JP2001078298A - Microphone using light signal - Google Patents

Microphone using light signal

Info

Publication number
JP2001078298A
JP2001078298A JP22586699A JP22586699A JP2001078298A JP 2001078298 A JP2001078298 A JP 2001078298A JP 22586699 A JP22586699 A JP 22586699A JP 22586699 A JP22586699 A JP 22586699A JP 2001078298 A JP2001078298 A JP 2001078298A
Authority
JP
Japan
Prior art keywords
light
groove
transparent resin
substrate
emitting element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22586699A
Other languages
Japanese (ja)
Inventor
Masahiko Moriguchi
雅彦 森口
Tetsuo Inoue
哲郎 井上
Alexander Paritzky
パリツキー アレキサンダー
Alexander Kots
コッツ アレキサンダー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Phone Or Ltd
Original Assignee
Phone Or Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Phone Or Ltd filed Critical Phone Or Ltd
Priority to JP22586699A priority Critical patent/JP2001078298A/en
Publication of JP2001078298A publication Critical patent/JP2001078298A/en
Pending legal-status Critical Current

Links

Landscapes

  • Geophysics And Detection Of Objects (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

PROBLEM TO BE SOLVED: To eliminate the need for a setting margin and to increase the degree of integration in a substrate by sealing a light emitting element and a photodetector with transparent resin, inserting a light nontransmissive material into a groove formed at the prescribed position sealing part between both the elements, and adhering them together with the transparent resin. SOLUTION: On a substrate such as a printed board, an LED, etc., as a light emitting element and a photodiode, etc., as a photodetector are mounted by die bonding or wire bonding. Those are sealed with transparent resin such as epoxy and a groove of e.g. about 50 μm in width is formed in the sealing part between the light emitting element and photodetector by a device such as a dicing saw and a wire saw. A light nontransmissive material such as metallic foil or resin foil is inserted into the groove and sealed with transparent resin such as epoxy. In this process, positioning is done only once when the groove is formed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明のマイクロフォンは、
自動車電話、携帯電話に用いられる小型のマイクロフォ
ン分野及び侵入者による圧力変化を利用した侵入者検出
分野で用いられる。
BACKGROUND OF THE INVENTION The microphone of the present invention
It is used in the field of small microphones used in car phones and mobile phones, and in the field of intruder detection utilizing pressure changes by intruders.

【0002】[0002]

【従来の技術】光信号を利用したマイクロフォンは、基
板上に装着された発光・受光素子を透明樹脂で封止し、
封止部内には、発光・受光素子間に光非透過性膜を設け
ている。透明樹脂封止部外壁の光出射部、受光部となる
領域以外には、光非透過性膜が形成される。光出射部、
受光部上部には、音響,圧力等により振動する光反射性
を有すメンブラムがメンブラム支えによって保持されて
いる。発光素子からの光は、光出射部より出射され、受
光部より受光素子に至る。光出射部・受光部及びメンブ
ラム支え以外の部分は、メンブラムの振動を空気粘性に
より妨げない為、高さを低くしている。振動により、メ
ンブラム位置が移動すると反射位置も移動し、受光素子
出力が変化する。この出力をよみとることにより、音
響,圧力等を検出するというのが光信号を利用したマイ
クロフォンの原理である。特願平10−107427に
て述べている様に、発光・受光素子間の光非透過性膜
は、基板上に装着した発光素子、受光素子を透明性樹脂
で封止し、封止部を基板を含めて切断する工程と、少な
くとも一方の切断面に光非透過性膜を形成する工程と、
その後発光素子封止部及び受光素子封止部切断面を接着
一体化する工程とからなる製造方法により作製される。
切断面への膜形成は、蒸着等により形成される。この膜
は、発光素子からの光が直接、受光素子に到達すること
によるメンブラム振動によらないバイアス成分発生を防
止するためのものである。
2. Description of the Related Art A microphone using an optical signal seals a light emitting / receiving element mounted on a substrate with a transparent resin,
A light-impermeable film is provided between the light-emitting and light-receiving elements in the sealing portion. A light non-transmissive film is formed on the outer wall of the transparent resin sealing portion other than a region serving as a light emitting portion and a light receiving portion. Light emitting part,
A light-reflective membrane vibrating due to sound, pressure, or the like is held above the light-receiving portion by a membrane support. Light from the light emitting element is emitted from the light emitting part and reaches the light receiving element from the light receiving part. The portions other than the light emitting portion / light receiving portion and the membrane support are made low in height so that the vibration of the membrane is not hindered by air viscosity. When the membrane position moves due to the vibration, the reflection position also moves, and the output of the light receiving element changes. The principle of a microphone using an optical signal is to detect sound, pressure, and the like by reading this output. As described in Japanese Patent Application No. 10-107427, the light-impermeable film between the light-emitting and light-receiving elements is formed by sealing the light-emitting element and the light-receiving element mounted on the substrate with a transparent resin, and forming the sealing portion. The step of cutting including the substrate, and the step of forming a light-impermeable film on at least one cut surface,
Thereafter, a step of bonding and integrating the cut surface of the light emitting element sealing portion and the light receiving element sealing portion is performed.
The film is formed on the cut surface by vapor deposition or the like. This film is for preventing the generation of a bias component that does not depend on the membrane vibration due to the light from the light emitting element directly reaching the light receiving element.

【0003】[0003]

【発明が解決しようとする課題】従来の技術では、接着
一体化工程時に、セッティングの為の余裕しろが必要で
あり、基板内の集積度低の為高価であるという欠点を有
している。又、透明性樹脂封止部切断工程と、発光素子
封止部及び受光素子封止部の接着一体化する工程、2回
にて位置あわせ作業が必要であり、工程が複雑であっ
た。
The prior art has the disadvantage that it requires a margin for setting during the bonding and integration process, and is expensive due to the low degree of integration in the substrate. In addition, a transparent resin sealing section cutting step, a step of bonding and integrating the light emitting element sealing section and the light receiving element sealing section, and a positioning operation in two times are necessary, and the steps are complicated.

【0004】[0004]

【課題を解決するための手段】基板上に装着し発光素
子,受光素子を透明性樹脂で封止し、発光,受光素子間
の所定位置封止部に溝形成し、溝内に光非透過性物質を
挿入し、透明性樹脂で接着する。
A light-emitting element and a light-receiving element are mounted on a substrate, and the light-emitting element and the light-receiving element are sealed with a transparent resin. A groove is formed in a sealing portion at a predetermined position between the light-emitting and light-receiving elements. And insert it with a transparent resin.

【0005】[0005]

【発明の実施の形態】プリント基板等の基板上にLED
等を発光素子、フォトダイオード等を受光素子として、
ダイボンディング,ワイヤーボンディング作業を行い装
着する。これらをエポキシ等の透明性樹脂で封止する。
発光,受光素子間の封止部に、溝をダイシングソー,ワ
イヤーソー等の装置にて形成する。この溝内に金属箔、
樹脂箔等の光非透過性物質を挿入し、エポキシ等の透明
性樹脂で封止する。
DETAILED DESCRIPTION OF THE INVENTION An LED is mounted on a substrate such as a printed circuit board.
Etc. as light emitting elements, photodiodes etc. as light receiving elements,
Die-bonding and wire-bonding work is performed. These are sealed with a transparent resin such as epoxy.
A groove is formed in a sealing portion between the light emitting and light receiving elements by using a device such as a dicing saw or a wire saw. Metal foil in this groove,
A light-impermeable material such as a resin foil is inserted and sealed with a transparent resin such as epoxy.

【0006】[0006]

【実施例】プリント基板等の基板上にLED等を発光素
子,フォトダイオード等を受光素子として、ダイボンデ
ィング,ワイヤーボンディング作業を行い装着する。従
来の接着一体化セッティング余裕しろ相当部分にも、発
光・受光素子を装着し、集積度を高める。装着した発光
・受光素子をエポキシ等の透明性樹脂で封止する。次に
発光・受光素子封止部の所定位置に、溝をダイシングソ
ー・ワイヤーソー等の装置にて形成する。実施例を示し
た図1では、溝は、基板内部に至っているが、これは箔
の固定を容易にするためのものであり、必ずしも基板内
部に至る必要はない。溝形成時には、位置あわせ作業を
行う。又、溝幅は、ダイシングソーブレード厚又は、ワ
イヤーソーワイヤー径で定まり、50μm幅程度の溝は
容易に形成できる。この溝内に金属箔、樹脂箔等の光非
透過性物質を挿入し、エポキシ等の透過性樹脂で封止す
る。例えば、金属箔は、10μm厚ステンレス箔等が市
販されており、容易に入手可能である。又、上記で明ら
かな様に、本工程で位置あわせ作業は、溝形成時の1回
のみである。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Die bonding and wire bonding are carried out on a substrate such as a printed circuit board by using an LED or the like as a light emitting element and a photodiode or the like as a light receiving element. Light-emitting / light-receiving elements are also installed in the area where there is a margin for the conventional adhesive integrated setting to increase the degree of integration. The mounted light-emitting and light-receiving elements are sealed with a transparent resin such as epoxy. Next, a groove is formed at a predetermined position of the light-emitting / light-receiving element sealing portion using a device such as a dicing saw or a wire saw. In FIG. 1 showing the embodiment, the groove extends to the inside of the substrate, but this is for facilitating fixing of the foil, and does not necessarily need to reach to the inside of the substrate. When forming the groove, an alignment operation is performed. The groove width is determined by the thickness of the dicing saw blade or the diameter of the wire saw wire, and a groove having a width of about 50 μm can be easily formed. A light-impermeable material such as a metal foil or a resin foil is inserted into the groove, and sealed with a transparent resin such as epoxy. For example, as the metal foil, a stainless steel foil having a thickness of 10 μm or the like is commercially available and easily available. In addition, as is apparent from the above, the positioning operation in this step is performed only once when forming the groove.

【0007】[0007]

【発明の効果】本発明により、従来の接着一体化工程時
のセッティング余裕しろが不要となり、基板内集積度が
増加する。又、位置あわせ作業2回であったものが1回
となり、工程が単純化される。
According to the present invention, the setting margin in the conventional bonding and integrating process is not required, and the degree of integration in the substrate is increased. In addition, the positioning operation is performed twice, but is performed once, thereby simplifying the process.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に於ける光信号を利用したマイクロフォ
ンの実施例を示したものである。
FIG. 1 shows an embodiment of a microphone using an optical signal according to the present invention.

【符号の説明】[Explanation of symbols]

1 発光素子 2 受光素子 3 基板 4 メンブラム支え 5 メンブラム 6 光非透過性物質 7 光出射部 8 受光部 9 透明性樹脂 10 溝 11 光非透過性膜 DESCRIPTION OF SYMBOLS 1 Light-emitting element 2 Light-receiving element 3 Substrate 4 Membrane support 5 Membrane 6 Light-impermeable material 7 Light-emitting part 8 Light-receiving part 9 Transparent resin 10 Groove 11 Light-impermeable film

───────────────────────────────────────────────────── フロントページの続き (72)発明者 アレキサンダー パリツキー イスラエル国 オア−イーダ 60252 ピ ー.オー.ボックス 323 フォーン−オ ーアール リミテッド内 (72)発明者 アレキサンダー コッツ イスラエル国 オア−イーダ 60252 ピ ー.オー.ボックス 323 フォーン−オ ーアール リミテッド内 Fターム(参考) 5D021 DD04  ──────────────────────────────────────────────────続 き Continuation of front page (72) Inventor Alexander Palitsky O-Ida, Israel 60252 Oh. Box 323 Phone-Oars Limited (72) Inventor Alexander Kotz O-Ida, Israel 60252 Oh. Box 323 Phone-OR Limited F-term (reference) 5D021 DD04

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 発光素子、受光素子、これらを装着する
基板及びメンブラムよりなる光信号を利用したマイクロ
フォンに於いて、基板上に装着した発光素子、受光素子
を透明性樹脂で封止し、発光・受光素子間の封止部に溝
形成し、溝内に光非透過性物質を挿入し、透明性樹脂で
接着したことを特徴とする光信号を利用したマイクロフ
ォンの製造方法。
1. A light-emitting element, a light-receiving element, a substrate on which these are mounted, and a microphone using an optical signal composed of a membrane, wherein the light-emitting element and the light-receiving element mounted on the substrate are sealed with a transparent resin to emit light. A method of manufacturing a microphone using an optical signal, wherein a groove is formed in a sealing portion between light receiving elements, a light-impermeable material is inserted into the groove, and the light-transmitting material is adhered with a transparent resin.
JP22586699A 1999-08-10 1999-08-10 Microphone using light signal Pending JP2001078298A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22586699A JP2001078298A (en) 1999-08-10 1999-08-10 Microphone using light signal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22586699A JP2001078298A (en) 1999-08-10 1999-08-10 Microphone using light signal

Publications (1)

Publication Number Publication Date
JP2001078298A true JP2001078298A (en) 2001-03-23

Family

ID=16836084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22586699A Pending JP2001078298A (en) 1999-08-10 1999-08-10 Microphone using light signal

Country Status (1)

Country Link
JP (1) JP2001078298A (en)

Similar Documents

Publication Publication Date Title
JP4837708B2 (en) ELECTRONIC COMPONENT, MANUFACTURING METHOD THEREOF, AND ELECTRONIC DEVICE PROVIDED WITH ELECTRONIC COMPONENT
JP2008051764A (en) Range finding sensor, and electronic device having sensor mounted
JPH08330608A (en) Light reception sensor and light reception optical sensor
JP2007201360A (en) Photo-reflector device
JP2007019107A (en) Semiconductor device and its manufacturing method
JPH07202152A (en) Solid-state image pickup device
JP4662930B2 (en) Optical sensor device and corresponding manufacturing method
JP2009295834A (en) Semiconductor device, and method for manufacturing thereof
JP2015026803A (en) Optical module and method for manufacturing the same
JP2006237051A (en) Method of manufacturing semiconductor device
US10012828B2 (en) Assembly body for micromirror chips, mirror device and production method for a mirror device
US20210172862A1 (en) Emitter Package for a Photoacoustic Sensor
JP2001078298A (en) Microphone using light signal
JP2007109851A (en) Photo interrupter
JP4259979B2 (en) Light transmissive cover, device provided with the same, and manufacturing method thereof
US20020121016A1 (en) Microphone utilizing optical signal
EP1239699A1 (en) Microphone utilizing optical signal
JPH11308679A (en) Optical microphone
US20020021813A1 (en) Optical microphone
JP3068528U (en) Microphone using optical signal
JPH1041539A (en) Structure of inflared ray transmitting/receiving module
JP3140968U (en) Optical mouse module packaging
JP2005045720A (en) Optical microphone and its manufacturing method
US20070029472A1 (en) Light emitting and receiving integrated device and optical disk apparatus
JPH11177125A (en) Device for optical communication and its manufacture