JPH11308679A - Optical microphone - Google Patents

Optical microphone

Info

Publication number
JPH11308679A
JPH11308679A JP10742798A JP10742798A JPH11308679A JP H11308679 A JPH11308679 A JP H11308679A JP 10742798 A JP10742798 A JP 10742798A JP 10742798 A JP10742798 A JP 10742798A JP H11308679 A JPH11308679 A JP H11308679A
Authority
JP
Japan
Prior art keywords
light
emitting element
receiving element
film
light emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10742798A
Other languages
Japanese (ja)
Inventor
Takumi Matsushima
巧 松島
Masahiko Moriguchi
雅彦 森口
Tetsuo Inoue
哲郎 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Ceramic Co Ltd
Original Assignee
Nippon Ceramic Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Ceramic Co Ltd filed Critical Nippon Ceramic Co Ltd
Priority to JP10742798A priority Critical patent/JPH11308679A/en
Publication of JPH11308679A publication Critical patent/JPH11308679A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To attain high performance by cutting a sealing part with a base, forming an optically non-translucent film to a cut face, adhering a cut face of a light-emitting element sealing part and a cut face of a light-receiving element to the film integrally so as to avoid direct light from the light-emitting element to the light-receiving element that is a cause to a bias. SOLUTION: A light-emitting element 1 and a light-receiving element 2 mounted on a board 3 are sealed by a transparent resin 9, and the sealed part is cut off together with the base. At least an optical non-translucent film 6 is formed to one cut face. Since a formed face is exposed in the film, the film is easily formed without defects by any of methods such as coating or mounting or the like. The cut face of the sealing part of the light-emitting element and the light-receiving element is adhered to the film integrally. According to this manufacturing method, the complete optical non-translucent film 6 is formed between the light-emitting element 1 and the light-received element 2 and direct light from the light-emitting element 1 to the light-receiving element 2 is prevented and a problem of production of a bias component is solved.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明のマイクロフォンは、
自動車電話、携帯電話等に用いられる小型のマイクロフ
ォン分野及び侵入者による圧力変化を利用した侵入者検
出分野で用いられる。
BACKGROUND OF THE INVENTION The microphone of the present invention
It is used in the field of small microphones used in car phones, mobile phones, and the like, and in the field of intruder detection utilizing pressure changes caused by intruders.

【0002】[0002]

【従来の技術】光マイクロフォンは、基板上に装着され
た発光・受光素子を透明樹脂で封止し、封止部内には、
発光・受光素子間に光非透過性膜を設けている。透明樹
脂封止部外壁の光出射部,受光部となる領域以外には、
光非透過性膜が形成される。光出射部、受光部上部に
は、音響,圧力等により振動する光反射性を有すメンブ
ラム膜がメンブラム支えによって保持されている。発光
素子からの光は、光出射部より出射され、メンブラム膜
で反射され、受光部より受光素子に至る。振動によりメ
ンブラム膜位置が移動すると反射位置も移動し、受光素
子出力が変化する。この出力を読みとることにより、音
響,圧力等を検出するというのが光マイクロフォンの原
理である。この光マイクロフォンの概念図を示したもの
が図2である。従来の光マイクロフォンにては、透明樹
脂封止部の光非透過性膜は、ダイシングソー,ワイヤソ
ー等で幅0.1mm程度の溝を形成し、この溝の壁に光
非透過性材料を塗布、蒸着するといった方法が採用され
ている。塗布にては、気胞の影響により、また、蒸着に
ては溝部深部まで膜を形成することが困難であり、完全
な光非透過性膜を形成できず、発光素子の光が直接受光
素子に至りバイアス成分となり、結果として信号成分が
小さくなっていた。また、光出射部,受光部は、透明樹
脂封止部を一度円錐,多角錐状に加工し、次に外壁全面
に光非透過性膜を塗布した後、研磨により平面化する方
法で作製されている。この方法は、研磨量誤差により、
光マイクロフォン性能に寄与する光出射部,受光部面積
を安定して作製することができないという欠点を有して
いる。
2. Description of the Related Art In an optical microphone, a light emitting / receiving element mounted on a substrate is sealed with a transparent resin.
A light-impermeable film is provided between the light-emitting and light-receiving elements. Except for the light emitting part and light receiving part on the outer wall of the transparent resin sealing part,
A light-impermeable film is formed. Above the light emitting portion and the light receiving portion, a membrane having light reflectivity that vibrates due to sound, pressure, or the like is held by a membrane support. Light from the light emitting element is emitted from the light emitting part, reflected by the membrane film, and reaches the light receiving element from the light receiving part. When the membrane film position moves due to vibration, the reflection position also moves, and the output of the light receiving element changes. The principle of the optical microphone is to detect sound, pressure and the like by reading this output. FIG. 2 shows a conceptual diagram of this optical microphone. In a conventional optical microphone, the light-impermeable film of the transparent resin sealing portion is formed with a groove having a width of about 0.1 mm using a dicing saw, a wire saw, or the like, and a light-impermeable material is applied to the walls of the groove. And vapor deposition. In application, it is difficult to form a film to the deep part of the groove due to the effect of air bubbles, and in vapor deposition, it is not possible to form a complete light-impermeable film, and light from the light emitting element is directly transmitted to the light receiving element. As a result, a bias component was generated, and as a result, a signal component was reduced. The light emitting portion and the light receiving portion are manufactured by processing the transparent resin sealing portion once into a conical or polygonal pyramid shape, then applying a light non-transmissive film over the entire outer wall, and then planarizing by polishing. ing. This method, due to the polishing amount error,
There is a drawback that the light emitting portion and the light receiving portion area which contribute to the performance of the optical microphone cannot be manufactured stably.

【0003】[0003]

【発明が解決しようとする課題】本発明は、信号成分
小,生産安定性低という従来技術欠点を解決することを
目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to solve the conventional disadvantages of small signal components and low production stability.

【0004】[0004]

【課題を解消するための手段】基板上に装着した発光素
子、受光素子を透明性樹脂で封止し、封止部を基板を含
めて切断する工程と、少なくとも一方の切断面に光非透
過性膜を形成する工程と、その後発光素子封止部及び受
光素子封止部切断面を接着一体化する工程とからなる製
造方法により、バイアス成分が減じられ結果として信号
成分が大となる。また、発光素子、受光素子を内蔵する
透明性樹脂封止部上部を平面とし、この平面内に多角柱
又は円柱の突出部を設け、突出部を光出射部,受光部と
する構造を採用することにより、光出射部,受光部面積
の生産安定性低という欠点は解消される。
A light-emitting element and a light-receiving element mounted on a substrate are sealed with a transparent resin, and the sealing portion is cut including the substrate, and at least one cut surface is non-transparent. The bias component is reduced by the manufacturing method including the step of forming the conductive film and the step of bonding and integrating the cut surface of the light emitting element sealing portion and the light receiving element sealing portion thereafter, resulting in an increase in the signal component. In addition, a structure is adopted in which the upper part of the transparent resin sealing portion in which the light emitting element and the light receiving element are built is a plane, and a polygonal column or a columnar projection is provided in this plane, and the projections are a light emitting section and a light receiving section. This eliminates the disadvantage that the production stability of the light emitting portion and the light receiving portion is low.

【0005】[0005]

【発明の実施の形態】基板上に装着した発光素子、受光
素子を透明性樹脂で封止し、封止部基板を含めて切断す
る。少なくとも一方の切断面に光非透過性膜を形成す
る。この膜形成は、形成面が露出しているため、塗布・
装着等いずれの方法にても容易且つ欠陥のない膜が形成
される。その後、発光素子封止部及び受光素子封止部切
断面を接着一体化する。この製造方法により、発光素
子,受光素子間に完全な光非透過性膜が形成され、発光
素子からの光が直接受光素子に到達することが防止され
バイアス成分発生は解決される。また、発光素子,受光
素子を内蔵する透明性樹脂封止部上部を平面とし、この
平面内に多角柱又は、円柱の突出部を設ける。透明性樹
脂封止部外壁全面に光非透過膜を塗布,蒸着といった方
法で形成する。その後、研磨を行い光出射部,受光部を
作製する。この方法では、研磨量誤差があっても光出射
部,受光部面積は変動せず、この部の面積安定性は高く
なる。
BEST MODE FOR CARRYING OUT THE INVENTION A light emitting element and a light receiving element mounted on a substrate are sealed with a transparent resin and cut including the sealing substrate. A light-impermeable film is formed on at least one cut surface. In this film formation, since the formation surface is exposed,
A film that is easy and free from defects is formed by any method such as mounting. Thereafter, the cut surface of the light emitting element sealing portion and the light receiving element sealing portion are bonded and integrated. According to this manufacturing method, a complete light non-transmissive film is formed between the light emitting element and the light receiving element, light from the light emitting element is prevented from directly reaching the light receiving element, and generation of a bias component is solved. The upper part of the transparent resin sealing portion containing the light emitting element and the light receiving element is a flat surface, and a polygonal column or a columnar projection is provided in this plane. A light non-transmissive film is formed on the entire outer wall of the transparent resin sealing portion by a method such as coating or vapor deposition. Thereafter, polishing is performed to produce a light emitting portion and a light receiving portion. In this method, even if there is a polishing amount error, the area of the light emitting portion and the light receiving portion does not change, and the area stability of this portion increases.

【0006】[0006]

【実施例】プリント基板等の基板上にLED等を発光素
子、フォトダイオード等を受光素子として、ダイボンデ
ィング,ワイヤーボンディング作業を行い装着する。こ
れらをエポキシ等の透明性樹脂で封止する。封止部をダ
イシングソー,ワイヤソー等の半導体製造装置にて基板
も含めて切断する。少なくとも一方の切断面に光非透過
性膜を形成する。これは、形成面が露出しているため塗
布,装着等いずれの方法にても容易且つ欠陥のない膜が
形成される。その後、発光素子封止部及び受光素子封止
部切断面を接着一体化する。また、発光素子,受光素子
を内蔵する透明性樹脂封止部をダイシングソー,ワイヤ
ソー等を用いて平面とする。このとき加工を行わない領
域を設けると、その部分は多角柱突出部が得られる。同
様に、機械旋盤を用いると円柱突出部と平面が得られ
る。この多角柱,円柱は容易に且つ高精度なものが得ら
れる。次に、透明性樹脂封止部外壁全面に光非透過性膜
を塗布、装着といった方法にて形成する。その後研磨を
行うと光出射部,受光部が作製され、その他の外壁は光
非透過性膜にて覆われている状態となる。図1は、本発
明実施例にて作製した光マイクロフォンの概念図であ
る。図1は、透明樹脂封止部を基板を含めて切断し、光
非透過膜を形成し、接着一体化後、平面を設け、さらに
円柱又は多角柱を形成した例を示している。平面を設
け、さらに多角柱又は円柱を設け、これを光出射部,受
光部とする方法は、バイアス成分が許容範囲内であれ
ば、従来の溝作製し溝部に光非透過性膜を作製する方法
にも適用される。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Die bonding and wire bonding are carried out on a substrate such as a printed circuit board using a LED or the like as a light-emitting element and a photodiode or the like as a light-receiving element. These are sealed with a transparent resin such as epoxy. The sealing portion is cut along with the substrate using a semiconductor manufacturing device such as a dicing saw or a wire saw. A light-impermeable film is formed on at least one cut surface. Since the formation surface is exposed, a film which is easy and has no defect can be formed by any method such as coating and mounting. Thereafter, the cut surface of the light emitting element sealing portion and the light receiving element sealing portion are bonded and integrated. Further, the transparent resin sealing portion containing the light emitting element and the light receiving element is made flat by using a dicing saw, a wire saw or the like. At this time, if a region where processing is not performed is provided, a polygonal column protruding portion is obtained at that portion. Similarly, the use of a mechanical lathe provides cylindrical projections and planes. These polygonal columns and cylinders can be obtained easily and with high precision. Next, a light-impermeable film is formed on the entire outer wall of the transparent resin sealing portion by a method such as coating and mounting. Thereafter, when polishing is performed, a light emitting portion and a light receiving portion are manufactured, and the other outer walls are in a state of being covered with a light non-transmissive film. FIG. 1 is a conceptual diagram of an optical microphone manufactured in an embodiment of the present invention. FIG. 1 shows an example in which a transparent resin sealing portion is cut including a substrate, a light-impermeable film is formed, a surface is provided after bonding and integration, and a column or a polygonal column is further formed. A method of providing a flat surface, further providing a polygonal column or a cylinder, and using them as a light emitting portion and a light receiving portion is to form a conventional groove and form a light-impermeable film in the groove portion if the bias component is within an allowable range. The method also applies.

【0007】[0007]

【発明の効果】以上述べたように、本発明により、バイ
アス原因となる発光素子から直接受光素子に至る光がな
くなり高性能となる。また、光出射部,受光部面積を一
定とした生産が可能となる。
As described above, according to the present invention, there is no light from the light emitting element, which causes a bias, directly to the light receiving element, and high performance is achieved. Further, it is possible to produce the light emitting portion and the light receiving portion with a constant area.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明における光マイクロフォンの実施例を示
したものである。
FIG. 1 shows an embodiment of an optical microphone according to the present invention.

【図2】光マイクロフォンの構成概念図である。FIG. 2 is a conceptual diagram of a configuration of an optical microphone.

【符号の説明】[Explanation of symbols]

1 発光素子 2 受光素子 3 基板 4 メンブラム支え 5 メンブラム 6 光非透過性膜 7 光出射部 8 受光部 9 透明性樹脂 DESCRIPTION OF SYMBOLS 1 Light emitting element 2 Light receiving element 3 Substrate 4 Membrane support 5 Membrane 6 Light non-transmissive film 7 Light emitting part 8 Light receiving part 9 Transparent resin

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 発光素子、受光素子、これらを装着する
基板及びメンブラム膜よりなる光マイクロフォンにおい
て、基板上に装着した発光素子、受光素子を透明性樹脂
で封止し、封止部を基板を含めて切断する工程と、少な
くとも一方の切断面に光非透過性膜を形成する工程と、
その後発光素子封止部及び受光素子封止部の切断面を接
着一体化する工程とからなる光マイクロフォンの製造方
法。
An optical microphone comprising a light emitting element, a light receiving element, a substrate on which the light emitting element and the light receiving element are mounted, and a membrane film, wherein the light emitting element and the light receiving element mounted on the substrate are sealed with a transparent resin, and the sealing portion is formed on the substrate. Cutting and including, forming a light-impermeable film on at least one cut surface,
And thereafter bonding and integrating the cut surfaces of the light emitting element sealing portion and the light receiving element sealing portion.
【請求項2】 発光素子、受光素子、メンブラム膜よりな
る光マイクロフォンにおいて発光素子、受光素子を内蔵
する透明性樹脂封止部上部を平面とし、この平面内に多
角柱又は円柱の突出部を設け、突出部を光出射部,受光
部としたことを特徴とする光マイクロフォン。
2. An optical microphone comprising a light-emitting element, a light-receiving element, and a membrane film, wherein the upper surface of a transparent resin sealing portion incorporating the light-emitting element and the light-receiving element is a plane, and a polygonal column or a cylindrical projection is provided in the plane. An optical microphone, wherein the projecting portion is a light emitting portion and a light receiving portion.
JP10742798A 1998-04-17 1998-04-17 Optical microphone Pending JPH11308679A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10742798A JPH11308679A (en) 1998-04-17 1998-04-17 Optical microphone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10742798A JPH11308679A (en) 1998-04-17 1998-04-17 Optical microphone

Publications (1)

Publication Number Publication Date
JPH11308679A true JPH11308679A (en) 1999-11-05

Family

ID=14458881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10742798A Pending JPH11308679A (en) 1998-04-17 1998-04-17 Optical microphone

Country Status (1)

Country Link
JP (1) JPH11308679A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1098547A2 (en) * 1999-10-27 2001-05-09 Phone-Or Ltd Microphone
EP1239699A1 (en) * 2001-03-05 2002-09-11 Phone-Or Ltd Microphone utilizing optical signal
JP2005203944A (en) * 2004-01-14 2005-07-28 Toshiba Corp Optical microphone and manufacturing method thereof
US8796589B2 (en) 2001-07-15 2014-08-05 Applied Materials, Inc. Processing system with the dual end-effector handling

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1098547A2 (en) * 1999-10-27 2001-05-09 Phone-Or Ltd Microphone
EP1098547A3 (en) * 1999-10-27 2002-09-11 Phone-Or Ltd Microphone
EP1239699A1 (en) * 2001-03-05 2002-09-11 Phone-Or Ltd Microphone utilizing optical signal
US8796589B2 (en) 2001-07-15 2014-08-05 Applied Materials, Inc. Processing system with the dual end-effector handling
US10665476B2 (en) 2001-07-15 2020-05-26 Applied Materials, Inc. Substrate processing system, valve assembly, and processing method
JP2005203944A (en) * 2004-01-14 2005-07-28 Toshiba Corp Optical microphone and manufacturing method thereof

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