JP2001118684A - Light emitting display and its manufacturing method - Google Patents
Light emitting display and its manufacturing methodInfo
- Publication number
- JP2001118684A JP2001118684A JP29617299A JP29617299A JP2001118684A JP 2001118684 A JP2001118684 A JP 2001118684A JP 29617299 A JP29617299 A JP 29617299A JP 29617299 A JP29617299 A JP 29617299A JP 2001118684 A JP2001118684 A JP 2001118684A
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- Japan
- Prior art keywords
- electrode
- light
- light emitting
- electrodes
- emitting display
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title abstract description 11
- 229910052751 metal Inorganic materials 0.000 claims abstract description 58
- 239000002184 metal Substances 0.000 claims abstract description 58
- 230000002950 deficient Effects 0.000 claims abstract description 44
- 239000012044 organic layer Substances 0.000 claims abstract description 30
- 230000007547 defect Effects 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims description 27
- 239000011159 matrix material Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims description 3
- 238000005401 electroluminescence Methods 0.000 claims description 2
- 150000002894 organic compounds Chemical class 0.000 claims description 2
- MYZAXBZLEILEBR-RVFOSREFSA-N (2S)-1-[(2S,3R)-2-[[(2R)-2-[[2-[[(2S)-2-[(2-aminoacetyl)amino]-5-(diaminomethylideneamino)pentanoyl]amino]acetyl]amino]-3-sulfopropanoyl]amino]-3-hydroxybutanoyl]pyrrolidine-2-carboxylic acid Chemical compound C[C@@H](O)[C@H](NC(=O)[C@H](CS(O)(=O)=O)NC(=O)CNC(=O)[C@H](CCCN=C(N)N)NC(=O)CN)C(=O)N1CCC[C@H]1C(O)=O MYZAXBZLEILEBR-RVFOSREFSA-N 0.000 abstract 1
- 108700002400 risuteganib Proteins 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 14
- 230000008439 repair process Effects 0.000 description 7
- 238000007789 sealing Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910001148 Al-Li alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/17—Passive-matrix OLED displays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/82—Cathodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/841—Self-supporting sealing arrangements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/861—Repairing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/917—Electroluminescent
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、有機エレクトロル
ミネセンス(有機EL)を発光素子として用いて好適な
発光ディスプレイ及びその製造方法に関する。The present invention relates to a light emitting display suitable for using organic electroluminescence (organic EL) as a light emitting element and a method for manufacturing the same.
【0002】[0002]
【従来の技術】従来、ガラス板、あるいは半透明な有機
フィルム上に形成した蛍光体に電流を流して発光させる
ことのできる有機EL素子が知られている。図4に、有
機ELを発光素子として用いた発光ディスプレイの概略
断面構造を示す。図4に示すように、従来の発光ディス
プレイは、透明基板301上に透明電極(層)302、
有機層303、金属電極(層)304が順に積層されて
成る。2. Description of the Related Art Conventionally, there has been known an organic EL device capable of causing a phosphor formed on a glass plate or a translucent organic film to emit light by passing an electric current. FIG. 4 shows a schematic sectional structure of a light emitting display using an organic EL as a light emitting element. As shown in FIG. 4, a conventional light emitting display includes a transparent electrode (layer) 302 on a transparent substrate 301,
An organic layer 303 and a metal electrode (layer) 304 are sequentially laminated.
【0003】一般に有機EL素子は、回路抵抗成分と、
容量成分と、発光成分により等価的に表現される、容量
性の発光素子であると考えられている。従って、透明電
極302と金属電極304の間に電圧が印加されると、
素子の電気容量に相当する電荷が電極に変位電流として
流れ込み蓄積される。続いて一定の電圧(障壁電圧)を
超えると、電極301、304を介して有機EL素子か
ら成る有機層303に電流が流れ始め、この電流に比例
して発光が始まる。Generally, an organic EL element has a circuit resistance component,
It is considered to be a capacitive light emitting element equivalently represented by a capacitance component and a light emitting component. Therefore, when a voltage is applied between the transparent electrode 302 and the metal electrode 304,
Electric charge corresponding to the capacitance of the element flows into the electrode as a displacement current and is accumulated. Subsequently, when a certain voltage (barrier voltage) is exceeded, a current starts to flow through the electrodes 301 and 304 to the organic layer 303 formed of the organic EL element, and light emission starts in proportion to the current.
【0004】図5に、単純マトリクス駆動型の発光ディ
スプレイにおける透明電極及び金属電極の配列の一例を
示す。上述した有機EL素子を発光素子として用いた発
光ディスプレイは、図5に示すように、透明なガラス基
板101上にITO等から成り各々所定の間隔を置いて
配列される複数の平行なストライプ状の透明電極10
2、有機層から成る発光部103、透明電極102と直
交し、かつ、所定の間隔を置いて配列される複数の平行
なストライプ状の金属電極104を順に積層して形成さ
れる。また、金属電極104及び有機層103が形成さ
れた基板101上全面に渡り、防湿のために図示せぬ保
護膜が形成される。FIG. 5 shows an example of the arrangement of transparent electrodes and metal electrodes in a simple matrix drive type light emitting display. As shown in FIG. 5, a light-emitting display using the above-described organic EL element as a light-emitting element has a plurality of parallel stripes made of ITO or the like and arranged at predetermined intervals on a transparent glass substrate 101. Transparent electrode 10
2. A plurality of parallel striped metal electrodes 104 that are orthogonal to the light emitting unit 103 and the transparent electrode 102 and that are arranged at predetermined intervals are formed by sequentially stacking the organic layers. Further, a protective film (not shown) is formed over the entire surface of the substrate 101 on which the metal electrode 104 and the organic layer 103 are formed for moisture prevention.
【0005】また、発光ディスプレイは、互いに対面し
対をなす透明電極102及び金属電極104の各々が互
いに対面して交差し挟持する有機層103の一つの領域
を1単位とする発光画素が形成され、必要な画素数をマ
トリクス状に配列することにより、単純マトリクス駆動
型の発光ディスプレイが形成される。このようにして形
成された発光ディスプレイは、各透明電極102及び金
属電極104を走査駆動する駆動源により、適宜画素に
対応する透明電極102及び金属電極104間に電圧が
印加されて、該当する画素の有機層103に電流が流れ
発光する。In the light emitting display, a light emitting pixel is formed in which one region of the organic layer 103 in which the transparent electrode 102 and the metal electrode 104 facing each other face each other and intersect and sandwich each other as one unit. By arranging the required number of pixels in a matrix, a simple matrix drive type light emitting display is formed. In the light emitting display thus formed, a voltage is appropriately applied between the transparent electrode 102 and the metal electrode 104 corresponding to a pixel by a driving source that scans and drives each transparent electrode 102 and the metal electrode 104, and the corresponding pixel An electric current flows through the organic layer 103 to emit light.
【0006】ところで、このような発光ディスプレイの
製造にあたり、表示画面の面積が大きくなればなるほ
ど、傷等の発生やパーティクルの付着などの確率は高く
なる。このことは、製造時における歩留まり悪化の大き
な要因となっていた。By the way, in manufacturing such a light emitting display, the larger the area of the display screen, the higher the probability of occurrence of scratches and the like and adhesion of particles. This has been a major factor in lowering the yield during manufacturing.
【0007】すなわち、図4に示されるように、透明電
極302に傷10が発生したり、あるいは、透明電極3
02上のパーティクル20が付着すると、透明電極30
2表面のその該当部分における有機層303の成膜が不
充分なものとなる。その他、何らかの原因で有機層30
3に欠陥30が生じることもある。このことにより、有
機層303の成膜が不十分であった部分に金属電極層3
04が直接透明電極層302に成膜され、透明電極層3
02の陽極と金属電極層304の陰極がショートするこ
とがあった。That is, as shown in FIG. 4, the transparent electrode 302 has a flaw 10 or the transparent electrode 3
02 on the transparent electrode 30
The film formation of the organic layer 303 on the corresponding portion of the two surfaces is insufficient. In addition, for some reason, the organic layer 30
3 may have a defect 30. As a result, the metal electrode layer 3 was formed in a portion where the film formation of the organic layer 303 was insufficient.
04 is directly formed on the transparent electrode layer 302 and the transparent electrode layer 3
02 and the cathode of the metal electrode layer 304 were sometimes short-circuited.
【0008】また、ショートまで至らなくても、透明電
極302と金属電極304の間の有機層303が極度に
薄く成膜され、その部分に発光電流の集中をもたらし、
その結果周辺部分に電流が流れにくくなってその画素は
発光しなくなるといった問題があった。この問題は、製
造時における最も大きな不良原因の一つであり、歩留ま
りを大きく低下させていた。Further, even if a short circuit does not occur, the organic layer 303 between the transparent electrode 302 and the metal electrode 304 is formed to be extremely thin, and the light emission current is concentrated at that portion.
As a result, there is a problem that the current hardly flows to the peripheral portion and the pixel does not emit light. This problem is one of the biggest causes of defects at the time of manufacturing, and has greatly reduced the yield.
【0009】そこで基板の洗浄を念入りに行う等して対
策していたが、洗浄に手間取り、また、洗浄により完全
にパーティクルや透明電極302の傷、あるいは透明電
極302表面の凹凸を除去することは不可能であった。Therefore, measures have been taken by carefully cleaning the substrate and the like. However, it is difficult to clean the substrate, and it is not possible to completely remove particles, scratches on the transparent electrode 302, or irregularities on the surface of the transparent electrode 302 by cleaning. It was impossible.
【0010】[0010]
【発明が解決しようとする課題】上述したように、有機
EL素子を発光素子として用いた発光ディスプレイで
は、透明電極302上に凹部状の傷があったり、ゴミが
付着していたりすると、その部分の成膜が不十分とな
り、透明電極302上に積層される有機層303が薄く
形成される。特に、蒸着による成膜の場合は、ゴミ等に
より凸部が形成されると、その凸部側面は蒸着されにく
く、十分な成膜が行われない。また、有機層303の薄
い部分では他の部分に比べ陰極と陽極が近接するため電
流が集中しやすく、陰極と陽極のショートを生じるとい
う問題があった。ショートに至らなくても、薄く成膜さ
れた部分に発光電流の集中をもたらし、その結果、周辺
部分に電流が流れにくくなってその画素は発光しなくな
るといった問題があった。As described above, in a light-emitting display using an organic EL element as a light-emitting element, if a transparent electrode 302 has a concave-shaped scratch or dust adheres to the light-emitting element, the light-emitting portion may be damaged. Is insufficient, and the organic layer 303 laminated on the transparent electrode 302 is formed thin. In particular, in the case of film formation by vapor deposition, if a convex portion is formed due to dust or the like, the side surface of the convex portion is difficult to be vapor-deposited, and sufficient film formation is not performed. Further, in the thin portion of the organic layer 303, the current is easily concentrated because the cathode and the anode are closer to each other than in other portions, and there is a problem that the short circuit between the cathode and the anode occurs. Even if short-circuiting does not occur, there is a problem that the light-emitting current is concentrated on the thinly formed portion, and as a result, the current does not easily flow to the peripheral portion, and the pixel does not emit light.
【0011】本発明は上記の問題点に鑑みてなされたも
のであり、透明電極と金属電極のショートによる欠陥を
修復し、歩留まり向上をはかった発光ディスプレイ及び
その製造方法を提供することを目的とする。The present invention has been made in view of the above problems, and has as its object to provide a light emitting display which repairs a defect due to a short circuit between a transparent electrode and a metal electrode and improves the yield, and a method of manufacturing the same. I do.
【0012】[0012]
【課題を解決するための手段】請求項1の発明は、基板
上に、第1電極と、発光部と、第2電極とが順次積層さ
れた発光ディスプレイにおいて、前記発光部の一部に欠
陥があるときに、その欠陥部に対応する前記第2電極の
相当部分のみを取り除くとともに該第2電極の残余を残
すようにし、前記第1電極と前記残余の第2電極によっ
て前記欠陥発光画素を発光せしめるようにしたことを特
徴とする。According to a first aspect of the present invention, in a light emitting display in which a first electrode, a light emitting portion, and a second electrode are sequentially laminated on a substrate, a part of the light emitting portion has a defect. When there is, only a portion of the second electrode corresponding to the defective portion is removed, and the remaining portion of the second electrode is left, and the defective light emitting pixel is formed by the first electrode and the remaining second electrode. It is characterized by emitting light.
【0013】また、請求項2記載の発明は、基板上に、
各々所定間隔をおいて配列される複数本の第1電極と、
発光部と、前記第1電極と直交し、かつ、所定間隔をお
いて配列される複数本の第2電極とが順次積層されて成
り、前記第1電極と第2電極が対面して交差し挟持する
領域を単位として発光画素が形成され、所定数の発光画
素をマトリクス状に配列して成る発光ディスプレイにお
いて、前記マトリクス状に配列された任意の発光画素に
欠陥があるときに、その欠陥発光画素に対応する前記第
2電極の相当部分のみを取り除くとともに該第2電極の
残余を残すようにし、前記第1電極と前記残余の第2電
極によって前記欠陥発光画素を発光せしめるようにした
ことを特徴とする。[0013] The present invention according to claim 2 is a device according to claim 2, wherein
A plurality of first electrodes each arranged at a predetermined interval;
A light emitting portion and a plurality of second electrodes orthogonal to the first electrode and arranged at a predetermined interval are sequentially stacked, and the first electrode and the second electrode face to face and intersect. In a light emitting display in which light emitting pixels are formed in units of a sandwiched area as a unit and a predetermined number of light emitting pixels are arranged in a matrix, when any of the light emitting pixels arranged in the matrix has a defect, the defective light emission is determined. Removing only a substantial portion of the second electrode corresponding to a pixel and leaving a residue of the second electrode, and causing the defective light emitting pixel to emit light by the first electrode and the remaining second electrode. Features.
【0014】また、請求項3記載の発明は、請求項2に
記載の発光ディスプレイにおいて、前記発光ディスプレ
イとして、有機エレクトロルミネセンス素子を使用する
ことを特徴とする。According to a third aspect of the present invention, in the light emitting display according to the second aspect, an organic electroluminescent element is used as the light emitting display.
【0015】また、請求項4記載の発明は、請求項3に
記載の発光ディスプレイにおいて、前記第1電極は透明
電極、前記発光部は有機エレクトロルミネセンス素子か
ら成る有機層、前記第2電極は金属電極であることを特
徴とする。According to a fourth aspect of the present invention, in the light emitting display according to the third aspect, the first electrode is a transparent electrode, the light emitting section is an organic layer made of an organic electroluminescent element, and the second electrode is It is a metal electrode.
【0016】また、請求項5に記載の発明は、請求項4
に記載の発光ディスプレイにおいて、透明基板上に、前
記透明電極、発光層、金属電極が順次積層されて成るこ
とを特徴とする。The invention described in claim 5 is the same as the invention in claim 4.
3. The light emitting display according to item 1, wherein the transparent electrode, the light emitting layer, and the metal electrode are sequentially laminated on a transparent substrate.
【0017】また、請求項6に記載の発明は、請求項5
に記載の発光ディスプレイにおいて、前記発光層と金属
電極が形成された透明基板上に保護膜が形成されること
を特徴とする。The invention described in claim 6 is the same as the claim 5
3. The light emitting display according to claim 1, wherein a protective film is formed on the transparent substrate on which the light emitting layer and the metal electrode are formed.
【0018】また、請求項7に記載の発明は、請求項2
乃至5のいずれかに記載の発光ディスプレイにおいて、
前記発光ディスプレイは、単純マトリクス駆動されるも
のであることを特徴とする。The invention described in claim 7 is the same as the invention described in claim 2.
The light emitting display according to any one of claims 1 to 5,
The light-emitting display is driven by a simple matrix.
【0019】また、請求項8に記載の発明は、基板上
に、各々所定間隔をおいて配列される複数本の第1電極
と、発光部と、前記第1電極と直交し、かつ、所定間隔
をおいて配列される複数本の第2電極とが順次積層され
て成り、前記第1電極と第2電極が対面して交差し挟持
する領域を単位として発光画素が形成され、所定数の発
光画素をマトリクス状に配列して成る発光ディスプレイ
の製造方法であって、前記基板上に第1電極を層形成す
る工程と、前記発光部及び第2電極を順次積層する工程
と、前記マトリクス状に配列された任意の発光画素に欠
陥があるときに、その欠陥発光画素に対応する前記第2
電極の相当部分にのみ光を照射し、この光が照射された
部分のみを除去する工程とを有することを特徴とする。According to the present invention, a plurality of first electrodes, a light-emitting portion, and a plurality of first electrodes arranged on the substrate at predetermined intervals are orthogonal to the first electrodes. A plurality of second electrodes arranged at intervals are sequentially laminated, and a light-emitting pixel is formed in units of a region where the first electrode and the second electrode face each other and intersect and sandwich each other. A method of manufacturing a light-emitting display in which light-emitting pixels are arranged in a matrix, comprising: forming a first electrode on the substrate; sequentially stacking the light-emitting portion and a second electrode; When there is a defect in any of the light-emitting pixels arranged in
Irradiating light only to a substantial portion of the electrode, and removing only the portion irradiated with the light.
【0020】さらに、請求項9記載の発明は、請求項8
に記載の発光ディスプレイの製造方法において、前記基
板及び第1の電極は光透過性を有し、かつ、前記発光部
は有機化合物を含むことを特徴とする。Further, the invention according to claim 9 is the invention according to claim 8
5. The method for manufacturing a light-emitting display according to item 1, wherein the substrate and the first electrode have a light-transmitting property, and the light-emitting portion includes an organic compound.
【0021】本発明は以上のように構成したので、透明
電極及び金属電極がショート等して発光しない画素や発
光不良画素等の欠陥画素が生じた生じた場合でも、欠陥
画素に対応する透明電極及び金属電極が交差する領域に
対応する金属電極のうち、金属電極の当該欠陥部分に対
応する部分のみ削除する修復を行うことにより、残余の
金属電極によって有機層を介して対向する透明電極間に
電流を流し、その画素ならびに以降走査される画素を発
光させるものである。このことにより、多少の欠陥画素
があっても十分な実用に耐える発光ディスプレイを設計
でき、欠陥修復による歩留まり向上に寄与できる。Since the present invention is constructed as described above, even if a defective pixel such as a pixel which does not emit light due to a short circuit of the transparent electrode and the metal electrode or a defective light emission pixel occurs, the transparent electrode corresponding to the defective pixel is generated. Of the metal electrodes corresponding to the regions where the metal electrodes intersect, by performing a repair that deletes only the portion corresponding to the defective portion of the metal electrode, the remaining metal electrodes are disposed between the transparent electrodes facing each other via the organic layer. A current is caused to flow, and the pixel and the pixel scanned thereafter emit light. As a result, it is possible to design a light emitting display that can withstand practical use even if there are some defective pixels, and it can contribute to an improvement in yield by defect repair.
【0022】[0022]
【発明の実施の形態】図1は、本発明実施形態における
発光ディスプレイの概略層構造断面を示す図である。図
1に示すように、本発明の発光ディスプレイは、ガラス
透明基板101上に第1の電極となるITO等の複数の
透明電極102、有機層103、透明電極102に交差
する複数の第2の電極となる金属電極104を順に蒸着
積層して形成される。有機層103を挟持して互いに対
向し対をなす透明電極102及び金属電極104により
有機EL素子を使用した光ディスプレイとしての発光部
が形成され、透明電極102及び金属電極104の各々
が互いに対向して交差する交差領域の発光部を1単位と
して1画素が形成される。FIG. 1 is a schematic sectional view showing a layer structure of a light emitting display according to an embodiment of the present invention. As shown in FIG. 1, the light emitting display of the present invention includes a plurality of transparent electrodes 102 such as ITO, which serves as a first electrode, an organic layer 103, and a plurality of second electrodes crossing the transparent electrode 102 on a glass transparent substrate 101. It is formed by sequentially depositing and laminating metal electrodes 104 serving as electrodes. The transparent electrode 102 and the metal electrode 104 which face each other with the organic layer 103 interposed therebetween form a light emitting portion as an optical display using an organic EL element, and the transparent electrode 102 and the metal electrode 104 face each other. Thus, one pixel is formed with the light emitting portion of the intersection area intersecting as one unit.
【0023】ここでは、図4と同様な傷10、パーティ
クル20、その他有機層欠陥30が含まれる欠陥画素と
なっているが、金属電極104の当該欠陥部分の相当部
分Bが削除され、その周囲に残余の部分Aが残されてい
る。そうすることによって電流の集中を解消し、周辺に
電流を流しその画素の正常な発光を促す。欠陥部分は、
1画素より十分に小さいことに着目し、欠陥画素中、金
属電極104の当該欠陥部分のみ削除し、欠陥画素の欠
陥部分を除く残余の部分Aの金属電極104によって有
機層103を介し、対向している透明電極102間に電
流を流し、その欠陥画素を発光させることによって修復
による歩留まりの向上をはかるものである。金属電極1
04の削除方法によっては、欠陥部分Aの有機層103
または透明電極102の一部または全体も同時に削除さ
れる可能性があるが、特に問題はない。In this case, the defective pixel includes the same scratches 10, particles 20, and other organic layer defects 30 as in FIG. 4, but the corresponding portion B of the defective portion of the metal electrode 104 is deleted and the surrounding area is removed. The remaining part A is left. By doing so, the concentration of the current is eliminated, and the current is caused to flow to the surroundings to promote normal light emission of the pixel. The defective part is
Paying attention to being sufficiently smaller than one pixel, of the defective pixel, only the defective portion of the metal electrode 104 is deleted, and the metal electrode 104 of the remaining portion A excluding the defective portion of the defective pixel is opposed via the organic layer 103 via the organic layer 103. A current is caused to flow between the transparent electrodes 102 to cause the defective pixels to emit light, thereby improving the yield by repair. Metal electrode 1
04, the organic layer 103 in the defective portion A may be used.
Alternatively, part or all of the transparent electrode 102 may be deleted at the same time, but there is no particular problem.
【0024】なお、金属電極104には、アルミニュウ
ム、マグネシウム、インジウム、銅または各々の合金等
の仕事関数が小さな、例えばAl−Li合金を用いる。
また、透明電極102には、ITO等の仕事関数の大き
な導電性材料または金等を用いることができる。ここ
で、金を電極材料として用いた場合、電極は半透明の状
態となる。The metal electrode 104 is made of aluminum, magnesium, indium, copper, or an alloy of each having a small work function, for example, an Al-Li alloy.
For the transparent electrode 102, a conductive material having a large work function, such as ITO, or gold can be used. Here, when gold is used as the electrode material, the electrode becomes translucent.
【0025】図2は、図1に示す単純マトリクス駆動型
の発光ディスプレイの製造工程を示す図である。図2
(a)において、まず、透明基板101上にITO等の
電極材料を蒸着し、フォトリソグラフィ法に基づくパタ
ーンニングに従い複数本の透明電極層102を形成す
る。FIG. 2 is a diagram showing a process of manufacturing the simple matrix drive type light emitting display shown in FIG. FIG.
1A, first, an electrode material such as ITO is deposited on a transparent substrate 101, and a plurality of transparent electrode layers 102 are formed according to patterning based on a photolithography method.
【0026】次に、図2(b)において、透明電極10
2が形成された透明基板101上に、有機物として、例
えば、TPDやAlq3等を順次積層して有機層103
から成る発光部を形成する。そして、図2(c)におい
て、金属電極層104を形成すると、各透明電極102
と金属電極104が交差し挟持する有機層の領域に対応
する部分を1単位とする発光画素がマトリクス状に配列
形成される。なお、透明電極102の傷10、または、
透明電極102上のパーティクル20は図4に示す従来
例同様付着しているものとする。Next, referring to FIG.
For example, TPD, Alq3, or the like is sequentially laminated on the transparent substrate 101 on which
Is formed. Then, in FIG. 2C, when the metal electrode layer 104 is formed, each transparent electrode 102 is formed.
And the metal electrodes 104 intersect and sandwich a portion corresponding to a region of the organic layer as one unit, and light emitting pixels are arranged in a matrix. In addition, the scratch 10 of the transparent electrode 102, or
The particles 20 on the transparent electrode 102 are assumed to be attached as in the conventional example shown in FIG.
【0027】このように形成された単純マトリクス駆動
型の発光ディスプレイは、各透明電極102及び金属電
極104を走査駆動する駆動源により、適宜、各画素に
対応する透明電極102及び金属電極104間に電圧が
印加され、各画素の発光部103に電荷が送り込まれ発
光する。そこで、発光ディスプレイの全発光画素を同時
に発光させるように駆動源を印加し、この状態で発光不
良画素や発光しない画素等の欠陥画素を確認する。そし
てその欠陥画素に対する修復を行う。In the light-emitting display of the simple matrix drive type formed in this way, a driving source for scanning and driving each of the transparent electrodes 102 and the metal electrodes 104 is appropriately provided between the transparent electrode 102 and the metal electrodes 104 corresponding to each pixel. When a voltage is applied, electric charges are sent to the light emitting section 103 of each pixel, and light is emitted. Therefore, a driving source is applied so that all the light emitting pixels of the light emitting display emit light at the same time, and in this state, defective pixels such as defective light emitting pixels and pixels that do not emit light are confirmed. Then, the defective pixel is repaired.
【0028】修復は、図2(d)に示すように、欠陥画
素が本来有する発光領域に対応する単位画素の領域の一
部にレーザ光を照射することにより行われる。すなわ
ち、レーザ光を照射してその発光領域に対面する金属電
極104の一部を除去する。ここで、レーザスポットの
位置決めは、その発光領域(画素)の座標をあらかじめ
測定しておき、さらに、顕微鏡当を使用した目視によっ
て、欠陥部分を確認してレーザスポットの位置決めを行
う。As shown in FIG. 2D, the repair is performed by irradiating a part of the unit pixel area corresponding to the light emitting area originally possessed by the defective pixel with laser light. That is, a part of the metal electrode 104 facing the light emitting region is removed by irradiating a laser beam. Here, for positioning of the laser spot, the coordinates of the light emitting area (pixel) are measured in advance, and the laser spot is positioned by confirming the defective portion by visual observation using a microscope.
【0029】このことにより、欠陥部分が1画素より十
分に小さい場合、欠陥画素中、金属電極104の当該欠
陥部分のみ削除し、欠陥画素の欠陥部分を除く残余の金
属電極104によって有機層103を介し対向している
透明電極102間に電流を流し、その画素を発光させる
ことができる。なお、上記の例ではレーザ光を金属電極
104側から照射しているが、透明基板101側からレ
ーザ光を照射して金属電極104の欠陥部分を削除する
こともできる。ただし、透明基板101のレーザに対す
る透過率が低い場合は、金属電極104側から照射する
方が好ましい。Thus, when the defective portion is sufficiently smaller than one pixel, only the defective portion of the metal electrode 104 is deleted from the defective pixel, and the organic layer 103 is formed by the remaining metal electrode 104 excluding the defective portion of the defective pixel. A current can flow between the transparent electrodes 102 facing each other, and the pixel can emit light. In the above example, the laser beam is emitted from the metal electrode 104 side, but the laser beam may be emitted from the transparent substrate 101 side to delete a defective portion of the metal electrode 104. However, when the transmittance of the transparent substrate 101 to the laser is low, it is preferable to irradiate from the metal electrode 104 side.
【0030】このように、金属電極104の欠陥部分の
削除が済むと、図2(e)に示すように、透明基板10
1上の全面に対して保護膜105を積層することで単純
マトリクス駆動型の発光ディスプレイが形成される。When the defective portion of the metal electrode 104 has been removed in this way, as shown in FIG.
By laminating the protective film 105 over the entire surface on the substrate 1, a simple matrix drive type light emitting display is formed.
【0031】上記の実施形態では保護膜105を形成し
ているが、例えば図3に示したように、透明電極10
2、有機層103および金属電極層104を覆うよう
に、封止カバー106を取り付け、透明基板101の周
囲で封止するようにしてもよい。この場合、封止カバー
106を取り付けた後で、金属電極104の欠陥部分の
削除を行うこともできる。すなわち、封止カバー106
が金属製等でできていて不透明な場合、のように透明
基板101側からレーザを照射する。また、封止カバー
106がガラス製等でできていて透明な場合、の透明
基板101側、の封止カバー106側のどちらからで
もレーザを照射することができる。In the above embodiment, the protective film 105 is formed. For example, as shown in FIG.
2. A sealing cover 106 may be attached so as to cover the organic layer 103 and the metal electrode layer 104 and may be sealed around the transparent substrate 101. In this case, after attaching the sealing cover 106, the defective portion of the metal electrode 104 can be deleted. That is, the sealing cover 106
Is made of metal or the like and is opaque, the laser is irradiated from the transparent substrate 101 side as shown in FIG. When the sealing cover 106 is made of glass or the like and is transparent, laser irradiation can be performed from either the transparent substrate 101 side or the sealing cover 106 side.
【0032】また、保護膜105を積層したものに、さ
らに封止カバー106を取り付けるようにしてもよいこ
とはいうまでもない。Needless to say, a sealing cover 106 may be further attached to the laminated protective film 105.
【0033】なお、上述した本発明実施形態において
は、少なくとも、有機層103と直交する複数の透明電
極102と及び複数の金属電極104によって形成され
る有機EL素子によって構成される単純マトリクス駆動
型の発光ディスプレイのみ例示して説明したが、本発明
はこれに限らず、対となる複数の電極が互いに交差して
複数の発光画素が形成されるものであれば発光画素の配
列や発光部に用いる材料は問わない。In the embodiment of the present invention described above, at least a simple matrix drive type constituted by an organic EL element formed by a plurality of transparent electrodes 102 orthogonal to the organic layer 103 and a plurality of metal electrodes 104 is used. Although only the light-emitting display has been described as an example, the present invention is not limited to this, and is used for an array of light-emitting pixels and a light-emitting portion as long as a plurality of pairs of electrodes cross each other to form a plurality of light-emitting pixels. Materials do not matter.
【0034】[0034]
【発明の効果】以上説明のように本発明は、透明電極及
び金属電極がショート等して発光しない画素や発光不良
画素等の欠陥画素が生じた生じた場合でも、欠陥画素に
対応する透明電極及び金属電極が交差する領域に対応す
る金属電極のうち、金属電極の当該欠陥部分に対応する
部分のみ削除する修復を行うことにより、残余の金属電
極によって有機層を介し対向する透明電極間に電流を流
し、その画素ならびに以降走査される画素を発光させる
ものである。このことにより、多少の欠陥画素があって
も十分な実用に耐える発光ディスプレイを設計でき、欠
陥修復による歩留まり向上に寄与することができる。As described above, according to the present invention, even if a defective pixel such as a pixel which does not emit light due to a short circuit of a transparent electrode and a metal electrode, or a defective pixel such as a defective pixel is generated, the transparent electrode corresponding to the defective pixel is generated. By performing a repair that deletes only a portion of the metal electrode corresponding to the defective portion of the metal electrode corresponding to the region where the metal electrode intersects, a current flows between the transparent electrodes facing each other via the organic layer by the remaining metal electrode. To cause the pixel and the pixel to be scanned thereafter to emit light. This makes it possible to design a light emitting display that can withstand practical use even if there are some defective pixels, and can contribute to an improvement in yield by defect repair.
【図1】本発明実施形態における発光ディスプレイの概
略層構造断面を示す図である。FIG. 1 is a diagram schematically illustrating a cross section of a layer structure of a light emitting display according to an embodiment of the present invention.
【図2】本発明実施形態における発光ディスプレイの製
造工程を示す図である。FIG. 2 is a diagram illustrating a manufacturing process of the light emitting display according to the embodiment of the present invention.
【図3】本発明実施形態における発光ディスプレイで封
止カバーを使用した状態を示す図である。FIG. 3 is a diagram illustrating a state in which a sealing cover is used in the light emitting display according to the embodiment of the present invention.
【図4】従来における発光ディスプレイの概略断面構造
を示す図である。FIG. 4 is a diagram showing a schematic sectional structure of a conventional light emitting display.
【図5】従来における有機EL素子を用いた単純マトリ
クス駆動型の発光ディスプレイの透明電極及び金属電極
の配列の一例を示す図である。FIG. 5 is a view showing an example of an arrangement of transparent electrodes and metal electrodes of a conventional simple matrix drive type light emitting display using an organic EL element.
101…基板 102…透明電極(第1電極) 103…有機層(発光部) 104…金属電極(第2電極) 105…保護膜層 DESCRIPTION OF SYMBOLS 101 ... Substrate 102 ... Transparent electrode (1st electrode) 103 ... Organic layer (light emitting part) 104 ... Metal electrode (2nd electrode) 105 ... Protective film layer
Claims (9)
電極とが順次積層された発光ディスプレイにおいて、 前記発光部の一部に欠陥があるときに、その欠陥部に対
応する前記第2電極の相当部分のみを取り除くとともに
該第2電極の残余を残すようにし、前記第1電極と前記
残余の第2電極によって前記欠陥発光画素を発光せしめ
るようにしたことを特徴とする発光ディスプレイ。A first electrode, a light emitting unit, and a second electrode on the substrate;
In a light emitting display in which electrodes are sequentially laminated, when a part of the light emitting part has a defect, only a part of the second electrode corresponding to the defective part is removed and a residue of the second electrode is left. Wherein the defective light-emitting pixel is caused to emit light by the first electrode and the remaining second electrode.
れる複数本の第1電極と、発光部と、前記第1電極と直
交し、かつ、所定間隔をおいて配列される複数本の第2
電極とが順次積層されて成り、前記第1電極と第2電極
が対面して交差し挟持する領域を単位として発光画素が
形成され、所定数の発光画素をマトリクス状に配列して
成る発光ディスプレイにおいて、前記マトリクス状に配
列された任意の発光画素に欠陥があるときに、その欠陥
発光画素に対応する前記第2電極の相当部分のみを取り
除くとともに該第2電極の残余を残すようにし、前記第
1電極と前記残余の第2電極によって前記欠陥発光画素
を発光せしめるようにしたことを特徴とする発光ディス
プレイ。2. A plurality of first electrodes each arranged at a predetermined interval on a substrate, a light emitting unit, and a plurality of first electrodes orthogonal to the first electrodes and arranged at a predetermined interval. Second
A light-emitting display in which a predetermined number of light-emitting pixels are arranged in a matrix, wherein light-emitting pixels are formed in units of a region in which the first electrode and the second electrode face each other and intersect and sandwich the electrodes. In the above, when there is a defect in any of the light emitting pixels arranged in a matrix, only a substantial portion of the second electrode corresponding to the defective light emitting pixel is removed, and the residue of the second electrode is left, A light-emitting display, wherein the defective light-emitting pixel emits light by a first electrode and the remaining second electrode.
クトロルミネセンス素子を使用することを特徴とする請
求項2に記載の発光ディスプレイ。3. The light emitting display according to claim 2, wherein an organic electroluminescent element is used as the light emitting display.
有機エレクトロルミネセンス素子から成る有機層、前記
第2電極は金属電極であることを特徴とする請求項3に
記載の発光ディスプレイ。4. The light emitting display according to claim 3, wherein the first electrode is a transparent electrode, the light emitting unit is an organic layer made of an organic electroluminescence element, and the second electrode is a metal electrode.
金属電極が順次積層されて成ることを特徴とする請求項
4に記載の発光ディスプレイ。5. The method according to claim 5, wherein the transparent electrode, the organic layer,
The light emitting display according to claim 4, wherein the metal electrodes are sequentially laminated.
基板上に保護膜が形成されることを特徴とする請求項5
に記載の発光ディスプレイ。6. A protective film is formed on a transparent substrate on which the organic layer and the metal electrode are formed.
The light-emitting display according to 1.
ス駆動されるものであることを特徴とする請求項2乃至
5のいずれか一つに記載の発光ディスプレイ。7. The light emitting display according to claim 2, wherein the light emitting display is driven by a simple matrix.
れる複数本の第1電極と、発光部と、前記第1電極と直
交し、かつ、所定間隔をおいて配列される複数本の第2
電極とが順次積層されて成り、前記第1電極と第2電極
が対面して交差し挟持する領域を単位として発光画素が
形成され、所定数の発光画素をマトリクス状に配列して
成る発光ディスプレイの製造方法であって、前記基板上
に第1電極を層形成する工程と、前記発光部及び第2電
極を順次積層する工程と、前記マトリクス状に配列され
た任意の発光画素に欠陥があるときに、その欠陥発光画
素に対応する前記第2電極の相当部分にのみ光を照射
し、この光が照射された部分のみを除去する工程とを有
することを特徴とする発光ディスプレイの製造方法。8. A plurality of first electrodes and a plurality of light emitting portions, each of which is arranged at a predetermined interval on the substrate, and a plurality of first electrodes which are orthogonal to the first electrodes and are arranged at a predetermined interval. Second
A light-emitting display in which a predetermined number of light-emitting pixels are arranged in a matrix, wherein light-emitting pixels are formed in units of a region in which the first electrode and the second electrode face each other and intersect and sandwich the electrodes. A method of forming a first electrode on the substrate, a step of sequentially laminating the light-emitting portion and the second electrode, and a defect in any of the light-emitting pixels arranged in a matrix. Irradiating light only to a corresponding portion of the second electrode corresponding to the defective luminescent pixel, and removing only the portion irradiated with the light.
し、かつ、前記発光部は有機化合物を含むことを特徴と
する請求項8に記載の発光ディスプレイの製造方法。9. The method according to claim 8, wherein the substrate and the first electrode have a light transmitting property, and the light emitting unit includes an organic compound.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29617299A JP3840010B2 (en) | 1999-10-19 | 1999-10-19 | Manufacturing method of light emitting display |
US09/691,067 US6590335B1 (en) | 1999-10-19 | 2000-10-19 | Luminescent display and a method producing the same |
US10/419,727 US6747728B2 (en) | 1999-10-19 | 2003-04-22 | Luminescent display and a method producing the same |
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JP3840010B2 (en) | 2006-11-01 |
US6747728B2 (en) | 2004-06-08 |
US20040070336A1 (en) | 2004-04-15 |
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