JP2001174229A - Automatic pattern inspection instrument - Google Patents

Abstract

PROBLEM TO BE SOLVED: To inexpensively manufacture a bending correcting member for correcting the bending of a TAB tape by making it compact and light, and to quickly realize mounting and exchanging work. SOLUTION: Images of patterns formed on a TAB tape 1 are successively picked up by two lens sensor cameras 4A and 4B. Also, first and second aperture gate parts 16A and 16B for correcting the bending of the TAP tape 1 are arranged, so as to be freely movable in an X axial direction corresponding to each camera, and the pitches of the aperture gate parts 16A and 16B are adjusted while being linked with the pitch adjustment of the cameras 4A and 4B.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to an automatic pattern inspection apparatus for automatically inspecting a pattern formed on a film carrier with a camera.

[0002]

2. Description of the Related Art In general, as a technique for reducing the size of electronic equipment, a film carrier made of polyimide (hereinafter referred to as TAB) is used.
(Referred to as "Tape Automated Bonding" tape). There is a method in which a copper foil pattern formed on the tape is directly bonded to electrodes of an IC chip to form external leads. The copper foil pattern is formed by bonding a copper foil to a film with an adhesive and etching the copper foil, and has a thickness of about 10 to 30 μm and a width of about 20 to 50 μm at an inner lead portion for bonding to an IC.

[0003] Since such a fine pattern is formed by an etching process, defects such as thickening, disconnection, short-circuit, and thinning occur in the pattern during the manufacturing process. For this reason, the presence or absence of these defects has conventionally been performed by a continuity test or a visual inspection by hand. But,
Visual inspection has problems such as miniaturization of patterns, shortage of inspection personnel, skillful use of the eyes, and an increase in the number of products manufactured. Therefore, recently, a TAB tape automatic inspection apparatus has been proposed in which a pattern inspection of a TAB tape is imaged by a TV camera and the inspection is automatically performed (eg, JP-A-6-3).
No. 41960).

This TAB tape automatic inspection apparatus simultaneously captures a plurality of patterns on the same tape with a plurality of cameras (line sensor cameras) in order to reduce the inspection time (stops the running of the tape at the time of imaging). The image is recognized and displayed on a monitor to inspect the pattern for defects such as thickening, disconnection, short-circuiting, and thinning during the manufacturing process. For this reason, when performing a pattern inspection of a TAB tape having a different pitch between a plurality of patterns formed on the TAB tape, it is necessary to match the pitch of the camera with the pitch between the patterns. The reason is that a large number of the same patterns are formed at regular intervals on a TAB tape, and each input image must be handled in a single coordinate system.

On the other hand, a TAB tape usually has a convex (reverse) surface on the opposite side to the surface on which a pattern is formed, so that it is flattened during imaging so that the pattern coincides with the focal point of the camera. There is a need. For this reason, TA
An aperture gate is provided as a B tape warp correcting mechanism.

FIG. 14 shows a conventional example of such an automatic TAB tape inspection apparatus. In FIG. 1, reference numeral 1 denotes a TAB tape. The TAB tape 1 is intermittently fed from a pay-out reel 2 when an inspection start command is issued from a sequencer control unit, and stopped when it is conveyed to an aperture gate unit 3. After two patterns are imaged by the two line sensor cameras 4 (4A, 4B), they are conveyed again by a predetermined amount and the next two patterns are imaged. Hereinafter, the same imaging is repeatedly performed, and finally, the image is wound on the take-up reel 5.

The aperture gate section 3 includes a back plate 6 which can press the TAB tape 1 from above and correct the warp so as to be able to move up and down. The back plate 6 is large enough to cover the tape portion between the two line sensor cameras 4A and 4B when the pitch between the cameras is set to the maximum pitch. Further, a black matting paint is applied to the lower surface of the back plate 6 which presses the TAB tape 1, thereby absorbing light transmitted through the TAB tape 1 and reflecting light from the back plate 6 to the line sensor camera 4A. , 4B.

The two line sensor cameras 4A and 4B are arranged on the table 7, and are arranged in the running direction (X-axis direction) of the TAB tape 1 so as to have a predetermined interval according to the size of the pattern of the TAB tape 1. It is configured to be moved and adjusted.

[0009]

The above-mentioned conventional TAB
In the automatic tape inspection apparatus, the upward warpage of the TAB tape 1 is corrected by pressing the TAB tape 1 with the back plate 6. However, 2
Since one back plate 6 is commonly used for one line sensor camera 4A, 4B, there is a problem that the plate itself becomes large and expensive. Further, when the black matting paint applied to the lower surface of the back plate 6 peels or wears due to the running of the TAB tape 1, it is necessary to remove the back plate 6 from the aperture gate portion 3 and replace it with a new one. Its removal,
There is also a problem that the replacement work takes time. In particular, when mounting, parallelism with the TAB tape 1 is required, so that it takes time for adjustment and verification.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems.
An object of the present invention is to provide an automatic pattern inspection apparatus capable of easily correcting warpage of a tape, reducing the size and weight of a warp correcting member, manufacturing it at low cost, and performing installation and replacement work in a short time. .

[0011]

According to a first aspect of the present invention, there is provided an aperture gate for correcting a warpage of a film carrier by a warp correcting member, wherein a plurality of patterns formed on the film carrier are provided. In a pattern automatic inspection apparatus for sequentially imaging and inspecting with one camera, a plurality of aperture gates are provided for each camera, and the pitch of these aperture gates is adjusted in conjunction with the pitch adjustment of the camera. It is characterized by having comprised in. In such a configuration, since the warp correcting member of the aperture gate is provided for each camera, it becomes small.

According to a second aspect, in the first aspect,
The warp correcting member of the aperture gate portion is constituted by a pair of rollers spaced apart in the running direction of the film carrier such that the lower surface thereof coincides with the running surface of the film carrier. In such a configuration, warpage of the film carrier is corrected by contacting the upper surface of the film carrier with the lower surfaces of the pair of rollers.

According to a third aspect, in the first aspect,
A pair of rollers spaced apart in the running direction of the film carrier so that the warp correcting member of the aperture gate section is in contact with the running surface of the film carrier on a line whose lower surface is slightly lower than the running pass line of the film carrier. It is characterized by comprising. In such a configuration, warpage of the film carrier is corrected by the lower surfaces of the pair of rollers contacting the upper surface of the film carrier.

[0014] In a fourth aspect based on the first aspect,
A pair of rollers arranged in the traveling direction of the film carrier so that the lower surface thereof coincides with the traveling surface of the film carrier, and a warp correcting member of the aperture gate portion is vertically movably disposed between the rollers. And a back plate that presses the film carrier from above, and both side edges of the lower surface of the film carrier are supported by a pair of carrier supports. In such a configuration, the upper surface of the film carrier contacts the lower surfaces of the pair of rollers, and the film portion between the rollers is pressed by the back plate, thereby correcting the warpage of the film carrier. The carrier support guides and supports both side edges of the lower surface of the film carrier.

[0015] In a fifth aspect based on the fourth aspect,
The pair of carrier supports are configured to approach and separate from each other in conjunction with the width direction of the carrier, and the distance is adjusted according to the width of the film carrier. In such a configuration, it is possible to support film carriers having different widths.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail based on an embodiment shown in the drawings. 1 to 13 show an embodiment of an automatic pattern inspection apparatus according to the present invention. FIG. 1 is an external perspective view of an inspection apparatus main body of the apparatus, and FIG. FIG. 3 is a view for explaining the imaging of the pattern, FIG. 4 is a front view showing the X-axis table and its driving device, FIG. 5 is a cross-sectional view taken along the line VV of FIG. 4, and FIG. 4 is a sectional view taken along the line VI-VI of FIG. 7, FIG. 7 is a front view showing the Z-axis table and its driving device, and FIG.
9 is a plan view showing the Y-axis table and its driving device, FIG. 10 is a sectional view taken along the line XX of FIG. 9, and FIG. 11 is a schematic diagram of the aperture gate unit and the omnidirectional illumination device. 12 is a perspective view of the aperture gate, and FIG. 13 is a plan view of the aperture gate.

1 and 2, a TAB tape 1
An automatic pattern inspection apparatus 10 for automatically imaging and inspecting the pattern 11 (see FIG. 3) of FIG. 3 includes a box-shaped housing 12 installed on the floor surface and an inspection apparatus main body 13 installed in the housing 12. It has. The inspection apparatus main body 13 includes a pattern imaging apparatus 4 for imaging the pattern 11 of the TAB tape 1 and an X-axis, Y
A table mechanism 15 for independently moving in the axial and Z-axis directions, an aperture gate 16 for correcting the warpage of the TAB tape 1, and the like, and a T having a width of 35 mm to 96 mm.
The pattern inspection of the AB tape 1 is performed.

The TAB tape 1 is made of a translucent film made of polyimide, and has a large number of fine patterns 11 of the same shape printed on the surface side. Such a T
The AB tape 1 is wound around a pay-out reel 2 (see FIG. 14) with its front side facing inward, is given a predetermined tension by a tension sprocket 17, and is driven by a drive sprocket 18 to drive the aperture gate 1.
6 is intermittently conveyed to the take-up reel 5 and is taken up by the take-up reel 5 each time one image pickup by the pattern image pickup device 4 is completed.

The pattern imaging device 4 is composed of two line sensor cameras 4A and 4B spaced apart in the running direction of the TAB tape 1 in order to increase the inspection speed. It is mounted on the table mechanism 15 so as to be located directly below. Since the two line sensor cameras 4A and 4B are spaced apart from each other so as to be twice the pitch of the pattern 11 as shown in FIG. 3, the pattern 11 of the TAB tape 1 has two cameras. The patterns 11 for two frames are simultaneously imaged by 4A and 4B.

1, 2 and 4 to 6, the table mechanism 15 is disposed on the front surface of a Z-axis table 21 via a pair of linear guides 22A and a slider 22B so as to be movable in the X-axis direction. First and second S consisting of a pair of left and right
Axis tables 23 and 24 are provided, and these two tables constitute an X-axis table. The first and second S-axis tables 23 and 24 are vertically disposed so as to be substantially parallel to the Z-axis table 21, and the line sensor cameras 4A and 4B are mounted on the front surface thereof via mounting members 25, respectively. Have been.

Further, the first S-axis table 23 and the second S axis
The axis tables 24 are connected to each other by an S-axis driving device 26. The S-axis drive device 26 includes a drive motor 27 fixed to the back surface of the first S-axis table 23, and a ball screw 29 to which rotation of the drive motor 27 is transmitted via a coupling 28. The tip of the ball screw 29 is screwed into a nut 30 provided on the back surface of the second S-axis table 24. Therefore, the driving motor 2
When the ball screw 29 is rotated by the driving of the
The S-axis table 24 approaches or separates from the first S-axis table 23, thereby changing the pitch between the two line sensor cameras 4A and 4B. 4 and 6, reference numeral 37 denotes a bearing.

On the front surface of the Z-axis table 21,
An X-axis drive device 31 for simultaneously moving the first and second S-axis tables 23 and 24 in the X-axis direction is mounted. The X-axis driving device 31 is provided with the Z-axis table 21.
, And a ball screw 34 to which rotation of the drive motor 32 is transmitted via a coupling 33. The base and the tip of the ball screw 34 are rotatably supported by a pair of bearings 35 provided on the front surface of the Z-axis table 21, and are provided on the back surface of the first S-axis table 23 at an intermediate portion. Nut 36
Is screwed. Therefore, when the ball screw 34 is rotated by the drive of the drive motor 32, the first S-axis table 23 moves in the X-axis direction along the ball screw 34. At this time, since the second S-axis table 24 is connected to the first S-axis table 23 via the S-axis driving device 26, the second S-axis table 24 is kept at a constant distance from the first S-axis table 23. Moved together. As a result, the two line sensor cameras 4A and 4B are moved and adjusted in the X-axis direction without changing the pitch.

The first and second S-axis tables 23 and 24
A pair of omni-directional lighting devices 40 and 40 and a plurality of optical fibers 42 for guiding light from a light source to each of the omni-directional lighting devices 40 and 40 are arranged via brackets 43 at the upper part of. I have. As shown in FIGS. 11 and 12, the omnidirectional lighting device 40 forms a hemispherical diffusion surface 40a, and is disposed above the line sensor cameras 4A and 4B. The light from the light source guided from the optical fiber 42 to the omnidirectional lighting device 40 has a diffused surface 40a.
The light is reflected and diffused by the
The pattern 11 of the AB tape 1 is irradiated. Then, after the diffuse reflection light is reflected by the TAB tape 1, it returns to the omnidirectional lighting device 40 again through the same optical path, and the diffusion surface 4
0a through the slit 45 formed at a position eccentric from the center of the line sensor camera 4a.
The light is received by the light receiving element (CCD) of A (or 4B), whereby the pattern 11 is imaged. When light from a light source is used as diffused indirect light using the omnidirectional lighting device 40 having the hemispherical diffused surface 40a, the diffused indirect light irradiates the pattern 11 of the TAB tape 1 from all directions. Even if the TAB tape 1 is curved, the irradiation can be performed uniformly, and the detection accuracy of the pattern 11 can be improved.

In FIGS. 1, 2, 7 and 8, the Z-axis table 21 is disposed on the front surface of a fixed frame 48 via a pair of linear guides 49A and a slider 49B so as to be movable in the Z-axis direction. ing. Fixed frame 48 is Y
The Z-axis drive device 51 that stands on the axis table 50 and moves the Z-axis table 21 in the Z-axis direction is mounted. The Z-axis drive device 51 includes a drive motor 52 fixed to the fixed frame 48, and a ball screw 54 to which the rotation of the drive motor 52 is transmitted via a coupling 53. This ball screw 54
A pair of bearings 5 having both ends provided on the fixed frame 48
5, 55 so as to be rotatable, and the Z
A nut 56 provided on the back surface of the shaft table 21 is screwed. Therefore, when the ball screw 54 is rotated by the drive of the drive motor 52, the Z-axis table 21 is moved in the Z-axis direction along the linear guide 49A. At this time, the first and second S-axis tables 23 and 24 also move integrally with the Z-axis table 21, thereby changing the focal length of the two line sensor cameras 4A and 4B.

Referring to FIGS. 1, 2, 9 and 10,
The Y-axis table 50 is disposed on the upper surface of the gantry 14 via four linear guides 61A and sliders 61B so as to be movable in the Y-axis direction. The gantry 14 is provided with a Y-axis driving device 62 for moving the Y-axis table 50 in the Y-axis direction (front-back direction). The Y-axis driving device 62 includes a driving motor 63 fixed to the gantry 14,
A ball screw 65 to which the rotation of the drive motor 63 is transmitted via a coupling 64 is provided. Both ends of the ball screw 65 are rotatably supported by a pair of bearings 66, 66 provided on the gantry 14, and a nut 67 provided on the lower surface of the Y-axis table 50 is screwed into an intermediate portion. . Therefore, when the ball screw 65 is rotated by the drive of the drive motor 63, the Y-axis table 50 moves in the Y-axis direction along the linear guide 61A. Note that a recess 68 is formed on the front end surface of the gantry 14 in order to avoid interference with the pattern imaging device 4.

In FIGS. 1, 2, 11 to 13, the aperture gate section 16 includes a first aperture gate section 16 arranged in parallel in the X-axis direction above the pattern imaging device 4.
A, and the second aperture gate section 16B.
That is, in the present invention, the two aperture gates 16
A and 16B are provided corresponding to the line sensor cameras 4A and 4B, respectively, and the two gate portions are used to individually correct the warpage of the tape portions of the TAB tape 1 corresponding to the line sensor cameras 4A and 4B, respectively. It is. In the present invention, the distance between the first aperture gate 16A and the second aperture gate 16B is adjusted in conjunction with the pitch adjustment of the line sensor cameras 4A and 4B. Hereinafter, the details will be described.

The first aperture gate section 16A and the second aperture gate section 16B are provided on the P-axis table 7 having the same structure and disposed horizontally above the table mechanism 15.
1 and 72 respectively. These P-axis tables 71 and 72 extend in the Y-axis direction, and are fixed.
Are movable in the X-axis direction by a pair of linear guides 74A and a slider 74B. Fixed table 73
Is horizontally fixed to the device frame side. FIG.
In the example, the illustration of the fixed table is omitted, and a pair of linear guides 74A are arranged in parallel in the Z-axis direction,
FIG. 2 shows an example in which a pair of linear guides 74A are arranged in parallel on the lower surface side of the fixed table 73 in the Y-axis direction. However, the linear guides 74A may be arranged in any direction. However, a pair of linear guides 74A
Are arranged in the vertical direction, the fixed table 73 may be arranged vertically. In addition, each P axis table 71, 72
Is attached to the linear guide 74A of the fixed table 73 so as not to drop.

Further, each of the P-axis tables 71, 72
Are slidably and inseparably slidable in the Y-axis direction on the first and second Y-axis tables 75 and 76 via a pair of linear guides 77A and a slider 77B. The pair of linear guides 77A is laid on the lower surface side of each of the P-axis tables 71 and 72 so as to extend in the Y-axis direction. On the lower surfaces of the first and second Y-axis tables 75 and 76, guide bars 79 and 79 perpendicular to the back surfaces of the first and second S-axis tables 23 and 24 are provided. These tables 75 and 76 are respectively mounted on the rear surfaces of the first and second S-axis tables 23 and 24 through bearings 80 and 80 fixed so that the guide bars 79 and 79 can slide through the Z-axis tables, respectively. Are slidably connected to each other.

In such a connection structure, each of the first
The distance between the second aperture gates 16A, 16B can be adjusted in conjunction with the pitch adjustment of the line sensor cameras 4A, 4B. That is, two line sensor cameras 4
When the pitches of A and 4B are variably adjusted, FIGS.
The second S-axis table 24 is moved toward or away from the first S-axis table 23 by driving the S-axis driving device 26 shown in FIG. When the second S-axis table 24 moves in the X-axis direction, the second Y-axis table 76 also moves integrally therewith.
Is moved in the X-axis direction along the linear guide 74A.
Therefore, the P-axis table 72 of the second aperture gate 16B approaches or separates from the P-axis table 71 of the first aperture gate 16A. As a result, the interval between the first and second aperture gates 16A and 16B is
The pitch is kept the same as the pitch of the line sensor cameras 4A and 4B.

Next, two line sensor cameras 4A, 4A
When moving B in the X-axis direction without changing the pitch, the first S-axis table 23 is moved in the X-axis direction by driving the X-axis driving device 31. At this time, the second S
The axis table 24 is moved to the first position via the S-axis driving device 26.
Are moved integrally with the first S-axis table 23 while maintaining a constant interval. Therefore, at this time, the first and second aperture gates 1
The P-axis tables 71 and 72 of 6A and 16B move in the X-axis direction along the linear guide 74A of the fixed table 73 while maintaining the correspondence with the line sensor cameras 4A and 4B.

On the other hand, when changing the focal lengths of the line sensor cameras 4A and 4B, the Z-axis table 21, the first and second S motors are driven by the Z-axis driving device 51 shown in FIGS.
The axis tables 23 and 24 are integrally moved in the Z-axis direction.
At this time, the bearings 80 (FIG. 2) provided on each of the first and second S-axis tables 23 and 24 correspond to the guide bars 79 provided on each of the first and second Y-axis tables 75 and 76. , The P-axis tables 71 and 72 of the first and second aperture gates 16A and 16B do not move in any direction.

When the Y-axis table 50 is moved in the Y-axis direction by the Y-axis driving device 62 shown in FIGS. 9 and 10, the Z-axis table 21, the first and second S-axis tables 23 and 24, and First and second Y-axis tables 7
5 and 76 move in the Y-axis direction integrally with the Y-axis table 50. At this time, the first and second Y-axis tables 75 and 76
Moves only along the linear guide 77A of each of the P-axis tables 71 and 72.
2 does not move in any direction.

Referring to FIG. 2, FIG. 11 to FIG.
The aperture gate 16A includes a pair of left and right rotatable rollers 86, 86 and a back plate 87 disposed on the P-axis table 71, and a warp correcting member for correcting upward warpage of the TAB tape 1 by using these. Is composed. The P-axis table 71 is arranged at a predetermined distance above the running surface of the TAB tape 1 and has a TA end at the front end.
The direction (Y) orthogonal to the running direction (X-axis direction) of the B tape 1
A rectangular hole 88 long in the axial direction) is formed. The hole 88 is large enough to cover the imaging field of view of the line sensor camera 4A, in other words, large enough to enable imaging of the pattern 11 formed on the TAB tape 1.

The pair of rollers 86 are arranged on the lower surface side of the P-axis table 71 such that the lower surface thereof coincides with the running surface of the TAB tape 1, and on both sides of the hole 88, orthogonal to the running direction of the TAB tape 1. And is configured to contact the upper surface of the TAB tape 1.

The back plate 87 is made of a rectangular metal plate slightly smaller than the hole 88, has a high flatness by finishing the lower surface, and is coated with a black matting paint 90. . The back plate 87 is supported by a pair of left and right supports 91 and is inserted into the hole 88 from above, so that the
The TAB tape 1 which is positioned above the running surface of the AB tape 1 and is curved upward by being lowered to the tape running surface by the drive of the driving device 92 when the pattern 11 of the TAB tape 1 is imaged. It is configured. The support 91 is vertically movable with respect to the base plate 97, and is urged downward by a spring (not shown).

A solenoid 92 is used as a driving device 92 for the back plate 87, and is attached downward to a mounting plate 95 provided above the P-axis table 71.
The base plate 97 is fixed to the lower end of the movable rod 96 of the solenoid 92. The mounting plate 95 includes:
A plurality of columns 99 are provided above a pair of brackets 98, 98 erected so as to face the P-axis table 71 back and forth.
Is fixed horizontally through. The base plate 9
Numeral 7 is disposed slidably in the vertical direction with respect to the support column 99, and is provided with a return behavior upward by a spring (not shown). Therefore, when the movable rod 96 is lowered by driving the solenoid 92, the base plate 97 is lowered along the support 99 together with the movable rod 96, so that the back plate 87 is lowered to the tape running surface and presses the upper surface of the TAB tape 1. Correct warpage. Although an example in which a solenoid is used as the driving device 92 of the back plate 87 has been described, the invention is not limited thereto, and a cylinder, a motor, or the like may be used.

Further, on the P-axis table 71, a pair of front and rear carrier supports 105, 105 for guiding and supporting the lower side edges of the TAB tape 1 are screwed to screw rods 106 and arranged. This carrier support 105
A base 105a located above the P-axis table 71 and extending in the running direction of the TAB tape 1;
Connecting portion 10 vertically installed at the intermediate portion of
5b and a TAB tape 1 provided at the lower end of the connecting portion 105b so as to extend in the running direction of the TAB tape 1.
And a support portion 105c for supporting the lower surface side edge portion from below, and a base portion 105a is screwed to the screw rod 106. The screw rod 106 is provided with a pair of brackets 98,
The front end and the rear side of the center are provided with a knob 107 at the front end so as to be rotatable between 98, so that the threads are opposite to each other. Therefore, knob 107
When the screw rod 106 is rotated, the pair of carrier supports 105 move in a direction approaching or separating from each other, and the interval is adjusted according to the width of the TAB tape 1. In FIG. 13, reference numeral 108 denotes a slide bar for guiding and supporting the carrier support 105.

The second aperture gate 16B has the same structure as that of the first aperture gate 16A except that the second aperture gate 16B is disposed symmetrically. Therefore, the same components are the same. The reference numerals are used, and the description is omitted.

In the above embodiment, the warp correcting member for correcting the upward warpage of the TAB tape 1 is provided by a pair of right and left rotatable rollers 8 provided on the P-axis table 71.
6, 86 and the back plate 87, but as a means for more easily correcting the upward warpage of the TAB tape 1, the traveling pass line of the TAB tape 1,
A pair of left and right rotations of the left and right sides of the P-axis table 71 as a warp correcting member is performed on a line slightly lower (for example, 10 mm) than a line on which the tape 1 is stretched over the tension sprocket 17 and the drive sprocket 18 and travels. Flexible rollers 86, 86 can be provided so that the lower surfaces of these rollers 86, 86 contact the upper surface of the TAB tape 1. In this case, the rollers 86,
The roller 86 is rotatably supported at a predetermined position, or has a configuration in which the shafts of the rollers 86, 86 are inserted into long holes extending in the vertical direction.
The tape 1 can be pressurized to correct upward warpage of the TAB tape 1.

Next, the operation of the TAB tape automatic inspection apparatus having the above structure will be described. First, T for inspection
The AB tape 1 is set on the pay-out reel 2 (FIG. 14), the leading end thereof is fed out, passed through the first and second aperture gates 16A and 16B, and set on the take-up reel 5.

Next, after the power switch is turned on, TAB
While applying back tension to tape 1, TA
Initial setting is performed so that the B tape 1 is sent according to the set value. In addition, the S-axis drive motor 27 (FIGS. 4 and 6) is driven by a command from a sequencer control unit (not shown), and the distance between the line sensor camera 4A and the line sensor camera 4B is separated by one frame of the TAB tape 1. So that the interval is
The second S-axis table 24 is moved in the X-axis direction. Further, the X-axis drive motor 32 (FIGS. 4 and 5) is driven to move the first and second S-axis tables 23 and 24 integrally in the X-axis direction. Adjust the imaging field of view. Further, the Z-axis drive motor 52 (FIGS. 7 and 8) and the Y-axis drive motor 63 (FIGS. 9 and 10) are driven to move the Z-axis table 21 and the Y-axis table 50 in the Z-axis and Y-axis directions. Each is moved to position the line sensor camera 4A and the line sensor camera 4B in the Y-axis and Z-axis directions.

Next, the pattern inspection of the TAB tape 1 is started. When a test start command is issued from the sequencer control unit, the TAB tape 1 is fed from the pay-out reel 2 and stops when it is conveyed to the aperture gate unit 16,
As shown in FIG. 3, two frame patterns 11A1 and 11A1 separated by one frame by two line sensor cameras 4A and 4B.
11B1 can be imaged at the same time. Then, the switches of the two line sensor cameras 4A and 4B are turned on, and imaging is started. At this time, the image is taken by moving the Y-axis table 50 in the Y-axis direction by the Y-axis drive motor 63. Therefore, the two line sensor cameras 4A and 4B
An area corresponding to the sensor width of each of the patterns 11A1 and 11B1 is sequentially imaged while moving in the axial direction. That is, the line sensor camera 4A operates in the area A1 of the pattern 11A1,
The A2 and A3 areas are sequentially imaged, and the line sensor camera 4B sequentially captures the B1, B2, and B3 areas of the pattern 11B1. Then, the image is recognized and displayed on a monitor to inspect the pattern for defects such as thickening, disconnection, short-circuit, and thinning during the manufacturing process. At this time, the pattern images determined to be defective by the line sensor cameras 4A and 4B are reconfirmed by visual observation as to whether they are good or defective. When the length of the line sensor cameras 4A, 4B is shorter than the length L of the patterns 11A, 11B, the first and second S-axis tables 23, 2
4 are simultaneously moved in the X-axis direction by the X-axis drive motor 32 to image each area.

Thus, the two-frame pattern 11A1
, 11B1 are completed, the first and second S-axis tables 23 and 24 are moved by one frame in the direction of arrow B in FIG. Next, the switches of the line sensor cameras 4A and 4B are turned on again, and the patterns of the next two frames 11A2 and 11A are turned on.
The imaging of B2 is started. At this time, the Y-axis table 50 is moved in the Y-axis direction by the Y-axis drive motor 63 in the same manner as described above. Therefore, the two line sensor cameras 4A and 4B move each pattern 11A while moving in the Y-axis direction.
The A4 area, A5 area, A6 area, B4 area, B5 area, and B6 area of 2 and 11B2 are sequentially imaged. Then, for the pattern determined to be defective, the image of the defective portion displayed on the monitor is reconfirmed as good or defective by visual observation in the same manner as described above.

The patterns 11A1, 11A2,
When the inspection of 11B1 and 11B2 is completed, the pattern imaging device 4 returns to the initial position and waits until the next four frames of patterns are conveyed to the imaging area. When the TAB tape 1 is intermittently conveyed for a predetermined length and the pattern for the next four frames stops in the imaging area, the same inspection as described above is repeated.
This pattern inspection is repeated until the TAB tape 1 wound around the payout reel 2 is exhausted, and the pattern finally determined to be defective is punched by a puncher (not shown) and taken up together with a non-defective pattern. It is wound on a reel 5.

When imaging the pattern, the TAB tape 1
Warps so that when it is fed from the pay-out reel 2, the surface side becomes a convex curved surface. If the pattern 11 is conveyed to the aperture gate section 16 in this warped state, the pattern 11 is shifted from the focal position of the line sensor cameras 4A and 4B, and a clear image cannot be obtained. Therefore, if a pair of rollers 86 and a back plate 87 are provided as a warp correcting member, it is possible to reliably correct the warpage of the tape portion corresponding to the imaging area of each of the line sensor cameras 4A and 4B. That is, both ends of the tape portion which is conveyed to the first aperture gate portion 16A and corresponds to the imaging region of the line sensor camera 4A are pressed by the pair of rollers 86 to be flat. Also, the central part of this tape part,
When the back plate 87 descends to the tape running surface, the back plate 87 is pressed and becomes a flat plate, and adheres to the lower surface of the back plate 87. Therefore, the tape portion between the pair of rollers 86 has its warpage corrected and coincides with the tape running surface.

The tape portion conveyed to the second aperture gate section 16B and corresponding to the image pickup area of the line sensor camera 4B is also flattened by correcting warpage by the pair of rollers 86 and the back plate 87 in the same manner as described above. And coincides with the tape running surface. Therefore, defocus does not occur, and the line sensor cameras 4A and 4B can favorably image the pattern.

In the present invention, since the first and second aperture gates 16A and 16B are provided corresponding to the line sensor cameras 4A and 4B, respectively, the back of each aperture gate 16A and 16B is provided. The plate 87 only needs to be large enough to cover the imaging area of one line sensor camera, and can be 1/10 or less the back rate of the conventional device shown in FIG. Therefore, the back plate 87 can be manufactured easily and at low cost. In addition, if the size and weight are reduced, the replacement work of the back plate 87 when the black matting paint 90 applied on the lower surface is peeled off is easy and can be performed in a short time.

In the above embodiment, the pair of rollers 86 and the back plate 8 serve as a warp correcting member.
7, the present invention is not limited to this. When the TAB tape 1 is thin and the tape width and pattern width are narrow, the back plate 8 is not necessarily specified.
7 may be used, and only a pair of rollers 86 may be used. Further, in the above-described embodiment, an example has been described in which imaging is performed using two line sensor cameras 4A and 4B, but the present invention is not limited to this, and two or more line sensor cameras may be used.

[0049]

As described above, according to the automatic pattern inspection apparatus of the present invention, since the aperture gate is provided for each camera, the warp correcting member can be reduced in size and weight, and can be manufactured at low cost. be able to. In addition, if the size and weight are reduced, the replacement operation can be performed easily and in a short time, and it is particularly suitable to be applied to an apparatus using a back plate.

Further, since the present invention is configured to adjust the pitch of the aperture gate in conjunction with the adjustment of the pitch of the camera, it is not necessary to adjust the pitch of the aperture gate independently, and the adjustment work is easy. is there.

Further, since the present invention uses a pair of rollers as a warp correcting member, it is suitable for use when the film carrier is thin, narrow in width, and short in pattern.

In the present invention, since a pair of rollers and a back plate are used as a warp correcting member, the present invention is suitable for use when the film carrier is thick, wide and long.

Further, according to the present invention, a pair of carrier supports for supporting both sides of the lower surface of the film carrier can be moved closer and farther in conjunction with each other, so that the distance can be freely adjusted according to the width of the film carrier. .

[Brief description of the drawings]

FIG. 1 is an external perspective view of an inspection apparatus main body of an automatic pattern inspection apparatus.

FIG. 2 is a side view showing a part of the apparatus main body cut away.

FIG. 3 is a diagram for explaining pattern imaging.

FIG. 4 is a front view showing an X-axis table and a driving device thereof.

FIG. 5 is a sectional view taken along line VV of FIG. 4;

FIG. 6 is a sectional view taken along line VI-VI of FIG. 4;

FIG. 7 is a front view showing a Z-axis table and a driving device thereof.

8 is a sectional view taken along line VIII-VIII in FIG.

FIG. 9 is a plan view showing a Y-axis table and a driving device thereof.

FIG. 10 is a sectional view taken along line XX of FIG. 9;

FIG. 11 is a schematic view of an aperture gate unit and an omnidirectional lighting device.

FIG. 12 is a perspective view of the aperture gate.

FIG. 13 is a plan view of the aperture gate unit.

FIG. 14 is a schematic view of a conventional automatic pattern inspection apparatus.

[Explanation of symbols]

1: TAB tape, 4A, 4B: Line sensor camera,
11: pattern, 15: table mechanism, 16A, 16B
... Aperture gate section, 21 ... Z-axis table, 23, 24
... S axis table, 48 ... Fixed frame, 50 ... Y axis table, 86 ... Roller, 87 ... Back plate, 90 ... Black matting paint, 105 ... Carrier support, 106 ... Screw rod.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Shinichi Hattori 3-20-1, Nishi-Shimbashi, Minato-ku, Tokyo F-term in Nippon Avionics Co., Ltd. KK01 KK02 MM00 MM03 PP11 PP12 UU04

Claims (5)

[Claims] 1. An automatic pattern inspection apparatus, comprising: an aperture gate for correcting a warpage of a film carrier by a warp correcting member; and sequentially inspecting a pattern formed on the film carrier by a plurality of cameras. An automatic pattern inspection apparatus, wherein a plurality of gates are provided for each camera, and the pitch of these aperture gates is adjusted in conjunction with the pitch adjustment of the camera. 2. The automatic pattern inspection apparatus according to claim 1, wherein the warp correcting member of the aperture gate portion is separated from the running direction of the film carrier so that the lower surface thereof is aligned with the running surface of the film carrier. An automatic pattern inspection apparatus characterized by comprising rollers. 3. The automatic pattern inspection apparatus according to claim 1, wherein the warp correcting member of the aperture gate portion is in contact with the running surface of the film carrier on a line whose lower surface is slightly lower than the running path line of the film carrier. An automatic pattern inspection apparatus comprising: a pair of rollers spaced apart in a running direction of a film carrier. 4. The automatic pattern inspection apparatus according to claim 1, wherein the warp correcting member of the aperture gate portion is separated from the running direction of the film carrier so that a lower surface thereof is aligned with a running surface of the film carrier. And a back plate that is disposed between these rollers so as to be movable up and down and presses the film carrier from above, and that both side edges of the lower surface of the film carrier are supported by a pair of carrier supports. Characteristic automatic inspection equipment. 5. The automatic pattern inspection apparatus according to claim 4, wherein the pair of carrier supports approach and separate in conjunction with the width direction of the carrier, and the interval is adjusted according to the width of the film carrier. An automatic pattern inspection apparatus characterized by being performed.