JP2001038610A - 研磨装置 - Google Patents
研磨装置Info
- Publication number
- JP2001038610A JP2001038610A JP21204299A JP21204299A JP2001038610A JP 2001038610 A JP2001038610 A JP 2001038610A JP 21204299 A JP21204299 A JP 21204299A JP 21204299 A JP21204299 A JP 21204299A JP 2001038610 A JP2001038610 A JP 2001038610A
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- polishing
- work
- surface plate
- drive shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21204299A JP2001038610A (ja) | 1999-07-27 | 1999-07-27 | 研磨装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21204299A JP2001038610A (ja) | 1999-07-27 | 1999-07-27 | 研磨装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2001038610A true JP2001038610A (ja) | 2001-02-13 |
JP2001038610A5 JP2001038610A5 (bg) | 2006-08-24 |
Family
ID=16615916
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21204299A Pending JP2001038610A (ja) | 1999-07-27 | 1999-07-27 | 研磨装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2001038610A (bg) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104889859A (zh) * | 2015-06-23 | 2015-09-09 | 广东茂化建集团有限公司 | 一种高压静密封槽面缺陷研磨修复机 |
CN111515814A (zh) * | 2020-05-14 | 2020-08-11 | 杭州刚合机械科技有限公司 | 一种手持可除尘的表面打磨装置 |
CN113829235A (zh) * | 2021-09-22 | 2021-12-24 | 宇环数控机床股份有限公司 | 一种研磨机上盘机构 |
-
1999
- 1999-07-27 JP JP21204299A patent/JP2001038610A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104889859A (zh) * | 2015-06-23 | 2015-09-09 | 广东茂化建集团有限公司 | 一种高压静密封槽面缺陷研磨修复机 |
CN111515814A (zh) * | 2020-05-14 | 2020-08-11 | 杭州刚合机械科技有限公司 | 一种手持可除尘的表面打磨装置 |
CN113829235A (zh) * | 2021-09-22 | 2021-12-24 | 宇环数控机床股份有限公司 | 一种研磨机上盘机构 |
CN113829235B (zh) * | 2021-09-22 | 2024-04-09 | 宇环数控机床股份有限公司 | 一种研磨机上盘机构 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6241585B1 (en) | Apparatus and method for chemical mechanical polishing | |
CN100400235C (zh) | 研磨机和研磨工件的方法 | |
EP1412130B1 (en) | Polishing apparatus and polishing method | |
US6643882B1 (en) | Substrate cleaning apparatus | |
EP3483924B1 (en) | Apparatus and method for processing a surface of a substrate | |
US9362129B2 (en) | Polishing apparatus and polishing method | |
JPH11221755A (ja) | 半導体ウェーハの研摩方法および装置 | |
WO2012124663A1 (ja) | 板状体の研磨方法 | |
JP2008114360A (ja) | ガラスレンズの回転式自動研磨装置 | |
JP5148400B2 (ja) | 歯車研削盤 | |
US20150017889A1 (en) | Polishing apparatus | |
JP2001038610A (ja) | 研磨装置 | |
JPH11104942A (ja) | ワークエッジの研磨方法及び装置 | |
WO2002070196A1 (fr) | Procede et appareil d'usinage de face de joint d'une piece | |
JP4065078B2 (ja) | ディスク鏡面面取り装置 | |
JP4132652B2 (ja) | 砥石の洗浄装置を備える両頭平面研削装置および砥石の洗浄方法 | |
JP2001138233A (ja) | 研磨装置、研磨方法および研磨工具の洗浄方法 | |
JP4227700B2 (ja) | ディスク鏡面面取り装置システム | |
KR20120105382A (ko) | 판상체의 연마 장치 | |
JP2021142603A (ja) | 研削装置 | |
JP2001025964A (ja) | 研磨方法および研磨装置 | |
JP7299773B2 (ja) | 研削装置 | |
JP2003094324A (ja) | 研磨盤および研磨方法 | |
JP6138063B2 (ja) | ウェハ研磨装置 | |
JP2001239444A (ja) | カップ型砥石部材と、これを用いたワーク端面の加工方法および加工装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060707 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060707 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080408 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20080409 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20080805 |