JP2001096243A - Ultrasonic nozzle unit and device and method for treating with ultrasonic wave using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a slit type ultrasonic nozzle unit that is used while using a high temperature liquid as a treating liquid and has high treatment efficiency and to provide an ultrasonic treatment device using such a nozzle. SOLUTION: This ultrasonic nozzle units 1, 1a, 1b and 1c are provided with a diaphragm for generating ultrasonic waves. An additive 10, 32, 50 and 69 is used for adhering/fixing an oscillator 8, 31, 49 and 68 to the diaphragm 9, 24, 43 and 67 and cooled by a cooling medium.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic processing technique suitable for ultrasonically processing an object to be processed, and more particularly to various industrial processes represented by a manufacturing process of a semiconductor device or a liquid crystal display device. The present invention relates to an ultrasonic nozzle unit suitable for cleaning, ashing, and etching of a substrate, a component, and the like used in a device manufacturing process, and an ultrasonic processing apparatus using the same.

[0002]

2. Description of the Related Art In a manufacturing process of a semiconductor device or a liquid crystal display device, for example, in a cleaning process, particles of sub-micron order adhering to a semiconductor wafer, a liquid crystal substrate, and the like are cleaned and removed before and after various fine processing. In other words, a high-frequency ultrasonic treatment device of about 1 MHz is used for precision cleaning, the size of particles that must be removed during cleaning is on the order of 0.1 μm, and metal ions are eluted in the processing solution. There must be no.

[0003] This cleaning step is extremely important for improving the yield of semiconductor devices and liquid crystal display devices.

[0004] As an ultrasonic treatment apparatus used in such a cleaning step, a dip type and a slit type are often used. In the dip type, the processing solution is filled in the cleaning tank containing the object to be cleaned, and ultrasonic waves are radiated from the ultrasonic vibrator attached to the bottom or side surface of the cleaning tank to the cleaning tank, so that the processing solution Cleaning is performed by applying sonic vibration.

However, the size of the glass substrate is 300 mm.
If the size of the surface to be treated or processed becomes large, such as × 400 mm or the size of the semiconductor wafer is 12 inches,
It is difficult to put, for example, 25 objects to be processed into one carrier of the dip type at the same time and to perform the processing at the same time. Therefore, the processing is often performed in a slit type one by one. In the slit type, a work (object to be processed) is usually transferred by a conveyor, and various necessary processes such as cleaning are performed in this process.

[0006] The slit type cleaning unit has a hollow main body in which a slit is formed. A processing liquid supply pipe is connected to the main body, and the processing liquid supplied from the supply pipe into the main body flows out of the slit.

A vibration plate made of a thin metal plate, a quartz plate or the like is provided inside the main body so as to face the flow path of the processing liquid. A vibrator is bonded and fixed to the diaphragm.
Therefore, when a voltage is applied to the vibrator to ultrasonically vibrate the vibration plate, the ultrasonic vibration is applied to the processing liquid flowing into the main body. Can be washed.

[0008]

However, in the ultrasonic processing apparatus having the above-described structure, when applying an ultrasonic wave using a high-temperature liquid of about 80 ° C. to 130 ° C. as a processing liquid, for example, Such a problem exists. (A) Ancillary equipment such as a heater for heating the processing liquid to a high temperature is required, which requires high cost.
Further, as the size of the device increases, the power consumption thereof also increases. (B) There is a problem in the heat resistance of the adhesive bonding the vibrator and the diaphragm. That is, usually, an adhesive used for bonding the vibrator and the diaphragm is an epoxy-based thermosetting type adhesive, and its substantial heat resistance temperature is about 140 ° C. in Max. Accordingly, the state of adhesion between the vibrator and the vibrator is deteriorated, and the resonance frequency of the vibrator and the voltage applied to the vibrator due to various aging are reduced. A deviation occurs from the frequency of the voltage. If the resonance frequency of the vibrator shifts, the sound generated from the vibrator is reduced, so that the ultrasonic vibration applied to the processing liquid is weakened and the cleaning action is also reduced. (C) Normal operation of the ultrasonic nozzle unit cannot be obtained at a temperature of about 120 ° C. to 140 ° C. due to the problem of the heat resistance temperature of PZT and the problem of the adhesive.

PZT generates heat by its own vibration (the temperature rises by about 40 ° C. when the processing liquid is at room temperature). Under such circumstances, only a liquid up to a temperature slightly higher than room temperature can be used as the processing liquid, and an efficient high-temperature processing liquid cannot be used.

The present invention has been made based on these circumstances, and it is an object of the present invention to provide a highly efficient slit type ultrasonic nozzle unit using a high-temperature liquid as a processing liquid and an ultrasonic processing apparatus using the same. The purpose is.

[0011]

According to the first aspect of the present invention, there is provided a vibration plate for applying an ultrasonic wave to a processing liquid when a processing liquid is ejected from a nozzle to a processing target and processing is performed. An ultrasonic nozzle unit, comprising: a vibrator fixed to the vibration plate with an adhesive, and a cooling unit for cooling the adhesive fixed. .

According to the second aspect of the present invention,
The ultrasonic nozzle unit is characterized in that the processing liquid is generated by mixing a plurality of types of liquids in the nozzle.

According to the third aspect of the present invention,
The ultrasonic nozzle unit is characterized in that the liquid to be mixed in the nozzle flows into the nozzle from different inlets.

According to the fourth aspect of the present invention,
The ultrasonic nozzle unit is characterized in that the different inlets communicate with different nozzles, and the plurality of nozzles are formed in a nested state with a gap.

According to the fifth aspect of the present invention,
The ultrasonic nozzle unit is characterized in that the center lines of the plurality of nozzles do not coincide with each other.

According to the means of the invention of claim 6,
The ultrasonic nozzle unit is characterized in that the liquid mixed in the nozzle is a hydrogen peroxide solution and sulfuric acid, and the sulfuric acid is caused to flow after the hydrogen peroxide solution is caused to flow into the nozzle.

Further, according to the means of the invention of claim 7,
The ultrasonic nozzle unit is characterized in that the liquids mixed in the nozzle are processing liquids of the same component having different temperatures.

Further, according to the means of the invention of claim 8,
An ultrasonic nozzle unit, wherein the temperature of the processing liquid mixed in the nozzle is measured by a temperature sensor.

According to the means of the ninth aspect,
The ultrasonic nozzle unit is characterized in that the cooling means has a cooling medium that is in contact with at least one of the diaphragm and the vibrator.

According to a tenth aspect of the present invention, in the ultrasonic nozzle unit, the flow of the cooling medium and the flow of the processing liquid are separated by a diaphragm.

According to an eleventh aspect of the present invention, there is provided an ultrasonic processing apparatus comprising the ultrasonic nozzle unit according to any one of the above.

According to a twelfth aspect of the present invention, an object to be processed is processed by mixing a first processing liquid to which ultrasonic vibration is applied and a second processing liquid to which no ultrasonic vibration is applied. The ultrasonic treatment method is characterized in that:

[0023]

Embodiments of the present invention applied to a cleaning process will be described below with reference to the drawings.

Generally, the cleaning effect of the ultrasonic cleaning often increases when the temperature of the cleaning liquid (treatment liquid) is increased. The reason for this is that, for example, when the temperature of the cleaning liquid is increased from the normal temperature of 25 ° C., the vapor pressure increases with the temperature rise, so that bubbles are easily generated in the cleaning liquid and are easily present. . At the time of cleaning, since ultrasonic waves are applied to the cleaning liquid in a state in which bubbles are easily generated by a diaphragm fixed to an ultrasonic vibrator, the number of bubbles in the cleaning liquid increases, and the propagation of ultrasonic waves in the cleaning liquid is good. It is considered that the object to be cleaned (object to be processed) can be cleaned in a proper state. It has been experimentally confirmed that the use of a high-temperature liquid as the cleaning liquid in ultrasonic cleaning is effective in increasing the cleaning efficiency.

FIG. 1 is a side sectional view of an ultrasonic nozzle unit according to a first embodiment of the present invention. That is, in the ultrasonic nozzle unit 1, a quartz nozzle A3 is nested inside a quartz nozzle B2 via a gap, and the nozzle A3 and the nozzle B2 are respectively provided with the cleaning liquid A.
A cleaning liquid supply port A4 (not shown) and a cleaning liquid B
It is fixed to blocks A6 and B7 provided with a cleaning liquid supply port B5 for supplying (not shown).

On the other side of the block A6 where the nozzle A3 is mounted, a vibration plate 9 to which a vibrator 8 such as PZT is adhered with an adhesive 10 is mounted. The nozzle B2 is fixed to the block B7 together with the temperature sensor 11 by screws (not shown). Further, the nozzle A3 is fixed to the block B7 by the press-fit pins 12a and 12b in a state where the nozzle A3 is sandwiched between the end surface of the step portion of the block B7 and the end surface of the step portion of the block A6. It is fixed in a sandwiched state by the blocks 6 and 7.
Of course, a configuration in which screws are used instead of the press-fit pins 12a and 12b may be used.

The cleaning liquid supply port A4 and the cleaning liquid supply port B5 are respectively connected to a cleaning liquid tank and a pump via a pipe as a cleaning liquid supply system (not shown). The cleaning liquid tank storing the cleaning liquid B is provided with a heater for adjusting the temperature of the cleaning liquid B, and is combined with the ultrasonic nozzle unit 1 to constitute an ultrasonic processing apparatus.

With these configurations, first, the pump is operated to supply the cleaning liquid A from the cleaning liquid tank to the cleaning liquid supply port A4. The cleaning liquid A is, for example, a normal temperature hydrogen peroxide solution (including water). The supplied cleaning liquid A is the cleaning liquid supply port A.
4, the ultrasonic vibration is applied by the diaphragm 9 and passes through the nozzle A3, further passes through the nozzle B2, and passes through the nozzle B2.
2 from the tip.

Subsequently, the pump is similarly operated to supply the cleaning liquid B from the cleaning liquid tank to the cleaning liquid supply port B5. The cleaning liquid B is, for example, sulfuric acid. The supplied cleaning liquid B flows through the nozzle B2 through the cleaning liquid supply port B5. Since the nozzle A3 is combined with the nozzle B2 in a nested state through a gap, the inside of the nozzle B2, a hydrogen peroxide solution, which is the cleaning liquid A spouted into the nozzle B2 from the tip of the nozzle A3, and the cleaning liquid The sulfuric acid, which is the cleaning liquid B supplied from the supply port B5, joins to form a mixed liquid. In this mixing, the hydrogen peroxide solution and the sulfuric acid undergo a hydration reaction to generate heat of hydration (heat of reaction) to generate a high-temperature washing liquid. This high-temperature cleaning liquid is ejected from the tip of the nozzle B2 as a cleaning liquid to clean the body to be cleaned.

In this case, since the high-temperature cleaning liquid is generated inside the nozzle B2, the diaphragm 9 fixed to the nozzle A3 is not exposed to a high temperature, and the adhesive 10 with the vibrator 8 is not exposed. Also does not become hot.

That is, the liquid in contact with the diaphragm 9 is a room temperature or low temperature liquid, and by mixing the high temperature or room temperature liquid later, the ultrasonic wave can be applied to the high temperature cleaning liquid without the vibrator 8 becoming high temperature. .

Since the temperature of the cleaning liquid B is measured by the temperature sensor 11 provided outside the nozzle B2,
As a result, when the temperature of the cleaning liquid B is lower than the set temperature, the heater is operated to increase the temperature of the cleaning liquid B, thereby raising the temperature of the mixed cleaning liquid to a predetermined temperature. In addition, with respect to the detection result of the temperature sensor 11 and the operation of the temperature sensor 11 based on the detection result, experimental data is stored in a control unit (not shown) in advance, and is controlled by the data.

In the state where the nozzle A3 is nested with the nozzle B2, the center lines a and b of the nozzles do not coincide with each other. For example, the center line of one of the nozzles is slightly moved and shifted. Alternatively, the angle direction of the center line is set to be slightly shifted. Thereby, the nozzle B
When the cleaning liquids A and B merge in the turbulent flow 2, the turbulence becomes violent, and the cleaning liquids A and B are mixed by the stirring effect generated by the vortex generated thereby. Further, a stirring effect can be obtained even if grooves or projections are provided on the inner surface of the nozzle B2.

It should be noted that the nozzles A3 and B2
The cross-sectional shape in the A 'direction can be arbitrarily selected according to the structure of the cleaning device, such as a circular shape or a slit shape.

The heat of hydration when a hydrogen peroxide solution and sulfuric acid are mixed is generated by the hydration of water with sulfuric acid. This heat of hydration occurs in principle with any liquid when diluting a thick drug with water, though to a varying degree. However, in order to avoid bumping during the reaction, the order of diluting the liquid is not to mix water with sulfuric acid but to mix sulfuric acid with water (hydrogen peroxide solution) as described in the above embodiment. There is a need to.

In the above-described embodiment, a high-temperature cleaning liquid is produced by a reaction of mixing the two liquids by using a hydrogen peroxide solution as the cleaning liquid A and a sulfuric acid as the cleaning liquid B. A liquid can also be used. However, in this case, the cleaning liquid A must be used at a low temperature, and the cleaning liquid B must be used at a high temperature.

For example, when hydrogen peroxide solution is used for both the cleaning liquids A and B, the cleaning liquid A is at room temperature, and the cleaning liquid B is a high temperature generated by heating a heater (not shown) of a cleaning liquid tank (not shown). Use liquid. By mixing the normal-temperature cleaning liquid A and the high-temperature cleaning liquid B in the nozzle B2, a predetermined-temperature cleaning liquid is generated.

Next, a second embodiment will be described.
In the second embodiment, a method of cooling a vibrator or a diaphragm with a cooling medium is used.

FIG. 2 is a side sectional view of an ultrasonic nozzle unit according to a second embodiment of the present invention. That is, the ultrasonic nozzle unit 1a includes a block C21 in which a flow path of a cleaning liquid (not shown) is formed, and a block D22 in which a flow path of a cooling medium combined with one side of the block C21 is formed. And a diaphragm B23 and the like.

The block C21 has a nozzle C25 at the center.
And a cleaning liquid supply port C27 for supplying a cleaning liquid C (not shown) to the other end side of each flow path at the large diameter portion of the nozzle C25.
A cleaning liquid supply port D28 for supplying a cleaning liquid D (not shown) is formed. A temperature sensor 26 for detecting the temperature of the cleaning liquid is provided inside the block C21 on the tapered side of the nozzle C25.
a is buried.

The block D22 is a thick tube having a cross section with a step in the inner diameter, and two cooling medium passages are formed in the thick portion of the small inner diameter portion. One of the two coolant passages is a coolant inlet 29 and the other is a coolant outlet 30.

The block C21 and the block D22 are combined so that the steps formed on the blocks C21 and D22 sandwich the diaphragm A23. Further, the diaphragm B24 is also fixed to the step on the inner diameter side of the block D22. This diaphragm B2
A vibrator A31 is bonded to 4 with an adhesive A32.
That is, one set of diaphragms A, B23, and 24 are provided in parallel and substantially perpendicular to the center line c of the nozzle C25.

The structure of the flow path of the liquid is such that the flow path of the cleaning liquid and the flow path of the cooling medium are partitioned by the vibrating plates 23 and 24, and the cooling medium is partitioned by the vibrating plate A23 and the vibrating plate B24. Flow through the flow path.

The cleaning liquid supply ports C, D2
A cleaning liquid tank and a pump are connected to the pipes 7 and 28 via pipes as a cleaning liquid supply system (not shown), respectively.
An ultrasonic processing device is configured in combination with the ultrasonic nozzle unit 1a. The cleaning liquid tank storing the cleaning liquid D is provided with a heater for adjusting the temperature of the cleaning liquid D.

With these constructions, first, the pump is operated and the cleaning liquid C is supplied from the cleaning liquid tank to the cleaning liquid supply port C27.
Supply. The cleaning liquid C is, for example, a normal temperature hydrogen peroxide solution (including water). After a short delay, the pump is operated in the same manner and the cleaning liquid D is supplied from the cleaning liquid tank to the cleaning liquid supply port D28.
Supply. The cleaning liquid D is, for example, sulfuric acid.

A cooling medium (not shown) is caused to flow from a cooling medium inlet 29 by operating a pump (not shown).
The hydrogen peroxide solution as the cleaning liquid C and the sulfuric acid as the cleaning liquid D flowing into the nozzle C25 are combined and stirred in the nozzle C25 to become a high-temperature cleaning liquid due to heat of hydration, and are ejected from the tip of the nozzle C25. The surface of the diaphragm A23 that is in contact with the cleaning liquid is heated by the high-temperature cleaning liquid, but the other surface is cooled because it is in contact with the cooling medium, and the diaphragm A23 itself does not become so hot. On the other hand, the diaphragm B24 to which the vibrator A31 is adhered has a structure in which one surface is in contact with the cooling medium, so that the temperature hardly increases. Therefore, the temperature of the adhesive A32 that bonds the diaphragm B24 and the vibrator A31 does not become high. When the diaphragm B24 is vibrated by the vibrator A31, the diaphragm A23 resonates with it and applies ultrasonic vibration to the high-temperature cleaning liquid.

The temperature of the mixed cleaning liquid is measured by a temperature sensor 26a provided outside the nozzle C25. As a result, when the temperature is lower than the set temperature, the heater is operated to increase the temperature of the cleaning liquid D,
The temperature of the mixed cleaning liquid is raised to a predetermined temperature.
In addition, regarding the detection result of the temperature sensor 26a and the operation of the temperature sensor 26a based on the detection result, experimental data is stored in a control unit (not shown) in advance, and is controlled by the data.

FIG. 3 is a side sectional view of an ultrasonic nozzle unit according to a first modification of the above-described second embodiment. That is, the ultrasonic nozzle unit 1b includes a block E41 in which the flow path of the cleaning liquid is formed, and a block F in which the flow path of the cooling medium combined with one side of the block E41 is formed.
42 and a diaphragm E43 and the like.

The block E41 has a nozzle E44 at the center.
And a cleaning liquid supply port E45 for supplying a cleaning liquid E (not shown) to the other end of each flow path at the large diameter portion of the nozzle E44.
A cleaning liquid supply port F46 for supplying a cleaning liquid F (not shown) is formed. A temperature sensor 26b for detecting the temperature of the mixed cleaning liquid is embedded inside the block on the tapered side of the nozzle E44.

The cross section of the block F42 is a thick tube having a step on the inside diameter, and two cooling medium passages are formed in the thick portion of the small inside diameter portion. One of the two coolant passages is a coolant inlet 47 and the other is a coolant outlet 48.

The blocks E41 and F42 are formed by combining the steps formed respectively. Further, a stepped diaphragm E43 is fixed to the step of the inner diameter of the block F42. A vibrator E49 is adhered to the distal end of the diaphragm E43 at the small diameter step with an adhesive 50. That is, in a state where the block E41 and the block F42 are combined, the large-diameter side of the nozzle E44 is separated and the diaphragm E43 is opposed to the nozzle E44.

The structure of the flow path of the liquid is such that the flow path of the cleaning liquid and the flow path of the cooling medium are partitioned by the diaphragm E43, and the cooling medium is partitioned by the diaphragm E43 and the small diameter portion of the vibrator E49. It flows through the flow path formed by the above.

A cleaning liquid tank and a pump are connected to the cleaning liquid supply port E45 and the cleaning liquid supply port F46, respectively, via a pipe as a cleaning liquid supply system (not shown) to constitute an ultrasonic processing apparatus. . The cleaning liquid tank storing the cleaning liquid F is provided with a heater for adjusting the temperature of the cleaning liquid F.

With these configurations, first, the pump is operated and the cleaning liquid E is supplied from the cleaning liquid tank to the cleaning liquid supply port E45.
Supply. The cleaning liquid E is, for example, a normal temperature hydrogen peroxide solution (including water). After a short delay, the pump is operated in the same manner, and the cleaning liquid F is supplied from the cleaning liquid tank to the cleaning liquid supply port F46.
Supply. The cleaning liquid F is, for example, sulfuric acid.

Further, a pump (not shown) is operated from the cooling medium inlet 47 to flow the cooling medium. Nozzle E4
Hydrogen peroxide solution which is the cleaning liquid E flowing into the cleaning liquid 4 and the cleaning liquid F
Is mixed and stirred in the nozzle E44 to become a high-temperature washing liquid due to heat of hydration, and is ejected from the tip of the nozzle E44. The surface of the vibration plate E43 that is in contact with the high-temperature cleaning liquid is heated by the high-temperature cleaning liquid, but the other surface is bonded to the vibrator E49, which is constantly cooled by a cooling medium, via an adhesive 50 and is cooled. . In this case, the adhesive 50
Similarly, the vibrator E constantly cooled by the cooling medium
Since the cooling is performed by the cooling device 49, the temperature rise is suppressed to a low level.

In this state, the diaphragm E49 is driven by the vibrator E49.
When 43 vibrates, ultrasonic vibration is applied to the high-temperature cleaning liquid.

The temperature of the mixed cleaning liquid is measured by a temperature sensor 26b provided outside the nozzle E44. As a result, when the temperature of the cleaning liquid F is lower than the set temperature, the heater is operated to increase the temperature of the mixed cleaning liquid, thereby raising the temperature of the mixed cleaning liquid to a predetermined temperature. It should be noted that the detection result of the temperature sensor 26b and the operation of the heater based on the result are stored in advance in a control unit (not shown) based on experimental data, and are controlled by the data.

FIG. 4 is a side sectional view of an ultrasonic nozzle unit 1c according to a second modification of the above-described second embodiment. That is, the ultrasonic nozzle unit 1c includes a block G61 in which a flow path between the cleaning liquid and the cooling medium is formed, a diaphragm G67 joined to one side of the block G61, and the like.

In the block G61, a nozzle G62 is formed in the center of the block G61, a flow path is connected to a large diameter portion of the nozzle G62, and a high-temperature cleaning liquid is supplied to the other end of the flow path. A cleaning liquid supply port G63 to be supplied is formed. The block G61 on the tapered side of the nozzle G62.
A temperature sensor 26c for detecting the temperature of the cleaning liquid is embedded therein. The large-diameter side of the nozzle G62 of the block G61 further extends in a thick cylindrical shape to form a cooling medium chamber 64. A cooling medium inlet G65 into which the cooling medium flows and a cooling medium outlet G66 from which the cooling medium flows out are formed in the thick portion.

The large-diameter portion of the nozzle G62 is sealed in a watertight manner by a diaphragm G67, and one end surface of the vibrator G68 is fixed to the diaphragm G67 with an adhesive 69. An aluminum heat sink 70 is joined to the other end face of the vibrator G68. Therefore, the cooling medium chamber 6
A vibrator G68 and a heat sink are housed in the cooling medium chamber 4, and a cooling medium flows into the cooling medium chamber 64 from a cooling medium inlet 65, and circulates through a cooling medium outlet 66. As the cooling medium, an electric insulator such as glycerin or a gas such as nitrogen or high-pressure air may be used.

Further, a pump is connected to the cleaning liquid supply port G63 via a pipe as a cleaning liquid supply system (not shown) to constitute an ultrasonic processing apparatus. The cleaning liquid tank storing the high-temperature cleaning liquid is provided with a heater for adjusting the temperature of the high-temperature cleaning liquid.

With these configurations, first, the pump is operated to supply the high-temperature cleaning liquid from the cleaning liquid tank to the cleaning liquid supply port G63. The high-temperature cleaning liquid is, for example, high-temperature aqueous hydrogen peroxide (including water).

Further, a pump (not shown) is operated from the cooling medium inlet G65 to flow the cooling medium. Nozzle G
The hydrogen peroxide solution, which is the high-temperature cleaning liquid flowing into the inside of the nozzle 62, is jetted from the tip of the nozzle G62. The surface of the vibration plate G67 that is in contact with the high-temperature cleaning liquid is heated by the high-temperature cleaning liquid, while the other surface is bonded to the vibrator G68, which is constantly cooled by a cooling medium, via an adhesive 69 and is cooled. . In this case, the adhesive 69 is also cooled by the vibrator G68 which is constantly cooled by the cooling medium, so that the temperature rise is kept low.

In this state, the diaphragm G68 is driven by the vibrator G68.
When the 67 vibrates, ultrasonic vibration is applied to the high-temperature cleaning liquid.

The temperature of the high-temperature cleaning solution is measured by a temperature sensor 26c provided outside the nozzle G62. As a result, when the temperature of the high-temperature cleaning liquid is lower than the set temperature, the heater is operated to raise the liquid temperature of the high-temperature cleaning liquid to a predetermined temperature. In addition, with respect to the detection result of the temperature sensor 26c and the operation of the heater based on the detection result, experimental data is stored in a control unit (not shown) in advance, and is controlled by the data.

In this embodiment, one liquid heated to a high temperature is used as the high-temperature cleaning liquid flowing into the nozzle G62. However, as in the first embodiment shown in FIG. 3, two liquids are introduced into the nozzle. Needless to say, the present invention can also be applied to a case where a high-temperature cleaning liquid is generated by the reaction.

When each of the above-mentioned ultrasonic nozzle units is used in an ultrasonic processing apparatus, if the cross-sectional shape of the nozzle is a slit, the conveying conveyer (not shown) provided below the nozzle is subjected to cleaning. The body is placed and transported, and the body to be cleaned is washed with a row of showers sprayed from a slit. Also,
When the cross-sectional shape of the nozzle is circular, the object to be cleaned is placed on the turntable 71 as shown in FIG. 5 and the turntable 71 is rotated. The cleaning is performed by moving in the direction A.

As described above, the ultrasonic nozzle unit and the ultrasonic processing apparatus using the same according to the structure of the present invention can use a high-temperature liquid as a cleaning liquid, and thus can perform highly efficient cleaning.

In the above embodiment, the cleaning step has been described, but the present invention can also be applied to a resist ashing or etching step.

[0070]

According to the present invention, since the processing liquid to which the ultrasonic vibration is applied from the ultrasonic nozzle unit is continuously jetted to the object to be processed, the processing is performed with extremely high processing efficiency. Can be.

[Brief description of the drawings]

FIG. 1 is a side sectional view of an ultrasonic nozzle unit according to a first embodiment of the present invention.

FIG. 2 is a side sectional view of an ultrasonic nozzle unit according to a second embodiment of the present invention.

FIG. 3 is a side sectional view of an ultrasonic nozzle unit according to a first modified example of the second embodiment of the present invention.

FIG. 4 is a side cross-sectional view of an ultrasonic nozzle unit according to a second modification of the second embodiment of the present invention.

FIG. 5 is a diagram illustrating the movement of an ultrasonic nozzle unit in the ultrasonic processing apparatus.

[Explanation of symbols]

1, 1a, 1b, 1c ... ultrasonic nozzle unit, 2,
3, 25, 44, 62 ... nozzles, 4, 5, 27, 28,
45, 46, 63 ... processing liquid supply ports, 8, 31, 49, 6
8: vibrator, 9, 23, 24, 43, 67: diaphragm, 1
0, 32, 50, 69 ... adhesive, 11, 26a, 26
b, 26c ... temperature sensor

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Hideaki Hirabayashi 33, Shinisogo-cho, Isogo-ku, Yokohama-shi, Kanagawa Prefecture Inside the Toshiba Production Technology Center (72) Inventor Daisuke Matsushima 1000-1, Kasama-cho, Sakae-ku, Yokohama-shi, Kanagawa F term in Shibaura Mechatronics Co., Ltd. (reference) 3B201 AA02 AA03 BB22 BB32 BB38 BB82 BB84 BB85 BB92 BB96 CB01 CD42 CD43

Claims (12)

[Claims] 1. An ultrasonic nozzle unit having a vibration plate for applying an ultrasonic wave to a processing liquid when processing a processing object by jetting a processing liquid from a nozzle, wherein the ultrasonic liquid is adhered to the vibration plate with an adhesive. With a fixed oscillator, and
An ultrasonic nozzle unit comprising cooling means for cooling the adhesive fixed. 2. The ultrasonic nozzle unit according to claim 1, wherein the processing liquid is generated by mixing plural kinds of liquids in the nozzle. 3. The ultrasonic nozzle unit according to claim 2, wherein the liquids to be mixed in the nozzle flow into the nozzle from separate inlets. 4. The ultrasonic nozzle unit according to claim 3, wherein the separate inlets communicate with separate nozzles, respectively, and the plurality of nozzles are formed in a nested state through a gap. 5. The ultrasonic nozzle unit according to claim 4, wherein the center lines of the plurality of nozzles do not coincide with each other. 6. The liquid mixed in the nozzle is a hydrogen peroxide solution and a sulfuric acid, and the sulfuric acid is caused to flow after the hydrogen peroxide solution is caused to flow into the nozzle. 2. The ultrasonic nozzle unit according to 2. 7. The ultrasonic nozzle unit according to claim 2, wherein the liquids mixed in the nozzle are processing liquids of the same component having different temperatures. 8. The ultrasonic nozzle unit according to claim 2, wherein the temperature of the processing solution mixed in the nozzle is measured by a temperature sensor. 9. The ultrasonic nozzle unit according to claim 1, wherein said cooling means has a cooling medium in contact with at least one of the diaphragm and the vibrator. 10. The ultrasonic nozzle unit according to claim 9, wherein the flow of the cooling medium and the flow of the processing liquid are separated by a diaphragm. 11. An ultrasonic processing apparatus comprising the ultrasonic nozzle unit according to claim 1. Description: 12. An ultrasonic processing method, comprising mixing a first processing liquid to which ultrasonic vibration is applied and a second processing liquid to which no ultrasonic vibration is applied to process an object to be processed. .