JP2001007176A - Substrate processor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To safely execute work by manually operating a device constitution unit through the use of an operation means in a substrate processor. SOLUTION: In a substrate processor, the operations of device constitution units 2 to 6 and 20 are manually operated by using an operation unit 10 connected to the processor. A manual operation by the operation unit 10 can be executed at plural operation positions SPA, SPB, SPC and SPD. Operation permission ranges where the manual operation is permitted by the operation unit 10 are decided for the respective operation positions SPA to SPB. In the manual operations by the operation unit 10 from the respective operation positions SPA to SPD, only the operation in the operation permission ranges can be executed and the operation beyond the operation permission ranges is inhibited.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate processing apparatus for processing a substrate such as a semiconductor wafer, a glass substrate for a liquid crystal display, a glass substrate for a photomask, and a substrate for an optical disk. Configures various robots and equipment for processing units, such as transporting, transferring, and transferring substrates during emergency operations in the event of trouble, recovery work after abnormal stop of equipment due to power failure, etc. The present invention relates to an improved technique of a substrate processing apparatus that allows an operator to manually operate an operation of an apparatus component device to be performed by using an operation unit connected to the apparatus.

[0002]

2. Description of the Related Art In a substrate processing apparatus of this type, during a normal operation, a control section controls each component of the apparatus to transfer a substrate to each processing section and to process a substrate in each processing section. While being performed automatically, configure equipment such as various robots and components of the processing unit when performing maintenance work, emergency measures in case of trouble, recovery work after abnormal stop of equipment due to power failure, etc. It is also configured such that an operator can manually operate the operation of the device constituting device by using an operation means connected to the device.

A conventional device having such a function is as follows.
It is configured such that all the device components in the device can be manually operated from one operating means.

[0004]

However, the prior art having such a structure has the following problems. That is, the maintenance work, the emergency treatment, the recovery work, and the like may be performed by a plurality of workers. On the other hand, there is also a device component device that operates in a place where a worker operating with the operation means is blind spot. Therefore, if it is configured such that all the device components in the device can be manually operated by one operating means as in the conventional device, the work performed by the operator operating the operating means in a place where the blind spot is performed It is possible for the operator operating the operating means to operate device components that operate in a blind spot from the operator operating the operating means without noticing the operator. There is a problem that an unexpected accident such as a worker being exposed to the water is caused.

[0005] In particular, in response to the recent increase in the size of substrates and diversification of processing contents, the apparatus is becoming larger and the structure is becoming more complicated. In addition to the fact that the number of workers who work is increasing, the number of device components that operate in a blind spot from the operators operating with the operation means also increases, and the unexpected accidents as described above are more worried.

The present invention has been made in view of such circumstances, and provides a substrate processing apparatus capable of safely performing an operation of manually operating apparatus components using operating means. With the goal.

[0007]

The present invention has the following configuration in order to achieve the above object. That is, the invention according to claim 1 is a substrate processing apparatus capable of manually operating the operation of an apparatus component device using an operation unit connected to the apparatus, wherein the operation of the operation unit is performed at a plurality of operation positions. The manual operation by the operating means from each operation position is determined by setting an operation allowable range in which the manual operation by the operating means is allowed for each operation position. It is characterized in that it is configured so that only the operations within can be performed.

According to a second aspect of the present invention, there is provided the substrate processing apparatus according to the first aspect, wherein there are a plurality of the apparatus components which can be manually operated by the operation means, and an operation allowable range for each operation position is defined. In addition, a plurality of device components are determined to be divided.

According to a third aspect of the present invention, in the substrate processing apparatus according to the first or second aspect, in a case where a movable device is included in the apparatus component that can be manually operated by the operating means, each operation position is changed. The operation allowable range includes a range determined to divide the moving range of the movable device.

According to a fourth aspect of the present invention, there is provided the substrate processing apparatus according to any one of the first to third aspects, further comprising display means for displaying each operation allowable range for each operation position. It is a feature.

[0011]

The operation of the first aspect of the invention is as follows. The manual operation by the operation means can be performed at a plurality of operation positions.

The operating means may be detachably connected to the apparatus, or may be fixed (installed) to the apparatus.

In the case of the operating means detachably connected to the apparatus, the connection ports with the operating means provided on the apparatus side are provided at a plurality of places of the apparatus, and in the case of the operating means installed on the apparatus, the connecting ports of the apparatus are provided. The operating means is installed at a plurality of locations so that manual operation can be performed by the operating means at a plurality of operating positions.

An operation allowable range in which manual operation by the operating means is allowed is determined for each operation position, and the manual operation by the operating means from each operation position can be performed only within the operation allowable range. And prohibits operations from the respective operation positions outside the respective operation allowable ranges.

The operation allowable range operates in a place where a worker becomes blind spots when operating from the operating position, or where the worker does not completely become blind spots, for example, is partially hidden by a shadow and is difficult to see. It is determined that the operation on the device components is prohibited, and the operation of only the device components in a range that can be visually recognized when the operator operates from the operation position is permitted.

Each operation position (location of the connection port and installation location of the operation means) is determined by at least all the device components that can be manually operated by the operation means according to the respective operation allowable ranges of the operation positions as described above. It is decided to be covered. Further, in consideration of workability and the like, the operation allowable range of each operation position may be determined so that the operation allowable ranges of two or more different operation positions may be completely the same or may partially overlap.

According to the second aspect of the present invention, when there are a plurality of device components that can be manually operated by the operating means, the operation allowable range for each operation position is divided into the plurality of device components. To decide. In other words, the device components that operate in places such as blind spots when the operator operates from the operation position are excluded, and only the device components in the range that can be visually recognized by the operator from the operation position are excluded. A plurality of device components are divided so as to be assigned to the operation positions, and the device components included in the operation allowable range of each operation position are determined.

According to a third aspect of the present invention, there is provided an apparatus which can be manually operated by an operation means, for example, when the operator operates from one operation position when the operation range is relatively wide. This is related to how to determine the permissible range of operation for each operation position when the range includes movable equipment that can form a blind spot.The movable range of the movable device is determined based on the positional relationship between each operation position and the movable range of the movable device. Are assigned to the operation allowable range of two or more operation positions in a divided manner, and when the movable device is moved, the moving operation of the movable device in the moving range such as a blind spot of an operator operating with the operation means is prohibited. .

According to the fourth aspect of the present invention, the display means provided at each operation position displays an operation allowable range determined at the operation position, and presents the operator with a range that can be operated at the operation position. .

[0020]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view showing an overall configuration of a substrate processing apparatus according to one embodiment of the present invention.

The apparatus of this embodiment is a batch-type processing apparatus capable of processing a plurality of substrates W (substrate group WG) collectively, and includes a carrier stocker 1, a substrate transfer robot 2, a transfer hand Corresponding to the exchange unit 3, the posture changing robot 4, the substrate transfer robot 5, the substrate transport robot 6, the clamping mechanism cleaning unit 7 for cleaning the clamping mechanism 6a of the substrate transport robot 6, the processing units 8A to 8C, the shutter mechanism 9, and the operating means. Operating device 10 (10A to 10D), a connection port 11 (11A to 11D) for connecting the operating device 10 to the device, an operation changeover switch 12 (12A to 12D) for switching ON / OFF of the operation by the operating device 10; The control unit 13 is provided.

The carrier stocker 1 is for transporting and temporarily storing a carrier C for accommodating a plurality of substrates W, and includes a carrier storage unit (not shown) for temporarily storing the carrier C. And a carrier transport robot 20 for transporting the carrier C. The carrier transport robot 20 moves between a carrier storage unit, a loading / unloading position P1 for loading / unloading the carrier C, and a transfer position P2 where the substrate transfer robot 2 takes out / accommodates each substrate W from / to the carrier C. Carry carrier C.

The carrier stocker 1 also includes a carrier loading / unloading robot for loading / unloading the carrier C to / from the carrier stocker 1 at the loading / unloading position P1, a carrier transport robot 20, and a transfer position P2. A carrier transfer robot for transferring a carrier to and from a carrier mounting table (not shown) provided in the device may be provided.

In the carrier stocker 1, the carrier C is handled in a state where each substrate W is stored in a horizontal posture.

The substrate transfer robot 2 uses the mounted transfer hand 21 to take out the unprocessed substrate W from the carrier C placed at (the carrier mounting table of) the transfer position P2 and change the posture. The transfer position P2 is transferred to the robot 4 or receives the processed substrate W from the posture changing robot 4
The transfer operation of a plurality of substrates W stored in the carrier C is performed. The substrate W transfer operation by the substrate transfer robot 2 is also performed with the substrate W in a horizontal posture.

The carrier stocker 1 and the apparatus main body are separated by a partition wall 22, and an opening 23 through which the transfer hand 21 and the substrate W can be taken in and out is formed only in the transfer position P2. . Operation area O
A is separated from the apparatus by a partition wall 24. That is, the partition walls 22 and 24 make the apparatus main body side blind from an operator in the operation area OA and the carrier stocker 1, while an operator in the apparatus main body side has a blind spot in the operation area OA and the carrier stocker 1. It is blind spot.

The transfer hand 21 is configured to be detachable from the substrate transfer robot 2, and a spare transfer hand 21 for replacement is stocked in the transfer hand exchange unit 3. The transfer hands 21 include, for example, a transfer hand for collectively transferring all substrates W stored in one carrier C and a transfer hand for transferring substrates W one by one. Are prepared and the transfer hand 21 is exchanged according to the situation, and the transfer operation of the substrate W is performed. The transfer operation of the transfer hand 21 with respect to the substrate transfer robot 2 is configured to be automatically performed.

The posture changing robot 4 rotates around a horizontal axis while holding a plurality of substrates W in parallel,
The posture is changed between a state in which the substrates W are arranged vertically in a horizontal posture and a state in which the substrates W are arranged horizontally in a vertical posture.

The substrate transfer robot 5 transfers a group of substrates WG arranged in a vertical posture in the horizontal direction between the posture change robot 4 and the substrate transfer robot 6 (a clamping mechanism 6a thereof). The transfer of the substrate W by the substrate transfer robot 5, the transfer of the substrate W by the substrate transfer robot 6, which will be described later, and the processing in each of the processing units 8A to 8C are performed with the substrate W in a vertical posture.

The substrate transfer robot 6 includes a pair of holding mechanisms 6.
and a moving mechanism unit (not shown) for horizontally moving or raising and lowering the holding mechanism 6a in the direction in which the processing units 8A to 8C are arranged, and the substrate group WG arranged horizontally in a vertical posture.
Are collectively pinched by the pinching mechanism 6a and horizontally moved in the space above the processing units 8A to 8C, and the substrates W are sequentially transferred to the processing units 8A to 8C, and the transfer of the substrate group WG to the processing units 8A to 8C is performed. I do.

A cleaning liquid is stored in the holding mechanism cleaning section 7.
Cleaning tanks 7a and 7b are provided for immersing the holding mechanism 6a in the cleaning liquid for cleaning. Although not shown, the clamping mechanism cleaning unit 7 includes a liquid supply system that supplies a cleaning liquid to each of the cleaning tanks 7a and 7b, a drain system that discharges the cleaning liquid from each of the cleaning tanks 7a and 7b, An openable / closable cover provided on the upper surface is also provided.

In the processing section 8A, a chemical solution is stored, a substrate tank WG is immersed in the chemical solution to collectively wash a plurality of substrates W with the chemical solution, and a pure water is stored in the processing tank 30A. A processing tank 31A for immersing the substrate group WG in water and collectively rinsing a plurality of substrates W with pure water is provided, and the processing unit 8B is similarly provided with a processing tank 30B for chemical cleaning and a rinsing cleaning. And a processing tank 31B.

Each of the processing units 8A and 8B has a substrate group W
Lifters 32A and 32B which hold G, move up and down collectively, and can move horizontally are also provided. Each lifter 3
2A (32B) is a holding mechanism 6a of the substrate transfer robot 6.
From the substrate group WG and sequentially immersed in the processing tanks 30A (30B) and 31A (31B),
Is lifted from the processing tank 31A (31B) and delivered to the clamping mechanism 6a of the substrate transfer robot 6.

Further, although not shown, each of the processing units 8A and 8B has a processing tank 30A, 31A, 30B, 3B.
1B, a liquid supply system for supplying a chemical solution or pure water,
A, 31A, 30B, and 31B are provided with a drainage system for discharging a chemical solution and pure water, and an openable / closable cover provided on the upper surface.

The holding mechanism cleaning section 7 and each processing section 8A,
The liquid supply system and the drainage system of 8B are provided with valves and pumps, respectively, and supply and drainage of liquids are performed by opening and closing valves and driving pumps.

The processing unit 8C performs a process of holding, rotating, and drying the substrate group WG. Although not shown, the processing unit 8C includes a rotor for holding and rotating the substrate group WG, an openable / closable cover provided on the upper surface, and a holding mechanism 6a of the substrate transfer robot 6 and the rotor. A substrate delivery mechanism for delivering the substrate group WG is also provided.

The holding mechanism cleaning section 7 and the processing sections 8A to 8A
The cover 8C is opened and closed by an opening and closing mechanism (not shown).

The space above each of the processing units 8A to 8C (the substrate group W
A partition 41 is provided between the G transfer space) and the maintenance area 40. The partition 41 and the like allow the substrate transfer robot 2, the hand exchange unit 3, the posture, and the like from the workers on the substrate transport robot 6, the nipping mechanism cleaning unit 7, and the processing units 8 A to 8 C on the apparatus body side. The side of the conversion robot 4, the substrate transfer robot 5, the maintenance area 40, etc. becomes a blind spot, and the work on the side of the substrate transfer robot 2, the hand exchange unit 3, the posture conversion robot 4, the substrate transfer robot 5, the maintenance area 40, etc. From the perspective of the user, the sides of the substrate transfer robot 6, the holding mechanism cleaning unit 7, and the processing units 8A to 8C are blind spots.

The shutter mechanism 9 is provided between the space above the processing tank 30A and the space above the processing tank 31A, and
When the substrate group WG is transported, the shutter (not shown) is extended and retracted between the upper space of the processing tank 30B and the upper space of the processing tank 30B, and between the upper space of the processing tank 30B and the upper space of the processing tank 31B. Except for the treatment tanks 30A and 31
A, 31A and 30B, and 30B and 31B block the flow of the atmosphere in the upper space.

As described above, the apparatus of this embodiment includes various types of robots 20, 2, 4, 5, 6, 32
A, 32B, etc., the transfer hand exchanging unit 3, the cover (opening / closing mechanism) of the clamping mechanism cleaning unit 7 and the processing units 8A to 8C, the liquid supply system of the clamping mechanism cleaning unit 7 and the processing units 8A and 8B, drainage system,
A plurality of device components such as a rotor of the processing unit 8C, a substrate delivery mechanism, and a shutter mechanism 9 are provided.

In this embodiment, four connection ports 11 (11
A to 11D). The connection port 11A is on the front side of the carrier stocker 1 (on the operation area OA side), the connection port 11B is on the side outside the carrier stocker 1 and on the side where the substrate transfer robot 6 is provided, and the connection port 11C is on the side outside the apparatus body. There is a connection port 11 on the side where the processing unit 8A is provided.
D is provided outside the side surface of the carrier stocker 1 and on the side where the transfer hand exchanging section 3 is provided.

Each operation changeover switch 12 (12A to 12A)
D) is provided near each of the connection ports 11A to 11D. The operation position S is around the connection ports 11A to 11D.
P (SPA to SPD).

In the present embodiment, a case will be described as an example in which a general-purpose operating device 10 that can be used to give an operation instruction to all device components provided in the device is used as the operating device 10.

As shown in FIGS. 2 and 3, the operation device 10 includes an operation main body 50 and a connection cord 51 derived from the operation main body 50. The connection portion 52 on the distal end side of the connection cord 51 is connected to a desired connection port 11 (11A to 11A) on the device side.
D), and by switching the operation changeover switch 12 near the connection port 11 to the operation ON state, an instruction from the operation device 10 is given to a control unit 13 described later, so that a manual operation can be performed at each operation position. Is configured.

The operation main unit 50 includes a display unit 53 corresponding to display means constituted by a liquid crystal display, and a display unit 5.
3, a display control unit 54 for switching a screen to be displayed, a touch panel sensor 55 mounted on a display surface of the display unit 53, and an instruction content of a pressed position based on a pressed position of the touch panel sensor 55 and a current display screen. And an instruction content discriminating section 56 for discriminating the control information and transmitting it to the control section 13.

The display control unit 54 displays a display screen of an operation allowable range for each operation position, which will be described later, on the display unit 53 in accordance with a command from the control unit 13, and receives an instruction from an operator (for example, a touch panel sensor 55. Switching of screens such as the display screen of the operation allowable range and each operation screen for operating each device component device is controlled by the pressing instruction).

The operator can display the operation screen for operating the device components desired to be manually operated on the display unit 53, and can transmit the selection instruction contents to the control unit 13 by pressing the position of the instruction contents.

In this embodiment, each of the operation positions SPA to
An operation allowable range in which manual operation by the operating device 10 is allowed is determined for each SPD as follows.

The operation permissible range RA of the operation position SPA is a device (e.g., a carrier transport robot 20, a carrier loading / unloading robot, a carrier transfer robot, etc.) within the range (carrier stocker 1) indicated by oblique lines in FIG. Range. In other words, from the operation position SPA, the carrier stocker 1 such as the carrier transport robot 20, the carrier loading / unloading robot, and the carrier delivery robot.
It is configured so that the operation of each of the robots (device components) can be manually operated.

The operation allowable range RBC of the operation position SPB is:
4 (b) is a range composed of device components (substrate transport robot 6, component devices of clamping mechanism cleaning unit 7, component devices of processing units 8A to 8C, and each shutter mechanism 9) within the range shown by oblique lines. . In this embodiment, the operation allowable range of the operation position SPC is set to be exactly the same as the operation allowable range RBC of the operation position SPB described above. That is, the operation of the substrate transfer robot 6 and the operation positions SPB and SPC
Opening / closing of the holding mechanism cleaning unit 7 and the covers of the processing units 8A to 8C, operation of the lifters 32A and 32B in the processing units 8A and 8B, cleaning tanks 7a and 7b, processing tanks 30A and 31A, and 3A.
The configuration is such that the supply and discharge of the liquid to and from 0B and 31B, the operation of the rotor and the substrate delivery mechanism in the processing section 8C, the movement of the shutter, and the like can be manually operated.

The operation permissible range RD of the operation position SPD is within the range indicated by hatching in FIG. 4C (device transfer robot 2, transfer hand exchange unit 3, posture changing robot 4, substrate transfer robot). 5). That is, the operation of the substrate transfer robot 2, the transfer hand exchange unit 3, the posture changing robot 4, and the substrate transfer robot 5 can be manually operated from the operation position SPD.

FIG. 5 is a block diagram showing the configuration of the control system of this embodiment. The control unit 13 configured by a computer or the like controls each device component during normal operation, operates each device component in a predetermined procedure, and automatically performs a processing operation by this device. In addition, the control unit 13
The apparatus is configured to operate the device components specified by the operation instruction from the operation device 10 connected to the connection ports 11A to 11D with the specified operation contents, such as maintenance work, emergency treatment when a trouble occurs, power failure, and the like. It is also configured such that, for example, during a recovery operation after an abnormal stop of the device, the operation of each component device can be manually operated by an operator using the operating device 10 connected to the device. I have.

In the present embodiment, each of the connection ports 11A to 11A
Setting data relating to the operation work range set for each of the operation positions SPA to SPD where the 1D is arranged, that is, a connection that associates which of the connection ports 11A to 11D corresponds to which of the operation allowable ranges RA to RD. Mouth 11A-1
The control unit 13 includes a storage unit for storing data corresponding to the IDs and the operation allowable ranges RA to RD.
Is the operating device 10 connected to any of the connection ports 11A to 11D.
In accordance with the operation instruction from which of the operation positions SPA to SPD, control is performed so that the manual operation can be performed within the operation allowable range RA to RD determined for each of the above operation positions SPA to SPD.

Next, a description will be given of the work of the operator during maintenance work, emergency treatment, recovery work and the like, and the operation of the apparatus accompanying the work.

When performing maintenance work, emergency treatment, recovery work, etc., a plurality of workers share the work. At this time, the worker who performs the work within the range (carrier stocker 1) indicated by the oblique lines in FIG.
0 is connected, and the operation changeover switch 12A is turned on. Further, the worker who performs the work within the range shown by the diagonal lines in FIG.
When the operation device 10 is connected to the connection port 11B, the operation changeover switch 12B is switched to operation ON, and when the operation device 10 is connected to the connection port 11C, the operation changeover switch 12C is switched to operation ON. Further, FIG.
(C), the worker performing the work within the range shown by the diagonal lines connects the operation device 10 to the connection port 11D, and operates the operation changeover switch 1.
Switch 2D to operation ON.

Thus, the control unit 13 sets the connection port 11A
Is connected to the operating device 10 (hereinafter, this operating device is referred to as 10A for convenience).
Indicates that the operating position is for operating the operating position SPA. Similarly, the operating device 10 (hereinafter, similarly operating these operating devices 10B, 10C, and 1) connected to the connection ports 11B, 11C, and 11D.
0D), the connectors 10B, 10C, and 10D respectively correspond to the operating positions SPB, SPC, and SP.
Command for operation of PD.

When this command is received, each of the operating devices 10A-1A
The display control unit 54 in the OD includes the operation positions SPA to S
The display unit 53 displays a screen indicating the allowable operation ranges RA to RD of the PD.
To be displayed. This display screen displays, for example, a simple plan view of the device as shown in FIG.
In FIG. 4A, the shaded portions shown in FIG.
For example, a screen in which the hatched portion shown in FIG. 4B is displayed at 0C and the hatched portion shown in FIG. In addition, each operation allowable range RA
To RD may be displayed in characters.

A worker who works at each work position gives an operation instruction from the operating devices 10A to 10D close to him / her so as to operate desired device components.

When an operation instruction is given, the control unit 13
First, it is determined whether or not the operation instruction is valid. The apparatus component is operated only in accordance with the operation instruction determined to be valid, and the operation instruction determined to be invalid is ignored.

The operation instructions from each of the operating devices 10A to 10D are individually given to the control unit 13, and the control unit 13 controls the operating devices 10A to 10D connected to any of the connection ports 11A to 11D.
It is possible to determine whether the instruction is an operation instruction given by the user.

The control unit 13 controls each of the operation devices 10A to 10A.
The operation instructions from 10D are respectively assigned to the operation positions SPA to
If the operation is within the operation allowable range RA to RD determined for each SPD, the apparatus component device is operated according to the operation instruction, and if the operation is outside the operation allowable range RA to RD, the operation instruction is ignored.

For example, when an operation instruction for an apparatus component within the operation allowable range RA of the operation position SPA, such as the carrier transport robot 20, is given from the operation device 10A, the device configuration device is operated in accordance with the operation instruction, and the operation device 10A is operated.
, An operation instruction to a device component outside the operation allowable range RA such as the substrate transfer robot 2 or the substrate transfer robot 6 is given, and the operation instruction is ignored. Similarly, when an operation instruction is given from the operating devices 10B and 10C to the device components within the operation allowable range RBC of the operation positions SPB and SPC, such as the substrate transfer robot 6, the device components are operated in accordance with the operation instructions, and the operating devices are operated. If operation instructions are given from 10B and 10C to device components outside the operation allowable range RBC such as the substrate transfer robot 2 and the carrier transfer robot 20, the operation instructions are ignored and the operation device 10
When an operation instruction for an apparatus component within the operation allowable range RD of the operation position SPD such as the substrate transfer robot 2 is given from D, the apparatus component is operated according to the operation instruction, and the substrate transfer robot 6 or the carrier is operated from the operating device 10D. If an operation instruction is given to a device such as the transfer robot 20 outside the operation allowable range RD, the operation instruction is ignored.

In this embodiment, a worker who operates at the operation position SPA by a partition wall 22 or 24 or a partition 41, etc., is a worker working on the apparatus main body side or a device component device operating in the apparatus main body. The operator is operating at the operation position SPB, SPC, and is in the operation area OA and the carrier stocker 1 as shown in FIG.
The workers operating in the maintenance area 40 and the equipment components operating in those areas are in blind spots, and the workers operating at the operation position SPD are also in the operation area OA and the carrier stocker. In FIG. 1, workers who work in an area shown by hatching in FIG. 4B and areas outside the area, and device components operating in those areas are blind spots.

Therefore, by configuring as in the present embodiment, it is possible to prohibit the operation of the device components operating in the place where the blind spot of each operator who operates the operating device 10 is provided, and the operation positions SPA to SPD Thus, it is possible to prevent an inconvenience that an operator operating in a place where the operator operates the operating device 10 in a blind spot is involved in an unexpected accident.

In the above embodiment, a plurality of device components are divided and the operation allowable range R of each of the operation positions SPA to SPD is divided.
Since A to RD are determined, the operation performed by operating the operation device 10 can be performed safely even in a substrate processing apparatus including a plurality of apparatus components.

Further, in the above-described embodiment, the operation permissible ranges RA to RD for each of the operation positions SPA to SPD are displayed on the display unit 53 provided on the operation device 10, so that the operator can operate each operation position SPA. To SPD, the range of operation can be known, and operability can be improved.

In the above-described embodiment, the operation permissible ranges RA to RD for each of the operation positions SPA to SPD are displayed on the display unit 53 provided on the operation device 10. However, the display units 53 are provided near the connection ports 1A to 11D. , Display devices (display means) are attached to the devices, and the operation position S
The configuration may be such that the operation allowable ranges RA to RD for each of PA to SPD are displayed.

By the way, in the above-mentioned embodiment, in consideration of the operability and the like, it is configured such that a manual operation can be performed from a plurality of operation positions SPB and SPC in a range indicated by oblique lines in FIG. Therefore, the operation permissible range of the operation position SB and the operation permissible range of the operation position SC are exactly the same range RBC.
I have decided. At this time, for example, an operation instruction for instructing an opposing operation from another apparatus position may be given to an apparatus component operating according to an operation instruction from a certain operation position. Therefore, when the same operation permissible range is assigned to two or more operation positions, it is preferable to control the operation instructions from each operation position by giving a priority.

The following method can be adopted as a method of determining the priority and a control form according to the priority.

First, as a first method, the control unit 13 is configured to detect that the operation device 10 is connected to the connection port 11, and the operation device 10 is connected to the connection port 11, and an operation changeover switch is provided. 12 determines the order of priority according to the order in which the operation is switched to ON. Then, among the two or more operation positions to which the same operation allowable range is assigned, the operation device 10 is first connected to the connection port 11 and the operation changeover switch 12
Gives the highest priority to the operation position switched to the operation ON, validates only the operation instruction from the highest-priority operation position, and ignores operation instructions from other operation positions to which the same operation allowable range is assigned. Such control is performed until the operation device 10 is disconnected from the connection port 11 at the operation position which is currently the highest priority, or the operation changeover switch 12 is turned off. Then, when the operation device 10 is disconnected from the connection port 11 at the operation position of the highest priority at present, or the operation changeover switch 12 is switched to operation OFF,
The above-described control is performed with the operation position having the next highest priority as the highest priority operation position.

As the second method, the priority is determined in the same manner as the first method. Only when an operation instruction instructing a contradictory operation from another device position is given to a device component operating in accordance with an operation instruction from a certain operation position, the operation for that device component device is performed in accordance with the priority order. If the operation instruction is not an instruction to instruct the same apparatus component device to perform an opposing operation, the operation instruction from any operation position is valid regardless of the priority.

As a third method, the priority order of operation instructions from each operation position is determined in advance and set in the control unit 13 so that the apparatus components operating in accordance with the operation instruction from a certain operation position can be controlled. Only when an operation instruction instructing an opposing operation from another device position is given, the operation on the device component is performed in accordance with the priority order, and an operation instruction instructing the opposing operation on the same device is performed. Otherwise, regardless of the priority, the operation instruction from any operation position is valid.

The operation allowable range for each operation position may be determined so that a part of each operation allowable range of two or more operation positions overlaps. However, also in this case, an operation instruction for instructing an opposing operation to the device components in the overlapping range may be given from a plurality of operation positions. In the same manner as described above, it is preferable to control the operation instructions from the respective operation positions with priorities.

In the above-described embodiment, the so-called transport system device components such as the substrate transport robot 6 and the holding mechanism cleaning unit 7 and the processing unit 8 are provided within the range shown by hatching in FIG.
Since so-called processing device components such as components A to 8C are mixed, the operation device 10 for instructing the operation of the transport device devices and the operation device 10 for instructing the processing device devices are provided. It can be configured to be divided.

In this case, for example, when two connection ports 11 are provided at the operation position SPB, and the operation device 10 is connected to one of the connection ports 11, the operation device 10 is operated to instruct the equipment of the transport system. The operation unit 10 performs the operation allowable range RB of the operation position SPB from the operation unit 10.
Only operation instructions to the device components of the transport system in C are made valid, and even if operation commands to other device components are given from the operation device 10, the operation device 10 is ignored. When the operating device 10 is connected, the operating device 10 is set as the operating device 10 for instructing the operation of the processing system device, and the control unit 13 receives the processing within the operation allowable range RBC of the operating position SPB from the operating device 10. Only the operation instruction to the system component device of the system is validated, and the operation device 10
, Any operation instruction to other device components may be ignored. The operation position SPC may be similarly configured.

At each operation position, not only the classification of the transport system and the processing system, but also the apparatus components having different functions and the like within one operation allowable range are classified in the same manner as described above. Operating device 10 that can be operated for each group
May be configured to be divided.

In the above-described embodiment, the operation switch 10 is provided, the operation device 10 is connected to the connection port 11, and the operation operation switch 12 is switched to the operation ON state. The operation device 10 is connected to the connection port 11 or the operation switch 12 is turned on.
, The manual operation by the operation device 10 may be performed. Further, the operation changeover switch 12 does not necessarily need to be provided, and the operation changeover switch 12 may be omitted.

Next, a description will be given of an embodiment in which the operation allowable range of each of the operation positions SPA to SPD is determined in another form in the configuration of the above embodiment.

For example, in the above embodiment, the connection port 11
B is relatively long between the connection port 11B and the worker at the operation position SPB, the worker working near the operation position SPC or the device component device operating near the operation position SPC becomes a blind spot, A worker who works near the operation position SPB from a worker who is in the SPC or a device component device that operates near the operation position SB may become a blind spot.

In such a case, for example, a configuration may be adopted in which the range indicated by oblique lines in FIG. 4B is divided, and each divided range is assigned to each of the operation allowable ranges of the operation positions SB and SC.

The processing system components can be classified as follows, for example.

That is, the holding mechanism cleaning section 7 and the processing section 8C
Device components related to the processing units 8A and 8B are included in the operation allowable range RC of the operation position SPC. Can be determined.

Further, for example, the device components related to the holding mechanism cleaning unit 7 and the processing units 8C and 8B are included in the operation allowable range RB of the operation position SPB, and the device components related to the processing units 8A and 8B are permitted to operate at the operation position SPC. Some processing units 8B, such as dividing them so as to be included in the range RC, are assigned to each operation position SP.
B and SPC can be determined by overlapping the operation allowable ranges RB and RC.

Further, for example, the equipment components related to the holding mechanism cleaning unit 7 and the processing unit 8C, the cover opening / closing mechanism of the equipment components of the processing unit 8B, the equipment components related to the lifter 32B and the processing tank 31B (processing tank) The supply system and the drainage system for the processing unit 31B are included in the operation allowable range RB of the operation position SPB, and the device components related to the processing unit 8A, the cover opening / closing mechanism and the lifter 32B among the device components of the processing unit 8B are included. For example, the apparatus components related to the processing tank 30B (such as a supply system and a drainage system for the processing tank 30B) are separated so as to be included in the operation allowable range RC of the operation position SPC.
It is also possible to subdivide the device components constituting one processing unit 8B to determine the operation allowable ranges RB, RC of the respective operation positions SPB, SPC.

The moving range of the equipment (substrate transfer robot 6) of the transfer system, which is one of the movable equipment of the present invention, traverses the entire area shown by the oblique lines in FIG. 4B. Therefore, for example, as shown in FIG. 6, the range indicated by the oblique lines in FIG. 6A of the movement range MH of the substrate transfer robot 6 is included in the operation allowable range RB of the operation position SPB, and FIG. The movement range MH of one movable device (substrate transfer robot 6) is divided by, for example, including the range shown by hatching in the operation allowable range RC of the operation position SPC, and dividing the operation range SPB, SP
The operation allowable ranges RB and RC of C are determined. Thereby, the movable device can be operated only within the movement range included in the operation allowable range RB from the operation position SPB, and the movable device can be operated only within the movement range included in the operation allowable range RC from the operation position SPC. Can be operated.

At this time, the moving range MH of the substrate transfer robot 6 is adjusted so that the worker who works while manually operating the operation position SPB and the worker who works while manually operating the operation position SPC can work together. Is partially overlapped, and the operation allowable range R of each operation position SPB, SPC
It is preferable to determine each divided range of the moving range MH included in each of B and RC.

In the configuration of this embodiment, each operation position SPB,
A part of the moving range MH of the substrate transfer robot 6 that overlaps the SPC operation allowable ranges RB and RC is, for example, as shown in FIG. 6, before the treatment tank 31B for rinsing and cleaning with pure water.

The operator at the operation position SPB and the operation position S
As a work in cooperation with the worker on the PC side, for example, the worker on the operation position SPC side immerses the substrate W in the processing liquid stored in a certain processing tank, and the worker on the operation position SPB side reads the processing tank. When taking out the substrate W from the processing liquid stored in the processing tank, there is a long time from the dipping of the substrate W in the processing liquid in the processing tank until the substrate W is taken out, and the substrate W is immersed in the processing liquid for a long time. It is conceivable that it is left in the state where it was done. In this case, if the processing liquid is a chemical, the substrate W will be damaged, but if the processing liquid is pure water, the substrate W will not be damaged.

Here, a part of the moving range MH of the substrate transfer robot 6 which is overlapped with the operation allowable ranges RB and RC of the respective operating positions SPB and SPC is, for example, processed in a processing tank 3 for cleaning with a chemical solution.
If it is before 0B, the processing tank 30B for cleaning with a chemical solution is used for the transfer of the work from the operator at the operation position SPC to the operator at the operation position SPB, and care must be taken so as not to damage the substrate W. You will have to work while you work. On the other hand, when configured as shown in FIG. 6, the processing tank 31 </ b> B that rinses with pure water to transfer the work from the worker at the operation position SPC to the worker at the operation position SPB
Can be used, and it is possible to work with ease without considering the damage of the substrate W.

In the case where the device components that can be manually operated by the operation device 10 include movable devices (such as the substrate transfer robot 6), each component may be changed depending on the positional relationship between each operation position and the moving range of the movable device. By including, in the operation allowable range for each operation position, the one determined to divide the moving range of the movable device, a blind spot can be formed in the moving range of the movable device when the operator operates from one operation position. Even in such a case, in the movement of the movable device, it is possible to prohibit the moving operation of the movable device within the movement range where the worker operating with the operation device 10 becomes a blind spot.

Although the moving range in the one-dimensional direction is divided in this embodiment, the moving range of the movable device is two-dimensional or three-dimensional.
Even in the case where the movement range is expanded in a three-dimensional manner, the movement range can be divided and the operation allowable range for each operation position can be determined. For example, as shown in FIG.
If H is spread two-dimensionally (or three-dimensionally) so as to change the moving direction on the way, it becomes easy to cause a positional relationship that becomes a blind spot due to the structure B or the like in the apparatus. MH is divided into a plurality of operation positions SP1, S
The significance of determining the operation allowable ranges R1 and R2 of P2 becomes large.

In the above embodiment, the operating device 10 controls the control unit 13 with respect to a plurality of device components provided in the device.
The operation device 10 is fixedly installed in each of the operation positions SPA to SPD, while only the operation in the operation allowable ranges RA to RD can be performed for each of the operation positions SPA to SPD. It is not a thing dedicated to each of the above-mentioned device components. That is, in the above embodiment, the operating device 10 can be connected to any of the connection ports 11A to 11D of each of the operation positions SPA to SPD, and can be used anywhere in each of the operation positions SPA to SPD. To SPD. In addition, the operating device 10 of the above embodiment has connection ports 11A to 11A.
D, that is, it has versatility in which an instruction can be given to any of a plurality of device components by changing the operation positions SPA to SPD.

In the above embodiment, the four operating devices 10 (the operating devices 10A to 10D) are provided.
The operation device 10 has versatility for the operation positions SPA to SPD and versatility for the device components, so that at least one operation device is sufficient. However, when two or more are provided, the plurality of operating devices 10 can be operated at the same time, and work efficiency is good.

In the above-described embodiment, the general-purpose operation device 10 capable of instructing operation of a plurality of device components provided in the device is used, and is controlled by the control unit 13 to control each operation position SP.
The configuration is such that only the operation in the operation allowable range RA to RD for each of A to SPD can be performed, but the present invention is not limited to this. For example, a dedicated operation device 10 for each of the operation positions SPA to SPD is configured so that only operation instructions in the operation allowable ranges RA to RD for each of the operation positions SPA to SPD can be performed.
May be connected to the corresponding connection ports 11A to 11D so that a manual operation can be performed at each of the operation positions SPA to SPD. In the case of this configuration, each dedicated operation device 1
In order to prevent 0 from being erroneously connected to uncorresponding connection ports 11A to 11D, it is preferable to configure the connection ports 11A to 11D to have different shapes and the like.

However, in the case of a configuration like this modification,
Although a plurality of types of operation devices 10 must be prepared, and the configuration must be different for each of the connection ports 11A to 11D, the configuration becomes complicated. What is necessary is just to prepare the operation device 10 of
Since the shape and the like may be the same for each of the connection ports 11A to 11D, the configuration can be simplified.

The operation device 10 is not limited to the case where it is detachably connected to the device, but may be operated at any of the operation positions SPA to SPD.
An operation panel (operation means) or the like may be installed and fixed to the apparatus for each operation.

By the way, unlike the case where the operating means is fixedly mounted on the apparatus, the following inconvenience may occur in the case of the configuration in which the operating device 10 is detachably connected to the apparatus as in the above embodiment. Conceivable.

That is, when the operating device 10 is accidentally disconnected from the connection port 11 after giving an operation instruction to operate the device component, the operation of the device component currently operating cannot be immediately stopped. In this case, for example, when the substrate transport robot 6 is being moved,
Is disengaged from the connection port 11, and when the substrate transfer robot 6 is about to hit an operator, the movement of the substrate transfer robot 6 cannot be stopped immediately, which may lead to an unexpected accident.

Therefore, in the case where the operating device 10 is detachably connected to the apparatus, a certain operating device 10 is connected to the connection port 1.
It is preferable that the configuration is such that when it deviates from 1, the operation of the device components currently operating within the operation allowable range of the operating device 10 is automatically stopped.

Such a configuration can be realized by hardware, or can be realized by software.

First, a description will be given of an example of a configuration in the case of realization by hardware. For example, the operation of each robot is generally configured to be performed using a motor such as a servomotor as a drive source. Therefore, when the operation device 10 is disconnected from the connection port 11, the power supply line for supplying power to the motor serving as the drive source of the robot is automatically disconnected (for example, a switch provided on the power supply line is turned off) to drive the motor. The electric circuit may be configured to stop automatically. Further, in an apparatus component device that uses an air cylinder as a drive source, supply and discharge of air to and from the air cylinder are performed by opening and closing a solenoid valve, and when the operating device 10 is disconnected from the connection port 11, the solenoid valve is automatically turned on. The electric circuit may be configured so as to be closed. Other drive sources can also be configured to electrically stop supply of drive energy and the like to the drive source. Further, regarding the liquid supply system, when the operation device 10 is disconnected from the connection port 11, when the liquid supply is automatically stopped, the liquid supply / stop is performed by opening and closing the electromagnetic valve. The electric circuit may be configured to automatically close the solenoid valve when the operating device 10 comes off the connection port 11.

In the case of realizing by software, the control unit 13 is configured so that the connection state of the operation device 10 to the connection port 11 can be grasped by the control unit 13. Is detected, the control unit 13
What is necessary is just to set it as the structure which controls so that operation | movement of the apparatus component currently operating may be stopped.

In the above embodiment, a batch type substrate processing apparatus is taken as an example, but the present invention is not limited to this. For example, the present invention may be applied to a single-wafer type substrate processing apparatus. Can be.

[0104]

As is apparent from the above description, according to the first aspect of the present invention, the manual operation by the operation means can be performed at a plurality of operation positions.
An operation allowable range in which manual operation by the operation means is allowed is determined for each operation position, and the manual operation by the operation means from each operation position is configured so that only operations within the respective operation allowable ranges can be performed. It is possible to prohibit the operation of device components that operate in places that are difficult to see even if the operator who operates the operating means does not become blind spots, even if it does not disappear It is possible to prevent an inconvenience in which a worker working in a place is involved in an unexpected accident. Therefore, the operation performed by operating the operation means can be performed safely.

According to the second aspect of the present invention, a plurality of device components that can be manually operated by the operating means are divided to determine the allowable operation range for each operation position. Even with the substrate processing apparatus provided with the above, the operation performed by operating the operation means can be performed safely.

According to the third aspect of the present invention, in the case where movable components are included in the device components that can be manually operated by the operating means, the allowable operation range for each operation position includes:
Since the movement range of the movable device is included to be divided, even if the movable range of the movable device has a blind spot when the operator operates from one operation position, even if the movable device moves, It is possible to prohibit the moving operation of the movable device within the moving range where the worker operating the means operates in a blind spot.

According to the fourth aspect of the present invention, since the display means for displaying each operation allowable range is provided for each operation position, the operator can know the range which can be operated at each operation position. Operability can be improved.

[Brief description of the drawings]

FIG. 1 is a plan view showing an overall configuration of a substrate processing apparatus according to one embodiment of the present invention.

FIG. 2 is an external view showing a configuration of an operation device.

FIG. 3 is a block diagram illustrating a configuration of an operating device.

FIG. 4 is a diagram showing an example of an operation allowable range for each operation position.

FIG. 5 is a block diagram illustrating a configuration of a control system according to the embodiment.

FIG. 6 is a diagram illustrating another example of an operation allowable range for each operation position.

FIG. 7 is a diagram illustrating an operation allowable range for each operation position in another example of the moving range of the movable device.

[Explanation of symbols]

 2: substrate transfer robot 3: transfer hand exchange unit 4: posture changing robot 5: substrate transfer robot 6: substrate transfer robot 9: shutter mechanism 10 (10A to 10D): operating device 11 (11A to 11D): connection port 13: control unit 53: display unit W: board SP (SPA to SPD): operation position RA, RBC, RB, RC, RD: operation allowable range MH: moving range of movable device

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Toru Kuroiwa 4-chome Tenjin Kitamachi 1-chome, Horikawa-dori-Terauchi, Kamigyo-ku, Kyoto F-term 5F031 CA01 CA02 CA05 CA07 DA17 KA13 PA04 PA10

Claims (4)

[Claims] 1. A substrate processing apparatus capable of manually operating the operation of an apparatus component device using an operation means connected to an apparatus, wherein a manual operation by the operation means can be performed at a plurality of operation positions. With this configuration, an operation allowable range in which the manual operation by the operation means is allowed is determined for each operation position, and the manual operation by the operation means from each operation position can be performed only in the operation allowable range. A substrate processing apparatus characterized by having a configuration as described above. 2. The substrate processing apparatus according to claim 1, wherein there are a plurality of apparatus components that can be manually operated by the operation unit, and an operation allowable range for each operation position is divided into a plurality of apparatus components. A substrate processing apparatus characterized in that the substrate processing apparatus is determined to perform the processing. 3. The substrate processing apparatus according to claim 1, wherein, when a movable device is included in the device component device that can be manually operated by the operation device, an operation allowable range for each operation position includes: A substrate processing apparatus characterized in that the apparatus includes one determined to divide a moving range of a movable device. 4. The substrate processing apparatus according to claim 1, further comprising display means for displaying an operation allowable range for each operation position.