JP2006278343A - Manufacturing method of luminescent display - Google Patents

Manufacturing method of luminescent display Download PDF

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JP2006278343A
JP2006278343A JP2006139952A JP2006139952A JP2006278343A JP 2006278343 A JP2006278343 A JP 2006278343A JP 2006139952 A JP2006139952 A JP 2006139952A JP 2006139952 A JP2006139952 A JP 2006139952A JP 2006278343 A JP2006278343 A JP 2006278343A
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electrode
light
organic layer
light emitting
metal electrode
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Kenichi Nagayama
健一 永山
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Tohoku Pioneer Corp
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/17Passive-matrix OLED displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/861Repairing

Abstract

<P>PROBLEM TO BE SOLVED: To improve a yield by repairing defects by a short-circuit of a first electrode (transparent electrode 102) and a second electrode (metal electrode 104) of a luminescent display. <P>SOLUTION: When a defect pixel of a non-luminescent pixel, a luminescent defect pixel or the like by short-circuiting a transparent electrode 102 and a metal electrode 104 is generated, only a part B corresponding to the defect part among the transparent electrode 102 corresponding to the defect pixel and the metal electrode 104 corresponding to a region crossing the metal electrode 104 is removed and repaired, so that, electric current is made to flow between the facing transparent electrode 102 through an organic layer 103 by the metal electrode 104 of a remaining part A, its pixel and pixels scanned afterwards are made to emit light. Elimination of a corresponding part of the metal electrode 104 is processed by irradiating a laser beam. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、有機エレクトロルミネセンス(有機EL)を発光素子として用いて好適な発光ディスプレイの製造方法に関する。   The present invention relates to a method for manufacturing a light-emitting display suitable using organic electroluminescence (organic EL) as a light-emitting element.

従来、ガラス板、あるいは半透明な有機フィルム上に形成した蛍光体に電流を流して発光させることのできる有機EL素子が知られている。図4に、有機ELを発光素子として用いた発光ディスプレイの概略断面構造を示す。図4に示すように、従来の発光ディスプレイは、透明基板301上に透明電極(層)302、有機層303、金属電極(層)304が順に積層されて成る。   2. Description of the Related Art Conventionally, an organic EL element that can emit light by passing a current through a phosphor formed on a glass plate or a translucent organic film is known. FIG. 4 shows a schematic cross-sectional structure of a light emitting display using an organic EL as a light emitting element. As shown in FIG. 4, the conventional light-emitting display is formed by laminating a transparent electrode (layer) 302, an organic layer 303, and a metal electrode (layer) 304 on a transparent substrate 301 in this order.

一般に有機EL素子は、回路抵抗成分と、容量成分と、発光成分により等価的に表現される、容量性の発光素子であると考えられている。従って、透明電極302と金属電極304の間に電圧が印加されると、素子の電気容量に相当する電荷が電極に変位電流として流れ込み蓄積される。続いて一定の電圧(障壁電圧)を超えると、電極301、304を介して有機EL素子から成る有機層303に電流が流れ始め、この電流に比例して発光が始まる。   In general, an organic EL element is considered to be a capacitive light emitting element that is equivalently expressed by a circuit resistance component, a capacitance component, and a light emitting component. Therefore, when a voltage is applied between the transparent electrode 302 and the metal electrode 304, a charge corresponding to the electric capacity of the element flows into the electrode as a displacement current and is accumulated. Subsequently, when a certain voltage (barrier voltage) is exceeded, a current starts to flow through the organic layer 303 composed of the organic EL element via the electrodes 301 and 304, and light emission starts in proportion to this current.

図5に、単純マトリクス駆動型の発光ディスプレイにおける透明電極及び金属電極の配列の一例を示す。上述した有機EL素子を発光素子として用いた発光ディスプレイは、図5に示すように、透明なガラス基板101上にITO等から成り各々所定の間隔を置いて配列される複数の平行なストライプ状の透明電極102、有機層から成る発光部103、透明電極102と直交し、かつ、所定の間隔を置いて配列される複数の平行なストライプ状の金属電極104を順に積層して形成される。また、金属電極104及び有機層103が形成された基板101上全面に渡り、防湿のために図示せぬ保護膜が形成される。   FIG. 5 shows an example of the arrangement of transparent electrodes and metal electrodes in a simple matrix drive type light emitting display. As shown in FIG. 5, a light emitting display using the above-described organic EL element as a light emitting element is formed of a plurality of parallel stripes made of ITO or the like and arranged at predetermined intervals on a transparent glass substrate 101. A transparent electrode 102, a light emitting portion 103 made of an organic layer, and a plurality of parallel striped metal electrodes 104 which are orthogonal to the transparent electrode 102 and arranged at a predetermined interval are sequentially stacked. Further, a protective film (not shown) is formed over the entire surface of the substrate 101 on which the metal electrode 104 and the organic layer 103 are formed to prevent moisture.

また、発光ディスプレイは、互いに対面し対をなす透明電極102及び金属電極104の各々が互いに対面して交差し挟持する有機層103の一つの領域を1単位とする発光画素が形成され、必要な画素数をマトリクス状に配列することにより、単純マトリクス駆動型の発光ディスプレイが形成される。このようにして形成された発光ディスプレイは、各透明電極102及び金属電極104を走査駆動する駆動源により、適宜画素に対応する透明電極102及び金属電極104間に電圧が印加されて、該当する画素の有機層103に電流が流れ発光する。   In addition, the light emitting display includes a light emitting pixel in which one region of the organic layer 103 in which each of the transparent electrode 102 and the metal electrode 104 facing each other and crossing each other faces and intersects is formed as a unit. By arranging the number of pixels in a matrix, a simple matrix drive type light emitting display is formed. In the light emitting display thus formed, a voltage is appropriately applied between the transparent electrode 102 and the metal electrode 104 corresponding to the pixel by a driving source that scans and drives each transparent electrode 102 and the metal electrode 104, and the corresponding pixel. A current flows through the organic layer 103 to emit light.

ところで、このような発光ディスプレイの製造にあたり、表示画面の面積が大きくなればなるほど、傷等の発生やパーティクルの付着などの確率は高くなる。このことは、製造時における歩留まり悪化の大きな要因となっていた。   By the way, in manufacturing such a light emitting display, as the area of the display screen increases, the probability of the occurrence of scratches or the adhesion of particles increases. This has been a major factor in yield deterioration during manufacturing.

すなわち、図4に示されるように、透明電極302に傷10が発生したり、あるいは、透明電極302上のパーティクル20が付着すると、透明電極302表面のその該当部分における有機層303の成膜が不充分なものとなる。その他、何らかの原因で有機層303に欠陥30が生じることもある。このことにより、有機層303の成膜が不十分であった部分に金属電極層304が直接透明電極層302に成膜され、透明電極層302の陽極と金属電極層304の陰極がショートすることがあった。   That is, as shown in FIG. 4, when the scratch 10 is generated on the transparent electrode 302 or the particles 20 on the transparent electrode 302 are attached, the organic layer 303 is formed on that portion of the surface of the transparent electrode 302. It will be insufficient. In addition, the defect 30 may occur in the organic layer 303 for some reason. As a result, the metal electrode layer 304 is directly formed on the transparent electrode layer 302 in the portion where the organic layer 303 is not sufficiently formed, and the anode of the transparent electrode layer 302 and the cathode of the metal electrode layer 304 are short-circuited. was there.

また、ショートまで至らなくても、透明電極302と金属電極304の間の有機層303が極度に薄く成膜され、その部分に発光電流の集中をもたらし、その結果周辺部分に電流が流れにくくなってその画素は発光しなくなるといった問題があった。この問題は、製造時における最も大きな不良原因の一つであり、歩留まりを大きく低下させていた。   Even if the short circuit does not occur, the organic layer 303 between the transparent electrode 302 and the metal electrode 304 is extremely thinly formed, and the light emission current is concentrated on that portion, so that the current hardly flows in the peripheral portion. In other words, the pixel does not emit light. This problem is one of the biggest causes of defects at the time of manufacturing, and greatly reduces the yield.

そこで基板の洗浄を念入りに行う等して対策していたが、洗浄に手間取り、また、洗浄により完全にパーティクルや透明電極302の傷、あるいは透明電極302表面の凹凸を除去することは不可能であった。   Therefore, although measures have been taken by carefully cleaning the substrate, it is not possible to take time for cleaning, and it is impossible to completely remove particles, scratches on the transparent electrode 302, or irregularities on the surface of the transparent electrode 302 by cleaning. there were.

なお、本発明に関連する文献公知発明のうち、出願人が当該特許出願時に知っているものがないので、開示すべき先行技術文献情報はない。   It should be noted that there is no prior art document information to be disclosed because there is no document known invention related to the present invention that the applicant knows at the time of filing the patent.

上述したように、有機EL素子を発光素子として用いた発光ディスプレイでは、透明電極302上に凹部状の傷があったり、ゴミが付着していたりすると、その部分の成膜が不十分となり、透明電極302上に積層される有機層303が薄く形成される。特に、蒸着による成膜の場合は、ゴミ等により凸部が形成されると、その凸部側面は蒸着されにくく、十分な成膜が行われない。また、有機層303の薄い部分では他の部分に比べ陰極と陽極が近接するため電流が集中しやすく、陰極と陽極のショートを生じるという問題があった。ショートに至らなくても、薄く成膜された部分に発光電流の集中をもたらし、その結果、周辺部分に電流が流れにくくなってその画素は発光しなくなるといった問題があった。   As described above, in a light-emitting display using an organic EL element as a light-emitting element, if there is a concave-shaped scratch on the transparent electrode 302 or dust is attached, film formation on that part becomes insufficient, and the transparent display A thin organic layer 303 is formed on the electrode 302. In particular, in the case of film formation by vapor deposition, when a convex portion is formed by dust or the like, the side surface of the convex portion is difficult to be vapor deposited, and sufficient film formation is not performed. In addition, since the cathode and the anode are close to each other in the thin portion of the organic layer 303, the current is likely to be concentrated, causing a short circuit between the cathode and the anode. Even if the short circuit does not occur, there is a problem that the light emission current is concentrated in the thinly formed portion, and as a result, the current does not easily flow in the peripheral portion and the pixel does not emit light.

本発明は上記の問題点に鑑みてなされたものであり、透明電極と金属電極のショートによる欠陥を修復し、歩留まり向上をはかった発光ディスプレイ及びその製造方法を提供することを目的とする。   The present invention has been made in view of the above problems, and an object of the present invention is to provide a light-emitting display and a method for manufacturing the same that repair defects caused by short-circuiting between a transparent electrode and a metal electrode to improve yield.

請求項1の発明は、基板上に、第1電極と、有機エレクトロルミネセンス素子からなる有機層と、第2電極とが順次積層された発光ディスプレイの製造方法であって、前記基板上に第1電極を層形成する工程と、前記有機層及び第2電極を順次積層する工程と、前記第2電極を前記有機層上に積層した後に封止カバーで前記有機エレクトロルミネセンス素子を封止する封止形成工程と、前記封止形成工程後に、発光部に前記有機層の成膜が不十分である欠陥部分があるときに、該欠陥部分に対応する前記第2電極の相当部分にのみ光を照射し、この光が照射された部分のみを除去する工程と、を有することを特徴とする。   The invention of claim 1 is a method of manufacturing a light-emitting display in which a first electrode, an organic layer composed of an organic electroluminescent element, and a second electrode are sequentially laminated on a substrate. A step of forming one electrode, a step of sequentially stacking the organic layer and the second electrode, and a step of sealing the organic electroluminescent element with a sealing cover after the second electrode is stacked on the organic layer. After the sealing formation step and after the sealing formation step, when there is a defective portion where the organic layer is insufficiently formed in the light emitting portion, light is emitted only to the corresponding portion of the second electrode corresponding to the defective portion. And removing only the portion irradiated with this light.

請求項2の発明は、基板上に、第1電極と、有機エレクトロルミネセンス素子からなる有機層と、第2電極とが順次積層された発光ディスプレイの製造方法であって、前記基板上に第1電極を層形成する工程と、前記有機層及び第2電極を順次積層する工程と、前記第2電極を前記有機層上に積層した後に不透明な封止カバーで前記有機エレクトロルミネセンス素子を封止する封止形成工程と、前記封止形成工程後に、発光部に前記有機層の成膜が不十分である欠陥部分があるときに、該欠陥部分に対応する前記第2電極の相当部分にのみ光を照射し、この光が照射された部分のみを除去する工程と、を有することを特徴とする。   The invention of claim 2 is a method of manufacturing a light-emitting display in which a first electrode, an organic layer composed of an organic electroluminescent element, and a second electrode are sequentially laminated on a substrate. Forming a layer of one electrode; sequentially stacking the organic layer and the second electrode; and laminating the organic electroluminescent element with an opaque sealing cover after the second electrode is stacked on the organic layer. A sealing formation step that stops, and after the sealing formation step, when there is a defective portion where the organic layer is insufficiently formed in the light emitting portion, a corresponding portion of the second electrode corresponding to the defective portion And irradiating only the light, and removing only the portion irradiated with the light.

請求項3の発明は、請求項1または2に記載の発光ディスプレイの製造方法であって、前記光が照射された部分のみを除去する工程は、前記光を前記基板側から照射することを特徴とする。   Invention of Claim 3 is a manufacturing method of the light emission display of Claim 1 or 2, Comprising: The process of removing only the part irradiated with the said light irradiates the said light from the said substrate side. And

請求項4の発明は、基板上に、第1電極と、有機エレクトロルミネセンス素子からなる有機層と、第2電極とが順次積層された発光ディスプレイの製造方法であって、前記基板上に第1電極を層形成する工程と、前記有機層及び第2電極を順次積層する工程と、封止カバーで有機エレクトロルミネセンス素子を封止する封止工程と、発光部に前記有機層の成膜が不十分である欠陥部分があるときに、前記封止カバーに対して透明となる波長の光を、前記封止カバー側から前記欠陥部分に対応する前記第2電極の相当部分にのみ光を照射し、この光が照射された部分のみを除去する工程とを有することを特徴とする。   The invention of claim 4 is a method for manufacturing a light-emitting display in which a first electrode, an organic layer composed of an organic electroluminescent element, and a second electrode are sequentially laminated on a substrate. A step of forming a layer of one electrode, a step of sequentially laminating the organic layer and the second electrode, a sealing step of sealing the organic electroluminescent element with a sealing cover, and the formation of the organic layer on the light emitting portion When there is a defective portion that is insufficient, light having a wavelength that is transparent to the sealing cover is emitted only from the sealing cover side to a corresponding portion of the second electrode corresponding to the defective portion. Irradiating and removing only the portion irradiated with this light.

本発明は、透明電極及び金属電極がショート等して発光しない画素や発光不良画素等の欠陥画素が生じた生じた場合でも、欠陥画素に対応する透明電極及び金属電極が交差する領域に対応する金属電極のうち、金属電極の当該欠陥部分に対応する部分のみ削除する修復を行うことにより、残余の金属電極によって有機層を介して対向する透明電極間に電流を流し、その画素ならびに以降走査される画素を発光させるものである。このことにより、多少の欠陥画素があっても十分な実用に耐える発光ディスプレイを設計でき、欠陥修復による歩留まり向上に寄与することができる。   The present invention corresponds to a region where a transparent electrode and a metal electrode corresponding to a defective pixel intersect even when a defective pixel such as a pixel that does not emit light due to a short-circuit between the transparent electrode and the metal electrode or a defective light emitting pixel occurs. By repairing the metal electrode by deleting only the part corresponding to the defective part of the metal electrode, a current is passed between the transparent electrodes facing each other through the organic layer by the remaining metal electrode, and the pixel and the subsequent scanning are performed. This causes the pixel to emit light. This makes it possible to design a light-emitting display that can withstand practical use even if there are some defective pixels, and can contribute to an improvement in yield by defect repair.

図1は、本発明実施形態における発光ディスプレイの概略層構造断面を示す図である。図1に示すように、本発明の発光ディスプレイは、ガラス透明基板101上に第1の電極となるITO等の複数の透明電極102、有機層103、透明電極102に交差する複数の第2の電極となる金属電極104を順に蒸着積層して形成される。有機層103を挟持して互いに対向し対をなす透明電極102及び金属電極104により有機EL素子を使用した光ディスプレイとしての発光部が形成され、透明電極102及び金属電極104の各々が互いに対向して交差する交差領域の発光部を1単位として1画素が形成される。   FIG. 1 is a schematic cross-sectional view of a light emitting display according to an embodiment of the present invention. As shown in FIG. 1, the light-emitting display of the present invention has a plurality of second electrodes intersecting a plurality of transparent electrodes 102, an organic layer 103, and the transparent electrodes 102 made of ITO or the like serving as a first electrode on a glass transparent substrate 101. A metal electrode 104 to be an electrode is sequentially deposited and formed. A light emitting part as an optical display using an organic EL element is formed by the transparent electrode 102 and the metal electrode 104 facing each other with the organic layer 103 interposed therebetween, and each of the transparent electrode 102 and the metal electrode 104 faces each other. One pixel is formed with the light emitting portion of the intersecting region intersecting as one unit.

ここでは、図4と同様な傷10、パーティクル20、その他有機層欠陥30が含まれる欠陥画素となっているが、金属電極104の当該欠陥部分の相当部分Bが削除され、その周囲に残余の部分Aが残されている。そうすることによって電流の集中を解消し、周辺に電流を流しその画素の正常な発光を促す。   Here, the defect pixel includes the scratch 10, the particle 20, and other organic layer defects 30 similar to those in FIG. 4, but a corresponding portion B of the defect portion of the metal electrode 104 is deleted, and the remaining portion around the defect portion is removed. Part A is left. By doing so, the concentration of current is eliminated, and current is passed to the periphery to promote normal light emission of the pixel.

欠陥部分は、1画素より十分に小さいことに着目し、欠陥画素中、金属電極104の当該欠陥部分のみ削除し、欠陥画素の欠陥部分を除く残余の部分Aの金属電極104によって有機層103を介し、対向している透明電極102間に電流を流し、その欠陥画素を発光させることによって修復による歩留まりの向上をはかるものである。金属電極104の削除方法によっては、欠陥部分Aの有機層103または透明電極102の一部または全体も同時に削除される可能性があるが、特に問題はない。   Focusing on the fact that the defective portion is sufficiently smaller than one pixel, only the defective portion of the metal electrode 104 is deleted in the defective pixel, and the organic layer 103 is formed by the remaining portion A of the metal electrode 104 excluding the defective portion of the defective pixel. The yield is improved by repairing by passing a current between the transparent electrodes 102 facing each other and causing the defective pixel to emit light. Depending on the method of deleting the metal electrode 104, the organic layer 103 or the transparent electrode 102 of the defective portion A may be deleted at the same time, but there is no particular problem.

なお、金属電極104には、アルミニュウム、マグネシウム、インジウム、銅または各々の合金等の仕事関数が小さな、例えばAl−Li合金を用いる。また、透明電極102には、ITO等の仕事関数の大きな導電性材料または金等を用いることができる。ここで、金を電極材料として用いた場合、電極は半透明の状態となる。   For the metal electrode 104, for example, an Al—Li alloy having a small work function such as aluminum, magnesium, indium, copper, or an alloy thereof is used. The transparent electrode 102 can be made of a conductive material having a high work function such as ITO or gold. Here, when gold is used as an electrode material, the electrode is translucent.

図2は、図1に示す単純マトリクス駆動型の発光ディスプレイの製造工程を示す図である。図2(a)において、まず、透明基板101上にITO等の電極材料を蒸着し、フォトリソグラフィ法に基づくパターンニングに従い複数本の透明電極層102を形成する。   FIG. 2 is a diagram showing a manufacturing process of the simple matrix driving type light emitting display shown in FIG. 2A, first, an electrode material such as ITO is vapor-deposited on the transparent substrate 101, and a plurality of transparent electrode layers 102 are formed according to patterning based on a photolithography method.

次に、図2(b)において、透明電極102が形成された透明基板101上に、有機物として、例えば、TPDやAlq3等を順次積層して有機層103から成る発光部を形成する。そして、図2(c)において、金属電極層104を形成すると、各透明電極102と金属電極104が交差し挟持する有機層の領域に対応する部分を1単位とする発光画素がマトリクス状に配列形成される。なお、透明電極102の傷10、または、透明電極102上のパーティクル20は図4に示す従来例同様付着しているものとする。   Next, in FIG. 2B, on the transparent substrate 101 on which the transparent electrode 102 is formed, for example, TPD, Alq3, and the like are sequentially stacked as an organic material to form a light emitting unit composed of the organic layer 103. In FIG. 2C, when the metal electrode layer 104 is formed, light emitting pixels having a unit corresponding to a region of the organic layer where each transparent electrode 102 and the metal electrode 104 intersect and sandwich each other are arranged in a matrix. It is formed. It is assumed that the scratches 10 on the transparent electrode 102 or the particles 20 on the transparent electrode 102 are attached as in the conventional example shown in FIG.

このように形成された単純マトリクス駆動型の発光ディスプレイは、各透明電極102及び金属電極104を走査駆動する駆動源により、適宜、各画素に対応する透明電極102及び金属電極104間に電圧が印加され、各画素の発光部103に電荷が送り込まれ発光する。そこで、発光ディスプレイの全発光画素を同時に発光させるように駆動源を印加し、この状態で発光不良画素や発光しない画素等の欠陥画素を確認する。そしてその欠陥画素に対する修復を行う。   In the simple matrix driving type light emitting display formed as described above, a voltage is applied between the transparent electrode 102 and the metal electrode 104 corresponding to each pixel as appropriate by a driving source that scans and drives each transparent electrode 102 and the metal electrode 104. Then, charges are sent to the light emitting portion 103 of each pixel to emit light. Therefore, a driving source is applied so that all the light emitting pixels of the light emitting display emit light simultaneously, and in this state, defective pixels such as defective light emitting pixels and pixels that do not emit light are confirmed. Then, the defective pixel is repaired.

修復は、図2(d)に示すように、欠陥画素が本来有する発光領域に対応する単位画素の領域の一部にレーザ光を照射することにより行われる。すなわち、レーザ光を照射してその発光領域に対面する金属電極104の一部を除去する。ここで、レーザスポットの位置決めは、その発光領域(画素)の座標をあらかじめ測定しておき、さらに、顕微鏡当を使用した目視によって、欠陥部分を確認してレーザスポットの位置決めを行う。   As shown in FIG. 2D, the repair is performed by irradiating a part of the unit pixel region corresponding to the light emitting region inherent to the defective pixel with laser light. That is, a part of the metal electrode 104 facing the light emitting region is removed by laser irradiation. Here, the positioning of the laser spot is performed by measuring the coordinates of the light emitting region (pixel) in advance, and further confirming the defective portion by visual observation using a microscope, and positioning the laser spot.

このことにより、欠陥部分が1画素より十分に小さい場合、欠陥画素中、金属電極104の当該欠陥部分のみ削除し、欠陥画素の欠陥部分を除く残余の金属電極104によって有機層103を介し対向している透明電極102間に電流を流し、その画素を発光させることができる。なお、上記の例ではレーザ光を金属電極104側から照射しているが、透明基板101側からレーザ光を照射して金属電極104の欠陥部分を削除することもできる。ただし、透明基板101のレーザに対する透過率が低い場合は、金属電極104側から照射する方が好ましい。   As a result, when the defective portion is sufficiently smaller than one pixel, only the defective portion of the metal electrode 104 is deleted from the defective pixel, and the remaining metal electrode 104 excluding the defective portion of the defective pixel faces through the organic layer 103. A current can be passed between the transparent electrodes 102 and the pixels can emit light. In the above example, the laser beam is irradiated from the metal electrode 104 side, but the defective portion of the metal electrode 104 can be deleted by irradiating the laser beam from the transparent substrate 101 side. However, when the transmittance of the transparent substrate 101 to the laser is low, it is preferable to irradiate from the metal electrode 104 side.

このように、金属電極104の欠陥部分の削除が済むと、図2(e)に示すように、透明基板101上の全面に対して保護膜105を積層することで単純マトリクス駆動型の発光ディスプレイが形成される。   In this way, when the defective portion of the metal electrode 104 is deleted, as shown in FIG. 2E, a protective film 105 is laminated on the entire surface of the transparent substrate 101, whereby a simple matrix driving type light emitting display is obtained. Is formed.

上記の実施形態では保護膜105を形成しているが、例えば図3に示したように、透明電極102、有機層103および金属電極層104を覆うように、封止カバー106を取り付け、透明基板101の周囲で封止するようにしてもよい。この場合、封止カバー106を取り付けた後で、金属電極104の欠陥部分の削除を行うこともできる。すなわち、封止カバー106が金属製等でできていて不透明な場合、丸付き数字1のように透明基板101側からレーザを照射する。また、封止カバー106がガラス製等でできていて透明な場合、丸付き数字1の透明基板101側、丸付き数字2の封止カバー106側のどちらからでもレーザを照射することができる。   In the above embodiment, the protective film 105 is formed. For example, as shown in FIG. 3, a sealing cover 106 is attached so as to cover the transparent electrode 102, the organic layer 103, and the metal electrode layer 104. You may make it seal around the 101. FIG. In this case, the defective portion of the metal electrode 104 can be deleted after the sealing cover 106 is attached. That is, when the sealing cover 106 is made of metal or the like and is opaque, the laser is irradiated from the transparent substrate 101 side as indicated by a circled number 1. When the sealing cover 106 is made of glass or the like and is transparent, the laser can be irradiated from either the transparent substrate 101 side with the circled number 1 or the sealing cover 106 side with the circled number 2.

また、保護膜105を積層したものに、さらに封止カバー106を取り付けるようにしてもよいことはいうまでもない。   Needless to say, the sealing cover 106 may be further attached to the laminated protective film 105.

なお、上述した本発明実施形態においては、少なくとも、有機層103と直交する複数の透明電極102と及び複数の金属電極104によって形成される有機EL素子によって構成される単純マトリクス駆動型の発光ディスプレイのみ例示して説明したが、本発明はこれに限らず、対となる複数の電極が互いに交差して複数の発光画素が形成されるものであれば発光画素の配列や発光部に用いる材料は問わない。   Note that in the above-described embodiment of the present invention, only a simple matrix driving type light-emitting display composed of at least a plurality of transparent electrodes 102 orthogonal to the organic layer 103 and an organic EL element formed by a plurality of metal electrodes 104 is used. However, the present invention is not limited to this, and any material used for the array of light emitting pixels and the light emitting portion may be used as long as a plurality of light emitting pixels are formed by crossing a plurality of pairs of electrodes. Absent.

本発明実施形態における発光ディスプレイの概略層構造断面を示す図である。It is a figure which shows the general | schematic layer structure cross section of the light emission display in this invention embodiment. 本発明実施形態における発光ディスプレイの製造工程を示す図である。It is a figure which shows the manufacturing process of the light emission display in embodiment of this invention. 本発明実施形態における発光ディスプレイで封止カバーを使用した状態を示す図である。It is a figure which shows the state which used the sealing cover with the light emission display in this invention embodiment. 従来における発光ディスプレイの概略断面構造を示す図である。It is a figure which shows schematic sectional structure of the conventional light emission display. 従来における有機EL素子を用いた単純マトリクス駆動型の発光ディスプレイの透明電極及び金属電極の配列の一例を示す図である。It is a figure which shows an example of the arrangement | sequence of the transparent electrode of a simple matrix drive type light emitting display using the organic EL element in the past, and a metal electrode.

符号の説明Explanation of symbols

101…基板
102…透明電極(第1電極)
103…有機層(発光部)
104…金属電極(第2電極)
105…保護膜層
101 ... Substrate 102 ... Transparent electrode (first electrode)
103 ... Organic layer (light emitting part)
104 ... Metal electrode (second electrode)
105 ... Protective film layer

Claims (4)

基板上に、第1電極と、有機エレクトロルミネセンス素子からなる有機層と、第2電極とが順次積層された発光ディスプレイの製造方法であって、
前記基板上に第1電極を層形成する工程と、
前記有機層及び第2電極を順次積層する工程と、
前記第2電極を前記有機層上に積層した後に封止カバーで前記有機エレクトロルミネセンス素子を封止する封止形成工程と、
前記封止形成工程後に、発光部に前記有機層の成膜が不十分である欠陥部分があるときに、該欠陥部分に対応する前記第2電極の相当部分にのみ光を照射し、この光が照射された部分のみを除去する工程と、
を有することを特徴とする発光ディスプレイの製造方法。
A method of manufacturing a light-emitting display in which a first electrode, an organic layer composed of an organic electroluminescent element, and a second electrode are sequentially stacked on a substrate,
Forming a first electrode layer on the substrate;
Sequentially stacking the organic layer and the second electrode;
A sealing forming step of sealing the organic electroluminescent element with a sealing cover after laminating the second electrode on the organic layer;
After the sealing formation step, when there is a defective portion where the organic layer is not sufficiently formed on the light emitting portion, only the corresponding portion of the second electrode corresponding to the defective portion is irradiated with light. Removing only the irradiated part;
A method for manufacturing a light emitting display, comprising:
基板上に、第1電極と、有機エレクトロルミネセンス素子からなる有機層と、第2電極とが順次積層された発光ディスプレイの製造方法であって、
前記基板上に第1電極を層形成する工程と、
前記有機層及び第2電極を順次積層する工程と、
前記第2電極を前記有機層上に積層した後に不透明な封止カバーで前記有機エレクトロルミネセンス素子を封止する封止形成工程と、
前記封止形成工程後に、発光部に前記有機層の成膜が不十分である欠陥部分があるときに、該欠陥部分に対応する前記第2電極の相当部分にのみ光を照射し、この光が照射された部分のみを除去する工程と、
を有することを特徴とする発光ディスプレイの製造方法。
A method of manufacturing a light-emitting display in which a first electrode, an organic layer composed of an organic electroluminescent element, and a second electrode are sequentially stacked on a substrate,
Forming a first electrode layer on the substrate;
Sequentially stacking the organic layer and the second electrode;
A sealing formation step of sealing the organic electroluminescent element with an opaque sealing cover after laminating the second electrode on the organic layer;
After the sealing formation step, when there is a defective portion where the organic layer is not sufficiently formed on the light emitting portion, only the corresponding portion of the second electrode corresponding to the defective portion is irradiated with light. Removing only the irradiated part;
A method for manufacturing a light emitting display, comprising:
前記光が照射された部分のみを除去する工程は、前記光を前記基板側から照射することを特徴とする請求項1または2に記載の発光ディスプレイの製造方法。   The method of manufacturing a light emitting display according to claim 1, wherein the step of removing only the portion irradiated with the light irradiates the light from the substrate side. 基板上に、第1電極と、有機エレクトロルミネセンス素子からなる有機層と、第2電極とが順次積層された発光ディスプレイの製造方法であって、
前記基板上に第1電極を層形成する工程と、
前記有機層及び第2電極を順次積層する工程と、
封止カバーで有機エレクトロルミネセンス素子を封止する封止工程と、
発光部に前記有機層の成膜が不十分である欠陥部分があるときに、前記封止カバーに対して透明となる波長の光を、前記封止カバー側から前記欠陥部分に対応する前記第2電極の相当部分にのみ光を照射し、この光が照射された部分のみを除去する工程と
を有することを特徴とする発光ディスプレイの製造方法。
A method of manufacturing a light-emitting display in which a first electrode, an organic layer composed of an organic electroluminescent element, and a second electrode are sequentially stacked on a substrate,
Forming a first electrode layer on the substrate;
Sequentially stacking the organic layer and the second electrode;
A sealing step of sealing the organic electroluminescent element with a sealing cover;
When there is a defective portion in which the organic layer is not sufficiently formed in the light emitting portion, light having a wavelength that is transparent to the sealing cover is transmitted from the sealing cover side to the defective portion. And a step of irradiating only a corresponding portion of the two electrodes with light and removing only the portion irradiated with the light.
JP2006139952A 2006-05-19 2006-05-19 Manufacturing method of luminescent display Pending JP2006278343A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010092749A1 (en) 2009-02-10 2010-08-19 パナソニック株式会社 Organic el display and method for manufacturing same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010092749A1 (en) 2009-02-10 2010-08-19 パナソニック株式会社 Organic el display and method for manufacturing same
US8772052B2 (en) 2009-02-10 2014-07-08 Panasonic Corporation Repaired organic EL display and method for manufacturing same including repairing process

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