JP2000351611A - Apparatus for collecting sulfur hexafluoride and collecting method thereof - Google Patents

Apparatus for collecting sulfur hexafluoride and collecting method thereof

Info

Publication number
JP2000351611A
JP2000351611A JP11164641A JP16464199A JP2000351611A JP 2000351611 A JP2000351611 A JP 2000351611A JP 11164641 A JP11164641 A JP 11164641A JP 16464199 A JP16464199 A JP 16464199A JP 2000351611 A JP2000351611 A JP 2000351611A
Authority
JP
Japan
Prior art keywords
gas
adsorbent
unit
sulfur hexafluoride
recovery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11164641A
Other languages
Japanese (ja)
Other versions
JP3847489B2 (en
Inventor
Shozo Someyama
省三 染山
Ikuo Kimura
育雄 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP16464199A priority Critical patent/JP3847489B2/en
Publication of JP2000351611A publication Critical patent/JP2000351611A/en
Application granted granted Critical
Publication of JP3847489B2 publication Critical patent/JP3847489B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00Technologies relating to chemical industry
    • Y02P20/151Reduction of greenhouse gas [GHG] emissions, e.g. CO2

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Gas Separation By Absorption (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide the easily treatable subject apparatus capable of reducing the decrease of the purity of collected SF6 gas, and further capable of reducing the amount of generated used adsorbent by mounting plural adsorption units capable of being used independently or by connecting to each other according to the impurity intermixed in the SF6, and regenerating the adsorption units by heating the adsorbent packed in the adsorption units to eliminate the adsorbed impurity. SOLUTION: SF6 gas is collected by operating a collecting unit 2 in a passage of electrical equipment 1 → a degradation gas and reaction product-adsorbing unit 3 → a carbon compound-adsorbing unit 4 → a compressor block 2a → a bomb 2b to the extent of the gas pressure in the interior of the electric equipment 1 becoming about atmospheric pressure. The collecting unit 2 is stopped, and a compressor 4d is operated to recycle a remaining gas in a recycling passage of the electric equipment 1 → the compressor 4d →the electric equipment 1 to allow the impurity in the SF6 gas remaining in the electric equipment 1 to be absorbed to the extent of the prescribed purity. The compressor 4d is stopped and the SF6 gas remaining in the interior of the electric equipment 1 is further collected through a pipe line 10d.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、ガス絶縁変圧器
やガス絶縁開閉装置などに封入した六フッ化硫黄(以
下、SF6 と呼ぶ)ガスを回収する設備およびその回収
方法に関するものである。
BACKGROUND OF THE INVENTION The present invention, sulfur hexafluoride sealed in such gas insulated transformers and gas insulated switchgear (hereinafter referred to as SF 6) to a method equipment and its recovery to recover the gas.

【0002】[0002]

【従来の技術】SF6 ガスは、地球温暖化防止のための
規制対象ガスとして大気への排出が規制されている。こ
のため電気機器に絶縁性ガスとして用いているSF6
スは再生利用することが原則になっている。SF6 ガス
を封入した電気機器は運転中にSF6 ガス中に不純物が
混入しその純度が低下する。純度低下の要因としては、
運転中に機器内部の有機材料から浸出する微量の水分や
空気の混入、機器内部での放電などによって生じる分解
生成物である炭素化合物などの分解ガス、さらにはこの
分解ガスと電気機器の構成材とが反応して形成される反
応生成物質(以下、放電などによって生成する物質を総
称して「分解生成物」と呼ぶ)などである。また、電気
機器の製造工場や設置場所での組立分解、あるいは定期
点検などでのSF6 ガスの回収過程においても水分や空
気などの混入が避けられず、回収したSF6 ガスの純度
が低下する一因となっている。
2. Description of the Related Art The emission of SF 6 gas to the atmosphere is regulated as a regulated gas for preventing global warming. For this reason, it is a principle that SF 6 gas used as an insulating gas in electric equipment is recycled. During operation, impurities are mixed into the SF 6 gas of the electric device in which the SF 6 gas is sealed, and the purity of the SF 6 gas is reduced. The causes of the purity decrease are:
Decomposition gases such as carbon compounds, which are decomposition products generated by the incorporation of trace amounts of water or air leached from organic materials inside the equipment during operation, and discharges inside the equipment, as well as the decomposition gases and components of electrical equipment (Hereinafter, substances generated by electric discharge or the like are collectively referred to as "decomposition products") and the like. In addition, in the process of recovering SF 6 gas at an electrical equipment manufacturing factory or installation site, or during the process of recovering SF 6 gas at regular inspections, contamination of moisture or air is inevitable, and the purity of the recovered SF 6 gas is reduced. It has contributed.

【0003】SF6 ガスの再生利用にあたっては、SF
6 ガス中の不純物除去のために吸着剤を使用するが、放
電などによって生じる分解生成物には有害物質が含まれ
ることがあり使用済みの吸着剤の取扱いには注意を要す
る。しかし、有害物質を含む使用済みの吸着剤が増える
ことは環境面への影響もあり再利用する方法の開発が課
題となっている。吸着剤を再利用するためには再利用が
不可能な部分の量が極力少なく、かつ経済的にSF6
スを精製する手段が必要である。吸着剤を再利用するこ
とは、環境への負担を軽減し、かつSF6 ガスの回収費
用を低減することにほかならない。一方、SF6 ガスを
使用する電気機器の単機容量は徐々に大型化する趨勢に
あり、それに伴ってSF6 ガス回収装置も大型化する必
要がある。さらに、近年では特に都市部でSF6 ガスを
用いる大容量の変電設備などを地下室やビル屋内などに
設置する場合が多く、取扱いの容易なSF6 ガス回収装
置の実現が望まれている。
[0003] When recycling SF 6 gas, SF
6 Adsorbent is used to remove impurities in gas. However, decomposition products generated by electric discharge etc. may contain harmful substances, so care must be taken when handling used adsorbent. However, increasing the amount of used adsorbents containing harmful substances has an impact on the environment, and the development of a method for reusing them has become an issue. In order to reuse the adsorbent, there is a need for a means for purifying SF 6 gas economically, in which the amount of non-reusable parts is as small as possible. Reusing the adsorbent is to reduce the burden on the environment, and none other than reducing the recovery cost of the SF 6 gas. On the other hand, the capacity of a single electric device using SF 6 gas tends to gradually increase, and accordingly, the SF 6 gas recovery device also needs to increase in size. Furthermore, in recent years, large-capacity substation facilities using SF 6 gas are often installed in basements, building interiors, and the like, particularly in urban areas, and realization of an easy-to-handle SF 6 gas recovery apparatus is desired.

【0004】図3は、電気協同研究会資料第54巻第3
号第103頁に記載のガス再生処理設備を示すブロック
図である。このガス再生処理設備では、電気機器から回
収するSF6 ガスに金属フッ化物除去、分解ガス除去、
水分除去および空気除去の各処理を施した後液化して貯
蔵する。、また貯蔵している液化SF6 を気化させて電
気機器に充填する機能を有している。特開平10−23
0124号公報にもほぼ同様の機能を備えたSF6 ガス
回収・精製装置が記載されている。
[0004] FIG. 3 is a diagram of the Electric Cooperative Research Society, Vol.
No. 103 is a block diagram showing a gas regeneration treatment facility described on page 103. In the gas regeneration treatment equipment, metal fluoride removed SF 6 gas recovery from the electrical equipment, the decomposition gas removal,
After being subjected to water removal and air removal treatments, they are liquefied and stored. Also, it has a function of vaporizing the stored liquefied SF 6 and filling it into electric equipment. JP-A-10-23
No. 0124 also discloses an SF 6 gas recovery / purification apparatus having substantially the same function.

【0005】[0005]

【発明が解決しようとする課題】従来のSF6 ガス回収
・精製装置では以下のような問題があった。第1の問題
点は、電気機器の製造工場や設置場所での組立分解、あ
るいは定期点検などでのSF6 ガス回収を一つのSF6
ガス回収・精製装置で行おうとすると、吸着剤の吸着能
力が早期に飽和し頻繁に取替える必要が生じることであ
る。SF6 を封入した電気機器内部で異常放電が発生す
ると、有害なSO2 やHFなどの分解ガスやCuF2
どの反応生成物質を生じるため、使用済み吸着剤の中に
はこれら有害物質を含むことになり、使用済み吸着剤の
保管あるいは処分が大きな負担になる。
The conventional SF 6 gas recovery / purification apparatus has the following problems. The first problem, exploded in a manufacturing plant and the location of the electrical equipment, or of one SF 6 gas recovery in such periodic inspection SF 6
If it is attempted to use a gas recovery / purification apparatus, the adsorption capacity of the adsorbent is saturated at an early stage, and frequent replacement is required. When abnormal electric discharge occurs inside the electric equipment in which SF 6 is sealed, harmful decomposition gases such as SO 2 and HF and reaction products such as CuF 2 are generated. Therefore, these used sorbents include these harmful substances. As a result, storage or disposal of the used adsorbent becomes a heavy burden.

【0006】第2の問題点は、電気機器の運転中に絶縁
体の有機質部分などから放出される水分や空気、さらに
は高温に曝されて生じるCO、CO2 、CF4 、CH4
などの炭素化合物がSF6 ガス中に混入するが、従来の
吸着剤はこれらの成分に対し万能ではないため、回収す
るSF6 ガスの純度が低下することである。第3の問題
点は、従来のSF6 ガス回収・精製装置は圧縮機ユニッ
ト、吸着塔、回収タンクユニットなどを一体化して構成
されており、かさ高くまた大重量であるため、装置の運
搬・搬入・据付け・搬出などの取扱いが容易ではない。
特にSF6 ガスを封入した電気機器が地下室やビル建物
内に設置される場合はSF6ガス回収方法の選択が大き
な問題になる。
[0006] The second problem is that water and air released from the organic portion of the insulator during operation of electric equipment and CO, CO 2 , CF 4 and CH 4 generated by exposure to high temperatures.
Carbon compounds such as are mixed into 6 gas SF, since the conventional adsorbent is not omnipotent for these components, the purity of SF 6 gas recovery is reduced. The third problem is that the conventional SF 6 gas recovery / refining apparatus is configured integrally with a compressor unit, an adsorption tower, a recovery tank unit, etc., and is bulky and heavy, so that the transportation and transportation of the apparatus is difficult. Handling such as loading, installation, and unloading is not easy.
In particular, when an electric device filled with SF 6 gas is installed in a basement or a building, the selection of the SF 6 gas recovery method becomes a major problem.

【0007】この発明は以上のような問題点を解決する
ためになしたもので、取扱いが容易で回収したSF6
スの純度低下が少なく、かつ使用済み吸着剤の発生量が
少なく、その保管あるいは処分が容易なSF6 ガスの回
収方法および回収装置を実現する。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is easy to handle and the purity of recovered SF 6 gas is small, the amount of used adsorbent generated is small, and Alternatively, a recovery method and a recovery apparatus for SF 6 gas that can be easily disposed are realized.

【0008】[0008]

【課題を解決するための手段】この発明によるSF6
ス回収装置は、SF6 ガス中に混在する不純物に応じて
独立しかつ互に任意の組み合せで連結可能な複数の吸着
ユニットを備え、吸着ユニットは装填した吸着剤を加熱
し吸着剤が吸着した不純物を排出する吸着剤再生手段を
備えたものである。また、吸着ユニットに強制循環手段
を備えている。
An SF 6 gas recovery apparatus according to the present invention includes a plurality of adsorption units that can be connected independently and in any combination according to impurities mixed in SF 6 gas. The unit is provided with adsorbent regeneration means for heating the loaded adsorbent and discharging impurities adsorbed by the adsorbent. Further, the suction unit is provided with a forced circulation means.

【0009】この発明によるSF6 ガス回収方法は、密
閉容器内のSF6 ガス圧力がほぼ大気圧になるまで回収
する第1の工程と、強制循環手段によって密閉容器とS
6ガス中に混在する不純物を吸着する吸着ユニットを
経由する循環経路を構成し、密閉容器に残留するSF6
ガスを精製する第2の工程と、密閉容器に残留するSF
6 ガスを真空排気して回収する第3の工程と、吸着ユニ
ットに備えた吸着剤再生手段によって吸着ユニットに装
填する吸着剤を再生する第4の工程を備えている。
The method for recovering SF 6 gas according to the present invention comprises a first step of recovering the SF 6 gas pressure in the closed container until the pressure becomes approximately atmospheric pressure, and a method of forcing the closed container into a closed container by forced circulation means.
A circulation path is formed through an adsorption unit that adsorbs impurities mixed in the F 6 gas, and SF 6 remaining in the closed container is formed.
A second step of purifying the gas and SF remaining in the closed vessel
The method includes a third step of evacuating and recovering the six gases, and a fourth step of regenerating the adsorbent loaded in the adsorption unit by the adsorbent regeneration means provided in the adsorption unit.

【0010】[0010]

【発明の実施の形態】<発明の概要>本発明のもっとも
大きな特徴は、真空ポンプ、圧縮機、冷却器、フイルタ
ーなどからなる回収機能部と、回収・貯蔵タンクとから
なるSF6 ガスの回収ユニットと、種々の不純物に対応
する吸着剤を装填した吸着ユニットの集合体としてSF
6 ガスの回収装置を構成したことにある。さらに、有害
物質を吸着することのない吸着ユニットにおいては、装
填した吸着剤を再生するための機能を付加している。各
ユニットは、電気機器の工場組立時、現地組立時、保守
点検時、異常時の点検、あるいは通常の定期点検等、S
6 ガスの回収状況に合わせて選択的に組合わせること
により任意の運用構成を実現できる。即ち、本発明によ
るSF6 ガスの回収装置はSF6 ガスの回収状況に合わ
せて予め不純物を特定し、その特定した不純物に応じて
吸着ユニットを適用するものであり、このためSF6
スの回収装置がユニット単位で最適化が可能になり、さ
らに有害物質を含まない吸着剤については再生処理でき
る点に特徴がある。
DESCRIPTION OF THE PREFERRED EMBODIMENTS <Outline of the Invention> The most significant feature of the present invention is the recovery function section including a vacuum pump, a compressor, a cooler, and a filter, and the recovery of SF 6 gas including a recovery / storage tank. Unit and an adsorbent unit loaded with adsorbents corresponding to various impurities.
It consists of 6 gas recovery devices. Further, in an adsorption unit that does not adsorb harmful substances, a function for regenerating the loaded adsorbent is added. Each unit is equipped with S, such as when assembling electrical equipment at the factory, at the time of on-site assembly, at the time of maintenance and inspection, at the time of abnormal inspection, or at regular periodic inspection.
Arbitrary operation configurations can be realized by selectively combining them according to the recovery status of F 6 gas. That is, the recovery device of SF 6 gas in accordance with the present invention to identify in advance impurities according to the recovery condition of SF 6 gas, it is intended to apply suction unit in accordance with the identified impurities, the recovery of this for SF 6 gas It is characterized in that the apparatus can be optimized on a unit basis, and the adsorbent containing no harmful substances can be regenerated.

【0011】以下、本発明によるSF6 ガスの回収装置
の運用時の構成方法、運用手順および吸着剤の再生につ
いてその概要を説明する。 1.回収状況に応じて吸着ユニットを選択して運用構成
を設定する。 (1)電気機器に異常が発生した場合は、通常SF6
ス中に分解ガス・反応生成物質および炭素化合物が認め
られることから、これの物質を吸着する吸着ユニットを
用いてSF6 ガスを回収する。 (2)工場組立て、現地組立てまたは定期点検等の場合
は、(1)項のような物質が認められないから、水分お
よび空気に対応する吸着ユニットを用いてSF6ガスを
回収する。 2.SF6 ガスの回収にあたっては、電気機器内部のS
6 ガス圧力が大気圧になるまで回収した後、電気機器
内部の残留SF6 ガスを強制循環手段によって循環させ
て不純物を十分に除去し、真空ポンプによってSF6
スが残存しないように回収する。 3.有害物質を吸着させない吸着ユニットについては、
加熱手段と排気手段とによって吸着ユニット単体で装填
した吸着剤の再生を図る。ただし、有害物質を含む分解
ガス・反応生成物質吸着ユニットについては加熱手段、
排気手段とも設けない。
The outline of the configuration method, operation procedure and regeneration of the adsorbent during operation of the SF 6 gas recovery apparatus according to the present invention will be described below. 1. Select an adsorption unit according to the collection status and set the operation configuration. (1) When an abnormality occurs in the electric equipment, the decomposition gas, the reaction product, and the carbon compound are usually found in the SF 6 gas. Therefore, the SF 6 gas is recovered using an adsorption unit that adsorbs the substance. I do. (2) In the case of factory assembling, on-site assembling, or periodic inspection, etc., since no substance as described in (1) is found, the SF 6 gas is recovered using an adsorption unit corresponding to moisture and air. 2. When recovering SF 6 gas, the S
After recovering the F 6 gas pressure to atmospheric pressure, the residual SF 6 gas inside the electric equipment is circulated by forced circulation means to sufficiently remove impurities, and recovered by a vacuum pump so that the SF 6 gas does not remain. . 3. For adsorption units that do not adsorb harmful substances,
The adsorbent loaded by the adsorption unit alone is regenerated by the heating means and the exhaust means. However, for the adsorption unit for decomposition gases and reaction products containing harmful substances, heating means,
No exhaust means is provided.

【0012】実施の形態1.図1は、この発明の第1の
実施形態であるSF6 ガス回収装置を後述する回収条件
のもとで適用する運用構成を説明するためのブロック図
である。図中、1は例えばガス絶縁変圧器等のSF6
スを封入した電気機器、2は液化式SF6 ガス回収ユニ
ット(以下、単に「回収ユニット」と呼ぶ)であり、真
空ポンプ、圧縮機、冷却器、フイルターなどからなり回
収機能を備えた圧縮機ブロック2a、回収・貯蔵タンク
として機能するボンベ2bからなっている。もちろん、
このボンベは専用の回収・貯蔵タンクであってもよい。
3は分解ガス・反応生成物質吸着ユニットで、分解ガス
・反応生成物質を対象とする吸着剤を封入した吸着筒3
aを備えている。4は炭素化合物吸着ユニットで、炭素
化合物を対象とした吸着剤を封入した吸着筒4a、吸着
筒4aの外周に設けた加熱手段となる電気式のヒータ4
b、吸着筒4aの出口に設けた排気手段となる真空ポン
プ4c、吸着筒4aの他の出口に設けた強制循環手段と
なる圧縮機4dを備えている。10a〜10dは各ユニ
ット間および電気機器1の間を接続する管路で、10e
は電気機器1へのSF6 ガス充填に使用する管路であ
る。
Embodiment 1 FIG. 1 is a block diagram for explaining an operation configuration in which the SF 6 gas recovery device according to the first embodiment of the present invention is applied under recovery conditions described later. In the figure, reference numeral 1 denotes an electric device filled with SF 6 gas such as a gas insulating transformer, and 2 denotes a liquefied SF 6 gas recovery unit (hereinafter simply referred to as “recovery unit”), which includes a vacuum pump, a compressor, It comprises a compressor block 2a comprising a cooler, a filter and the like and having a recovery function, and a cylinder 2b functioning as a recovery / storage tank. of course,
This cylinder may be a dedicated collection and storage tank.
Reference numeral 3 denotes a decomposition gas / reaction product adsorption unit, and an adsorption cylinder 3 in which an adsorbent for the decomposition gas / reaction product is sealed.
a. Reference numeral 4 denotes a carbon compound adsorption unit, an adsorption cylinder 4a in which an adsorbent for a carbon compound is sealed, and an electric heater 4 provided as a heating means provided on the outer periphery of the adsorption cylinder 4a.
b, a vacuum pump 4c serving as an exhaust means provided at the outlet of the adsorption cylinder 4a, and a compressor 4d serving as a forced circulation means provided at another outlet of the adsorption cylinder 4a. 10a to 10d are pipes connecting between the units and between the electric devices 1 and 10e.
Is a pipe used for filling the electric device 1 with SF 6 gas.

【0013】図1に示す運用構成は、電気機器に過熱や
放電などが生じ、SF6 ガスの回収・精製を行うにあた
って、予めSF6 ガス中に分解ガス、反応生成物質ある
いは炭素化合物の存在を検知した場合に適用する。以
下、このような運用構成を用いてSF6 ガスの回収・精
製を行う場合の運用手順を示す。 手順1.回収ユニット2を運転し、電気機器1→分解ガ
ス・反応生成物質吸着ユニット3→炭素化合物吸着ユニ
ット4→圧縮機ブロック2a→ボンベ2bの経路で電気
機器1内部のSF6 ガス圧力が大気圧程度になるまで回
収する。 手順2.回収ユニット2を休止し、残留SF6 ガスの強
制循環用手段となる圧縮機4dを運転し、電気機器1→
分解ガス・反応生成物質吸着ユニット3→炭素化合物吸
着ユニット4→圧縮機4d→電気機器1の循環経路によ
って電気機器1内部に残留するSF6 ガスの不純物を吸
収し規定純度になるまで残留SF6 ガスを循環させる。 手順3.圧縮機4d、分解ガス・反応生成物質吸着ユニ
ット3および炭素化合物吸着ユニット4を休止し、管路
10dを経由して電気機器1→圧縮機ブロック2a→ボ
ンベ2bの経路により電気機器1内部に残存するSF6
ガスをさらに回収する。
[0013] operation configuration shown in Figure 1, and resulting overheating or discharging the electrical device, carrying out the recovery and purification of SF 6 gas, cracked gas in advance SF 6 gas, the presence of the reaction product material or a carbon compound Applies when detected. Hereinafter, an operation procedure in the case of recovering and refining SF 6 gas using such an operation configuration will be described. Procedure 1. The recovery unit 2 is operated, and the pressure of the SF 6 gas inside the electric device 1 is about atmospheric pressure through the route of the electric device 1 → the decomposition gas / reaction product adsorption unit 3 → the carbon compound adsorption unit 4 → the compressor block 2a → the cylinder 2b. Collect until Procedure 2. The recovery unit 2 is stopped, and the compressor 4d serving as a means for forcibly circulating the residual SF 6 gas is operated, and the electric equipment 1 →
Decomposition gas reaction product Adsorption unit 3 → carbon compound adsorption unit 4 → the compressor 4d → residue by circulation path of the electrical apparatus 1 to absorb the impurities of SF 6 gas remaining inside the electric equipment 1 becomes a specified purity SF 6 Circulate gas. Procedure 3. The compressor 4d, the decomposed gas / reaction product adsorbing unit 3 and the carbon compound adsorbing unit 4 are stopped, and remain in the electric device 1 via the line 10d from the electric device 1 to the compressor block 2a to the cylinder 2b. SF 6
Collect more gas.

【0014】図2に示す運用構成は、工場組立て・現地
組立ておよび定期点検などの場合を想定したもので、S
6 ガスの回収・精製と吸着剤の再生をおこなえるよう
に構成しており、水分および空気を吸着する各ユニット
と回収ユニットとからなっている。図中、5は水分吸着
ユニットで、水分を対象とした吸着剤を封入した吸着筒
5a、吸着筒5aの外周に設けた電気ヒータ5b、吸着
筒5aの出口に設けた真空ポンプ5cを備えている。6
は空気吸着ユニットで、空気を対象とした吸着剤を封入
した吸着筒6a、吸着筒の外周に設けた電気ヒータ6
b、吸着筒6aの出口に設けた真空ポンプ6c、吸着筒
6aの他の出口に設けた圧縮機6dを備えている。11
a〜11eは各ユニット間および電気機器1の間を接続
する管路であり、11eは電気機器1へのSF6 ガス充
填に使用する管路である。
The operation configuration shown in FIG. 2 is for the case of factory assembling, on-site assembling and periodic inspection.
It is configured to be able to recover and purify F 6 gas and regenerate the adsorbent, and is composed of a unit that adsorbs moisture and air and a recovery unit. In the figure, reference numeral 5 denotes a moisture adsorption unit, which includes an adsorption cylinder 5a in which an adsorbent for moisture is sealed, an electric heater 5b provided on the outer periphery of the adsorption cylinder 5a, and a vacuum pump 5c provided at an outlet of the adsorption cylinder 5a. I have. 6
Denotes an air adsorption unit, an adsorption cylinder 6a in which an adsorbent for air is sealed, and an electric heater 6 provided on the outer periphery of the adsorption cylinder.
b, a vacuum pump 6c provided at the outlet of the adsorption cylinder 6a, and a compressor 6d provided at the other outlet of the adsorption cylinder 6a. 11
Reference numerals a to 11e denote pipes connecting between the units and between the electric devices 1, and reference numeral 11e denotes a pipe used for filling the electric device 1 with SF 6 gas.

【0015】このような運用構成を用いてSF6 ガスの
回収・精製を行う場合の運用手順を以下に述べる。 手順1.回収ユニット2を運転し、電気機器1→水分吸
着ユニット5→空気吸着ユニット6→圧縮機ブロック2
a→ボンベ2bの経路で、電気機器内部のSF 6 ガス圧
力が大気圧程度になるまで回収する。 手順2.回収ユニット2を休止し、強制循環手段となる
圧縮機6dを運転し、電気機器1→水分吸着ユニット5
→空気吸着ユニット6→圧縮機6d→電気機器1の循環
経路によって電気機器1内部に残存するSF6 ガスの水
分、空気を吸収し規定純度になるまで残留SF6 ガスを
循環させる。 手順3.圧縮機6d、水分吸着ユニット5および空気吸
着ユニット6を休止し、管路11dを経由して電気機器
1→圧縮機ブロック2a→ボンベ2bの経路で電気機器
1内部に残存するSF6 ガスをさらに回収する。
Using such an operation configuration, SF6 Gas
The operation procedure for recovery / purification is described below. Procedure 1. Operate the collection unit 2 and remove the electric equipment 1 → moisture
Arrival unit 5 → air adsorption unit 6 → compressor block 2
a → SF inside the electric equipment on the route of cylinder 2b 6 Gas pressure
Collect until the pressure is about atmospheric pressure. Procedure 2. Pauses the recovery unit 2 and becomes a forced circulation unit
The compressor 6d is operated, and the electric equipment 1 → the moisture adsorption unit 5
→ Air adsorption unit 6 → Compressor 6d → Circulation of electrical equipment 1
SF remaining inside electric device 1 by route6 Gas water
Min, absorb air and remain SF until the specified purity6 Gas
Circulate. Procedure 3. Compressor 6d, moisture absorption unit 5 and air absorption
The receiving unit 6 is stopped, and electrical equipment is connected via the line 11d.
1 → Electrical equipment in the route of compressor block 2a → cylinder 2b
SF remaining inside 16 Collect more gas.

【0016】吸着剤の再生をおこなう場合の運用手順を
下記する。電気機器1および回収ユニット2を切り離
し、それぞれの吸着ユニット単独で真空ポンプ4c、5
c、6cを運転するとともに吸着筒の電気ヒータを所定
時間通電加熱して吸着剤を再生する。なお、分解ガス・
反応生成物質吸着ユニットの吸着剤は、一部有害物質を
吸着しているため、無害化処理等を行い廃棄処分する。
さらにまた、炭素化合物ユニットの吸着剤については、
一部有害物質が含まれている場合、分解ガス・反応生成
物質吸着ユニットと同様無害化処理等を行い廃棄処分す
る。
An operation procedure for regenerating the adsorbent will be described below. The electrical equipment 1 and the recovery unit 2 are separated, and the vacuum pumps 4c, 5c
In operation c and 6c, the electric heater of the adsorption cylinder is energized and heated for a predetermined time to regenerate the adsorbent. The decomposition gas
Since the adsorbent of the reaction product substance adsorption unit partially adsorbs harmful substances, it is subjected to detoxification treatment and discarded.
Furthermore, regarding the adsorbent of the carbon compound unit,
If some harmful substances are contained, detoxify them as in the case of the decomposition gas / reaction product adsorption unit and dispose of them.

【0017】つぎに、本発明によるSF6 ガス回収装置
を設置する場合の取扱について述べる。電気機器1の近
傍に特定したそれぞれの不純物に応じた吸着ユニットと
回収ユニットとを設置する。この場合の運搬、据付け、
搬入・搬出は、分割可能なユニットとなっていることか
らユニット単位で取扱う。設置後はそれぞれのユニット
間を漏洩しないような管路で接続し回収作業に備える。
Next, a description will be given of handling when the SF 6 gas recovery device according to the present invention is installed. An adsorption unit and a recovery unit corresponding to each of the specified impurities are installed near the electric device 1. In this case transportation, installation,
Loading and unloading are handled in unit units because they can be divided. After installation, each unit is connected by a pipeline that does not leak, and is prepared for recovery work.

【0018】以上説明したように、この発明の第1の実
施形態であるSF6 ガス回収装置では、SF6 ガスの回
収状況に合わせて予め不純物を特定しておき、特定した
それぞれの不純物に応じて独立した吸着ユニットを用
い、毒性を考慮する必要のない不純物に対する吸着ユニ
ットについては加熱手段と排気手段とによる吸着剤再生
の機能を備えているので、 1.有害物質を含まない吸着剤については、廃棄するこ
となく再利用できるので、吸着剤の廃棄量を抑制でき
る。 2.吸着剤の再利用によってSF6 ガスの回収がより経
済的に行える。 3.SF6 ガス回収装置を独立したユニット単位で構成
したので、運搬、据付け、搬入・搬出などの取扱いが容
易になる。
As described above, in the SF 6 gas recovery apparatus according to the first embodiment of the present invention, impurities are specified in advance in accordance with the recovery state of SF 6 gas, and according to the specified impurities, In addition, an independent adsorption unit is used, and an adsorption unit for impurities that do not need to consider toxicity has a function of adsorbent regeneration by a heating unit and an exhaust unit. Since the adsorbent containing no harmful substance can be reused without being discarded, the amount of adsorbent discarded can be suppressed. 2. The SF 6 gas can be recovered more economically by reusing the adsorbent. 3. Since the SF 6 gas recovery device is configured as an independent unit, handling such as transportation, installation, loading and unloading becomes easy.

【0019】また、回収ユニットとは独立して、特定の
吸着ユニットと電気機器との間で封入したSF6 ガスを
循環できるように強制循環手段を備えたので、電気機器
内部の残留ガス中の不純物を十分に除去でき、またSF
6 ガスをほぼ100%回収できる。
In addition, independent of the recovery unit, the forced circulation means is provided so that the SF 6 gas sealed between the specific adsorption unit and the electric equipment can be circulated. Impurities can be sufficiently removed, and SF
Almost 100% of 6 gases can be recovered.

【0020】以上の説明では、電気機器に封入したSF
6 ガスを回収・精製するものとしたが、対象の電気機器
はあくまでも例示であって、SF6 ガス貯蔵用タンクな
どの密閉容器にも適用できることはいうまでもない。
In the above description, the SF encapsulated in the electric equipment has been described.
Although the six gases are collected and purified, the target electric equipment is merely an example, and it goes without saying that the present invention can be applied to a closed container such as a SF 6 gas storage tank.

【0021】実施の形態2.第1の実施形態では、分解
ガス・反応生成物質吸着ユニットと炭素化合物吸着ユニ
ットとによるSF6 ガスの回収、水分吸着ユニットと空
気吸着ユニットとによるSF6 ガスの回収について説明
したが、回収状況によっては各吸着ユニットをそれぞれ
単体で使用してもよい。この場合は、状況に応じた最小
の設備とすることができ、運搬、据付け、搬入・搬出な
どの取扱が一層良好になる。さらに、水分吸着ユニット
に空気吸着ユニットと同様に強制循環手段を備えれば単
体ユニットの活用度が一層向上する。
Embodiment 2 FIG. In the first embodiment, the recovery of SF 6 gas by the decomposition gas reaction generant adsorption unit and a carbon compound adsorption units, has been described the recovery of SF 6 gas by the water adsorption unit and air suction unit, by the recovery situation May be used independently of each other. In this case, the minimum equipment according to the situation can be used, and handling such as transportation, installation, loading / unloading, etc. is further improved. Further, if the water adsorption unit is provided with a forced circulation unit like the air adsorption unit, the utilization of the single unit is further improved.

【0022】[0022]

【発明の効果】この発明によるSF6 ガス回収装置は、
SF6 ガス中に混在する不純物に応じて独立しかつ互い
に任意の組み合せで連結可能な複数の吸着ユニットを備
え、吸着ユニットは装填した吸着剤を加熱し吸着剤が吸
着した不純物を排出する吸着剤再生手段を備えたので、
運搬、据付け、搬入・搬出などの取扱いが容易であると
同時に、吸着剤が再生できるため吸着剤の廃棄量が抑制
できSF6 ガスの回収がより経済的に行える。また、吸
着ユニットに強制循環手段を備えているので、吸着剤が
再生が容易である。
The SF 6 gas recovery apparatus according to the present invention
A plurality of adsorption units that can be connected independently and in any combination according to impurities mixed in SF 6 gas are provided. The adsorption unit heats the loaded adsorbent and discharges the impurities adsorbed by the adsorbent. Since it has playback means,
The handling such as transportation, installation, loading and unloading is easy, and at the same time, the adsorbent can be regenerated, so that the amount of the adsorbent to be discarded can be suppressed and the SF 6 gas can be recovered more economically. In addition, since the adsorption unit is provided with the forced circulation means, the adsorbent can be easily regenerated.

【0023】この発明によるSF6 ガス回収方法は、密
閉容器内のSF6 ガス圧力がほぼ大気圧になるまで回収
する第1の工程と、強制循環手段によって密閉容器とS
6ガス中に混在する不純物を吸着する吸着ユニットを
経由する循環経路を構成し、密閉容器に残留するSF6
ガスを精製する第2の工程と、密閉容器に残留するSF
6 ガスを真空排気して回収する第3の工程と、吸着ユニ
ットに備えた吸着剤再生手段によって吸着ユニットに装
填する吸着剤を再生する第4の工程を備えたので、回収
したSF6 ガスの純度が良好になる。
The method for recovering SF 6 gas according to the present invention comprises a first step of recovering the SF 6 gas pressure in the closed vessel until the pressure becomes approximately atmospheric pressure, and a step of forcibly circulating the closed vessel by forced circulation means.
A circulation path is formed through an adsorption unit that adsorbs impurities mixed in the F 6 gas, and SF 6 remaining in the closed container is formed.
A second step of purifying the gas and SF remaining in the closed vessel
A third step of recovering the 6 gas is evacuated, since a fourth step of regenerating the adsorbent loading in the adsorption unit by the adsorbent regeneration means provided in the suction unit, the recovered SF 6 gas Good purity.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明によるSF6 ガスの回収装置の第1の
運用構成を説明するためのブロック図である。
FIG. 1 is a block diagram illustrating a first operation configuration of an SF 6 gas recovery device according to the present invention.

【図2】 本発明によるSF6 ガスの回収装置の第1の
運用構成を説明するためのブロック図である。
FIG. 2 is a block diagram illustrating a first operation configuration of the SF 6 gas recovery device according to the present invention.

【図3】 従来のSF6 ガス精製設備のブロック図であ
る。
FIG. 3 is a block diagram of a conventional SF 6 gas purification facility.

【符号の説明】[Explanation of symbols]

1‥SF6 封入電気機器、2‥回収ユニット 3‥分解ガス・反応生成物質吸着ユニット、4‥炭素化
合物吸着ユニット 5‥水分吸着ユニット、6‥空気吸着ユニット
1. SF 6 sealed electric equipment, 2. Recovery unit 3. Decomposed gas / reaction product adsorption unit, 4. Carbon compound adsorption unit 5. Water adsorption unit, 6. Air adsorption unit

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4D012 CA20 CB01 CD05 CH04 CJ03 CJ07 4D020 AA10 BC02 BC06 CA05 CC02 CD03  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 4D012 CA20 CB01 CD05 CH04 CJ03 CJ07 4D020 AA10 BC02 BC06 CA05 CC02 CD03

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 密閉容器に封入した六フッ化硫黄ガスを
液化して回収する六フッ化硫黄ガス回収装置において、
前記六フッ化硫黄ガス中に混在する不純物に応じて独立
しかつ互に任意の組み合せで連結可能な複数の吸着ユニ
ットを備え、該吸着ユニットは装填した吸着剤を加熱し
該吸着剤が吸着した前記不純物を排出する吸着剤再生手
段を備えたことを特徴とする六フッ化硫黄ガスの回収装
置。
1. A sulfur hexafluoride gas recovery device for liquefying and recovering a sulfur hexafluoride gas sealed in a closed container,
A plurality of adsorption units that can be connected independently and in any combination with each other according to impurities mixed in the sulfur hexafluoride gas are provided, and the adsorption unit heats the loaded adsorbent and adsorbs the adsorbent. An apparatus for recovering sulfur hexafluoride gas, comprising an adsorbent regenerating means for discharging the impurities.
【請求項2】 前記吸着ユニットに強制循環手段を備え
たことを特徴とする請求項1記載の六フッ化硫黄ガス回
収装置。
2. The sulfur hexafluoride gas recovery device according to claim 1, wherein said adsorption unit is provided with a forced circulation means.
【請求項3】 密閉容器に封入した六フッ化硫黄ガスを
液化して回収する六フッ化硫黄ガス回収方法において、
前記密閉容器内の前記六フッ化硫黄ガス圧力がほぼ大気
圧になるまで回収する第1の工程と、強制循環手段によ
って前記密閉容器と前記六フッ化硫黄ガス中に混在する
不純物を吸着する吸着ユニットを経由する循環経路を構
成し、前記密閉容器に残留する前記六フッ化硫黄ガスを
精製する第2の工程と、前記密閉容器に残留する前記六
フッ化硫黄ガスを真空排気して回収する第3の工程と、
前記吸着ユニットに備えた吸着剤再生手段によって前記
吸着ユニットに装填する吸着剤を再生する第4の工程を
備えたことを特徴とする六フッ化硫黄ガスの回収方法。
3. A sulfur hexafluoride gas recovery method for liquefying and recovering a sulfur hexafluoride gas sealed in a closed container,
A first step of recovering the pressure of the sulfur hexafluoride gas in the closed container until the pressure becomes approximately atmospheric pressure; A second step of forming a circulation route through a unit to purify the sulfur hexafluoride gas remaining in the closed container, and collecting the sulfur hexafluoride gas remaining in the closed container by evacuating the gas; A third step;
A method for recovering a sulfur hexafluoride gas, comprising: a fourth step of regenerating an adsorbent loaded in the adsorption unit by an adsorbent regeneration unit provided in the adsorption unit.
JP16464199A 1999-06-11 1999-06-11 Sulfur hexafluoride gas recovery device and recovery method thereof Expired - Fee Related JP3847489B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16464199A JP3847489B2 (en) 1999-06-11 1999-06-11 Sulfur hexafluoride gas recovery device and recovery method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16464199A JP3847489B2 (en) 1999-06-11 1999-06-11 Sulfur hexafluoride gas recovery device and recovery method thereof

Publications (2)

Publication Number Publication Date
JP2000351611A true JP2000351611A (en) 2000-12-19
JP3847489B2 JP3847489B2 (en) 2006-11-22

Family

ID=15797057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16464199A Expired - Fee Related JP3847489B2 (en) 1999-06-11 1999-06-11 Sulfur hexafluoride gas recovery device and recovery method thereof

Country Status (1)

Country Link
JP (1) JP3847489B2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101962176A (en) * 2010-10-18 2011-02-02 天津市泰亨气体有限公司 Method for recycling sulfur hexafluoride in mixed gas
CN101973527A (en) * 2010-10-18 2011-02-16 天津市泰旭物流有限公司 Technology for producing sulfur hexafluoride by utilizing fluorine and sulfur steam reaction method
CN103691273A (en) * 2012-09-27 2014-04-02 江苏省电力公司南通供电公司 Processing method of sulfur hexafluoride breaker gas adsorbent
CN113353892A (en) * 2021-05-28 2021-09-07 南通虹登机械设备有限公司 Gas purification system for SF6 gas station and purification method thereof
CN114326692A (en) * 2022-03-14 2022-04-12 氢山(北京)氢内燃机技术研究院有限公司 Control test system of hydrogen diesel locomotive microcomputer
CN115127018A (en) * 2022-07-14 2022-09-30 南通科源电力设备有限公司 Special SF6 gas full-function recovery device for vehicle-mounted transformer substation
CN116025838A (en) * 2022-12-29 2023-04-28 国网河北省电力有限公司电力科学研究院 Sulfur hexafluoride gas recovery device based on Internet of things
JP7284551B1 (en) * 2023-03-14 2023-05-31 日本協同エネルギー株式会社 Sulfur hexafluoride gas storage structure and storage method
CN116025838B (en) * 2022-12-29 2024-06-11 国网河北省电力有限公司电力科学研究院 Sulfur hexafluoride gas recovery device based on Internet of things

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101962176A (en) * 2010-10-18 2011-02-02 天津市泰亨气体有限公司 Method for recycling sulfur hexafluoride in mixed gas
CN101973527A (en) * 2010-10-18 2011-02-16 天津市泰旭物流有限公司 Technology for producing sulfur hexafluoride by utilizing fluorine and sulfur steam reaction method
CN103691273A (en) * 2012-09-27 2014-04-02 江苏省电力公司南通供电公司 Processing method of sulfur hexafluoride breaker gas adsorbent
CN103691273B (en) * 2012-09-27 2017-05-24 江苏省电力公司南通供电公司 Processing method of sulfur hexafluoride breaker gas adsorbent
CN113353892A (en) * 2021-05-28 2021-09-07 南通虹登机械设备有限公司 Gas purification system for SF6 gas station and purification method thereof
CN114326692B (en) * 2022-03-14 2022-05-10 氢山(北京)氢内燃机技术研究院有限公司 Control test system of hydrogen diesel locomotive microcomputer
CN114326692A (en) * 2022-03-14 2022-04-12 氢山(北京)氢内燃机技术研究院有限公司 Control test system of hydrogen diesel locomotive microcomputer
US11703417B1 (en) 2022-03-14 2023-07-18 New Automobile Co., Ltd Hydrogen overflow and exhaust gas hydrogen treatment unit of a test system of a hydrogen internal combustion engine vehicle
CN115127018A (en) * 2022-07-14 2022-09-30 南通科源电力设备有限公司 Special SF6 gas full-function recovery device for vehicle-mounted transformer substation
CN115127018B (en) * 2022-07-14 2023-06-16 南通科源电力设备有限公司 SF6 gas full-function recovery device special for vehicle-mounted transformer substation
CN116025838A (en) * 2022-12-29 2023-04-28 国网河北省电力有限公司电力科学研究院 Sulfur hexafluoride gas recovery device based on Internet of things
CN116025838B (en) * 2022-12-29 2024-06-11 国网河北省电力有限公司电力科学研究院 Sulfur hexafluoride gas recovery device based on Internet of things
JP7284551B1 (en) * 2023-03-14 2023-05-31 日本協同エネルギー株式会社 Sulfur hexafluoride gas storage structure and storage method

Also Published As

Publication number Publication date
JP3847489B2 (en) 2006-11-22

Similar Documents

Publication Publication Date Title
KR100308404B1 (en) SF6 gas recovery and purification treatment apparatus and method
US4740982A (en) Method of refining rare gas halide excimer laser gas
RU2366873C2 (en) System and method for sulphur hexafluoride extraction in gaseous phase
JP2001185539A (en) System and method for collecting gas
JP3847489B2 (en) Sulfur hexafluoride gas recovery device and recovery method thereof
JP3237514B2 (en) Sulfur hexafluoride gas recovery and regeneration device and mobile recovery and regeneration device
US20070157804A1 (en) Method and apparatus for decommissioning and recycling retired adsorbent-based fluid storage and dispensing vessels
JP3628439B2 (en) Concentration method of krypton in oxygen-nitrogen mixed gas
JP4548891B2 (en) Organic solvent recovery method
JP2011057491A (en) Method for recovering gas
JP2000300955A (en) Facility for treatment of lean gaseous hydrocarbon contained in waste gas
JPS61200837A (en) Treatment of exhaust gas
JP2007197472A (en) Method for reutilizing hydrocarbons
JP3645237B2 (en) Recycling method of adsorbents in processing facilities for pollutants contaminated with organohalogen compounds
JP2001129344A (en) Sf6 gas recovery apparatus
JP2000015056A (en) Recovery of fluoride
JP2001300249A (en) Electrical discharge gas treatment method combined with use of adsorbent
JP3993800B2 (en) Method for treating PCB-containing exhaust gas
WO2011030513A1 (en) Adsorbent material and xenon adsorption device using same
US5259853A (en) Vent gas processing scheme with vacuum swing adsorption
CN110917809B (en) Method and device for adsorbing and regenerating solid adsorbent for adsorbing moisture
JP2002114504A (en) Device and method for recovering sf6 gas
KR102295599B1 (en) Radioactive gas removal device that improves cfvs performance by lowering the pressure of the filtration exhaust container
KR970004281B1 (en) Circulated air filtering system for eliminating chemical agent
JPH05337323A (en) Method for recovering solvent

Legal Events

Date Code Title Description
A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20040126

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20050624

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20051028

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20060808

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20060823

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090901

Year of fee payment: 3

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100901

Year of fee payment: 4

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110901

Year of fee payment: 5

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110901

Year of fee payment: 5

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120901

Year of fee payment: 6

LAPS Cancellation because of no payment of annual fees