JP2001015530A - Device for transferring strip member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To feed a member at a constant pitch by arranging a pair of guide chucks on a Y-direction moving base in an orthogonal direction to the transfer direction of a strip member and arranging the Y-direction moving base on an X-direction moving base in the transfer direction of the strip member respectively. SOLUTION: An A guide chuck 50 is fixed to the tip end of a front notched Y-direction moving base 22, and a B guide chuck 51 is fitted on an LM guide 53 sliding on Y rails small 52 provided on both ends of the Y-direction moving base 22. In this case, the Y rails small 52 are fitted to the grooves provided on both ends on the upper surface of the Y-direction moving base 22, and both guide chucks 50 and 51 are positioned in a manner that their upper surfaces are at the same height. In addition, the lower surface of the B guide chuck 51 is at such a position where it is not in contact with the upper surface of the Y-direction moving base 22, and the Y-direction moving base 22 is arranged on the X-direction moving base 14 in the transfer direction of the strip member.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for transporting a strip-shaped member, and more particularly to a device for transporting a lead frame incorporated in a die bonder for mounting a semiconductor pellet on a strip-shaped lead frame in a semiconductor device.

[0002]

2. Description of the Related Art A semiconductor is generally manufactured by the following steps after a number of circuit elements are formed on a wafer. Including a step of separating a large number of circuit elements formed on a wafer into rectangular pieces one by one to form a semiconductor pellet (hereinafter referred to as a pellet), a pellet mounting step of mounting the pellet on the lead frame, and including the pellet. There is a resin molding step of coating a main part with a resin or the like.

In the above-mentioned pellet mounting step, as shown in FIG. 8 or FIG. 10, after silver paste, solder or resin is supplied to the mounting position on the lead frame 1,
A manufacturing facility called a die bonder on which the pellets 3 are mounted is used. The die bonder incorporates a transport device for intermittently transporting the lead frame 1 at a constant pitch. The pick and place unit 4 mounts the pellets 3 while the lead frame 1 is stopped. As a transport mechanism in the transport device for the lead frame 1, there are various types of representative mechanisms such as vertical clamp feed and pin feed.

First, a vertical clamp feed type lead frame transport mechanism will be described with reference to FIG.
The figure shows a process in which the pick and place unit 4 mounts the pellet 3 at a predetermined position (land portion) on the lead frame 1 that is fed at a constant pitch. The lead frame 1 whose both side surfaces are held by the guide rails 2a and 2b,
When the lead frame 1 is moved by a fixed distance, the clamp is opened to open the lead frame 1 and then moved downward to be transferred. Move backward and return to the initial position. Here, the next lead frame 1
Reaches the initial position, the upper and lower clampers 5 repeat the operation of closing the clamp after the ascending and performing the preceding constant pitch feed while gripping the lead frame 1. The operation is as shown in FIG. It is a so-called square motion.

Referring to FIG. 10, a pin feed type lead frame transport mechanism will be described. This is also a step of mounting the pellets 3 on the lead frame 1 in the same manner as the above-described vertical clamp feed type. .
This transport mechanism uses a perforation hole 7 formed in the lead frame 1, and the perforation hole 7
It is provided on the lead frame 1 at a constant pitch. FIG.
In the example shown in (1), the feed pin 6 which is held on both sides by the guide rails 2a and 2b is transferred while the feed pin 6 located above the feed hole 7 is lowered and fitted into the feed hole 7. After the pin is moved up by the pitch of the perforation hole 7 along the direction, and the pin is lifted up and pulled out from the perforation hole 7, the transport direction is retracted and returned to the descending position. In this case, as shown in FIG. 11, the feed pin 6 repeats a square motion.

[0006]

However, the conventional transport device has the following problems. The lead frame is a strip-shaped metal plate made of a thin material. The lead frame includes a step portion on which the pellets are mounted, and a portion left around the pellets after being cut for each pellet and bending.
A large number of narrow grooves for forming leads to be inserted into C sockets and printed circuit boards are formed by press molding, and a low-stiffness member like a ruler whose surface is plated to have rust prevention function. is there

Incidentally, the conventional lead frame transfer device is provided with a transfer mechanism as described above, and both of the above-described transfer mechanisms perform a constant pitch feed with both side surfaces of the lead frame held by guide rails. Also, as shown in FIG. 12, the lead frame 1 slides and passes through grooves provided in the guide rails 2a and 2b, and the guide rails 2a and 2b hold the lead frame 1, and The width of the groove is slightly larger than the thickness of the lead frame 1, and the depth interval between both grooves is slightly larger than the width of the lead frame 1, so that both dimensions are as small as possible in play. . This is to prevent the occurrence of a problem that if there is backlash, the stop position of the lead frame 1 is shifted in the vertical direction or the plane direction, and the pick and place unit cannot accurately mount the pellet 3 on the land portion. It is. In particular,
In the production of multi-pin, fine-pitch semiconductors made into ultra-LSIs, higher positioning accuracy is required.

However, as described above, the lead frame is a thin metal strip having a low rigidity, and its surface is plated. Therefore, during the constant pitch feed, that is, while passing through the groove of the guide rail,
The plating film was sometimes peeled off. This not only causes a defect as a semiconductor product, but also removes the plating film but remains in the groove, the clearance between the groove and the lead frame becomes smaller, and the constant pitch feed of the lead frame is performed smoothly. In the worst case, constant pitch feed becomes impossible, or the lead frame is deformed or damaged.

At the same time, if the flakes of the plating film fall and scatter around, and adhere to the components inside the device, for example, the rails of the LM guide, the movement of the LM guide does not become smooth, and the device is used in that state. If it is continued, the deterioration of the LM guide is accelerated, and in some cases, the device is stopped, causing a problem. Here, the LM guide is a linear guide, which is a block having a bearing inside, fitted to a pair of rails without play, and moving straight on the rails smoothly. In addition, a screw hole is provided on the upper surface, and a member such as a plate to be operated in a straight line can be screwed.

Further, if the plating film is peeled off and flows to a subsequent step while being adhered to the lead frame, if the pellet is molded as it is, the electric circuit in the pellet may be short-circuited, which may cause a product defect. ,
The debris will be scattered in the process after the various processes are performed, which generally creates an environment that is inconsistent with the clean environment required in the semiconductor manufacturing process. Was one of the causes.

The lead frame has various shapes, and the length, width, and thickness vary depending on the shape. Therefore, in the conventional lead frame transfer device, when the shape of the lead frame to be transferred is changed due to a type change or the like, it is necessary to replace the lead frame with a guide rail suitable for the lead frame each time. Otherwise, in the width direction, the mounting of the guide rail itself can be adjusted in the width direction, and in the thickness direction, the guide rail has a function to freely adjust the groove width in the guide rail. Had to respond.

Accordingly, the present invention has been made to solve the above-mentioned problems, and a thin-plate-shaped lead frame having a plated surface can be fed at a constant pitch without deforming and simultaneously removing a plating film. It is an object to provide a transport device that enables this.

In order to achieve the above-mentioned object, the present invention first comprises a pair of guide chucks which can be opened and closed in a direction perpendicular to the direction of transport of the strip-shaped member. Has a chuck portion for holding and fixing the band-shaped member on a step provided on the upper surface thereof, and the pair of guide chucks is mounted on a Y-direction moving base in a direction perpendicular to the transfer direction of the band-shaped member. And the Y-direction moving base is arranged on the X-direction moving base in the transfer direction of the strip-shaped member.

Here, the pair of guide chucks are pivotally connected to a lever having a center of rotation at a midpoint between the guide chucks, and are simultaneously opened and closed by the rotation of the lever. It is located on the center line in the transfer direction, and the interval when the pair of guide chucks are open can be set.

Further, when the pair of guide chucks move and open in a direction perpendicular to the transfer direction of the band-shaped member, the back guide chuck is fixed to the Y-direction moving base, and the lever is used to move the back chuck. The guide chuck on the front side connected to the guide chuck is movable on the guide rail provided on the moving base in the right-angle direction, and the rotation center is on the center line in the transfer direction of the band-shaped member from the standby position. When the guide chuck on the back side further moves in the back direction after reaching the opening position, the rotation of the lever causes the guide chuck on the front side to move to the front side by the same movement amount as the guide chuck on the back side, and The opening width of the guide chuck is defined.

Further, an air cylinder is disposed on the Y-direction moving base, and the air cylinder is disposed in parallel with the Y direction, and the direction in which the rod protrudes is such that the rotation center is the center of the transfer direction of the strip-shaped member from the standby position. In the opposite direction to the line, a stopper block and a plate having a rotation axis of the lever are mounted on the tip of the rod, and a stopper is mounted on the X-direction moving base. When the rotation center moves from the standby position to the center line in the transfer direction of the strip-shaped member, the stopper block reaches the stopper by hitting the stopper,
After that, even if the Y-direction moving base moves and opens the pair of guide chucks, the rotation center is fixed on the center line of the transport direction of the reached band-shaped member. Is supplied with high-pressure air of an arbitrary pressure, and the protrusion strength of the rod of the air cylinder is adjustable.

Further, the chuck portions of the pair of guide chucks are provided substantially over the entire area of the guide chucks in the X direction.

Finally, according to the present invention, the above-mentioned belt-shaped member conveying device is disposed on both sides of the center line on which the belt-shaped member is transferred so as to face each other. In the member conveying device, the center line at which the rotation center reaches before the back side guide chuck is opened is the center line in the transfer direction of the band plate member, It is also a transfer device.

[0018]

With the transfer device of the present invention having the above-described configuration, the following operations can be performed. First, when the Y-direction moving base advances from the standby position, and the stopper block hits the stopper mounted on the X-direction moving base,
That is, both guide chucks remain closed until the center of rotation of the lever reaches the center line in the transport direction of the lead frame.

When the Y-direction moving base moves forward any more,
The accompanying guide chuck on the back side (hereinafter referred to as A guide chuck) moves to the back side by the amount of advance, that is, opens. On the other hand, a guide chuck on the near side (hereinafter referred to as a B guide chuck) is pivotally connected at a position where a certain point is point-symmetric with the A guide chuck, and is connected to a lever having the preceding point as a rotation center, and moves in the Y direction. The LM guide on the base is movable in the Y direction. At this point, since the lever rotates without moving back and forth, the B guide chuck is opened forward by the same amount as when the A guide chuck is opened. That is,
The opening width of both guide chucks is determined by the amount by which the stopper block is further advanced after it hits the stopper mounted on the Y-direction moving base.

After the Y-direction moving base is advanced until both guide chucks are opened to a size corresponding to the width of the lead frame, the lead frames are set on the steps provided on both guide chucks, and both ends of both guide chucks are placed at both ends. The lead frame is held by the provided chuck unit.

While holding the lead frame, the X-direction moving base on which the Y-direction moving base
When the lead frame is fed at a constant pitch in the direction, the lead frame is fed at a constant pitch in the X direction while being held by the chuck portion. At this time, the center of rotation of the lever is on the center line where the lead frame is transferred.

The above-mentioned plate member having the rotation axis of the lever is attached to the tip of the rod of the air cylinder installed on the Y-direction slide base, and the Y-direction slide base is further advanced after the stopper block hits the stopper. In this case, since the rod is in the protruding direction, which is a reaction force of the air cylinder to the forward movement of the Y-direction slide base, the forward force and speed of the Y-direction slide base are reduced by the air pressure supplied to the air cylinder. Can be adjusted.

[0023]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a transfer apparatus according to the present invention. 1 to 3 are plan views of the transfer device of the present invention. FIG. 1 shows a standby state, and FIG. 2 shows a state in which a slide base in the Y direction advances a first stage and a stopper block 34 hits a stopper 30. FIG. 3 shows a state in which the slide base further advances in the Y direction and the guide chuck expands to the maximum. FIG. 4 shows the state of FIG. 3 in a side view.

First, the main configuration will be described. As shown in FIG. 4, first, on the main body base 10, an LM guide 12 that slides on an X rail 11 arranged in the X direction,
Via a substrate 13 mounted on the M guide 12,
The X slide base 14 is attached. Although the detailed structure is omitted in the drawing, the X slide base 14 can move straight in the X direction using a X-axis motor as a drive source and a pulley, a timing belt, and the like.

Next, as shown in FIGS. 1 and 4, two Y rails 20 are fixed on the upper surface of the X slide base 14, and the LM guide 21 slides on the Y rail 20. , A Y slide base 22 is attached. Bearings 23 are installed on the upper surface of the X-slide base 14 at the front and rear ends, and ball bearings 24 are fitted in the bearings in the Y direction. A nut portion 25 matching the screw is combined with the ball screw 24. The nut portion 25 is fixed to the lower surface of the Y slide base 22. That is, by rotating the ball screw 24 via the pulley and the timing belt using the Y-axis motor as a drive source, the Y slide base 22 can move forward and backward in the Y direction. In addition, although its function will be described later, a stopper 30 is also attached to the upper surface of the X slide base 14.

The Y slide base 22 has a large notch 29 at the front (see also FIG. 2), and an L at the rear.
An air cylinder 32 is attached via a metal fitting 31, and a stopper block 34 is attached to the tip of a rod 33. Below the stopper block 34, an arm 35 extending forward between the X slide base 14 and the Y slide base 22 is connected.
Similarly, a fulcrum block 38 is sequentially connected to the rail 37 of the LM guide 36. In addition, the LM guide 36 is fixed to the lower surface of the Y slide base 22. Further, a lever 40 rotatable about the fulcrum is disposed on the fulcrum block 38 via a bearing 41. The notch in front of the Y slide base 22 described above allows the lever 40 to rotate even if the lever 40 rotates. The size does not hit the Y slide base 22.

Next, the guide chuck will be described with reference to FIG. 3. The A guide chuck 50 is fixed to the front end of the Y slide base 22, the front of which is cut out.
The guide chuck 51 slides on a Y rail small 52 disposed at both ends on the Y slide base 22.
3 mounted on. Here, the small Y rail 52 is attached to grooves provided at both ends of the upper surface of the Y slide base 22, the upper surfaces of both guide chucks 50 and 51 are the same height, and the lower surface of the B guide chuck 51 is Y surface. It is in a positional relationship not to contact the upper surface of the slide base 22. 3, both guide chucks are provided with slide units 55 movable in the X direction on the lower surface near the center thereof, and both slide blocks 56 are provided with bearings 57. The levers 40 are pivotally connected so that the pins 58 provided at both ends of the lever 40 are fitted to the bearings 57. Here, the slide unit 55 has a linear function similar to that of the LM guide extended above, and the slide block is an LM guide.
Think of it as a guide.

Further, both guide chucks 50 and 51 are provided in FIG.
As shown in a partial cross-sectional side view of the above, inside the upper surface (on the side where the rotation center of the lever 40 is located), a step portion 60 on which the longitudinal side portion of the lead frame 1 is placed, Has a chuck portion 61. Also, the X of the step portion 60
The length in the direction is, as shown in FIG.
It covers almost the whole area in the X direction of 0,51.

[0029]

[Embodiment 1] The operation of the transport apparatus of the present invention will be described in order with reference to FIGS.

First, the standby state is as shown in FIG. Both guide chucks 50 and 51 are closed, and the X-axis passing through the center of rotation of the lever 40 is located far before the transfer center line of the lead frame. That is, the Y slide base 22 is at the rearmost end.

The operation starts when the Y-axis motor 26 rotates, and the rotation is synchronized with the timing belt 28 and the pulley 2.
By rotating the ball screw 24 through 7, the nut portion 25 starts to advance in the Y direction. When the forward movement is continued, the stopper block 34 hits the stopper 30. This is the state shown in FIG. At this point, the guide chucks 50 and 51 are still closed, and the rod 33 of the air cylinder 32 has not yet started to protrude.

When the Y-axis motor 26 continues to rotate, the Y-slide base 22 continues to move forward.
The A guide chuck 50 fixed to the distal end of the slide base 22 has an X direction slide unit 55 on the lower surface near the center in the X direction, and the slide block 56 is pivotally connected at the end of the lever 40. Because
Open to the back side parallel to the X axis. However, the fulcrum block 38 connected to the stopper block 34 remains stopped at the previous position. Here, the B guide chuck 51 also has a structure similar to that of the A guide chuck 50 and is connected to the lever 40. The pivot connection point between the two guide chucks is, as shown in FIG. On the concentric circle of the center. At the same time, the B guide chuck 51
Is slidable on the Y rail small 52 in the Y direction, so that when the A guide chuck 50 opens, the lever 40 rotates, and with the rotation, the B guide chuck 51 opens forward. The opening amounts of the A guide chuck 50 and the B guide chuck 51 are the same.

Further, the above-described stopper block 34
While the Y slide base 22 moves forward after hitting the stopper 30, the rod 33 of the air cylinder 32 is in a protruding state. Accordingly, although not shown, if high-pressure air of an appropriate pressure is supplied to the air cylinder 32 in a direction in which a force (a reaction force against the forward movement of the Y-slide base 22) of the rod 33 is applied, the air cylinder 32 Acts as a so-called low pressure spring, and Y
The slide base 22 moves forward without inertia, and the guide chucks 50 and 51 can be opened smoothly.

FIG. 3 shows a state in which the guide chucks 50 and 51 are almost fully opened. Here, as described above, the two guide chucks 50 and 51 are opened by the same dimension in the Y direction about the X axis passing through the rotation center of the lever 40. Further, the amount can be set by an amount by which the Y slide base 22 is further advanced after the stopper block 34 hits the stopper 30. Therefore, as shown in FIG. 5, when the lead frame 1 is placed on the step portion 60 of the guide chucks 50 and 51, play of the lead frame 1 in the Y direction is generated. Set to dimensions that are not.

Next, as shown in FIG. 5, the chuck portions 61 on the upper surfaces of both the guide chucks 50 and 51 are opened, and after the lead frame 1 is mounted, the chuck portions are closed to hold the lead frame 1. . Here, as shown in FIG. 3, the length of the chuck portion 61 of the guide chucks 50 and 51 extends over substantially the entire area of the guide chucks 50 and 51 in the X direction. The chuck is sufficiently possible even if it is placed with a slight shift in the direction. Although not shown, the lead frames are vertically stacked in, for example, a stocker, and the lead frames are taken out one by one from above by a transfer hand and placed on both guide chucks 50 and 51. Things.

The lead frame is placed on the chuck 6
When the X slide base 14 is moved while being gripped in step 1,
The lead frame is transported in the X direction, that is, the transport direction.
The transfer is usually a constant pitch feed, but as a method,
The perforations 7 formed in the lead frame described in FIG.
Is detected by a sensor (not shown) installed above, and the information is fed back to the drive control system of the X slide base 14.

In the pellet mounting process, the constant pitch feed is repeated, and the pellets are sequentially mounted on the lands when the lead frame is stopped. When all the lands are mounted, the chuck 61 is opened. Thereafter, although not shown, the lead frame is taken out from above the guide chuck by the transport hand and placed on a predetermined position or a stocker.

[0038]

Embodiment 2 Next, an example in which the structure of the opening / closing portion of the guide chuck is slightly different will be described with reference to FIG. FIG.
FIG. 4 is a plan view showing the guide chuck portion when the guide chucks 50 and 51 are almost fully opened as in FIG.

In this embodiment, the A guide chuck 50 is Y
It is not completely fixed to the slide base 22 and is somewhat movable in the Y direction. Its structure is, for example, Y
Slots 6 extending in the Y direction at both ends of the slide base 22
5 are provided, and pins 66 inserted into the long holes are provided on the lower surface of the A guide chuck 50. Also, A
On the lower surface of the guide chuck 50, a B guide chuck 51 is provided.
Similarly, the LM guide 67 that slides on the small Y rail 52
Is attached. At the same time, Y slide base 22
A tension spring 68 is disposed on both sides of the Y-slide base 22, one end of which is hooked on a spring stopper pin 69 attached to both sides of the Y slide base 22, and the other end of which is hooked on the lower surface of the A guide chuck 50 (not shown). As a result, the A guide chuck 50 is constantly pulled toward the near side in the Y direction.

With the above structure, the Y slide base 2
When the R surface on the near side of the long hole 65 provided in the second 2 pushes the pin 66 attached to the lower surface of the A guide chuck 50, the A guide chuck 50 opens. This is because the tension spring 68 always pulls the A guide chuck 50 toward the near side. From another viewpoint, when an external force is applied to the back side in the Y direction, the A guide chuck 50 can open the dimensional difference between the length of the elongated hole 65 and the diameter of the pin 66.

By utilizing this characteristic, the following positioning of the lead frame becomes possible. When placing the lead frame on the step portion 60 of the guide chucks 50 and 51,
With the guide chucks 50 and 51 opened slightly larger than the width of the lead frame, the lead frame is placed. Next, when the Y slide base 22 is retracted, that is, the guide chucks 50 and 51 are closed, the lead frame is completely sandwiched between the guide chucks 50 and 51 in the width direction without play. That is, while the lead frame is accurately positioned in the width direction (Y direction) after placement,
At the time of mounting, some allowance can be given in the width direction. Of course, when the guide chuck is closed, the long hole 65 and the pin 66 are left with play in the Y direction, and the tension spring 68 must not be too strong to deform the lead frame.

The embodiment in which the transfer apparatus of the present invention is composed of one set has been described above. As shown in FIG. 7, two sets of this transfer apparatus are arranged so as to face both sides of the center line to which the lead frame is transferred. You can also. When the constant pitch feed by one of the transport devices is completed, the lead frame is transported without interruption by operating the other transport device without a break. In this case, since the leading end portions of the two transport devices interfere with each other in layout, it is necessary to interlock between the two transport devices in order to avoid a collision in practical use.

Finally, in the embodiment, the description has been made with reference to the lead frame. However, the objects that can be transported are not limited to the lead frame, but may be a wide variety of strip-shaped members such as various pallets and rulers.

[0044]

As described above, according to the transfer device of the present invention, in transferring a lead frame having low rigidity and thinness, and having a plated surface, both side surfaces of the lead frame are provided on the guide rails. The constant pitch feed is not performed while sliding inside the groove held in the groove, but the constant pitch feed is performed while the lead frame is held by the chuck, so that the plating film does not peel off.

For this reason, the plating film does not fall off and scatter around, but does not adhere to the constituent members in the apparatus, for example, the LM guide, and the smooth movement of the slide unit is maintained forever. That is, the device can be operated without abnormal stop, and at the same time, the life of the device is significantly extended. In addition, the peeling of the plating film does not flow to the subsequent process while remaining on the lead frame.There is no product failure such as short-circuiting of the electric circuit in the pellet, and the debris is scattered in the subsequent process. Therefore, high cleanliness can be maintained even in a later manufacturing environment.

Further, conventionally, if the plating film is peeled off and deposited in the groove provided in the guide rail,
As the clearance between the groove and the lead frame becomes smaller, the constant pitch feed of the lead frame is not performed smoothly, and in the worst case, the constant pitch feed becomes impossible or the lead frame is deformed or damaged. But
All of this is eliminated, and the non-defective product rate and the operation rate of the device are greatly improved.

Further, the width of the guide chuck can be arbitrarily changed, and the present invention can be applied to lead frames of any width. In addition, this method can be changed simply by changing the amount of advance of the Y-slide base, and even if the amount of advance is changed, the center line to which the lead frame is transferred does not change. Therefore, even if the shape of the lead frame to be conveyed changes due to product change, etc., there is no need to replace it with a guide rail suitable for the lead frame each time, and in the width direction, the mounting of the guide rail itself is adjusted in the width direction In the thickness direction, the guide rail has a function of freely adjusting the groove width in the thickness direction, and any complicated structure conventionally used is not required.

At the same time, even if the lead frame is slightly displaced in the X direction, or if the thickness of the lead frame is slightly changed,
They can be positioned and placed with high accuracy. Therefore, it becomes possible to mount the pellet on the land portion of the lead frame with high accuracy, and it becomes easy to perform fine-pitch wire bonding with a high pin density later, and the non-defective rate is also improved.

It should be noted that, with one operation of moving the Y slide base forward, the guide chuck can be opened and closed continuously following the movement in the Y direction, so that there is no need to provide a drive source for each operation. In addition, the structure can be simplified and the speed can be increased. Further, at this time, the Y slide base moves without inertia, and at the same time, the guide chuck opens and closes without inertia. Therefore, any fastening portion of the device such as a screw is not loosened, and the life of the device can be extended. Further, since the guide chuck smoothly opens and closes to a predetermined size without chattering due to inertia, the lead frame can be mounted and removed immediately, which also contributes to speeding up.

In addition, if the mechanism of the guide chuck shown in the second embodiment is adopted, it is possible to allow a margin in the width direction when mounting the lead frame on the guide chuck. In addition, the positioning of the transfer hand with respect to the placement is simplified, and the number of steps is reduced. Further, since the lead frame can be accurately positioned in the width direction after mounting, that is, the land portion on the lead frame can be accurately positioned, the pellet can be accurately mounted on the land portion, and the yield rate of the product is improved. Therefore, it greatly contributes to the improvement of the non-defective product rate in the production of a multi-pin, fine-pitch semiconductor which is required to have a high positioning accuracy, in particular, a super LSI.

[Brief description of the drawings]

FIG. 1 is a plan view of a transfer device of the present invention in a standby state.

FIG. 2 is a plan view when the transfer device of the present invention starts operating and the center of rotation of the lever comes on the transfer center line of the lead frame.

FIG. 3 is a plan view of the transfer device of the present invention when the guide chuck is opened to a maximum.

FIG. 4 is a side view of the transfer device of the present invention when the guide chuck is opened to a maximum.

FIG. 5 is an enlarged side view of a chuck portion of a guide chuck of the transfer device of the present invention.

FIG. 6 is a plan view showing a guide chuck section according to a second embodiment in the transport apparatus of the present invention.

FIG. 7 is a plan view when two sets of the transfer device of the present invention are arranged.

FIG. 8 is a perspective view illustrating a transfer device using a conventional clamping method.

FIG. 9 is a side view showing a state of movement of a clamp in a transfer device using a conventional clamp method.

FIG. 10 is a perspective view showing a conventional pin-type transport device.

FIG. 11 shows a conventional pin-type transfer device.
The side view showing the moving state of a pin.

FIG. 12 is a side view showing a lead frame held by a conventional guide rail.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Main body base 11 X rail 12, 21, 36, 53, 67 LM guide 13 Substrate 14 X slide base 20 Y rail 22 Y slide base 23 Bearing 24 Ball screw 25 Nut part 26 Y axis motor 27 Pulley 28 Timing belt 29 Notch Part 30 Stopper 31 L-shaped bracket 32 Air cylinder 33 Rod 34 Stopper block 35 Arm 38 Support block 40 Lever 41, 58 Bearing 50 A guide chuck 51 B guide chuck 52 Small Y rail 55 Slide unit 56 Slide block 57 Bearing 58, 66 Pin 60 Step 61 Chuck 65 Long hole 68 Spring 69 Spring retaining pin

Claims (7)

[Claims] 1. A pair of guide chucks which can be opened and closed in a direction perpendicular to a direction in which the band-shaped member is transferred, wherein the guide chucks are mounted on a step provided on an upper surface thereof. And a pair of guide chucks, each of which is provided with a Y-axis in a direction perpendicular to a transfer direction of the band-shaped member.
An apparatus for transporting a strip-shaped member, wherein the transfer apparatus is disposed on a direction-moving base, and the Y-direction moving base is arranged on an X-direction moving base in a transfer direction of the strip-shaped member. 2. The pair of guide chucks are pivotally connected to a lever having a center of rotation at a midpoint between the guide chucks, and are simultaneously opened and closed by rotation of the lever. The belt-shaped member conveying apparatus according to claim 1, wherein the pair of guide chucks are located on a center line in a direction, and an interval at which the pair of guide chucks are opened can be set freely. 3. When the pair of guide chucks move and open in a direction perpendicular to the transfer direction of the strip-shaped member, a back guide chuck is fixed to the Y-direction moving base, and the lever is used to move the back chuck. The guide chuck on the front side connected to the guide chuck is movable on the guide rail provided on the moving base in the right-angle direction, and the rotation center is on the center line in the transfer direction of the band-shaped member from the standby position. When the guide chuck on the back side further moves in the back direction after reaching the opening position, the rotation of the lever causes the guide chuck on the front side to move to the front side by the same movement amount as the guide chuck on the back side, and 3. The apparatus according to claim 2, wherein the guide chuck has an opening width. 4. An air cylinder is disposed on the Y-direction moving base, and the air cylinder is disposed in parallel with the Y-direction, and the rod projects in a direction in which the rotation center is from the standby position to the center of the transfer direction of the strip-shaped member. A stopper block and a plate member having a center of rotation of the lever are mounted on the tip of the rod, and a stopper is mounted on the Y-direction moving base. When the rotation center moves from the standby position to the center line in the transfer direction of the strip-shaped member, the stopper block reaches the stopper by hitting the stopper, and then the Y-direction moving base moves to move the pair of guides. 4. The apparatus according to claim 3, wherein, even when the chuck is opened, the rotation center is fixed on a center line of the belt-shaped member that has reached in the transfer direction. Conveying apparatus of the strip-like member. 5. The strip-shaped member according to claim 4, wherein high-pressure air having an arbitrary pressure is supplied to the air cylinder, and the protrusion strength of a rod of the air cylinder can be adjusted. Transport device. 6. The apparatus according to claim 5, wherein the chuck portions of the pair of guide chucks are provided substantially over the entire area of the guide chucks in the X direction. 7. A belt-like member conveying device according to claim 6, wherein the belt-like member conveying device is disposed on both sides of a center line to which the belt-like member is transferred so as to face each other. In the member conveying device, the center line at which the rotation center reaches before the back side guide chuck is opened is the center line in the transfer direction of the band plate member, Transport device.