JP2001117129A - Two-dimensional driving device and image blurring correcting device using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To miniaturize an image blurring correction device using 2-dimensional driving device by eliminating a position detecting element, to reduce assembling man-hour, and to improve the accuracy of position detection in an image blurring correcting device using a two-dimensional driving device. SOLUTION: A position detecting means is constituted of a set of an LED 12 (light emitting element) and a two-dimensional PSD 14 (two-dimensional position detecting element). A first coil 7y, a second coil 7x and the terminal of the LED 12 which are the driving means of a pitching movable frame 2 which an image blurring correcting lens group 1 loaded, are soldered to a flexible printing cable 16 electrically connecting to an outside driving circuit on the same plane surface of the frame 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a two-dimensional drive device for moving a moving object in a two-dimensional direction, and also to reduce image blur caused by camera shake of a video camera or the like using the two-dimensional drive device. The present invention relates to an image blur correction device for correcting.

[0002]

2. Description of the Related Art As a conventional image blur correction device using a two-dimensional driving device, one described in Japanese Patent Application Laid-Open No. 4-18515 is known. The content of this is a part of the optical system of the photographing optical system (image blur correcting optical system) in order to correct image blur caused by camera vibration during shooting.
Is moved in two directions substantially perpendicular to the optical axis to change the optical axis of the photographing optical system.

FIG. 17 is an exploded perspective view showing an example of a conventional image blur correction device disclosed in the above publication.

A fixed frame 43 for holding the correction lens 41 is
Pitch slide shaft 4 via slide bearings 44p, 44p
It can slide on 5p. The pitch slide shaft 45p is attached to the holding frame 46. The fixed frame 43 is sandwiched between pitch coil springs 47p, 47p coaxial with the pitch slide shaft 45p, and is held near a neutral position. A pitch coil 48p is attached to the fixed frame 43. The pitch coil 48p is placed in a magnetic circuit composed of a pitch magnet 49p and a pitch yoke 410p, and the fixed frame 43 is driven in a pitching direction 42p (vertical direction) by flowing an electric current. The fixed frame 43 includes a light projector 412p (LED) and a slit 411.
p is provided integrally via a fixing member 421p,
The fixed-side light receiver 413p (P
SD) and the pitching direction 42p of the fixed frame 43
Is detected.

[0005] Further, a sliding bearing 44y,
44y is fitted, and can slide inside the housing 414 to which the yaw slide shaft 45y is attached. The housing 414 is attached to a lens barrel (not shown), and the holding frame 46 is movable in the yawing direction 42y (horizontal direction) with respect to the lens barrel.
The yaw coil spring 4 is coaxial with the yaw slide shaft 45y.
7y and 47y are provided, and are held near the neutral position similarly to the fixed frame 43. The fixed frame 43 has a yaw coil 4
8y, the yaw coil 48y is placed in a magnetic circuit composed of a yaw magnet 49y and a yaw yoke 410y, and when a current flows, the fixed frame 43 and the holding frame 46 are driven in the yawing direction 42y. . The fixed frame 43 includes a light projector 412y (LED) and a slit 4
11y is provided integrally via a fixed dispersion 421y, and the fixed-side light receiver 413y is provided via a slit 411y.
(PSD) and the yaw direction 4 of the fixed frame 43
2y position detection is performed.

[0006]

However, the conventional image blur correction device using the conventional two-dimensional driving device configured as described above has the following problems. (1) With the reduction in size and weight of a lens barrel equipped with an image blur correction device, it has become necessary to further reduce the size of the image blur correction device. However, when the fixed frame 43 on which the correction lens 41 is mounted is driven in two directions of pitching and yawing orthogonal to the optical axis, two sets of position detection sensors are required as means for detecting the position. That is, the LED 412p and the PSD 413p are required in the pitching direction, and the LED 412y and the PSD 413y are required in the yawing direction. Therefore, since two sets of position detection sensors are required, it is difficult to reduce the size of the image blur correction device. (2) Two LEDs 412p fixed to the fixed frame 43,
It is necessary to electrically connect a total of eight wires 412y and a pitch coil 48p and a yaw coil 48y to an external drive circuit. Therefore, since there are many wires to be connected to the outside, the number of assembly steps such as the complexity of soldering increases, which leads to an increase in cost.

Accordingly, the present invention has been made to solve the above-mentioned problems, and has been developed to solve the above-mentioned problems. The conventional two sets of LED (light emitting diode) and PSD (Position Sensitive Light D) are used.
An object of the present invention is to provide a two-dimensional drive device that is configured with a set of light emitting elements and position detection elements to reduce the size of a device that includes a position detection sensor that is configured with an Eector / Position Sensitive Device. . Moreover,
The purpose is to reduce the man-hours for assembling flexible printed cables. In addition, another object of the present invention is to improve the detection accuracy of a position detecting element that detects two-dimensional position coordinates, which is adopted in the present invention.

[0008]

According to the present invention, a two-dimensional driving device for solving the above-mentioned problems is provided. The number of components can be reduced by employing a two-dimensional position detecting element as a position detecting element. And simplify wiring. Furthermore, in the present invention, the calculation for control is performed based on the sum of the detected values of the two-dimensional position detecting element in two directions, so that the position detecting accuracy can be improved.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be generally described.

A two-dimensional driving device according to a first aspect of the present invention includes a moving object movable in first and second directions, a first driving means for driving the moving object in the first direction, A second driving unit that drives the moving target in the second direction; and a position of the moving target in the first and second directions detected by an incident point of light from the light emitting element to the position detecting element. A position detecting unit configured to control the first and second driving units such that the positions in the first and second directions detected by the position detecting unit become predetermined positions. A two-dimensional position detecting element is used as the position detecting element, and the first and second coils and the light emitting element in each of the first and second driving means correspond to the moving object. Wiring arranged in Characterized in that it is wired.
According to the configuration of the first aspect, since the two-dimensional position detecting element is used as the position detecting element in the position detecting means, the number of parts of the position detecting element and the light emitting element can be reduced as compared with the related art, and the two-dimensional position detecting element can be reduced. The size of the driving device can be reduced. In addition, the number of light-emitting elements and the first and second coils connected to the wiring in a moving object can be reduced, and the efficiency of production work can be increased.

In the two-dimensional driving device according to the second aspect of the present invention, in the first aspect, the wiring is a flexible printed cable, and the first and second coils and the light emitting element for the flexible printed cable are provided. Are arranged on the same surface side of the moving object. According to the second aspect, the number of connection points to the flexible printed cable can be reduced as compared with the related art. As the number of patterns in a flexible printed cable is reduced, the rigidity becomes weaker and more flexible, so the load that adversely affects the control characteristics of the moving object by the actuator against the flexible printed cable is reduced, and control accuracy is improved. be able to.

A two-dimensional driving device according to a third aspect of the present invention includes a moving object movable in first and second directions, a first driving means for driving the moving object in the first direction, A second driving unit that drives the moving target in the second direction; and a position of the moving target in the first and second directions detected by an incident point of light from the light emitting element to the position detecting element. A position detecting unit configured to control the first and second driving units such that the positions in the first and second directions detected by the position detecting unit become predetermined positions. A two-dimensional position detection element is used as the position detection element, and a sum of detection values of the two-dimensional position detection element in the first direction and a detection value of the two-dimensional position detection element in the second direction So that the sum with the sum is kept almost constant Characterized in that it is configured to drive and control the light emitting element. For example, the sum of the detected values in the first direction at the electric center of the two-dimensional position detecting element is represented by A
(O), assuming that the sum of the detected values in the second direction is B (O) and the total sum of the detected values G (O) = A (O) + B (O) is the reference value, Total sum of detected values G = A
The control is performed so that + B always becomes equal to the reference value G (O). According to the third aspect, even if the two-dimensional position detecting element varies in the first direction and the second direction due to manufacturing tolerance, the position of the two-dimensional position detecting element is detected in both directions. Accuracy can be improved.

The two-dimensional driving apparatus according to a fourth aspect of the present invention is the two-dimensional driving device according to the third aspect, wherein the sum of the detection values in the first direction previously obtained for the two-dimensional position detecting element is equal to the second value. It is characterized in that the calculation for obtaining the sum of the sum of the detected values in both directions is corrected based on a predetermined relationship with the sum of the detected values in the direction. This fourth
According to the invention, when it is previously known at the manufacturing stage that there is a difference in sensitivity between the first direction and the second direction in the two-dimensional position detecting element due to manufacturing tolerance, for example, the sensitivity ratio Is registered in the storage unit in advance, and the correction is performed using the correction coefficient, so that the amount of light amount feedback in the direction of low sensitivity is increased, and the influence of disturbance on the element in the direction of low sensitivity is increased. Can be suppressed, and the position detection accuracy of the two-dimensional position detection element can be made high in both the first and second directions.

According to a fifth aspect of the present invention, in the two-dimensional driving device according to the third aspect, the sum of the detected values in the first direction at or near the electric center of the two-dimensional position detecting element is equal to A correction coefficient is generated based on the sum of the detection values in the two directions, the correction coefficient is stored, and the result of correcting the calculation of the sum of the detection values in the two directions by the correction coefficient is stored as a reference value. Correcting the sum of the detected values in the first direction and the sum of the detected values in the second direction at an arbitrary spot position based on the stored correction coefficient;
The light-emitting device is configured to drive and control the light-emitting element so that the corrected sum approaches the stored reference value. According to the fifth aspect, it is possible to perform the light amount feedback so as to reduce the influence of the positional relationship between the light emitting element and the two-dimensional position detecting element and the variation in the optical path, and the position detecting accuracy of the two-dimensional position detecting element can be improved. Can be something.

[0015] The two-dimensional drive device according to a sixth aspect of the present invention, in the third aspect, is characterized in that the two-dimensional position detecting element has an offset amount in the first direction and an offset amount in the second direction. Based on the correction coefficient, the correction coefficient is stored, the correction coefficient is used to store a result obtained by correcting the calculation of the sum of the detection value sums in the two directions as a reference value, and the correction value is stored at an arbitrary spot position. The sum of the detected values in the first direction and the sum of the detected values in the second direction are corrected based on the stored correction coefficient, and the sum after the correction approaches the stored reference value. The light-emitting element is configured to be driven and controlled. According to the sixth aspect, it is possible to perform the light amount feedback control to reduce the influence of the mounting variation causing the offset in the two-dimensional position detecting element, and to improve the position detecting accuracy of the two-dimensional position detecting element. Can be.

Hereinafter, specific embodiments of an image blur correction device using a two-dimensional driving device according to the present invention will be described in detail with reference to the drawings.

(Embodiment 1) FIG. 1 is an exploded perspective view of an image blur correction device according to Embodiment 1, FIG. 2 is a perspective view of a main part of a flexible printed cable connection portion, and FIG. 3 is a two-dimensional PSD.
(Position Sensitive Light Detector / Position Sen
FIG. 4 is a block diagram showing an example of an arithmetic circuit for calculating and outputting a two-dimensional position based on a light output current value output from a two-dimensional PSD, and FIG. FIG. 3 is a block diagram of an image blur correction circuit.

An image blur correcting lens group 1 for correcting image blur during photographing is movable in a pitching direction which is a first direction (Y direction) of FIG. 1 and is movable in a second direction (X direction).
Is fixed to the pitching movement frame 2 which can also move in the yawing direction. This pitching moving frame 2 is provided with a bearing 2a and a rotation stopper 2b on the opposite side thereof,
It is configured to be slidable in a first direction (Y direction) via two pitching shafts 3a and 3b. A first electromagnetic actuator 6y is arranged below the pitching movement frame 2. This first electromagnetic actuator 6y
Is composed of a first coil 7y attached to the pitching movement frame 2, a magnet 8y and a yoke 9y attached to a fixed frame 10, which will be described later. The magnet 8y has two poles magnetized on one side and is fixed to a U-shaped yoke 9y which is open on one side. Further, on the right side of the pitching movement frame 2, a second electromagnetic actuator 6
x is arranged. This second electromagnetic actuator 6
x is a second coil 7x attached to the pitching moving frame 2, and a magnet 8x attached to the fixed frame 10.
And a yoke 9x. The magnet 8x has two poles magnetized on one side, and is fixed to a U-shaped yoke 9x open on one side. The first electromagnetic actuator 6y, the magnet 8y, and the yoke 9y constitute first driving means for driving the pitching movement frame 2 in the pitching direction (Y direction) which is the first direction, and the second electromagnetic actuator 6x The magnet 8x and the yoke 9x constitute second driving means for driving the pitching movement frame 2 in the yawing direction (X direction) which is the second direction.

A yawing moving frame 4 for moving the image blur correcting lens group 1 in the second direction (X direction) is mounted in the -Z direction of the pitching moving frame 2. In the Z direction of the yawing movement frame 4, there is provided a 2 for sliding the pitching movement frame 2 described above in the pitching direction (Y direction).
Fixing portions 4c and 4d for fixing both ends of the pitching shafts 3a and 3b are provided. The yawing moving frame 4 is provided with a bearing 4a and a shaft 5b (not shown) on the opposite side, so that the two yawing shafts 5
a, 5b via the yawing direction (X
Direction). The yawing shaft 5a is fixed to a fixing portion 10c (not shown) of a fixing frame 10 provided in the -Z direction of the yawing moving frame 4. The shaft 5b is slidable by a rotation stopper 10d provided on the fixed frame 10.

With the above configuration, the pitching movement frame 2
When an electric current is applied to the first coil 7y, the magnet 8
The y and yoke 9y generate an electromagnetic force along the pitching direction (Y direction) which is the first direction. Similarly, when an electric current is applied to the second coil 7x of the pitching movement frame 2, an electromagnetic force is generated by the magnet 8x and the yoke 9x in the yawing direction (X direction) which is the second direction. Thus, the two electromagnetic actuators 6
By means of y and 6x, the image blur correction lens group 1 is driven in two directions, X and Y, which are substantially perpendicular to the optical axis Z direction.

Next, the position detecting means will be described. The position detection unit 11 of the pitching movement frame 2 on which the image blur correction lens group 1 is mounted is a two-dimensional position detection element 2 attached to the light emitting element 12 (hereinafter, referred to as LED), the slit 13 and the PSD substrate 15. Dimension PSD (Position S
ensitive Light Detector / Position Sensitive Devic
e) It consists of 14. This position detection unit 11
The position of the pitching movement frame 2 on the X, Y axis plane is
It is detected by the ED 12 and the two-dimensional PSD 14. The LED 12 is mounted on the back side of the pitching movement frame 2, and the two-dimensional PSD 14 is fixed to a PSD board 15 arranged to face the front surface of the pitching movement frame 2. The PSD substrate 15 is fixed to the fixed frame 1 by a set screw 15a.
0 is fixed to the fixing portion 10e. A substantially circular slit 13 is formed through the pitching movement frame 2 so as to be aligned with the LED 12 (see FIG. 2).
The light emitted from the ED 12 passes through the slit 13 and passes through the two-dimensional P
It is configured to irradiate the detection surface of SD14.
The projection light that has passed through the slit 13 from the LED 12 is incident on the two-dimensional PSD 14, and converts the spot light of the LED 12 into a photocurrent output corresponding to the incident position. Then, by calculating the photocurrent output, the two-dimensional position coordinates of the image blur correction lens group 1 can be obtained.

Next, a two-dimensional PSD will be described with reference to FIGS.
The principle of calculating and outputting two-dimensional position coordinates based on the photocurrent output value output from 14 will be described. For the pitching direction (Y direction) which is the first direction, the two-dimensional PS
Two photocurrent outputs Iy1 and Iy2 output from D14
Are converted into voltage values Vy1 and Vy2 by the IV conversion amplifiers 20y and 21y, respectively.
The signal is input to the differential amplifier unit 22y. Differential amplifier section 22y
Calculates the Y-direction position coordinates on the light receiving surface of the two-dimensional PSD 14 according to the following equation (Equation 1) and outputs the result.

[0023]

(Equation 1)

Here, Ly is the length of the element of the two-dimensional PSD 14 in the pitching direction (Y direction).

Similarly, in the yawing direction (X direction), which is the second direction, the two photocurrent outputs Ix1 and Ix2 output from the two-dimensional PSD 14 are supplied with voltage values by the IV conversion amplifiers 20x and 21x, respectively. Vx1, Vx2
The two voltage values are converted to the differential amplifier unit 22x
Is input to The differential amplifier 22x calculates and outputs the position coordinates in the X direction on the light receiving surface of the two-dimensional PSD 14 according to the following equation (Equation 2).

[0026]

(Equation 2)

Here, Lx is the length of the element of the two-dimensional PSD 14 in the yawing direction (X direction).

Next, according to FIG. 2, a flexible printed cable 16 for connecting an external drive circuit (not shown) is used.
Will be described. A flexible printed cable 16 is attached to the front surface 2 e of the pitching movement frame 2 so as to surround the image blur correction lens group 1.
y, it is electrically connected to the second coil 7x and the LED 12, and after being bent at a substantially right angle at the portion 16d, it is connected to an external drive circuit. The LED 12 is mounted on the back side of the pitching movement frame 2,
Two insertion holes 2 c and 2 d are formed through the pitching movement frame 2, and two terminals 12 a and 12
b is passed through the insertion holes 2c and 2d and protrudes toward the front side. That is, on the front surface 2e of the pitching moving frame 2 to which the flexible print cable 16 is fixed, LE
D12, two terminals 12a and 12b, and a first coil 7
y, a total of six terminals of the second coil 7x are soldered at lands 16a, 16b, 16c provided on the same surface. The above components constitute the shift unit 17 for image blur correction.

The operation of the thus-configured image blur correction apparatus according to the first embodiment will be described below with reference to FIG.

A camera shake acting on a video camera having a built-in image blur correction device is detected by two angular velocity sensors 18 arranged at 90 °. The output obtained by the angular velocity sensor 18 is integrated over time. Then, it is converted into a camera shake angle, and is converted into target position information of the image blur correction lens group 1. In order to move the image blur correction lens group 1 according to the target position information, the servo drive circuit 19
The difference between the target position information and the current position information of the image blur correction lens group 1 is calculated, and a signal is transmitted to the electromagnetic actuators 6y and 6x. The electromagnetic actuators 6y and 6x drive the image blur correction lens group 1 based on this signal. For driving in the pitching direction Y, the servo drive circuit 19
When a current flows through the flexible printed cable 16 to the first coil 7y, the electromagnetic actuator 6y, which has received a command from the
Direction), the pitching movement frame 2 is driven in the pitching direction (Y direction). Further, with respect to driving in the yawing direction (X direction), which is the second direction, the electromagnetic actuator 6x which has received a command from the servo drive circuit 19, when a current flows through the flexible printed cable 16 to the second coil 7x, the yawing is performed. The force acts in the direction (X direction), and drives the pitching movement frame 2 together with the yawing movement frame 4 in the yawing direction (X direction). Therefore, the image blur correction lens group 1 can be arbitrarily moved in the two-dimensional plane orthogonal to the optical axis by the pitching movement frame 2 and the yawing movement frame 4, so that image blur caused by camera shake is corrected. It becomes possible.

As described above, according to the first embodiment, 2
In a two-dimensional driving device and an image blur correction device using the same, a two-dimensional P is used as a position detecting element in a position detecting means of a mechanism for moving a moving object in a two-dimensional direction.
By using an SD (two-dimensional position detection element), the number of position detection elements can be reduced from two in the prior art to one. The size can be reduced.

Further, the first pitching movement frame is provided with a first
The number of flexible printed cable patterns used for connecting the coil, the second coil, and the LED to an external drive circuit can be reduced from eight to six in the past, and the rigidity of the flexible printed cable is reduced by reducing the width. The load becomes weaker and adversely affects the control characteristics of the actuator. Furthermore, since the flexible printed cable is arranged on the plane of the pitching moving frame, and the first coil, the second coil, and the LED can all be soldered on the same plane, work efficiency in production is improved. Can be achieved.

(Embodiment 2) Next, a second embodiment of the present invention will be described with reference to FIGS.
6 is a diagram showing a relationship between a position on a two-dimensional PSD and an ideal photocurrent output value, FIG. 7 is a diagram showing a relationship between a position on a two-dimensional PSD and an ideal position detection accuracy, and FIG. FIG. 9 is a diagram showing the relationship between the position on the PSD and the variation in the photocurrent output value.
FIG. 10 is a diagram showing the relationship between the position on the two-dimensional PSD and the position detection accuracy when the accuracy is deteriorated. FIG. 10 shows the two-dimensional position based on the light output current value output from the two-dimensional PSD in the second embodiment. FIG. 6 is a block circuit diagram showing an example of an arithmetic circuit for calculating and outputting the result. The components described so far are denoted by the same reference numerals, and description thereof is omitted.
The shift unit 17 according to the second embodiment is the same as that described in the first embodiment.

The position detection accuracy of the two-dimensional PSD 14 will be described. As shown in FIG. 6, the output of the photocurrent output Iy1 in the pitching direction (Y direction) ideally changes almost linearly with respect to the position on the two-dimensional PSD. Similarly, the other photocurrent output Iy2 ideally changes substantially linearly so that the inclination is opposite to the position on the two-dimensional PSD. Therefore, within the detection range,
Since the output is always stable, highly accurate position detection accuracy as shown in FIG. 7 can be obtained. The same applies to the yawing direction (X direction), and the photocurrent output Ix
1 and Ix2, the output changes almost linearly within the detection range, so that a highly accurate position detection accuracy can be obtained within the detection range.

However, in practice, the two-dimensional PSD 14
8A, the linearity is deteriorated as the distance from the electric center (O) increases, and as shown by a broken line in FIG.
, The photocurrent output is weakened. As a result, as shown by the broken line in FIG. 9, there is a property that the position detection accuracy is extremely deteriorated at both ends of the detection range. Further, as shown by a solid line and a broken line in FIG.
In the SD 14, there is a difference in photocurrent output between the X direction and the Y direction, so that a difference occurs in the position detection accuracy between the X direction and the Y direction, and the shift unit 17 cannot perform sufficient position detection. is there.

<Regarding the Prior Art> The pitching direction (Y
Only one direction (direction) is considered. Referring to FIG. 6, as indicated by broken lines, the photocurrent outputs Iy1 and Iy2 are equal to each other at the electric center (O). Then, in either the positive direction or the negative direction, as one increases as the distance from the electric center (O) increases, the other decreases. However, in the case of having the ideal linearity of FIG. 6, the sum of the photocurrent outputs (Iy1 + Iy2) is kept constant.

FIG. 8 (a) where the linearity is impaired
, The sum (Iy1 + Iy2) of the photocurrent outputs in the pitching direction (Y direction) decreases as the distance from the electric center (O) increases, but in the electric center (O), each sum is the sum when there is linearity. And almost the same. Therefore, the sum (Iy1 (O) + Iy2 (O)) = a (O) of the photocurrent output at the electric center (O) is temporarily stored, and the photocurrent output at an arbitrary spot position in actual measurement is stored. Control may be performed so that the sum a = Iy1 + Iy2 coincides with the sum a (O) at the electric center (O).

Therefore, in a system using a conventional one-dimensional PSD, the following control method is used. The process of detecting only one direction in the case of this prior art will be described as follows, using the block in the pitching direction in the upper half of FIG. 10 as a substitute. However,
Here, it is necessary to regard code 14 as a one-dimensional PSD. The arithmetic unit 24, the storage unit 25, and the difference processing unit 26 are irrelevant, and the output terminal of the addition amplifier unit 23y is directly connected to the input terminal of the drive amplifier unit 27.
The photocurrent outputs Iy1 and Iy2 of the one-dimensional PSD are respectively converted into voltage values Vy by IV conversion amplifiers 20y and 21y.
1, Vy2. The converted voltage value is added by the addition amplifier unit 23y. Although the projection light from the LED 12 is received by the one-dimensional PSD, the addition amplifier 23
The operation of y is to find the sum of the received light amounts. Then, the drive amplifier 27 that causes the LED 12 to emit light so that the sum A of the output as the voltage value is always constant (that is, equal to the sum A (O) of the voltage values at the electric center (O)). LED1 while performing feedback control
2, a drive current is applied to emit light. Similar feedback control is performed in the other yawing direction. The feedback control in the pitching direction and the feedback control in the yawing direction are performed independently of each other.

<Embodiment 2 of the Present Invention> Here, as in Embodiment 2 of the present invention, a two-dimensional PSD
14 is used, there is one LED 12 as a light-emitting element, and as described above, the two-dimensional PSD 1
When the photocurrent outputs in the pitching direction (Y direction) and the yawing direction (X direction) vary, the sum of the photocurrent outputs in the pitching direction (Y direction) (Iy1 + I
If the feedback control is performed so that y2) becomes constant, the position detection accuracy in the other yawing direction (X direction) further deteriorates, and conversely, the yaw direction (X direction)
If feedback control is performed so that the sum (Ix1 + Ix2) of the photocurrent outputs becomes constant, there is a problem that the position detection accuracy in the other pitching direction (Y direction) is further deteriorated.

Therefore, in the second embodiment, the influence of the variation due to the manufacturing tolerance of the two-dimensional PSD is minimized, and both the pitching direction and the yawing direction are reduced.
It is intended to realize excellent position detection accuracy.

As shown in FIG. 10, the two-dimensional PSD 14
Are connected to IV conversion amplifiers 20y and 21y for individually converting the two photocurrent outputs Iy1 and Iy2 in the pitching direction (Y direction) into voltage values Vy1 and Vy2, respectively, and in the yawing direction (X Direction), the two photocurrent outputs Ix1 and Ix2 are individually converted to voltage values Vx1 and Vx2.
Are connected to the IV conversion amplifiers 20x and 21x. Each output terminal of the IV conversion amplifiers 20y and 21y in the pitching direction (Y direction) is connected to the differential amplifier unit 22y, and a signal y for driving and controlling the first coil 7y is output from the differential amplifier unit 22y. It is output. Further, each output terminal of the IV conversion amplifiers 20x and 21x in the yawing direction (X direction) is connected to the differential amplifier unit 22x, and the second coil 7x is supplied from the differential amplifier unit 22x.
Is output.

Then, I- in the pitching direction (Y direction)
The voltage values Vy1 and Vy2 output from each of the V conversion amplifiers 20y and 21y are added, and the sum of the voltage values A = Vy1 + V
The sum of the voltage values B = Vx1 + Vx2 is output by adding the voltage values Vx1 and Vx2 output from the addition amplifier unit 23y that outputs y2 and the IV conversion amplifiers 20x and 21x in the yawing direction (X direction). Addition amplifier section 23x
And the sum A = V of the voltage value output from the addition amplifier unit 23y
a calculation unit 24 that adds y1 + Vy2 and a sum B = Vx1 + Vx2 of the voltage values output from the addition amplifier unit 23x to output a sum G represented by G = A + B, and when the power of the image blur correction device is turned on. By the generated write enable signal WE, when the power is turned on, that is, the electric center (O)
Storage unit 25 that stores the sum G of the data as a reference value G (O)
And the sum G of the voltage values at an arbitrary spot position in the actual measurement and the reference value G which is the sum at the electric center (O) read out from the storage unit 25 by the read enable signal RE.
A difference processing unit 26 that calculates a difference from (O) and outputs difference information D = G−G (O), and a state in which a drive current for the LED 12 is controlled based on the difference information D from the difference processing unit 26. And a drive amplifier 27 for driving the LED 12.

Assuming that the sum of the voltage values in the pitching direction (Y direction) at the electric center (O) is A (O) and the sum of the voltage values in the yawing direction (X direction) is B (O), the storage unit 25 The reference value G (O) stored in

[0044]

G (O) = A (O) + B (O)

The value of the reference value G (O) is determined because the linearity at the electric center (O) is not impaired.
It is good as a regular reference value. The LED 12 is driven such that the total voltage value G at an arbitrary spot position matches the reference value G (O), which is the normal reference value.

Next, the operation of the image blur correction apparatus according to the second embodiment configured as described above will be described.

When the power of the image blur correction device is turned on, the state of the two-dimensional PSD 14 is at the electric center (O), but the arithmetic unit 24 calculates the sum A () of the voltage values at this electric center (O). O) and the sum of the voltage values B (O) are added according to the above equation (Equation 3) to obtain a reference value G (O) = A (O) +
B (O) is calculated, and the storage unit 25 stores the reference value G (O).

Then, in the actual operation of the image blur correction apparatus, the arithmetic unit 24 inputs the sum A of the voltage values and the sum B of the voltage values at an arbitrary spot position,

[0049]

## EQU00004 ## The sum of the voltage values G is calculated by adding according to G = A + B. The difference processing unit 26 calculates a difference between the voltage value sum G from the calculation unit 24 and the reference value G (O) from the storage unit 25 to obtain difference information D = G
-Output G (O). The drive amplifier 27 controls a drive current for the LED 12 based on the difference information D.

As described above, the total received light amount, that is, the total voltage value G at an arbitrary spot position in the pitching direction (Y direction) and yawing direction (X direction) of the two-dimensional PSD 14 is used as a reference value G (O). LE to match
By driving the D12, the pitching direction (Y direction) and the yawing direction (X direction) of the two-dimensional PSD 14 are performed.
Can be minimized. As a result, the position detection accuracy of the differential amplifier units 22y and 22x is extremely good, and a highly accurate shift unit 17 can be realized.

As described above, according to the second embodiment, 2
In a two-dimensional driving device and an image blur correction device using the same, a two-dimensional PSD (two-dimensional position detecting device) is used as a position detecting device of a mechanism for moving a moving object in a two-dimensional direction. As the position detecting means including the light-emitting element and the light-emitting element, the number of parts can be reduced from two in the prior art to one, so that the number of components can be reduced and the image blur correction device can be downsized.

Further, by improving the control method using a simple configuration, the pitching direction (Y direction) and the yawing direction (X direction) in a two-dimensional PSD can be improved due to manufacturing tolerances.
Direction), the position detection accuracy of the two-dimensional PSD can be made high in both the pitching direction and the yawing direction.

Third Embodiment Next, a third embodiment of the present invention will be described with reference to FIGS. FIG.
1 is a block circuit diagram illustrating an example of an arithmetic circuit for calculating and outputting a two-dimensional position based on a light output current value output from a two-dimensional PSD in a third embodiment. The components described so far are denoted by the same reference numerals, and description thereof is omitted. The shift unit 17 according to the third embodiment is the same as that described in the first embodiment.

Regarding the photocurrent output of the two-dimensional PSD 14, the sum (Iy1 + Iy2) of the photocurrent outputs in the pitching direction (Y direction) and the sum (Ix1 + Ix2) of the photocurrent outputs in the yawing direction (X direction) are equal to each other. Is ideal, but may not be the same due to the influence of the manufacturing tolerance of the two-dimensional PSD 14 or the like. In the direction in which the sum of the photocurrent outputs is small, the position is more susceptible to disturbance and the like than in the direction in which the sum of the photocurrent outputs is large.

Therefore, in the third embodiment, the effect of the variation of the element is minimized, and a high-precision position detection accuracy is realized in both the pitching direction and the yawing direction.

In the case of FIG. 8B, the sum (Ix1 + Iy2) of the photocurrent outputs in the pitching direction (Y direction) is equal to the sum (Ix) of the photocurrent outputs in the yawing direction (X direction).
1 + Ix2) is smaller. In this case, the sum A = Vy1 + Vy2 of the voltage values output from the addition amplifier unit 23y in the pitching direction (Y direction) is the sum of the voltage values output from the addition amplifier unit 23x in the yawing direction (X direction). B = Vx1 + Vx2 is smaller. It is assumed that such characteristics are known in advance at the stage of manufacturing the two-dimensional PSD 14.

In such a case, the sums A (O) and B (O) of the voltage values at the electric center (O), which always appear when the power is turned on in a test or the like at the time of manufacturing, are obtained. Assuming that the ratio between the two is a correction coefficient k _B ,

[0058]

## EQU5 ## It is determined in advance by k _B = A (O) / B (O). Since A (O)> B (O), k _B > 1. The value of the correction coefficient k _B are the known value in the process of manufacturing the two-dimensional PSD 14, stored in the storage unit 25 the value of the correction coefficient k _B as a default value.

The calculating section 24 is arranged in a pitching direction (Y direction).
, And the sum B of the voltage values output from the addition amplifier unit 23x in the yawing direction (X direction) and the sum A of the voltage values output from the addition amplifier unit 23x in the yawing direction (X direction). The sum B is multiplied by a correction coefficient k _B and converted to B ′ = k _B · B
And then

[0060]

[Mathematical formula-see original document] The operation of G = A + B 'is executed.

Next, the operation of the image blur correction apparatus shown in FIG. 11 according to the third embodiment configured as described above will be described.

When the power of the image blur correction device is turned on, the state of the two-dimensional PSD 14 is at the electric center (O), but the arithmetic unit 24 calculates the sum A of the voltage values at this electric center (O). (O) and the sum of the voltage values B (O) are input, and for the sum of the voltage values B (O),

[0063]

After converting B ′ (O) ← k _B · B (O),

[0064]

[Mathematical formula-see original document] The operation of G (O) = A (O) + B '(O) is executed. The storage unit 25 stores the reference value G (O)
Is stored.

Then, in the actual operation of the image blur correction apparatus, the arithmetic unit 24 inputs the sum A of the voltage values and the sum B of the voltage values at an arbitrary spot position.

[0066]

After performing the conversion of B ′ ← k _B · B,

[0067]

[Mathematical formula-see original document] The operation of G = A + B 'is executed. The rest is the same as in the second embodiment. That is, the difference processing unit 26 calculates a difference between the voltage value sum G from the calculation unit 24 and the reference value G (O) from the storage unit 25, and outputs difference information D = G−G (O).
The drive amplifier unit 27 controls the LED 12 based on the difference information D.
To control the driving current.

When the above equations (Equation 9) and (Equation 10) are summarized,

[0069]

G = A + k _B · B Furthermore, referring to (Equation 5),

[0070]

(Equation 12)

That is to say. In this equation (Equation 12), if A = A (O) and B = B (O) are substituted,

[0072]

G = 2 × A (O) = G (O), and the total voltage value G at an arbitrary spot position is always the sum A of the voltage values at the larger electric center (O).
With reference to (O), it is inevitably kept fixed at twice that value.

As described above, the yawing direction (X direction)
When the sensitivity of the two-dimensional PSD 14 becomes lower than the predetermined value,
There when it is manufactured, in actual operation, it is the correction is performed in k _B times (> 1) is multiplied by the correction coefficient k _B with respect to the sum of the voltage values B. By driving the LED 12 after performing such correction, the amount of feedback of the light amount can be increased particularly in the yawing direction (X direction) where the photocurrent output is small. As a result, the photocurrent output can be increased. Since the influence of disturbance on the element in the small yawing direction (X direction) can be minimized, the position detection accuracy of the differential amplifier units 22y and 22x is extremely good, and the highly accurate shift unit 1
7 can be realized.

In the above description, the yawing direction (X direction)
Is lower than the pitching direction (Y direction). On the contrary, the sensitivity in the pitching direction (Y direction) may be lower than the yawing direction (X direction). , As follows:

That is, the sum B = Vx1 of the voltage values output from the addition amplifier section 23x in the yawing direction (X direction).
+ Vx2, the sum of the voltage values output from the addition amplifier unit 23y in the pitching direction (Y direction) A = Vy1 + V
The fact that y2 is smaller means that the two-dimensional PS
It is assumed that it is known in advance at the stage of manufacturing D14.

In this case, the sum A (O) and B (O) of the voltage values at the electric center (O) are obtained, and the ratio between them is used as a correction coefficient k _A ,

[0077]

[Formula 14] k _A = B (O) / A (O) Since B (O)> A (O), k _A > 1. The value of the correction coefficient k _A are the known value in the process of manufacturing the two-dimensional PSD 14, stored in the storage unit 25 the value of the correction coefficient k _A as a default value.

The operation unit 24 is provided in the pitching direction (Y direction).
, And the sum B of the voltage values output from the addition amplifier unit 23x in the yawing direction (X direction) and the sum A of the voltage values output from the addition amplifier unit 23x in the yawing direction (X direction). The sum A is multiplied by a correction coefficient k _A and converted to A ′ = k _A · A
After converting,

[0079]

## EQU15 ## The operation of G = A '+ B is executed.

The operation based on the correction coefficient k _A will now be described.

When the power of the image blur correction device is turned on, the state of the two-dimensional PSD 14 is at the electric center (O), but the arithmetic unit 24 calculates the sum A of the voltage values at this electric center (O). (O) and the sum of the voltage values B (O) are input, and for the sum of the voltage values A (O),

[0082]

After converting A ′ (O) ← k _A · A (O),

[0083]

[Mathematical formula-see original document] The operation of G (O) = A '(O) + B (O) is executed. The storage unit 25 stores the reference value G (O)
Is stored.

In the actual operation of the image blur correction device, the arithmetic unit 24 inputs the sum A of the voltage values and the sum B of the voltage values at an arbitrary spot position.

[0085]

After performing the conversion of A ′ ← k _A · A,

[0086]

[Mathematical formula-see original document] The operation of G = A '+ B is performed. The rest is the same as in the second embodiment. That is, the difference processing unit 26 calculates a difference between the voltage value sum G from the calculation unit 24 and the reference value G (O) from the storage unit 25, and outputs difference information D = G−G (O).
The drive amplifier unit 27 controls the LED 12 based on the difference information D.
To control the driving current.

The above equations (Equation 18) and (Equation 19) are summarized as follows.

[0088]

G = k _A · A + B Furthermore, referring to (Equation 14),

[0089]

(Equation 21)

That is to say. In this equation (Equation 21), if A = A (O) and B = B (O) are substituted,

[0091]

G = 2 × B (O) = G (O), and the total voltage value G at an arbitrary spot position is always the sum B of the voltage values at the larger electric center (O).
With reference to (O), it is inevitably kept fixed at twice that value.

As described above, the pitching direction (Y direction)
When the sensitivity of the two-dimensional PSD 14 becomes lower than the predetermined value,
Is manufactured, the correction _A is multiplied by k _A (> 1) by multiplying the sum A of the voltage values by the correction coefficient k _A in the actual operation. By driving the LED 12 after performing such a correction, the amount of feedback of the light amount can be increased particularly in the pitching direction (Y direction) where the photocurrent output is small. As a result, the photocurrent output can be increased. Since the influence of disturbance on the element in a small pitching direction (Y direction) can be minimized, the position detection accuracy of the differential amplifier units 22y and 22x is extremely good, and the highly accurate shift unit 1
7 can be realized.

As described above, according to the third embodiment, 2
In a two-dimensional driving device and an image blur correction device using the same, a two-dimensional PSD (two-dimensional position detecting device) is used as a position detecting device of a mechanism for moving a moving object in a two-dimensional direction. As the position detecting means including the light-emitting element and the light-emitting element, the number of parts can be reduced from two in the prior art to one, so that the number of components can be reduced and the image blur correction device can be downsized.

Further, by improving the control method using a simple configuration, the pitching direction (Y direction) and the yawing direction (X direction) in the two-dimensional PSD can be reduced due to manufacturing tolerances.
Direction), the position detection accuracy of the two-dimensional PSD can be made high in both the pitching direction and the yawing direction.

(Fourth Embodiment) Next, a fourth embodiment of the present invention will be described with reference to FIGS. FIG. 12 is a diagram showing a state of LED mounting variation and slit processing variation, FIG. 13 is a conceptual diagram of an LED spot shape on a two-dimensional PSD element due to LED mounting variation and slit processing variation, and FIG. Dimension P
FIG. 3 is a block circuit diagram illustrating an example of an arithmetic circuit for calculating and outputting a two-dimensional position based on a light output current value output from an SD. The components described so far are denoted by the same reference numerals, and description thereof is omitted. The shift unit 17 according to the fourth embodiment is the same as that described in the first embodiment.

The photocurrent output of the two-dimensional PSD 14 is easily affected by the relative positional relationship with the LED 12 as the light emitting element or the processing accuracy of the slit 13, and the sum (Iy1 + Iy2) of the photocurrent outputs in the pitching direction (Y direction). And the sum of the photocurrent outputs in the yawing direction (X direction) (Ix1 +
Ix2) is unlikely to be equal to each other. Specifically, the inclination of the LED 12 with respect to the two-dimensional PSD 14 as shown in FIG. 12A and the inclination of the slit 13 as shown in FIG.
And in the direction where the sum of the photocurrent outputs is small,
Since it is more susceptible to disturbances and the like than in a large direction, there is a problem that the position detection accuracy is deteriorated.

Therefore, in the fourth embodiment, the influence of the mounting and processing accuracy variations is minimized.
It is intended to realize highly accurate position detection accuracy in both the pitching direction and the yawing direction.

As shown in FIG. 13, the spot light has a substantially elliptical shape, its major axis extends along the yawing direction (X direction), and the amount of light per unit area in the yawing direction (X direction). As a result, the yawing direction (X direction) with respect to the pitching direction (Y direction)
A case in which the sum of the photocurrent outputs of the above becomes small will be described.

If the sum (Ix1 + Ix2) of the photocurrent outputs in the yawing direction (X direction) is smaller than the sum (Iy1 + Iy2) of the photocurrent outputs in the pitching direction (Y direction), the pitching direction (Y Sum) of the voltage values output from the addition amplifier unit 23y in the direction A) = Vy1 + Vy
With respect to 2, the sum B = Vx1 + Vx2 of the voltage values output from the addition amplifier unit 23x in the yawing direction (X direction) is smaller. That is, A> B.

The comparison / determination section 28 calculates the sum A of the voltage values output from the addition amplifier section 23y in the pitching direction (Y direction).
And the sum B of the voltage values output from the addition amplifier unit 23x in the yawing direction (X direction). When A> B, “00” is output as the determination result E. When A <B, Outputs “01” as the determination result E, and outputs “10” as the determination result E when A = B.

When “00” (that is, A> B) is input as the determination result E, the correction coefficient generation unit 29 sets the correction coefficients k _A and k _B as

[0102]

[Formula 23] k _A = 1 k _B = A / B is generated, and “01” (that is, A <B) is determined as the determination result E.
Is input as the correction coefficients k _A and k _B.

[0103]

[Formula 24] k _A = B / A k _B = 1 is generated, and “10” (that is, A = B) is determined as the determination result E.
Is input as the correction coefficients k _A and k _B.

[0104]

[Formula 25] k _A = 1 and k _B = 1 are generated and sent to the calculation unit 24 and the storage unit 25, respectively. The storage unit 25 stores the input correction coefficients k _A and k _B.

The calculation unit 24 is provided in the pitching direction (Y direction).
, And the sum B of the voltage values output from the addition amplifier unit 23x in the yawing direction (X direction), and the correction coefficient from the storage unit 25. read k _A and k _B ,

[0106]

After converting A ′ ← k _A · A B ′ ← k _B · B,

[0107]

## EQU27 ## The operation of G = A '+ B' is executed.

To summarize,

[0109]

G = k _A · A + k _B · B

The fourth embodiment includes the above-described comparison / determination unit 28, correction coefficient generation unit 29, operation unit 24, storage unit 25, and difference processing unit 26.

Next, the operation of the image blur correction apparatus of the fourth embodiment configured as described above and shown in FIG. 14 will be described.

When the power of the image blur correction device is turned on, the state of the two-dimensional PSD 14 is at the electric center (O), but the comparison / determination unit 28 determines the sum of the voltage values at the electric center (O). A (O) and the sum of the voltage values B (O) are input, and the determination result E is sent to the correction coefficient generator 29 according to the above conditions. That is, when A (O)> B (O), E = “00” When A (O) <B (O), E = “01” When A (O) = B (O), E = "10" is output.

When “00” (that is, A (O)> B (O)) is input as the determination result E, the correction coefficient generation unit 29 sets the correction coefficients k _A and k _B as

[0114]

K _A = 1 k _B = A (O) / B (O) is generated, and “01” (that is, A (O)
<B (O)), the correction coefficients k _A and k _B are

[0115]

K _A = B (O) / A (O) k _B = 1, and “10” (that is, A (O)
= B (O)) as correction coefficients k _A and k _B

[0116]

[Formula 31] k _A = 1 and k _B = 1 are generated and sent to the calculation unit 24 and the storage unit 25, respectively. The storage unit 25 stores the input correction coefficients k _A and k _B. In any case, k _A ≧ 1 and k _B ≧ 1.

The arithmetic unit 24 inputs the sum A (O) of the voltage values at the electric center (O) and the sum B (O) of the voltage values, and

[0118]

A ′ (O) ← k _A · A (O) B ′ (O) ← k _B · B (O)

[0119]

The operation of G (O) = A '(O) + B' (O) is executed. The storage unit 25 stores the reference value G (O)
Is stored.

In the actual operation of the image blur correction apparatus, the arithmetic unit 24 inputs the sum A of the voltage values and the sum B of the voltage values, and reads the correction coefficients k _A and k _B from the storage unit 25. In addition, for each of the sums A and B of the voltage values

[0121]

After converting A ′ ← k _A · A B ′ ← k _B · B,

[0122]

[Mathematical formula-see original document] The operation of G = A '+ B' is executed. The rest is the same as in the second embodiment. That is, the difference processing unit 26 calculates a difference between the voltage value sum G from the calculation unit 24 and the reference value G (O) from the storage unit 25, and outputs difference information D = G−G (O).
The drive amplifier unit 27 controls the LED 12 based on the difference information D.
To control the driving current.

As described above, after the sums A and B of the voltage values are corrected based on the correction coefficients k _A and k _B , LE
By driving the D12, it is possible to increase the amount of feedback of the light amount, particularly in the direction where the photocurrent output is small. As a result, the photocurrent in the two-dimensional PSD 14 caused by the mounting error of the LED 12, the processing error of the slit 13, etc. Since it is possible to minimize the influence of disturbance on the element in the direction in which the output is small, the position detection accuracy of the differential amplifier units 22y and 22x is extremely good, and a highly accurate shift unit 17 can be realized. Can be.

As described above, according to the fourth embodiment, 2
In a two-dimensional driving device and an image blur correction device using the same, a two-dimensional PSD (two-dimensional position detecting device) is used as a position detecting device of a mechanism for moving a moving object in a two-dimensional direction. As the position detecting means including the light-emitting element and the light-emitting element, the number of parts can be reduced from two in the prior art to one, so that the number of components can be reduced and the image blur correction device can be downsized.

Further, by improving the control method using a simple configuration, even if there is an output difference due to variations in LED mounting accuracy, slit processing accuracy, etc., both the pitching direction and the yawing direction can be improved. The position detection accuracy of the dimensional PSD can be made high.

(Fifth Embodiment) Next, a fifth embodiment of the present invention will be described with reference to FIGS. FIG. 15 is a diagram showing the relationship between the position on the two-dimensional PSD, the offset amount, and the photocurrent output value. FIG. 16 is for calculating and outputting the two-dimensional position based on the light output current value output from the two-dimensional PSD. FIG. 3 is a block circuit diagram illustrating an example of an arithmetic circuit of FIG. The components described so far are denoted by the same reference numerals, and description thereof is omitted. The shift unit 17 according to the fifth embodiment is the same as that described in the first embodiment.

As for the position detection accuracy of the two-dimensional PSD 14, the highest detection accuracy can be obtained when measurement is performed in a fixed detection range around the electric center (O). However, in the shift unit 17, the two-dimensional PSD 14 is attached to the PSD board 15 as shown in FIG.
Further, since the mounting error occurs when the PSD substrate 15 is mounted on the fixed frame 10, as shown in FIG. 15, the operating range of the image blur correction lens group 1 on which the two-dimensional PSD 14 is mounted and the LED 12 is mounted. Since it does not always coincide with the center, a certain offset amount occurs. If the offset amount is large, one side on the two-dimensional PSD is detected at a position further away from the electric center, so that the photocurrent output decreases and the position detection accuracy deteriorates. There's a problem.

Therefore, in the fifth embodiment, it is intended to minimize the influence of the offset amount and realize a highly accurate position detection accuracy.

FIG. 15 shows the offset in the yawing direction (X direction). The offset amount is D. The offset amount D is the difference d of the photocurrent output at that point.
= (Ix1-Ix2). The difference d of the photocurrent output can be obtained from the differential amplifier unit 22x. As the offset amount D increases, the sum of the photocurrent outputs (Ix
1 + Ix2) tends to decrease. That is, the offset amount D is inversely proportional to the sum of the photocurrent outputs.

Then, when considering the correction coefficient h _B ,

[0131]

It is assumed that h _B = d / D. When _B is close to the electric center (O) and D is close to zero, h _B ≒ 1. Therefore, when D = 0, h _B =
Determined as 1. Generally, h _B ≧ 1.

Similarly, considering the offset amount C in the pitching direction (Y direction), although not shown,
The offset amount C is determined by the difference c = (I
y1-Iy2). The difference c of this photocurrent output is
It can be obtained from the differential amplifier section 22y. As the offset C increases, the sum of the photocurrent outputs (Iy1 + I
y2) tends to decrease. That is, the offset amount C is inversely proportional to the sum of the photocurrent outputs.
Therefore, when considering the correction coefficient h _A ,

[0133]

It is assumed that h _A = c / C. When D is close to the electrical center (O) and D is close to zero, h _A ≒ 1. Therefore, when C = 0, h _A =
Determined as 1. Generally, h _A ≧ 1.

The comparison / determination section 30 determines the difference M of the voltage value output from the differential amplifier section 22y in the pitching direction (Y direction).
And the voltage difference N output from the differential amplifier unit 22x in the yawing direction (X direction). When M = 0, “00” is output as the determination result F, and when M ≠ 0. In this case, “01” is output as the determination result F, when N = 0, “10” is output as the determination result F, and when N ≠ 0, “11” is output as the determination result F.

When “00” (that is, M = 0) is input as the determination result F, the correction coefficient generation unit 31 sets the correction coefficient h _A to

[0136]

[Formula 38] h _A = 1 is generated, and “01” (that is, M ≠ 0) is determined as the determination result F
When you enter, as a correction coefficient h _A,

[0137]

Generate h _A = α / M. Here, α is a predetermined proportionality constant, and α is obtained by a test in advance.

Further, the correction coefficient generation section 31 determines the determination result F
Is input as “10” (that is, N = 0), as the correction coefficient h _B ,

[0139]

## EQU40 ## h _B = 1 is generated, and the determination result F is “11” (that is, N ≠ 0).
When you enter, as a correction coefficient h _B,

[0140]

[Formula 41] h _B = β / N is generated. Here, β is a predetermined proportionality constant, and β is obtained by a preliminary test.

The correction coefficient h generated by the correction coefficient generator 31
_A and h _B are sent to the calculation unit 24 and the storage unit 25, respectively. Storage unit 25, the correction coefficient h _A, temporarily storing h _B.

The operation unit 24 is provided in the pitching direction (Y direction).
, And the sum B of the voltage values output from the addition amplifier unit 23x in the yawing direction (X direction).

[0143]

After converting A ′ ← h _A · A B ′ ← h _B · B,

[0144]

## EQU43 ## The operation of G = A '+ B' is executed.

To summarize,

[0146]

G = h _A · A + h _B · B

The fifth embodiment includes the above-described comparison / determination unit 30, correction coefficient generation unit 31, operation unit 24, storage unit 25, and difference processing unit 26.

Next, the operation of the image blur correction apparatus of the fifth embodiment configured as described above and shown in FIG. 16 will be described.

When the power of the image blur correction device is turned on, the comparison / determination section 30 sends the determination result F to the correction coefficient generation section 31 in accordance with the above conditions. Correction coefficient generator 3
1 generates the correction coefficients h _A and h _B according to the above conditions, and sends them to the calculation unit 24 and the storage unit 25. Storage unit 25
Stores the input correction coefficients h _A and h _B.

The arithmetic unit 24 inputs the sum A (OS) of the voltage values at power-on and the sum B (OS) of the voltage values.

[0151]

A ′ (OS) ← h _A · A (OS) B ′ (OS) ← h _B · B (OS)

[0152]

G (OS) = A ′ (OS) + B ′ (O
S) is performed. The storage unit 25 stores the reference value G (O
S) is stored.

In the actual operation of the image blur correction apparatus, the arithmetic unit 24 inputs the sum A of the voltage values and the sum B of the voltage values, and reads the correction coefficients h _A and h _B from the storage unit 25. In addition, for each of the sums A and B of the voltage values

[0154]

After converting A ′ ← h _A · A B ′ ← h _B · B,

[0155]

The operation of G = A ′ + B ′ is executed. The rest is the same as in the second embodiment. That is, the difference processing unit 26 calculates a difference between the voltage value sum G from the calculation unit 24 and the reference value G (OS) from the storage unit 25, and outputs difference information D = GG (OS). The drive amplifier 27 is configured to use an LED based on the difference information D
12 is controlled.

As described above, the pitching direction (Y direction)
And offset amounts C and D in the yawing direction (X direction)
That is, the correction coefficients h _A and h _B for the voltage values M and N
By driving the LED 12 after performing the correction based on the above, it is possible to increase the amount of feedback of the light amount in the direction in which the photocurrent output is small due to a large offset amount from the electric center (O) of the two-dimensional PSD 14, As a result, it is possible to minimize the influence of disturbance on the element in the direction in which the photocurrent output is small, which is caused by the mounting error of the two-dimensional PSD 14 and the like. The precision is extremely good, and a highly accurate shift unit 17 can be realized.

As described above, according to the fifth embodiment, 2
In a two-dimensional driving device and an image blur correction device using the same, a two-dimensional PSD (two-dimensional position detecting device) is used as a position detecting device of a mechanism for moving a moving object in a two-dimensional direction. As the position detecting means including the light-emitting element and the light-emitting element, the number of parts can be reduced from two in the prior art to one, so that the number of components can be reduced and the image blur correction device can be downsized.

Further, by improving the control method using a simple configuration, even if there is an output difference due to a variation in the mounting accuracy of a two-dimensional PSD (two-dimensional position detecting element), the pitching direction and yawing can be controlled. In both directions, the position detection accuracy of the two-dimensional PSD can be improved.

In each of the above embodiments, the LED 12 of the LED 12 and the two-dimensional PSD 14 constituting the position detecting means is attached to the pitching movement frame 2, but the two-dimensional PSD 14 is moved by the pitching movement. It may be configured to be attached to the frame 2. Therefore, in the description of the claims, "two-dimensional position detecting element" may be replaced with "light emitting element" as necessary.

[0160]

According to the present invention, in the two-dimensional driving device for moving the moving frame in the two-dimensional direction, the two-dimensional position detecting element is employed as the position detecting element.
The number of parts can be reduced and the size of the device can be reduced.
Further, the number of light emitting elements and the first and second coils connected to the wiring in the moving frame can be reduced, and the efficiency of production work can be increased. In particular, when the wiring is a flexible printed cable, the rigidity is reduced and the flexibility is increased as the number of patterns is reduced, so that the influence of the actuator on the control characteristics of the moving frame can be reduced. Furthermore, since the calculation for control is performed based on the sum of the detected values of the two-dimensional position detecting element in two directions, the position detecting accuracy can be improved.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view of an image blur correction device according to a first embodiment of the present invention.

FIG. 2 is a perspective view of a main part of a flexible printed cable connecting portion according to the first embodiment.

FIG. 3 is a diagram schematically showing an element of a two-dimensional PSD according to the first embodiment.

FIG. 4 is a block circuit diagram illustrating an example of an arithmetic circuit for calculating and outputting a two-dimensional position based on a light output current value output from the two-dimensional PSD according to the first embodiment;

FIG. 5 is a block diagram of an image blur correction circuit according to the first embodiment.

FIG. 6 is a diagram showing a relationship between a position on a two-dimensional PSD and an ideal photocurrent output value.

FIG. 7 is a diagram showing a relationship between a position on a two-dimensional PSD and an ideal position output.

FIG. 8 is a diagram showing a relationship between a position on a two-dimensional PSD and a variation in a photocurrent output value.

FIG. 9 is a diagram showing a relationship between a position on a two-dimensional PSD and a position output when accuracy is deteriorated.

FIG. 10 shows a two-dimensional PS according to Embodiment 2 of the present invention.
FIG. 3 is a block circuit diagram showing an example of an arithmetic circuit for calculating and outputting a two-dimensional position based on a light output current value output from D;

FIG. 11 shows a two-dimensional PS according to Embodiment 3 of the present invention.
FIG. 3 is a block circuit diagram showing an example of an arithmetic circuit for calculating and outputting a two-dimensional position based on a light output current value output from D;

FIG. 12 is a diagram showing a state of LED mounting variation and slit processing variation.

FIG. 13 is a conceptual diagram of an LED spot shape on a two-dimensional PSD element due to a variation in LED mounting and a variation in slit processing.

FIG. 14 shows a two-dimensional PS according to Embodiment 4 of the present invention.
FIG. 3 is a block circuit diagram showing an example of an arithmetic circuit for calculating and outputting a two-dimensional position based on a light output current value output from D;

FIG. 15 is a diagram showing a relationship among a position on a two-dimensional PSD, an offset amount, and a photocurrent output value.

FIG. 16 shows a two-dimensional PS according to Embodiment 5 of the present invention.
FIG. 3 is a block circuit diagram showing an example of an arithmetic circuit for calculating and outputting a two-dimensional position based on a light output current value output from D;

FIG. 17 is an exploded perspective view showing an example of a conventional image blur correction device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Image blur correction lens group 2 ... Pitching movement frame 4 ... Yawing movement frame 6y, 6x ... Shift electromagnetic actuator 7y ... First coil 7x ... Second coil 10 ... Fixed frame 11 ... Position detector 12 ... Light emitting element (LED) 13 Slit 14 Two-dimensional position detecting element (two-dimensional PSD) 15 PSD board 16 Flexible printed cable 16 a to 16 c Land part 17 Shift unit 20x, 20y IV conversion amplifier 21x, 21y ... I / V conversion amplifier 22x, 22y ... Differential amplifier unit 23x, 23y ... Addition amplifier unit 24 ... Calculation unit 25 ... Storage unit 26 ... Difference processing unit 27 ... Drive amplifier unit 28 ... Comparison judgment unit 29 ... Correction coefficient generation Unit 30: Comparison judgment unit 31: Correction coefficient generation unit

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor ▲ Hiroshi Takahashi 1006 Kadoma, Kadoma, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. In-house F term (reference) 5C022 AA11 AB46 AB55 AC42 AC70 AC74 AC78

Claims (7)

[Claims] 1. A moving object movable in first and second directions, and a first object driving the moving object in the first direction.
Driving means, a second driving means for driving the moving object in the second direction, and an incident point of light from the light emitting element to the position detecting element in the first and second directions of the moving object. Position detecting means for detecting the position of
The first and second positions are set such that the positions in the first and second directions detected by the position detecting means are the predetermined positions.
A two-dimensional driving device configured to control the first and second driving means, wherein the first and second driving means use a two-dimensional position detecting element as the position detecting element. A two-dimensional driving device, wherein a second coil and the light emitting element are connected to a wiring arranged on the moving object. 2. The method according to claim 1, wherein the wiring is a flexible printed cable, and a connection portion between the first and second coils and the light emitting element with respect to the flexible printed cable is arranged on the same surface side of the moving object. The two-dimensional drive device according to claim 1, wherein 3. A moving object that is movable in first and second directions, and a first object that drives the moving object in the first direction.
Driving means, a second driving means for driving the moving object in the second direction, and an incident point of light from the light emitting element to the position detecting element in the first and second directions of the moving object. Position detecting means for detecting the position of
The first and second positions are set such that the positions in the first and second directions detected by the position detecting means are the predetermined positions.
A two-dimensional driving device configured to control the driving means of the above, wherein a two-dimensional position detecting element is used as the position detecting element, and the two-dimensional position detecting element in the first direction is used. A two-dimensional driving device, wherein the driving of the light emitting element is controlled so that the sum of the detected value sum and the detected value sum in the second direction is kept substantially constant. 4. The method according to claim 1, wherein the sum of detection values in the first direction previously obtained for the two-dimensional position detecting element and the second sum of the detection values in the first direction.
4. The method according to claim 3, wherein the calculation for calculating the sum of the detected value sums in the two directions is corrected based on a predetermined relationship between the detected value sums in the two directions. Dimensional drive. 5. A correction coefficient is generated based on a sum of detected values in the first direction and a sum of detected values in the second direction at or near the electric center of the two-dimensional position detecting element,
This correction coefficient is stored, and the result of correcting the calculation of the sum of the detected values in the two directions by the correction coefficient is stored as a reference value, and the sum of the detected values in the first direction at an arbitrary spot position is stored. The detection value sum in the second direction is corrected based on the stored correction coefficient, and the light emitting element is drive-controlled so that the corrected sum approaches the stored reference value. The two-dimensional driving device according to claim 3, wherein the driving is performed. 6. A correction coefficient is generated based on an offset amount of the two-dimensional position detecting element in the first direction and an offset amount in the second direction, and the correction coefficient is stored.
The result obtained by correcting the calculation for obtaining the sum of the detected values in the two directions by this correction coefficient is stored as a reference value, and the sum of the detected values in the first direction at an arbitrary spot position and the value in the second direction are stored. The detection value sum is corrected based on the stored correction coefficient, and the light-emitting element is configured to be drive-controlled so that the corrected total sum approaches the stored reference value. The two-dimensional driving device according to claim 3. 7. The moving object according to claim 1, further comprising an image blur correction lens group attached to the moving object and driving the moving object along two different directions orthogonal to the optical axis. An image blur correction device having a configuration using a two-dimensional drive device.