JP2001144015A5 - - Google Patents

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Publication number
JP2001144015A5
JP2001144015A5 JP2000243194A JP2000243194A JP2001144015A5 JP 2001144015 A5 JP2001144015 A5 JP 2001144015A5 JP 2000243194 A JP2000243194 A JP 2000243194A JP 2000243194 A JP2000243194 A JP 2000243194A JP 2001144015 A5 JP2001144015 A5 JP 2001144015A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000243194A
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Japanese (ja)
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JP2001144015A (ja
JP5255739B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2000243194A priority Critical patent/JP5255739B2/ja
Priority claimed from JP2000243194A external-priority patent/JP5255739B2/ja
Publication of JP2001144015A publication Critical patent/JP2001144015A/ja
Publication of JP2001144015A5 publication Critical patent/JP2001144015A5/ja
Application granted granted Critical
Publication of JP5255739B2 publication Critical patent/JP5255739B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000243194A 1999-08-18 2000-08-10 半導体装置の作製方法 Expired - Fee Related JP5255739B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000243194A JP5255739B2 (ja) 1999-08-18 2000-08-10 半導体装置の作製方法

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP23121199 1999-08-18
JP1999231211 1999-08-18
JP11-231211 1999-08-18
JP11-244204 1999-08-31
JP24420499 1999-08-31
JP1999244204 1999-08-31
JP2000243194A JP5255739B2 (ja) 1999-08-18 2000-08-10 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JP2001144015A JP2001144015A (ja) 2001-05-25
JP2001144015A5 true JP2001144015A5 (enrdf_load_stackoverflow) 2007-09-06
JP5255739B2 JP5255739B2 (ja) 2013-08-07

Family

ID=27331739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000243194A Expired - Fee Related JP5255739B2 (ja) 1999-08-18 2000-08-10 半導体装置の作製方法

Country Status (1)

Country Link
JP (1) JP5255739B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014065018A1 (ja) 2012-10-23 2014-05-01 富士電機株式会社 半導体装置の製造方法
KR102516486B1 (ko) * 2017-12-05 2023-04-03 삼성디스플레이 주식회사 레이저 결정화 장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5815226A (ja) * 1981-07-20 1983-01-28 Nec Corp レ−ザアニ−リング法
JPH01155315A (ja) * 1987-12-14 1989-06-19 Nec Corp レーザ分割ミラー装置及びこれを使用したレーザ分割装置
JPH04364031A (ja) * 1991-06-10 1992-12-16 Ii & S:Kk レーザアニール方法およびレーザアニール装置
JPH0836144A (ja) * 1994-07-22 1996-02-06 Miyachi Technos Corp レーザ分岐装置
JPH09246555A (ja) * 1996-03-04 1997-09-19 Matsushita Electric Ind Co Ltd 薄膜トランジスタの製造方法
JPH09260676A (ja) * 1996-03-26 1997-10-03 Sharp Corp 薄膜トランジスタの製造方法
JPH09266318A (ja) * 1996-03-29 1997-10-07 Matsushita Electric Ind Co Ltd 薄膜トランジスタの製造方法
JP3204986B2 (ja) * 1996-05-28 2001-09-04 ザ トラスティース オブ コロンビア ユニヴァーシティ イン ザ シティ オブ ニューヨーク 基板上の半導体膜領域の結晶化処理及びこの方法により製造されたデバイス

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