JP2001019485A - Glass composition - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a glass having a high specific Young's modulus. SOLUTION: In the glass composition, ranges of the main components are specified to >=65 wt.% and <=80 wt.% of SiO2, >=3 wt.% and <=15 wt.% of Al2O3, >=3 wt.% and <=15 wt.% of Li2O, >=0.2 wt.% and <=5 wt.% of P2O5, >=0.1 wt.% to <=10 wt.% of TiO2, and >=0.1 and <=0.9 of TiO2/P2O5.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a glass composition, particularly a glass composition suitable for crystallized glass. More specifically, it relates to the composition of a crystallized glass magnetic disk.

[0002]

2. Description of the Related Art Conventionally, as a substrate for a magnetic disk,
Aluminum substrates and glass substrates have been put to practical use.
Among them, a glass substrate has received the most attention because of its excellent surface smoothness and mechanical strength. As such a glass substrate, a chemically strengthened glass substrate in which the surface of the glass substrate is strengthened by ion exchange, and a crystallized glass substrate in which a crystal component is precipitated on the substrate to strengthen the bond are known.

[0003]

By the way, the recent demand for the performance of the substrate is becoming stricter day by day.
In particular, there is a demand for an improvement in performance with respect to strength directly related to deflection and warpage during high-speed rotation. This can be represented by the specific elastic modulus (= Young's modulus / specific gravity) of the substrate material, and the higher the numerical value, the more desirable. Further, there is a demand for improvement in productivity while satisfying such requirements.
Therefore, an object of the present invention is to provide a composition with improved specific elastic modulus of glass and higher productivity.

[0004]

Means for Solving the Problems In order to achieve the above object, the invention described in claim 1 provides a composition range of a main component,
SiO ₂ is 65 wt% or more and 80 wt% or less, A
l ₂ O ₃ is and 15 wt% or less at 3 wt% or more, Li ₂
O is 3 wt% or more and 15 wt% or less, P ₂ O ₅ is 0.2 wt% or more and 5 wt% or less, TiO ₂ is 0.1 wt% or more and 10 wt% or less, TiO ₂ /
P ₂ O ₅ is 0.1 wt% or more and 0.9 wt% or less,
It is characterized by the following.

[0005]

Embodiments of the present invention will be described below. In the glass substrate of the embodiment according to the present invention, the composition range of the main component is such that SiO ₂ is 65 wt% or more and 80 wt% or more.
wt% or less, Al ₂ O ₃ is 3 wt% or more and 15 wt%
In the following, Li ₂ O is 3 wt% or more and 15 wt% or less,
P ₂ O ₅ ≧ 0.2 wt% and ≦ 5 wt%, TiO
₂ is 0.1 wt% or more and 10 wt% or less, and TiO ₂ /
P ₂ O ₅ is 0.1 or more and 0.9.

Since SiO ₂ is a glass-forming oxide, if its composition ratio is less than 65% by weight, its melting property deteriorates and 80 w
If it exceeds t%, the glass will be in a stable state, and it will be difficult for crystals to precipitate.

[0007] Al ₂ O ₃ is a glass intermediate oxide, and is a component of aluminum borate-based crystals that are crystal phases precipitated by heat treatment. If the composition ratio is less than 3 wt%, the number of precipitated crystals is small, and strength cannot be obtained. If the composition ratio is more than 15 wt%, the melting temperature becomes high and the glass tends to be devitrified.

[0008] Li ₂ O plays a role as a flux and is a component of lithium disilicate-based crystals. If the composition ratio is less than 3 wt%, the precipitation of lithium disilicate as a crystal phase becomes insufficient, and if it exceeds 15 wt%, the lithium disilicate in the precipitated crystal phase becomes unstable and crystallization becomes difficult to control. In addition, chemical durability may be reduced and the magnetic film may be affected.
The stability in the washing process is deteriorated.

P ₂ O ₅ is a nucleating agent that functions as a flux and precipitates lithium disilicate-based crystals, and is an important component for uniformly depositing crystals throughout the glass.
If the composition ratio is less than 0.2 wt%, it is difficult to form sufficient crystal nuclei, crystal grains are coarsened or crystals are heterogeneously deposited, and it is difficult to obtain a fine and uniform crystal structure,
In polishing, a smooth surface required as a disk substrate cannot be obtained. Further, the effect as a flux for the hardly-fusible ZrO ₂ component cannot be obtained. If it exceeds 5% by weight, the reactivity with the furnace agent at the time of melting increases, and the devitrification also increases, so that the productivity at the time of melt molding decreases. In addition, the chemical durability may be reduced, which may affect the magnetic film, and the stability in the polishing-cleaning process may be deteriorated.

TiO ₂ is a flux and promotes crystal growth. If the composition ratio is less than 0.1 wt%, the meltability deteriorates, and the crystal growth becomes difficult. If the composition ratio exceeds 10 wt%, crystallization is rapidly promoted, the control of the crystallization state becomes difficult, and the deposited crystals become coarse. , Crystal phase heterogeneity occurs,
A fine and uniform crystal structure cannot be obtained, and a smooth surface required as a disk substrate in polishing cannot be obtained. Further, devitrification tends to occur during melt molding, and productivity is reduced.

TiO ₂ / P ₂ O ₅ is a ratio of a flux that promotes crystal growth to a nucleating agent that precipitates lithium disilicate-based crystals. If it is larger than 0.9, the crystals grow too much, and it is difficult to obtain the desired characteristics.

The manufacturing method will be described below. Raw materials including the composition of the main components of the finally produced glass substrate are sufficiently mixed at a predetermined ratio, and the mixture is put into a platinum crucible and melted. After melting, it is poured into a mold to form a rough shape. This is annealed to room temperature. Subsequently, the temperature is maintained at the indicated primary heat treatment temperature and primary treatment time (heat treatment), and crystal nucleation is performed. Subsequently, the crystal nucleus is grown while maintaining the temperature at the secondary heat treatment and the secondary treatment time. By cooling this, the desired crystallized glass is obtained.

The glass substrate obtained by the above-described manufacturing method has a SiO ₂ content of 65 wt% or more and 80 wt% or less, an Al ₂ O 3 content of ₃ wt% or more and 15 wt% or less,
i ₂ O is 3 wt% or more and 15 wt% or less, P ₂ O ₅ is 0.2 wt% or more and 5 wt% or less, and TiO ₂ is 0.2 wt% or less.
TiO ₂ / P ₂ O ₅ ≧ 1 wt% and ≦ 10 wt%
Is 0.1 or more and 0.9 or less, it is possible to obtain a very high specific modulus and a high productivity.

[0014]

Next, a specific example of the embodiment will be described. Material composition ratio (unit: wt%), values of conditional expressions, melting temperature and melting time, primary heat treatment temperature and primary treatment time, secondary heat treatment temperature and secondary constituting glass of the first to fourth embodiments. Table 1 shows the treatment time, main precipitated crystal phase, sub-precipitated crystal phase, average crystal grain size, specific gravity, Young's modulus, and specific elastic modulus. Table 2 similarly shows the glasses of the fifth to eighth examples. Table 3 similarly shows the ninth to twelfth examples. Similarly, the thirteenth
Table 4 shows the glasses according to the sixteenth examples. Similarly, the seventeenth to
Table 5 shows the glass of the twentieth example. Table 6 similarly shows glasses of Examples 21 to 24.

[0015]

[Table 1]

[0016]

[Table 2]

[0017]

[Table 3]

[0018]

[Table 4]

[0019]

[Table 5]

[0020]

[Table 6]

The glass composition of the first embodiment is as follows: 74.6 wt% of SiO ₂ , 6.5 wt% of Al ₂ O ₃ , 8.5 wt% of Li ₂ O, 3.3 wt% of P ₂ O ₅ , TiO ₂ 2.
2wt%, 2.9wt% CaO, 1.5wt K ₂ O
%, 0.5 wt% of Sb ₂ O _3, and 0.1% of TiO ₂ / P ₂ O ₅ .
The composition ratio is 67.

The raw materials are prepared so as to contain the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 575 ° C., and the primary processing time is 5.
As a result of treatment for 5 hours at a secondary treatment temperature of 700 ° C. and a secondary treatment time of 3 hours, a glass having a characteristic that the main precipitated crystal phase is lithium disilicate, the sub-precipitated crystal phase is quartz, and the specific elastic modulus is 40.2. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The basic composition is Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since CaO acting as a flux is added, a high melting property and a stable crystal phase can be obtained. Composition ratio is 0.1wt
%, The meltability is not sufficiently improved. 5wt
%, The glass becomes stable and crystallization is suppressed,
It becomes difficult to obtain the required strength.

Further, since K ₂ O serving as a flux is added, the stability during production is improved. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If the content exceeds 5 wt%, the glass becomes stable, crystallization is suppressed, the chemical durability is reduced, the magnetic film may be affected, and the stability in the polishing-cleaning step is deteriorated.

Further, since Sb ₂ O ₃ serving as a fining agent is added, stability during production is improved. However, if the composition ratio is less than 0.1 wt%, a sufficient fining effect cannot be obtained, and the productivity is reduced. If it exceeds 5 wt%, the crystallization of the glass becomes unstable and the control of the precipitated crystal phase becomes impossible, so that it becomes difficult to obtain the required characteristics.

The glass composition of the second embodiment is as follows: 72.5% by weight of SiO ₂ , 7.2% by weight of Al ₂ O ₃ , 6% by weight of Li ₂ O, 4% by weight of P ₂ O ₅ , and 3% by weight of TiO ₂ . 0.6wt
%, 2.2 wt% of CaO, 3 wt% of K ₂ O, Sb ₂ O
₃ has a composition ratio of 1.5 wt% and TiO ₂ / P ₂ O ₅ has a composition ratio of 0.90.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1480 degrees, the melting time is 2.5 hours, the primary processing temperature is 570 degrees, the primary processing time is 5.
As a result of treatment for 5 hours at a secondary treatment temperature of 700 ° C. and a secondary treatment time of 3 hours, the glass whose main precipitated crystal phase is quartz, whose secondary precipitated crystal phase is lithium disilicate, and whose specific elastic modulus is 37.2, is obtained. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since CaO acting as a flux is added, a high melting property and a stable crystal phase can be obtained. Composition ratio is 0.1wt
%, The meltability is not sufficiently improved. 5wt
%, The glass becomes stable and crystallization is suppressed,
It becomes difficult to obtain the required strength.

Further, since K ₂ O serving as a flux is added, stability during production is improved. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If the content exceeds 5 wt%, the glass becomes stable, crystallization is suppressed, the chemical durability is reduced, the magnetic film may be affected, and the stability in the polishing-cleaning step is deteriorated.

Further, since Sb ₂ O ₃ serving as a fining agent is added, stability during production is improved. However, if the composition ratio is less than 0.1 wt%, a sufficient fining effect cannot be obtained, and the productivity is reduced. If it exceeds 5 wt%, the crystallization of the glass becomes unstable and the control of the precipitated crystal phase becomes impossible, so that it becomes difficult to obtain the required characteristics.

The glass composition of the third embodiment is as follows: 76.3 wt% of SiO ₂ , 10.8 wt% of Al ₂ O ₃ , Li ₂ O
The 8.5 wt%, 2.4 wt% of P ₂ O _5, the TiO ₂ 2
wt%, a composition ratio of TiO ₂ / P ₂ O ₅ and 0.83.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1440 ° C., the melting time is 2.5 hours, the primary processing temperature is 580 ° C., the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of treatment at 690 ° C. and a secondary treatment time of 2.5 hours, a glass substrate was obtained in which the main precipitated crystal phase was lithium disilicate, the sub-precipitated crystal phase was quartz, and the specific elastic modulus was 39.2. . The above composition has not only a high specific modulus, but also a very high productivity.

The glass composition of the fourth embodiment is such that SiO ₂ is 74 wt%, Al ₂ O ₃ is 8 wt%, and Li ₂ O is 9.5 w%.
t%, P ₂ O _{5 4.5} wt%, TiO ₂ 4 wt%, T
iO ₂ / P ₂ O ₅ has a composition ratio of 0.89.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 570 ° C., and the primary processing time is 5.
As a result of treatment for 5 hours at a secondary treatment temperature of 700 ° C. and a secondary treatment time of 3 hours, a glass having a characteristic that the main precipitated crystal phase is lithium disilicate, the sub-precipitated crystal phase is quartz, and the specific elastic modulus is 39.4 is obtained. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The glass composition of the fifth embodiment is as follows: 72.2 wt% of SiO ₂ , 11.3 wt% of Al ₂ O ₃ , and Li ₂ O
The 10.5 wt%, 3 wt% of P ₂ O _5, the TiO ₂ 2.
The composition ratio is 5 wt%, CaO is 0.5 wt%, and TiO ₂ / P ₂ O ₅ is 0.83.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1440 degrees, the melting time is 2.5 hours, the primary processing temperature is 575 degrees, the primary processing time is 5.
As a result of treatment for 5 hours at a secondary treatment temperature of 700 ° C. and a secondary treatment time of 3 hours, a glass having a characteristic that the main precipitated crystal phase is lithium disilicate, the sub-precipitated crystal phase is quartz, and the specific elastic modulus is 39.8. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since CaO acting as a flux is added, a high melting property and a stable crystal phase can be obtained. Composition ratio is 0.1wt
%, The meltability is not sufficiently improved. 5wt
%, The glass becomes stable and crystallization is suppressed,
It becomes difficult to obtain the required strength.

The glass composition of the sixth embodiment is as follows: 75.5 wt% of SiO ₂ , 10.2 wt% of Al ₂ O ₃ , and Li ₂ O
7.8 wt%, P ₂ O ₅ 2.5 wt%, TiO ₂ 2
wt%, CaO 2 wt%, TiO ₂ / P ₂ O ₅ 0.8
The composition ratio is 0.

The raw materials are prepared so as to contain the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 580 ° C., the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of treatment at 690 ° C. and a secondary treatment time of 2.5 hours, a glass substrate was obtained in which the main precipitated crystal phase was quartz, the sub-precipitated crystal phase was lithium disilicate, and the specific elastic modulus was 39.4. . The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since CaO acting as a flux is added, a high melting property and a stable crystal phase can be obtained. Composition ratio is 0.1wt
%, The meltability is not sufficiently improved. 5wt
%, The glass becomes stable and crystallization is suppressed,
It becomes difficult to obtain the required strength.

The glass composition of the seventh embodiment is as follows: SiO ₂ : 71.5 wt%, Al ₂ O ₃ : 10.5 wt%, Li ₂ O
The 9.5 wt%, 4 wt% of P ₂ O _5, the TiO ₂ 3.5
wt%, 1 wt% of K ₂ O, the TiO ₂ / P ₂ O ₅ 0.88
Is the composition ratio.

The raw materials were prepared so as to have the above composition ratio, and the melting temperature was 1460 ° C., the melting time was 2.5 hours, the primary processing temperature was 570 ° C., and the primary processing time was 5.
As a result of treating for 5 hours at a secondary treatment temperature of 720 degrees and a secondary treatment time of 4 hours, a glass having a characteristic that the main precipitated crystal phase is lithium disilicate, the sub-precipitated crystal phase is quartz, and the specific elastic modulus is 39.4 is obtained. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since K ₂ O serving as a flux is added, stability during production is improved. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If the content exceeds 5 wt%, the glass becomes stable, crystallization is suppressed, the chemical durability is reduced, the magnetic film may be affected, and the stability in the polishing-cleaning step is deteriorated.

The glass composition of the eighth embodiment is as follows: 73.5 wt% of SiO ₂ , 10.2 wt% of Al ₂ O ₃ , and Li ₂ O
The 9 wt%, 3.8 wt% of P ₂ O _5, the TiO ₂ 0.5
wt%, 3 wt% of K ₂ O, the TiO ₂ / P ₂ O ₅ 0.13
Is the composition ratio.

The raw materials are prepared so as to contain the above composition ratio, and the melting temperature is 1440 ° C., the melting time is 2.5 hours, the primary processing temperature is 575 ° C., and the primary processing time is 5.
As a result of treatment for 5 hours at a secondary treatment temperature of 700 ° C. and a secondary treatment time of 3 hours, a glass having a characteristic that the main precipitated crystal phase is lithium disilicate, the sub-precipitated crystal phase is quartz, and the specific elastic modulus is 39.7. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since K ₂ O serving as a flux is added, stability during production is improved. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If the content exceeds 5 wt%, the glass becomes stable, crystallization is suppressed, the chemical durability is reduced, the magnetic film may be affected, and the stability in the polishing-cleaning step is deteriorated.

The glass composition of the ninth embodiment is as follows: 76 wt% of SiO ₂ , 11.3 wt% of Al ₂ O ₃ , 8.7 wt% of Li ₂ O, 2.5 wt% of P ₂ O ₅ , TiO ₂ 1w
The composition ratio is t%, Sb ₂ O ₃ is 0.5 wt%, and TiO ₂ / P ₂ O ₅ is 0.4.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 580 ° C., the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of treatment at 690 ° C. and a secondary treatment time of 2.5 hours, a glass substrate was obtained in which the main precipitated crystal phase was lithium disilicate, the sub-precipitated crystal phase was quartz, and the specific elastic modulus was 39.7. . The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since Sb ₂ O ₃ serving as a fining agent is added, stability during production is improved. However, if the composition ratio is less than 0.1 wt%, a sufficient fining effect cannot be obtained, and the productivity is reduced. If it exceeds 5 wt%, the crystallization of the glass becomes unstable and the control of the precipitated crystal phase becomes impossible, so that it becomes difficult to obtain the required characteristics.

The glass composition of the tenth embodiment was SiO ₂
73.8 wt%, Al ₂ O ₃ 9.7 wt%, Li ₂ O
The 11.5 wt%, 2 wt% of P ₂ O _5, the TiO ₂ 1.
5 wt%, Sb ₂ O ₃ 1.5 wt%, TiO ₂ / P ₂ O ₅
Is a composition ratio of 0.75.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 580 ° C., the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of the treatment at 700 degrees and the secondary treatment time of 3 hours, the main precipitated crystal phase was lithium disilicate,
A glass substrate was obtained in which the by-precipitated crystal phase was quartz and the specific elastic modulus was 39.2. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since Sb ₂ O ₃ serving as a fining agent is added, stability during production is improved. However, if the composition ratio is less than 0.1 wt%, a sufficient fining effect cannot be obtained, and the productivity is reduced. If it exceeds 5 wt%, the crystallization of the glass becomes unstable and the control of the precipitated crystal phase becomes impossible, so that it becomes difficult to obtain the required characteristics.

The glass composition of the eleventh embodiment was SiO ₂
72.8 wt%, Al ₂ O ₃ 11.7 wt%, Li ₂
O: 10.5 wt%, P ₂ O ₅ : 2.2 wt%, TiO ₂
The 0.8wt%, B ₂ O ₃ to _{2wt%, TiO 2 / P 2} O 5
Is a composition ratio of 0.36.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1440 ° C., the melting time is 2.5 hours, the primary processing temperature is 580 ° C., the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of the treatment at 700 degrees and the secondary treatment time of 3 hours, the main precipitated crystal phase was lithium disilicate,
A glass substrate was obtained in which the by-precipitated crystal phase was quartz and the specific elastic modulus was 40.5. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since B ₂ O ₃ serving as a former is added, the phase separation of the glass is promoted, and the crystal precipitation and growth are promoted. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If it exceeds 15% by weight, the glass tends to be devitrified and molding becomes difficult, and the crystals become coarse and fine crystals cannot be obtained.

The glass composition of the twelfth embodiment was SiO ₂
74 wt%, Al ₂ O ₃ 10.7 wt%, Li ₂ O 9.8 wt%, P ₂ O ₅ 1.5 wt%, TiO ₂ 1 w
The composition ratio is t%, B ₂ O ₃ is 3 wt%, and TiO ₂ / P ₂ O ₅ is 0.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1440 ° C., the melting time is 2.5 hours, the primary processing temperature is 585 ° C., the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of the treatment at 700 degrees and the secondary treatment time of 3 hours, the main precipitated crystal phase was lithium disilicate,
A glass substrate having a crystal having a sub-precipitated crystal phase and a specific elastic modulus of 40.8 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since B ₂ O ₃ serving as a former is added, the phase separation of the glass is promoted, and the crystal precipitation and growth are promoted. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If it exceeds 15% by weight, the glass tends to be devitrified and molding becomes difficult, and the crystals become coarse and fine crystals cannot be obtained.

The glass composition of the thirteenth embodiment was SiO ₂
74 wt%, Al ₂ O ₃ 11 wt%, Li ₂ O 9.
5 wt%, 3 wt% of P ₂ O _5, the TiO ₂ 1.5 wt
%, MgO is 1 wt%, and TiO ₂ / P ₂ O ₅ is 0.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1440 ° C., the melting time is 2.5 hours, the primary processing temperature is 575 ° C., and the primary processing time is 5.
As a result of treatment for 5 hours at a secondary treatment temperature of 700 ° C. and a secondary treatment time of 3 hours, a glass having a characteristic that a main precipitated crystal phase is lithium disilicate, a sub-precipitated crystal phase is quartz, and a specific elastic modulus is 39.8. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since MgO that acts as a flux is added, granular quartz crystals, which are one of the crystal phases, are aggregated to form crystal particle masses. However, if the composition ratio is less than 0.1 wt%, the working temperature range becomes narrow, and the chemical durability of the glass matrix phase does not improve. If it exceeds 12% by weight, it is difficult to obtain the required strength due to precipitation of another crystal phase.

The glass composition of the fourteenth embodiment was SiO ₂
74.2 wt%, Al ₂ O ₃ 11.1 wt%, Li ₂
O is 8 wt%, P ₂ O ₅ is 1.5 wt%, and TiO ₂ is 1.
The composition ratio is 2 wt%, MgO is 4 wt%, and TiO ₂ / P ₂ O ₅ is 0.

The raw materials were prepared so as to contain the above composition ratio, and the melting temperature was 1440 degrees, the melting time was 2.5 hours, the primary processing temperature was 585 degrees, the primary processing time was 5 hours, and the secondary processing temperature was in accordance with the above-mentioned manufacturing method. As a result of treatment at 700 ° C. for a secondary treatment time of 3 hours, a glass substrate was obtained in which the main precipitated crystal phase was quartz, the sub-precipitated crystal phase was lithium disilicate, and the specific elastic modulus was 39.6. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since MgO that acts as a flux is added, granular quartz crystals, which are one of the crystal phases, are aggregated to form crystal particle masses. However, if the composition ratio is less than 0.1 wt%, the working temperature range becomes narrow, and the chemical durability of the glass matrix phase does not improve. If it exceeds 12% by weight, it is difficult to obtain the required strength due to precipitation of another crystal phase.

The glass composition of the fifteenth embodiment was SiO ₂
76.8 wt%, Al ₂ O ₃ 10.8 wt%, Li ₂
The composition ratio of O is 8.2 wt%, P ₂ O ₅ is 1.2 wt%, TiO ₂ is 1 wt%, BaO is 2 wt%, and TiO ₂ / P ₂ O ₅ is 0.83 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 585 ° C., the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of treatment at 690 ° C. and a secondary treatment time of 2.5 hours, a glass substrate was obtained in which the main precipitated crystal phase was quartz, the sub-precipitated crystal phase was lithium disilicate, and the specific elastic modulus was 38.9. . The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since BaO serving as a flux is added, stability during production is improved. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If it exceeds 5% by weight, the glass becomes stable, crystallization is suppressed, and it becomes difficult to obtain the required strength.

The glass composition of the sixteenth embodiment was SiO ₂
The 75.5wt%, 11wt% of Al ₂ O _3, 9.3wt% of Li ₂ O, 1wt% of P ₂ O _5, 0.2w of TiO ₂
The composition ratio is t%, BaO is 3 wt%, and TiO ₂ / P ₂ O ₅ is 0.

The raw materials were prepared so as to have the above composition ratio, and the melting temperature was 1480 ° C. and the melting time was 2 according to the above-mentioned production method.
Time, primary processing temperature 585 degrees, primary processing time 5 hours, 2
As a result of the treatment at the next treatment temperature of 690 ° C. and the second treatment time of 2.5 hours, a glass substrate having a characteristic that the main precipitated crystal phase is lithium disilicate, the sub-precipitated crystal phase is quartz, and the specific elastic modulus is 38.8 is obtained. Obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since BaO serving as a flux is added, stability during production is improved. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If it exceeds 5% by weight, the glass becomes stable, crystallization is suppressed, and it becomes difficult to obtain the required strength.

The glass composition of the seventeenth embodiment was SiO ₂
The 74.5wt%, 12wt% of Al ₂ O _3, 7.2wt% of Li ₂ O, 4wt% of P ₂ O _5, 2wt of TiO ₂
%, ZnO 0.3 wt%, TiO ₂ / P ₂ O ₅ 0.5
Is the composition ratio.

The raw materials are prepared so as to contain the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 570 ° C., and the primary processing time is 5.
As a result of treatment for 5 hours at a secondary treatment temperature of 700 ° C. and a secondary treatment time of 3 hours, a glass having a main precipitated crystal phase of quartz, a sub-precipitated crystal phase of lithium disilicate and a specific elastic modulus of 39.3 is obtained. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
The addition of ZnO acting as a flux aids uniform crystal precipitation. However, if the composition ratio is less than 0.1% by weight, sufficient improvement in crystal homogenization cannot be achieved. If it exceeds 5% by weight, the glass becomes stable, crystallization is suppressed, and it becomes difficult to obtain the required strength.

The glass composition of the eighteenth embodiment was SiO ₂
73.2 wt%, Al ₂ O ₃ 10.5 wt%, Li ₂
O to 9.8wt%, P ₂ O ₅ to 2.5 wt%, the TiO ₂ 2wt%, 2wt% of ZnO, the _{TiO 2 / P 2 O 5 0} .
The composition ratio is 8.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 580 ° C., the primary processing time is 5 hours, the secondary processing temperature is As a result of treatment at 700 degrees and a secondary treatment time of 3 hours, the main precipitated crystal phase was lithium disilicate,
A glass substrate was obtained in which the by-precipitated crystal phase was quartz and the specific elastic modulus was 39.2. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is Si, which is the basic composition.
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
The addition of ZnO acting as a flux aids uniform crystal precipitation. However, if the composition ratio is less than 0.1% by weight, sufficient improvement in crystal homogenization cannot be achieved. If it exceeds 5% by weight, the glass becomes stable, crystallization is suppressed, and it becomes difficult to obtain the required strength.

The glass composition of the nineteenth embodiment was SiO ₂
73.2 wt%, Al ₂ O ₃ 11.7 wt%, Li ₂
O and 10.1 wt%, 2.5 wt% of P ₂ O _5, TiO ₂
The 2 wt%, 0.5 wt% of _{Nb 2 O 5, TiO 2 /} P 2 O
₅ is a composition ratio of 0.8.

The raw materials were prepared so as to have the above composition ratio, and the melting temperature was 1440 ° C., the melting time was 2.5 hours, the primary processing temperature was 580 ° C., the primary processing time was 5 hours, and the secondary processing temperature was in accordance with the above-mentioned manufacturing method. As a result of the treatment at 700 degrees and the secondary treatment time of 3 hours, the main precipitated crystal phase was lithium disilicate,
A glass substrate was obtained in which the by-precipitated crystal phase was quartz and the specific elastic modulus was 39.6. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since Nb ₂ O ₅ acting as a flux is added, the nucleating agent material increases. However, the composition ratio is 0.1 wt%
If it is less than the above, sufficient improvement in rigidity cannot be achieved. 5wt%
If it exceeds, the crystallization of the glass becomes unstable, the control of the precipitated crystal phase becomes impossible, and it becomes difficult to obtain the required characteristics.

The glass composition of the twentieth embodiment was SiO ₂
72 wt%, Al ₂ O ₃ 12.6 wt%, Li ₂ O 13.2 wt%, P ₂ O ₅ 0.5 wt%, TiO ₂ 0.2 wt%, Nb ₂ O ₅ 1.5 wt% , TiO ₂ / P ₂
O ₅ has a composition ratio of 0.4.

The raw materials were prepared so as to contain the above composition ratio, and the melting temperature was 1440 ° C., the melting time was 2.5 hours, the primary processing temperature was 600 ° C., and the primary processing time was 4.
As a result of treatment for 5 hours at a secondary treatment temperature of 700 ° C. and a secondary treatment time of 3 hours, a glass having a characteristic that the main precipitated crystal phase is lithium disilicate, the sub-precipitated crystal phase is quartz, and the specific elastic modulus is 38.8. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since Nb ₂ O ₅ acting as a flux is added, the nucleating agent material increases. However, the composition ratio is 0.1 wt%
If it is less than the above, sufficient improvement in rigidity cannot be achieved. 5wt%
If it exceeds, the crystallization of the glass becomes unstable, the control of the precipitated crystal phase becomes impossible, and it becomes difficult to obtain the required characteristics.

The glass composition of the twenty-first embodiment was SiO ₂
77 wt%, Al ₂ O ₃ 8.3 wt%, Li ₂ O 1
0 wt%, P ₂ O ₅ 2 wt%, TiO ₂ 1.5 wt
%, Ta ₂ O ₅ at 1.2 wt%, and TiO ₂ / P ₂ O ₅ at 0.
The composition ratio is 75.

The raw materials were prepared so as to have the above composition ratios, and the melting temperature was 1460 ° C., the melting time was 2.5 hours, the primary processing temperature was 580 ° C., the primary processing time was 5 hours, and the secondary processing temperature was in accordance with the above-mentioned manufacturing method. As a result of treatment at 690 ° C. and a secondary treatment time of 2.5 hours, a glass substrate having a characteristic that the main precipitated crystal phase was lithium disilicate and the sub-precipitated crystal phase was quartz and the specific elastic modulus was 36.8 was obtained. . The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since Ta ₂ O ₅ serving as a flux is added, the meltability and strength are improved, and the chemical durability of the glass matrix phase is improved. However, if the composition ratio is less than 0.1 wt%, the rigidity cannot be sufficiently improved. If the content exceeds 5 wt%, crystallization of the glass becomes unstable, the crystal phase to be precipitated cannot be controlled, and it becomes difficult to obtain desired characteristics.

The glass composition of the twenty-second embodiment was SiO ₂
70.5 wt%, Al ₂ O ₃ 9.8 wt%, Li ₂ O
The 11.7wt%, 3wt% of P ₂ O _5, 1w of TiO ₂
t%, Ta ₂ O ₅ to 4 wt%, the TiO ₂ / P ₂ O ₅ 0.3
The composition ratio is 3.

The raw materials were prepared so as to have the above composition ratio, and the melting temperature was 1520 ° C., the melting time was 1.75 hours, the primary processing temperature was 575 ° C., the primary processing time was 5.5 hours, and the secondary processing was performed according to the above-mentioned manufacturing method. As a result of treatment at a treatment temperature of 700 ° C. and a secondary treatment time of 4 hours, the main precipitated crystal phase was lithium disilicate, the sub-precipitated crystal phase was quartz, and the specific elastic modulus was 35.
A glass substrate having a characteristic of 2 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since Ta ₂ O ₅ serving as a flux is added, the meltability and strength are improved, and the chemical durability of the glass matrix phase is improved. However, if the composition ratio is less than 0.1 wt%, the rigidity cannot be sufficiently improved. If the content exceeds 5 wt%, crystallization of the glass becomes unstable, the crystal phase to be precipitated cannot be controlled, and it becomes difficult to obtain desired characteristics.

The glass composition of the twenty-third embodiment was SiO ₂
76 wt%, Al ₂ O ₃ 9.5 wt%, Li ₂ O 9.5 wt%, P ₂ O ₅ 2.5 wt%, TiO ₂ 1.
5 wt%, 1 wt% of La ₂ O _3, a TiO ₂ / P ₂ O ₅ 0
Is the composition ratio.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 580 ° C., the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of the treatment at 690 degrees and the secondary treatment time of 3 hours, the main precipitated crystal phase was lithium disilicate,
A glass substrate was obtained in which the by-precipitated crystal phase was quartz and the specific elastic modulus was 37.2. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since La ₂ O ₃ acting as a flux is added, crystal precipitation is suppressed. However, if the composition ratio is less than 0.1 wt%, the rigidity cannot be sufficiently improved. If it exceeds 5 wt%,
The crystallization of the glass becomes unstable, the crystal phase to be precipitated cannot be controlled, and it becomes difficult to obtain the required characteristics.

The glass composition of the twenty-fourth embodiment was SiO ₂
67.3 wt%, Al ₂ O ₃ 9.7 wt%, Li ₂ O
The 12 wt%, 4 wt% of P ₂ O _5, 4wt of TiO ₂
%, La ₂ O ₃ is 4 wt%, and TiO ₂ / P ₂ O ₅ is 3.

The raw materials were prepared so as to have the above composition ratio, and the melting temperature was 1500 ° C. and the melting time was 2 according to the above-mentioned production method.
Time, the primary processing temperature was 570 degrees, the primary processing time was 5.5 hours, the secondary processing temperature was 720 degrees, and the secondary processing time was 4 hours. As a result, the main precipitated crystal phase was lithium disilicate,
A glass substrate was obtained in which the by-precipitated crystal phase was quartz and the specific elastic modulus was 36.2. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ and TiO ₂ ,
Since La ₂ O ₃ acting as a flux is added, crystal precipitation is suppressed. However, if the composition ratio is less than 0.1 wt%, the rigidity cannot be sufficiently improved. If it exceeds 5 wt%,
The crystallization of the glass becomes unstable, the crystal phase to be precipitated cannot be controlled, and it becomes difficult to obtain the required characteristics.

[0095]

According to the present invention, a glass substrate having a specific elastic modulus of 30 or more and high productivity can be obtained.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Hiroshi Yugame 2-3-13 Azuchicho, Chuo-ku, Osaka City Inside Osaka International Building Minolta Co., Ltd. (72) Kazuhiko Ishimaru 2-3-3 Azuchicho, Chuo-ku, Osaka-shi No.13 Osaka International Building Minolta Co., Ltd. F-term (reference) 4G062 AA11 BB01 BB09 DA06 DA07 DB03 DB04 DC01 DD02 DD03 DE01 DF01 EA03 EA04 EB01 EC01 ED01 EE01 EF01 EG01 FA01 FB02 FB03 FC01 FD01 FE01 FF01 GA01 F01 GA01 GC01 GD01 GE01 HH01 HH03 HH05 HH07 HH09 HH11 HH13 HH15 HH17 HH20 JJ01 JJ03 JJ05 JJ07 JJ10 KK01 KK03 KK05 KK07 KK10 MM27 NN33 QQ02 QQ06 5D006 CB04 CB07 DA03 FA00

Claims (1)

[Claims] 1. The composition range of a main component is as follows: SiO ₂ is 65 wt% or more and 80 wt% or less, Al ₂ O ₃ is 3 wt% or more and 15 wt% or less, Li ₂ O is 3 wt% or more and 15 wt% or less. P ₂ O ₅ is 0.2 wt% or more and 5 wt% or less, TiO ₂ is 0.1 wt% or more and 10 wt% or less, TiO ₂ / P ₂ O ₅ is 0.1 wt% or more and 0.9 w%.
A glass composition characterized by being at most t%.