JP2001030164A - Method and device for controlling rotation for lapping machine having a plurality of rotary shafts - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and device for controlling rotation for lapping machine having a plurality of rotary shafts to reverse the work holder of the lapping machine to decrease the occurrence of a deviation in wear and choking to a lapping member. SOLUTION: A method for controlling lapping machine having a plurality of rotary shafts consists of a method wherein at least one rotatable independently from the other of an upper platen 5, a lower platen 3, a sun gear 9, and an internal gear 12 for a lapping machine 1 is reversible and a work holder 17 is switched from forward to reversing. A rotation control device for the lapping machine having a plurality of the rotary shafts contains a control part 30 to carry out the reversing.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a rotation control method for a multi-axis lapping machine and a rotation control device for a multi-axis lapping machine.

[0002]

2. Description of the Related Art Conventionally, a lap of a planetary gear system for lapping a work by rotating an upper / lower platen, a sun gear and an internal gear or an upper / lower platen and a sun gear in a predetermined direction about a shaft thereof at a predetermined speed. There is a board.

[0003] In this lapping machine, after pre-lapping for a predetermined time, the rotation speed is automatically increased without changing the rotation direction of the upper and lower stool, sun gear and internal gear or the upper and lower stool, sun gear and internal gear. Alternately, the main lap processing is performed, and thereafter, these can be stopped in one batch. FIG. 4 shows a time chart of the processing by one batch. In this figure, step 1 shows a state in which the upper and lower platens, the sun gear and the internal gear start to rotate, reach the preceding lap rotation speed shown in the drawing, and continue their rotation for a predetermined time. The state in which all the speeds of the surface plate, sun gear, and internal gear have reached the increased lap rotation speed, which continues for a predetermined time, and finally the rotation of the upper and lower surface plates, the sun gear, and the internal gear is stopped. Is shown.

When the work holder engaged with the sun gear and the internal gear always rotates and revolves in the same direction with respect to, for example, a grindstone provided on the upper and lower platens or the lower platen, this work holder The work mounted on the wheel rotates in the same direction with respect to the grindstone. If this rotation is performed for a long time, the speed of this work with respect to the grindstone is different between the inner and outer circumferences of the grindstone. Etc., it is difficult to obtain accuracy. Further, since the work is cut in the same direction with respect to the grindstone, the grindstone is clogged, and the grindstone must be formed at an early stage.

In order to avoid this, there is a method of occasionally reversing the rotation of the work accompanying the rotation and revolving of the work holder of the work, but this involves reversing at least one of the upper and lower platen, the sun gear and the internal gear. Can be achieved by: However, conventionally, at least one of the upper and lower platens, the sun gear, and the internal gear has not been automatically rotated in a direction opposite to the direction in which it was rotated. It was necessary to stop the plate and set the rotation of at least one of the upper and lower platens, the sun gear and the internal gear to a desired reverse rotation speed.

[0006]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to provide a work holder to a lap member such as a grindstone during one batch lap processing on a lapping machine. The present invention provides a rotation control method for a multi-spindle lapping machine and a rotation control device for a multi-spindle lapping machine, which are rotatable in a direction opposite to that of a grinding wheel and perform rotation of a workpiece with respect to a grindstone or the like during lapping of one batch. .

[0007]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, a rotation control method for a multi-spindle lapping machine according to the present invention comprises an upper stool that can be coaxially arranged and a lower slab having a lap member on an upper surface. A sun gear and an internal gear that coaxially surrounds the sun gear are provided between the disk and the work gear, and a work holder that meshes with both gears with an external gear formed on the outer periphery between the sun gear and the internal gear is provided in a circumferential direction. The upper and lower stool, the sun gear and the internal gear in the first case where the upper and lower stool, the sun gear and the internal gear rotate independently of the others about their axes. The first and second rotating means, the third rotating means and the fourth rotating means are rotated by rotating the upper and lower platens, the sun gear and the internal gear about their axes. And inter Second Rugiya is rotating independently of the other
In the case of the lower platen, the second rotating means, the third rotating means and the fourth rotating means for rotating the sun gear and the internal gear, the internal gear does not rotate, the upper platen, the lower platen and the sun gear In the third case, which rotates independently of the others about these axes, the first rotating means, the second rotating means, and the third rotating means for rotating the upper surface plate, the lower surface plate, and the sun gear are connected to the internal In a fourth case in which the gear does not rotate and the lower platen and the sun gear rotate independently of the others about their axes, the second rotating means and the third rotating means for rotating the lower platen and the sun gear are provided. A reversing step of rotating at least one of the rotating means which is used independently in the first to fourth cases and which is rotated independently of the others in the first to fourth cases. .

[0008] It is desirable that the reverse rotation step is performed after a lapse of a predetermined time from the start of lapping of the plurality of rotary shaft lapping machines.

A rotation control apparatus for a lapping machine having a plurality of rotary shafts according to the present invention comprises a sun gear between an upper surface plate which can be disposed coaxially and a lower surface plate having a lap member on the upper surface, and an intershaft which surrounds the sun gear. A null gear, and a work holder meshing with both gears with an external gear formed on the outer periphery between the sun gear and the internal gear is provided in the circumferential direction, the upper and lower platens, the sun gear and A first rotating means for rotating the upper and lower platens, the sun gear and the internal gear at a predetermined rotation speed in a predetermined rotation direction in a first case where the internal gear rotates independently of the others about their axes; , The second rotating means, the third rotating means and the fourth rotating means, the upper and lower stool, the sun gear and the internal gear, the lower stool, the sun gear and the internal gear are arranged around their axes from the other. Independence Lower platen in the second case to be rotated,
A second rotating means, a third rotating means, and a fourth rotating means for rotating the sun gear and the internal gear in a predetermined rotation direction at a predetermined rotation speed.
In the third case where the upper and lower stool and the sun gear rotate independently of the other around the axis without rotating the internal gear, the upper and lower stool And a first rotating means, a second rotating means, and a third rotating means for rotating the sun gear in a predetermined direction at a predetermined rotation speed, by rotating the lower platen and the sun gear independently of each other without rotating the internal gear. In the case of (1), the lower platen and the sun gear are used in a multi-rotation shaft lapping machine having a second rotating means and a third rotating means for rotating the sun gear in a predetermined direction at a predetermined speed. A first operating means, a second operating means, a third operating means, and a fourth operating means connected to each of the fourth rotating means and providing a predetermined rotating direction and a rotating speed to the corresponding rotating means; and in the second case, For each of the second to fourth rotating means A second operating means, a third operating means, and a fourth operating means which are connected, and, in the third case, a first operating means, a second operating means, and a third operating means which are connected to the first to third rotating means. Operating means, and in the fourth case, a second operating means and a third operating means connected to the second and third rotating means, and a corresponding rotating means connected to the first to fourth operating means. An operation signal corresponding to the rotation direction and the rotation speed of the means is sent to the corresponding operation means, and at least one of the first and fourth rotation means in the first case, and the second signal in the second case, At least one of the second to fourth rotating means, in the third case at least one of the first to third rotating means, and in the fourth case, the second and third rotating means.
Control means for sending a reversing signal for reversing at least one of the rotating means to the corresponding operating means.

[0010] The reverse rotation signal is a signal corresponding to the reverse rotation direction and a predetermined rotation speed.

Preferably, the control means sends the reverse rotation signal to a corresponding operation means a predetermined time after the multi-axis lapping machine starts lapping.

The first to fourth rotating means comprise a servomotor, the first to fourth operating means comprise a servo amplifier for generating a power according to an operation signal, and the first to fourth detecting means correspond to corresponding ones. It is desirable to include a rotation speed detector for detecting the rotation speed of the servomotor.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on one embodiment with reference to FIGS. FIG. 1 is a schematic view of one embodiment of the present invention, and FIG. 2 is a plan view of a main part of a double-headed lapping machine to which the present invention is applied, with an upper surface plate removed.

As shown in FIGS. 1 and 2, the double-headed lapping machine 1 has a disk-shaped lower surface plate 3 having an annular grindstone 2 on the upper surface, and a lower annular grindstone 4 which can be arranged coaxially with and above the lower surface plate. An upper surface plate 5 is provided. The lower surface plate 3 is rotated by a servomotor 7 via a lower surface plate main shaft (axis) 6 and a gear train 8. A sun gear 9 is provided above the lower surface plate 3 and coaxially therewith. As shown in FIG. 1, the sun gear 9 is rotated by a servomotor 11 via a sun gear main shaft (shaft) 10 penetrating through the lower surface plate main shaft 6, for example.

As shown in FIGS. 1 and 2, an internal gear 12 surrounds the sun gear 9 and is coaxially disposed on the lapping machine 13. This internal gear 1
2 has external teeth 14 formed on the outer periphery thereof, meshing with gears 16 of a servo motor
Is rotated about its own axis.

A plurality of disk-shaped work holders 17 are arranged in a circumferential direction in an annular space between the sun gear 9 and the internal gear 12, and an external gear portion 18 formed on the outer periphery thereof has a sun gear. 9 and the internal gear 12, and the work holder 17 rotates and revolves by the relative rotational movement of the two gears 9 and 12. A work insertion hole 20 for inserting a work 19 into each work holder 17 is provided in the circumferential direction.

Referring to FIG. 1, upper surface plate 5 has an upper surface plate main shaft (axis) 21 which can be installed coaxially with sun gear main shaft 10. The main shaft 21 has a cylindrical main bearing 22 rotatably supported by a base main shaft housing (not shown) inserted therethrough. A gear 23 is provided at the upper end of the main bearing 22, and a gear 25 of a servo motor 24 meshes with the gear 23. A flange 26 is provided at the lower end of the main bearing 22. A flange 27 located below the flange 26 is formed on the main shaft 21,
The slider 28 is non-rotatably connected to the flange 27 located below the flange 26 so as to be able to move up and down with respect to the slider 28. Therefore, the rotation of the servo motor 24 causes the main bearing 22 and the flange 2 to rotate.
6. The upper surface plate main shaft 21 is rotated via the slider 28 and the flange 27, and the upper surface plate 21, that is, the grindstone 4 is rotated at the same speed. The servo motors 24, 7, 11, and 1
5 is an example of the first, second, third and fourth rotating means, respectively.

A piston-cylinder assembly 29 is provided at the upper end of the upper surface plate main shaft 21 so that the upper surface plate 5 and the grindstone 4 can be moved up and down together with the upper surface plate main shaft 21. And the piston-cylinder assembly 29
The upper platen 5 is moved down to lower the grinding wheel 4 on the work 1
9 can be pressed.

Next, the control unit 30 used in the double-head lapping machine 1 will be described. In FIG. 1, a control unit 30 includes a main controller 31 constituting a control unit, servo amplifiers 32, 33, 34 and 35, a rotation speed detector 36,
37, 38 and 39.

Servo amplifiers 32, 33, 34 and 35
Indicates that their output sides are servo motors 11,
Connected to the inputs of 24, 15 and 7, these servo motors generate power according to the operation signal and, in particular, perform voltage amplification corresponding to the rotation speed of the corresponding servo motor.
The corresponding servomotor receives the amplified voltage and rotates in a predetermined direction at a predetermined rotation speed. Here, the servo amplifiers 33, 35, 32, and 34 are examples of a first operation unit, a second operation unit, a third operation unit, and a fourth operation unit, respectively.

The rotation speed detectors 37, 39, 36 and 38
Are connected to the servo motors 24, 7, 11, and 15, respectively, to detect the rotation speeds of the corresponding servo motors. The first rotation speed detection unit, the second rotation speed detection unit, It is an example of a 3rd rotation speed detection means and a 4th rotation speed detection means.

The main controller 31 is connected to the input sections of the servo amplifiers 32, 33, 34 and 35, and simultaneously outputs a rotation signal corresponding to a predetermined direction and a constant speed of the servo motor corresponding to the corresponding servo amplifier. Then, the servo motors have a function of synchronously increasing and decreasing the rotation speeds of the respective servo motors until the rotation speeds reach a predetermined magnitude, another predetermined speed, and from the predetermined speed to zero.

The main controller 31 is also connected to the output side of the rotation speed detectors 36, 37, 38 and 39, and outputs a signal indicating the rotation speed and the rotation direction of the corresponding servo motor output from these detectors. It has a function of comparing the rotation speed and rotation direction of the corresponding servo motor set in advance and, if there is a difference, sending a correction signal to the servo amplifier 33 to correct the rotation speed and rotation direction of the corresponding servo motor. .

The main controller 31 controls the vertical movement of the piston-cylinder assembly 29 through a precision pressure directional control valve 40 for a predetermined time.

The main controller 31 has a function of reversing at least one of the upper platen 5, the lower platen 3, the sun gear 9, and the internal gear 12, which has been performed so far, at a predetermined rotational speed. In this case, the main controller 31 stops all the servo motors via the corresponding servo amplifiers, and rotates at least one of the upper surface plate 5, the lower surface plate 3, the sun gear 9, and the internal gear 12 in at least one rotation direction. The rotation speed is reset, and the operations of the upper stool 5, the lower stool 3, the sun gear 9, and the internal gear 12 are restarted.
The rotation speed of the reverse rotation is selected so that the work holder 17 rotates and revolves at a predetermined speed in a direction opposite to the conventional rotation. The time of this reversal is also changed by the main controller 3
1 is controlled. The work 19 in the work holder 17 is also rotated in the same manner as the work holder 17 with the opposing surface pressed against the lap surfaces of the grindstones 2 and 4. For this reason, the lap surface of the grindstones 2 and 4 wears into a concave or convex frustoconical shape or becomes clogged, and the molding must be performed again. At least one of the lower surface plate 3, the sun gear 9, and the internal gear 12 described above.
One can avoid for a long time without having to reverse and reset the speed. This not only increases the time interval between the grinding operations of the grinding wheel but also increases the productivity of the lapping machine by greatly reducing the loss time for the reverse rotation, as well as the labor cost. Go down.

The operation of the method and apparatus of the present invention will be described below with reference to the time chart of FIG. First, at time A, the rotations of all the servo motors 7, 11, 15, and 24 are started. The rotations of the upper stool 5, the lower stool 3, the sun gear 9, and the internal gear 12 are synchronized and increased by the rotation control signal of the main controller 31, and reach a predetermined preceding stage rotation speed at time B as shown in the figure. , Until a predetermined time C is reached. Here, a step between time A and time C is referred to as step 1.

Next, during the period from time C to time D, the rotation of the lower platen 3, the sun gear 9, and the internal gear 12 is increased by the rotation control signal of the main controller 31,
At time D, the actual number of revolutions is reached, which is maintained until time E, and the actual lapping is performed. Here, the step from time C to time E is named step 2.

At time E, the sun gear 9 and the upper stool 5 are reversed by the main controller 31 and the rotations of the lower stool 3 and the internal gear 12 decrease, but in the same direction. From time E to time F, the rotations of the upper stool 5, the lower stool 3, the sun gear 9, and the internal gear 12 are synchronized and change to reach a predetermined value as shown. Here, the rotation speeds of the upper stool 5, the lower stool 3, the sun gear 9, and the internal gear 12 are as illustrated, and are maintained until time G. From time F to time G, the work holder 17 rotates reversely at a predetermined rotation speed, and it is possible to prevent the grindstone surface from being worn due to inclination and clogging thereof for a long time. From time G to upper platen 5,
The rotations of the lower platen 3, the sun gear 9, and the internal gear 12 gradually decrease, and stop at time H. Here, a step from time E to time H is referred to as step 3.

Examples of the rotation speeds of the upper and lower plates, the sun gear, the internal gear, the rotation and revolution of the work holder, and the processing time in each of the above steps are as follows. Step 1 Number of rotations of upper platen -18 rotations / minute Number of rotations of lower platen 20 rotations / minute Number of rotations of sun gear -12 rotations / minute Number of rotations of internal gear 12 rotations / minute Revolution of work holder 6 rotations / minute Workpiece Rotation of the holder 18 rotations / minute Processing time 150 seconds Step 2 Upper surface plate rotation speed -23 rotations / minute Lower platen rotation speed 25 rotations / minute Sun gear rotation speed -18 rotations / minute Internal gear rotation speed 18 rotations / Rotation of the work holder 9 rotations / minute rotation of the work holder 27 rotations / minute machining time 100 seconds step 3 rotation speed of the upper surface plate -20 rotations / minute rotation speed of the lower surface plate 20 rotations / minute rotation speed of the sun gear 10 rotations / Min Internal gear rotation speed -18 rotation / min Work holder revolution -11 rotation / min Work holder rotation -21 rotation / min Machining time 150 seconds This example According to the above, it is understood that the rotation and the revolution of the work holder are reversed by the reverse rotation of the sun gear 9 and the internal gear 12.

In the example shown in FIG. 3, the process in one batch includes three steps, ie, step 1 of the pre-process, step 2 of the main process, and step 3 of the reverse process. However, the present invention is not limited to this. Depending on the number of forward rotation steps,
It is possible to increase the number of reversal steps.

Further, the reverse rotation of the work holder is performed by using a double-headed lapping machine in which the upper and lower platens and the sun gear are rotated independently of each other without fixing the internal gear to the machine base and rotating. This can be achieved by reversing at least one of the surface plate and the sun gear in a predetermined direction.

Further, the lower platen, the sun gear and the internal gear rotate independently of each other, and the upper platen rotates in accordance with the revolution determined by the rotation of the lower platen, the sun gear and the internal gear, and rotates on the lower surface of the platen. In a single-sided lapping machine in which a work is pressed by a freely provided pressing plate, at least one of a lower surface plate, a sun gear and an internal gear is selected.
One may be reversed by a predetermined rotation.

Further, the internal gear is fixed to the machine base and does not rotate, but rotates independently of the lower platen and the sun gear, and the upper platen rotates in accordance with the revolution determined by the rotation of the lower platen and the sun gear. In a single-sided lapping machine in which a work is pressed by a push plate rotatably provided on the lower surface of the surface plate, the work holder can be reversed by reversing at least one of the lower surface plate and the sun gear at a predetermined rotation. it can.

The lapping material provided on the surface plate may be not only a grindstone but also a polishing cloth or the like, and these are collectively referred to as a lapping member.

[0035]

In the present invention, at least one of the upper and lower platens, the sun gear and the internal gear, which rotates independently from the others, is reversed to reverse the rotation and revolution of the work holder. There is an effect that uneven wear and clogging of the wrap member can be prevented for a long period of time. This also has the effect that the period until reshaping can be lengthened. Further, in addition to these effects, there is also an effect that the productivity of the lapping machine is improved by performing the normal / reverse rotation without time loss.
Further, since the switching is automatically performed without any manual operation, there is an effect that labor costs can be reduced.

[Brief description of the drawings]

FIG. 1 is a schematic explanatory view of one embodiment of a rotation control device for a multi-spindle lapping machine according to the present invention.

FIG. 2 is a plan view of the lapping machine of FIG. 1 when an upper surface plate is removed.

FIG. 3 is a time chart of an example of an embodiment of a rotation control method for a multi-spindle lapping machine according to the present invention.

FIG. 4 is a time chart of a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Double-headed lapping machine 2 Whetstone 3 Lower surface plate 4 Whetstone 5 Upper surface plate 6 Lower surface plate main shaft 7 Servo motor 9 Sun gear 10 Sun gear main shaft 11 Servo motor 12 Internal gear 13 Lap machine stand 14 External teeth 15 Servo motor 17 Work holder 18 Outside Tooth gear portion 19 Work 20 Work insertion hole 21 Upper surface plate main spindle 24 Servo motor 29 Piston-cylinder assembly 30 Control unit 31 Main controller 32-35 Servo amplifier 36-39 Rotation speed detector 40 Precision pressure direction control valve

Claims (6)

[Claims] 1. A sun gear and an internal gear that coaxially surrounds the sun gear between an upper surface plate that can be arranged coaxially and a lower surface plate that has a wrap member on the upper surface, wherein the sun gear and the internal gear A work holder that meshes with both gears with an external gear formed on the outer periphery between them is arranged in the circumferential direction, and the upper and lower platens, the sun gear, and the internal gear are independent of each other about their axes. In the first case, the first and second rotating means, the third rotating means, and the fourth rotating means for rotating the upper and lower stool, the sun gear, and the internal gear are moved to the upper and lower stool. In the second case where the platen, sun gear and internal gear rotate about their axes and the lower platen, sun gear and internal gear rotate independently of the others, the lower platen, sun gear and internal gear rotate. First 2 rotation means, 3rd rotation means and 4th rotation means
In the third case, in which the internal gear does not rotate and the upper platen, lower platen and sun gear rotate independently of the other around the axis, the upper platen, lower platen and The first rotating means, the second rotating means, and the third rotating means for rotating the sun gear, the internal gear does not rotate,
In a fourth case in which the lower platen and the sun gear rotate independently of each other about their axes, a plurality of rotary shaft wraps provided with second rotating means and third rotating means for rotating the lower platen and the sun gear A method for controlling the rotation of a plurality of rotating shafts of a board, the method including a reversing step of rotating at least one of rotating means independently rotated in the opposite direction in the first to fourth cases. Rotation control method for multiple rotating shaft lapping machine. 2. The method according to claim 1, wherein the reversing step is performed after a lapse of a predetermined time from the start of lapping of the plurality of rotary lapping machines. 3. A sun gear and an internal gear that coaxially surrounds the sun gear between an upper surface plate that can be coaxially disposed and a lower surface plate that has a wrap member on the upper surface, wherein the sun gear and the internal gear A work holder meshing with both gears is provided in the circumferential direction with an external gear formed on the outer periphery between the upper and lower platens, the sun gear, and the internal gear. A first rotating means for rotating the upper and lower platens, the sun gear and the internal gear at a predetermined rotation speed in a predetermined rotation direction in a first case of independently rotating;
The rotating means, the third rotating means and the fourth rotating means rotate the upper and lower stool, the sun gear and the internal gear, the lower stool, the sun gear and the internal gear independently of each other about their axes. In the second case, the lower gear, the sun gear, and the internal gear are rotated in a predetermined rotation direction at a predetermined rotation speed by a second rotation means, a third rotation means, and a fourth rotation means. In the third case, the upper platen, the lower platen and the sun gear rotate independently of the others about these axes, and the upper platen, the lower platen and the sun gear rotate in a predetermined direction at a predetermined rotational speed. In the fourth case in which the lower surface plate and the sun gear rotate independently of each other without rotating the internal gear, the lower surface plate and the sun gear Predetermined in direction A rotation control device for a multi-spindle lapping machine, comprising a second rotation means and a third rotation means rotating at an angle, wherein the first case is connected to and corresponds to each of the first to fourth rotation means. A first operating means, a second operating means, a third operating means, and a fourth operating means for giving a predetermined rotating direction and a rotating speed to the rotating means; and in the second case, the second to fourth rotating means. The second operating means, the third operating means, and the fourth operating means connected to each other, and in the third case, the first operating means, the second operating means, and the third operating means connected to the first to third rotating means. Operating means, and in the fourth case, the second
And a second operating means and a third operating means connected to the third rotating means, and an operating signal corresponding to the rotation direction and the rotating speed of the corresponding rotating means connected to the first to fourth operating means and corresponding operation. Means, at least one of the first to fourth rotating means in the first case, and the second means in the second case.
At least one of the first to third rotating means in the third case, and at least one of the second and third rotating means in the fourth case. And a control unit for sending a reversal signal for reversing at least one of them to a corresponding operation unit. 4. The lapping machine control device according to claim 3, wherein the reverse rotation signal is a signal corresponding to a reverse rotation direction and a predetermined rotation speed. 5. The rotation for a multi-axis lapping machine according to claim 3, wherein the control means sends the reverse rotation signal to a corresponding operation means a predetermined time after the multi-axis lapping machine starts lapping. Control device. 6. The first to fourth rotating means comprise a servomotor, the first to fourth operating means comprise a servo amplifier for generating power according to an operation signal, and the first to fourth detecting means comprise: The rotation control device for a multi-axis lapping machine according to any one of claims 3 to 5, further comprising a rotation speed detector for detecting a corresponding servo motor rotation speed.