JP2001019469A - Glass composition - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a glass having a high specific Young's modulus. SOLUTION: In the glass composition, ranges of the main components are specified to >=65 wt.% and <=80 wt.% of SiO2, >=3 wt.% and <=15 wt.% of Al2O3, >=3 wt.% and <=15 wt.% of Li2O, >=0.2 wt.% and <=5 wt.% of P2O5, >=0.1 wt.% to <=14.3 wt.% of TiO2, >=0.1 wt.% and <=4.3 wt.% of ZrO2, and >=0.1 wt.% and <=4.4 wt.% of TiO2+ ZrO2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a glass composition, particularly a glass composition suitable for crystallized glass. More specifically, it relates to the composition of a crystallized glass magnetic disk.

[0002]

2. Description of the Related Art Conventionally, as a substrate for a magnetic disk,
Aluminum substrates and glass substrates have been put to practical use.
Among them, a glass substrate has received the most attention because of its excellent surface smoothness and mechanical strength. As such a glass substrate, a chemically strengthened glass substrate in which the surface of the glass substrate is strengthened by ion exchange, and a crystallized glass substrate in which a crystal component is precipitated on the substrate to strengthen the bond are known.

[0003]

By the way, the recent demand for the performance of the substrate is becoming stricter day by day.
In particular, there is a demand for an improvement in performance with respect to strength directly related to deflection and warpage during high-speed rotation. This can be represented by the specific elastic modulus (= Young's modulus / specific gravity) of the substrate material, and the higher the numerical value, the more desirable. Further, there is a demand for improvement in productivity while satisfying such requirements.
Therefore, an object of the present invention is to provide a composition with improved specific elastic modulus of glass and higher productivity.

[0004]

Means for Solving the Problems In order to achieve the above object, the invention described in claim 1 provides a composition range of a main component,
SiO ₂ is 65 wt% or more and 80 wt% or less, A
l ₂ O ₃ is and 15 wt% or less at 3 wt% or more, Li ₂
O is 3 wt% or more and 15 wt% or less, P ₂ O ₅ is 0.2 wt% or more and 5 wt% or less, TiO ₂ is 0.1 wt% or more and 4.3 wt% or less, ZrO ₂
Is not less than 0.1 wt% and not more than 4.3 wt%, TiO
₂ + ZrO ₂ is 0.1 wt% or more and 4.4 wt% or less.

[0005]

Embodiments of the present invention will be described below. In the glass substrate of the embodiment according to the present invention, the composition range of the main component is such that SiO ₂ is 65 wt% or more and 80 wt% or more.
wt% or less, Al ₂ O ₃ is 3 wt% or more and 15 wt%
In the following, Li ₂ O is 3 wt% or more and 15 wt% or less,
P ₂ O ₅ ≧ 0.2 wt% and ≦ 5 wt%, TiO
₂ is 0.1 wt% or more and 4.3 wt% or less, ZrO ₂
Is not less than 0.1 wt% and not more than 4.3 wt%, TiO ₂
It is characterized in that + ZrO ₂ is 0.1 wt% or more and 4.4 wt% or less.

Since SiO ₂ is a glass-forming oxide, if its composition ratio is less than 65% by weight, its melting property deteriorates and 80 w
If it exceeds t%, the glass will be in a stable state, and it will be difficult for crystals to precipitate.

[0007] Al ₂ O ₃ is a glass intermediate oxide, and is a component of aluminum borate-based crystals that are crystal phases precipitated by heat treatment. If the composition ratio is less than 3 wt%, the number of precipitated crystals is small, and strength cannot be obtained. If the composition ratio is more than 15 wt%, the melting temperature becomes high and the glass tends to be devitrified.

[0008] Li ₂ O plays a role as a flux and is a component of lithium disilicate-based crystals. If the composition ratio is less than 3 wt%, the precipitation of lithium disilicate as a crystal phase becomes insufficient, and if it exceeds 15 wt%, the lithium disilicate in the precipitated crystal phase becomes unstable and crystallization becomes difficult to control. In addition, chemical durability may be reduced and the magnetic film may be affected.
The stability in the washing process is deteriorated.

P ₂ O ₅ is a nucleating agent that functions as a flux and precipitates lithium disilicate-based crystals, and is an important component for uniformly depositing crystals throughout the glass.
If the composition ratio is less than 0.2 wt%, it is difficult to form sufficient crystal nuclei, crystal grains are coarsened or crystals are heterogeneously deposited, and it is difficult to obtain a fine and uniform crystal structure,
In polishing, a smooth surface required as a disk substrate cannot be obtained. Further, the effect as a flux for the hardly-fusible ZrO ₂ component cannot be obtained. If it exceeds 5% by weight, the reactivity with the furnace agent at the time of melting increases, and the devitrification also increases, so that the productivity at the time of melt molding decreases. In addition, the chemical durability may be reduced, which may affect the magnetic film, and the stability in the polishing-cleaning process may be deteriorated.

TiO ₂ is a flux and promotes crystal growth. If the composition ratio is less than 0.1 wt%, the meltability deteriorates, and the crystal growth becomes difficult. If the composition ratio exceeds 4.3 wt%, the crystallization is rapidly promoted, the control of the crystallization state becomes difficult, and the precipitation of the precipitated crystal becomes difficult. Coarsening and inhomogeneity of the crystal phase occur, so that a fine and uniform crystal structure cannot be obtained, and a smooth surface required as a disk substrate in polishing cannot be obtained. Further, devitrification tends to occur during melt molding, and productivity is reduced.

ZrO ₂ is a glass-modified oxide and is a crystal nucleating agent for glass. In particular, it is very effective for uniformly depositing a quartz crystal over the entire glass. If the composition ratio is less than 0.1 wt%, it is difficult to form sufficient crystal nuclei, crystal grains are coarsened, crystals are heterogeneously deposited, and a fine and uniform crystal structure cannot be obtained. A smooth surface required as a substrate cannot be obtained. In addition, chemical durability and migration resistance are reduced, which may affect the magnetic film, and the stability in the polishing-cleaning process is deteriorated. Also 4.3w
If it exceeds t%, the melting temperature will be high, and the glass will be easily devitrified, making melt molding difficult. In addition, the precipitated crystal phase changes, making it difficult to obtain desired characteristics.

TiO ₂ + ZrO ₂ is the sum of a flux for promoting crystal growth and a crystal nucleating agent for quartz crystal,
If the content is less than 0.1 wt%, a necessary crystal phase cannot be obtained,
It is difficult to obtain the required characteristics. If the content exceeds 4.4 wt%, the quartz-based crystal is excessively precipitated, and the desired characteristics cannot be obtained.

Hereinafter, the manufacturing method will be described. Raw materials including the composition of the main components of the finally produced glass substrate are sufficiently mixed at a predetermined ratio, and the mixture is put into a platinum crucible and melted. After melting, it is poured into a mold to form a rough shape. This is annealed to room temperature. Subsequently, the temperature is maintained at the indicated primary heat treatment temperature and primary treatment time (heat treatment), and crystal nucleation is performed. Subsequently, the crystal nucleus is grown while maintaining the temperature at the secondary heat treatment and the secondary treatment time. By cooling this, the desired crystallized glass is obtained.

The glass substrate obtained by the above manufacturing method has a SiO ₂ content of 65 wt% or more and 80 wt% or less, an Al ₂ O 3 content of ₃ wt% or more and 15 wt% or less,
i ₂ O is 3 wt% or more and 15 wt% or less, P ₂ O ₅ is 0.2 wt% or more and 5 wt% or less, and TiO ₂ is 0.2 wt% or less.
ZrO ₂ is not less than 1 wt% and not more than 4.3 wt%.
TiO ₂ + Zr not less than 1 wt% and not more than 4.3 wt%
Since O ₂ is 0.1 wt% or more and 4.4 wt% or less, it is possible to obtain a very high specific modulus and a high productivity.

[0015]

Next, a specific example of the embodiment will be described. Material composition ratio (unit: wt%), values of conditional expressions, melting temperature and melting time, primary heat treatment temperature and primary treatment time, secondary heat treatment temperature and secondary constituting glass of the first to fourth embodiments. Table 1 shows the treatment time, main precipitated crystal phase, sub-precipitated crystal phase, average crystal grain size, specific gravity, Young's modulus, and specific elastic modulus. Table 2 similarly shows the glasses of the fifth to eighth examples. Table 3 similarly shows the ninth to twelfth examples. Similarly, the thirteenth
Table 4 shows the glasses according to the sixteenth examples. Similarly, the seventeenth to
Table 5 shows the glass of the twentieth example. Table 6 similarly shows glasses of Examples 21 to 24.

[0016]

[Table 1]

[0017]

[Table 2]

[0018]

[Table 3]

[0019]

[Table 4]

[0020]

[Table 5]

[0021]

[Table 6]

The glass composition of the first embodiment is such that SiO ₂ is 74.3 wt%, Al ₂ O ₃ is 8 wt%, and Li ₂ O is 8.8 wt%.
5 wt%, 1.8 wt% of P ₂ O _5, the TiO ₂ 0.5 w
t%, ZrO ₂ 2 wt%, CaO 2.9 wt%, K ₂
O: 1.5 wt%, Sb ₂ O ₃ : 0.5 wt%, TiO ₂
+ ZrO ₂ has a composition ratio of 2.5 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 585 ° C., the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of the treatment at 700 degrees and the secondary treatment time of 3 hours, the main precipitated crystal phase was lithium disilicate,
A glass substrate was obtained in which the by-precipitated crystal phase was quartz and the specific elastic modulus was 40.2. The above composition has not only a high specific modulus, but also a very high productivity.

The basic composition is Si
Since CaO that acts as a flux is added in addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , a high melting property and a stable crystal phase can be obtained. If the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If it exceeds 5% by weight, the glass becomes stable, crystallization is suppressed, and it becomes difficult to obtain the required strength.

Further, since K ₂ O serving as a flux is added, the stability during production is improved. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If the content exceeds 5 wt%, the glass becomes stable, crystallization is suppressed, the chemical durability is reduced, the magnetic film may be affected, and the stability in the polishing-cleaning step is deteriorated.

Further, since Sb ₂ O ₃ serving as a fining agent is added, the stability during production is improved. However, if the composition ratio is less than 0.1 wt%, a sufficient fining effect cannot be obtained, and the productivity is reduced. If it exceeds 5 wt%, the crystallization of the glass becomes unstable and the control of the precipitated crystal phase becomes impossible, so that it becomes difficult to obtain the required characteristics.

The glass composition of the second embodiment is as follows: 74.5 wt% of SiO ₂ , 7.2 wt% of Al ₂ O ₃ , 5.4 wt% of Li ₂ O, 2 wt% of P ₂ O ₅ , TiO ₂ 4wt
%, 0.2 wt% of ZrO ₂ , 2.2 wt% of CaO,
3 wt% of K ₂ O, 1.5 wt% of Sb ₂ O ₃ , TiO ₂ +
ZrO ₂ has a composition ratio of 4.2 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1480 degrees, the melting time is 2.5 hours, the primary processing temperature is 580 degrees, the primary processing time is 5 hours, and the secondary processing temperature is in accordance with the above-mentioned manufacturing method. As a result of treatment at 700 ° C. for a secondary treatment time of 3 hours, a glass substrate was obtained in which the main precipitated crystal phase was quartz, the sub-precipitated crystal phase was lithium disilicate, and the specific elastic modulus was 39.4. The above composition has not only a high specific modulus, but also a very high productivity.

The basic composition is Si.
Since CaO that acts as a flux is added in addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , a high melting property and a stable crystal phase can be obtained. If the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If it exceeds 5% by weight, the glass becomes stable, crystallization is suppressed, and it becomes difficult to obtain the required strength.

Further, since K ₂ O serving as a flux is added, the stability during production is improved. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If the content exceeds 5 wt%, the glass becomes stable, crystallization is suppressed, the chemical durability is reduced, the magnetic film may be affected, and the stability in the polishing-cleaning step is deteriorated.

Further, since Sb ₂ O ₃ acting as a fining agent is added, the stability during production is improved. However, if the composition ratio is less than 0.1 wt%, a sufficient fining effect cannot be obtained, and the productivity is reduced. If it exceeds 5 wt%, the crystallization of the glass becomes unstable and the control of the precipitated crystal phase becomes impossible, so that it becomes difficult to obtain the required characteristics.

The glass composition of the third embodiment is as follows: 75.3 wt% of SiO ₂ , 9.8 wt% of Al ₂ O ₃ , 8.5 wt% of Li ₂ O, 2.4 wt% of P ₂ O ₅ , 3w of TiO ₂
t%, ZrO ₂ 1 wt%, TiO ₂ + ZrO ₂ 4 wt%
%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 580 ° C., the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of treatment at 690 ° C. and a secondary treatment time of 2.5 hours, a glass substrate having a characteristic that the main precipitated crystal phase was lithium disilicate and the sub-precipitated crystal phase was quartz and the specific elastic modulus was 39.8 was obtained. . The above composition has not only a high specific modulus, but also a very high productivity.

The glass composition of the fourth embodiment, the SiO ₂ 74wt%, 10.3wt% of Al ₂ O _3, 8.5wt% of Li ₂ O, 3 wt% of P ₂ O _5, 2 wt of TiO ₂
%, 2.2 wt% of ZrO ₂ , and TiO ₂ + ZrO ₂ of 4.
The composition ratio is 2 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1460 degrees, the melting time is 2.5 hours, the primary processing temperature is 575 degrees, the primary processing time is 5.
As a result of treatment for 5 hours at a secondary treatment temperature of 700 ° C. and a secondary treatment time of 3 hours, a glass having a characteristic that the main precipitated crystal phase is lithium disilicate, the sub-precipitated crystal phase is quartz, and the specific elastic modulus is 39.8. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The glass composition of the fifth embodiment is as follows: SiO ₂ : 72.1 wt%, Al ₂ O ₃ : 10.5 wt%, Li ₂ O
The 10.5 wt%, 3 wt% of P ₂ O _5, the TiO ₂ 3.
3 wt%, ZrO ₂ 0.1 wt%, CaO 0.5 w
The composition ratio of t% and TiO ₂ + ZrO ₂ is 3.4 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1440 degrees, the melting time is 2.5 hours, the primary processing temperature is 575 degrees, the primary processing time is 5.
As a result of treatment for 5 hours at a secondary treatment temperature of 700 ° C. and a secondary treatment time of 3 hours, a glass having a characteristic that the primary precipitated crystal phase is lithium disilicate, the secondary precipitated crystal phase is quartz, and the specific elastic modulus is 40.0. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
Since CaO that acts as a flux is added in addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , a high melting property and a stable crystal phase can be obtained. If the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If it exceeds 5% by weight, the glass becomes stable, crystallization is suppressed, and it becomes difficult to obtain the required strength.

The glass composition of the sixth embodiment is as follows: 75.5 wt% of SiO ₂ , 10 wt% of Al ₂ O ₃ , 7.8 wt% of Li ₂ O, 1.5 wt% of P ₂ O ₅ , TiO ₂ 1.
2 wt%, ZrO ₂ 2 wt%, CaO 2 wt%, T
iO ₂ + ZrO ₂ has a composition ratio of 3.2 wt%.

The raw materials were prepared so as to contain the above composition ratio, and the melting temperature was 1460 ° C., the melting time was 2.5 hours, the primary processing temperature was 585 ° C., the primary processing time was 5 hours, and the secondary processing temperature was in accordance with the above-mentioned manufacturing method. As a result of treatment at 690 ° C. and a secondary treatment time of 2.5 hours, a glass substrate was obtained in which the main precipitated crystal phase was quartz, the secondary precipitated crystal phase was lithium disilicate, and the specific elastic modulus was 40.0. . The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
Since CaO that acts as a flux is added in addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , a high melting property and a stable crystal phase can be obtained. If the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If it exceeds 5% by weight, the glass becomes stable, crystallization is suppressed, and it becomes difficult to obtain the required strength.

The glass composition of the seventh embodiment is as follows: SiO ₂ : 70.8 wt%, Al ₂ O ₃ : 10.5 wt%, Li ₂ O
The 9.5 wt%, 4 wt% of P ₂ O _5, 4wt of TiO ₂
%, ZrO ₂ 0.2 wt%, K ₂ O 1 wt%, TiO
The composition ratio of ₂ + ZrO ₂ is 4.2 wt%.

The raw materials are prepared so as to contain the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 570 ° C., and the primary processing time is 5.
As a result of treatment for 5 hours at a secondary treatment temperature of 700 ° C. and a secondary treatment time of 3 hours, a glass having a characteristic that the main precipitated crystal phase is lithium disilicate, the sub-precipitated crystal phase is quartz, and the specific elastic modulus is 39.8. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
Since K ₂ O serving as a flux is added in addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , stability during production is improved. However, the composition ratio is 0.1wt
%, The meltability is not sufficiently improved. 5wt
%, The glass becomes stable and crystallization is suppressed,
In addition, the chemical durability may be reduced, which may affect the magnetic film, and the stability in the polishing-cleaning process may be deteriorated.

The glass composition of the eighth embodiment is as follows: 68.3 wt% of SiO ₂ , 12 wt% of Al ₂ O ₃ and 9 wt% of Li ₂ O.
wt%, 3.5 wt% of P ₂ O _5, the TiO ₂ 0.2 wt
%, 4 wt% of ZrO ₂ , 3 wt% of K ₂ O, and TiO ₂ +
ZrO ₂ has a composition ratio of 4.2 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1480 degrees, the melting time is 2.5 hours, the primary processing temperature is 575 degrees, the primary processing time is 5.
The glass was treated for 5 hours at a secondary treatment temperature of 720 degrees and a secondary treatment time of 4 hours. As a result, the main precipitated crystal phase was lithium disilicate, the sub-precipitated crystal phase was quartz, and the specific elastic modulus was 38.8. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
Since K ₂ O serving as a flux is added in addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , stability during production is improved. However, the composition ratio is 0.1wt
%, The meltability is not sufficiently improved. 5wt
%, The glass becomes stable and crystallization is suppressed,
In addition, the chemical durability may be reduced, which may affect the magnetic film, and the stability in the polishing-cleaning process may be deteriorated.

The glass composition of the ninth embodiment is as follows: 74.2% by weight of SiO ₂ , 9.8% by weight of Al ₂ O ₃ , 8.7% by weight of Li ₂ O, 2.5% by weight of P ₂ O ₅ , TiO ₂ 3.
1 wt%, ZrO ₂ 1.2 wt%, Sb ₂ O ₃ 0.5
wt%, TiO ₂ + ZrO ₂ is 4.3 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 580 ° C., the primary processing time is 5 hours, and the secondary processing temperature is in accordance with the above-mentioned manufacturing method. As a result of the treatment at 700 degrees and the secondary treatment time of 3 hours, the main precipitated crystal phase was lithium disilicate,
A glass substrate having a crystal having a sub-precipitated crystal phase and a specific elastic modulus of 39.0 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
Since Sb ₂ O ₃ serving as a fining agent is added in addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , stability during production is improved. However, when the composition ratio is 0.1
If it is less than wt%, a sufficient fining effect cannot be obtained,
Productivity decreases. If it exceeds 5 wt%, the crystallization of the glass becomes unstable and the control of the precipitated crystal phase becomes impossible, so that it becomes difficult to obtain the required characteristics.

The glass composition of the tenth embodiment was SiO ₂
71.9 wt%, Al ₂ O ₃ 9.5 wt%, Li ₂ O
The 11.5 wt%, 1.2 wt% of P ₂ O _5, the TiO ₂ 2 wt%, a ZrO ₂ 2.4 wt%, the Sb ₂ O ₃ 1.5
wt%, and TiO ₂ + ZrO ₂ have a composition ratio of 4.4 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 585 ° C., the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of the treatment at 700 degrees and the secondary treatment time of 3 hours, the main precipitated crystal phase was lithium disilicate,
A glass substrate was obtained in which the by-precipitated crystal phase was quartz and the specific elastic modulus was 38.2. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
Since Sb ₂ O ₃ serving as a fining agent is added in addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , stability during production is improved. However, when the composition ratio is 0.1
If it is less than wt%, a sufficient fining effect cannot be obtained,
Productivity decreases. If it exceeds 5 wt%, the crystallization of the glass becomes unstable and the control of the precipitated crystal phase becomes impossible, so that it becomes difficult to obtain the required characteristics.

The glass composition of the eleventh embodiment was SiO ₂
71.5 wt%, Al ₂ O ₃ 9.5 wt%, Li ₂ O
The 10.5 wt%, 2.2 wt% of P ₂ O _5, the TiO ₂ 2.8 wt%, a ZrO ₂ 1.5wt%, 2w a B ₂ O ₃
The composition ratio of t% and TiO ₂ + ZrO ₂ is 4.3 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 580 ° C., the primary processing time is 5 hours, and the secondary processing temperature is in accordance with the above-mentioned manufacturing method. As a result of the treatment at 700 degrees and the secondary treatment time of 3 hours, the main precipitated crystal phase was lithium disilicate,
A glass substrate was obtained in which the by-precipitated crystal phase was quartz and the specific elastic modulus was 39.6. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , B ₂ O ₃ serving as a former is added to promote the phase separation of the glass, thereby promoting crystal precipitation and growth. Promote. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If it exceeds 15% by weight, the glass tends to be devitrified and molding becomes difficult, and the crystals become coarse and fine crystals cannot be obtained.

The glass composition of the twelfth embodiment was SiO ₂
70.8 wt%, Al ₂ O ₃ 10.7 wt%, Li ₂
O to 9.8 wt%, 1.5 wt% of P ₂ O _5, the TiO ₂ 1.2 wt%, a ZrO ₂ 3 wt%, the B ₂ O ₃ 3 wt
%, TiO ₂ + ZrO ₂ is 4.2 wt%.

The raw materials are prepared so as to contain the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 585 ° C., the primary processing time is 5 hours, and the secondary processing temperature is in accordance with the above-mentioned manufacturing method. As a result of the treatment at 700 degrees and the secondary treatment time of 3 hours, the main precipitated crystal phase was lithium disilicate,
A glass substrate was obtained in which the by-precipitated crystal phase was quartz and the specific elastic modulus was 39.2. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , B ₂ O ₃ serving as a former is added to promote the phase separation of the glass, thereby promoting crystal precipitation and growth. Promote. However, if the composition ratio is less than 0.1% by weight, sufficient melting property cannot be improved. If it exceeds 15% by weight, the glass tends to be devitrified and molding becomes difficult, and the crystals become coarse and fine crystals cannot be obtained.

The glass composition of the thirteenth embodiment was SiO ₂
72.8 wt%, Al ₂ O ₃ 9.7 wt%, Li ₂ O
The 9.5 wt%, 3 wt% of P ₂ O _5, 3wt of TiO ₂
%, ZrO ₂ 1 wt%, MgO 1 wt%, TiO ₂ +
ZrO ₂ has a composition ratio of 4 wt%.

The raw materials were prepared so as to contain the above composition ratio, and the melting temperature was 1460 ° C., the melting time was 2.5 hours, the primary processing temperature was 575 ° C., and the primary processing time was 5.
As a result of treatment for 5 hours at a secondary treatment temperature of 700 ° C. and a secondary treatment time of 3 hours, a glass having characteristics that the main precipitated crystal phase is lithium disilicate, the sub-precipitated crystal phase is quartz, and the specific elastic modulus is 39.0. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , MgO serving as a flux is added, so that a granular quartz crystal which is one of the crystal phases is aggregated. Form crystal grain mass. However, if the composition ratio is less than 0.1 wt%, the working temperature range becomes narrow, and the chemical durability of the glass matrix phase does not improve. If it exceeds 12% by weight, it is difficult to obtain the required strength due to precipitation of another crystal phase.

The glass composition of the fourteenth embodiment was SiO ₂
74.2 wt%, Al ₂ O ₃ 8.5 wt%, Li ₂ O
8 wt%, P ₂ O ₅ 1.5 wt%, TiO ₂ 0.8
wt%, a ZrO ₂ 3wt%, 4wt% of MgO, Ti
The composition ratio of O ₂ + ZrO ₂ is 3.8 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 585 ° C., the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of treatment at 700 ° C. for a secondary treatment time of 3 hours, a glass substrate was obtained in which the main precipitated crystal phase was quartz, the sub-precipitated crystal phase was lithium disilicate, and the specific elastic modulus was 38.8. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , MgO serving as a flux is added, so that a granular quartz crystal which is one of the crystal phases is aggregated. Form crystal grain mass. However, if the composition ratio is less than 0.1 wt%, the working temperature range becomes narrow, and the chemical durability of the glass matrix phase does not improve. If it exceeds 12% by weight, it is difficult to obtain the required strength due to precipitation of another crystal phase.

The glass composition of the fifteenth embodiment was SiO ₂
76.6 wt%, Al ₂ O ₃ 10.8 wt%, Li ₂
O to 5.7 wt%, 1.2 wt% of P ₂ O _5, the TiO ₂ 3.5 wt%, a ZrO ₂ 0.2 wt%, a BaO 2w
The composition ratio of t% and TiO ₂ + ZrO ₂ is 3.7 wt%.

The raw materials were prepared so as to have the above composition ratio, and the melting temperature was 1480 ° C. and the melting time was 2 according to the above-mentioned production method.
Time, primary processing temperature 585 degrees, primary processing time 5 hours, 2
As a result of the treatment at the next treatment temperature of 690 ° C. and the second treatment time of 2.5 hours, a glass substrate having a characteristic that the main precipitated crystal phase is quartz, the sub-precipitated crystal phase is lithium disilicate, and the specific elastic modulus is 38.0 is obtained. Obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
Since BaO serving as a flux is added in addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , the stability during production is improved. However, the composition ratio is 0.1wt
%, The meltability is not sufficiently improved. 5wt
%, The glass becomes stable and crystallization is suppressed,
It becomes difficult to obtain the required strength.

The glass composition of the sixteenth embodiment was SiO ₂
75.5 wt%, Al ₂ O ₃ 8.6 wt%, Li ₂ O
The 7.5 wt%, 1 wt% of P ₂ O _5, the TiO ₂ 0.1
wt%, 4.2 wt% of ZrO ₂ , 3 wt% of BaO,
The composition ratio of TiO ₂ + ZrO ₂ is 4.3 wt%.

The raw materials were prepared so as to contain the above composition ratio, and the melting temperature was 1540 ° C., the melting time was 1.75 hours, the primary processing temperature was 585 ° C., and the primary processing time was 5 in accordance with the above-mentioned manufacturing method.
Time, the secondary treatment temperature was 700 ° C., and the secondary treatment time was 3 hours. As a result, a glass substrate whose main precipitated crystal phase was quartz, whose secondary precipitated crystal phase was lithium disilicate, and whose specific elastic modulus was 36.2 was obtained. was gotten. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
Since BaO serving as a flux is added in addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , the stability during production is improved. However, the composition ratio is 0.1wt
%, The meltability is not sufficiently improved. 5wt
%, The glass becomes stable and crystallization is suppressed,
It becomes difficult to obtain the required strength.

The glass composition of the seventeenth embodiment was SiO ₂
74.5 wt%, Al ₂ O ₃ 9.1 wt%, Li ₂ O
The 8.5 wt%, 4 wt% of P ₂ O _5, 3wt of TiO ₂
%, 0.6 wt% of ZrO ₂ , 0.3 wt% of ZnO,
The composition ratio of TiO ₂ + ZrO ₂ is 3.6 wt%.

The raw materials were prepared so as to have the above composition ratio, and the melting temperature was 1460 ° C., the melting time was 2.5 hours, the primary processing temperature was 570 ° C., and the primary processing time was 5.
As a result of treatment for 5 hours at a secondary treatment temperature of 700 ° C. and a secondary treatment time of 3 hours, a glass having a characteristic that the main precipitated crystal phase is lithium disilicate, the sub-precipitated crystal phase is quartz, and the specific elastic modulus is 38.2. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

As the composition, the basic composition of Si
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , ZnO serving as a flux is added to help uniform crystal deposition. However, if the composition ratio is less than 0.1% by weight, sufficient improvement in crystal homogenization cannot be achieved. 5w
If it exceeds t%, the glass becomes stable, crystallization is suppressed, and it becomes difficult to obtain the required strength.

The glass composition of the eighteenth embodiment was SiO ₂
The 73.2wt%, 10wt% of Al ₂ O _3, Li ₂ O and 8.3 wt%, 2.5 wt% of P ₂ O _5, the TiO ₂ 0.
5 wt%, the ZrO ₂ 3.5 wt%, the ZnO 2 wt
%, TiO ₂ + ZrO ₂ is 4 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1480 ° C., the melting time is 2.5 hours, the primary processing temperature is 580 ° C., the primary processing time is 5 hours, and the secondary processing temperature is in accordance with the above-mentioned manufacturing method. As a result of the treatment at 700 ° C. and the secondary treatment time of 3 hours, a glass substrate was obtained in which the main precipitated crystal phase was quartz, the sub-precipitated crystal phase was lithium disilicate, and the specific elastic modulus was 37.1. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is Si, which is a basic composition.
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , ZnO serving as a flux is added to help uniform crystal deposition. However, if the composition ratio is less than 0.1% by weight, sufficient improvement in crystal homogenization cannot be achieved. 5w
If it exceeds t%, the glass becomes stable, crystallization is suppressed, and it becomes difficult to obtain the required strength.

The glass composition of the nineteenth embodiment was SiO ₂
The 73.2wt%, 10wt% of Al ₂ O _3, 10.1wt% of Li ₂ O, 2.5wt% of P ₂ O _5, the TiO ₂ 3.5 wt%, a ZrO ₂ 0.2wt%, Nb The composition ratio of ₂ O ₅ is 0.5 wt% and TiO ₂ + ZrO ₂ is 3.7 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1460 ° C., the melting time is 2.5 hours, the primary processing temperature is 580 ° C., the primary processing time is 5 hours, and the secondary processing temperature is according to the above-mentioned manufacturing method. As a result of the treatment at 700 degrees and the secondary treatment time of 3 hours, the main precipitated crystal phase was lithium disilicate,
A glass substrate was obtained in which the by-precipitated crystal phase was quartz and the specific elastic modulus was 38.8. The above composition has not only a high specific modulus, but also a very high productivity.

The basic composition is Si.
Since Nb ₂ O ₅ acting as a flux is added in addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , the nucleating agent substance increases. However, when the composition ratio is 0.1.
If the amount is less than 1 wt%, the rigidity cannot be sufficiently improved.
If it exceeds 5 wt%, crystallization of glass becomes unstable,
It becomes impossible to control the precipitated crystal phase, and it becomes difficult to obtain desired characteristics.

The glass composition of the twentieth embodiment was SiO ₂
72 wt%, Al ₂ O ₃ 11.4 wt%, Li ₂ O 10.4 wt%, P ₂ O ₅ 0.5 wt%, TiO ₂ 1.2 wt%, ZrO ₂ 3 wt%, Nb ₂ O ₅ to 1.5
wt%, and TiO ₂ + ZrO ₂ have a composition ratio of 4.2 wt%.

The raw materials were prepared so as to have the above composition ratio, and the melting temperature was 1460 ° C., the melting time was 2.5 hours, the primary processing temperature was 600 ° C., and the primary processing time was 4.
As a result of treatment for 5 hours at a secondary treatment temperature of 700 ° C. and a secondary treatment time of 3 hours, a glass having a characteristic that the main precipitated crystal phase is lithium disilicate, the sub-precipitated crystal phase is quartz, and the specific elastic modulus is 37.4 is obtained. A substrate was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
Since Nb ₂ O ₅ acting as a flux is added in addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , the nucleating agent substance increases. However, when the composition ratio is 0.1.
If the amount is less than 1 wt%, the rigidity cannot be sufficiently improved.
If it exceeds 5 wt%, crystallization of glass becomes unstable,
It becomes impossible to control the precipitated crystal phase, and it becomes difficult to obtain desired characteristics.

The glass composition of the twenty-first embodiment was SiO ₂
The 77 wt%, 8.3 wt% of Al ₂ O _3, 7.3wt% of Li ₂ O, 2wt% of P ₂ O _5, 3wt of TiO ₂
%, 1.2 wt% of ZrO ₂ and 1.2 wt% of Ta ₂ O ₅
%, TiO ₂ + ZrO ₂ is 4.2 wt%.

The raw materials were prepared so as to contain the above composition ratio, and the melting temperature was 1480 ° C., the melting time was 2.5 hours, the primary processing temperature was 580 ° C., the primary processing time was 5 hours, and the secondary processing temperature was in accordance with the above-mentioned manufacturing method. As a result of treatment at 690 ° C. and a secondary treatment time of 2.5 hours, a glass substrate was obtained in which the main precipitated crystal phase was quartz, the sub-precipitated crystal phase was lithium disilicate, and the specific elastic modulus was 37.0. . The above composition has not only a high specific modulus, but also a very high productivity.

The composition is Si, which is the basic composition.
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , Ta ₂ O ₅ serving as a flux is added to improve the meltability and strength, and to improve the glass matrix. Improve the chemical durability of the phase. However, if the composition ratio is less than 0.1 wt%, the rigidity cannot be sufficiently improved. If the content exceeds 5 wt%, crystallization of the glass becomes unstable, the crystal phase to be precipitated cannot be controlled, and it becomes difficult to obtain desired characteristics.

The glass composition of the twenty-second embodiment was SiO ₂
The 68.5wt%, Al ₂ O ₃ to 9 wt%, the Li ₂ O 1
1.7 wt%, 3 wt% of P ₂ O _5, 0.8w of TiO ₂
t%, ZrO ₂ 3 wt%, Ta ₂ O ₅ 4 wt%, Ti
The composition ratio of O ₂ + ZrO ₂ is 3.8 wt%.

The raw materials were prepared so as to contain the above composition ratio, and the melting temperature was 1540 ° C., the melting time was 1.75 hours, the primary processing temperature was 575 ° C., the primary processing time was 5.5 hours, and the secondary As a result of treatment at a treatment temperature of 720 degrees and a secondary treatment time of 4 hours, the main precipitated crystal phase was lithium disilicate, the sub-precipitated crystal phase was quartz, and the specific elastic modulus was 34.
A glass substrate having a characteristic of 2 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is Si, which is a basic composition.
In addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , Ta ₂ O ₅ serving as a flux is added to improve the meltability and strength, and to improve the glass matrix. Improve the chemical durability of the phase. However, if the composition ratio is less than 0.1 wt%, the rigidity cannot be sufficiently improved. If the content exceeds 5 wt%, crystallization of the glass becomes unstable, the crystal phase to be precipitated cannot be controlled, and it becomes difficult to obtain desired characteristics.

The glass composition of the twenty-third embodiment was SiO ₂
73.5 wt%, Al ₂ O ₃ 9.5 wt%, Li ₂ O
The 9.1 wt%, 2.5 wt% of P ₂ O _5, the TiO ₂ 4
wt%, a ZrO ₂ 0.4 wt%, the La ₂ O ₃ 1 wt
%, TiO ₂ + ZrO ₂ is 4.4 wt%.

The raw materials were prepared so as to contain the above composition ratios, and the melting temperature was 1460 ° C., the melting time was 2.5 hours, the primary processing temperature was 580 ° C., the primary processing time was 5 hours, and the secondary processing temperature was in accordance with the above-mentioned manufacturing method. As a result of the treatment at 700 degrees and the secondary treatment time of 3 hours, the main precipitated crystal phase was lithium disilicate,
A glass substrate was obtained in which the by-precipitated crystal phase was quartz and the specific elastic modulus was 38.0. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
Since La ₂ O ₃ acting as a flux is added in addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , crystal precipitation is suppressed. However, if the composition ratio is less than 0.1 wt%, the rigidity cannot be sufficiently improved. If the content exceeds 5 wt%, crystallization of the glass becomes unstable, the crystal phase to be precipitated cannot be controlled, and it becomes difficult to obtain desired characteristics.

The glass composition of the twenty-fourth embodiment was SiO ₂
The 67.3 wt%, 10 wt% of Al ₂ O _3, Li ₂ O to 10.5wt%, P ₂ O ₅ to 4 wt%, the TiO ₂ 0.2
wt%, a ZrO ₂ 4wt%, 4wt% of La ₂ O _3, T
iO ₂ + ZrO ₂ has a composition ratio of 4.2 wt%.

The raw materials are prepared so as to have the above composition ratio, and the melting temperature is 1540 ° C., the melting time is 1.75 hours, the primary processing temperature is 570 ° C., the primary processing time is 5.5 hours, and the secondary processing time is according to the above-mentioned manufacturing method. As a result of treatment at a treatment temperature of 720 degrees and a secondary treatment time of 4 hours, the main precipitated crystal phase was lithium disilicate, the sub-precipitated crystal phase was quartz, and the specific elastic modulus was 33.
A glass substrate having a characteristic of 8 was obtained. The above composition has not only a high specific modulus, but also a very high productivity.

The composition is the basic composition of Si
Since La ₂ O ₃ acting as a flux is added in addition to O ₂ , Al ₂ O ₃ , Li ₂ O, P ₂ O ₅ , TiO ₂ , and ZrO ₂ , crystal precipitation is suppressed. However, if the composition ratio is less than 0.1 wt%, the rigidity cannot be sufficiently improved. If the content exceeds 5 wt%, crystallization of the glass becomes unstable, the crystal phase to be precipitated cannot be controlled, and it becomes difficult to obtain desired characteristics.

[0096]

According to the present invention, a glass substrate having a specific elastic modulus of 30 or more and high productivity can be obtained.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Hiroshi Yugame 2-3-13 Azuchicho, Chuo-ku, Osaka City Inside Osaka International Building Minolta Co., Ltd. (72) Kazuhiko Ishimaru 2-3-3 Azuchicho, Chuo-ku, Osaka-shi No. 13 Osaka International Building Minolta Co., Ltd. F-term (reference) 4G062 AA11 BB01 DA06 DA07 DB03 DB04 DC01 DD02 DD03 DE01 DF01 EA02 EA03 EA04 EB01 EC01 ED01 EE01 EF01 EG01 FA01 FB02 FB03 FC02 FC03 FD01 FE01 F01F01 GA01 GB01 GC01 GD01 GE01 HH01 HH03 HH05 HH07 HH09 HH11 HH13 HH15 HH17 HH20 JJ01 JJ03 JJ05 JJ07 JJ10 KK01 KK03 KK05 KK07 KK10 MM27 NN33 QQ06 QQ20 5D006 CB04 CB07 DA03

Claims (1)

[Claims] 1. The composition range of a main component is as follows: SiO ₂ is 65 wt% or more and 80 wt% or less, Al ₂ O ₃ is 3 wt% or more and 15 wt% or less, Li ₂ O is 3 wt% or more and 15 wt% or less. , P ₂ O ₅ is and less 5 wt% with 0.2 wt% or more and 4.3 wt% in TiO ₂ is more than 0.1 wt% or less, ZrO ₂ is and 4.3 wt% or less at 0.1 wt% or more, TiO ₂ + ZrO ₂ is 0.1 wt% or more and 4.4 w
A glass composition characterized by being at most t%.