JP2001068680A5 - - Google Patents
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- JP2001068680A5 JP2001068680A5 JP2000101787A JP2000101787A JP2001068680A5 JP 2001068680 A5 JP2001068680 A5 JP 2001068680A5 JP 2000101787 A JP2000101787 A JP 2000101787A JP 2000101787 A JP2000101787 A JP 2000101787A JP 2001068680 A5 JP2001068680 A5 JP 2001068680A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000101787A JP4651773B2 (ja) | 1999-04-06 | 2000-04-04 | 半導体装置の作製方法 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9948199 | 1999-04-06 | ||
| JP11-176120 | 1999-06-22 | ||
| JP17612099 | 1999-06-22 | ||
| JP11-99481 | 1999-06-22 | ||
| JP2000101787A JP4651773B2 (ja) | 1999-04-06 | 2000-04-04 | 半導体装置の作製方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010226258A Division JP5337780B2 (ja) | 1999-04-06 | 2010-10-06 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001068680A JP2001068680A (ja) | 2001-03-16 |
| JP2001068680A5 true JP2001068680A5 (enrdf_load_stackoverflow) | 2007-06-07 |
| JP4651773B2 JP4651773B2 (ja) | 2011-03-16 |
Family
ID=27308970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000101787A Expired - Fee Related JP4651773B2 (ja) | 1999-04-06 | 2000-04-04 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4651773B2 (enrdf_load_stackoverflow) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6346730B1 (en) * | 1999-04-06 | 2002-02-12 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device having a pixel TFT formed in a display region and a drive circuit formed in the periphery of the display region on the same substrate |
| US6362507B1 (en) * | 1999-04-20 | 2002-03-26 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical devices in which pixel section and the driver circuit are disposed over the same substrate |
| KR100915148B1 (ko) * | 2003-03-07 | 2009-09-03 | 엘지디스플레이 주식회사 | 구동회로 일체형 액정표시장치의 스위칭 소자 및구동소자의제조방법 |
| KR100924493B1 (ko) * | 2003-06-27 | 2009-11-03 | 엘지디스플레이 주식회사 | 구동회로 일체형 액정표시장치용 어레이기판 제조방법 |
| JP4831954B2 (ja) * | 2003-11-14 | 2011-12-07 | 株式会社半導体エネルギー研究所 | 表示装置の作製方法 |
| CN1906650B (zh) | 2003-11-14 | 2012-05-09 | 株式会社半导体能源研究所 | 显示装置及其制造方法 |
| KR100721555B1 (ko) | 2004-08-13 | 2007-05-23 | 삼성에스디아이 주식회사 | 박막트랜지스터 및 그 제조 방법 |
| TWI339442B (en) | 2005-12-09 | 2011-03-21 | Samsung Mobile Display Co Ltd | Flat panel display and method of fabricating the same |
| JP5525224B2 (ja) * | 2008-09-30 | 2014-06-18 | 株式会社半導体エネルギー研究所 | 表示装置 |
| US9799773B2 (en) * | 2011-02-02 | 2017-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
| KR102430573B1 (ko) | 2015-05-14 | 2022-08-08 | 엘지디스플레이 주식회사 | 박막 트랜지스터 및 이를 포함한 백플레인 기판 |
| CN109545795B (zh) * | 2017-09-22 | 2020-10-30 | 群创光电股份有限公司 | 显示装置 |
| JP2020027862A (ja) * | 2018-08-10 | 2020-02-20 | 株式会社ジャパンディスプレイ | 表示装置及びその製造方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60186053A (ja) * | 1984-03-06 | 1985-09-21 | Seiko Epson Corp | 薄膜相補型ｍｏｓ回路 |
| JP3942699B2 (ja) * | 1997-08-29 | 2007-07-11 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
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2000
- 2000-04-04 JP JP2000101787A patent/JP4651773B2/ja not_active Expired - Fee Related