JP4414681B2 - Cassette mounting table and apparatus including the cassette mounting table - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a cassette mounting table on which a cassette for storing a plurality of objects to be processed such as semiconductor wafers and wafer frames is mounted, and more particularly to improvement of a conveyance error due to the mounting state of the cassette.
[0002]
[Prior art]
In general, in a wafer processing process (pre-process) for manufacturing a semiconductor device, a plurality of semiconductor wafers (hereinafter referred to as wafers) are stored in a cassette and transferred between the manufacturing processes. This cassette is used in various shapes and materials according to the specifications of the semiconductor manufacturing factory, semiconductor manufacturing equipment, inspection equipment, and the like.
[0003]
Normally, about 25 to 26 wafers are stored in this cassette, and are placed on a cassette mounting table of a semiconductor manufacturing apparatus or inspection apparatus by an automatic transfer system (including a transfer robot) or an operator. Yes.
[0004]
Wafers in the cassette placed on the cassette placing table are taken out one by one by, for example, a carrying arm of a carrying mechanism provided on the apparatus side, and carried to a processing position or an inspection position.
[0005]
When the cassette is mounted on the cassette mounting table, the wafer may protrude or slide out of the cassette when the opening side is directed downward.
[0006]
Further, if the cassette is set on the cassette mounting table with a part of the wafer protruding, and the transfer of the wafer is started, the cassette is not correctly transferred to the transfer arm.
[0007]
In the assembly process in the semiconductor manufacturing process, the back surface of the wafer is ground to reduce the thickness in the grinding process, and then the wafer is formed into chips (dies) in the dicing process. In this dicing process, the wafer thinned as described above is attached to a wafer frame to which a wafer tape is attached, and stored in a dedicated wafer frame cassette (hereinafter referred to as a frame cassette). The wafer frame is used because the thinned wafer is very easily broken, and is used to prevent cracking during transportation.
[0008]
Even in the case of this frame cassette, it is necessary to prevent the wafer frame from protruding or sliding out, but the handling method is slightly different from that of the wafer cassette. That is, this frame cassette accommodates the wafer frame, and is therefore larger and heavier than the wafer cassette. Therefore, when the operator places the frame cassette on the cassette mounting table, the possibility of tilting the frame cassette is higher than that of the wafer cassette.
[0009]
In order to prevent the wafer and the wafer frame from protruding from the carat, for example, a stopper for preventing the wafer frame from protruding and sliding out as disclosed in Patent Document 1 is provided.
[0010]
In this example, the stopper is taken out from the back surface of the frame cassette. However, the stopper can be provided on the front surface of the frame cassette to prevent the wafer frame from protruding or sliding out of the wafer frame when the cassette is transported or placed. In this example, it is set to either the frame protrusion prevention position or the frame opening position by rotation. Among these, the stopper set at the frame protrusion preventing position is in a state of overhanging in the wafer cassette.
[0011]
[Patent Document 1]
JP-A-8-080989
[0012]
[Problems to be solved by the invention]
Since the cassette mounting table side on which the frame cassette is mounted does not have a mechanism for detecting whether the stopper mechanism is set at the frame protrusion prevention position or the frame opening position, confirmation by the operator himself It has become work.
Therefore, if the operator neglects this check work when placing or if the check work is insufficient, the stopper mechanism set at the frame protrusion prevention position remains overhanging in the wafer cassette. It has become. When an operation for starting the transfer operation in this state is performed, the transfer arm is inserted into the cassette to receive the wafer frame in the frame cassette. At this time, the stopper mechanism and the wafer frame held by the transfer arm may collide, causing a serious problem such as moving the frame cassette and damaging the wafer attached to the wafer frame. . Similarly, when the stopper mechanism is in the middle from the frame protrusion prevention position to the frame opening position, it also causes troubles in the transfer of the wafer frame.
[0013]
Further, a guide member (positioning member) is provided on the cassette mounting surface of the cassette mounting table so that the frame cassette is mounted at a correct position. If the frame cassette is not correctly placed according to this guide member, a part of the frame cassette rides on the guide member and is inclined, so that the transfer arm hits the wafer frame or the center position of the wafer frame is greatly displaced. There is a risk of transport errors.
[0014]
Accordingly, the present invention provides a plurality of objects to be processed. The When the cassette to be stored is not properly placed on the cassette placement table, or when the stopper mechanism is not released at the time of placement with respect to a cassette having a stopper mechanism that prevents the object to be processed from protruding or sliding out. It is an object of the present invention to provide a cassette mounting table capable of prohibiting a transport operation and an apparatus including the cassette mounting table.
[0015]
[Means for Solving the Problems]
In order to achieve the above object, according to the present invention, a cassette having a stopper mechanism capable of storing a plurality of objects to be processed, preventing protrusion and sliding out of the objects to be processed, and releasing the cassette; A positioning member for guiding the cassette to be placed at a predetermined position, and a positioning member provided on the placement surface of the cassette, wherein the cassette is placed on the placement surface A cassette detection sensor that outputs a detection signal indicating a contact state between the placement surface and the entire cassette bottom surface, and a control unit that determines the placement state of the cassette based on the detection signal of the cassette detection sensor; An interference member on the mounting surface of the cassette mounting table, the interference member mounting the cassette on the mounting surface in a state in which the stopper mechanism of the cassette prevents the processing body from protruding and slipping out. When placed, the stopper mechanism rides on the interference member and is arranged so that the cassette is not placed at a predetermined position. A cassette mounting table characterized by the above is provided.
[0016]
Second, a cassette mounting table for positioning and mounting a cassette for storing a plurality of objects to be processed and a mounting surface of the cassette, the contact state between the mounting surface and the entire cassette bottom surface A cassette detection sensor that outputs a detection signal indicating, a processing object transport unit that carries in and out the processing object stored in the cassette on which the cassette mounting table is mounted, and the processing object transport unit A processing / inspection unit that receives and processes or inspects the object to be processed; A stopper mechanism for preventing the object to be processed from protruding and sliding out on the cassette, and the cassette stopper mechanism on the mounting surface of the cassette mounting table in which the cassette is placed in a state in which the processing object does not protrude or slide out. An interference member that interferes with the stopper mechanism when placed on a surface; And when the control unit determines that the mounting state of the cassette is inappropriate based on a detection signal from the cassette detection sensor, the control unit performs a transport operation in the workpiece transport unit. An apparatus characterized by prohibiting is provided.
[0017]
In the configuration as described above, according to the first aspect, the wafer frame is prevented from protruding and slipping off by the stopper mechanism set at the frame protrusion preventing position when the cassette is transported. When the wafer frame is locked on the cassette mounting table by the stopper mechanism, the stopper mechanism interferes with an interference member provided on the cassette mounting table, so that the frame cassette is mounted correctly. It is determined that there is no warning, and control for prohibiting the warning and the conveying operation is performed.
[0018]
According to the second aspect, in the apparatus provided with the cassette mounting table, the cassette is mounted when the cassette is not mounted at a predetermined position on the cassette mounting surface or the stopper mechanism is not released. In this case, a warning is given from the display unit on the operation unit according to the determination of the control unit, and the transport operation in the transport unit is stopped.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
The cassette mounting table of the present invention is applied to a cassette having a stopper mechanism that accommodates a plurality of objects to be processed and prevents the protrusions and slides of these objects to be processed. In the following description, a wafer frame with a wafer attached to the object to be processed will be described as an example, and a cassette will be described with a frame cassette as an example.
[0020]
FIG. 1 shows an external configuration of a frame cassette having a stopper mechanism used in the cassette mounting table of the present invention, and FIG. 2 is a diagram showing a configuration of the stopper mechanism. FIG. 3 is a view showing an external configuration of a wafer inspection apparatus as an example of an apparatus using the frame cassette as viewed from above. FIG. 4 is a diagram showing an external configuration of a cassette mounting table on which a frame cassette according to the embodiment of the present invention is mounted.
[0021]
The frame cassette 1 shown in FIG. 1 includes two side members 1a and upper and lower support members 1b that connect these members with an upper surface and a lower surface (mounting surface). On the inner surface side of each side member 1a, there are provided a frame support portion 2 consisting of a plurality of, for example, 25-step grooves for supporting 25 wafer frames 3, and the wafer frame 3 is accommodated in each groove. The wafer frame 3 is provided with a wafer tape 4 on the inner side, and a wafer 5 is stuck on the wafer tape 4.
[0022]
Notches 7 and 9 are provided above and below the front side of the one side member 1a of the frame cassette 1 (the side where the wafer frame 3 is carried in and out). The cutout portions 7 and 9 are provided to prevent a rotation shaft 6 described later from protruding from the upper surface and the lower surface of the side member 1a.
[0023]
Holes 11 that are coaxial in the vertical direction are provided on the surfaces of the notches 7 and 9, respectively, and these holes 11 have a U-shape that is rotatable as shown in FIG. 2 (b). Both ends of the rotary shaft 6 of the mold are inserted. In the following description, the position of the rotating shaft 6 in a state in which the wafer frame 3 can be loaded into and unloaded from the frame cassette 1 is referred to as a “frame open position” to prevent the wafer frame 3 from protruding or sliding out of the frame cassette 1. The position of the rotating shaft 6 in a state where the cassette 1 can be conveyed is referred to as a “frame protrusion prevention position”.
[0024]
As shown in FIG. 2 (a), on the surface of the notch 9 on the lower surface (mounting surface) side of the frame cassette 1 as viewed from the direction A in FIG. A locking groove 10a for stopping and a locking groove 10b for locking the rotary shaft 6 at the frame open position are provided. Further, as shown in FIG. 2 (b), on the outside of the side surface member 1a of the stepped portions of the notches 7 and 9, when the rotary shaft 6 is locked at the frame open position, the vertical portion of the rotary shaft 6 is provided. A groove 8 for storing is provided in the vertical direction. These rotating shaft 6, locking grooves 10 a, 10 b and groove 8 constitute a stopper mechanism.
[0025]
In addition, the state which shows the rotating shaft 6 in a solid line in FIG. 1 or the state shown in FIG. 2A shows the state in which the rotating shaft 6 is at the frame protrusion preventing position and the frame cassette 1 can be conveyed.
[0026]
On the other hand, the state indicated by the dotted line in FIG. 1 is the frame opening position where the cassette mounting table 24 described later is mounted (or mounted) and the frame protrusion prevention on the rotating shaft 6 is released. 1 shows a state in which the wafer frame 3 can be carried in and out.
[0027]
Next, an example of a wafer inspection apparatus using a frame cassette provided with such a stopper mechanism will be described with reference to FIG.
This wafer inspection apparatus is an apparatus for inspecting the appearance of the wafer 5 (detection of scratches, etc.) before converting the wafer 5 into chips (dies) in a dicing process.
[0028]
This wafer inspection apparatus is roughly composed of an elevator unit 21, a transfer unit 22, an inspection unit 23, and a control unit (not shown) for controlling them. The elevator unit 21 includes a cassette mounting table 24 for mounting the frame cassette 1 and a cassette for mounting an arbitrary wafer frame 3 stored in the frame cassette 1 on a transfer arm (not shown) of the transfer unit 22. It is comprised with the mounting base drive part 25 which moves the mounting base 24 up and down. In front of the inspection unit 23, an operation unit 28 is provided in which a plurality of operation keys and a display unit for indicating an operation state, a warning, and the like are arranged. This warning may be displayed by lighting / flashing light or characters / symbols in the display, or may be a warning announcement by buzzer sound or voice instead of the display, or a combination thereof. Also good.
[0029]
Positioning members 29a and 29b and cassette detection sensors 26a and 26b, which will be described later, are provided on the mounting surface of the cassette mounting table 24. These cassette detection sensors 26a and 26b detect whether or not the frame cassette 1 is correctly (proper) positioned on the cassette mounting table 24 by the positioning members 29a and 29b. When a detection signal indicating improper positioning is sent from the cassette detection sensors 26a and 26b, the control unit gives a warning on the display unit on the operation unit 28 and controls to prohibit the conveyance operation in the conveyance unit 22. . This prohibition of the transport operation is not canceled unless the frame cassette 1 (including the frame opening position setting of the rotating shaft 6) is placed at the correct position.
[0030]
The stopper mechanism is released immediately before the operator places the frame cassette 1 on the cassette placing table 24. When the frame cassette 1 is placed on the placement surface and an inspection start is instructed by the operation unit 28 of the inspection apparatus, one wafer frame 3 stored in the frame cassette 1 is taken out by the transfer unit 22, It is conveyed to the inspection unit 23. The wafer frame 3 that has been inspected by the inspection unit 23 is returned to the original frame cassette 1 by the transfer unit 22.
[0031]
FIG. 4 shows a specific configuration example of the cassette mounting table described above.
On the mounting surface of the cassette mounting table 24, the frame cassette 1 is properly mounted on the cassette mounting table 24 and a pair of front side positioning member 29 a and rear side positioning member 29 b that determine the position for mounting the frame cassette 1. Cassette detection sensors 26a and 26b for detecting that the wafer is mounted and a frame protrusion sensor 27 for detecting that the wafer frame 3 does not protrude from the frame cassette 1 by a predetermined amount or more are provided. A central positioning member 33 for positioning by the lower support member 1b (not shown) of the frame cassette 1 is provided at the center of the placement surface.
[0032]
The cassette detection sensors 26a and 26b are disposed so as to be pressed by both side members 1a of the frame cassette 1 in the vicinity of the front side positioning member 29a, and the frame cassette 1 is properly placed. Both cassette detection sensors 26a and 26b are adjusted so as not to turn on unless the entire bottom surface of the frame cassette 1 comes into contact with the mounting surface of the cassette mounting table 24.
[0033]
Further, a rectangular interference base member 32a is provided on the mounting surface of the cassette mounting table 24 so as to face the lower surface of the notch 9 provided with the stopper mechanism.
[0034]
Further, on the interference base member 32a, an L-shaped shaft interference member 32b is provided that extends from the frame support part 2 side to the front side of the side member 1a except under the notch 9. The interference member 32 composed of the interference base member 32a and the shaft interference member 32b is placed on the mounting surface of the cassette mounting table 24 in a state where the rotary shaft 6 is present in the frame cassette 1 on the frame support site 2 side including the frame protrusion prevention position. When placed, the rotary shaft 6 rides on the shaft interference member 32b, and one of the side members 1a is inclined so that the entire bottom surface of the frame cassette cannot be contacted. Thereby, the cassette detection sensor 26b is not turned on, and the control unit of the apparatus described above determines that the rotating shaft 6 is in a frame protrusion prevention state that interferes with the conveyance of the wafer frame 3. By this determination, a warning is displayed on the display unit on the operation unit 28, and the transfer operation of the wafer frame 3 is prohibited. It should be noted that the rotary shaft 6 is not necessarily locked (fitted) to the groove 8 unless it is located at a position where it does not contact the shaft interference member 32b, for example, outside the side member 1a. In both cases, the conveyance is not prohibited, but it is preferable that the rotating shaft 6 is locked in the groove 8 when the wafer frame 3 is conveyed.
[0035]
As described above, according to the present embodiment, when the frame cassette 1 is mounted on the cassette mounting table of the apparatus in a frame protrusion preventing state where the wafer frame 3 is locked by the stopper mechanism, the stopper mechanism Interferes with the interference member provided on the mounting table, and the frame cassette 1 is not mounted correctly. As a result, when the operator neglects the work of releasing the stopper mechanism (setting the frame opening position of the rotating shaft) or the confirmation of the release is insufficient when placing, the frame cassette 1 is placed at the correct position. Instead, the frame cassette 1 is tilted, and the cassette detection sensors 26a and 26b can reliably detect an abnormal placement of the frame cassette 1 and prevent the occurrence of a conveyance error.
[0036]
In the present embodiment, a frame cassette that stores a wafer frame to which a wafer is attached is described as an example. However, the present invention can be easily applied to a wafer cassette that simply stores a wafer. In addition, the cassette mounting table of the present invention ensures that the cassette detection sensors 26a and 26b can prevent the cassette mounting abnormality even when the cassette not provided with the stopper mechanism is not properly mounted on the cassette mounting table surface. Detection can be prohibited.
[0037]
The cassette detection sensors 26a and 26b are arranged at positions facing the lower surface of the lower support member 1b or positions opposed to the lower surfaces of the side surface members 1a at both ends, so that the side surface member 1a or the lower support member 1b of the frame cassette 1 is disposed. It may be arranged to detect. In particular, in a versatile cassette mounting table that can handle frame cassettes of different sizes, the position of the cassette detection sensor is preferably a position where the cassette can be detected in common, for example, the lower surface of the lower support member 1b The vicinity of the center of the opposite cassette mounting table 24 can be considered.
[0038]
In this embodiment, the cassette mounting table in one wafer inspection apparatus is described as an example. However, when the system is constructed as a production line system, transfer error information of this cassette mounting table is sent to the host computer. It can be easily transmitted and managed as a system.
[0039]
Next, a modified example of the frame cassette having a stopper mechanism used for the cassette mounting table in the embodiment of the present invention will be described with reference to FIG.
[0040]
The above-described switching between the frame opening position and the frame protrusion prevention position on the rotating shaft 6 of the frame cassette 1 is based on the premise that the rotation distance is long and is determined by the operator. In the modified example shown in FIG. 5, a frame cassette having a configuration capable of handling a cassette carrying robot in an automatic carrying system will be described. Here, only the stopper mechanism is shown, and the other configuration is the same as that of the frame cassette 1 described above, and a description thereof is omitted here.
[0041]
As shown in FIG. 5 (a), the rotating shaft 41 of the stopper mechanism, like the rotating shaft 6, has a hole that is coaxial in the vertical direction on the surface of the notch provided at the top and bottom of the side member. Are formed, and both ends of the rotary shaft are inserted into these holes so as to be rotatable.
[0042]
A coil spring 45 is provided in the hole at both ends or one of the ends of the inserted rotation shaft 41, and is urged in a rotation direction pressed against the stopper 43. The rotary shaft 41 has a U-shaped shape including a vertical shaft portion that abuts on a wafer frame (not shown) and a support shaft portion that supports the vertical shaft portion in the vertical direction. The support shaft portion is bent outward, for example, in a bent shape. By adopting this dogleg shape, when the wafer frame 3 as shown in FIG. 1 slides out, the rounded portion of the wafer frame angle pushes the vertical shaft portion outward. The rotating shaft 41 keeps being pressed against the stopper 43 and prevents the wafer frame 3 from sliding out. The rotating shaft 41 at this time is assumed to be in a frame protrusion prevention position.
[0043]
In addition, the support shaft portion on the upper side of the rotation shaft 41 is connected to a movable portion of the transfer robot so that a cassette transfer robot or the like (not shown) can easily rotate the rotation shaft 41. A claw portion 42 is provided.
[0044]
FIG. 5B shows a state in which the frame cassette 1 is mounted on the cassette mounting table of the apparatus. The movable part of the cassette transport robot pushes the pawl 42 of the rotating shaft 41 and rotates it, and the vertical shaft portion of the rotating shaft 41 is placed on the cassette mounting table while maintaining the state where it is rotated to the front of the side member. Put.
The rotating shaft 41 at this time is assumed to be in the frame open position. An interference member 47 corresponding to the interference member 32b shown in FIG. 1 is provided on the mounting surface of the cassette mounting table, and the rotating shaft 41 rotates to return to the original state (FIG. 2A). (Do not return to the state shown).
[0045]
By providing the interference member 47 on the mounting surface, the rotating shaft 41 is mounted on the mounting surface of the cassette mounting table when the rotating shaft 41 is at the frame protrusion prevention position or at least the rotating shaft 41 is on the frame support part 2 side. Then, the rotating shaft 41 rides on the interference member 47 and one of the side members is inclined, and the entire bottom surface of the frame cassette cannot be brought into contact. As a result, the cassette detection sensors 26a and 26b are not turned on, and the control unit of the above-described apparatus determines that the rotating shaft 41 is in a frame protrusion prevention state that interferes with the transfer of the wafer frame 3, and the warning and transfer operation are performed. Ban.
[0046]
When the transport robot lifts the frame cassette 1 after the inspection and processing are completed, the rotating shaft 41 is rotated by the biasing force of the spring 45 and returns to the frame protrusion prevention position shown in FIG.
[0047]
As shown in FIG. 5C, an open position locking member 44 is provided within the rotation range of the rotary shaft 41 on the surface of the notch provided on the upper front side of the side member.
[0048]
The open position locking member 44 can move up and down and is urged to be pushed upward by a spring 46 provided in the side member.
[0049]
The open position locking member 44 is used when an operator puts in and out the wafer frame in a state where the frame cassette 1 is not placed on the cassette placing table. The rotation position of the opening position locking member 44 comes into contact with the rotating shaft 41 and is temporarily pushed down, but is pushed back upward by the spring 46 to lock the rotating shaft 41 in the opened position. When the operator pushes down the open position locking member 44 with a finger or the like, the rotating shaft 41 rotates and returns to the original state (the state of the frame protrusion prevention position shown in FIG. 5A). Note that the speed of returning to the original state can be easily adjusted by replacing the springs 45 with different urging forces.
[0050]
As described above, this modification can obtain the same operational effects as those of the above-described embodiment.
[0051]
Furthermore, it is easy to switch between the frame protrusion prevention position and the frame opening position of the stopper mechanism, which is suitable for an automatic conveyance system. Further, even if the position of the stopper mechanism is not changed by the operator, except for being mounted on the cassette mounting table, it is normally set at the frame protrusion prevention position, thus preventing the wafer frame from protruding or sliding out. be able to. Further, when the wafer frame is put in and out by an operator or the like, the stopper mechanism can be kept open by the opening position locking member, and the work becomes easy.
[0052]
【The invention's effect】
As described above in detail, according to the present invention, it is possible to reliably detect whether the cassette is properly placed on the cassette placing table, and to prevent the cassette having a stopper mechanism that prevents the object to be processed from protruding and sliding out. Thus, it is possible to detect whether the stopper mechanism is in the frame open position during placement, and prohibit the conveyance operation when the frame protrusion prevention position or improper cassette placement causes trouble in the conveyance of the object to be processed. A possible cassette mounting table and an apparatus including the cassette mounting table can be provided.
[Brief description of the drawings]
FIG. 1 is a diagram showing an external configuration of a frame cassette having a stopper mechanism used in a cassette mounting table of the present invention.
FIG. 2 is a diagram showing a configuration of a stopper mechanism of a frame cassette.
FIG. 3 is a diagram showing an external configuration of a wafer inspection apparatus as an example of an apparatus using a frame cassette as viewed from above.
FIG. 4 is a diagram showing an external configuration of a cassette mounting table on which a frame cassette according to an embodiment of the present invention is mounted.
FIG. 5 is a diagram showing an external configuration of a frame cassette having a stopper mechanism used in the cassette mounting table of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Frame cassette, 1a ... Side member, 1b ... Upper / lower support member, 2 ... Frame support part, 3 ... Wafer frame, 4 ... Wafer tape, 5 ... Wafer, 6 ... Rotating shaft, 7, 9 ... Notch 8 ... Groove, 10a, 10b ... Locking groove, 11 ... Hole, 21 ... Elevator section, 22 ... Conveying section, 23 ... Inspection section, 24 ... Cassette mounting table, 25 ... Mounting table drive section, 26a, 26b ... Cassette Detection sensor, 27... Frame protrusion sensor, 28 .. operation unit, 29 a and 29 b .. positioning member, 32 .. interference member, 33.

Claims (6)

A cassette having a stopper mechanism capable of storing a plurality of objects to be processed, preventing protrusion and sliding out of the objects to be processed, and releasable;
A positioning member that is provided on the placement surface of the cassette and guides the cassette to be placed at a predetermined position;
A cassette detection sensor that is provided on the placement surface of the cassette and outputs a detection signal indicating a contact state between the placement surface and the entire cassette bottom surface when the cassette is placed on the placement surface;
A control unit that determines a loading state of the cassette based on a detection signal of the cassette detection sensor;
An interference member on the mounting surface of the cassette mounting table;
When the cassette is placed on the mounting surface in a state in which the stopper mechanism of the cassette is prevented from protruding or slipping out of the processing body, the interference member rides on the interference member, and the cassette is A cassette mounting table which is arranged so as not to be mounted at a position . 2. The cassette mounting table according to claim 1, wherein the control unit performs control to prohibit conveyance when it is determined that the cassette is not mounted at the predetermined position. 3.   The cassette has a U-shaped rotation shaft, and the rotation shaft is capable of loading and unloading the object to be processed from the cassette by rotation, and preventing the protrusion and sliding of the object to be processed. The cassette mounting table according to any one of claims 1 and 2, wherein the cassette mounting table can be switched between a state in which it can be transported.   The cassette mounting table according to any one of claims 1 to 3, wherein the object to be processed is a semiconductor wafer or a wafer frame to which a semiconductor wafer is attached.   2. The cassette detection sensor is provided such that two cassette detection sensors are provided and adjusted so that the two cassette detection sensors are not turned on unless the placement surface and the entire bottom surface of the cassette are in contact with each other. Cassette mounting table. A cassette mounting table for positioning and mounting a cassette for storing a plurality of objects to be processed;
A cassette detection sensor that is provided on the placement surface of the cassette and outputs a detection signal indicating a contact state between the placement surface and the entire bottom surface of the cassette;
A target object transporting unit for carrying out and carrying in the target object stored in the cassette on which the cassette mounting table is mounted;
A processing / inspection unit that receives the object to be processed from the object-to-be-processed transport unit and performs processing or inspection;
A control unit for controlling conveyance of the object to be processed, processing and inspection, and
A stopper mechanism for preventing the object to be processed from projecting or sliding on the cassette;
An interference member that interferes with the stopper mechanism when the cassette stopper mechanism is placed on the placement surface in a state in which the stopper mechanism of the cassette is prevented from protruding or slipping out of the processing body on the placement surface of the cassette placement table; Equipped,
When the control unit determines that the mounting state of the cassette is inappropriate based on a detection signal from the cassette detection sensor, the control unit prohibits the transfer operation in the workpiece transfer unit. Features device.

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