring an intake air amount of an engine mounted on a two-wheel or four-wheel vehicle. Can be applied. For example, the measuring device according to the present invention is installed between an air cleaner and a throttle valve in an intake system of an engine mounted on a four-wheel vehicle. Further, the measuring device according to the present invention is attached to a two-wheeled vehicle intake pipe (air funnel) connected to a cylinder in an intake system of an engine mounted on a two-wheeled vehicle in order to measure a flow rate or a flow velocity of intake air. .

[0026]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In order to further clarify the preferred embodiments of the present invention described above, an embodiment of the present invention will be described below with reference to the drawings.

Embodiment 1 FIG. 1 is an explanatory view of a measuring apparatus according to Embodiment 1 of the present invention, and shows a longitudinal section along an axial direction of a mainstream pipe. Referring to FIG. 1, a main flow M to be measured flows in the main flow pipe 1. The pipe wall of the main flow pipe 1 can take in a diversion D separated from the main flow M,
A branch pipe 2 is mounted orthogonally to the pipe axis direction of the main flow pipe 1. In the branch pipe 2, a branch pipe channel curved in a substantially U-shape is formed by an introduction plate 4 (main separator) extending in a direction substantially perpendicular to the flow direction of the main flow M (axial direction of the main flow pipe 1). Have been. At one end of the outer wall 3 of the branch pipe 2, an inlet (also serving as an outlet) that opens on a surface substantially orthogonal to the flow direction of the main flow M.
A discharge port (also referred to as an inlet) 6 is formed on a top outer wall of the branch pipe 2 extending along the axial direction of the main flow pipe 1 so as to open in a plane substantially parallel to the flow direction of the main flow M. ing.

Further, a partition 7 which is curved in accordance with the curved shape of the flow dividing tube 2 is formed in the flow dividing tube 2. A plurality of branch channels 8a and 8b are formed in the branch pipe 2 by the partition 7 so as to branch and merge with each other. A detection element 11 is mounted on a bottom outer wall of the flow dividing tube 2 via a substrate 10 so as to be exposed to a flow in the branch flow path 8a on the outer peripheral side. As described above, the detection element 11 is arranged at the inflection portion of the branch pipe 2 and is located outside the main flow pipe 1 for easy replacement.

FIG. 2 shows an inlet 5 of the flow dividing pipe 2 shown in FIG.
It is the elements on larger scale which expanded the vicinity. As shown in FIG.
The end of the partition 7 on the inlet 5 side is located at a position retracted by a distance L from the inner wall of the opening 7 of the inlet 5 on the side of the partition 7. That is, the end of the partition 7 does not extend directly below the inlet 5, and at least the inlet of the outer peripheral side branch channel 8 a does not open directly below the inlet 5.

Further, on the outer wall 3 forming the branch flow path 8a on the outer peripheral side, the branch flow path 8a
Ridges 3a and 3b projecting toward the center of the flow cross section of FIG. A projection 7a protruding toward the detection surface is provided on a portion of the partition 7 facing the detection surface of the detection element 11.
Are formed. The flow path surface on the raised portions 3a, 3b is formed as a concave curved surface. The flow path surface of the protruding portion 7 a is formed in a convex curved surface protruding toward the detection element 11. With such a flow path structure, a down flow DW that flows obliquely toward the detection surface of the detection element 11 is formed.

Next, the operation of the measuring device will be described.
FIG. 3 is a partially enlarged operation view in which the vicinity of the inlet 5 of the flow dividing pipe 2 shown in FIG. 1 is enlarged.

Referring to FIG. 1 and FIG. 3, a branch stream D separated from the main stream M is taken into the branch pipe 2 from the inlet 5. The flow of the split flow D is changed in the split pipe 2 and flows into the outer and inner branch flow paths 8a and 8b. However, the contaminant P having a higher density than the measurement fluid is
It is not possible to completely follow the change in the flow direction, and it goes straight by inertia and accumulates directly below the inlet 5, or enters the inner peripheral branch channel 8b. The reason is that the end flow paths of the branch flow paths 8a and 8b extend in a direction substantially orthogonal to the flow direction of the branch flow D, so that the contaminants P having a higher density than the measurement fluid can change the flow direction. This is because the intrusion of the contaminant P into the branch flow path 8a on the outer peripheral side near the inlet 5 is particularly prevented. This prevents the contaminant P from being accumulated on the detection element 11 disposed on the outer peripheral side branch flow path 8a (requiring a sharp change in flow direction). In addition, according to the flow path structure of the branch pipe 2, the forward flow flowing from the inlet 5 to the outlet 6 can be suitably measured.

Embodiments 2 to 4 Next, as Embodiments 2 to 4, various modifications of the embodiment 1 will be described. FIGS. 4 to 6 are partially enlarged views in which the vicinity of the branch pipe inlet is enlarged in order to explain the measuring devices according to Examples 2 to 4 of the present invention, respectively. In the devices according to the second to fourth embodiments, the structure other than the portions illustrated in FIGS. 4 to 6 is basically the same as the device according to the first embodiment.

Referring to FIG. 4, in the measuring device according to the second embodiment, the inside of the outer wall 3
An undulating portion 12 is formed so as to close the entrance of the branch flow path 8a on the outer peripheral side. The vertex of the undulating portion 12 protrudes toward the introduction plate 4 by a height H1 from the inner peripheral flow path surface of the outer peripheral branch flow path 8a formed on the partition 7. This undulation 1
2, a throttle is formed in the flow path between the inlet 5 of the flow dividing pipe 2 and the inlet of the outer peripheral side branch flow path 8a in which the detection element 11 is arranged. With such a channel structure, contamination of the detection element 11 is further prevented.

Referring to FIG. 5, in the measuring apparatus according to the third embodiment, the inner peripheral flow path wall (between the introduction plate and the outer wall at the top of the diversion pipe) which forms the diversion pipe is provided below the inlet 5. An undulating portion 13 having a concavely curved flow path surface is formed. Thereby, the flow toward the branch flow paths 8a and 8b is rectified. In addition, by such an undulating portion 13,
An aperture can be formed, and contaminants can be detected by the detecting element 31.
Can also be guided toward the inner peripheral side branch flow path 8b where is not disposed.

Referring to FIG. 6, in the measuring apparatus according to the fourth embodiment, an undulating portion 14 is formed on the inner wall of the introduction plate 4 on the side of the introduction port 5 so as to close the entrance of the branch passage 8b on the inner peripheral side. I have. The top of the undulating portion 14 protrudes toward the outer wall 3 by a height H2 from the outer peripheral flow path surface of the inner peripheral branch flow path 8b formed on the partition 7. By this undulating portion 14,
A throttle is formed in a flow path between the inlet 5 of the branch pipe 2 and the inlet of the inner peripheral side branch flow path 8b, and a pool is formed on the left and right of the undulating portion 14 in FIG. With such a flow path structure, it is possible to arrange the detection element in the branch flow path 8b on the inner peripheral side.

[Embodiment 5] FIGS. 7A and 7B
FIG. 7A is an explanatory view of a flow measuring device according to a fifth embodiment of the present invention. FIG. 7A is a longitudinal section along the axial direction of a main flow tube, and FIG. 7B is a diagram in FIG. The BB cross section is shown. Referring to FIGS. 7A and 7B, the main flow pipe 1
Inside, the main stream M to be measured flows. Mainstream pipe 1
A diversion pipe 20 is attached to the pipe wall of the main flow pipe 1 so as to be able to take in a diversion D separated from the main flow M so as to be orthogonal to the pipe axis direction of the main flow pipe 1. An introduction plate 24 extending in a direction substantially perpendicular to the flow direction of the main flow M (axial direction of the main flow tube 1) is provided in the branch pipe 20.
The (main separator) forms a branch pipe that is curved in a substantially U shape. At both ends of the outer wall 23 of the branch pipe 20,
An inlet (also referred to as an outlet) 25 and an outlet (also referred to as an inlet) 26, which are respectively opened on a surface substantially orthogonal to the flow direction of the main flow M, are formed to face each other. A bypass flow path 34 is formed between the top outer wall 29 of the flow dividing pipe 20 and one end of the introduction plate 24, and short-circuits between the introduction port 25 and the outlet port 26. As will be described later, the first branch D1 in which the direction of the branch D is largely changed substantially at a right angle and the content of contaminants is small.
Flows toward the inlets of a plurality of branch passages 28a and 28b described later, while contaminants having a relatively high density are conveyed to the second branch D2 and passed through the bypass passage 34 to the inlet port. From 25, it goes straight to the outlet 26 and is discharged out of the diversion tube 20 (and vice versa).

Further, a partition 27 curved in accordance with the curved shape of the flow dividing tube 20 is formed in the flow dividing tube 20. In the branch pipe 20, a plurality of branch flow paths 28a and 28b are formed by the partition 27 so as to branch and merge with each other. Undulating portions 32 and 33 are formed inside both ends of the outer wall 23 (near the inlet 25 and the outlet 26) so as to close the inlet and the outlet of the branch flow path 28a on the outer peripheral side. Restrictions are formed by the undulating portions 32 and 33 in the flow path between the inlet 25 and the inlet of the outer peripheral side branch flow path 28a and the flow path between the outlet port 26 and the outer peripheral side branch flow path 28a. A substantially “Ω” shaped channel is formed between the port 25 and the outlet 26.

A detection element 31 is mounted on the bottom outer wall of the flow dividing tube 20 via a substrate 30 so as to be exposed to the flow in the branch flow path 28a on the outer peripheral side. As described above, the detection element 31 is arranged at the inflection portion of the flow dividing tube 20 and is located outside the main flow tube 1 for easy replacement. Also, on the inner side of the bottom of the outer wall 23, on both sides of the detection element 31, the raised portions 2 protruding toward the center of the flow cross section of the branch flow path 28 a.
3a and 23b are formed. A projecting portion 27a projecting toward the detection surface is formed in a portion of the partition 27 facing the detection surface of the detection element 31. Raised portion 23a,
The channel surface on 23b is formed as a concave curved surface. Projection 2
The flow path surface 7 a is formed as a convex curved surface that is convex toward the detection element 31. With such a flow path structure, the down flow D that flows obliquely toward the detection surface of the detection element 31.
W is formed.

Subsequently, the operation of this measuring device is again shown in FIG.
This will be described with reference to FIG. (1) The branch stream D separated from the main stream M is taken into the branch pipe 20 from the inlet 25. (2) The split flow D is a flow (turned flow) D1 that is substantially orthogonal to the flow direction of the main flow M and a flow D1 that is substantially perpendicular to the flow direction of the main flow M before the entrances of the plurality of branch flow paths 28a and 28b. The flow is divided into a substantially parallel flow D2. (3a) The flow D1 is increased in flow velocity by the restriction formed by the undulations 32, and the flow of the plurality of branch flow paths 28 is increased.
a, 28b. Here, a contaminant having a relatively higher density than the measurement fluid cannot follow a sharp change in direction of the flow after being squeezed.
8b. Therefore, the measurement fluid with extremely little contaminants is distributed to the outer peripheral side branch channel 28 a having the detection element 31.
It will flow toward. Then, a flow obliquely hitting the detection surface of the detection element 31, that is, a downflow DW occurs. (3b) The flow D2 flows into the bypass flow path 34. (4) Flow D flowing into a plurality of branch passages 28a and 28b
1 is drawn out by the flow D2 that has passed through the bypass flow path 34, and is returned from the outlet 26 into the mainstream pipe 1.

Further, a flow path structure symmetrical with respect to the detection element 31 along the flow direction in the substantially U-shaped flow branch pipe is formed in the flow branch pipe 20. Therefore, according to the branch pipe 20, it is possible to prevent both the forward flow and the backward flow at the same detection output level while preventing the accumulation of the contaminants in the detection element 31.

Embodiment 6 Next, as Embodiment 6, a modification of Embodiment 5 will be described. 8 (A) and 8
(B) is an explanatory view of an apparatus according to Embodiment 6 of the present invention, and FIG. 8 (A) is a partially enlarged cross-sectional view near the top outer wall of the diversion pipe and one end of the introduction plate (parallel to the flow cross-section of diversion D). 8 (B) is a cross-sectional view orthogonal to FIG. 8 (A). In the apparatus according to the sixth embodiment, FIG.
Structures other than those shown in FIGS. 8A and 8B are basically the same as those of the device according to the fifth embodiment.

Referring to FIGS. 8A and 8B,
Between the top outer wall 29 of the flow dividing pipe and one end of the introduction plate 24, that is, the bypass flow path of the fifth embodiment (3 in FIG. 7A).
In 4), an orifice member 35 is attached or integrally formed. Flow section direction diameter W1 of bypass flow path
On the other hand, by adjusting the orifice diameter W2, it is possible to quantitatively control the flow toward the branch flow path where the detection element is arranged.

Embodiments 7 to 9 Next, as Embodiments 7 to 9, various modifications of Embodiment 6 will be described. FIG.
FIGS. 9A to 9C are partial enlarged views showing the vicinity of an orifice bypassing a branch pipe inlet and its outlet to sequentially explain apparatuses according to Embodiments 7 to 9 of the present invention. In the devices according to the seventh to ninth embodiments, the structure other than the parts shown in the drawings is basically the same as the device according to the sixth embodiment.

Referring to FIG. 9A, triangular projections 40a, 41a are formed on one end of the introduction plate 41 and the top outer wall 40 facing the one end, respectively. An orifice is formed in the bypass flow path that short-circuits the inlet and outlet of the air-conditioner.

Referring to FIG. 9B, one end 43a of the introduction plate 43 is rectangular, and a polygonal projection 42a is formed on the top outer wall 42 facing the one end 43a. An orifice is formed in the bypass flow path that short-circuits the inlet and outlet of the branch pipe by the protrusion 42a.

Referring to FIG. 9C, one end 45a of the introducing plate 45 is rectangular, and a curved (semicircular) projection 44a is formed on the top outer wall 44 facing the one end 45a. An orifice is formed in the bypass flow passage that short-circuits the inlet and outlet of the branch pipe by the 45a and the curved projection 44a.

[Comparison between Comparative Example 1 and Example 5] Next, the sensor (detection) output of the measuring apparatus according to Comparative Example 1 and the sensor output of the measuring apparatus according to Example 5 are described, particularly with respect to the measurement of backflow. This will be described in contrast. First, the structure of the measuring device according to Comparative Example 1 will be described mainly with respect to differences from the measuring device according to the fifth embodiment. FIG. 10 is an explanatory diagram of the measuring device according to Comparative Example 1, and shows a longitudinal section along the axial direction of the mainstream pipe. Referring to FIG. 10, a diversion pipe 52 is mounted on the pipe wall of the main flow pipe 1 orthogonally to the pipe axis direction of the main flow pipe 1 so as to be able to take in a diversion D separated from the main flow M. In the flow dividing pipe 52, a dividing flow path curved in a substantially U-shape is formed by the inner wall 54 (main separator). Dividing pipe 5
In the side of the outer wall 53, an inlet (also referred to as an outlet) 55 of a curved branch pipe is formed on a surface substantially orthogonal to the flow direction of the main stream M, and the axial direction of the main stream pipe 1 of the branch pipe 52 is set. The outlet (also referred to as an inlet) of the diversion pipe that opens on a surface substantially parallel to the flow direction of the main flow M on the top outer wall extending along
6 are formed. The branch pipe is reduced in diameter in the flow direction from the inlet 55 to the outlet 56 toward the detecting element 61 near the inlet 55 (a reduced-diameter portion 63 is formed). And the outlet 56 (the enlarged diameter portion 64 is formed).

On the outer wall 53 of the flow dividing pipe 52, ridges 53a and 53b projecting toward the center of the flow cross section of the flow dividing pipe are formed on both sides of the detecting element 61.
The channel surfaces on the raised portions 53a and 53b are formed as concave curved surfaces. A projecting portion 54a projecting toward the detection surface is formed at a portion of the inner wall 54 of the flow dividing tube 52 facing the detection element 61. The flow path surface of the protruding portion 54a is
It is formed on a convex curved surface that is convex toward 1. With such a flow path structure, a down flow DW that flows obliquely toward the detection surface of the detection element 61 is formed.

FIG. 11 is a graph showing the flow characteristics of the apparatus according to Comparative Example 1 shown in FIG. Referring to FIG. 10, according to the measurement apparatus according to Comparative Example 1, since an asymmetric flow path structure is formed around detection element 61 along the flow direction, a forward flow (from inlet 55 to outlet 56) Both the heading flow and the backflow (flow from the outlet 56 to the inlet 55) cannot be detected at the same detection output level.

FIG. 12 is a view showing the apparatus according to the fifth embodiment described with reference to FIGS. 7A and 7B again, and FIG. It is a graph which shows the flow characteristic of such a device. Referring to FIG. 12, a flow path structure symmetrical with respect to detection element 31 along the flow direction is formed in flow dividing pipe 20 of the measuring apparatus according to the fifth embodiment. Referring to FIG. 13, therefore, by using this branch pipe 20, both the forward flow (flow from the inlet 25 to the outlet 26) and the reverse flow (flow from the outlet 26 to the inlet 25) are equivalent. It can be measured at the detection output level.

Hereinafter, various embodiments 10 to 15 of the measuring apparatus according to the present invention will be described. In the following description regarding Examples 10 to 15, in order to avoid duplication of description,
Mainly, differences from the flow measuring apparatus according to the fifth embodiment will be described, and similar points will be described in the fifth embodiment.
Please refer to the description. Example 10
Each of the flow path configurations in the branch pipes according to Nos. To 14 is symmetrical with respect to the detection element along the flow direction, and both forward flow and reverse flow can be measured at the same detection output level. Further, the measuring device according to the fifteenth embodiment is suitable for measuring the forward flow.

[Embodiment 10] FIG. 14 is an explanatory view of a measuring apparatus according to Embodiment 10 of the present invention, and shows a longitudinal section along the axial direction of a mainstream pipe. Referring to FIG. 14, in the flow dividing pipe 92, a flow dividing pipe channel curved in a substantially U shape is formed by an introduction plate 94 extending in a direction substantially perpendicular to the flow direction of the main flow M. At both ends of the outer wall of the flow dividing pipe 92, an inlet 95 and an outlet 96 which open on a plane substantially orthogonal to the flow direction of the main flow M are formed to face each other. Further, the diverter tube 92
Inside, a plurality of branch flow paths 98a and 98b that branch and join each other are formed by a curved partition 97. The detection element 101 is attached to the bottom of the outer wall 93 of the flow dividing tube 92 via the substrate 100. In addition, the outer wall 9
3, the protrusions 9 are provided on both sides of the detection element 101.
3a and 93b are formed. The partition 97 has a protruding portion 97 a protruding toward the detection surface of the detection element 101. With such a flow path structure, a down flow DW that flows obliquely toward the detection surface of the detection element 101 is formed. A triangular projection 99a is formed inside the top outer wall 99 facing one end of the introduction plate 94,
An orifice 104 is formed in a bypass flow path that short-circuits the inlet 95 and the outlet 96.

[Embodiment 11] FIG. 15 is an explanatory view of a measuring apparatus according to Embodiment 11 of the present invention, and shows a longitudinal section along the axial direction of a mainstream pipe. Referring to FIG. 15, in the branch pipe 112, a branch pipe channel curved in a substantially U shape is formed by an introduction plate 114 extending in a direction substantially perpendicular to the flow direction of the main flow M. At both ends of the outer wall of the flow dividing tube 112, an inlet 115 and an outlet 116, which open on a plane substantially perpendicular to the flow direction of the main flow M, are formed to face each other. Further, inside the distribution pipe 112, curved partitions 137 and 13 are provided.
8, a plurality of branch flow paths 118a, 118c, which branch and join each other in order from the outer peripheral side to the inner peripheral side.
118b are formed. Undulating portions 122 and 123 are formed inside both ends of the outer wall 113 (near the inlet 115 and the outlet 116) so as to close the inlets and outlets of the branch passages 118a and 118c, respectively. By the undulations 122 and 123, the flow path between the inlet 115 and the inlets of the branch flow paths 118a and 118c and the outlet 116
A throttle is formed in the flow path between the outlets of the branch flow paths 118a and 118c, and a substantially “Ω” -shaped flow path is formed between the inlet 115 and the outlet 116. Dividing pipe 112
A detection element 121 is attached to the bottom of the outer wall 113 via a substrate 120. Also, inside the outer wall 113, the protrusions 113a, 1
13b is formed. In the outer partition 137,
Projection 13 projecting toward the detection surface of detection element 121
7a are formed. With such a channel structure,
A downflow DW that flows obliquely toward the detection surface of the detection element 121 is formed. A bypass channel 124 that short-circuits the inlet 115 and the outlet 116 is formed inside one end of the introduction plate 114 and the inside of the top outer wall 119 opposed thereto.

[Twelfth Embodiment] FIG. 16 is an explanatory view of a measuring apparatus according to a twelfth embodiment of the present invention, and shows a longitudinal section along the axial direction of a mainstream pipe. Referring to FIG. 16, in the branch pipe 142, a branch pipe channel curved in a substantially U-shape is formed by an introduction plate 144 extending in a direction substantially orthogonal to the flow direction of the main flow M. An inlet 145 and an outlet 146 are formed at the top outer wall of the flow dividing pipe 142 and at both ends of the outer wall of the outer wall 143. The branch flow D is introduced into the branch pipe 142 mainly from an oblique direction. Furthermore, the diverter tube 1
A plurality of branch flow paths 148a and 148b that branch and merge with each other are formed by curved partitions 147 in the inside. Inside of both ends of outer wall 143 (inlet 145
And the vicinity of the outlet 146) are provided on the outer peripheral side branch flow path 148.
undulations 152, so as to block the entrance and exit of
153 are respectively formed. Undulating parts 152, 15
3, the flow path between the inlet 145 and the inlet of the outer circumferential branch flow path 148a, and the outlet 146 and the outer circumferential branch flow path 14
Restrictions are formed in the flow paths between the outlets 8a, respectively, and a substantially “Ω” -shaped flow path is formed between the inlet 145 and the outlet 146. The detection element 151 is attached to the bottom of the outer wall 143 of the flow dividing tube 142 via the substrate 150. On the inner side of the outer wall 143, raised portions 143a and 143b are formed on both sides of the detection element 151. A projection 147a projecting toward the detection surface of the detection element 151 is formed at an intermediate portion of the partition 147. With such a flow path structure, a down flow DW that flows obliquely toward the detection surface of the detection element 151 is formed.

[Thirteenth Embodiment] FIG. 17 is an explanatory view of a measuring apparatus according to a thirteenth embodiment of the present invention, and shows a longitudinal section along the axial direction of a mainstream pipe. Referring to FIG. 17, a distribution pipe channel curved in a substantially U shape is formed in the distribution pipe 162 by an introduction plate 164 extending in a direction substantially orthogonal to the axial direction of the main flow pipe 1. At both ends of the outer wall 163 of the branch pipe 162, there are inlets 165 that open on a surface substantially orthogonal to the main flow M.
And the outlet 166 are formed facing each other. Further, a plurality of branch flow paths 168a, 168b branching and merging with each other are formed in the branch pipe 162 by a curved partition 167.
Are formed. Inside of both ends of outer wall 163 (inlet 1
65 and near the outlet 166)
Undulations 17 so as to cover the entrance and exit of
2,173 are formed respectively. This undulating part 17
2, 173, the introduction port 165 and the outer peripheral side branch flow path 1
Restrictions are formed in the flow path between the inlet of the inlet 68a and the outlet of the outlet 166 and the outlet of the outer peripheral side branch flow path 168a, respectively, and a substantially “Ω” shaped flow is formed between the inlet 165 and the outlet 166. The road is configured. One end both sides of the introduction plate 164,
The top outer wall 1 is expanded toward the inlet 165 and the outlet 166, respectively, and the expanded portion and the top outer wall 1 facing the bottom of the expanded portion.
A bypass flow path 174 that short-circuits the inlet 165 and the outlet 166 is formed between the inlet 169 and the outlet 69. Dividing pipe 16
The detection element 171 is provided on the bottom of the outer wall 163 of the second
Attached through. Further, inside the outer wall 163, the raised portions 163a,
163b is formed. A projection 167a that projects toward the detection surface of the detection element 171 is formed at an intermediate portion of the partition 167. With such a flow path structure, a down flow DW that flows obliquely toward the detection surface of the detection element 171 is formed.

[Embodiment 14] FIG. 18 is an explanatory view of a measuring apparatus according to Embodiment 14 of the present invention, and shows a longitudinal section along the axial direction of a mainstream pipe. Referring to FIG. 18, in the branch pipe 182, a branch pipe channel curved in a substantially U-shape is formed by an introduction plate 184 extending in a direction substantially orthogonal to the axial direction of the main flow tube 1. At both ends of the outer wall 183 of the branch pipe 182, an inlet 185 and an outlet 186 that open on a plane substantially perpendicular to the flow direction of the main flow M are formed to face each other. Further, a plurality of branch flow paths 188 branched and joined to each other by a curved partition 187 in the branch pipe 182.
a, 188b are formed. Undulating portions 192 and 193 are formed inside both ends of the outer wall 183 (in the vicinity of the inlet 185 and the outlet 186) so as to close the inlet and outlet of the outer peripheral branch flow path 188a, respectively. On both sides of the intermediate portion of the introduction plate 184, undulating portions 202 and 203 projecting toward the inside of the outer wall 183 are formed, respectively. Undulating portions 192, 202, 193, 203
Thereby, the flow path between the inlet 185 and the inlet of the inner peripheral side branch flow path 188b, and the outlet 186 and the inner peripheral side branch flow path 188
b. Restrictions are respectively formed in multiple stages in the flow path between the outlets of b.
A substantially “Ω” -shaped channel is formed. Introduction plate 184
Between one end of the top and the top outer wall 189 facing the one end,
Bypass flow path 1 that short-circuits inlet 185 and outlet 186
94 are formed. The detecting element 191 is attached to the inflection portion of the partition 187 so that its detection surface is exposed to the flow in the inner peripheral side branch flow path 188b. Introduction plate 1
On the other end of 84, a curved projection 184a projecting toward the detection surface of the detection element 191 is formed. With such a flow path structure, a down flow DW that flows obliquely toward the detection surface of the detection element 191 is formed.

Fifteenth Embodiment FIG. 19 is an explanatory view of a measuring apparatus according to a fifteenth embodiment of the present invention, showing a longitudinal section along the axial direction of a mainstream pipe. Referring to FIG. 19, in the flow dividing pipe 222, a flow dividing pipe that is curved in a substantially U shape is formed by an introduction plate 224 that extends in a direction substantially perpendicular to the flow direction of the main flow M. An inlet 225 is formed on the outer wall 223 of the diversion tube 222 so as to open in a plane substantially perpendicular to the flow direction of the main flow M.
The outlet 226 is formed so as to open in a plane substantially parallel to the flow direction. Further, a plurality of branch flow paths 228a and 228b that branch and merge with each other are formed by the curved partition 227 in the branch pipe 222. Partition 2
The other end of 27 on the outlet 226 side is farther away from the outlet 226 than the one end on the inlet 225 side. An undulating portion 232 is formed near the inlet 225 inside the outer wall 223 so as to close the inlet of the branch flow path 228a on the outer peripheral side. On the other hand, an undulating portion 242 is also formed near the introduction port 225 of the introduction plate 224. A restriction is formed in the flow path between the inlet 225 and the inlet of the branch flow path 228a by the undulations 232 and 242. The detection element 231 is attached to the bottom of the outer wall 223 of the flow dividing tube 222 via the substrate 230. The detection element 2 is provided inside the outer wall 223.
Protrusions 223a and 223b are formed on both sides of the base 31. A detecting element 231 is provided at an intermediate portion of the partition 227.
Is formed to project toward the detection surface of the. With such a flow path structure, the detection element 231
A downflow DW that flows obliquely toward the detection surface is formed.

[Embodiment 16] FIG. 20 is an explanatory view of a measuring apparatus according to Embodiment 16 of the present invention. Example 1
Reference numeral 6 denotes a modification of the fifth embodiment. In the sixteenth embodiment, the same reference numerals as in the fifth embodiment denote the same elements as in the fifth embodiment. Further, in the following description of the sixteenth embodiment, a part in which the measuring apparatus of the sixteenth embodiment has the same configuration and function as the measuring apparatus of the fifth embodiment will be described.
The description of the fifth embodiment can be appropriately referred to.

Referring to FIG. 20, a Venturi (Venturi wall portion) 250 is provided on the wall surface of the partition 27 facing the detection element 31 from upstream to downstream of the detection element 31. Due to this venturi 250, the flow path of the outer peripheral side branch flow path 28a in which the detection element 31 is disposed is narrowed in the vicinity of the center of the detection element 31 (this is referred to as a "narrowest portion N"). With such a flow path structure, the disturbance of the flow on the detection surface of the detection element 31 is suppressed, and a flow that obliquely hits the detection surface of the detection element 31 is formed stably and stably, and the detection accuracy is improved. Be improved.

FIG. 21 is an explanatory view of a measuring apparatus according to Embodiment 17 of the present invention, and is a partially enlarged view near a detecting element. The seventeenth embodiment is a modified example of the sixteenth embodiment. In the following description, the difference between the measuring device of the seventeenth embodiment and the measuring device of the sixteenth embodiment will be described. The description of the sixteenth embodiment can be appropriately referred to for the portion having

Referring to FIG. 21, an outer peripheral side branch flow path 278a and an inner peripheral side branch flow path 278b are formed in the branch pipe by the partition 270. A detection element 281 is attached to the bottom wall of the branch pipe via a substrate 280, and is exposed to the flow in the outer peripheral side branch flow path 278a. Partition 2
A Venturi 290 is provided on the wall surface facing the detection element 281 from upstream to downstream of the detection element 281. Due to this venturi 290, the flow path of the outer peripheral side branch flow path 278a in which the detection element 281 is arranged is narrowest near the center of the detection element 281 (this is referred to as a "narrowest portion N"). In addition, a smooth transition is made between the flow path surface of the partition 270 in the left-right direction in FIG. 21 (the flow path surface in a direction orthogonal to the main flow M (see FIG. 20)) and the flow path surface on the venturi 290.

[0063]

According to the present invention, there is provided a flow measuring apparatus for preventing accumulation of contaminants on a detection element. Further, according to the present invention, there is provided a flow measuring device capable of measuring a backward flow as well as a forward flow.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of a measuring device according to a first embodiment of the present invention, showing a longitudinal section along an axial direction of a mainstream pipe.

FIG. 2 is a partially enlarged view of the vicinity of an inlet 5 of the flow dividing pipe 2 shown in FIG.

FIG. 3 is a partially enlarged operation view in which the vicinity of an inlet 5 of the flow dividing pipe 2 shown in FIG. 1 is enlarged.

FIG. 4 is a partially enlarged view in which the vicinity of a diversion pipe inlet is enlarged for describing respective devices according to a second embodiment of the present invention.

FIG. 5 is a partially enlarged view in which the vicinity of a diversion pipe inlet is enlarged for explaining respective devices according to a third embodiment of the present invention.

FIG. 6 is a partially enlarged view in which the vicinity of a diversion pipe inlet is enlarged for explaining respective devices according to a fourth embodiment of the present invention.

7A and 7B are explanatory diagrams of a flow measuring device according to a fifth embodiment of the present invention, in which FIG. 7A is a longitudinal section along the axial direction of a main flow tube, and FIG. The BB section in A) is shown.

8 (A) and 8 (B) are explanatory views of an apparatus according to Embodiment 6 of the present invention, and FIG. 8 (A) is a partially enlarged cross-sectional view near the outer wall at the top of the diversion channel and one end of the introduction plate (diversion flow). D shows a cross section parallel to the flow cross section), and (B) is a cross section orthogonal to (A).

9 (A) to 9 (C) show Examples 7 to 9 of the present invention, respectively.
FIG. 2 is a partially enlarged view showing the vicinity of an orifice bypassing a branch pipe inlet and its outlet to explain each of the devices according to the first embodiment.

FIG. 10 is an explanatory view of a measuring device according to Comparative Example 1, showing a longitudinal section along an axial direction of a mainstream pipe.

11 is a graph showing the flow characteristics of the device according to Comparative Example 1 shown in FIG.

FIG. 12 is a view showing the apparatus according to the fifth embodiment described with reference to FIGS. 7A and 7B again;

FIG. 13 is a graph showing a flow rate characteristic of the apparatus according to the fifth embodiment shown in FIG.

FIG. 14 is an explanatory view of a measuring device according to a tenth embodiment of the present invention, showing a longitudinal section along an axial direction of a mainstream pipe.

FIG. 15 is an explanatory diagram of a measuring device according to an eleventh embodiment of the present invention, showing a longitudinal section along an axial direction of a mainstream pipe.

FIG. 16 is an explanatory view of a measuring device according to Embodiment 12 of the present invention, showing a vertical cross section along an axial direction of a mainstream pipe.

FIG. 17 is an explanatory view of a measuring device according to Embodiment 13 of the present invention, showing a longitudinal section along an axial direction of a mainstream pipe.

FIG. 18 is an explanatory view of a measuring device according to Embodiment 14 of the present invention, showing a longitudinal cross section along an axial direction of a mainstream pipe.

FIG. 19 is an explanatory view of a measuring device according to Embodiment 15 of the present invention, showing a longitudinal section along the axial direction of a mainstream pipe.

FIG. 20 is an explanatory view of a measuring device according to Example 16 of the present invention, showing a longitudinal cross section along an axial direction of a mainstream pipe.

FIG. 21 is an explanatory view of a measuring apparatus according to Embodiment 17 of the present invention, and is a partially enlarged view near a detection element.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Main flow pipe 2 Branch flow pipe 3 Outer wall (housing) of branch flow pipe 3a, 3b Raised part 4 Introductory plate (main separator) 5 Inlet 6 Outlet 7 Partition 7a Projection 8a, 8b Branch flow path 10 Substrate) 11 Detecting element 12, 13, 14 Undulating portion 20 Separating tube 23 Outer wall of dividing tube 23a, 23b Rising portion 24 Introducing plate (main separator) 25 Inlet 26 Outlet 27 Partition 27a Projecting portion 28a, 28b Branching channel 29 Top outer wall 30 Substrate (circuit board, control board) 31 Detecting element 32, 33 Undulating portion 34 Bypass flow path 35 Orifice member 40, 42, 44 Top outer wall 40a, 42a, 44a Projecting portion 41, 43, 45 Introducing plate 41a Projecting portion 43a, 45a One end of the introduction plate 92 Dividing tube 93 Outer wall 93a, 93b of the dividing tube Ridge 94 Introducing plate (main separator) 95) Inlet 96 Outlet 97 Partition 97a Projection 98a, 98b Branch flow path 99 Top outer wall 99a Projection 100 Substrate (circuit board, control board) 101 Detection element 104 Orifice 112 Divider tube 113 Outer wall of diverter tube 113a, 113b Raised portion 114 Introductory plate (main separator) 115 Inlet 116 Outlet 119 Top outer wall 118a, 118b, 118c Branch flow channel 120 Substrate (circuit board, control substrate) 121 Detection element 122, 123 Undulating portion 124 Bypass flow channel 137, 138 Plurality of partitions 137a Projecting portion 142 Divider tube 143 Outer wall of distributor tube 143a, 143b Raised portion 144 Introducing plate (main separator) 145 Inlet 146 Outlet 147 Partition 147a Protruding portion 148a, 148b Branch flow channel 150 Substrate (circuit board, control Plate) 151 detecting element 152, 153 undulating portion 162 split flow tube 163 outer wall of split flow tube 163a, 163b raised portion 164 introduction plate (main separator) 164a expanding portion 165 inlet 166 outlet 167 partition 167a projecting portion 168a, 168b branch Road 169 Top outer wall 170 Substrate (circuit board, control board) 171 Detection element 172, 173 Undulating part 174 Bypass flow path 182 Dividing pipe 183 Dividing pipe outer wall 184 Introduction plate (main separator) 184a Projecting part 185 Inlet 186 Outlet 187 Partitions 188a, 188b Branch flow path 189 Top outer wall 191 Detection element 192, 193 Undulation section 194 Bypass flow path 202, 203 Undulation section 222 Dividing pipe 223 Dividing pipe outer wall 223a, 223b Raised section 224 Introducing plate (main separator) 224a Outlet 225 Inlet 226 Outlet 227 Partition 227a Projection 228a, 228b Branch flow path 230 Substrate 231 Detection element 232, 242 Undulating section 250 Venturi 270 Partition 278a, 278b Branch flow path 280 Substrate 281 Detection element 290 Venturi M Main stream D D1 Flow into a plurality of branch flow paths D2 Flow through a bypass flow path DW Downflow P Contaminant (particulate matter, PM) L Distance between partition end and inner wall of opening on partition side of inlet H1 Undulation Height H2 protruding from the flow path surface defining the branch flow path formed on the partition H2 Height protruding from the flow path surface defining the branch flow path formed on the partition W1 Flow of the bypass flow path Cross section direction diameter W1 W2 Orifice diameter N Narrowest part

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Takio Kojima 14-18 Takatsuji-cho, Mizuho-ku, Nagoya-shi Inside Japan Special Ceramics Co., Ltd. (72) Inventor Yasutoshi Kazuya 14-18 Takatsuji-cho, Mizuho-ku, Nagoya-shi Japan Special Inside Ceramics Co., Ltd. (72) Inventor Masanori Suda 14-18, Takatsuji-cho, Mizuho-ku, Nagoya-shi Inside Japan Specialty Ceramics Co., Ltd.

Claims (25)

[Claims] 1. A shunt pipe having a shunt pipe, which is basically U-shaped, into which a flow in a main stream pipe to be detected is introduced; and a shunt pipe formed on an outer peripheral side of the shunt pipe; An inlet for the diversion tube that opens on a surface substantially orthogonal to the flow direction in the main flow tube, a partition formed in the diversion tube, and a plurality of divisions formed by the partition so as to branch and merge with each other in the diversion tube. A branch flow path; and a detection element that is arranged to be exposed to a flow in the branch flow path formed on the outer peripheral side of the branch pipe among the plurality of branch flow paths, and that detects a flow-related amount. A flow measuring device characterized by the following. 2. An introduction port of the branch pipe and an inlet of the outer peripheral side branch flow path in which the detection element is arranged are opened in planes which are basically orthogonal to each other, and a flow introduced into the branch pipe is provided. 2. The flow measuring device according to claim 1, wherein the flow direction is changed and flows into the branch flow path. 3. The end of the partition does not extend directly below the inlet of the branch pipe, and at least the inlet of the outer peripheral side branch channel does not open directly below the inlet of the branch pipe. Claim 1 characterized by the following:
A measuring device for the described flow. 4. The flow measuring apparatus according to claim 1, wherein a throttle is formed in a flow path between the introduction port of the branch pipe and the inlet of the outer peripheral side branch flow path. 5. An introduction plate which forms the curved distribution pipe in the distribution pipe is provided, and the throttle is formed on at least one of the inside of an outer wall of the distribution pipe, the partition, and the introduction plate. 5. The flow measuring device according to claim 4, wherein the measuring device is defined by an undulation. 6. The flow measurement according to claim 5, wherein an undulating portion formed inside the outer wall of the branch pipe protrudes from an inner peripheral flow path surface near an inlet of the outer peripheral branch flow path. apparatus. 7. An introduction plate which forms the curved distribution pipe is provided inside the distribution pipe, and an inner peripheral flow path wall which forms the distribution pipe is undulated below an introduction port of the distribution pipe. The flow measuring device according to claim 1, wherein a concave flow path surface is formed. 8. The flow measuring apparatus according to claim 1, wherein the flow dividing pipe has a flow path structure which is basically symmetric about the detection element. 9. The flow measuring apparatus according to claim 1, wherein a throttle is formed in a flow path between the outlet of the branch pipe and the outlet of the outer peripheral side branch flow path. 10. An introduction plate for forming the curved diversion pipe in the diversion pipe, wherein the throttle is formed on at least one of the inside of the outer wall of the diversion pipe, the partition, and the introduction plate. The flow measuring device according to claim 9, wherein the measuring device is defined by an undulation. 11. The flow measurement according to claim 10, wherein an undulating portion formed inside the outer wall of the branch pipe protrudes from an inner peripheral flow path surface near an outlet of the outer peripheral branch flow path. apparatus. 12. A flow path between an inlet of the branch pipe and an inlet of the outer circumferential branch flow path, and a flow path between an outlet of the branch pipe and an outlet of the outer circumferential branch flow path. The flow measuring device according to claim 1, wherein the restrictors are formed, and the restrictor causes the branch flow path to have a substantially “Ω” shape. 13. An outlet of the branch pipe is formed on an outer peripheral side of the branch pipe so as to open on a surface substantially orthogonal to a flow direction in the main flow pipe, facing an inlet of the branch pipe. An introduction plate that forms the curved diversion channel is provided in the diversion tube, and a bypass flow that short-circuits the introduction port and the exit port of the diversion tube between one end of the introduction plate and a top outer wall of the diversion tube. The flow measuring device according to claim 1, wherein a path is formed. 14. An orifice is provided in the bypass flow path, and a flow rate of the measurement fluid toward the detection element is set by an amount of projection of a flow path wall forming the orifice or an opening area of the orifice. Item 14. The flow measuring device according to Item 13. 15. A flow path wall forming the orifice is protruded toward the center of the orifice, and the cross-sectional shape of the protruding flow path surface is any one of a polygonal surface, a curved surface, and a multiple curved surface. The flow measuring device according to claim 14, wherein: 16. A flow control device according to claim 1, further comprising a flow control means provided in said branch flow path in which said detection element is disposed, for forming a flow obliquely hitting a detection surface of said detection element. Measuring device for flow. 17. A venturi is provided on a wall surface of the partition facing the detection element from upstream to downstream of the detection element, and the venturi causes a flow path of the branch flow path in which the detection element is disposed. 2. A flow measuring apparatus according to claim 1, wherein said measuring element is narrowest near the center of said detecting element. 18. A diversion pipe provided with a diversion pipe, which is basically U-shaped, into which a flow in a main flow pipe to be detected is introduced; a partition formed in the diversion pipe; A plurality of branch channels divided and formed by the partition so as to branch and merge with each other in a pipe; and a flow in a branch channel formed on an inner peripheral side or an intermediate portion of the branch pipe among the plurality of branch channels. A detection element that is arranged to be exposed to the flow, and that detects an amount related to a flow; a flow path between an inlet of the diversion tube and an inlet of a branch flow path where a detection surface of the detection element is exposed to the flow And a restrictor formed in the flowmeter. 19. An apparatus according to claim 18, wherein said detection element is provided on said partition. 20. A diversion tube having a U-shaped curved diversion channel into which a flow in a main flow tube to be detected is introduced, and a diversion tube formed at one end outer peripheral side of the diversion tube, An inlet for the diversion pipe that opens on a plane substantially orthogonal to the flow direction in the main flow pipe; and a diversion formed at the top of the other end of the diversion pipe and opening on a plane that is substantially parallel to the flow direction in the main flow pipe. An outlet of a pipe, a partition formed in the branch pipe, one end of which extends to near the inlet, and the other end of which extends away from the outlet, the partition branches and merges with each other in the branch pipe. And a plurality of branch flow paths divided by the flow path are arranged to be exposed to a flow in a branch flow path formed on an outer peripheral side of the branch pipe among the plurality of branch flow paths, and an amount related to the flow is detected. And a detection element. The measurement device. 21. An introduction plate for forming the curved distribution pipe in the distribution pipe, and one of the inside of the outer wall of the distribution pipe, the partition, and the introduction plate near the introduction port of the distribution pipe. The undulating portion is formed as described above, and the undulating portion forms a throttle in a flow path between an introduction port of the branch pipe and an inlet of the outer peripheral side branch flow path. Measuring device for flow. 22. A diversion tube having a U-shaped curved diversion conduit into which a flow in a main flow tube to be detected is introduced; a partition formed in the diversion tube; A plurality of branch channels divided and formed by the partition so as to branch and merge with each other in the pipe; and a flow amount arranged to be exposed to a flow in one of the plurality of branch channels. And a detecting element for detecting the flow direction of the diverting pipe, wherein the flow introduced into the diverting pipe is changed in direction and the detecting element flows into the branch flow path exposed to the flow, and the introduction of the diverting pipe is performed. A flow port measuring device, comprising: a mouth and an inlet of the branch flow path. 23. A diversion pipe provided with a diversion pipe which is basically U-shaped and into which a flow in a main flow pipe to be detected is introduced; a partition formed in the diversion pipe; A plurality of branch channels divided and formed by the partition so as to branch and merge with each other in the pipe; and a flow amount arranged to be exposed to a flow in one of the plurality of branch channels. And an inlet for the diverter tube and the branch flow so that the flow introduced into the diverter tube is changed in direction and the detector element flows into the branch channel exposed to the flow. A restrictor formed in a flow path between the flow path and the entrance of the path, and a flow measurement device. 24. A diversion tube having a U-shaped curved diversion channel into which a flow in a main flow tube to be detected is introduced; and a diversion tube formed on one end outer peripheral side of the diversion tube. An inlet for the diversion pipe that opens on a plane substantially perpendicular to the flow direction in the main flow pipe; and an opening formed on the outer peripheral side of the other end of the diversion pipe and that opens on a plane substantially orthogonal to the flow direction in the main flow pipe. An outlet of the branch pipe and a partition formed in the branch pipe; a plurality of branch flow paths divided and formed by the partition so as to branch and merge with each other in the branch pipe; and the branch flow of the plurality of branch flow paths A detection element that is arranged to be exposed to the flow in the branch flow path formed on the outer peripheral side of the pipe and detects an amount related to the flow; and between the inlet of the branch pipe and the inlet of the outer peripheral branch flow path And the outlet of the branch pipe and the outer peripheral side branch flow Throttles respectively formed in the flow path between the outlet and the, on the wall facing the detection element of the partition, from upstream to downstream of the detection element, the branch flow path in which the detection element is disposed A venturi provided so that the flow path is narrowed near the center of the detection element. 25. The flow measuring device according to claim 1, wherein the measuring device is installed in an intake system of an internal combustion engine mounted on a vehicle.