JP2001100119A5 - - Google Patents

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Publication number
JP2001100119A5
JP2001100119A5 JP1999280275A JP28027599A JP2001100119A5 JP 2001100119 A5 JP2001100119 A5 JP 2001100119A5 JP 1999280275 A JP1999280275 A JP 1999280275A JP 28027599 A JP28027599 A JP 28027599A JP 2001100119 A5 JP2001100119 A5 JP 2001100119A5
Authority
JP
Japan
Prior art keywords
piezoelectric
mirror
mirror element
modulation device
light modulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999280275A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001100119A (ja
JP3800292B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP28027599A priority Critical patent/JP3800292B2/ja
Priority claimed from JP28027599A external-priority patent/JP3800292B2/ja
Publication of JP2001100119A publication Critical patent/JP2001100119A/ja
Publication of JP2001100119A5 publication Critical patent/JP2001100119A5/ja
Application granted granted Critical
Publication of JP3800292B2 publication Critical patent/JP3800292B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP28027599A 1999-09-30 1999-09-30 光変調デバイス及び表示装置 Expired - Fee Related JP3800292B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28027599A JP3800292B2 (ja) 1999-09-30 1999-09-30 光変調デバイス及び表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28027599A JP3800292B2 (ja) 1999-09-30 1999-09-30 光変調デバイス及び表示装置

Publications (3)

Publication Number Publication Date
JP2001100119A JP2001100119A (ja) 2001-04-13
JP2001100119A5 true JP2001100119A5 (cg-RX-API-DMAC7.html) 2004-08-26
JP3800292B2 JP3800292B2 (ja) 2006-07-26

Family

ID=17622729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28027599A Expired - Fee Related JP3800292B2 (ja) 1999-09-30 1999-09-30 光変調デバイス及び表示装置

Country Status (1)

Country Link
JP (1) JP3800292B2 (cg-RX-API-DMAC7.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003045642A (ja) * 2001-07-27 2003-02-14 Sony Corp 表示素子とその製造方法
JP2007073553A (ja) * 2005-09-02 2007-03-22 Kyoto Univ 圧電アクチュエータ及びその製造方法
JP5952391B2 (ja) 2012-04-23 2016-07-13 キヤノン電子株式会社 光走査装置及び画像読取装置
JP6390508B2 (ja) * 2015-05-07 2018-09-19 株式会社デンソー 光走査装置
KR102346728B1 (ko) 2015-06-30 2022-01-04 삼성디스플레이 주식회사 표시 장치
US10816733B2 (en) * 2016-04-01 2020-10-27 Intel Corporation Piezoelectrically actuated mirrors for optical communications

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