JP2001116707A - Cassette in which wafer is housed and fluorescent x-ray analyzing apparatus for analyzing wafer housed in cassette - Google Patents

Abstract

PROBLEM TO BE SOLVED: To safely and certainly feed in and out the wafer in a cassette while preventing the trouble such as damage or the like of the wafer in the cassette in which the wafer is housed and a fluorescent X-ray analyzing apparatus for analyzing the wafer housed in the cassette. SOLUTION: In a cassette 22 having a front surface 22a opened in order to take in and out a wafer 1 and having many pairs of grooves 22c housing the wafer 1 one by one formed to the inner surfaces of left and right side walls 22b thereof up and down at a predetermined interval (p), obstacles 2d, 2e preventing the housing of the wafer 1 are provided to the grooves 22c of at least either one of the left and right side walls 22c at least every other groove to house the wafer 1 with a predetermined diameter.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cassette for storing wafers such as semiconductor wafers and an X-ray fluorescence analyzer for analyzing wafers stored in such a cassette.

[0002]

2. Description of the Related Art Conventionally, contamination analysis of a semiconductor wafer has been performed using a so-called fluorescent X-ray analyzer.
Wafer is disk-shaped, 150mm (6 inch), 200mm
(8 inches), 300 mm (12 inches), etc., with a plurality of diameters, each of which has a predetermined standard (SEMI; Semiconductor Equipment and Material) corresponding to the diameter of the wafer.
ials International) in a ready-made (mass-produced) cassette with dimensions and shape. One example of the ready-made cassette 22 is shown in FIG. 6 which is a perspective view seen from the side 22d opposite to the side 22a for loading and unloading wafers.

As shown in a partial front view of FIG. 7, the cassette 22 has a surface 22a (in some cases, this surface is used as an upper surface) for loading and unloading the wafer 1, but in the present application, this cassette 22 is used. The front surface is used as a front surface, hereinafter referred to as a front surface), and a large number of pairs of grooves 22c for accommodating wafers one by one are formed vertically at predetermined intervals p inside left and right side walls 22b. . For example, the cassette 22 for 150 mm has 25 pairs of grooves at 4.76 mm intervals and the wafer 1
The cassette 22 for 200 mm has 25 or 26 pairs of grooves at 6.35 mm intervals to accommodate 25 or 26 wafers 1, and the cassette 22 for 300 mm has grooves at 10 mm intervals. There are 13 or 25 pairs of grooves, and up to 13 or 25 wafers 1 can be stored. As shown in FIG. 6, a handle 22f for carrying is formed on the upper surface 22e with respect to the front surface 22a, the rear surface 22d, and the side wall 22b.

On the other hand, in an X-ray fluorescence analyzer for analyzing the wafers 1 stored in such a cassette 22, a robot hand as a transport means for the wafers 1 in the cassettes 22 mounted on the cassette table one by one. And carry out the analysis on the sample table. Here, since the larger the diameter of the wafer 1 is, the heavier the robot hand that transports the wafer 1 is to form a thicker hand portion or the like in order to increase rigidity. Accordingly, as described above, as the diameter of the wafer 1 increases, the corresponding gap p between the grooves of the cassette 22 in FIG. 7 also increases, so that the hand portion of the robot hand can be inserted between the wafers 1 without interference. I have.

[0005]

However, in a fluorescent X-ray analyzer for analyzing wafers 1 of three different diameters, that is, a cassette 22 of three different sizes,
The robot hand is the heaviest 300
equipped with a wafer 1 of 150 mm, 20 mm
Also used for 0 mm wafer 1. Then, even if the 200 mm wafers 1 stored at 6.35 mm intervals can be carried in and out, the 150 mm wafers 1 stored at 4.76 mm intervals can be loaded and unloaded.
In contrast, the gap between the wafers 1 is too narrow to insert the hand part, and if the user tries to insert it forcibly, it may interfere with the wafer 1 and cause damage or breakage of the wafer 1.

In order to avoid this, the operator carefully pays attention to the cassette 22 for 150 mm, for example, in the groove 22.
It is conceivable to store the wafers 1 every other c, that is, at intervals of 9.52 mm, but mistakes are likely to occur, and this alone is not reliable. The cassette 22 has its purpose,
Although it is manufactured by resin molding from the shape, it is not realistic to manufacture a cassette 22 for 150 mm having a larger storage interval p than a standard product by resin molding, because it requires enormous cost.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and is directed to a cassette for storing wafers and an X-ray fluorescence analyzer for analyzing wafers stored in the cassette.
It is an object of the present invention to provide a cassette which can safely and reliably carry in and out wafers in a cassette while preventing troubles such as damage.

[0008]

According to another aspect of the present invention, there is provided a cassette for storing a wafer having a predetermined diameter, wherein a front surface is opened for taking in and out of the wafer, For a cassette in which a large number of pairs of grooves for accommodating wafers one by one are formed inside the side wall of the cassette at predetermined intervals, at least one of the grooves is formed on at least one of the left and right side walls. There are obstacles to prevent storage.

According to the first aspect of the present invention, for example, an obstacle is provided on the side wall of a conventional cassette which is conventionally used as a standard product for 150 mm and which prevents wafer storage at every other groove. With this simple configuration, a storage interval of 9.52 mm can be secured for a 150 mm wafer,
Even if a robot hand corresponding to a mm wafer is used, it can be easily inserted into the gap between the wafers, so that troubles such as damage can be prevented, and the wafer can be safely loaded and unloaded.

According to a second aspect of the present invention, there is provided an X-ray fluorescence analyzer for analyzing wafers stored in a cassette, wherein the cassette has a recess for discrimination outside the bottom of the cassette. Is a cassette formed with. The X-ray fluorescence spectrometer includes a cassette table on which a cassette is mounted with a projection that engages with the recess.

According to the apparatus of claim 2, first, a cassette having the features of claim 1 is usually used.
The space between the wafers can be secured, and even if a robot hand corresponding to a 300 mm wafer is used, the wafer can be easily inserted into the gap between the wafers, and trouble such as damage can be prevented, and the wafer can be safely loaded and unloaded.

In addition, a commonly used cassette has a recess for discrimination, which is not provided in a ready-made cassette, formed on the outer side of the bottom, and the present apparatus is provided with a cassette table having a projection for engaging with the recess. Therefore, for example, even if the operator erroneously attempts to place a ready-made cassette for 150 mm containing wafers at 4.76 mm intervals on the cassette table, the projections of the cassette table do not engage, so that the cassette cannot be placed normally. As a warning, the operator notices that it must not be placed on the wafer. This prevents the robot hand corresponding to a 300 mm wafer from interfering with the wafer and damaging it, etc. You can enter.

According to a third aspect of the present invention, there is provided an X-ray fluorescence analyzer for analyzing a wafer housed in a cassette, wherein the cassette has a projection for determination on the outside of the bottom of the cassette. It is a cassette in which a part is formed. The X-ray fluorescence analyzer has a cassette table on which a cassette is mounted with a switch recessed corresponding to the convex portion, and a transfer apparatus for transferring a wafer from the cassette mounted on the cassette table. Means for determining whether the transport means can be driven in response to the depression of the switch.

According to the apparatus of claim 3, first, a cassette having the features of claim 1 is usually used.
Can be easily inserted into the gap between the wafers even if a robot hand (transporting means) corresponding to a 300 mm wafer is used, and trouble such as damage can be prevented and the wafer can be safely loaded and unloaded.

In addition, a commonly used cassette has a convex portion for discrimination which is not provided in a ready-made cassette outside the bottom portion. A cassette base having a switch recessed corresponding to the convex portion, Since the present apparatus is provided with a discriminating means for driving the robot hand in response to the depression, for example, the operator mistakenly replaces a ready-made cassette for 150 mm containing wafers at 4.76 mm intervals with a cassette table. Since the switch does not dent even if placed on the robot, the robot hand cannot be driven by the discriminating means, so that the robot hand corresponding to a 300 mm wafer is prevented from interfering with and damaging the wafer, etc. Wafers can be loaded and unloaded.

According to a fourth aspect of the present invention, there is provided an X-ray fluorescence spectrometer, wherein a front surface is first opened for taking in and out of a wafer, and a pair of grooves for accommodating one wafer at a time is provided inside the left and right side walls at predetermined intervals. This is an X-ray fluorescence analyzer for analyzing wafers of a predetermined diameter stored in cassettes formed in a large number of pairs. Then, a cassette table on which the cassette is mounted, detecting means for detecting the wafer, moving means for relatively moving the cassette table and the detecting means in the vertical direction, and moving the wafer from the cassette mounted on the cassette table. Transport means for transporting the image. Furthermore, the moving means is driven, and a reference value deviation detection signal is issued based on a detection signal from the detecting means when a storage interval of wafers in the cassette mounted on the cassette table is smaller than a predetermined reference value. It has a detecting means.

In the apparatus according to the fourth aspect, an off-the-shelf cassette is used. For example, in the case of a cassette for 150 mm, the operator pays attention to use the wafer in every other groove (at intervals of 9.52 mm). Even if the operator erroneously stores wafers at 4.76 mm intervals and mounts them on the cassette table, the storage interval of 4.76 mm causes the robot hand (transfer means) provided in the present apparatus to have a storage interval of 4.76 mm. If the detection value is smaller than a predetermined reference value (for example, 6 mm) which can be easily inserted between the wafers, the detection means issues a reference value deviation detection signal.
Measures can be taken to prevent the robot hand corresponding to the 0 mm wafer from interfering with and damaging the wafer, and the wafer can be safely loaded and unloaded.

According to a fifth aspect of the present invention, there is provided an X-ray fluorescence spectrometer, wherein a front surface is first opened for taking in and out of a wafer, and a pair of grooves for accommodating one wafer at a time is provided inside the left and right side walls at predetermined intervals. This is an X-ray fluorescence analyzer for analyzing wafers of a predetermined diameter stored in cassettes formed in a large number of pairs. Then, a cassette table on which the cassette is mounted, detecting means for detecting the wafer, moving means for relatively moving the cassette table and the detecting means in the vertical direction, and moving the wafer from the cassette mounted on the cassette table. Transport means for transporting the image. Further, when the moving means is driven, a warning is issued when the storage interval of the wafers in the cassette mounted on the cassette table is smaller than a predetermined reference value based on a detection signal from the detecting means, and the transfer is performed. Warning means for disabling the means are provided.

In the apparatus according to the fifth aspect, an off-the-shelf cassette is used. For example, in the case of a cassette for 150 mm, an operator pays attention and uses a wafer in every other groove (at intervals of 9.52 mm). Even if the operator erroneously stores wafers at 4.76 mm intervals and mounts them on the cassette table, the storage interval of 4.76 mm causes the robot hand (transfer means) provided in the present apparatus to have a storage interval of 4.76 mm. If the value is smaller than a predetermined reference value (for example, 6 mm) that can be easily inserted between the wafers, the warning unit issues a warning and disables the driving of the robot hand. Interference and damage can be prevented, and the wafer can be safely loaded and unloaded.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An apparatus according to a first embodiment of the present invention will be described below. This device is 150mm, 200m
As shown in the side view of FIG. 1, a wafer 1 having three diameters of m and 300 mm is analyzed, and a wafer 1 which is a sample placed on a sample stage 5 is supplied from an X-ray source 6 such as an X-ray tube. Irradiating primary X-rays 7 and detecting the intensity of the fluorescent X-rays 8 generated
This is a fluorescent X-ray analyzer for measuring and analyzing in 2. The detecting means 12 includes a spectroscopic element 9 for separating the fluorescent X-rays 8 generated from the wafer 1 and the fluorescent X-rays 1 separated by the spectroscopic element 9.
A detector 11 having a high energy resolution without using the spectroscopic element 9, for example, a SS 11.
D or the like.

The apparatus comprises a cassette table 3 on which the cassettes 2 and 22 containing the wafers 1 are mounted, and a sample table 5 from the cassettes 2 and 22 mounted on the cassette table 3.
The wafer 1 is unloaded to the cassette 2,
And a robot hand 4 as a transfer means for transferring the wafer 1 into the wafer 2. The robot hand 4 has a hand portion 4a at an end thereof formed in an appropriate size and shape so that the heaviest 300 mm wafer 1 can be supported with sufficient rigidity. In any direction in any direction. The sample stage 5 is formed with a cutout portion 5a through which the hand portion 4a can pass so as not to hinder the loading and unloading of the wafer 1.

With such a configuration, the wafers 1 are unloaded one by one from the cassettes 2 and 22 placed on the cassette table 3 by the robot hand 4 and placed on the sample table 5, and the primary After irradiating the X-rays 7 and measuring the intensity of the generated fluorescent X-rays 8 with the detecting means 12, the robot hand 4 repeatedly carries the cassettes 2 and 22 into the original positions (grooves 22c). The analysis can be performed for all the wafers 1 stored in the wafers 2 and 22. Since the sample table 5 is actually in a vacuum vessel, a transfer device as a second transfer means is provided therein, and the robot hand 4
And the cassette table 3 are provided, and the robot hand 4 transfers the wafer 1 between the cassettes 2 and 22 and the transfer device, and the transfer device transfers the wafer 1 between the robot hand 4 and the sample table 5. Is also good.

The hand part 4 of the robot hand 4 of this device
“a” indicates that 3 is stored in the ready-made cassette 22 at an interval of 10 mm.
It can be easily inserted between the 00 mm wafers 1 and the 200 mm wafers 1 stored in the ready-made cassette 22 at 6.35 mm intervals, but the ready-made cassettes 2 can be inserted at 4.76 mm intervals.
The gap between the wafers 1 cannot be inserted into the 150 mm wafer 1 accommodated in the wafer 2 because the gap between the wafers 1 is too small. Therefore, in this apparatus, the 300 mm and 200 mm wafers 1 are stored in the ready-made cassettes 22 for analysis, while the 150 mm wafer 1 is stored in the cassette 2 as described below for analysis.

That is, as shown in the partial front view of FIG. 2, a cassette 2 for storing a wafer 1 having a predetermined diameter, here 150 mm, in which a front surface 22a is opened for taking in and out of the wafer 1, The pair of grooves 22c for accommodating the wafers 1 one by one is formed inside the side wall 22b at a predetermined interval p. Obstacles 2d (hatched in FIG. 2) for preventing storage of the wafer 1 are provided at every other 22c. Further, as shown in the local cross section of FIG. This is a cassette 2 having a concave portion 2f for determination. Note that such a concave portion 2f can be formed by cutting or the like.

As shown in FIG. 2, the obstacle 2d for preventing the wafer 1 from being stored at every other groove 22c is, specifically, a front portion (a pair of left and right grooves 22c at the same height). The vertical side of FIG. 2) is inserted into the groove 22c in the vertical direction.
2d resin pieces that are attached to fill every other pair
The attachment is performed by bonding, screwing from the outside of the side wall 22b, or the like.

Further, instead of such a resin piece 2d,
As shown in the partial front view of FIG. 3, the front portions of the pair of left and right grooves 22c at the same height are attached to the front end surfaces of the left and right side walls 22b (front side in the direction perpendicular to the paper surface of FIG. 3). Resin plates 2e that plug every other pair of grooves 22c in the direction may be attached by bonding or the like. As shown in FIG.
The side wall 22b has a wide front end (toward the front surface 22a) and a wide end face, so that it is easy to attach the resin plate 2e as shown in FIG. The resin piece 2d in FIG. 2 or the resin plate 2e in FIG. 3 may be attached to only one of the left and right side walls 22b of the cassette 2 as long as the storage of the wafer 1 can be sufficiently prevented. Further, the apparatus according to the first embodiment includes a cassette table 3 on which the cassette 2 is mounted with a convex portion 3f which engages with the concave portion 2f of the cassette 2 in FIG. In addition, such a convex part 3f can be formed by bonding or screwing a resin piece or the like.

According to the apparatus of the first embodiment, first, 15
For the 0 mm wafer, the cassette 2 as described above is usually used, so that a storage interval of 9.52 mm can be secured in the 150 mm wafer 1, and even if the robot hand 4 corresponding to the 300 mm wafer 1 is used, the distance between the 150 mm wafers 1 can be secured. The hand portion 4a can be easily inserted into the gap, and trouble such as damage can be prevented, and the wafer 1 can be carried in and out safely. As shown in FIGS. 2 and 3, such a cassette 2 stores the wafer 1 on the side wall 22b of a ready-made cassette 22 (FIG. 7) which is a standard product for 150 mm which has been conventionally used. By providing obstacles 2d and 2e for blocking every other groove 22c, the configuration can be simplified.

Further, as shown in FIG. 1, the cassette 2 normally used for 150 mm is a ready-made cassette 2 on the outside of the bottom.
2 (FIG. 6), the present apparatus is provided with a cassette table 3 in which a convex portion 3f engaging with the concave portion 2f is formed. Even if the ready-made cassette 22 for 150 mm containing the wafers 1 at 4.76 mm intervals is erroneously placed on the cassette table 3, it cannot be normally placed because the projection 3 f of the cassette table 3 does not engage. Is a warning, and the operator is not actually placed on the wafer 1. Therefore, it is possible to prevent the hand portion 4a of the robot hand 4 corresponding to the 300 mm wafer 1 from interfering with and damaging the wafer 1, and to more securely and reliably mount the wafer. 1 can be carried in and out.

Incidentally, since the shape of the unevenness on the outside of the bottom of the ready-made cassette 22 differs depending on the size, that is, the diameter of the wafer 1 to be stored.
With respect to the ready-made cassettes 22 for 0 mm and 300 mm, the positions where the cassettes 22 of each size are placed on the cassette table 3, the positions of the projections 3 f, and Dimensions and shapes can be determined. It is not necessary to share one cassette table 3 for all sizes of cassettes 2 and 22. For example, one cassette table 3 is provided for cassettes 2 and 22 for 150 mm and 200 mm, and cassettes 2 and 22 for 300 mm are provided. May be provided with another cassette table 3.

Next, an apparatus according to a second embodiment of the present invention will be described. Similarly to the apparatus of the first embodiment, this apparatus analyzes wafers 1 having three diameters of 150 mm, 200 mm, and 300 mm, as shown in the side view of FIG.
This is a fluorescent X-ray analyzer that irradiates the primary X-rays 7 to the wafer 1 placed on the sample table 5 to measure and analyze the intensity of the fluorescent X-rays 8 generated. Have. When the hand unit 4a of the robot hand 4 inserts the 150 mm wafers 1 stored in the ready-made cassette 22 at 4.76 mm intervals because the gap between the wafers 1 is too narrow to insert, the 150 mm wafers 1 Is similar to the apparatus of the first embodiment in that it is stored in a cassette 2 provided with the obstacles 2d and 2e (FIGS. 2 and 3) and used for analysis.

However, the cassette 2 normally used for 150 mm in the apparatus of the second embodiment is provided with a discriminating projection 2g, which is not provided in the ready-made cassette 22, outside the bottom as shown in the local cross section of FIG. The cassette table 3 of the apparatus according to the second embodiment has a switch 3g which is recessed corresponding to the projection 2g. The projection 2g of the cassette 2
Can be formed by bonding or screwing a resin piece or the like, and the recess 3h in which the switch 3g is embedded in the cassette table 3 can be formed by cutting or the like. Further, this device is provided with a discriminating means 13 for driving the robot hand 4 in response to the depression of the switch 3g.

According to the apparatus of the second embodiment, first, the first
As in the case of the apparatus of the embodiment, the cassette 2 as described above is usually used for a 150 mm wafer.
Even if the robot hand 4 corresponding to the 0 mm wafer 1 is used, the hand portion 4a can be easily inserted into the gap between the 150 mm wafers 1, and trouble such as damage can be prevented, and the wafer 1 can be carried in and out safely.

In addition, the cassette 2 normally used for 150 mm has a convex portion 2g for discrimination which is not provided in the ready-made cassette 22 outside the bottom portion, and a switch 3g which is recessed corresponding to the convex portion 2g is provided. Since the present apparatus is equipped with the cassette table 3 and the discriminating means 13 for driving the robot hand 4 in response to the depression of the switch 3g, for example, the operator erroneously sets the wafer 1 at an interval of 4.76 mm. The switch 3g is not recessed even when the ready-made cassette 22 for 150 mm containing
Does not allow the robot hand 4 to be driven,
It is possible to prevent the robot hand 4 corresponding to the 00 mm wafer 1 from interfering with and damaging the wafer 1, and to carry the wafer 1 in and out more safely and reliably.

Incidentally, the shape of the unevenness on the outside of the bottom of the ready-made cassette 22 differs depending on the size, that is, the diameter of the wafer 1 to be stored.
Regarding the ready-made cassettes 22 for 0 mm and 300 mm, the robot hand 4
Are set on the cassette table 3 so that the cassettes 22 can be driven.
A size discriminating means which does not function the discriminating means 13 can be provided for the 200 mm and 300 mm discs by discriminating the size of 22. Further, as described above, a plurality of cassette tables 3 can be provided according to the size of the cassette 1.

Next, an apparatus according to a third embodiment of the present invention will be described. This apparatus also analyzes wafers 1 having three diameters of 150 mm, 200 mm, and 300 mm in the same manner as the apparatuses of the first and second embodiments, and as shown in the side view of FIG. This is a fluorescent X-ray analyzer that measures and analyzes the intensity of fluorescent X-rays 8 generated by irradiating the placed wafer 1 with primary X-rays 7 and includes a cassette table 3 and a robot hand 4. The hand section 4a of the robot hand 4
15 stored in the ready-made cassette 22 at an interval of 4.76 mm
The point that the gap between the wafers 1 is too small to be inserted into the wafer 1 of 0 mm is the same as in the apparatuses of the first and second embodiments, but in the apparatus of the third embodiment, The cassette 2 having the obstacles 2d and 2e (FIGS. 2 and 3) provided on the side wall 22b is not used.
Use only

The apparatus comprises a detecting means 14 for detecting the wafer 1, a moving means 15 for moving the cassette table 3 and the detecting means 14 relatively vertically, and further driving the moving means 15. When the storage interval q of the wafer 1 in the cassette 22 mounted on the cassette table 3 is smaller than a predetermined reference value based on the detection signal from the detection means 14, a warning is issued and the robot hand 4 is disabled. The warning means 16 is provided. In particular,
The detection unit 14 is, for example, a transmission laser sensor,
A light emitting device 14a and a light receiving device 14b are disposed so as to face each other with the cassette 22 placed on the cassette table 3 interposed therebetween, and the laser light that has exited from the light emitting device 14a and has reached the light receiving device 14b is changed by the wafer 1. The wafer 1 is detected by being shut off. The warning means 16 is provided by the moving means 15.
Detecting means for generating a reference value deviation detection signal when the storage interval q of the wafer 1 in the cassette 22 mounted on the cassette table 3 is smaller than a predetermined reference value based on the detection signal from the detection means 14 Is a kind of

The moving means 15 comprises a pulse motor and a slide mechanism or the like connected to the rotation shaft thereof and supporting the light emitting device 14a and the light receiving device 14b.
4b is moved up and down while maintaining 4b at the same height. In addition,
The moving means 15 may move the cassette table 3 on which the cassette 22 is mounted with respect to the fixed detecting means 14 up and down.

The warning means 16 drives the moving means 15 to move the detecting means 14 downward, for example, from a height near the upper end of the cassette 22, and places the detecting means 14 on the cassette table 3 based on a detection signal from the detecting means 14. When the storage interval q of the wafers 1 in the placed cassette 22 is smaller than a predetermined reference value, for example, 6 mm, the display unit 16a such as a CRT displays the hand unit 4a of the robot hand 4 because the gap between the wafers 1 is too narrow. A warning that insertion is impossible is displayed, and the robot hand 4 is disabled.

Here, the predetermined reference value can be determined as a storage interval of the wafer 1 such that the hand portion 4a of the robot hand 4 can be easily inserted between the wafers 1. The display means 16a can also be used for displaying analysis results and the like. The warning by the warning means 16 may be by voice or the like. Further, based on a detection signal from the detecting means 14, so-called mapping for determining at which height (position) the wafer 1 is stored in the cassette 22 is performed, or the size of the cassette 22, ie, the size of the stored wafer 1 is determined. The diameter can also be determined (Japanese Patent Application No. Hei 10
-266314).

In the apparatus according to the third embodiment, an off-the-shelf cassette 22 is used. For the cassette 22 for 150 mm, the operator pays attention to every other groove 22c (FIG. 7), that is, the wafer 1 at intervals of 9.52 mm. However, even if the operator erroneously stores the wafers 1 at 4.76 mm intervals and places them on the cassette table 3, the robot hand 4 provided in the present apparatus has a storage interval of 4.76 mm. If the hand unit 4a is smaller than a predetermined reference value (6 mm) at which the robot hand 4 can be easily inserted between the wafers 1, the warning unit 16 issues a warning and disables the robot hand 4 from driving.
The robot hand 4 corresponding to the wafer 1 can prevent the wafer 1 from interfering with and damaging the wafer 1, and the wafer 1 can be safely loaded and unloaded.

In the apparatus of the first to third embodiments, the hand unit 4a of the robot hand 4 shown in FIG.
300mm stored in ready-made cassette 22 at 10mm intervals
And between the 200 mm wafers 1 stored in the ready-made cassette 22 at 6.35 mm intervals, it is assumed that the broken pieces of the standard sample wafer can be inserted into another wafer 1. When a wafer 1 thicker than a normal wafer 1 is to be stored in the cassettes 2 and 22 for analysis, such as by sticking and continuing to use as a standard sample, 300 mm
Also, when using a ready-made cassette 22 for use with a wafer or 200 mm, the gap between the wafers 1 is too narrow to insert the hand portion 4a, so that the wafer 1 may be damaged.

In such a case, a cassette 2 provided with obstacles 2d and 2e (FIGS. 2 and 3) for 300 mm and 200 mm is used for the apparatus of the first and second embodiments. The distance between the obstacles 2d and 2e (FIGS. 2 and 3) can be set appropriately. Also, such 30
Ready-made cassettes 2 for cassettes 2 for 0 mm and 200 mm
2, a concave portion 2f and a convex portion 2g (FIG. 4) for discrimination can be formed, and the cassette table 3 or the like corresponding to the concave portion or the convex portion (FIG. 4) can be provided in the apparatus. In the device according to the third embodiment, this can be dealt with by setting the predetermined reference value larger in the warning means 16 of FIG.

[0043]

As described above in detail, according to the present invention, in a cassette in which wafers are stored or in an X-ray fluorescence analyzer for analyzing wafers stored in a cassette, wafers in the cassettes are damaged. Can be carried in and out safely and securely.

[Brief description of the drawings]

FIG. 1 is a side view of an X-ray fluorescence analyzer according to a first embodiment of the present invention.

FIG. 2 is a partial front view of an example of a cassette that stores wafers to be analyzed by the apparatus.

FIG. 3 is a partial front view of another example of a cassette that stores wafers to be analyzed by the apparatus.

FIG. 4 is a side view of an X-ray fluorescence spectrometer according to a second embodiment of the present invention.

FIG. 5 is a side view of an X-ray fluorescence analyzer according to a third embodiment of the present invention.

FIG. 6 is a perspective view of an example of a ready-made cassette as viewed from the rear.

FIG. 7 is a partial front view of the cassette.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Wafer, 2 ... cassette of this invention, 2d, 2e ... Obstacle, 2f ... Cassette recessed part, 2g ... Cassette projected part, 3
... Cassette table, 3f ... Convex part of cassette table, 3g ... Switch, 4 ... Transportation means (robot hand), 13 ... Discrimination means, 14 ... Detection means, 15 ... Movement means, 16 ... Warning means, 22 ... Pre-made cassette , 22a ... front of the cassette,
22b: side wall of the cassette, 22c: groove, p: predetermined interval, q: predetermined reference value.

 ────────────────────────────────────────────────── ─── Continued on front page F term (reference) 2G001 AA01 BA04 CA01 DA01 DA02 EA01 EA03 GA01 KA01 LA11 MA05 PA01 PA14 PA30 QA02 QA10 5F031 CA02 DA01 EA06 EA20 FA01 FA07 FA11 GA43 JA02 JA05 JA12 LA07 MA33 PA20

Claims (5)

[Claims] 1. A cassette for storing wafers having a predetermined diameter, wherein a front surface is opened for taking in and out of wafers, and a pair of grooves for storing wafers one by one is provided inside left and right side walls. A cassette in which a plurality of pairs of upper and lower cassettes are formed at intervals, and at least one of the right and left side walls is provided with an obstacle for preventing the accommodation of a wafer in at least every other groove. 2. An X-ray fluorescence analyzer for analyzing wafers stored in a cassette, wherein said cassette is a cassette having a discriminating recess formed outside a bottom of said cassette. An X-ray fluorescence spectrometer comprising a cassette table on which a cassette is mounted with a projection that engages with the cassette. 3. An X-ray fluorescence spectrometer for analyzing wafers stored in a cassette, wherein the cassette is a cassette having a discriminating projection formed outside the bottom of the cassette of claim 1. A cassette table on which a cassette is mounted with a switch recessed corresponding to the projection, a transfer means for transferring wafers from the cassette mounted on the cassette table, X-ray fluorescence analyzer comprising: a discriminating means for driving the transport means. 4. A front face is opened for taking in and out of wafers, and a pair of grooves for accommodating wafers one by one are housed inside a cassette formed at upper and lower sides at predetermined intervals inside left and right side walls. An X-ray fluorescence spectrometer for analyzing a wafer having a predetermined diameter, comprising: a cassette table on which a cassette is placed; detection means for detecting a wafer; and moving the cassette table and the detection means relatively vertically. Moving means, conveying means for conveying wafers from a cassette mounted on the cassette table, driving the moving means, and wafers in the cassette mounted on the cassette table based on a detection signal from the detecting means X-ray fluorescence analyzer comprising: a detection unit that issues a reference value deviation detection signal when the storage interval of the reference is smaller than a predetermined reference value. 5. A front face is opened for taking in and out of wafers, and a pair of grooves for accommodating wafers one by one is housed in a cassette formed in a plurality of upper and lower pairs at predetermined intervals inside left and right side walls. An X-ray fluorescence spectrometer for analyzing a wafer having a predetermined diameter, comprising: a cassette table on which a cassette is placed; detection means for detecting a wafer; and moving the cassette table and the detection means relatively vertically. Moving means, conveying means for conveying wafers from a cassette mounted on the cassette table, driving the moving means, and wafers in the cassette mounted on the cassette table based on a detection signal from the detecting means An X-ray fluorescence spectrometer comprising: a warning unit that issues a warning when the storage interval is smaller than a predetermined reference value, and that disables the driving of the transport unit.