JP2001037951A5 - - Google Patents

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Publication number
JP2001037951A5
JP2001037951A5 JP1999212124A JP21212499A JP2001037951A5 JP 2001037951 A5 JP2001037951 A5 JP 2001037951A5 JP 1999212124 A JP1999212124 A JP 1999212124A JP 21212499 A JP21212499 A JP 21212499A JP 2001037951 A5 JP2001037951 A5 JP 2001037951A5
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JP
Japan
Prior art keywords
shaped body
disc
transport
endless belt
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999212124A
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English (en)
Japanese (ja)
Other versions
JP2001037951A (ja
JP4386500B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP21212499A priority Critical patent/JP4386500B2/ja
Priority claimed from JP21212499A external-priority patent/JP4386500B2/ja
Publication of JP2001037951A publication Critical patent/JP2001037951A/ja
Publication of JP2001037951A5 publication Critical patent/JP2001037951A5/ja
Application granted granted Critical
Publication of JP4386500B2 publication Critical patent/JP4386500B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP21212499A 1999-07-27 1999-07-27 円板状体搬送装置 Expired - Fee Related JP4386500B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21212499A JP4386500B2 (ja) 1999-07-27 1999-07-27 円板状体搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21212499A JP4386500B2 (ja) 1999-07-27 1999-07-27 円板状体搬送装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006201245A Division JP4330604B2 (ja) 2006-07-24 2006-07-24 円板状体搬送装置

Publications (3)

Publication Number Publication Date
JP2001037951A JP2001037951A (ja) 2001-02-13
JP2001037951A5 true JP2001037951A5 (enExample) 2006-09-21
JP4386500B2 JP4386500B2 (ja) 2009-12-16

Family

ID=16617292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21212499A Expired - Fee Related JP4386500B2 (ja) 1999-07-27 1999-07-27 円板状体搬送装置

Country Status (1)

Country Link
JP (1) JP4386500B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006071063A1 (en) 2004-12-29 2006-07-06 Lg Chem, Ltd. Adjuvant for chemical mechanical polishing slurry
KR100786949B1 (ko) 2005-12-08 2007-12-17 주식회사 엘지화학 연마 선택도 조절 보조제 및 이를 함유한 ｃｍｐ 슬러리
KR100786948B1 (ko) 2005-12-08 2007-12-17 주식회사 엘지화학 연마 선택비 조절제 및 이를 함유한 ｃｍｐ 슬러리
EP1994112B1 (en) 2006-01-25 2018-09-19 LG Chem, Ltd. Cmp slurry and method for polishing semiconductor wafer using the same

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