JP2001170429A - Filter device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow one filter device to exhibit the filtering function corresponding to both flow passages even if the same flow passage is used as a vacuum flow passage or a vacuum breakdown flow passage. SOLUTION: A device body of a filter device is constituted of a base part 1 and filer casings 1a and 1b. A first flow passage connecting port 2 connected to either one side of a primary side flow passage communicating to a positive pressure source and a negative pressure source by switching and a secondary side flow passage communicating to an air pressure instrument to which positive pressure fluid and negative pressure fluid are supplied by switching and a second both passage connecting port 3 connected to the other side are provided for the device body. The both flow passage connecting port 2 and 3 are communicated by the first flow passage permitting only the flow from the second passage connecting port 3 side to the first flow passage connecting port 2 side and the second flow passage permitting only the flow from the first flow passage connecting port 2 to the second passage connecting port 3 side. A first filter element 9a and a second filter element 9b are separately arranged respectively in the first and second flow passages.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filter device provided in a flow passage for selectively supplying positive-pressure air and negative-pressure air to a pneumatic device.

[0002]

2. Description of the Related Art When electronic components such as semiconductor chips are automatically mounted on a mounting portion such as a mounting board from a component supply section, a suction nozzle, ie, a vacuum nozzle is used as a pneumatic device. In this case, after the electronic component arranged in the component supply unit is sucked by the suction nozzle in the negative pressure state and transported to a predetermined position of the mounted portion, the supply of the negative pressure to the suction nozzle is stopped and the suction nozzle is turned In order to reliably separate the electronic component from the electronic component, positive pressure air for vacuum breaking is supplied to the suction nozzle in addition to stopping the supply of the negative pressure.

Therefore, a positive pressure air source such as a compressor and a negative pressure air source such as a vacuum pump are connected to a flow path connected to the suction nozzle, and both positive and negative air pressure sources are connected to the suction nozzle. Are switched and supplied.

As the negative pressure air source, not only when a vacuum pump is used, but also an ejector in which positive pressure air is jetted to a diffuser to generate negative pressure air, that is, a vacuum by the positive pressure air is used. Sometimes.

[0005]

SUMMARY OF THE INVENTION In order to prevent foreign matter such as dust from entering a vacuum generating device such as a vacuum pump or an ejector, a vacuum filter is provided in a vacuum flow path for supplying a vacuum to the suction nozzle. It is necessary to provide a positive pressure flow path that supplies positive pressure air for vacuum breaking in order to prevent foreign matter from clogging pneumatic devices such as suction nozzles.
It is necessary to provide a filter for compressed air.

However, since both the vacuum flow path and the positive pressure flow path are located away from the suction nozzle,
Since there is a possibility that foreign matter may be clogged in a common flow channel provided between the flow channel and the suction nozzle, from the viewpoint of preventing the flow channel from being clogged, the filter is preferably provided at a position close to the suction nozzle. .

However, if a filter is provided in a common flow path that is supplied by switching between negative pressure air and positive pressure air, when a negative pressure is supplied to the suction bit, dust or the like is applied to the filter. Foreign matter will be trapped, and if positive pressure air is supplied to the suction bit for vacuum breakage, the air will flow back in the flow path, so the foreign matter trapped in the filter will flow back and scatter from the suction bit. Problems arise.

[0008] An object of the present invention is to provide a filter function even when both positive and negative air are supplied to a flow path in which a positive pressure source and a negative pressure source are switched and communicated to supply a positive pressure air and a negative pressure air. Is to be able to demonstrate.

[0009]

SUMMARY OF THE INVENTION The present invention is directed to a primary side flow passage for switching between a positive pressure source and a negative pressure source and communicating with a pneumatic device to which a positive pressure fluid and a negative pressure fluid are selectively supplied. A filter device disposed between the secondary flow path and
An apparatus body provided with a first flow path connection port to which one of the primary flow path and the secondary flow path is connected, and a second flow path connection port to be connected to the other, A first flow path that allows a flow from the second flow path connection port to the first flow path connection port and prevents a flow in the opposite direction; and a second flow path that is formed from the first flow path connection port. A second flow passage that allows a flow toward the passage connection port and blocks a flow in the reverse direction, a first filter element provided in the first flow passage, and a second flow passage provided in the second flow passage. And a second filter element.

[0010] The apparatus main body is characterized in that it has a base having both flow path connection ports concentrically provided at both ends, and two filter casings which are detachably mounted on both sides of the base.

Each of the filter elements has a cylindrical shape, and a flow regulating valve is disposed inside at least one of the two filter elements.

In the apparatus main body having the above-described structure, since two connection ports to the flow path are provided, for example, the first flow path connection port is connected to the primary flow path, and the second flow path connection port is connected. Is connected to the secondary flow path, the filter device of the present invention can be interposed between the primary flow path and the secondary flow path.

In the above configuration, the first flow path connection port connected to the primary flow path and the second flow path connection port connected to the secondary flow path are connected to the first flow path and the second flow path. And two flow paths. In the first flow path, the check valve prevents backflow, and only the flow from the second flow path connection port to the first flow path connection port is allowed. In the second flow path, similarly to the first flow path, the backflow is prevented by the check valve, and only the flow from the first flow path connection port to the second flow path connection port is allowed.

Therefore, for example, when the primary side flow path is connected to a negative pressure source such as a vacuum pump, the negative pressure fluid passes through the first flow path provided in the apparatus main body of the filter device. It will be supplied to the pneumatic device connected to the side flow path. That is, in such a case, the negative pressure source and the pneumatic device are connected by the vacuum flow path via the primary flow path, the first flow path, and the secondary flow path. Dust and the like are removed from the air sucked from the second flow path connection port by the first filter element.

When the primary flow path is connected to a positive pressure source such as a compression pump, the positive pressure source and the pneumatic device are connected via the primary flow path, the second flow path, and the secondary flow path. They will be connected by a vacuum breaking channel. The positive pressure fluid that has entered from the second flow path connection port of the filter device is subjected to removal of dust and the like by the second filter element.

That is, when the filter device of the present invention is used, even if the same flow passage is switched to a vacuum flow passage or a vacuum break flow passage, the positive pressure fluid and the negative pressure fluid are different from each other in the device main body. Since the dust flows through the passages, dust caught by the filter elements provided in the respective passages,
It is not scattered by the backflowing fluid.

[0017]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a sectional view showing a filter device according to an embodiment of the present invention. FIG. 2 (A) is a plan view of FIG. 1, and FIG. 2 (B) is a front view of FIG. is there.

The filter device comprises a base 1 and two filter casings 1a and 1b which are detachable from the base, and a main body of the filter is formed. 2, the second flow path connection port 3 is formed concentrically.

First flow path connection port 2, second flow path connection port 3
Each has a quick joint 4 attached thereto, which communicates with a primary-side flow path that switches and communicates with a positive pressure source and a negative pressure source, and communicates with a pneumatic device that is switched and supplied with a positive pressure fluid and a negative pressure fluid. Each channel connection port can be easily and detachably attached to a pipe end of a pipe constituting the secondary channel.

A partition 5 is provided in the base 1, and the first flow path connection port 2 and the second flow path connection port 3 are separated from each other by a first flow path (FIG. Medium, solid line arrow 6 indicates the path), and second flow path (in the figure, broken line arrow 7 indicates the path)
And each is communicated separately. The first flow path connection port 2 side is
With the quick joint 4 attached, openings 6a, 7a are formed along the partition 5 and openings 6b, 7b are also formed along the partition 5 on the second flow path connection port 3 side.

On the side of the base 1 where the openings 6a and 6b are provided,
The filter casing 1a is mounted. A cylindrical filter element 9a is accommodated in the accommodation space 8a inside the filter casing 1a. When the filter casing 1a is mounted, the fitting projection of the filter casing 1a is formed such that the inside 10a of the filter element 9a communicates with the opening 6a and the inside of the housing space 8a outside the cylinder of the filter element 9a communicates with the opening 6b. Part 11
a is removably fitted into the fitting hole 12 a of the base 1.

Similarly, on the side of the base 1 where the openings 7a and 7b are provided, a filter casing 1 for accommodating a filter element 9b formed in a cylindrical shape in an internal accommodating space 8b.
b is attached. When the filter casing 1b is mounted, the inside 10b of the filter element 9b is inserted into the opening 7b, and the housing space 8 outside the cylinder of the filter element 9b is inserted.
The fitting protrusion 11b of the filter casing 1b is removably fitted to the fitting hole 12b of the base 1 such that the inside of the filter b communicates with the opening 7a.

A check valve 13a is provided at a communicating portion between the housing space 8a of the filter casing 1a and the opening 6b of the base 1. The check valve 13a allows the passage of gas from the opening 6b to the accommodation space 8a, but prevents the passage of gas from the accommodation space 8a to the opening 6b.

Similarly, the housing space 8b and the opening 7a of the main body
A check valve 13b is also provided at the communication portion with the opening 7a.
Is allowed to pass from the to the accommodation space 8b,
Gas passage in the opposite direction is prevented.

Next, a case where the filter device having the above configuration is actually used will be described. FIG. 3 illustrates the work suction by the suction nozzle with the filter device of the present invention interposed,
3 shows a circuit in which a workpiece is detached due to vacuum breakage in the same flow path.

In the case shown in FIG. 3, the first flow path connection port 2 side of the filter device 14 having the above structure is connected to the vacuum pump 16 via the electromagnetic valve 15a and to the compression pump 17 via the electromagnetic valve 15b. Have been. The second flow path connection port 3 is connected to the suction nozzle 18. When the vacuum pump 16 is operated in vacuum with the circuit having such a configuration, air is drawn through the first flow path in the filter device 14 of the present invention, and the work 19 is moved to the suction end of the suction nozzle 18 on the suction nozzle 18 side. Is adsorbed. In this state, the suction nozzle 18 moves to a predetermined position and conveys the work 19 (indicated by a broken line in the figure).

In the above state, as shown in FIG. 1, the suction air enters through the second flow path connection port 3 of the filter device 14, and the opening 6b, the accommodation space 8a, the filter element 9
a, the inside of the cylinder 10a, and the first passage connecting port 1 through the first passage (indicated by a solid arrow 6 in the figure) comprising the opening 6a.
From the vacuum pump 16 through the solenoid valve 15a. Dust and the like in the air that has entered the filter device 14 are removed on the accommodation space 8a side of the filter element 9a.

The work 19 sucked by the suction nozzle 18 as described above is transported to a predetermined position.
5a is switched to the solenoid valve 15b, and the primary flow path is connected to the compression pump 17. The compressed air generated by the compression operation of the compression pump 17 passes through the second flow path (indicated by a dashed arrow 7 in the figure) of the filter device 14 of the present invention, reaches the opening end of the adsorption nozzle 18 and vacuums. Cause destruction.
At the open end of the suction nozzle 18, the work 19 that has been sucked at the open end of the suction nozzle 18 is pushed and released by the compressed air due to the vacuum breaking.

In the vacuum breaking, compressed air from the compression pump 17 enters through the first flow path connection port 2 of the filter device,
Opening 7a, accommodation space 8b, filter element 9b,
Through a second flow path (indicated by a dashed arrow 7 in the figure) consisting of the inside of the cylinder 10b and the opening 7b, it is sent from the second flow path connection port 3 to the opening end side of the suction nozzle 18. . The compressed air does not pass through the first flow path due to the check valve 13a, and the dust removed by the filter element 9a
There is no danger of being scattered by the compressed air for vacuum breaking. The dust removed by the filter element 9a is not discharged from the suction nozzle 18 side by the compressed air.

The filter casing 1b having the structure shown in FIG.
The side in contact with the inside of the cylinder 10b is opened as shown in FIG. 4, a flow rate adjusting needle mounting member 20 is provided in the opening, and the flow rate adjusting needle 21 is screwed into the flow rate adjusting needle mounting member 20. , The flow rate may be adjusted. The flow control needle 21 has an opening 7 whose tip 21a communicates with the inside 10b of the filter element 9a.
b, and the flow rate can be adjusted according to the insertion amount of the tip 21a. If the insertion amount is increased, the gap between the tip 21a and the opening 7b is reduced, and the flow rate is reduced.

In the circuit shown in FIG. 3, the filter device 14 of the present invention is connected to the vacuum pump 1 via solenoid valves 15a and 15b.
6, the structure connected to the compression pump 17 is shown. As shown in FIG.
The flow rate may be adjusted without using the flow rate adjusting needle shown in FIG. 4 by interposing the flow rate adjusting quick joint speed controller 22 between the a and 15b.

The present invention is not limited to the above-described embodiment, and it goes without saying that various modifications can be made without departing from the scope of the invention.

For example, a viewing window may be provided in the filter casing so that the state of contamination of the filter element in the housing space can be checked. Alternatively, the filter casing may be made of a transparent material so that the state of contamination of the filter element can be checked.

Further, the check valve may be mounted at a communication portion between the inside of the cylinder of the filter element and the opening of the main body.

In the above description, the case where the first flow path connection port side is connected to the primary flow path and the second flow path connection port side is connected to the secondary flow path has been described. Since the flow path connection port and the second flow path connection port are formed in the same manner, the first flow path connection port side is used as a secondary flow path, and the second flow path connection port side is used as a primary flow path. It may be connected to a road.

Although the case where the flow rate adjusting needle is provided from the side of the filter casing 1b on the second flow path side has been described, it may be provided from the side of the filter casing 1a on the first flow path side. Or you may make it provide from both sides of both filter casings 1a and 1b.

[0038]

If the filter device of the present invention is interposed in the flow path in which the positive pressure source and the negative pressure source are switched and communicated to supply the positive pressure air and the negative pressure air, both the positive and negative air are provided. Is supplied, the same filter device can exert a filter function suitable for both fluids.

[Brief description of the drawings]

FIG. 1 is a sectional view showing an example of an embodiment of a filter device of the present invention.

2A is a plan view of the filter device shown in FIG. 1, and FIG. 2B is a front view thereof.

FIG. 3 is a circuit diagram showing an example in which a filter device of the present invention is interposed.

FIG. 4 is a sectional view partially showing a state in which a flow rate adjusting needle is mounted on the filter device of the present invention.

FIG. 5 is a circuit diagram showing a modification of the circuit configuration using the filter device of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Base 1a Filter casing 1b Filter casing 2 1st flow path connection port 3 2nd flow path connection port 4 Quick joint 5 Partition wall 6a Opening 6b Opening 7a Opening 7b Opening 8a Housing space 8b Housing space 9a Filter element 9b Filter element 10a In-cylinder 10b In-cylinder 11a Fitting protrusion 11b Fitting protrusion 12a Fitting hole 12b Fitting hole 13a Check valve 13b Check valve 14 Filter device 15a Solenoid valve 15b Solenoid valve 16 Vacuum pump 17 Compression pump 18 Suction nozzle 19 Workpiece 20 Flow rate adjusting needle mounting member 21 Flow rate adjusting needle

Claims (3)

[Claims] 1. A primary-side flow path that switches and communicates with a positive pressure source and a negative pressure source, and a secondary-side flow path that communicates with a pneumatic device that is supplied by switching between a positive pressure fluid and a negative pressure fluid. It is a filter device arrange | positioned between, The 1st flow path connection port to which any one of said primary side flow path and the secondary side flow path is connected, and the 2nd flow path connection to which the other is connected An apparatus main body provided with a port, a first flow path that allows a flow from the second flow path connection port to the first flow path connection port and blocks a flow in the opposite direction, A second flow path that allows a flow from the flow path connection port to the second flow path connection port and blocks a flow in the reverse direction; and a first filter element provided in the first flow path. And a second filter element provided in the second flow path. 2. The filter device according to claim 1, wherein
The filter device according to claim 1, wherein the device main body includes a base having both of the flow path connection ports concentrically provided at both ends, and two filter casings detachably mounted on both sides of the base. 3. The filter device according to claim 1, wherein each of said filter elements is cylindrical, and a flow regulating valve is arranged inside at least one of said two filter elements. apparatus.