JP2001062736A - Cup type wheel and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cup type wheel, used in grinding work of a hard fragile material to be excellent in sharpness to be capable of high accurate grinding, and a manufacture method of the cup type wheel. SOLUTION: This cup type wheel, having a chip 2 of V-shaped section in the total periphery of an acting surface of a base metal, is a cup type wheel tilting the chip 2 in an outer direction relating to a rotary shaft with a V-shaped apex angle 90 to 110 degree facing an external periphery or internal peripheral side of the wheel to position a grinding end on the same plane. A manufacture method of the cup type wheel comprises a process securing a super abrasive grain by electro-casting to a conductive material-made mountain like mold with an apex angle 90 to 110 degree to form a super abrasive grain layer to cut it with the conductive material-made mold in size of the V-shaped chip 2 to obtain it by removing the conductive material-made mold, process drilling a hole in the total periphery of the acting surface of the base metal to fit the V-shaped chip to the hole secured, and a process truing the secured chip.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cup type wheel and a method of manufacturing the same. More specifically, the present invention is used for grinding hard and brittle materials such as silicon wafers, and is excellent in sharpness and capable of performing high-precision grinding. It relates to an excellent manufacturing method.

[0002]

2. Description of the Related Art Conventionally, for back surface finishing of hard and brittle materials such as silicon wafers, generally, a base metal and a diamond abrasive layer formed by electroforming a diamond abrasive layer on a base metal portion. Is used. In such a cup-type wheel, in order to improve the sharpness and the dischargeability of cutting powder, a device for reducing the contact area of the diamond abrasive layer is devised. For example, Japanese Patent Publication No. 60-17664 discloses a grinding wheel formed by electrodeposition of superabrasive grains as a grinding wheel particularly suitable for grinding a flat surface of a fragile workpiece such as silicon or glass. A grinding wheel having a thickness of 0.1 to 0.5 mm has been proposed. However, if the thickness of the ground portion is so thin, the rigidity of the ground portion is reduced, and the surface of the workpiece tends to undulate during grinding. Tokuhei 2-27117
In Japanese Patent Application Laid-Open Publication No. H11-163, a grinding wheel in which a grinding portion has a wavy shape in a circumferential direction is proposed as a grinding wheel particularly suitable for grinding a flat surface of a fragile workpiece such as silicon or glass. However, this grinding wheel cannot change the shape of the diamond abrasive layer because the base metal and the diamond abrasive layer are integrated with each other by plating the base metal with the diamond abrasive layer, and as a result, It is difficult to arbitrarily adjust the angle to the grinding wheel rotation direction, the inclination angle, and the shape, and there is a problem in strength and toughness during grinding. In addition, if grooves are formed in the diamond abrasive layer to improve sharpness and the ability to discharge cutting chips, slits are formed after electroforming, so that it takes time and effort to manufacture and increases the cost. Was. Furthermore, in order to perform electrodeposition on the base metal, it is necessary that the plating bath is large, so that useless diamond abrasive grains are present and the production cost is increased. For this reason, it is used for the finishing of the back side grinding of hard and brittle materials such as silicon wafers, and is excellent in sharpness and capable of performing high-precision grinding. An excellent manufacturing method has been required.

[0003]

SUMMARY OF THE INVENTION The present invention relates to a cup-type wheel which is used for grinding hard and brittle materials such as silicon wafers and which can perform excellent sharpness and high-precision grinding. The purpose of the present invention is to provide a manufacturing method which is excellent in economy of wheels.

[0004]

Means for Solving the Problems The present inventors have made intensive studies to solve the above-mentioned problems, and as a result, by embedding a V-shaped chip in the circumferential direction of the working surface of the base metal,
It was found that cup-type wheels can be manufactured economically, and the resulting cup-type wheels have high strength and rigidity at the time of grinding, and excellent grinding accuracy. Reached. That is, the present invention provides (1) a cup-type wheel having a V-shaped chip in cross section all around the working surface of a base metal, wherein the V-shaped chip is inclined outwardly with respect to a rotation axis. A cup-shaped wheel having a V-shaped apex angle of 90 to 110 degrees, facing the outer or inner peripheral side of the wheel, and a grinding end located on the same plane; (2) a V-shaped wheel The cup-shaped wheel according to (1), wherein the apex angle of the tip is directed toward the outer peripheral side of the wheel, and the angle formed by the circumference and a piece located rearward with respect to the rotation direction is ± 45 degrees, (3) the apex angle Size of 90 ~
The super-abrasive grains are fixed to the 110-degree conductive material mountain-type by electroforming to form a super-abrasive layer, and the super-abrasive layer is formed into a V-shaped chip with the conductive material mountain-type. Cutting and removing the conductive material mold to obtain a V-shaped chip; drilling a hole outwardly inclined with respect to the rotation axis on the entire circumference of the working surface of the base of the cup-shaped wheel; A step of fitting a V-shaped chip into the chip and fixing the chip by bonding, and a step of truing such that the ground end of the fixed V-shaped chip is positioned on the same plane. And (4) the method of manufacturing a cup-shaped wheel according to (3), wherein the mountain-shaped conductive material mountain is made of aluminum.

[0005]

BEST MODE FOR CARRYING OUT THE INVENTION A cup-shaped wheel according to the present invention is a cup-shaped wheel having a V-shaped chip in cross section all around the working surface of a base metal. With a vertical angle of 90-110.
In this case, the grinding end faces the outer or inner peripheral side of the wheel, and the ground end is located on the same plane. FIG. 1A is a perspective view of one embodiment of the cup-shaped wheel of the present invention.
FIG. 2B is a partial perspective view showing an enlarged portion A of FIG. 1A. The cup-type wheel of this embodiment has V-shaped chips 2 in cross section all around the working surface of the base 1, and the ground ends of all V-shaped chips are located on the same plane. V
The V-shaped tip is inclined outward with respect to the rotation axis,
The vertical angle of the character shape is 90 to 110 degrees, more preferably 95 to 110 degrees.
It is 105 degrees and faces the outer peripheral side of the wheel. FIG.
FIG. 4 is a schematic diagram showing a positional relationship between V-shaped chips.
The apex angle α of the V-shaped chip 2 attached to the working surface of the base metal is 90 to 110 degrees, more preferably 95 to 105 degrees. If the apex angle α of the V-shaped chip is less than 90 degrees, the inclination is too large at the time of electroforming, so that diamond abrasive grains are difficult to adhere, and it is difficult to form a chip having a uniform thickness. . If the apex angle α of the V-shaped tip exceeds 110 degrees, the rigidity of the V-shaped tip may be insufficient. When the cup-shaped wheel of the present invention rotates in the direction of the arrow in the drawing, the angle β formed between the piece located on the rear side with respect to the rotation direction and the circumference is ± 45 degrees, preferably 30 degrees.
Degrees, more preferably ± 15 degrees. FIG. 3 is a schematic diagram showing a positional relationship between V-shaped chips. The V-shaped chip 2 attached to the working surface of the base 1 is inclined outwardly with respect to the rotation axis, and the inclination angle γ with respect to the rotation axis is preferably 30 to 60 degrees. The ground ends 5 of all V-shaped chips are located on the same plane. The cross section of the cup-shaped wheel of the present invention is V
Since a chip having a U-shape is used, the contact area between the superabrasive layer and the object to be ground is small, the grinding resistance is low, the sharpness and the discharge of chips are improved, and excellent grinding accuracy can be obtained.

[0006] The manufacturing method of the cup-type wheel of the present invention comprises:
A superabrasive grain is fixed by electroforming to a mountain-type made of a conductive material having an apex angle of 90 to 110 degrees to form a superabrasive layer,
A step of cutting the superabrasive layer into a V-shaped chip with a conductive material mountain-shaped mold and removing the conductive material mold to obtain a V-shaped chip. In the entire circumference of the surface, a hole is formed which is inclined outwardly with respect to the rotation axis, a V-shaped chip is fitted into the hole, and the V-shaped chip is fixed by bonding, and the ground end of the fixed V-shaped chip is formed. It consists of a step of truing so as to be located on the same plane. In the method of the present invention, the superabrasive grains are fixed by electroforming to a mountain-shaped mold made of a conductive material having an apex angle of 90 to 110 degrees to form a superabrasive layer, and the superabrasive layer is electrically conductive. A V-shaped chip is obtained by cutting the material into a V-shaped chip together with a mountain-shaped die, and removing the conductive material die. FIG. 4A is a plan view of one embodiment of a mountain-shaped conductive material used in the method of the present invention, FIG. 4B is a side view thereof, and FIG. It is an enlarged view. The mountain-shaped apex angle α is an angle having the same size as the apex angle α of the V-shaped tip, that is, 90 to 110 degrees, and more preferably 95 to 105 degrees. If the apex angle α of the mountain type is less than 90 degrees, it is difficult to form a chip having a uniform thickness during electroforming. If the peak angle α of the mountain type exceeds 110 degrees, the rigidity of the V-shaped tip may be insufficient. The other part is masked with an insulating material, leaving the mountain-shaped surface made of a conductive material mountain-shaped. Electric current is applied, and the superabrasive grains are fixed to the mountainous surface by electroforming to form a superabrasive grain layer. Next, the superabrasive layer is cut into a V-shaped chip with a mountain-shaped die made of a conductive material, and a portion made of the conductive material is removed to obtain a V-shaped chip. There is no particular limitation on the mountain-shaped material made of a conductive material, but aluminum is particularly preferably used because it has good electric conductivity, is easy to work, and can be easily dissolved and removed with alkali. The metal to be plated is not particularly limited as long as it can fix the superabrasive grains, and examples thereof include nickel and chromium. Of these, nickel plating using a nickel sulfamate bath or a nickel sulfate bath can form a superabrasive layer having high hardness and toughness, and is therefore particularly preferably used. FIG.
It is a perspective view of one aspect | mode of a chip | tip of a character shape.

[0007] In the method of the present invention, a hole inclined outwardly with respect to the rotation axis is formed in the entire periphery of the working surface of the base metal of the cup-type wheel, and a V-shaped chip is fitted into the hole and bonded. To stick. FIG. 6A is a partial cross-sectional view of one mode of the base metal, and FIG. 6B is a partial perspective view of the base metal showing a portion corresponding to FIG. 1B. An outwardly inclined hole 6 is drilled in the working surface of the base 1 of the cup-shaped wheel. The inclination angle of the hole with respect to the rotation axis is preferably 30 to 60 degrees. A V-shaped chip is fitted into a hole formed in the working surface of the base metal and fixed by bonding. There is no particular limitation on the method of fixing the V-shaped chip in the hole. For example, an epoxy resin, a phenol resin, a synthetic resin adhesive such as a polyimide resin can be used, or a silver braze,
A brazing material such as gold brazing or nickel brazing can also be used. When a V-shaped chip as shown in FIG. 5 is fixed to a hole in the working surface of the metal base with the apex angle facing the outer peripheral side of the wheel,
Since the V-shaped tip is inclined outward with respect to the rotation axis, two sides of the V-shape protrude from the end of the apex angle of the V-shape. In the method of the present invention, the protruding portion of the V-shaped chip is cut off by truing so that the ground end of the V-shaped chip is parallel to the working surface of the base metal, and all the V-shaped chips are ground. With the ends located on the same plane, the cup-type wheel shown in FIG. 1 is completed. According to the method of the present invention, since the V-shaped chip is produced separately from the base metal of the wheel, the plating cost can be reduced using a small plating bath, without using unnecessary superabrasive grains, and economically. Thus, a cup-shaped wheel can be manufactured. In addition, since a V-shaped chip manufactured separately from the base metal of the wheel is fixed to the hole formed in the base metal, a large-diameter cup-type wheel can be easily manufactured. Furthermore, according to the method of the present invention, the optimal tip direction and angle can be easily set according to the purpose of use of the cup-type wheel. One side of the tip is mainly contributing to grinding in the direction of rotation of the cup-shaped wheel, and the other side is supported from the rear to increase the rigidity of the tip, so that the corrugated cup type with all parts facing the outer circumference Grinding accuracy superior to wheels can be obtained.

[0008]

EXAMPLES The present invention will be described in more detail with reference to the following Examples, which should not be construed as limiting the present invention. Example 1 A V-shaped chip was manufactured by using an aluminum mountainous type having a shape similar to that of FIG. Mountain range type is 90 vertical
mm, 90 mm in width and 5 mm in height, the distance between adjacent apex angles is 3 mm, and the size α of the apex angle is 110 degrees. Using a nickel sulfamate bath, diamond abrasive grains having a grain size of # 4000 were fixed by electroforming to form a superabrasive grain layer having a thickness of 0.3 mm. By cutting the mountain-type with the superabrasive layer formed at the valley position, further cutting it to a length of 7.0 mm, and dissolving and removing aluminum with alkali, the vertex angle length is 7.0 mm, one side of A V-shaped chip having a length of 1.9 mm and a thickness of 0.3 mm was produced. An aluminum alloy was machined to produce a base metal having a diameter of 200 mm having a shape shown in FIG. 6 and having a diameter of 2.1 mm, a depth of 4.0 mm, and a 45 ° outward inclination with respect to the rotation axis. 200 holes were drilled. In this hole,
The V-shaped chip is fitted in the state shown in FIG. 1 (b) such that the angle formed between the piece located at the rear with respect to the rotation direction and the circumference is 0 °, and an epoxy resin adhesive is used. It was fixed using. A cup-shaped wheel to which a V-shaped tip is fixed is used as a truer, using WA # 180, WA # 800 and WA # 2000 sequentially, and the grindstone rotation speed is 1,890 min.
^-1 , truing at a table rotation speed of 8 min ^-1 , the ground end of the V-shaped chip is parallel to the working surface of the base metal, and the ground ends of all the V-shaped chips are located on the same plane. As a state, a cup-shaped wheel of the present invention having the shape shown in FIG. 1 was completed. The obtained cup type wheel was mounted on a vertical rotary rotary grinder [Nisshin Kogyo Co., Ltd., MFG-1] to grind a 6-inch silicon ingot. The processing method is a through feed method, and the grinding wheel rotation speed is 4,000.
0 min ^-1 , depth of cut 10 μm, table feed speed 12
5 mm / min ^-1 and the amount of grinding fluid were 20 L / min. The spindle load current value was stable at 0.4 to 0.5A. The surface roughness of the ground surface was Rmax 0.15 to 0.24 μm, which was good.

[0009]

The cup type wheel of the present invention has a cross section of V
Since a chip having a U-shape is used, the contact area between the superabrasive layer and the object to be ground is small, the grinding resistance is low, the sharpness and the discharge of cutting chips are good, and excellent grinding accuracy can be obtained. In the cup-shaped wheel of the present invention, one side of the V-shaped chip facing in the rotation direction mainly contributes to grinding, and the other side plays a role of supporting one side facing in the rotation direction from the rear, and has a V-shaped shape. It is possible to increase the rigidity of the chip and perform highly accurate grinding. According to the manufacturing method of the cup-shaped wheel of the present invention, since the V-shaped chip is manufactured separately from the base metal of the wheel, using a small plating bath,
It is possible to economically manufacture a cup-type wheel by reducing plating cost without using useless superabrasive grains. In addition, since a V-shaped chip manufactured separately from the base metal of the wheel is fixed to the hole formed in the base metal, a large-diameter cup-type wheel can be easily manufactured. Furthermore, according to the method of the present invention, the optimal tip direction and angle can be easily set according to the purpose of use of the cup-type wheel.

[Brief description of the drawings]

FIG. 1 is a perspective view and a partial perspective view of one embodiment of a cup-type wheel of the present invention.

FIG. 2 is a schematic diagram illustrating a positional relationship between V-shaped chips.

FIG. 3 is a schematic diagram illustrating a positional relationship between V-shaped chips.

FIG. 4 is a plan view, a side view, and a partially enlarged view of one embodiment of a metal mountainous type used in the method of the present invention.

FIG. 5 is a perspective view of one embodiment of a V-shaped chip.

FIG. 6 is a partial cross-sectional view and a partial perspective view of one embodiment of a base.

[Explanation of symbols]

 Reference Signs List 1 base metal 2 V-shaped chip 3 one side facing the rotation direction 4 another side 5 ground end of chip 6 hole

Claims (4)

[Claims] 1. A cup-shaped wheel having a V-shaped chip in cross section all around the working surface of a base metal, wherein the V-shaped chip is inclined outwardly with respect to a rotation axis to form a V-shaped chip. Wherein the apex angle is 90 to 110 degrees and faces the outer or inner peripheral side of the wheel, and the ground end is located on the same plane. 2. The cup mold according to claim 1, wherein the apex angle of the V-shaped tip is directed to the outer peripheral side of the wheel, and an angle formed by a circumference and a piece located rearward with respect to the rotation direction is ± 45 degrees. wheel. 3. A superabrasive grain layer is formed by electroforming to form a superabrasive grain layer in a mountain-shaped conductive material having an apex angle of 90 to 110 degrees. A process of cutting into a V-shaped chip with a mountain-shaped mold and removing the conductive material mold to obtain a V-shaped chip. A step of drilling a hole inclined outwardly, fitting a V-shaped chip into the hole and fixing the V-shaped chip by bonding, so that the ground end of the fixed V-shaped chip is located on the same plane. A method for producing a cup-type wheel, comprising a step of truing. 4. The method of manufacturing a cup-shaped wheel according to claim 3, wherein the mountain-shaped mold made of conductive material is made of aluminum.