JP2001069594A - Ultrasonic wave probe - Google Patents
Ultrasonic wave probeInfo
- Publication number
- JP2001069594A JP2001069594A JP24021999A JP24021999A JP2001069594A JP 2001069594 A JP2001069594 A JP 2001069594A JP 24021999 A JP24021999 A JP 24021999A JP 24021999 A JP24021999 A JP 24021999A JP 2001069594 A JP2001069594 A JP 2001069594A
- Authority
- JP
- Japan
- Prior art keywords
- acoustic
- matching layer
- adhesive layer
- ultrasonic probe
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 title claims abstract description 51
- 239000010410 layer Substances 0.000 claims abstract description 66
- 239000012790 adhesive layer Substances 0.000 claims abstract description 51
- 239000000853 adhesive Substances 0.000 claims description 26
- 230000001070 adhesive effect Effects 0.000 claims description 26
- 229920006254 polymer film Polymers 0.000 claims description 20
- 229920000642 polymer Polymers 0.000 claims description 5
- 125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 claims description 5
- 125000004093 cyano group Chemical group *C#N 0.000 claims description 2
- 239000004593 Epoxy Substances 0.000 claims 1
- 230000006866 deterioration Effects 0.000 abstract description 8
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 239000002356 single layer Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 description 16
- 229920002379 silicone rubber Polymers 0.000 description 16
- 239000004945 silicone rubber Substances 0.000 description 16
- 230000000694 effects Effects 0.000 description 8
- 239000003822 epoxy resin Substances 0.000 description 8
- 229920000647 polyepoxide Polymers 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 230000003628 erosive effect Effects 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- VRBFTYUMFJWSJY-UHFFFAOYSA-N 28804-46-8 Chemical compound ClC1CC(C=C2)=CC=C2C(Cl)CC2=CC=C1C=C2 VRBFTYUMFJWSJY-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N Acrylic acid Chemical compound OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000249 desinfective effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- -1 polyparaxylylene Polymers 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920002631 room-temperature vulcanizate silicone Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/02—Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/18—Methods or devices for transmitting, conducting or directing sound
- G10K11/26—Sound-focusing or directing, e.g. scanning
- G10K11/30—Sound-focusing or directing, e.g. scanning using refraction, e.g. acoustic lenses
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Mechanical Engineering (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、圧電素子と、音響
整合層と、音響レンズとが、順に積層されている超音波
探触子に係り、特に超音波の伝搬損失による特性劣化を
改善し、感度特性の向上を図ることができる超音波探触
子に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic probe in which a piezoelectric element, an acoustic matching layer, and an acoustic lens are sequentially laminated, and more particularly to an improvement in characteristic deterioration due to propagation loss of ultrasonic waves. The present invention relates to an ultrasonic probe capable of improving sensitivity characteristics.
【０００２】[0002]
【従来の技術】従来の超音波探触子としては、例えば特
開平9-149496号公報に記載されているように、圧電素子
と、音響整合層と、音響レンズとが、順に積層された超
音波探触子が知られている。なお、以下の説明におい
て、超音波探触子の前方とは超音波が被検体に向けて放
射される方向を意味する。2. Description of the Related Art As a conventional ultrasonic probe, for example, as described in JP-A-9-149496, an ultrasonic probe in which a piezoelectric element, an acoustic matching layer, and an acoustic lens are sequentially laminated is described. Acoustic probes are known. In the following description, the front of the ultrasonic probe means the direction in which ultrasonic waves are emitted toward the subject.
【０００３】図５は、このような超音波探触子の概略断
面図を示している。この超音波探触子は、電気音響変換
素子である圧電素子６と、圧電素子６の前面に積層され
た１層若しくは２層以上（図示は２層の場合）の音響整
合層７と、音響整合層７の前面に接着剤層８を介して積
層された音響レンズ９とからなる。FIG. 5 is a schematic sectional view of such an ultrasonic probe. The ultrasonic probe includes a piezoelectric element 6 which is an electroacoustic transducer, one or two or more acoustic matching layers 7 (in the case of two layers shown) laminated on the front surface of the piezoelectric element 6, and an acoustic transducer. An acoustic lens 9 laminated on the front surface of the matching layer 7 with an adhesive layer 8 interposed therebetween.
【０００４】音響整合層７は例えばエポキシ樹脂などの
材料で構成されており、圧電素子６と被検体とを音響的
に整合させる機能を有する。音響レンズ９は例えばシリ
コーンゴムなどの材料で構成されており、超音波の集
束、発散、偏向を行う。接着剤層８はシリコーンゴムを
用いた接着剤からなる。The acoustic matching layer 7 is made of, for example, a material such as an epoxy resin and has a function of acoustically matching the piezoelectric element 6 with a subject. The acoustic lens 9 is made of, for example, a material such as silicone rubber, and focuses, diverges, and deflects ultrasonic waves. The adhesive layer 8 is made of an adhesive using silicone rubber.
【０００５】音響整合層７の前面上に設けるシリコーン
ゴム製の音響レンズ９は、室温硬化タイプ（RTV）のシ
リコーンゴムの場合には、音響整合層７の前面上に直接
流し込むことで音響レンズ９を構成させることができる
が、このRTVタイプのシリコーンゴムは耐摩耗性が低い
ために、現在はあまり使用されていない。現在使用され
ているシリコーンゴム製の殆どの音響レンズ９は、耐摩
耗性が高い、高温で加圧して加硫させるタイプ（HTV）
である。この音響レンズ９は成形した後で、音響整合層
７の前面上に接着剤層８で固定することで、図４に示す
ように積層している。[0005] In the case of a room temperature curing type (RTV) silicone rubber, the acoustic lens 9 made of silicone rubber provided on the front surface of the acoustic matching layer 7 is directly poured onto the front surface of the acoustic matching layer 7. However, this RTV type silicone rubber is not widely used at present because of its low abrasion resistance. Most acoustic lenses 9 made of silicone rubber currently in use have high abrasion resistance and are vulcanized by pressing at high temperatures (HTV).
It is. After being molded, the acoustic lens 9 is laminated on the front surface of the acoustic matching layer 7 with an adhesive layer 8 as shown in FIG.
【０００６】以上の構成を有する超音波探触子におい
て、圧電素子６より発生する超音波は、音響整合層７、
接着剤層８、音響レンズ９を介して被検体に照射され
る。また被検体で反射した超音波は音響レンズ９、接着
剤層８、音響整合層７を介して圧電素子６により受信さ
れ、電気信号に変換され、処理される。In the ultrasonic probe having the above configuration, the ultrasonic waves generated by the piezoelectric element 6 are transmitted to the acoustic matching layer 7,
The subject is irradiated via the adhesive layer 8 and the acoustic lens 9. The ultrasonic wave reflected by the subject is received by the piezoelectric element 6 via the acoustic lens 9, the adhesive layer 8, and the acoustic matching layer 7, converted into an electric signal, and processed.
【０００７】超音波探触子を構成する圧電素子６、音響
整合層７、音響レンズ９は、各々の材料特有の固有音響
インピーダンスを持ち、前記固有音響インピーダンス
は、その材料の密度と音速との積で表される。例えば、
音響整合層７の固有音響インピーダンスは約３MRayl、
音響レンズ９は被検体の固有音響インピーダンスに近い
値である1.4〜1.6MRayl、接着剤層８は接着強度が高い
接着剤が選択されるために、厚みをあまり薄くすること
ができず、また固有音響インピーダンスは１〜1.2MRayl
のものが使用されていた。The piezoelectric element 6, the acoustic matching layer 7, and the acoustic lens 9 constituting the ultrasonic probe have a specific acoustic impedance specific to each material, and the specific acoustic impedance depends on the density and sound speed of the material. Expressed by the product. For example,
The specific acoustic impedance of the acoustic matching layer 7 is about 3 MRayl,
The acoustic lens 9 is 1.4 to 1.6 MRayl, which is a value close to the inherent acoustic impedance of the subject, and the adhesive layer 8 cannot be made too thin because an adhesive having a high adhesive strength is selected. Acoustic impedance is 1 to 1.2 MRayl
Was used.
【０００８】[0008]
【発明が解決しようとする課題】しかしながら、上記従
来の超音波探触子は、音響整合層７と音響レンズ９との
間に設ける接着剤層８の固有音響インピーダンスが、音
響整合層７の固有音響インピーダンスと音響レンズ９の
固有音響インピーダンスとの間の値ではなく、それらよ
りも小さな値である。このため、接着剤層８と音響整合
層７および音響レンズ９とのそれぞれの界面において音
響的不整合が生じ、超音波の伝搬損失を起こし、超音波
探触子の感度を劣化させるという問題がある。さらに、
接着剤層８の厚みにより、超音波探触子の周波数特性に
悪影響を及ぼすという問題がある。However, in the above-described conventional ultrasonic probe, the specific acoustic impedance of the adhesive layer 8 provided between the acoustic matching layer 7 and the acoustic lens 9 is limited to the specific acoustic impedance of the acoustic matching layer 7. It is not a value between the acoustic impedance and the specific acoustic impedance of the acoustic lens 9, but a value smaller than them. For this reason, an acoustic mismatch occurs at each interface between the adhesive layer 8 and the acoustic matching layer 7 and the acoustic lens 9, causing a propagation loss of ultrasonic waves and deteriorating the sensitivity of the ultrasonic probe. is there. further,
There is a problem that the thickness of the adhesive layer 8 adversely affects the frequency characteristics of the ultrasonic probe.
【０００９】本発明は、上記従来の問題を解決するもの
で、音響整合層と音響レンズとの間に形成した接着剤層
による音響的不整合の発生の防止と、周波数特性劣化の
防止が可能な超音波探触子を提供することを目的とす
る。The present invention solves the above-mentioned conventional problems, and can prevent the occurrence of acoustic mismatch due to the adhesive layer formed between the acoustic matching layer and the acoustic lens and the deterioration of frequency characteristics. It is an object to provide a simple ultrasonic probe.
【００１０】[0010]
【課題を解決するための手段】本発明の超音波探触子
は、圧電素子と、前記圧電素子の前面に積層された音響
整合層と、前記音響整合層の前面に接着剤層を介して積
層された音響レンズとを備えた超音波探触子において、
前記音響整合層の固有音響インピーダンスＺM(MRayl)、
前記音響レンズの固有音響インピーダンスＺL(MRayl)、
前記接着剤層の固有音響インピーダンスＺB(MRayl)がＺ
M≧ＺB≧ＺLなる関係を有する。この構成により、音響
的不整合をなくして超音波を効率よく送受信し、しかも
周波数特性の劣化を防止することができる。An ultrasonic probe according to the present invention comprises a piezoelectric element, an acoustic matching layer laminated on the front surface of the piezoelectric element, and an adhesive layer on the front surface of the acoustic matching layer. In an ultrasonic probe having a laminated acoustic lens,
Specific acoustic impedance Z M (MRayl) of the acoustic matching layer,
Specific acoustic impedance Z L (MRayl) of the acoustic lens,
The specific acoustic impedance Z B (MRayl) of the adhesive layer is Z
Having M ≧ Z B ≧ Z L the relationship. With this configuration, it is possible to efficiently transmit and receive ultrasonic waves without acoustic mismatching, and to prevent deterioration of frequency characteristics.
【００１１】また、本発明の超音波探触子は、圧電素子
と、前記圧電素子の前面に積層された音響整合層と、前
記音響整合層の前面に接着剤層を介して積層された音響
レンズとを備えた超音波探触子において、前記音響レン
ズの背面に高分子膜が形成され、かつ前記音響整合層、
前記接着剤層、および前記高分子膜のそれぞれの固有音
響インピーダンスがほぼ同じ値に設定された構成を有す
る。この構成により、音響的不整合をなくして超音波を
効率よく送受信し、しかも周波数特性の劣化を防止し、
さらに圧電素子、音響整合層、および接着剤層の侵食を
防止することができる。Further, the ultrasonic probe according to the present invention comprises a piezoelectric element, an acoustic matching layer laminated on the front surface of the piezoelectric element, and an acoustic layer laminated on the front surface of the acoustic matching layer via an adhesive layer. In an ultrasonic probe including a lens, a polymer film is formed on a back surface of the acoustic lens, and the acoustic matching layer,
Each of the adhesive layer and the polymer film has a configuration in which the specific acoustic impedance is set to substantially the same value. This configuration eliminates acoustic mismatch, efficiently transmits and receives ultrasonic waves, and prevents deterioration of frequency characteristics.
Further, erosion of the piezoelectric element, the acoustic matching layer, and the adhesive layer can be prevented.
【００１２】[0012]
【発明の実施の形態】以下、本発明の実施の形態につい
て、図面を用いて詳細に説明する。Embodiments of the present invention will be described below in detail with reference to the drawings.
【００１３】（第１の実施の形態）本発明の第１の実施
の形態では、接着剤層の固有音響インピーダスが音響レ
ンズの固有音響インピーダンス以上、音響整合層の固有
音響インピーダンス以下となるように構成した。(First Embodiment) In a first embodiment of the present invention, the specific acoustic impedance of the adhesive layer is equal to or higher than the specific acoustic impedance of the acoustic lens and equal to or smaller than the specific acoustic impedance of the acoustic matching layer. Configured.
【００１４】図１は、本発明の第１の実施の形態の超音
波探触子の概略断面図である。この超音波探触子は、圧
電素子１と、圧電素子１の前面に積層された１層もしく
は２層以上の音響整合層２と、音響整合層２の前面に接
着剤層３を介して積層された音響レンズ４とからなる。FIG. 1 is a schematic sectional view of an ultrasonic probe according to a first embodiment of the present invention. This ultrasonic probe has a piezoelectric element 1, one or more acoustic matching layers 2 laminated on the front surface of the piezoelectric element 1, and an adhesive layer 3 laminated on the front surface of the acoustic matching layer 2. Acoustic lens 4.
【００１５】圧電素子１は、ＰＺＴ系などの圧電セラミ
ックス、単結晶、およびＰＶＤＦなどの高分子などから
なり、超音波を送受信する。音響整合層２は例えばエポ
キシ樹脂などの材料で構成されており、圧電素子１と被
検体とを音響的に整合させる機能を有する。音響レンズ
４は例えばシリコーンゴムなどの材料で構成されてお
り、超音波の集束、発散、偏向を行う。接着剤層３はシ
リル基含有ポリマー接着剤からなり、音響整合層２の面
上に音響レンズ４を接着する。The piezoelectric element 1 is made of a piezoelectric ceramic such as PZT, a single crystal, a polymer such as PVDF, and transmits and receives ultrasonic waves. The acoustic matching layer 2 is made of a material such as an epoxy resin, for example, and has a function of acoustically matching the piezoelectric element 1 with the subject. The acoustic lens 4 is made of, for example, a material such as silicone rubber, and focuses, diverges, and deflects ultrasonic waves. The adhesive layer 3 is made of a silyl group-containing polymer adhesive, and adheres the acoustic lens 4 on the surface of the acoustic matching layer 2.
【００１６】このように構成される超音波探触子におい
て、圧電素子１で発生した超音波は、音響整合層２、接
着剤層３、音響レンズ４を介して被検体に照射される。
また、被検体で反射した超音波は音響レンズ４、接着剤
層３、音響整合層２を会して圧電素子１により受信さ
れ、電気信号に変換され、本体（超音波診断装置など）
により処理される。In the ultrasonic probe configured as described above, the ultrasonic wave generated by the piezoelectric element 1 is applied to the subject via the acoustic matching layer 2, the adhesive layer 3, and the acoustic lens 4.
The ultrasonic wave reflected by the subject meets the acoustic lens 4, the adhesive layer 3, and the acoustic matching layer 2, is received by the piezoelectric element 1, is converted into an electric signal, and is converted into a main body (such as an ultrasonic diagnostic apparatus).
Is processed by
【００１７】ここで、音響整合層２、接着剤層３、音響
レンズ４は、それぞれの固有音響インピーダンスを
ＺM、ＺB、ＺLとすると、ＺM≧ＺB≧ＺLの関係を満たす
ように構成した。具体的には、音響整合層２と音響レン
ズ４は、ぞれぞれ従来例と同じエポキシ樹脂とシリコー
ンゴムであり、それぞれ固有音響インピーダンスは約３
MRaylと1.4〜1.6MRaylである。[0017] Here, the acoustic matching layer 2, adhesive layer 3, the acoustic lens 4, each of the specific acoustic impedance Z M, Z B, When Z L, satisfy the relationship Z M ≧ Z B ≧ Z L It was configured as follows. Specifically, the acoustic matching layer 2 and the acoustic lens 4 are made of the same epoxy resin and silicone rubber as those of the conventional example, respectively, and each have an inherent acoustic impedance of about 3
MRayl and 1.4 to 1.6 MRayl.
【００１８】接着剤層３の材料に求められる特性として
は、接着強度が高いことが前提である。音響整合層２の
ようなエポキシ樹脂を接着することのできる接着剤に
は、多くの接着剤がある。一方、シリコーンゴムのよう
な音響レンズ４と音響整合層２とを接着できるものは少
なく、シリコーンゴムなどの材料に限定されていた。し
かしながら、このシリコーンゴムの接着剤は、接着強度
の高いものになると、従来例で説明したように、固有音
響インピーダンスが１〜1.2MRaylのものしかない。The properties required for the material of the adhesive layer 3 are based on the premise that the adhesive strength is high. There are many types of adhesives that can adhere an epoxy resin such as the acoustic matching layer 2. On the other hand, there are few materials such as silicone rubber that can bond the acoustic lens 4 and the acoustic matching layer 2, and are limited to materials such as silicone rubber. However, this silicone rubber adhesive has a specific acoustic impedance of only 1 to 1.2 MRayl, as described in the conventional example, when the adhesive strength is high.
【００１９】そこで、本実施の形態では、接着剤層３と
して接着強度が高く、かつ固有音響インピーダンスがＺ
M≧ＺB≧ＺLの関係を満たす材料として、シリル基含有
ポリマー接着剤を用いた。この接着剤としては、例えば
セメダイン（株）のスーパーＸがある。このシリル基含
有ポリマー接着材は、音速が1500m/sで固有音響インピ
ーダンスが２MRaylの値を有しているので、ＺM≧ＺB≧
ＺLの関係を満たしている。Therefore, in the present embodiment, the adhesive layer 3 has a high adhesive strength and a specific acoustic impedance of Z.
As a material satisfying the relation of M ≧ Z B ≧ Z L, with the silyl group-containing polymer adhesive. As this adhesive, for example, there is Super X of Cemedine Co., Ltd. Since the silyl group-containing polymer adhesive has a sound velocity of 1500 m / s and a specific acoustic impedance of 2 MRayl, Z M ≧ Z B ≧
The relationship of Z L is satisfied.
【００２０】図２は、本実施の形態の超音波探触子の特
性を示す図であり、図３は従来の超音波探触子（音速10
00m/s、固有音響インピーダンス1.1MRaylのシリコーン
ゴム接着剤を使用）の特性の計算結果を示す図である。
これらの図において、（ａ）はパルス応答波形、（ｂ）
は周波数特性である。なお、この時の接着剤層３の厚み
は10μｍである。FIG. 2 is a diagram showing characteristics of the ultrasonic probe according to the present embodiment. FIG. 3 is a diagram showing a conventional ultrasonic probe (with a sound velocity of 10).
FIG. 10 is a diagram showing calculation results of characteristics of a silicone rubber adhesive having an intrinsic acoustic impedance of 1.1 MRayl (00 m / s).
In these figures, (a) is a pulse response waveform, (b)
Is a frequency characteristic. At this time, the thickness of the adhesive layer 3 is 10 μm.
【００２１】図２（ａ）と図３（ａ）に示されているパ
ルス応答波形の電圧比較すると、本実施の形態の方がＶ
pp値が+1.3dB｛20×log10(202mv／173mV)＝+1.3dB｝高
い。また、図２（ｂ）と図３（ｂ）に示されている周波
数特性を比帯域（−6dB）で比較すると、従来の超音波
探触子では50％であるが、本実施の形態では65％とな
り、広帯域特性を有している。しかも従来の周波数特性
の形は大きく変形しており、接着剤が悪影響を及ぼして
いることがわかる。一方、本実施の形態では、素直な形
状の周波数特性を持っているため、パルス応答波形もリ
ンギングの少ない良好な特性となっている。When comparing the voltages of the pulse response waveforms shown in FIG. 2A and FIG. 3A,
The pp value is + 1.3dB1.320 × log 10 (202mv / 173mV) = + 1.3dB｝ high. Further, comparing the frequency characteristics shown in FIG. 2B and FIG. 3B with a specific band (−6 dB), it is 50% in the conventional ultrasonic probe, but in the present embodiment, 65%, which is a wideband characteristic. Moreover, the shape of the conventional frequency characteristic is greatly deformed, and it can be seen that the adhesive has an adverse effect. On the other hand, in this embodiment, since the frequency response has a straightforward shape, the pulse response waveform also has good characteristics with little ringing.
【００２２】この特性の比較から明らかなように、本実
施の形態の超音波探触子を超音波診断装置に接続して抽
出した診断画像は、被検深度が深く、かつ分解能の高い
ものとなる。As is apparent from the comparison of the characteristics, the diagnostic image extracted by connecting the ultrasonic probe of the present embodiment to the ultrasonic diagnostic apparatus has a deep depth to be examined and a high resolution. Become.
【００２３】また、本実施の形態の接着剤層３は、音速
が1500m/sと従来のシリコーンゴムの音速1000m/sより1.
5倍速い。このため、接着剤層３の厚みが従来の接着剤
と同じであったとしても、超音波の波長に対して本実施
の形態の接着剤層３の影響は極めて小さくなる。したが
って、接着剤層３の厚みの管理は緩やかになり、超音波
探触子の製造が容易になる。The adhesive layer 3 of the present embodiment has a sound speed of 1500 m / s, which is higher than the sound speed of 1000 m / s of conventional silicone rubber.
5 times faster. For this reason, even if the thickness of the adhesive layer 3 is the same as that of the conventional adhesive, the influence of the adhesive layer 3 of the present embodiment on the wavelength of the ultrasonic wave is extremely small. Accordingly, the management of the thickness of the adhesive layer 3 becomes gentle, and the manufacture of the ultrasonic probe becomes easy.
【００２４】なお、本実施の形態では、接着剤として、
シリル基含有ポリマー接着剤を用いた場合について説明
したが、固有音響インピーダンスの関係が前述したＺM
≧ＺB≧ＺLを満足する接着剤であれば、その他の接着
剤、例えば、シアノ系接着剤を用いても同様の効果が得
られる。また、本実施の形態では、単一の圧電素子を有
する超音波探触子の場合について説明したが、この他、
圧電素子を複数個配列した所謂アレイ型超音波探触子に
用いても同様の効果が得られる。In this embodiment, as the adhesive,
It has been described using a silyl group-containing polymeric adhesive, Z M that relationship specific acoustic impedance described above
As long as the adhesive satisfies ≧ Z B ≧ Z L , the same effect can be obtained by using another adhesive, for example, a cyano-based adhesive. Further, in the present embodiment, the case of the ultrasonic probe having a single piezoelectric element has been described.
The same effect can be obtained by using a so-called array type ultrasonic probe in which a plurality of piezoelectric elements are arranged.
【００２５】このように、本発明の第１の実施の形態の
超音波探触子によれば、音響整合層２の固有音響インピ
ーダンスＺM、音響レンズ４の固有音響インピーダンス
ＺL、接着剤層３の固有音響インピーダンスＺBがＺM≧
ＺB≧ＺLなる関係を満たすように構成したので、音響的
不整合の発生を防止され、その結果、超音波の効率的な
送受信と、周波数特性の劣化防止が実現できることにな
る。As described above, according to the ultrasonic probe of the first embodiment of the present invention, the specific acoustic impedance Z M of the acoustic matching layer 2, the specific acoustic impedance Z L of the acoustic lens 4, the adhesive layer 3 has an intrinsic acoustic impedance Z B ≧ Z M ≧
Since the configuration is such that the relationship of Z B ≧ Z L is satisfied, generation of acoustic mismatch is prevented, and as a result, efficient transmission and reception of ultrasonic waves and deterioration of frequency characteristics can be realized.
【００２６】（第２の実施の形態）本発明の第２の実施
の形態では、音響レンズの背面に高分子膜が形成され、
かつ音響整合層、接着剤層、および高分子膜のそれぞれ
の固有音響インピーダンスをほぼ同じ値に設定すること
で、音響的不整合の発生防止と圧電素子、音響整合層、
および接着剤層の侵食防止を実現した。(Second Embodiment) In a second embodiment of the present invention, a polymer film is formed on the back surface of an acoustic lens,
In addition, by setting the specific acoustic impedances of the acoustic matching layer, the adhesive layer, and the polymer film to substantially the same value, the occurrence of acoustic mismatch and the piezoelectric element, the acoustic matching layer,
And the erosion prevention of the adhesive layer was realized.
【００２７】図４は、本発明の第２の実施の形態の超音
波探触子の概略断面図である。ここで、図１と同一また
は対応する構成要素には図１で使用した符号と同一の符
号を付し、それらの説明を省略する。FIG. 4 is a schematic sectional view of an ultrasonic probe according to a second embodiment of the present invention. Here, components that are the same as or correspond to those in FIG. 1 are denoted by the same reference numerals as those used in FIG. 1, and descriptions thereof are omitted.
【００２８】本発明の第２の実施の形態では、音響レン
ズ４における音響整合層２側の面に薄い高分子膜５が設
けられたことが第１の実施の形態との相違である。高分
子膜５は、消毒液などの薬品によって圧電素子１、音響
整合層２、および接着剤層３が侵食されるのを防止する
機能を有している。The second embodiment of the present invention is different from the first embodiment in that a thin polymer film 5 is provided on the surface of the acoustic lens 4 on the acoustic matching layer 2 side. The polymer film 5 has a function of preventing the piezoelectric element 1, the acoustic matching layer 2, and the adhesive layer 3 from being eroded by a chemical such as a disinfecting solution.
【００２９】高分子膜５としては、例えばポリパラキシ
リレンを用いる。この材料としては、ユニオンカーバイ
ド社のパリレンC,Dがある。この材料は蒸着により音響
レンズ４のシリコーンゴム上に形成される。そして、１
〜10μｍの薄い厚みで、しかも強固に形成できる。As the polymer film 5, for example, polyparaxylylene is used. This material is Parylene C, D from Union Carbide. This material is formed on the silicone rubber of the acoustic lens 4 by vapor deposition. And 1
It can be formed firmly with a thin thickness of about 10 μm.
【００３０】このように形成された高分子膜５の固有音
響インピーダンスは、音響整合層２に用いるエポキシ樹
脂の固有音響インピーダンスとほぼ同じ2.8〜3MRaylの
値を有する。また、音響整合層２と高分子膜５とを接着
する接着剤層３としては、音響整合層２の固有音響イン
ピーダンスおよび高分子膜５の固有音響インピーダンス
とほぼ同じ固有音響インピーダンスを有する材料を用い
ることにより、音響的不整合が発生しないようにするこ
とが望ましい。その材料としてエポキシ樹脂などの接着
剤を用いることができる。The intrinsic acoustic impedance of the polymer film 5 thus formed has a value of 2.8 to 3 MRayl, which is almost the same as the intrinsic acoustic impedance of the epoxy resin used for the acoustic matching layer 2. As the adhesive layer 3 for bonding the acoustic matching layer 2 and the polymer film 5, a material having a specific acoustic impedance substantially equal to the specific acoustic impedance of the acoustic matching layer 2 and the specific acoustic impedance of the polymer film 5 is used. Thus, it is desirable that acoustic mismatch does not occur. An adhesive such as an epoxy resin can be used as the material.
【００３１】この高分子膜５を備えていないシリコーン
ゴムの音響レンズを音響整合層に接着する時にはエポキ
シ樹脂は使用できなかったが、本実施の形態では高分子
膜５を設けたことにより、エポキシ樹脂で接着すること
が可能になった。したがって、強固に接着することがで
き、かつ固有音響インピーダンスの整合が取れるため
に、感度および周波数特性を向上させることができ、し
かも信頼性の高い超音波探触子を得ることができる。When an acoustic lens made of silicone rubber having no polymer film 5 is bonded to the acoustic matching layer, an epoxy resin cannot be used. It is now possible to bond with resin. Therefore, since it is possible to firmly adhere and match the specific acoustic impedance, it is possible to improve the sensitivity and the frequency characteristics, and to obtain a highly reliable ultrasonic probe.
【００３２】なお、高分子膜５として、シリコーンゴム
用下塗り塗料を用いても同様な効果が得られる。この材
料として、東亜合成化学（株）のアロンシリコンゴムプ
ライマーなどがある。The same effect can be obtained by using an undercoat for silicone rubber as the polymer film 5. Examples of this material include Aron Silicon Rubber Primer manufactured by Toa Gosei Chemical Co., Ltd.
【００３３】本実施の形態では、接着剤層３としてエポ
キシ樹脂の接着剤を用いた場合について説明したが、こ
の他、固有音響インピーダンスが、音響整合層２の固有
音響インピーダンスおよび高分子膜５の固有音響インピ
ーダンスとほぼ同じ固有音響インピーダンスを有する材
料からなる接着剤であればどんな接着剤を用いても同様
の効果がある。また、本実施の形態では、単一の圧電素
子を有する超音波探触子の場合について説明したが、こ
の他、圧電素子を複数個配列した所謂アレイ型超音波探
触子に用いても同様の効果がある。In this embodiment, the case where an epoxy resin adhesive is used as the adhesive layer 3 has been described. In addition to this, the specific acoustic impedance depends on the specific acoustic impedance of the acoustic matching layer 2 and the polymer film 5. The same effect can be obtained by using any adhesive as long as the adhesive is made of a material having substantially the same specific acoustic impedance as the specific acoustic impedance. Further, in the present embodiment, the case of an ultrasonic probe having a single piezoelectric element has been described, but the same applies to a so-called array type ultrasonic probe in which a plurality of piezoelectric elements are arranged. Has the effect.
【００３４】このように、本発明の第２の実施の形態で
は、音響レンズ４の背面に高分子膜５が形成され、かつ
音響整合層２、接着剤層３、および高分子膜５のそれぞ
れの固有音響インピーダンスをほぼ同じ値に設定したの
で、音響的不整合をなくして超音波を効率よく送受信
し、周波数特性の劣化を防止し、さらに圧電素子１、音
響整合層２、および接着剤層３の侵食を防止することが
できる。As described above, in the second embodiment of the present invention, the polymer film 5 is formed on the back surface of the acoustic lens 4, and each of the acoustic matching layer 2, the adhesive layer 3, and the polymer film 5 Are set to substantially the same value, so that acoustic mismatch can be eliminated, ultrasonic waves can be transmitted and received efficiently, frequency characteristics can be prevented from deteriorating, and the piezoelectric element 1, the acoustic matching layer 2, and the adhesive layer 3 can be prevented from eroding.
【００３５】[0035]
【発明の効果】以上のように、本発明によれば、圧電素
子と、前記圧電素子の前面に積層された音響整合層と、
前記音響整合層の前面に接着剤層を介して積層された音
響レンズとを備えた超音波探触子において、前記接着剤
層の固有音響インピーダスが前記音響レンズの固有音響
インピーダンス以上、前記音響整合層の固有音響インピ
ーダンス以下となるように構成したので、音響的不整合
が生じないため超音波を効率よく送受信でき、しかも周
波数特性の劣化を防止することができるという優れた効
果を有する超音波探触子を提供することができる。As described above, according to the present invention, the piezoelectric element, the acoustic matching layer laminated on the front surface of the piezoelectric element,
An ultrasonic probe comprising: an acoustic lens laminated on a front surface of the acoustic matching layer via an adhesive layer; wherein the specific acoustic impedance of the adhesive layer is equal to or greater than the specific acoustic impedance of the acoustic lens; An ultrasonic wave having an excellent effect that it is configured so that the acoustic impedance is equal to or less than the intrinsic acoustic impedance of the matching layer, so that acoustic mismatching does not occur, so that ultrasonic waves can be efficiently transmitted and received and deterioration of frequency characteristics can be prevented. A probe can be provided.
【００３６】また、本発明によれば、圧電素子と、前記
圧電素子の前面に積層された音響整合層と、前記音響整
合層の前面に接着剤層を介して積層された音響レンズと
を備えた超音波探触子において、前記音響レンズの背面
に高分子膜が形成され、前記音響整合層、前記接着剤
層、および前記高分子膜のそれぞれの固有音響インピー
ダンスをほぼ同じ値に設定したので、音響的不整合が生
じないため超音波を効率よく送受信でき、しかも周波数
特性の劣化防止と、圧電素子、音響整合層、および接着
剤層の侵食防止が可能になるという優れた効果を有する
超音波探触子を提供することができる。Further, according to the present invention, there is provided a piezoelectric element, an acoustic matching layer laminated on the front surface of the piezoelectric element, and an acoustic lens laminated on the front surface of the acoustic matching layer via an adhesive layer. In the ultrasonic probe, a polymer film is formed on the back surface of the acoustic lens, and the specific acoustic impedances of the acoustic matching layer, the adhesive layer, and the polymer film are set to substantially the same value. Because of the absence of acoustic mismatch, an ultrasonic wave can be transmitted and received efficiently, and has an excellent effect of preventing deterioration of frequency characteristics and erosion of a piezoelectric element, an acoustic matching layer, and an adhesive layer. An acoustic probe can be provided.
【図１】本発明の第１の実施の形態の超音波探触子の概
略断面図、FIG. 1 is a schematic cross-sectional view of an ultrasonic probe according to a first embodiment of the present invention;
【図２】本発明の第１の実施の形態の超音波探触子のパ
ルス応答波形および周波数特性を示す図、FIG. 2 is a diagram showing a pulse response waveform and a frequency characteristic of the ultrasonic probe according to the first embodiment of the present invention;
【図３】従来の超音波探触子のパルス応答波形および周
波数特性を示す図、FIG. 3 is a diagram showing a pulse response waveform and a frequency characteristic of a conventional ultrasonic probe.
【図４】本発明の第２の実施の形態における超音波探触
子の概略断面図、FIG. 4 is a schematic cross-sectional view of an ultrasonic probe according to a second embodiment of the present invention;
【図５】従来の超音波探触子の概略断面図である。FIG. 5 is a schematic sectional view of a conventional ultrasonic probe.
１ 圧電素子 ２ 音響整合層 ３ 接着剤層 ４ 音響レンズ ５ 高分子膜 Reference Signs List 1 piezoelectric element 2 acoustic matching layer 3 adhesive layer 4 acoustic lens 5 polymer film
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 2G047 CA01 GB11 GB25 GB30 GB36 4C301 EE06 EE20 GB22 GB24 GB27 GB37 GB40 5D019 AA07 AA21 AA22 BB02 BB03 BB04 BB12 GG02 GG03 GG12 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G047 CA01 GB11 GB25 GB30 GB36 4C301 EE06 EE20 GB22 GB24 GB27 GB37 GB40 5D019 AA07 AA21 AA22 BB02 BB03 BB04 BB12 GG02 GG03 GG12
Claims (4)
された音響整合層と、前記音響整合層の前面に接着剤層
を介して積層された音響レンズとを備えた超音波探触子
において、前記音響整合層の固有音響インピーダンスＺ
M、前記音響レンズの固有音響インピーダンスＺL、前記
接着剤層の固有音響インピーダンスＺBがＺM≧ＺB≧ＺL
なる関係を有することを特徴とする超音波探触子。1. An ultrasonic probe comprising a piezoelectric element, an acoustic matching layer laminated on the front surface of the piezoelectric element, and an acoustic lens laminated on the front surface of the acoustic matching layer via an adhesive layer. , The specific acoustic impedance Z of the acoustic matching layer
M , the specific acoustic impedance Z L of the acoustic lens, and the specific acoustic impedance Z B of the adhesive layer are Z M ≧ Z B ≧ Z L
An ultrasonic probe having the following relationship.
くはシアノ系接着剤からなることを特徴とする請求項１
記載の超音波探触子。2. An adhesive layer comprising a silyl group-containing polymer or a cyano-based adhesive.
The described ultrasonic probe.
された音響整合層と、前記音響整合層の前面に接着剤層
を介して積層された音響レンズとを備えた超音波探触子
において、前記音響レンズの背面に高分子膜が形成さ
れ、かつ前記音響整合層、前記接着剤層、および前記高
分子膜のそれぞれの固有音響インピーダンスがほぼ同じ
値に設定されていることを特徴とする超音波探触子。3. An ultrasonic probe comprising a piezoelectric element, an acoustic matching layer laminated on the front surface of the piezoelectric element, and an acoustic lens laminated on the front surface of the acoustic matching layer via an adhesive layer. Wherein a polymer film is formed on the back surface of the acoustic lens, and the specific acoustic impedances of the acoustic matching layer, the adhesive layer, and the polymer film are set to substantially the same value. Ultrasonic probe.
とを特徴とする請求項３記載の超音波探触子。4. The ultrasonic probe according to claim 3, wherein the adhesive layer is made of an epoxy-based adhesive.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24021999A JP2001069594A (en) | 1999-08-26 | 1999-08-26 | Ultrasonic wave probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24021999A JP2001069594A (en) | 1999-08-26 | 1999-08-26 | Ultrasonic wave probe |
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| Publication Number | Publication Date |
|---|---|
| JP2001069594A true JP2001069594A (en) | 2001-03-16 |
Family
ID=17056233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24021999A Pending JP2001069594A (en) | 1999-08-26 | 1999-08-26 | Ultrasonic wave probe |
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| Country | Link |
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| JP2007521490A (en) * | 2003-09-22 | 2007-08-02 | ヒョン−ユン，キム | Structural health monitor sensor and system |
| WO2007103143A2 (en) | 2006-03-02 | 2007-09-13 | Visualsonics Inc. | Ultrasonic matching layer and transducer |
| WO2008011759A1 (en) * | 2006-07-21 | 2008-01-31 | Beijing Yuande Bio-Medical Engineering Co., Ltd. | An ultrasound phase-control focusing transducer based on spherical lens |
| JP2008270868A (en) * | 2007-04-16 | 2008-11-06 | Aloka Co Ltd | Ultrasonic probe |
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| EP3151238A1 (en) * | 2006-03-02 | 2017-04-05 | FUJIFILM SonoSite, Inc. | Ultrasonic transducer and producing process thereof |
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| JP2007521490A (en) * | 2003-09-22 | 2007-08-02 | ヒョン−ユン，キム | Structural health monitor sensor and system |
| JP2005103294A (en) * | 2003-10-01 | 2005-04-21 | General Electric Co <Ge> | Focusing micromachined ultrasonic transducer arrays and related methods of manufacture |
| JP2019083581A (en) * | 2006-03-02 | 2019-05-30 | ビジュアルソニックス インコーポレイテッド | Ultrasonic matching layer and transducer |
| US8847467B2 (en) | 2006-03-02 | 2014-09-30 | Fujifilm Sonosite, Inc. | High frequency ultrasonic transducer and matching layer comprising cyanoacrylate |
| WO2007103143A2 (en) | 2006-03-02 | 2007-09-13 | Visualsonics Inc. | Ultrasonic matching layer and transducer |
| EP2004063A2 (en) * | 2006-03-02 | 2008-12-24 | VisualSonics Inc. | Ultrasonic matching layer and transducer |
| US9520119B2 (en) | 2006-03-02 | 2016-12-13 | Fujifilm Sonosite, Inc. | High frequency ultrasonic transducer and matching layer comprising cyanoacrylate |
| JP2009528783A (en) * | 2006-03-02 | 2009-08-06 | ビジュアルソニックス インコーポレイテッド | Ultrasonic matching layer and transducer |
| US10478859B2 (en) | 2006-03-02 | 2019-11-19 | Fujifilm Sonosite, Inc. | High frequency ultrasonic transducer and matching layer comprising cyanoacrylate |
| EP2004063A4 (en) * | 2006-03-02 | 2012-05-02 | Visualsonics Inc | Ultrasonic matching layer and transducer |
| JP2012130780A (en) * | 2006-03-02 | 2012-07-12 | Visualsonics Inc | Ultrasonic matching layer and transducer |
| US8343289B2 (en) | 2006-03-02 | 2013-01-01 | Visualsonics Inc. | High frequency ultrasonic transducer and matching layer comprising cyanoacrylate |
| EP3151238A1 (en) * | 2006-03-02 | 2017-04-05 | FUJIFILM SonoSite, Inc. | Ultrasonic transducer and producing process thereof |
| JP2013153540A (en) * | 2006-03-02 | 2013-08-08 | Visualsonics Inc | Ultrasonic matching layer and transducer |
| WO2008011759A1 (en) * | 2006-07-21 | 2008-01-31 | Beijing Yuande Bio-Medical Engineering Co., Ltd. | An ultrasound phase-control focusing transducer based on spherical lens |
| JP2008270868A (en) * | 2007-04-16 | 2008-11-06 | Aloka Co Ltd | Ultrasonic probe |
| JP2009121670A (en) * | 2007-10-26 | 2009-06-04 | Ntn Corp | Rolling bearing and seal member for rolling bearing |
| US8408063B2 (en) * | 2007-11-29 | 2013-04-02 | Hitachi Medical Corporation | Ultrasonic probe, and ultrasonic diagnostic apparatus using the same |
| US20100242612A1 (en) * | 2007-11-29 | 2010-09-30 | Hitachi Medical Corporation | Ultrasonic probe, and ultrasonic diagnostic apparatus using the same |
| US11845108B2 (en) | 2008-09-18 | 2023-12-19 | Fujifilm Sonosite, Inc. | Methods for manufacturing ultrasound transducers and other components |
| US11094875B2 (en) | 2008-09-18 | 2021-08-17 | Fujifilm Sonosite, Inc. | Methods for manufacturing ultrasound transducers and other components |
| US12029131B2 (en) | 2008-09-18 | 2024-07-02 | Fujifilm Sonosite, Inc. | Methods for patterning electrodes of ultrasound transducers and other components |
| JP2014131357A (en) * | 2008-09-18 | 2014-07-10 | Visualsonics Inc | Methods for manufacturing ultrasound transducers and other components |
| US9935254B2 (en) | 2008-09-18 | 2018-04-03 | Fujifilm Sonosite, Inc. | Methods for manufacturing ultrasound transducers and other components |
| US10596597B2 (en) | 2008-09-18 | 2020-03-24 | Fujifilm Sonosite, Inc. | Methods for manufacturing ultrasound transducers and other components |
| JP2014531255A (en) * | 2011-09-26 | 2014-11-27 | コーニンクレッカ フィリップス エヌ ヴェ | Ultrasonic probe with acoustic lens |
| JP2014183589A (en) * | 2013-03-15 | 2014-09-29 | Sonosite Inc | Acoustic lens for micromachined ultrasound transducer |
| US10013969B2 (en) | 2013-03-15 | 2018-07-03 | Fujifilm Sonosite, Inc. | Acoustic lens for micromachined ultrasound transducers |
| US10770058B2 (en) | 2013-03-15 | 2020-09-08 | Fujifilm Sonosite, Inc. | Acoustic lens for micromachined ultrasound transducers |
| US9502023B2 (en) | 2013-03-15 | 2016-11-22 | Fujifilm Sonosite, Inc. | Acoustic lens for micromachined ultrasound transducers |
| US20140265728A1 (en) * | 2013-03-15 | 2014-09-18 | Fujifilm Sonosite, Inc. | Acoustic lens for micromachined ultrasound transducers |
| US10265047B2 (en) | 2014-03-12 | 2019-04-23 | Fujifilm Sonosite, Inc. | High frequency ultrasound transducer having an ultrasonic lens with integral central matching layer |
| US11083433B2 (en) | 2014-03-12 | 2021-08-10 | Fujifilm Sonosite, Inc. | Method of manufacturing high frequency ultrasound transducer having an ultrasonic lens with integral central matching layer |
| US11931203B2 (en) | 2014-03-12 | 2024-03-19 | Fujifilm Sonosite, Inc. | Manufacturing method of a high frequency ultrasound transducer having an ultrasonic lens with integral central matching layer |
| JP2016025612A (en) * | 2014-07-24 | 2016-02-08 | コニカミノルタ株式会社 | Ultrasonic transducer, ultrasonic probe, and ultrasonic imaging apparatus |
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