JP2001144582A - Crystal vibrator for surface mount - Google Patents
Crystal vibrator for surface mountInfo
- Publication number
- JP2001144582A JP2001144582A JP2000315092A JP2000315092A JP2001144582A JP 2001144582 A JP2001144582 A JP 2001144582A JP 2000315092 A JP2000315092 A JP 2000315092A JP 2000315092 A JP2000315092 A JP 2000315092A JP 2001144582 A JP2001144582 A JP 2001144582A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- crystal
- plug
- insulating film
- main surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、表面実装用水晶振
動子に関するものである。The present invention relates to a crystal resonator for surface mounting.
【０００２】[0002]
【従来の技術】従来の水晶発振片の一例を図６を用いて
説明する。図６は音叉型水晶発振片の振動部の断面図で
あるが、水晶板平面上に表面が露出するように設けられ
た金属膜から成る平面電極２と、水晶板の側面上に表面
が露出するように設けられた側面電極３により水晶発振
片１を発振させる構造をとっている。さらに、この水晶
発振片１を図７に示したプラグ５へ結合したのちケース
６をかぶせ、水晶振動子７となる。2. Description of the Related Art An example of a conventional crystal oscillation piece will be described with reference to FIG. FIG. 6 is a cross-sectional view of the vibrating portion of the tuning-fork type quartz oscillation piece. The plane electrode 2 is formed of a metal film provided so that the surface is exposed on the plane of the quartz plate, and the surface is exposed on the side surface of the quartz plate. The structure is such that the quartz crystal resonator element 1 is oscillated by the side electrode 3 provided to perform the operation. Further, the crystal resonator element 1 is connected to the plug 5 shown in FIG.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、従来の
技術では、前記プラグ及びケースから放出されるガスが
表面が露出された平面電極上へ吸着し、その結果として
発振周波数のシフトやクリスタルインピーダンス（以下
ＣＩと略称す）の増加等の特性劣化を招いてしまう。However, in the prior art, the gas released from the plug and the case is adsorbed on the flat electrode whose surface is exposed, and as a result, the oscillation frequency shifts and the crystal impedance (hereinafter referred to as "crystal impedance") increase. CI) (abbreviated CI).
【０００４】さらに、前記プラグやケースから発せられ
るゴミ及び製造工程中に発せられるゴミが平面電極と側
面電極の間に付着し、その結果電極間が短絡して発振停
止を招くことになる。Further, dust generated from the plug or the case and dust generated during the manufacturing process adhere between the planar electrode and the side electrode, and as a result, the electrodes are short-circuited to stop oscillation.
【０００５】近年、水晶振動子はコンピュータ等の情報
機器やポケツトベル等の通信機器のクロック源として使
用されており、高精度・高信頼性の要求がますます強く
なってきている。その中で、前述した発振周波数のシフ
トやＣＩの増加等の特性劣化及び発振停止は致命的欠陥
となっていた。特に発振停止は、水晶振動子を使用して
いる製品の機能までも全面的に停止してしまう重大欠陥
であり、その解決方法が待ち望まれていた。In recent years, crystal oscillators have been used as clock sources for information devices such as computers and communication devices such as pagers, and demands for high precision and high reliability have been increasing. Among them, the deterioration of characteristics such as the shift of the oscillation frequency and the increase of CI and the stop of oscillation have been fatal defects. In particular, oscillation stop is a serious defect that completely stops the function of a product using a crystal resonator, and a solution to the problem has been long-awaited.
【０００６】本発明は以上の課題を解決するものであ
り、その目的とするところは、水晶発振片電極の少なく
とも平面電極上に絶縁膜を堆積させることにより、外部
からガスが電極膜へ吸着するのを防止し、さらに、外部
からのゴミが電極間へ付着しても電極間の短絡を防止す
ることにより、高精度・高信頼性の表面実装用水晶振動
子を提供することにある。The present invention has been made to solve the above problems, and an object of the present invention is to deposit an insulating film on at least a plane electrode of a crystal oscillation piece electrode so that gas is adsorbed from the outside to the electrode film. Another object of the present invention is to provide a crystal oscillator for surface mounting with high precision and high reliability by preventing short circuit between electrodes even if dust from the outside adheres between the electrodes.
【０００７】[0007]
【課題を解決するための手段】本発明は、主面とこの主
面に隣り合う側面とを有する水晶板と、前記主面に表面
が露出するように形成された金属膜からなる第一電極
と、前記側面に表面が露出するように形成された金属膜
からなる第二電極を有する水晶発振片が、ハンダまたは
金属ペーストを接着剤としてプラグに固定され、前記プ
ラグにケースをかぶせてなる表面実装用水晶振動子にお
いて、少なくとも前記第一電極の前記表面を覆う絶縁膜
が設けられたことを特徴とするものである。According to the present invention, there is provided a first electrode comprising a quartz plate having a main surface and a side surface adjacent to the main surface, and a metal film formed so that the surface is exposed on the main surface. And a crystal oscillation piece having a second electrode made of a metal film formed such that a surface is exposed on the side surface, and fixed to a plug using solder or metal paste as an adhesive, and a surface covered with a case over the plug. In the mounting quartz oscillator, an insulating film covering at least the surface of the first electrode is provided.
【０００８】また、本発明は、主面とこの主面に隣り合
う側面とを有する水晶板と、前記主面に表面が露出する
ように形成された金属膜からなる第一電極と、前記側面
と前記主面の一部とに表面が露出するように形成された
金属膜からなる第二電極を有する水晶発振片が、ハンダ
または金属ペーストを接着剤としてプラグに固定され、
前記プラグにケースをかぶせてなる表面実装用水晶振動
子において、少なくとも前記第一電極の前記表面および
前記第二電極のうち前記主面の一部に形成された部分の
前記表面を覆う絶縁膜が設けられたことを特徴とするも
のである。Further, the present invention provides a quartz plate having a main surface and a side surface adjacent to the main surface, a first electrode made of a metal film formed so that a surface is exposed on the main surface, And a crystal oscillation piece having a second electrode made of a metal film formed so that the surface is exposed to a part of the main surface, is fixed to a plug using solder or metal paste as an adhesive,
In the surface-mount crystal resonator formed by covering a case with the plug, an insulating film covering at least the surface of the first electrode and the surface of a portion of the second electrode that is formed on a part of the main surface is formed. It is characterized by being provided.
【０００９】[0009]
【発明の実施の形態】本発明の水晶振動子に用いられる
水晶発振片の実施の形態の一例を図１により説明する。
図１は音叉型水晶発振片の振動部の断面図であるが、そ
の電極は、水晶板平面上に設けられた金属膜からなる平
面電極２と水晶板の側面上に設けられた金属膜からなる
側面電極３から構成されている。さらに、絶縁膜４をこ
の平面電極２の上に堆積させ、外部からのガスやゴミの
吸着を防止する構造になっている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a crystal resonator element used in a crystal resonator according to the present invention will be described with reference to FIG.
FIG. 1 is a cross-sectional view of a vibrating portion of a tuning-fork type quartz crystal resonator element. The electrodes are composed of a plane electrode 2 made of a metal film provided on a plane of a quartz plate and a metal film provided on a side surface of the quartz plate. The side electrode 3 is formed. Further, an insulating film 4 is deposited on the flat electrode 2 to prevent external gas and dust from being adsorbed.
【００１０】ここに用いられる金属膜はＡｕ、Ａｇ、Ｃ
ｒ等であり、真空蒸着やスパツタリング、プラズマＣＶ
Ｄ等の乾式膜付け法や電界メッキ、無電界メヅキ等の湿
式膜付け法により形成する。また、平面電極上に堆積さ
せる絶縁膜はＳｉＯ2 、ＺｒＯ2 等の酸化膜やＳｉ3 Ｎ
4 、ＴｉＮ等の窒化膜等であり、金属膜と同様に前述の
乾式あるいは湿式膜付け法により形成する。The metal films used here are Au, Ag, C
r, vacuum deposition, sputtering, plasma CV
It is formed by a dry film forming method such as D or a wet film forming method such as electroplating or electroless plating. The insulating film deposited on the flat electrode is an oxide film such as SiO 2 or ZrO 2 or Si 3 N
4 , a nitride film such as TiN or the like, which is formed by the above-mentioned dry or wet film formation method similarly to the metal film.
【００１１】図１に示した実施の形態では、平面電極上
にのみ絶縁膜４を堆積させているが、本発明はこれに限
定されるものではなく、図２に示したように水晶発振片
の平面全体に絶縁膜４を堆積しても良いし、図３に示し
たように平面電極２及び側面電極３の両方に絶縁膜４を
堆積させても同様な効果を得ることができる。なお、側
面電極３の面積は平面電極２の面積より極めて小さいた
め、少なくとも平面電極２上に絶縁膜４が堆積していれ
ば前述の効果を得ることができる。In the embodiment shown in FIG. 1, the insulating film 4 is deposited only on the plane electrode. However, the present invention is not limited to this, and as shown in FIG. The same effect can be obtained by depositing the insulating film 4 on the entire surface of the flat electrode 2 or by depositing the insulating film 4 on both the planar electrode 2 and the side electrode 3 as shown in FIG. Since the area of the side electrode 3 is extremely smaller than the area of the plane electrode 2, the above-described effect can be obtained if at least the insulating film 4 is deposited on the plane electrode 2.
【００１２】また、本発明は平面電極の形状に限定され
るものでもなく、例えば図１に示した電極形状と異なる
図４に示した様な電極形状であってもかまわない。図４
の電極は、水晶板の平面には、平面電極２のほかに、平
面電極３ａが設けられている。平面電極３ａは、側面電
極３と導通するように形成され、側面電極３と一体化さ
れている。したがって、側面電極３が平面の一部にも形
成されている電極形状となっている。Further, the present invention is not limited to the shape of the flat electrode, and may be, for example, an electrode shape shown in FIG. 4 which is different from the electrode shape shown in FIG. FIG.
In the above-mentioned electrode, a plane electrode 3a is provided in addition to the plane electrode 2 on the plane of the quartz plate. The plane electrode 3 a is formed so as to conduct with the side electrode 3, and is integrated with the side electrode 3. Therefore, the side electrode 3 has an electrode shape that is also formed on a part of the plane.
【００１３】水晶発振片を水晶振動子へ組み込む場合、
水晶発振片をプラグへ結合し、さらにそれへ真空中にお
いて、ケースをかぶせなければならない。水晶発振片と
プラグとの結合はハンダやＡｇ等の金属ペーストが用い
られ、プラグとケースとの結合にも同様な材料が用いら
れる。近年、表面実装用としてセラミックを用いたプラ
グやケースが用いられているが、水晶発振片との結合は
同じくハンダや金属ペースト等の接着剤が使用される。
このプラグやケース、接着剤から放出されるガスが水晶
発振片の電極膜へ吸着すると水晶発振片の重量が増加す
るため発振周波数がシフトしたり、ＣＩが増加してしま
う。従来の電極膜は金属膜から成っておりガスの吸着が
発生し易かったのであるが、本発明者は絶縁膜のガス吸
着量が金属膜のそれと比較して極めて低いことを見出し
た。表１に本発明の実施例（試料１〜３）と比較例（試
料４〜６）の比較試験結果を示す。試験は１００℃の温
度中において１０００時間放置した時の発振周波数の変
化量（ΔＴｏ）及びＣＩの変化量（ΔＣＩ）を調査し
た。[0013] When incorporating a crystal oscillation piece into a crystal resonator,
The crystal resonator element must be connected to the plug, and then be covered with a case in a vacuum. A metal paste such as solder or Ag is used for the connection between the crystal oscillation piece and the plug, and a similar material is used for the connection between the plug and the case. In recent years, plugs and cases made of ceramics have been used for surface mounting, but bonding with a crystal oscillation piece also uses an adhesive such as solder or metal paste.
When the gas released from the plug, the case, or the adhesive is adsorbed on the electrode film of the crystal oscillation piece, the weight of the crystal oscillation piece increases, so that the oscillation frequency shifts or CI increases. Although the conventional electrode film is made of a metal film and gas is easily adsorbed, the present inventor has found that the gas adsorption amount of the insulating film is extremely low as compared with that of the metal film. Table 1 shows the comparison test results of the examples of the present invention (samples 1 to 3) and the comparative examples (samples 4 to 6). In the test, the amount of change in oscillation frequency (ΔTo) and the amount of change in CI (ΔCI) when left at a temperature of 100 ° C. for 1000 hours were investigated.
【表１】 表１から明らかな様に、本発明による水晶発振片（試料
１〜３）は、発振周波数やＣＩの変化がほとんどなく比
較例（試料４〜６）と比較しても精度が大巾に向上して
いることがわかる。[Table 1] As is clear from Table 1, the crystal oscillation piece (samples 1 to 3) according to the present invention has little change in oscillation frequency and CI, and the accuracy is greatly improved even when compared with the comparative examples (samples 4 to 6). You can see that it is doing.
【００１４】さらに、絶縁膜を平面電極上へ堆積させた
ので平面電極と側面電極間にゴミが付着しても、電極間
が短絡して発振停止を招くことが皆無となる。特に前述
したプラグやケース接着剤から発せられるゴミや製造工
程中に発せられるゴミをなくすことは極めて困難であつ
たが、絶縁膜を平面電極上に堆積することによりこの間
題を容易に解決することができた。Further, since the insulating film is deposited on the plane electrode, even if dust adheres between the plane electrode and the side electrode, the electrodes are short-circuited and oscillation is not stopped. In particular, it was extremely difficult to eliminate the dust generated from the plug or the case adhesive and the dust generated during the manufacturing process, but this problem can be easily solved by depositing an insulating film on the flat electrode. Was completed.
【００１５】表１に示した本実施例では、絶縁膜として
酸化膜を用いたが、酸化膜の他に前述した窒化膜やフツ
化膜等の絶縁膜についても表１に示した結果と同様な結
果が得られた。In this embodiment shown in Table 1, an oxide film was used as the insulating film. However, in addition to the oxide film, the above-mentioned insulating films such as the nitride film and the fluoride film were similar to the results shown in Table 1. Results were obtained.
【００１６】なお、本発明の水晶発振片の外形形状は、
実施の形態で説明した外形形状に限定されるものではな
く、あらゆる形状の水晶発振片へ応用できる。例えば、
図５に縦振動子の振動部断面図を示すが、本発明の構成
をとることにより前述の結果を得ることができる。The external shape of the crystal oscillation piece of the present invention is as follows.
The present invention is not limited to the external shape described in the embodiment, and can be applied to crystal oscillators of any shape. For example,
FIG. 5 shows a cross-sectional view of the vibrating portion of the vertical vibrator. The above-described result can be obtained by adopting the configuration of the present invention.
【００１７】[0017]
【発明の効果】以上述べたように本発明の表面実装用水
晶振動子によれば、電極を構成する平面電極と側面電極
の中で少なくとも平面電極上に絶縁膜を有するので、水
晶振動子を形成するプラグやケース、接着剤から放出す
るガスが水晶発振片の平面電極上へ吸着することを防止
でき、その結果として発振周波数の変化やＣＩの増加等
の特性劣化がなく高精度の表面実装用水晶振動子を得る
ことができる。さらに、平面電極と側面電極間のゴミの
付着による短絡、すなわち、発振停止が皆無となり、高
信頼性の表面実装用水晶振動子を得ることができる。As described above, according to the surface mount crystal resonator of the present invention, since the insulating film is provided on at least the plane electrode among the plane electrodes and the side electrodes constituting the electrodes, the crystal resonator can be used. Prevents gas emitted from the plug, case, or adhesive to be formed from adsorbing onto the flat electrode of the crystal resonator element. As a result, high-precision surface mounting without characteristics deterioration such as a change in oscillation frequency or an increase in CI is achieved. The crystal oscillator for use can be obtained. Furthermore, there is no short circuit due to adhesion of dust between the plane electrode and the side electrode, that is, there is no oscillation stop, and a highly reliable surface mount crystal resonator can be obtained.
【図１】本発明の水晶発振片の振動部を示す断面図であ
る。FIG. 1 is a cross-sectional view showing a vibrating part of a crystal resonator element according to the present invention.
【図２】本発明の水晶発振片の振動部を示す断面図であ
る。FIG. 2 is a cross-sectional view showing a vibrating portion of the crystal oscillation piece of the present invention.
【図３】本発明の水晶発振片の振動部を示す断面図であ
る。FIG. 3 is a cross-sectional view showing a vibrating portion of the crystal oscillation piece of the present invention.
【図４】本発明の水晶発振片の振動部を示す断面図であ
る。FIG. 4 is a cross-sectional view showing a vibrating portion of the crystal oscillation piece of the present invention.
【図５】本発明の水晶発振片の振動部を示す断面図であ
る。FIG. 5 is a cross-sectional view showing a vibrating portion of the crystal oscillation piece of the present invention.
【図６】従来の水晶発振片の振動部を示す断面図であ
る。FIG. 6 is a cross-sectional view showing a vibrating portion of a conventional crystal oscillation piece.
【図７】従来の水晶振動子を示す図である。FIG. 7 is a view showing a conventional crystal unit.
１…水晶発振片 ２，３ａ…平面電極 ３…側面電極 ４…絶縁膜 ５…プラグ ６…ケース ７…水晶振動子 DESCRIPTION OF SYMBOLS 1 ... Crystal oscillation piece 2, 3a ... Plane electrode 3 ... Side electrode 4 ... Insulating film 5 ... Plug 6 ... Case 7 ... Crystal oscillator
Claims (4)
る水晶板と、前記主面に表面が露出するように形成され
た金属膜からなる第一電極と、前記側面に表面が露出す
るように形成された金属膜からなる第二電極を有する水
晶発振片が、ハンダまたは金属ペーストを接着剤として
プラグに固定され、前記プラグにケースをかぶせてなる
表面実装用水晶振動子において、少なくとも前記第一電
極の前記表面を覆う絶縁膜が設けられたことを特徴とす
る表面実装用水晶振動子。1. A quartz plate having a main surface and a side surface adjacent to the main surface, a first electrode made of a metal film formed so that a surface is exposed on the main surface, and a surface exposed on the side surface A crystal oscillation piece having a second electrode made of a metal film formed so as to be fixed to a plug using solder or metal paste as an adhesive, and at least in a surface-mount crystal resonator formed by covering the plug with a case, A surface mounted crystal resonator, wherein an insulating film covering the surface of the first electrode is provided.
る水晶板と、前記主面に表面が露出するように形成され
た金属膜からなる第一電極と、前記側面と前記主面の一
部とに表面が露出するように形成された金属膜からなる
第二電極を有する水晶発振片が、ハンダまたは金属ペー
ストを接着剤としてプラグに固定され、前記プラグにケ
ースをかぶせてなる表面実装用水晶振動子において、少
なくとも前記第一電極の前記表面および前記第二電極の
うち前記主面の一部に形成された部分の前記表面を覆う
絶縁膜が設けられたことを特徴とする表面実装用水晶振
動子。2. A quartz plate having a main surface and a side surface adjacent to the main surface, a first electrode made of a metal film formed so that a surface is exposed on the main surface, the side surface and the main surface A crystal oscillation piece having a second electrode made of a metal film formed so that the surface is exposed to a part of the surface is fixed to a plug using solder or metal paste as an adhesive, and a surface is formed by covering the plug with a case. In the mounting quartz resonator, an insulating film is provided to cover at least the surface of the first electrode and a portion of the second electrode formed on a part of the main surface. Crystal oscillator for mounting.
する請求項１または請求項２に記載の表面実装用水晶振
動子。3. The crystal resonator for surface mounting according to claim 1, wherein the insulating film is an oxide film.
する請求項１または請求項２に記載の表面実装用水晶振
動子。4. The crystal resonator for surface mounting according to claim 1, wherein the insulating film is a nitride film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000315092A JP2001144582A (en) | 2000-10-16 | 2000-10-16 | Crystal vibrator for surface mount |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000315092A JP2001144582A (en) | 2000-10-16 | 2000-10-16 | Crystal vibrator for surface mount |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29166091A Division JPH05129874A (en) | 1991-11-07 | 1991-11-07 | Crystal oscillator chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001144582A true JP2001144582A (en) | 2001-05-25 |
Family
ID=18794245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000315092A Pending JP2001144582A (en) | 2000-10-16 | 2000-10-16 | Crystal vibrator for surface mount |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001144582A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030085149A (en) * | 2002-04-29 | 2003-11-05 | 주식회사 코스텍시스 | a quartz vibrator |
| KR100461153B1 (en) * | 2002-06-19 | 2004-12-13 | 주식회사 코스텍시스 | a quartz vibrator |
| JP5128670B2 (en) * | 2008-08-27 | 2013-01-23 | セイコーインスツル株式会社 | Piezoelectric vibrator, oscillator, electronic device, radio timepiece, and method for manufacturing piezoelectric vibrator |
| JP2017195572A (en) * | 2016-04-22 | 2017-10-26 | セイコーエプソン株式会社 | Vibration element, vibrator, oscillator, electronic apparatus and moving body |
-
2000
- 2000-10-16 JP JP2000315092A patent/JP2001144582A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030085149A (en) * | 2002-04-29 | 2003-11-05 | 주식회사 코스텍시스 | a quartz vibrator |
| KR100461153B1 (en) * | 2002-06-19 | 2004-12-13 | 주식회사 코스텍시스 | a quartz vibrator |
| JP5128670B2 (en) * | 2008-08-27 | 2013-01-23 | セイコーインスツル株式会社 | Piezoelectric vibrator, oscillator, electronic device, radio timepiece, and method for manufacturing piezoelectric vibrator |
| US8410861B2 (en) | 2008-08-27 | 2013-04-02 | Seiko Instruments Inc. | Piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece, and method of manufacturing piezoelectric vibrator |
| JP2017195572A (en) * | 2016-04-22 | 2017-10-26 | セイコーエプソン株式会社 | Vibration element, vibrator, oscillator, electronic apparatus and moving body |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8875362B2 (en) | Method of manufacturing piezoelectric device | |
| WO2007072668A1 (en) | Piezoelectric vibration piece and piezoelectric vibration device | |
| US6961981B2 (en) | Method of producing a piezoelectric resonator | |
| JPS5925486B2 (en) | piezoelectric vibrator container | |
| JP2001144582A (en) | Crystal vibrator for surface mount | |
| KR100219290B1 (en) | Piezoelectric resonator and piezoelectric parts using the resonator | |
| JP2001102904A (en) | Crystal vibrator | |
| JP2001144581A (en) | Piezoelectric vibrator and its manufacturing method | |
| JPH05129874A (en) | Crystal oscillator chip | |
| JP2001160733A (en) | Crystal oscillation piece | |
| JP2007258947A (en) | Piezoelectric vibrator, and its fabrication process | |
| JP3603571B2 (en) | Piezoelectric element and method of manufacturing the same | |
| JPH11274891A (en) | Piezoelectric vibrator, piezoelectric vibrator unit using the same and piezoelectric oscillator | |
| JP5839997B2 (en) | Manufacturing method of crystal unit | |
| JP3702656B2 (en) | Piezoelectric element and manufacturing method thereof | |
| JP2004222053A (en) | Piezoelectric device, mobile telephone unit, and electronic equipment | |
| JP2000269772A (en) | Electronic component | |
| JP2020065223A (en) | Tuning fork type piezoelectric vibrating piece and tuning fork type piezoelectric vibrator using tuning fork type piezoelectric vibrating piece | |
| JP2000082936A (en) | Tuning fork quartz oscillator and vibrator | |
| JPH088677A (en) | Piezoelectric parts | |
| JP4548077B2 (en) | Quartz crystal resonator element and crystal resonator manufacturing method | |
| JP2002204140A (en) | Piezoelectric vibrator | |
| JPH0223034B2 (en) | ||
| JPH098595A (en) | Surface acoustic wave device and manufacture therefor | |
| JP2000022488A (en) | Surface acoustic wave movement |